JP2003344787A - Optical switch and method of manufacturing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical switch of which the optical axis is easily adjusted and which is easily manufactured. <P>SOLUTION: The optical switch is composed of a plurality of an optical waveguides 4 of which the both end parts are formed as a light incident part 1 and a light emitting part 2 and a light reflecting film 3 is provided inside, a mirror 5 which is provided between adjacent optical waveguides 4 which are arranged in a way that the light emitting part 2 and the light incident part 1 are opposite to each other, and movable between a position at which the light emitted from the light emitting part 2 is reflected and a position at which the light is not reflected, and an end part waveguide 6, with a light reflection film 3 provided therein, which is arranged in a manner that the light emitting part 2 or the light incident part 1 is opposite to the light incident part 1 or the light emitting part 2 of the optical waveguide 4 which is located at the end part among the plurality of optical waveguides 4 via the movable mirror 5. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical switch used in optical communication, optical information processing and the like and a method for manufacturing the same, and more particularly to a matrix optical switch for switching at a scale of 4 × 4 or more and a method for manufacturing the same. It is a thing.

[0002]

2. Description of the Related Art With the rapid spread of complicated optical communication technology in recent years, there is an increasing need for a technology for switching an optical path without converting an optical signal into an electric signal. And now 2 x 2 as a so-called protection switch
Among various types of optical switches such as (2-input, 2-output) optical switches, extinction ratio characteristics, PDL
(Polarization Dependent Loss) characteristics, power consumption, etc.
Optical switches using ical systems) technology are promising.

FIG. 12 shows an example of a MEMS type 2 × 2 optical switch provided in Japanese Unexamined Patent Publication No. 2000-121967. A counterbore hole 21 is provided in a silicon substrate 20, and the center of the counterbore hole 21 is shown. A movable plate 22 arranged on the above portion is coupled to the silicon substrate 20 via a flexure portion 23. The movable plate 22 is electrostatically driven so as to be displaced in the vertical direction by the deformation of the flexure portion 23. The movable plate 22 is provided with a mirror 24, and the exit side optical fiber 25 and the two entrance side optical fibers 2 are provided around the silicon substrate 20.
6, 27 are arranged.

In this case, the output side optical fiber 25
The light emitted from is reflected by the mirror 24, the direction thereof is changed, and the light is incident on one of the incident side optical fibers 26 and transmitted. When the movable plate 22 is driven so as to be displaced downward, the light emitted from the emission side optical fiber 25 is reflected by the mirror 2
The light travels straight without being reflected at 4, and enters the other incident side optical fiber 27 to be transmitted. In this way, the optical path can be switched to transmit light.

However, in this structure, the optical fiber 2 on the output side is
5 and the incident side optical fibers 26 and 27 are arranged at positions separated by the silicon substrate 20, and there is a problem that it is difficult to adjust the optical axes of the emission side optical fiber 25 and the incident side optical fibers 26 and 27. In particular, in the case where the optical fiber is manufactured with a structure having an enlarged scale such as 4 × 4 or 8 × 8, it becomes extremely difficult to adjust the optical axis of each optical fiber.

An optical switch in which optical waveguides composed of a core layer and a clad layer are arranged in a matrix and a movable plate having a light reflecting surface is movably provided at the intersection of the optical waveguides is disclosed in Japanese Patent Laid-Open No. 4-52616. '2001 IEEE / LEOS Internatio
nal Conference on OpticalMEMS 2001 ”, but this had problems such as difficulty in forming an optical waveguide composed of a core layer and a clad layer.

[0007]

SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and an object thereof is to provide an optical switch in which the optical axis can be easily adjusted and which can be easily manufactured. .

[0008]

According to a first aspect of the present invention, there is provided an optical switch having a plurality of optical waveguides, both ends of which are formed as a light incident portion 1 and a light emitting portion 2, and a light reflecting film 3 is provided on an inner surface thereof. It is provided between the wave tube 4 and the adjacent optical waveguides 4 arranged so that the light emitting portion 2 and the light incident portion 1 are opposed to each other, and a position for reflecting the light emitted from the light emitting portion 2 and a position for not reflecting the light. Between the mirror 5 and the light incident part 1 or the light emitting part 2 of the optical waveguide 4 positioned at the end of the plurality of optical waveguides 4 via the mirror 5. It is characterized in that it is provided with an end optical waveguide 6 in which the parts 1 are arranged to face each other and a light reflection film 3 is provided on the inner surface.

The invention of claim 2 is characterized in that, in claim 1, the optical waveguides 4 and the mirrors 5 are arranged and arranged in a matrix.

