KR100681817B1 - 방전 레이저를 위한 컷오프를 구비한 접선 팬 어셈블리 및 진동제어 - Google Patents

방전 레이저를 위한 컷오프를 구비한 접선 팬 어셈블리 및 진동제어 Download PDF

Info

Publication number
KR100681817B1
KR100681817B1 KR1020017014296A KR20017014296A KR100681817B1 KR 100681817 B1 KR100681817 B1 KR 100681817B1 KR 1020017014296 A KR1020017014296 A KR 1020017014296A KR 20017014296 A KR20017014296 A KR 20017014296A KR 100681817 B1 KR100681817 B1 KR 100681817B1
Authority
KR
South Korea
Prior art keywords
tangential fan
tangential
blade
members
fan
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR1020017014296A
Other languages
English (en)
Korean (ko)
Other versions
KR20010112484A (ko
Inventor
호프만토마스
호웨이제임즈케이.
섀넌로버트에이.
우자츠도프스키리차드씨.
왓슨톰에이.
웹카일알.
Original Assignee
사이머 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/310,786 external-priority patent/US6034984A/en
Application filed by 사이머 인코포레이티드 filed Critical 사이머 인코포레이티드
Publication of KR20010112484A publication Critical patent/KR20010112484A/ko
Application granted granted Critical
Publication of KR100681817B1 publication Critical patent/KR100681817B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • General Physics & Mathematics (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Lasers (AREA)
KR1020017014296A 1999-05-12 2000-04-25 방전 레이저를 위한 컷오프를 구비한 접선 팬 어셈블리 및 진동제어 Expired - Lifetime KR100681817B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US09/310,786 US6034984A (en) 1998-08-28 1999-05-12 Tangential fan with cutoff assembly and vibration control for electric discharge laser
US09/310,786 1999-05-12
US09/400,026 1999-09-21
US09/400,026 US6144686A (en) 1998-08-28 1999-09-21 Tangential fan with cutoff assembly and vibration control for electric discharge laser

Publications (2)

Publication Number Publication Date
KR20010112484A KR20010112484A (ko) 2001-12-20
KR100681817B1 true KR100681817B1 (ko) 2007-02-12

Family

ID=26977584

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020017014296A Expired - Lifetime KR100681817B1 (ko) 1999-05-12 2000-04-25 방전 레이저를 위한 컷오프를 구비한 접선 팬 어셈블리 및 진동제어

Country Status (6)

Country Link
US (1) US6144686A (enExample)
EP (1) EP1192689A4 (enExample)
JP (1) JP2003500839A (enExample)
KR (1) KR100681817B1 (enExample)
AU (1) AU4669300A (enExample)
WO (1) WO2000070720A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3697036B2 (ja) * 1997-10-03 2005-09-21 キヤノン株式会社 露光装置及びそれを用いた半導体製造方法
US6847671B1 (en) 2000-03-29 2005-01-25 Lambda Physik Ag Blower for gas laser
DE10156106A1 (de) * 2001-11-16 2003-05-28 Isaak Klaus Verfahren zum Verbinden von Blechteilen
US8814522B2 (en) * 2007-06-15 2014-08-26 Cymer, Llc Cross-flow fan impeller for a transversley excited, pulsed, gas discharge laser
WO2025093992A1 (en) * 2023-11-01 2025-05-08 Cymer, Llc Gas discharge chamber blower fan with a textured surface

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR970060605A (ko) * 1996-01-05 1997-08-12 애킨스 로버트 피. 빔의 질이 개선되고 조업비가 낮아진 레이저
KR100246489B1 (ko) * 1996-02-15 2000-03-15 아킨스 로버트 피. 레이저 시스템용 외부 고전압 제어 장치

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4099143A (en) * 1977-01-14 1978-07-04 Universal Laser Corp. Gas recirculating stabilized laser
JPH06101596B2 (ja) * 1983-02-21 1994-12-12 株式会社小松製作所 クロスフロ−型レ−ザ装置
US4959840A (en) * 1988-01-15 1990-09-25 Cymer Laser Technologies Compact excimer laser including an electrode mounted in insulating relationship to wall of the laser
JPH04246873A (ja) * 1991-02-01 1992-09-02 Kawasaki Steel Corp ガスレーザ装置
JP3349722B2 (ja) * 1992-08-25 2002-11-25 東芝キヤリア株式会社 空気調和機の室内ユニットおよびその梱包方法
JP3107711B2 (ja) * 1994-08-09 2000-11-13 株式会社東芝 横流ファン
CA2190697C (en) * 1996-01-31 2000-07-25 Donald Glenn Larson Blower motor with adjustable timing
US5771258A (en) * 1997-02-11 1998-06-23 Cymer, Inc. Aerodynamic chamber design for high pulse repetition rate excimer lasers
US5870420A (en) * 1997-08-18 1999-02-09 Cymer, Inc. Cross-flow blower with braces
US6023486A (en) * 1998-08-28 2000-02-08 Cymer, Inc. Soldered fan assembly for electric discharge laser

