JP2003534540A5 - - Google Patents
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- Publication number
- JP2003534540A5 JP2003534540A5 JP2001586411A JP2001586411A JP2003534540A5 JP 2003534540 A5 JP2003534540 A5 JP 2003534540A5 JP 2001586411 A JP2001586411 A JP 2001586411A JP 2001586411 A JP2001586411 A JP 2001586411A JP 2003534540 A5 JP2003534540 A5 JP 2003534540A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US20573600P | 2000-05-19 | 2000-05-19 | |
| US60/205,736 | 2000-05-19 | ||
| PCT/US2001/002470 WO2001090685A2 (en) | 2000-05-19 | 2001-01-25 | Height scanning interferometer for determining the absolute position and surface profile of an object with respect to a datum |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003534540A JP2003534540A (ja) | 2003-11-18 |
| JP2003534540A5 true JP2003534540A5 (ja) | 2010-10-14 |
| JP4597467B2 JP4597467B2 (ja) | 2010-12-15 |
Family
ID=22763431
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001586411A Expired - Lifetime JP4597467B2 (ja) | 2000-05-19 | 2001-01-25 | 基準面に対する物体の絶対位置及び表面プロファイルを測定するための高さ走査干渉計 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4597467B2 (ja) |
| AU (1) | AU2001241427A1 (ja) |
| DE (1) | DE10196214B4 (ja) |
| WO (1) | WO2001090685A2 (ja) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101167893B1 (ko) | 2003-03-06 | 2012-07-30 | 지고 코포레이션 | 주사 간섭측정을 이용한 복합 표면 구조의 프로파일링 |
| JP4203831B2 (ja) * | 2006-11-30 | 2009-01-07 | 独立行政法人産業技術総合研究所 | 光学材料の群屈折率精密計測方法 |
| EP2327956B1 (en) * | 2009-11-20 | 2014-01-22 | Mitutoyo Corporation | Method and apparatus for determining the height of a number of spatial positions on a sample |
| EP3001140B1 (en) * | 2013-05-20 | 2023-06-07 | Koh Young Technology Inc. | Shape measuring device using frequency scanning interferometer |
| CN108917641B (zh) * | 2018-05-15 | 2020-08-04 | 广东工业大学 | 基于激光器波数合成的样件内部轮廓检测方法及系统 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5042949A (en) * | 1989-03-17 | 1991-08-27 | Greenberg Jeffrey S | Optical profiler for films and substrates |
| US5218424A (en) * | 1991-03-19 | 1993-06-08 | Zygo Corporation | Flying height and topography measuring interferometer |
| US5173746A (en) * | 1991-05-21 | 1992-12-22 | Wyko Corporation | Method for rapid, accurate measurement of step heights between dissimilar materials |
| US5390023A (en) * | 1992-06-03 | 1995-02-14 | Zygo Corporation | Interferometric method and apparatus to measure surface topography |
| WO1993024805A1 (en) * | 1992-06-03 | 1993-12-09 | Zygo Corporation | Interferometric method and apparatus to measure surface topography |
| US5398113A (en) * | 1993-02-08 | 1995-03-14 | Zygo Corporation | Method and apparatus for surface topography measurement by spatial-frequency analysis of interferograms |
| US5471303A (en) * | 1994-04-29 | 1995-11-28 | Wyko Corporation | Combination of white-light scanning and phase-shifting interferometry for surface profile measurements |
| US5555471A (en) * | 1995-05-24 | 1996-09-10 | Wyko Corporation | Method for measuring thin-film thickness and step height on the surface of thin-film/substrate test samples by phase-shifting interferometry |
| US5602643A (en) * | 1996-02-07 | 1997-02-11 | Wyko Corporation | Method and apparatus for correcting surface profiles determined by phase-shifting interferometry according to optical parameters of test surface |
| JP2000121317A (ja) * | 1998-10-12 | 2000-04-28 | Hitachi Electronics Eng Co Ltd | 光干渉計の干渉位相検出方式 |
-
2001
- 2001-01-25 JP JP2001586411A patent/JP4597467B2/ja not_active Expired - Lifetime
- 2001-01-25 DE DE10196214T patent/DE10196214B4/de not_active Expired - Lifetime
- 2001-01-25 AU AU2001241427A patent/AU2001241427A1/en not_active Abandoned
- 2001-01-25 WO PCT/US2001/002470 patent/WO2001090685A2/en active Application Filing