The invention of claim 3 is characterized in that in claim 1 or 2, the inner diameters of the optical waveguide 4 and the end optical waveguide 6 are substantially the same as the wavelength of the light to be guided. It is what

According to the invention of claim 4, in any one of claims 1 to 3, the light reflection film 3 is Au, Al, AuSn.
It is characterized by being formed of a metal film selected from the following.

The invention of claim 5 is characterized in that, in any one of claims 1 to 4, the mirror is inclined at an angle of 45 ° with respect to the light guiding direction of the optical waveguide 4. To do.

A sixth aspect of the present invention is characterized in that, in any one of the first to fifth aspects, the surface of the mirror 5 is concavely curved.

The invention of claim 7 is characterized in that, in any one of claims 1 to 6, the optical waveguide 4 is formed in a linear shape.

According to the invention of claim 8, in any one of claims 1 to 7, the inner diameter of the light incident portion 1 of the optical waveguide 4 is:
It is characterized in that it is larger than the inner diameter of the light emitting portions 2 of the optical waveguides 4 adjacent to each other via the mirror 5.

The invention of claim 9 is characterized in that, in any one of claims 1 to 8, the optical waveguide 4 has an inner diameter of the light incident portion 1 larger than an inner diameter of the light emitting portion 2.

Further, the invention of claim 10 is based on claims 1 to 9.
In any of the above, the inner diameter of the end portion of the end optical waveguide 6 on the mirror 5 side is smaller than the inner diameter of the end portion on the opposite side.

The invention of claim 11 relates to claims 1 to 1.
0, the mirror 5 is movable in a direction parallel to the plane on which the optical waveguide 4 and the end optical waveguide 6 are arranged.

The twelfth aspect of the invention is the first to the first aspects.
In any one of 1, the end optical waveguide 6 is connected to the light emitting portion 2
Is formed by branching into a plurality of parts.

The invention of claim 13 relates to claims 1 to 1.
2 is characterized in that the inner surface of the optical waveguide 4 is provided with periodic irregularities 7.

According to a fourteenth aspect of the present invention, in the method of manufacturing an optical switch according to any one of the first to thirteenth aspects, a groove 8 is provided on the surface and light is reflected on the inner surface of the groove 8. Another silicon substrate 1 in which the light reflection film 3 is formed on the surface of the silicon substrate 9 on which the film 3 is formed
It is characterized in that the optical waveguide 4 and the end optical waveguide 6 having the light reflection film 3 provided on the inner surface thereof are formed by overlapping and bonding 0 on the side of the light reflection film 3.

According to a fifteenth aspect of the present invention, in the fourteenth aspect, the light reflecting film 3 is formed of Au.

According to a sixteenth aspect of the invention, in the fourteenth or fifteenth aspect, an AuSn film is formed on the surfaces of the silicon substrates 9 and 10 to be joined.

The invention according to claim 17 is the method according to any one of claims 14 to 16, wherein when the silicon substrates 9 and 10 are bonded to each other, one silicon substrate 9 and the other silicon substrate 1 are bonded together.
It is characterized by fitting and coupling 0.

According to the eighteenth aspect of the present invention, in any one of the fourteenth to seventeenth aspects, one silicon substrate 9 is processed to form the groove 8 and the mirror 5 is provided, and then the surface of the silicon substrate 9 is processed. Another silicon substrate 10 is bonded to the above.

Production of an optical switch according to claim 19 of the present invention
The manufacturing method is the optical switch according to any one of claims 1 to 13.
On the surface of the silicon substrate 11 when manufacturing the switch.
A light reflection film 3 is formed, and SiO is formed on the light reflection film 3._Twolayer
After depositing 12 and providing_TwoLight out of layer 12
SiO while leaving the portions where the wave tubes 4 and 6 are to be formed
_TwoThe layer 12 is etched, patterned and patterned.
Learned SiO _TwoForm the light reflection film 3 on the surface of the layer 12
After formation, the deposited SiO_TwoEtching layer 12
By removing it, the light reflection film 3 is provided on the inner surface.
The optical waveguide 4 and the end optical waveguide 6 are formed.
It is what

[0027]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below.

FIG. 1 shows an example of an embodiment of the present invention. An optical waveguide 4 is provided in a substrate A made of silicon.
The mirror 5 is provided to form an optical switch. The optical waveguide 4 is formed in a tubular shape having an internal cavity in which one end is a light incident part 1 and the other end is a light emitting part 2.
By providing the light reflection film 3 on the inner periphery thereof, light is propagated through the optical waveguide 4 while being reflected by the light reflection film 3.

