JP2003500839A - 放電レーザのカットオフ・アセンブリを有する横流ファン及び振動調節方法 - Google Patents

放電レーザのカットオフ・アセンブリを有する横流ファン及び振動調節方法

Info

Publication number
JP2003500839A
JP2003500839A JP2000619064A JP2000619064A JP2003500839A JP 2003500839 A JP2003500839 A JP 2003500839A JP 2000619064 A JP2000619064 A JP 2000619064A JP 2000619064 A JP2000619064 A JP 2000619064A JP 2003500839 A JP2003500839 A JP 2003500839A
Authority
JP
Japan
Prior art keywords
flow fan
cross
laser
blade
blade member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000619064A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003500839A5 (enExample
Inventor
トマス ホフマン
ジェイムズ ケイ ホーウェイ
ロバート エイ シャンノン
リチャード シー ウジャドウスキ
トム エイ ワトソン
カイル アール ウェブ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cymer Inc
Original Assignee
Cymer Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/310,786 external-priority patent/US6034984A/en
Application filed by Cymer Inc filed Critical Cymer Inc
Publication of JP2003500839A publication Critical patent/JP2003500839A/ja
Publication of JP2003500839A5 publication Critical patent/JP2003500839A5/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • General Physics & Mathematics (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Lasers (AREA)
JP2000619064A 1999-05-12 2000-04-25 放電レーザのカットオフ・アセンブリを有する横流ファン及び振動調節方法 Pending JP2003500839A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US09/310,786 1999-05-12
US09/310,786 US6034984A (en) 1998-08-28 1999-05-12 Tangential fan with cutoff assembly and vibration control for electric discharge laser
US09/400,026 1999-09-21
US09/400,026 US6144686A (en) 1998-08-28 1999-09-21 Tangential fan with cutoff assembly and vibration control for electric discharge laser
PCT/US2000/011290 WO2000070720A1 (en) 1999-05-12 2000-04-25 Tangential fan with cutoff assembly and vibration control for electric discharge laser

Publications (2)

Publication Number Publication Date
JP2003500839A true JP2003500839A (ja) 2003-01-07
JP2003500839A5 JP2003500839A5 (enExample) 2007-06-28

Family

ID=26977584

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000619064A Pending JP2003500839A (ja) 1999-05-12 2000-04-25 放電レーザのカットオフ・アセンブリを有する横流ファン及び振動調節方法

Country Status (6)

Country Link
US (1) US6144686A (enExample)
EP (1) EP1192689A4 (enExample)
JP (1) JP2003500839A (enExample)
KR (1) KR100681817B1 (enExample)
AU (1) AU4669300A (enExample)
WO (1) WO2000070720A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3697036B2 (ja) * 1997-10-03 2005-09-21 キヤノン株式会社 露光装置及びそれを用いた半導体製造方法
US6847671B1 (en) 2000-03-29 2005-01-25 Lambda Physik Ag Blower for gas laser
DE10156106A1 (de) * 2001-11-16 2003-05-28 Isaak Klaus Verfahren zum Verbinden von Blechteilen
US8814522B2 (en) * 2007-06-15 2014-08-26 Cymer, Llc Cross-flow fan impeller for a transversley excited, pulsed, gas discharge laser
WO2025093992A1 (en) * 2023-11-01 2025-05-08 Cymer, Llc Gas discharge chamber blower fan with a textured surface

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4099143A (en) * 1977-01-14 1978-07-04 Universal Laser Corp. Gas recirculating stabilized laser
JPH06101596B2 (ja) * 1983-02-21 1994-12-12 株式会社小松製作所 クロスフロ−型レ−ザ装置
US4959840A (en) * 1988-01-15 1990-09-25 Cymer Laser Technologies Compact excimer laser including an electrode mounted in insulating relationship to wall of the laser
JPH04246873A (ja) * 1991-02-01 1992-09-02 Kawasaki Steel Corp ガスレーザ装置
JP3349722B2 (ja) * 1992-08-25 2002-11-25 東芝キヤリア株式会社 空気調和機の室内ユニットおよびその梱包方法
JP3107711B2 (ja) * 1994-08-09 2000-11-13 株式会社東芝 横流ファン
US5748656A (en) * 1996-01-05 1998-05-05 Cymer, Inc. Laser having improved beam quality and reduced operating cost
CA2190697C (en) * 1996-01-31 2000-07-25 Donald Glenn Larson Blower motor with adjustable timing
US5657334A (en) * 1996-02-15 1997-08-12 Cymer, Inc. External high voltage control for a laser system
US5771258A (en) * 1997-02-11 1998-06-23 Cymer, Inc. Aerodynamic chamber design for high pulse repetition rate excimer lasers
US5870420A (en) * 1997-08-18 1999-02-09 Cymer, Inc. Cross-flow blower with braces
US6023486A (en) * 1998-08-28 2000-02-08 Cymer, Inc. Soldered fan assembly for electric discharge laser

Also Published As

Publication number Publication date
EP1192689A1 (en) 2002-04-03
WO2000070720A1 (en) 2000-11-23
KR100681817B1 (ko) 2007-02-12
EP1192689A4 (en) 2006-03-15
US6144686A (en) 2000-11-07
AU4669300A (en) 2000-12-05
KR20010112484A (ko) 2001-12-20

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