JP2004302425A - Optical fiber array and its manufacturing method, and optical device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve reliability by preventing a pitch-changed optical fiber from breaking. <P>SOLUTION: The optical device is equipped with: a first holding section 16 that holds a plurality of optical fibers arrayed with a first pitch P1; a second holding section 17 that holds a plurality of optical fibers 11 by making them arrayed with a second pitch P2 different from the first pitch P1; and a space section 18 that is located between the first and second holding sections 16, 17 and converts the first pitch P1 into the second pitch P2 in a non-contact state with the plurality of optical fibers 11. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an optical fiber array for converting and holding a pitch of a plurality of optical fibers, a method for manufacturing the same, and an optical device.

  Conventionally, in optical communication using an optical fiber, for example, an optical switch for switching an optical path as an information transmission path, an optical attenuator for attenuating the amount of light transmitted on the optical path, and a waveguide for multiplexing / demultiplexing light. Various optical devices using an optical fiber array such as a wave path are used.

  In recent years, this type of optical device has been reduced in size and density, and the number of optical fibers accommodated therein has been gradually increased to 2, 4, 8, 16, and 32. Generally, an optical fiber has a cladding diameter of 125 μm and a coating diameter of 250 μm. Therefore, when the optical axes of these optical fibers are arranged in a line in parallel with each other, they are arranged at a pitch of 250 μm according to the coating diameter. I have.

  Further, the optical device uses a tape-type optical fiber in which a plurality of optical fibers are arranged in a line with their optical axes parallel to each other and are integrally coated with a coating material. In this tape type optical fiber, each optical fiber is arranged at a pitch of 250 μm.

  By the way, in order to realize miniaturization and high-density mounting, optical devices are required to be arranged at a pitch smaller than a 250 μm pitch. In addition, in an optical switch having a plurality of input / output ports using an optical collimator in which a lens is attached to the tip of each optical fiber of the optical fiber array, an optical fiber that emits light from each port in order to make the loss of light uniform. It is necessary to make the distance between the end face and the end face of the optical fiber on which light is incident equal, that is, to position the beam waste at the center of the optical path, and to adjust the pitch of each optical fiber according to the position of an optical element such as a mirror constituting the optical path. It is necessary to equalize the optical path length by adjusting the direction.

  As shown in FIG. 28, in the conventional tape-type optical fiber 110, the plurality of optical fibers 111 from which the coating material has been removed are converted into a second pitch P4 smaller than the first pitch P3 by the pitch converter 115. (For example, see Patent Document 1). The pitch conversion section 115 has an insertion port 116 into which each optical fiber 111 is inserted, and a guide wall 117 that regulates each optical fiber 111 inserted through the insertion port 116 and converts the optical fiber 111 into a second pitch P4. ing. The pitch of the optical fibers 111 is changed by entering between the guide walls 117, and the optical fibers 111 are fixed by an adhesive (not shown) filled between the guide walls 117.

  Further, in the conventional optical fiber array, as shown in FIG. 29, the plurality of optical fibers 111 from which the coating material has been removed are smaller than the first pitch P3 by the pitch converter 122 provided on the fiber holding substrate 120. It is converted to a second pitch P4 (for example, see Patent Document 1).

The fiber holding substrate 120 includes a first holding unit 121 that holds the tape-type optical fiber 110, a pitch conversion unit 122 that regulates each optical fiber 111 and converts it into a second pitch P4, and A second holding portion 123 provided with a holding groove 123a for holding at a pitch P4 of 2. The pitch converter 122 has an inner wall 122a that regulates the position of the optical fiber 111 and converts the position from the first pitch P3 to the second pitch P4. The fixing member 125 is fixed to the second holding portion 123 with an adhesive (not shown), so that each optical fiber 111 held in the holding groove 123a of the second holding portion 123 is fixed. I have. The pitch of each optical fiber 111 is converted by the inner wall 122 a of the pitch converter 122, and the optical fiber 111 is fixed by the adhesive filled in the pitch converter 122.
Japanese Patent Application Laid-Open No. 2000-121862 (page 3, FIG. 2, FIG. 3)

  However, in the above-described conventional optical fiber array, the pitch between the optical fibers is converted by bringing the optical fibers into contact with the inner wall of the pitch conversion unit. That is, in this conventional optical fiber array, since the optical fiber is in contact with the inner wall of the pitch conversion portion, when used, when vibration or impact is applied, or when thermal expansion or thermal contraction of the material occurs, The optical fiber may be damaged by the inner wall.