The optical waveguide 4 is provided in the substrate A by arranging a plurality of light emitting portions 2 and light incident portions 1 so as to face each other. As shown in FIG. The optical waveguides 4 are arranged in a matrix with rows arranged in the horizontal direction and columns arranged in the vertical direction. The rows in which the optical waveguides 4 are arranged in the horizontal direction are orthogonal to the rows in which the optical waveguides 4 are arranged in the vertical direction.
Are arranged in a grid pattern. Further, of the optical waveguides 4, the one formed so as to open at the end of the substrate A is the end optical waveguide 6, and the end optical waveguide 6 is adjacent to the substrate A. On the side surface, the optical input terminal portion 30 is formed by the end optical waveguide 6 opened on one side surface, and the optical output terminal portion 31 is formed by the end optical waveguide 6 opened on the other side surface. As can be seen in Figure 1 (b),
In the embodiment of FIG. 1, since there are four end optical waveguides 6 of the light input terminal section 30 and four end optical waveguides 6 of the light output terminal section 31, 4 × 4 of 4 inputs and 4 outputs. It is an optical switch.

The optical waveguide 4 (including the end optical waveguide 6; the same applies in the following paragraphs) has 16 intersections.
At each intersection, two to four ends of the optical waveguides 4 face each other. Mirrors 5 are arranged and provided at the respective intersections, and between the end portions of the optical waveguides 4 which are laterally adjacent to each other, that is, between the light emitting portion 2 of one optical waveguide 4 and the light incident portion 1 of the other. while,
And between the end portions of the optical waveguides 4 adjacent to each other in the vertical direction, that is, between the light emitting portion 2 of one optical waveguide 4 and the light incident portion 1 of the other.
Each is divided by the mirror 5. The mirror 5 is arranged so that its surface is inclined at an angle of 45 ° with respect to the direction (longitudinal direction) in which the light of the optical waveguide 4 is guided, and is emitted from the light emitting portion 2 of the optical waveguide 4. The light traveling direction can be changed by 90 °. The mirror 5 is slidably arranged in a slit 32 formed at the intersection of the optical waveguides 4 as shown in FIG.
The mirror 5 can be driven by a mirror drive unit 33 such as an electrostatic comb drive type actuator provided therein. The mirror 5 is inserted into the intersection of the adjacent optical waveguides 4 and is driven to move between a position where the light emitted from the light emitting unit 2 is reflected and a position where the light is emitted from the intersection and does not reflect the light. It is something. The mirrors 5 are also arranged in a matrix like the optical waveguide 4,
A large-scale optical switch such as 4 × 4 or 8 × 8 can be easily manufactured.

In the optical switch formed as described above, in the light incident portion 1 of the end optical waveguide 6 forming the light input terminal 30 and the end optical waveguide 6 forming the light output terminal 31. An optical fiber is connected to the light emitting portion 2, and the light input to the end optical waveguide 6 forming the light input terminal 30 is inserted into the mirror 5 at the intersection of the optical waveguides 4. At the location, the light is reflected by the mirror 5 and the traveling direction is changed, and the light emitted from the horizontal optical waveguide 4 enters the vertical optical waveguide 4 and is transmitted, as indicated by the solid arrow in FIG. Alternatively, the light emitted from the vertical optical waveguide 4 as indicated by the broken line arrow is incident on the horizontal optical waveguide 4 and transmitted. Further, at the location where the mirror 5 is pulled out from the intersection of the optical waveguides 4, the direction is not changed because it is not reflected by the mirror 5, and the optical waveguides in the lateral direction as shown by the solid arrow in FIG. The light emitted from the optical waveguide 4 directly enters the horizontal optical waveguide 4 and is transmitted, or the light emitted from the vertical optical waveguide 4 enters the vertical optical waveguide 4 as indicated by the broken line arrow. Transmitted. In this way, the mirror 5 is moved by the mirror driving unit 33, the mirror 5 is inserted into the intersection of the optical waveguide 4 at a predetermined location, and the movement of the mirror 5 is controlled so that the mirror 5 is removed from the intersection of the predetermined location. By doing so, the light input from the predetermined end optical waveguide 6 forming the optical input terminal 30 is passed through the optical waveguide 4 having a predetermined optical path, and the predetermined end optical waveguide forming the optical output terminal 31 is formed. It can be output from the tube 6.

Here, in the embodiment of FIG. 1, the cross-sectional shape of each optical waveguide 4 and the end optical waveguide 6 is square, but it is not limited to this, and it may be circular or another polygon. It may be. The inner diameters of the optical waveguide 4 and the end optical waveguide 6 are not particularly limited, but it is preferable to form the optical waveguide 4 and the end optical waveguide 6 to have a dimension substantially equal to the wavelength of the guided light used for optical communication, for example, an inner diameter of 1.5 μm. can do. By making the inner diameters of the optical waveguide 4 and the end optical waveguide 6 substantially equal to the wavelength of the guided light in this way, it is possible to propagate by the simplest propagation method such as a simple TE mode, and the waveguide mode is simple. It becomes possible to switch the optical path with a low optical waveguide loss without deforming the waveform of the incident light.

