JP2003513407A - 改良された熱電界放出の整列 - Google Patents

改良された熱電界放出の整列

Info

Publication number
JP2003513407A
JP2003513407A JP2000577692A JP2000577692A JP2003513407A JP 2003513407 A JP2003513407 A JP 2003513407A JP 2000577692 A JP2000577692 A JP 2000577692A JP 2000577692 A JP2000577692 A JP 2000577692A JP 2003513407 A JP2003513407 A JP 2003513407A
Authority
JP
Japan
Prior art keywords
electrode
emission source
field emission
thermal field
microcolumn
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000577692A
Other languages
English (en)
Japanese (ja)
Inventor
エイチ． エス． キム，
エル． ピー． マレイ，
タイ−ホン， フィリップ チャン，
Original Assignee
エテック システムズ インコーポレイテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エテック システムズ インコーポレイテッド filed Critical エテック システムズ インコーポレイテッド
Publication of JP2003513407A publication Critical patent/JP2003513407A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/15—Means for deflecting or directing discharge
    • H01J2237/1501—Beam alignment means or procedures

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
JP2000577692A 1998-10-21 1999-10-07 改良された熱電界放出の整列 Pending JP2003513407A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US17661398A 1998-10-21 1998-10-21
US09/176,613 1998-10-21
PCT/US1999/023704 WO2000024030A2 (en) 1998-10-21 1999-10-07 Improved alignment of a thermal field emission electron source and application in a microcolumn

Publications (1)

Publication Number Publication Date
JP2003513407A true JP2003513407A (ja) 2003-04-08

Family

ID=22645098

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000577692A Pending JP2003513407A (ja) 1998-10-21 1999-10-07 改良された熱電界放出の整列

Country Status (4)

Country Link
EP (1) EP1145272A3 (ko)
JP (1) JP2003513407A (ko)
KR (1) KR20010080286A (ko)
WO (1) WO2000024030A2 (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016531413A (ja) * 2013-09-16 2016-10-06 ケーエルエー−テンカー コーポレイション 多重極の電極構造を組み込んだ電子エミッタデバイス
JPWO2022003770A1 (ko) * 2020-06-29 2022-01-06

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6288401B1 (en) * 1999-07-30 2001-09-11 Etec Systems, Inc. Electrostatic alignment of a charged particle beam
US6512235B1 (en) * 2000-05-01 2003-01-28 El-Mul Technologies Ltd. Nanotube-based electron emission device and systems using the same
US9484179B2 (en) * 2012-12-18 2016-11-01 General Electric Company X-ray tube with adjustable intensity profile
US10388489B2 (en) 2017-02-07 2019-08-20 Kla-Tencor Corporation Electron source architecture for a scanning electron microscopy system
KR20210132599A (ko) * 2020-04-24 2021-11-04 아이엠에스 나노패브릭케이션 게엠베하 대전 입자 소스

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3358174A (en) * 1964-12-18 1967-12-12 Gen Electric Electron gun having a segmented control electrode
DE3138896A1 (de) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Elektronenoptisches system mit vario-formstrahl zur erzeugung und messung von mikrostrukturen
US4588928A (en) * 1983-06-15 1986-05-13 At&T Bell Laboratories Electron emission system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016531413A (ja) * 2013-09-16 2016-10-06 ケーエルエー−テンカー コーポレイション 多重極の電極構造を組み込んだ電子エミッタデバイス
JPWO2022003770A1 (ko) * 2020-06-29 2022-01-06
WO2022003770A1 (ja) * 2020-06-29 2022-01-06 株式会社日立ハイテク 電子源、電子銃、及び荷電粒子線装置
JP7366266B2 (ja) 2020-06-29 2023-10-20 株式会社日立ハイテク 電子源、電子銃、及び荷電粒子線装置

Also Published As

Publication number Publication date
WO2000024030A2 (en) 2000-04-27
KR20010080286A (ko) 2001-08-22
EP1145272A2 (en) 2001-10-17
EP1145272A3 (en) 2002-11-27
WO2000024030A3 (en) 2002-10-10

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