  Further, in this conventional optical fiber array, since the optical fiber is fixed on the fiber holding substrate via the adhesive, the optical fiber may be damaged due to the effect of the linear expansion coefficient of the adhesive. .

  Further, the fiber holding substrate provided in the conventional optical fiber array has a disadvantage that the formation of the pitch conversion section complicates the structure of the fiber holding substrate, thereby increasing the manufacturing cost.

  Therefore, an object of the present invention is to provide an optical fiber array capable of preventing the optical fiber whose pitch has been converted from being damaged and improving reliability, a method of manufacturing the same, and an optical device.

  In order to achieve the above-described object, an optical fiber array according to the present invention includes a first holding unit that holds a plurality of optical fibers arranged at a first pitch and a plurality of optical fibers that are different from the first pitch. A second holding unit arranged and held at a second pitch, and a second holding unit which is located between the first holding unit and the second holding unit and which is not in contact with the plurality of optical fibers and is not in contact with the plurality of optical fibers; And a space for converting the pitch into a pitch.

  According to the optical fiber array according to the present invention configured as described above, the portion of each optical fiber that is converted from the first pitch to the second pitch is not in contact with the fiber holding substrate, The position of each optical fiber is not regulated in the space. Therefore, in the optical fiber array of the present invention, when vibration or shock is applied during use or when thermal expansion or thermal contraction occurs, the optical fiber is damaged at the portion where the pitch is converted. Is prevented. Further, since the optical fiber array according to the present invention has a relatively simple configuration, the manufacturing cost can be reduced.

  Further, in the optical fiber array according to the present invention, at least one of the boundary between the first holding unit and the space and the boundary between the second holding unit and the space is provided with an optical fiber. Preferably, an inclined portion is provided to avoid contact with the fiber. This reliably prevents each optical fiber from being damaged at the boundary.

In the optical fiber array according to the present invention, the position of the optical axis of the optical fiber held by the first holding portion and the position of the optical axis of the optical fiber held by the second holding portion may be different from each other. _P the maximum displacement amount in the direction perpendicular to the axis delta, radius of curvature r of the optical fiber in the space portion is not less than 30 mm, the length L of the space of the optical axis direction of the optical fiber, L ≧ √ {delta _P it is preferable to satisfy the (4r-Δ _P)}. This prevents the optical fiber bent in the space from being damaged at the bent portion. Note that the maximum displacement of delta _P described above, among the plurality of optical fibers that is converted from the first pitch in the space portion to the second pitch, points to the displacement amount of the optical fiber radius of curvature is minimum I have.

  Further, an optical device according to the present invention includes the above-described optical fiber array according to the present invention, and an optical element corresponding to a plurality of optical fibers.

  Further, in the method for manufacturing an optical fiber array according to the present invention, the first holding unit holding the plurality of optical fibers at the first pitch, and holding the plurality of optical fibers at the second pitch different from the first pitch. A second holding portion to be formed, and a space portion located between the first holding portion and the second holding portion for converting the first pitch to the second pitch without contacting the plurality of optical fibers. Mounting a plurality of optical fibers on the fiber holding substrate having the above. In this step, the optical fibers are held by using a pitch conversion jig provided with a guide surface for guiding the holding grooves of the second holding portion on at least one end in the arrangement direction of the plurality of optical fibers. The plurality of optical fibers are converted into a second pitch by pushing the plurality of optical fibers by a fixing member for fixing the plurality of optical fibers in the groove.

  According to the above-described method for manufacturing an optical fiber array according to the present invention, by pushing a plurality of optical fibers into the holding groove by the fixing member, the optical fibers are moved along the guide surface of the pitch conversion jig. Each optical fiber is regulated so that each optical fiber is easily and reliably converted from a first pitch to a second pitch.