Further, by providing the light reflecting film 3 on the inner circumference of the optical waveguide 4 and the end optical waveguide 6, light is propagated with low optical waveguide loss while being reflected by the light reflecting film 3. ing. Although the light reflection film 3 is not particularly limited, it is preferably formed of a metal film selected from Au, Al, and AuSn. These metals have a high light reflectance and can lower the optical waveguide loss. Among these, Au has the highest light reflectance and is therefore more preferable. The optical waveguide 4 and the end optical waveguide 6 are preferably formed in a linear shape. By forming the optical waveguide 4 and the end optical waveguide 6 in a linear shape, it is possible to guide light without generating extra optical waveguide time or optical waveguide loss.

Here, although the respective optical waveguides 4 and the end optical waveguides 6 are formed on the same plane, the moving direction of the mirror 5 forms the optical waveguides 4 and the end optical waveguides 6. It is set in the direction parallel to the plane. By thus setting the moving direction of the mirror 5 in a direction parallel to the surface on which the optical waveguide 4 and the end optical waveguide 6 are formed, the mirror driving unit 33 for moving the mirror 5 is moved to the optical waveguide 4 and the end. The substrate A can be provided in a space surrounded by the partial optical waveguide 6.
It is not necessary to form a special space for arranging the mirror driving section 33 without interfering with the optical waveguide 4 and the end optical waveguide 6, and the optical switch can be miniaturized. Is.

FIG. 4 shows another embodiment of the present invention. In the adjacent optical waveguides 4 (including the end optical waveguides 6, the same applies in the following paragraphs), the optical waveguides 4 The light emitting portions 2 of the optical waveguides 4 whose inner diameters are adjacent to each other with the mirror 5 interposed therebetween.
It is formed in a structure in which the inner circumference of the light incident portion 1 is widened so as to be larger than the inner diameter of the. In this way, by forming the inner diameter of the light incident portion 1 of the adjacent optical waveguides 4 with the mirror 5 interposed therebetween to be larger than the inner diameter of the light emitting portion 2, the light emitted from the light emitting portion 2 is adjacent to the optical waveguides 4. The light can be efficiently incident from the light incident portion 1 and high light propagation efficiency between the adjacent optical waveguides 4 can be ensured. Further, by forming the light incident portion 1 of the end optical waveguide 6 forming the light input terminal 30 to have a large inner diameter, the light output from the optical fiber can be condensed and efficiently incident.

Further, in each optical waveguide 4, the inner diameter of the light incident portion 1 at one end is formed to be large in order to obtain high light incident efficiency, but the light emitting portion 2 at the other end is formed. It is smaller than the inner diameter of the light incident portion 1. Therefore, each optical waveguide 4
By forming the light emitting portions 2 to have the same inner diameter, the beam size of the light propagating in the optical waveguide 4 can be made the same.

Further, also in the end optical waveguide 6, the inner diameter of the light incident portion 1 at the end on the mirror 5 side is formed to be large in order to obtain high light incidence efficiency, but the inner side of the end opposite to the mirror 5 The light emitting portion 2 at the end is smaller than the inner diameter of the light incident portion 1. The beam diameter of the light incident on the optical switch can be freely set according to the inner diameter of the light incident portion 1 of the end optical waveguide 6 forming the light input terminal portion 30.
The beam diameter of the light emitted from the optical switch can be freely set according to the inner diameter of the light emitting portion 2 of the end optical waveguide 6 forming the light emitting terminal portion 31.

FIG. 5 shows another embodiment of the present invention, in which the reflecting surface of the mirror 5 is formed into a concave curved surface. By forming the reflecting surface of the mirror 5 in such a concave curved surface, the light from the light emitting section 2 of one adjacent optical waveguide 4 (including the end optical waveguide 6, the same applies in the following paragraphs). When the light is reflected by the mirror 5, the mirror 5 acts as a concave mirror, and the light can be made to enter the light incident part 1 of the other optical waveguide 4 in a condensed state. It is possible to secure a high light propagation efficiency during the period of time.

FIG. 6 shows another embodiment of the present invention, in which the end optical waveguide 6 forming the optical output terminal 31 is formed.
The light emitting portion 2 is branched into a plurality of portions, and the light emitting portion 2 is opened at a plurality of positions on the end surface of the substrate A. In this way, by branching the light emitting portion 2 of the end optical waveguide 6 into a plurality of pieces,
The so-called splitter function for separating the optical signal output from the end optical waveguide 6 forming the optical output terminal portion 31 can be realized in the substrate A of the optical switch.

