JP2003506741A - 走査干渉計近視野共焦点顕微鏡 - Google Patents

走査干渉計近視野共焦点顕微鏡

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Publication number
JP2003506741A
JP2003506741A JP2001514618A JP2001514618A JP2003506741A JP 2003506741 A JP2003506741 A JP 2003506741A JP 2001514618 A JP2001514618 A JP 2001514618A JP 2001514618 A JP2001514618 A JP 2001514618A JP 2003506741 A JP2003506741 A JP 2003506741A
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JP
Japan
Prior art keywords
detector
mask
field
aperture
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001514618A
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English (en)
Japanese (ja)
Inventor
アレン ヒル、ヘンリー
Original Assignee
ゼテティック・インスティチュート
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ゼテティック・インスティチュート filed Critical ゼテティック・インスティチュート
Publication of JP2003506741A publication Critical patent/JP2003506741A/ja
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0056—Optical details of the image generation based on optical coherence, e.g. phase-contrast arrangements, interference arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0068—Optical details of the image generation arrangements using polarisation
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/10532—Heads
    • G11B11/10534—Heads for recording by magnetising, demagnetising or transfer of magnetisation, by radiation, e.g. for thermomagnetic recording
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/10532—Heads
    • G11B11/10541—Heads for reproducing
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/004—Recording, reproducing or erasing methods; Read, write or erase circuits therefor
    • G11B7/0045—Recording
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/004—Recording, reproducing or erasing methods; Read, write or erase circuits therefor
    • G11B7/005—Reproducing
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1356—Double or multiple prisms, i.e. having two or more prisms in cooperation
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1372—Lenses
    • G11B7/1374—Objective lenses
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1387—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector using the near-field effect

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Microscoopes, Condenser (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP2001514618A 1999-08-02 2000-08-02 走査干渉計近視野共焦点顕微鏡 Pending JP2003506741A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14719699P 1999-08-02 1999-08-02
US60/147,196 1999-08-02
PCT/US2000/021090 WO2001009662A2 (fr) 1999-08-02 2000-08-02 Microscopie interferometrique confocale a balayage a champ proche

Publications (1)

Publication Number Publication Date
JP2003506741A true JP2003506741A (ja) 2003-02-18

Family

ID=22520628

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001514618A Pending JP2003506741A (ja) 1999-08-02 2000-08-02 走査干渉計近視野共焦点顕微鏡

Country Status (2)

Country Link
JP (1) JP2003506741A (fr)
WO (1) WO2001009662A2 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007507744A (ja) * 2003-09-30 2007-03-29 テクニッシェ ユニヴァージテート デルフト 光学像を取得する光学顕微鏡および方法
JP2008003597A (ja) * 2006-06-19 2008-01-10 Polytec Gmbh 物体の光学的測定を行うための走査型顕微鏡
JP2012060131A (ja) * 2010-09-13 2012-03-22 Asml Netherlands Bv アライメント測定システム、リソグラフィ装置、およびリソグラフィ装置においてのアライメントを決定する方法
JP2015038474A (ja) * 2013-08-08 2015-02-26 ジェイエスエムエスダブリュー テクノロジー リミテッド・ライアビリティー・カンパニーＪＳＭＳＷ Ｔｅｃｈｎｏｌｏｇｙ ＬＬＣ 位相制御モデルに基づくオーバーレイ測定システム及び方法
KR20150024425A (ko) * 2012-06-26 2015-03-06 케이엘에이-텐코 코포레이션 디바이스형 산란측정 오버레이 타겟

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2001288228A1 (en) * 2000-07-27 2002-02-13 Zetetic Institute Multiple-source arrays for confocal and near-field microscopy

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4659429A (en) * 1983-08-03 1987-04-21 Cornell Research Foundation, Inc. Method and apparatus for production and use of nanometer scale light beams
US5371588A (en) * 1993-11-10 1994-12-06 University Of Maryland, College Park Surface profile and material mapper using a driver to displace the sample in X-Y-Z directions
DE69625292T2 (de) * 1995-08-04 2003-09-04 Ibm Interferometrischer Nahfeldapparat und Verfahren
US5602820A (en) * 1995-08-24 1997-02-11 International Business Machines Corporation Method and apparatus for mass data storage
US5760901A (en) * 1997-01-28 1998-06-02 Zetetic Institute Method and apparatus for confocal interference microscopy with background amplitude reduction and compensation

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007507744A (ja) * 2003-09-30 2007-03-29 テクニッシェ ユニヴァージテート デルフト 光学像を取得する光学顕微鏡および方法
JP2008003597A (ja) * 2006-06-19 2008-01-10 Polytec Gmbh 物体の光学的測定を行うための走査型顕微鏡
JP2012060131A (ja) * 2010-09-13 2012-03-22 Asml Netherlands Bv アライメント測定システム、リソグラフィ装置、およびリソグラフィ装置においてのアライメントを決定する方法
JP2014132695A (ja) * 2010-09-13 2014-07-17 Asml Netherlands Bv アライメント測定システム、リソグラフィ装置、およびリソグラフィ装置においてのアライメントを決定する方法
US9046385B2 (en) 2010-09-13 2015-06-02 Asml Netherlands B.V. Alignment measurement system, lithographic apparatus, and a method to determine alignment in a lithographic apparatus
US9280057B2 (en) 2010-09-13 2016-03-08 Asml Netherlands B.V. Alignment measurement system, lithographic apparatus, and a method to determine alignment of in a lithographic apparatus
KR20150024425A (ko) * 2012-06-26 2015-03-06 케이엘에이-텐코 코포레이션 디바이스형 산란측정 오버레이 타겟
JP2015528922A (ja) * 2012-06-26 2015-10-01 ケーエルエー−テンカー コーポレイション 装置様散乱測定法のオーバーレイターゲット
KR102114512B1 (ko) * 2012-06-26 2020-05-25 케이엘에이 코포레이션 디바이스형 산란측정 오버레이 타겟
JP2015038474A (ja) * 2013-08-08 2015-02-26 ジェイエスエムエスダブリュー テクノロジー リミテッド・ライアビリティー・カンパニーＪＳＭＳＷ Ｔｅｃｈｎｏｌｏｇｙ ＬＬＣ 位相制御モデルに基づくオーバーレイ測定システム及び方法

Also Published As

Publication number Publication date
WO2001009662A2 (fr) 2001-02-08
WO2001009662A3 (fr) 2001-08-02

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