  Further, in the step of the method for manufacturing an optical fiber array according to the present invention, the guide portion having another guide surface for guiding the plurality of optical fibers into the holding groove of the second holding portion is provided on the outer periphery of the fiber holding substrate. A pitch conversion jig provided on the side of the second holding portion of the portion, which is provided at a middle portion in the arrangement direction of the plurality of optical fibers, is used. Accordingly, even when the second holding unit has a holding groove formed by combining a plurality of pitches different from each other, each optical fiber can be easily and reliably guided to the holding groove.

  As described above, according to the optical fiber array of the present invention, the first holding unit that holds the plurality of optical fibers arranged at the first pitch, and the second holding unit that holds the plurality of optical fibers different from the first pitch And a space for converting the first pitch to the second pitch in a non-contact manner with the plurality of optical fibers. It is possible to prevent breakage of the converted optical fiber and improve reliability. Further, since the optical fiber array according to the present invention has a relatively simple configuration, the manufacturing cost can be reduced.

  Further, according to the method of manufacturing an optical fiber array according to the present invention, the optical fiber is fixed to the holding groove by using a pitch conversion jig provided with a guide surface for guiding the holding groove of the second holding portion. By pressing a plurality of optical fibers by the fixing member for performing the operation, each optical fiber can be easily and reliably converted from the first pitch to the second pitch.

  Hereinafter, specific embodiments of the present invention will be described with reference to the drawings.

(1st Embodiment)
As shown in FIGS. 1A to 1C and 2, the optical fiber array 1 converts a tape type optical fiber 10 having a plurality of optical fibers 11 and a pitch of the plurality of optical fibers 11 by converting the pitch. A fiber holding substrate 12 for holding the optical fiber 11 and a fixing member 13 for fixing the optical fiber 11 whose pitch has been converted are provided.

  In the tape type optical fiber 10, a plurality of optical fibers 11 having a cladding diameter of 125 μm and a coating diameter of 250 μm are arranged in a line with their optical axes parallel to each other, and are integrally coated with a coating material such as an ultraviolet-curable resin material. Is formed. In this tape-type optical fiber 10, the optical fibers 11 are arranged at a first pitch P1, that is, at intervals of 250 μm.

  The fiber holding substrate 12 is formed of, for example, silicon in a plate shape, and includes a first holding unit 16 that holds the tape-type optical fiber 10 in which the plurality of optical fibers 11 are arranged at the first pitch P1, and a plurality of A second holding portion 17 for holding the optical fibers 11 at the second pitch P2 and a space portion 18 for converting the first pitch P1 to the second pitch P2 without contacting the plurality of optical fibers 11 are provided. It has integrally.

  As shown in FIGS. 3A to 3C, the first holding unit 16 is a holding recess for holding the optical fiber 11 in the width direction of the tape-type optical fiber 10 in which the optical fibers 11 are arranged. 16a is provided. The tape type optical fiber 10 is placed in the holding recess 16 a and fixed by the adhesive 19. Further, one end side of the tape type optical fiber 10 held by the first holding portion 16 is guided to the space portion 18 side in a state where the coating material of each optical fiber 11 is removed and the clad is exposed. I have.

  A plurality of holding grooves 17a having a V-shaped cross section for holding the optical fibers 11 are formed in the second holding portion 17 at a second pitch P2 smaller than the first pitch P1. The second pitch P2 is set, for example, at an interval of 125 μm, and is set to be equal to the alignment pitch of the waveguides when applied to a waveguide described later.

  The space portion 18 is provided between the first holding portion 16 and the second holding portion 17 as shown in FIGS. 2 and 3A and 3B. A concave portion 18a is formed to be continuous with the holding concave portion 16a of the first holding portion 16.

  As shown in FIG. 2, the first holding unit 16 and the space 18 have the same height from the bottom surface of the fiber holding substrate 12 in the thickness direction of the fiber holding substrate 12 and are formed continuously. . The second holding part 17 is formed to be slightly higher than the first holding part 16 and the space part 18 by the thickness of the coating material of the tape-type optical fiber 10.

  Accordingly, the distance between the optical fibers 11 guided from the first holding unit 16 side is gradually reduced without contacting the inner wall and the bottom surface of the space 18 in the width direction, and the optical fibers 11 are held by the second holding unit 17. Have been.