FIG. 7 shows another embodiment of the present invention, in which irregularities 7 having a periodic structure are provided on the inner surface of the optical waveguide 4 (including the end optical waveguide 6, the same applies in the following paragraphs). There is. Concavities and convexities 7 are regularly provided on the bottom surface of the optical waveguide 4 along the longitudinal direction (light guiding direction) of the optical waveguide 4 in a grid pattern of convex portions 7a and concave portions 7b having a predetermined period. Is formed by. As described above, the unevenness 7 is periodically provided in the optical waveguide 4 at a constant pitch, and when the pitch of one unevenness 7 is Δ, only the light having the wavelength λ = 2Δ is selectively reflected by the unevenness 7. Is something that can be done. Therefore, for example, when combined with a mechanism for extracting light having a specific wavelength which has a function of a circulator and goes backward, the light having a specific wavelength can be reflected by the concavities and convexities 7 and extracted, and then output from the optical switch. It is a thing.

Next, a method for forming the optical waveguide 4 (including the end optical waveguide 6) provided with the light reflection film 3 on the inner surface thereof in manufacturing the above optical switch will be described.

FIG. 8 shows an example of the embodiment. First, as shown in FIG. 8A, the groove 8 is formed on the flat surface of the first silicon substrate 9 by the photolithography technique and the etching technique. Then, the light reflection film 3 is provided on the inner surface of the groove 8 by depositing metal. The light reflecting film 3 may be provided on the surface of the silicon substrate 9 provided with the groove 8. Further, the light reflecting film 3 is provided on the flat surface of the second silicon substrate 9 by depositing metal. Then, the surface of the second silicon substrate 10 on which the light reflection film 3 is provided is superposed on the surface of the first silicon substrate 9 on which the groove 8 and the light reflection film 3 are provided, and heated and pressed to remove the silicon substrates 9 and 10 from each other. By adhering the light-reflecting films 3 to each other, the first silicon substrate 9 and the second silicon substrate 10 are bonded as shown in FIG. 8B. In this way, by the groove 8 between the silicon substrates 9 and 10,
An optical waveguide 4 (an end optical waveguide 6 provided with a light reflection film 3 on its inner surface)
The same shall apply hereinafter in paragraphs). In this case, the groove 8 can be formed on the silicon substrate 9 with a fine dimension by using the technique of the semiconductor processing process as it is, and the minute optical waveguide 4 can be easily manufactured. is there.

Here, in the embodiment of FIG. 8, the light reflecting film 3a of Au is provided on the surface including the inner surface of the groove 8 on the first silicon substrate 9, and AuSn is formed on the surface of the second silicon substrate 10.
Of the Au light reflection film 3a and AuSn
The light-reflecting film 3b is adhered and bonded.
Since Au and AuSn are easily adhered by heating and pressing, the first silicon substrate 9 and the second silicon substrate 10 can be easily joined. Also groove 8
Since the light reflecting films 3 on three of the four inner surfaces of the optical waveguide 4 (including the end optical waveguide 6) formed by Au can be formed of Au, the optical waveguide loss can be further reduced. It is a thing.

In the embodiment shown in FIG. 9, the light reflecting film 3a of Au is provided on the inner surface of the groove 8 on the first silicon substrate 9 and the metal film 39 of AuSn is provided on the surface other than the groove 8, and the second silicon is used. The light reflecting film 3a of Au is provided on the surface of the substrate 10,
The AuSn metal film 39 of the first silicon substrate 9 and the Au light reflection film 3a of the second silicon substrate 10 are brought into close contact with each other to be joined. In this case, the entire inner surface of the optical waveguide 4 (including the end optical waveguide 6) formed by the groove 8 can be formed by the Au light reflecting film 3a, and the optical waveguide loss can be further reduced. Moreover, the first silicon substrate 9 and the second silicon substrate 10 can be easily joined by the AuSn metal film 39 and the Au light reflecting film 3a.

As in the embodiment shown in FIGS. 8 and 9, the optical waveguide 4 is formed by processing the groove 8 in one silicon substrate 9.
In the case of forming (including the end optical waveguide 6 and the same in the following paragraphs), the optical waveguide 4 and the mirror 5 are formed on the same silicon substrate 9 by performing a process of providing the mirror 5 on the silicon substrate 9. The optical waveguide 4 and the mirror 5 can be accurately aligned and formed.

