JP2003523507A5 - - Google Patents
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- Publication number
- JP2003523507A5 JP2003523507A5 JP2001560630A JP2001560630A JP2003523507A5 JP 2003523507 A5 JP2003523507 A5 JP 2003523507A5 JP 2001560630 A JP2001560630 A JP 2001560630A JP 2001560630 A JP2001560630 A JP 2001560630A JP 2003523507 A5 JP2003523507 A5 JP 2003523507A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US18230600P | 2000-02-14 | 2000-02-14 | |
| US60/182,306 | 2000-02-14 | ||
| PCT/US2001/004609 WO2001061284A1 (en) | 2000-02-14 | 2001-02-14 | Method and apparatus for balancing resistance |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003523507A JP2003523507A (ja) | 2003-08-05 |
| JP2003523507A5 true JP2003523507A5 (ja) | 2007-11-08 |
Family
ID=22667893
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001560630A Withdrawn JP2003523507A (ja) | 2000-02-14 | 2001-02-14 | 抵抗値を平衡させる方法および装置 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US6539792B2 (ja) |
| EP (1) | EP1257790A1 (ja) |
| JP (1) | JP2003523507A (ja) |
| KR (1) | KR100808727B1 (ja) |
| AU (1) | AU2001238204A1 (ja) |
| TW (1) | TW514720B (ja) |
| WO (1) | WO2001061284A1 (ja) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6627465B2 (en) * | 2001-08-30 | 2003-09-30 | Micron Technology, Inc. | System and method for detecting flow in a mass flow controller |
| US7762958B1 (en) * | 2001-12-19 | 2010-07-27 | Abbott Cardiovascular Systems Inc. | Method and apparatus for determining injection depth and tissue type |
| EP1523660A1 (en) | 2002-07-19 | 2005-04-20 | Celerity Group, Inc. | Variable resistance sensor with common reference leg |
| WO2005071367A1 (en) * | 2004-01-08 | 2005-08-04 | Analog Devices, Inc. | Anemometer circuit |
| US20070084280A1 (en) * | 2005-08-26 | 2007-04-19 | Gill Rajinder S | Semi-constant temperature excitation method for fluid flow sensors |
| JP4467603B2 (ja) * | 2007-05-29 | 2010-05-26 | 日立オートモティブシステムズ株式会社 | ガス流量計及び内燃機関制御システム |
| US8564274B2 (en) | 2009-01-24 | 2013-10-22 | Micron Technology, Inc. | Reference voltage generation for single-ended communication channels |
| GB2533936B (en) | 2015-01-07 | 2017-10-25 | Homeserve Plc | Flow detection device |
| US10151772B2 (en) | 2015-01-23 | 2018-12-11 | Embry-Riddle Aeronautical Univeristy, Inc. | Hot wire anemometer |
| GB201501935D0 (en) | 2015-02-05 | 2015-03-25 | Tooms Moore Consulting Ltd And Trow Consulting Ltd | Water flow analysis |
| USD800591S1 (en) | 2016-03-31 | 2017-10-24 | Homeserve Plc | Flowmeter |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5998217A (ja) | 1982-11-26 | 1984-06-06 | Fujikin:Kk | 流量制御装置 |
| US4672997A (en) | 1984-10-29 | 1987-06-16 | Btu Engineering Corporation | Modular, self-diagnostic mass-flow controller and system |
| JPH0676897B2 (ja) | 1986-05-27 | 1994-09-28 | 株式会社エステツク | 熱式流量計 |
| JP2631481B2 (ja) | 1987-12-08 | 1997-07-16 | 株式会社 リンテック | 質量流量計とその計測方法 |
| US4843881A (en) * | 1987-12-24 | 1989-07-04 | Aalborg Instruments & Controls | Fluid flow sensor system |
| JPH03156509A (ja) | 1989-11-14 | 1991-07-04 | Stec Kk | マスフローコントローラ |
| WO1991019959A1 (en) | 1990-06-14 | 1991-12-26 | Unit Instruments, Inc. | Thermal mass flow sensor |
| US5062446A (en) | 1991-01-07 | 1991-11-05 | Sematech, Inc. | Intelligent mass flow controller |
| DE4219551C2 (de) * | 1991-06-13 | 1996-04-18 | Mks Japan Inc | Massenströmungssensor |
| US5141021A (en) | 1991-09-06 | 1992-08-25 | Stec Inc. | Mass flow meter and mass flow controller |
| JP2692770B2 (ja) | 1992-09-30 | 1997-12-17 | シーケーディ株式会社 | マスフローコントローラ流量検定システム |
| US6044701A (en) | 1992-10-16 | 2000-04-04 | Unit Instruments, Inc. | Thermal mass flow controller having orthogonal thermal mass flow sensor |
| US5441076A (en) | 1992-12-11 | 1995-08-15 | Tokyo Electron Limited | Processing apparatus using gas |
| JPH0784650A (ja) | 1993-07-23 | 1995-03-31 | Hitachi Metals Ltd | マスフローコントローラ、その運転方法及び電磁弁 |
| US5660207A (en) | 1994-12-29 | 1997-08-26 | Tylan General, Inc. | Flow controller, parts of flow controller, and related method |
| JP3229168B2 (ja) | 1995-06-14 | 2001-11-12 | 日本エム・ケー・エス株式会社 | 流量検出装置 |
| US5684245A (en) | 1995-11-17 | 1997-11-04 | Mks Instruments, Inc. | Apparatus for mass flow measurement of a gas |
| US5944048A (en) | 1996-10-04 | 1999-08-31 | Emerson Electric Co. | Method and apparatus for detecting and controlling mass flow |
| US5911238A (en) | 1996-10-04 | 1999-06-15 | Emerson Electric Co. | Thermal mass flowmeter and mass flow controller, flowmetering system and method |
| US5865205A (en) | 1997-04-17 | 1999-02-02 | Applied Materials, Inc. | Dynamic gas flow controller |
| US6119710A (en) | 1999-05-26 | 2000-09-19 | Cyber Instrument Technologies Llc | Method for wide range gas flow system with real time flow measurement and correction |
| US6449571B1 (en) | 1999-07-09 | 2002-09-10 | Mykrolis Corporation | System and method for sensor response linearization |
| US6343617B1 (en) | 1999-07-09 | 2002-02-05 | Millipore Corporation | System and method of operation of a digital mass flow controller |
| US6575027B1 (en) | 1999-07-09 | 2003-06-10 | Mykrolis Corporation | Mass flow sensor interface circuit |
| US6445980B1 (en) | 1999-07-10 | 2002-09-03 | Mykrolis Corporation | System and method for a variable gain proportional-integral (PI) controller |
| US6404612B1 (en) | 1999-07-10 | 2002-06-11 | Mykrolis Corporation | Method for system for driving a solenoid |
| US6389364B1 (en) | 1999-07-10 | 2002-05-14 | Mykrolis Corporation | System and method for a digital mass flow controller |
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2001
- 2001-02-14 KR KR1020027010507A patent/KR100808727B1/ko not_active IP Right Cessation
- 2001-02-14 WO PCT/US2001/004609 patent/WO2001061284A1/en active Application Filing
- 2001-02-14 US US09/783,439 patent/US6539792B2/en not_active Expired - Fee Related
- 2001-02-14 AU AU2001238204A patent/AU2001238204A1/en not_active Abandoned
- 2001-02-14 TW TW090103216A patent/TW514720B/zh not_active IP Right Cessation
- 2001-02-14 EP EP01910613A patent/EP1257790A1/en not_active Withdrawn
- 2001-02-14 JP JP2001560630A patent/JP2003523507A/ja not_active Withdrawn