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR970060605A (ko) * 1996-01-05 1997-08-12 애킨스 로버트 피. 빔의 질이 개선되고 조업비가 낮아진 레이저
KR100246489B1 (ko) * 1996-02-15 2000-03-15 아킨스 로버트 피. 레이저 시스템용 외부 고전압 제어 장치

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
1002464890000
1019970060605

Also Published As

Publication number Publication date
EP1192689A4 (en) 2006-03-15
US6144686A (en) 2000-11-07
KR20010112484A (ko) 2001-12-20
AU4669300A (en) 2000-12-05
WO2000070720A1 (en) 2000-11-23
JP2003500839A (ja) 2003-01-07
EP1192689A1 (en) 2002-04-03

Similar Documents

Publication Publication Date Title
KR100421275B1 (ko) 방전 레이져용 진동 컨트롤과 컷오프 조립체를 갖춘 횡류 팬
US6061376A (en) Tangential fan for excimer laser
US6023486A (en) Soldered fan assembly for electric discharge laser
US4309143A (en) Vane-disk type turbomolecular pump and etching method of manufacture of vane disks
US6765946B2 (en) Fan for gas discharge laser
US4893388A (en) Method of modifying turbine rotor discs
KR100681817B1 (ko) 방전 레이저를 위한 컷오프를 구비한 접선 팬 어셈블리 및 진동제어
WO2010041431A1 (ja) 遠心回転機のインペラの製造方法
US6195378B1 (en) Twisted blade tangential fan for excimer laser
JP2005501400A5 (enExample)
JP2000138404A (ja) エキシマレーザ装置用の貫流ファン
US4817265A (en) Method for the manufacture of a control disc or a control shield for a liquid-ring machine
US6847671B1 (en) Blower for gas laser
US4910749A (en) Laser oscillator device
JP2001274486A (ja) 放電励起ガスレーザ装置用クロスフローファン
JPS59188189A (ja) Ｃｏ↓２レ−ザ装置
JP3301603B2 (ja) プラズマチューブ
KR100475611B1 (ko) 수냉식 전동기 프레임 제조방법
JP2001210896A (ja) エキシマレーザ装置
Gang Numerical analysis of turbulent flow around a small propeller fan operating at the inlet of open chamber
JPS5963785A (ja) ガスレ−ザ装置
JP2000340864A (ja) エキシマレーザ装置
JPS6076181A (ja) 高速軸流形ガスレ−ザ発振器
JP2001024256A (ja) エキシマレーザ装置
JPH11210651A (ja) ベーン型圧縮機の組付け方法及び芯出し用ダミーロータ

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20011109

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20050318

Comment text: Request for Examination of Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20060808

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20070109

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20070206

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20070207

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
PR1001 Payment of annual fee

Payment date: 20100219

Start annual number: 4

End annual number: 4

PR1001 Payment of annual fee

Payment date: 20110207

Start annual number: 5

End annual number: 5

PR1001 Payment of annual fee

Payment date: 20120203

Start annual number: 6

End annual number: 6

FPAY Annual fee payment

Payment date: 20130124

Year of fee payment: 7

PR1001 Payment of annual fee

Payment date: 20130124

Start annual number: 7

End annual number: 7

FPAY Annual fee payment

Payment date: 20140124

Year of fee payment: 8

PR1001 Payment of annual fee

Payment date: 20140124

Start annual number: 8

End annual number: 8

FPAY Annual fee payment

Payment date: 20150130

Year of fee payment: 9

PR1001 Payment of annual fee

Payment date: 20150130

Start annual number: 9

End annual number: 9

FPAY Annual fee payment

Payment date: 20160205

Year of fee payment: 10

PR1001 Payment of annual fee

Payment date: 20160205

Start annual number: 10

End annual number: 10

FPAY Annual fee payment

Payment date: 20180126

Year of fee payment: 12

PR1001 Payment of annual fee

Payment date: 20180126

Start annual number: 12

End annual number: 12

FPAY Annual fee payment

Payment date: 20200128

Year of fee payment: 14

PR1001 Payment of annual fee

Payment date: 20200128

Start annual number: 14

End annual number: 14

PC1801 Expiration of term

Termination date: 20201025

Termination category: Expiration of duration