FIG. 10 shows another embodiment of the present invention. Grooves 8 are provided on the respective surfaces of the first silicon substrate 9 and the second silicon substrate 10, and the first silicon substrate 9 is formed. An Au light reflecting film 3a is formed on the inner surface of the groove 8 and an AuSn metal film 39 is formed on the surface other than the groove 8. Au is formed on the surface of the second silicon substrate 10 including the groove 8.
The light reflection film 3a is formed. Further, a concave portion 36 is formed on the bonding surface of the first silicon substrate 9 and the second silicon substrate 10
A convex portion 37 is provided on each of the joint surfaces. Then, by fitting the concave portion 36 and the convex portion 37, the two silicon substrates 9 and 10 are combined as shown in FIG. 10B, and they are joined by heating and pressing. By fitting the concave portion 36 and the convex portion 37 in this manner, the pair of silicon substrates 9 and 10 can be joined in a state where they are accurately aligned, and the optical waveguide 4 (the end portion optical waveguide is highly accurate). (Including the wave tube 6).

FIG. 11 shows another embodiment of the method of forming the optical waveguide 4 (including the end optical waveguide 6, the same applies in the following paragraphs). First, as shown in FIG. Then, a metal such as Au is deposited on the surface of the silicon substrate 11 to form the light reflection film 3. Next, as shown in FIG.
SiO ₂ is deposited as described above to form the SiO ₂ layer 12. Then, by photolithography and etching, a part of the SiO ₂ layer 12 is left and the other part is removed. Then, a metal such as Au is deposited on the surface of the remaining SiO ₂ layer 12 to form the light reflecting film 3 as shown in FIG. 11D, and then the SiO ₂ layer 12 is removed with an HF solution or the like. The optical waveguide 4 surrounded by the light reflection layer 3 can be formed as shown in FIG.
In this way, as described above, the two silicon substrates 9,
One silicon substrate 1 without the need to bond and use 10.
The optical switch can be manufactured with 1.

[0048]

As described above, the optical switch according to claim 1 of the present invention comprises a plurality of optical waveguides having both ends formed as a light incident part and a light emitting part, and a light reflecting film provided on the inner surface. A mirror provided between adjacent optical waveguides arranged so that the light emitting portion and the light incident portion face each other, and movable between a position for reflecting the light emitted from the light emitting portion and a position for not reflecting the light. , The light emitting portion or the light emitting portion of the optical waveguide located at the end of the plurality of optical waveguides is arranged to face the light emitting portion or the light incident portion via a mirror, and the light reflecting film is provided on the inner surface. Since the optical waveguide and the end optical waveguide are provided, the distance between the optical waveguides facing each other via the mirror and the distance between the optical waveguide and the end optical waveguide can be minutely formed. It is easy to adjust the optical axis of the optical waveguide, and the optical waveguide and the end optical waveguide are It can be formed by providing a reflection film, in which manufacturing is made easier than in the case of forming a core layer and a clad layer.

Further, in the invention of claim 2, since the optical waveguides and the mirrors are arranged and arranged in a matrix in the invention of claim 1, a large-scale optical switch such as 4 × 4 or 8 × 8 can be easily realized. It can be produced in.

The invention according to claim 3 is the waveguide mode according to claim 1 or 2, wherein the inner diameters of the optical waveguide and the end optical waveguide are substantially the same as the wavelength of the light to be guided. It becomes possible to switch the optical path with a low optical waveguide loss without causing the incident optical waveform to be deformed due to the single optical path.

According to the invention of claim 4, in any one of claims 1 to 3, since the light reflecting film is formed of a metal film selected from Au, Al and AuSn, these metals reflect light. The optical waveguide loss is high and the optical waveguide loss can be reduced.

According to a fifth aspect of the present invention, in any one of the first to fourth aspects, since the mirror is inclined at an angle of 45 ° with respect to the light guiding direction of the optical waveguide, the optical waveguide is provided. The traveling direction of the light emitted from the light emitting portion can be changed by 90 °.

According to the invention of claim 6, in any one of claims 1 to 5, the surface of the mirror is concavely curved, so that the light is incident on the light incident part of the next optical waveguide in a state where the light is condensed. Therefore, it is possible to ensure high light propagation efficiency.

According to the invention of claim 7, in any one of claims 1 to 6, since the optical waveguide is formed in a linear shape, the light is guided without extra optical waveguide time or optical waveguide loss. It can be guided.

According to the invention of claim 8, in any one of claims 1 to 7, the inner diameter of the light incident portion of the optical waveguide is larger than the inner diameter of the light emitting portion of the adjacent optical waveguide via the mirror. The light emitted from the light emitting portion can be efficiently incident on the light incident portions of the adjacent optical waveguides, and high light propagation efficiency can be ensured.

According to a ninth aspect of the present invention, in the optical waveguide according to any one of the first to eighth aspects, since the inner diameter of the light incident portion is larger than the inner diameter of the light emitting portion, the inner diameter of the light emitting portion is different in each optical waveguide. By making them equal, the beam size of the light propagating in the optical waveguide can be made the same.

Further, the invention of claim 10 relates to claims 1 to 9.
In either case, the inner diameter of the mirror-side end of the end optical waveguide is smaller than the inner diameter of the opposite end, so that the inner diameter of the light incident part of the end optical waveguide forming the optical input terminal is hand,
The beam diameter of the light entering the optical switch can be set freely, and the beam diameter of the light emitted from the optical switch can be set according to the inner diameter of the light emitting portion of the end optical waveguide forming the light emitting terminal. Can be set freely.

Further, the invention of claim 11 relates to claims 1 to 1.
0, the mirror is movable in a direction parallel to the surface on which the optical waveguide and the end optical waveguide are arranged. The optical switch can be provided by utilizing the space surrounded by the tube, and the optical switch can be miniaturized.

The twelfth aspect of the present invention provides the first aspect.
In any one of the first to third aspects, the end optical waveguide is formed by branching the light emitting portion into a plurality of parts, so that the optical signal output from the end optical waveguide can be separated.

The thirteenth aspect of the present invention provides the first aspect.
In any one of 2), since the inner surface of the optical waveguide is provided with periodic unevenness, it is possible to output the light from the optical switch after the light of the specific wavelength is reflected by the unevenness to be extracted.

According to a fourteenth aspect of the present invention, in the method of manufacturing an optical switch according to any one of the first to thirteenth aspects, a groove is provided on the surface and a light reflecting film is formed on the inner surface of the groove. By joining another silicon substrate having a light-reflecting film formed on the surface thereof to the surface of the formed silicon substrate, the light-reflecting film is provided on the inner surface of the optical waveguide and the end waveguide. Since the waveguide is formed, the groove can be formed in a fine dimension on the silicon substrate by using the technique of the semiconductor processing process as it is, and a minute optical waveguide or an end optical waveguide can be easily formed. It can be produced.

According to the fifteenth aspect of the invention, in the fourteenth aspect, the light reflecting film is formed of Au.
Has a high light reflectance and can reduce optical waveguide loss.

According to a sixteenth aspect of the invention, in the fourteenth or fifteenth aspect, AuSn is formed on the surfaces of the silicon substrates to be joined.
Since the above film is formed, AuSn can be easily adhered by heating and pressurization, and the silicon substrates can be easily joined.

According to the seventeenth aspect of the present invention, in joining the silicon substrates according to any one of the fourteenth to sixteenth aspects, one silicon substrate and the other silicon substrate are fitted and joined together. The optical waveguide and the end optical waveguide can be formed with high accuracy because they can be joined in a state where they are accurately aligned.

According to the eighteenth aspect of the present invention, in any one of the fourteenth to seventeenth aspects, one silicon substrate is processed to form a groove and a mirror is provided, and then another silicon is formed on the surface of the silicon substrate. Since the substrates are bonded to each other, the optical waveguide and the mirror can be formed on the same silicon substrate, and the optical waveguide and the mirror can be accurately aligned and formed.

According to a nineteenth aspect of the present invention, in the method of manufacturing an optical switch according to any one of the first to thirteenth aspects, a light reflection film is formed on a surface of a silicon substrate, After the SiO ₂ layer is deposited and provided on the light reflection film, the SiO ₂ layer is etched and patterned while leaving a portion of the SiO ₂ layer where the optical waveguide is to be formed, and the patterned SiO ₂ is formed. _Two
After forming a light reflecting film on the surface of the layer, the deposited SiO
_By removing the _two layers by etching, the optical waveguide having the light reflection film provided on the inner surface and the end optical waveguide are formed. Therefore, it is not necessary to use two silicon substrates by bonding them. An optical switch can be manufactured with a single silicon substrate.

[Brief description of drawings]

FIG. 1 shows an example of an embodiment of the present invention,
(A) is a perspective view, (b) is a horizontal sectional view in the thickness direction central part of (a).

FIG. 2 is an enlarged perspective view of a part of the above.

FIG. 3 is an enlarged view of a part of the above.
(A), (b) is a horizontal sectional view, respectively.

FIG. 4 is a partially enlarged horizontal sectional view showing an example of another embodiment of the present invention.

FIG. 5 is a partially enlarged horizontal sectional view showing an example of another embodiment of the present invention.

6A and 6B show an example of another embodiment of the present invention, in which FIG. 6A is a partial perspective view and FIG. 6B is a partial plan view.

7A and 7B show an example of another embodiment of the present invention, in which FIG. 7A is a partial vertical sectional view and FIG. 7B is a partial plan view.

FIG. 8 shows an example of another embodiment of the present invention, in which (a) and (b) are partial vertical cross sections.

FIG. 9 shows an example of another embodiment of the present invention, in which (a) and (b) are partial vertical cross sections.

FIG. 10 shows an example of another embodiment of the present invention, in which (a) and (b) are partial vertical cross sections.

FIG. 11 shows an example of another embodiment of the present invention, in which (a) to (e) are partial vertical cross sections.

FIG. 12 shows a conventional example, (a) is a plan view,
(B) is a longitudinal sectional view.

[Explanation of symbols]

1 Light Incident Part 2 Light Emitting Part 3 Light Reflecting Film 4 Optical Waveguide 5 Mirror 6 Edge Optical Waveguide 7 Concavo-convex 8 Groove 9 Silicon Substrate 10 Silicon Substrate 11 Silicon Substrate 12 SiO ₂ Layer

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Kazukazu Miyajima             1048, Kadoma, Kadoma-shi, Osaka Matsushita Electric Works Co., Ltd.             Inside the company (72) Inventor Atsushi Ogihara             1048, Kadoma, Kadoma-shi, Osaka Matsushita Electric Works Co., Ltd.             Inside the company F-term (reference) 2H041 AA16 AB14 AB15 AC06 AZ02                       AZ08

Claims (19)

[Claims] 1. A plurality of optical waveguides, both ends of which are formed as a light incident portion and a light emitting portion, and a light reflecting film is provided on an inner surface,
A mirror that is provided between adjacent optical waveguides that are arranged so that the light emitting portion and the light incident portion face each other, and is movable between a position that reflects the light emitted from the light emitting portion and a position that does not reflect the light, The light incident portion or the light emitting portion of the optical waveguide located at the end of the plurality of optical waveguides is arranged to face the light emitting portion or the light incident portion via a mirror, and the light reflecting film is provided on the inner surface. And an end optical waveguide. 2. The optical switch according to claim 1, wherein the optical waveguides and the mirrors are arranged and provided in a matrix. 3. The optical switch according to claim 1, wherein the inner diameters of the optical waveguide and the end optical waveguide are substantially the same as the wavelength of the light to be guided. 4. The optical switch according to claim 1, wherein the light reflecting film is formed of a metal film selected from Au, Al, and AuSn. 5. The optical switch according to claim 1, wherein the mirror is inclined at an angle of 45 ° with respect to the light guiding direction of the optical waveguide. 6. The optical switch according to claim 1, wherein the mirror has a concavely curved surface. 7. The optical switch according to claim 1, wherein the optical waveguide is formed in a linear shape. 8. The light according to claim 1, wherein an inner diameter of a light incident portion of the optical waveguide is larger than an inner diameter of a light emitting portion of an adjacent optical waveguide via a mirror. switch. 9. The optical switch according to claim 1, wherein the optical waveguide has an inner diameter of a light incident portion larger than an inner diameter of a light emitting portion. 10. The optical switch according to claim 1, wherein the mirror-side end of the end optical waveguide has an inner diameter smaller than that of the opposite end. 11. The optical switch according to claim 1, wherein the mirror is movable in a direction parallel to a surface on which the optical waveguide and the end optical waveguide are arranged. 12. The end optical waveguide is characterized in that a light emitting portion is formed by branching into a plurality of portions.
1. The optical switch according to any one of 1. 13. The optical switch according to claim 1, wherein the inner surface of the optical waveguide is provided with periodic irregularities. 14. The method for manufacturing the optical switch according to claim 1, wherein a groove is provided on the surface and a light reflecting film is formed on the surface of the silicon substrate having the light reflecting film formed on the inner surface of the groove. Of another optical substrate characterized by forming an optical waveguide and an end optical waveguide provided with a light reflecting film on the inner surface by overlapping and bonding another silicon substrate formed on the side of the light reflecting film. Production method. 15. The method of manufacturing an optical switch according to claim 14, wherein the light reflecting film is formed of Au. 16. AuS is formed on the surfaces of the silicon substrates which are joined to each other.
A film of n is formed.
A method for manufacturing the optical switch described in. 17. The method of manufacturing an optical switch according to claim 14, wherein, when the silicon substrates are bonded to each other, one silicon substrate and the other silicon substrate are fitted and bonded to each other. 18. A silicon substrate is processed to form a groove and a mirror is provided, and then another silicon substrate is bonded to the surface of the silicon substrate. A method for manufacturing an optical switch according to claim 1. 19. In manufacturing the optical switch according to claim 1, a light reflecting film is formed on a surface of a silicon substrate, and a SiO ₂ layer is deposited on the light reflecting film. After that, the SiO ₂ layer is etched and patterned while leaving a portion of the SiO ₂ layer where the optical waveguide is to be formed, and the patterned SiO ₂ layer is formed.
After forming a light reflecting film on the surface of the _two layers, the deposited Si
A method for manufacturing an optical switch, characterized by forming an optical waveguide having an optical reflection film on its inner surface and an end optical waveguide by etching and removing the O ₂ layer.