  The holding concave portion 16a of the first holding portion 16, the holding groove 17a of the second holding portion 17, and the concave portion 18a of the space portion 18 will be described later in detail. Each is formed with precision.

  The fixing member 13 is formed in a rectangular parallelepiped block shape by, for example, silicon or glass. The fixing member 13 is placed so as to be in contact with the respective optical fibers 11 held in the holding grooves 17 a of the second holding portion 17 so as to be in contact therewith, and is mounted on the second holding portion 17 via the adhesive 19. Fixed. In the first embodiment, the holding groove 17a of the second holding portion 17 is formed in a V-shaped cross section, but may be formed in a rectangular shape or a circular shape.

  Next, the pitch conversion jig 21 used when manufacturing the above-described optical fiber array 1 will be described.

  As shown in FIGS. 4A and 4B, the pitch conversion jig 21 has a set of guide plates 22a and 22b and a base 23 that supports the guide plates 22a and 22b. I have.

  As shown in FIGS. 5A and 5B, the guide plates 22a and 22b are formed in a symmetrical shape with the fiber holding substrate 12 interposed therebetween. 9 are provided integrally with the guide portions 25 for guiding each optical fiber 11 so as to smoothly convert from the first pitch P1 to the second pitch P2 by the method shown in FIG. I have. Each guide portion 25 has a slanted guide surface 25a for gradually reducing the pitch of each optical fiber 11.

  In each guide surface 25a, the opposing interval on the upper end side is set to the width of each optical fiber 11 arranged at the first pitch P1, and the opposing interval on the lower end side is set at the second pitch P2. The width of the optical fiber 11 is set. Therefore, the amount of inclination of the guide surface 15a is appropriately set according to the second pitch P2.

  In addition, guide recesses 26 for guiding the fixing member 13 to the second holding portion 17 are formed in each of the guide plates 22a and 22b. Further, each of the guide plates 22a and 22b is provided with a positioning hole 27 for positioning with respect to the base 23.

  As shown in FIGS. 6A and 6B, the base 23 is provided with a mounting recess 29 in which the fiber holding substrate 12 is mounted at substantially the center of the main surface. Positioning pins 28 for positioning and mounting the guide plates 22a and 22b are provided upright. The base 23 is mounted by positioning the guide plates 22a and 22b at predetermined positions by inserting positioning pins 28 into the positioning holes 27 of the guide plates 22a and 22b. Here, the positional relationship between the fiber holding substrate 12 and each of the guide plates 22a and 22b is, as shown in FIG. 9, between the center of the opposing interval of the guide surface 25a and the outermost groove of the plurality of holding grooves 17a of the fiber holding substrate 12. Is desirably positioned so as to be aligned with the center.

  A method for manufacturing the optical fiber array 1 using the pitch conversion jig 21 configured as described above will be described with reference to the drawings.

  First, the fiber holding substrate 12 is mounted in the mounting recess 29 of the base 23, and the guide plates 22a and 22b are attached, and the pitch conversion jig 21 is assembled.

  As shown in FIGS. 7 and 8 (a), in step 31, the coating material of the tape-type optical fiber 10 is removed, and the optical fibers 11 with the clad exposed are cleaned, so that the plurality of optical fibers 11 are removed. To separate. Then, as shown in FIGS. 8B and 8C, in step 32, the tape type optical fiber 10 and the plurality of optical fibers are placed on the fiber holding substrate 12 placed on the pitch conversion jig 21. 11 is placed horizontally.

  Next, as shown in FIGS. 8D and 8E, in step 33, the fixing member 13 is placed above the plurality of optical fibers 11 and at the position of the guide recess 26 of each of the guide plates 22a and 22b. I do. Subsequently, as shown in FIGS. 8F and 8G, in step 34, the tape-type optical fiber 10 and the plurality of optical fibers 11 are moved downward, and at the same time, the fixing member 13 is moved along the guide recess 26. The optical fiber 11 is moved along the guide surface 25a of each of the guide plates 22a and 22b by being pushed into the second holding portion 17 side, is smoothly converted into the second pitch P2, and is held in the holding groove 17a. Is done. In step 35, each optical fiber 11 held by the second holding unit 17 is fixed between the fixing member 13 and the second holding unit 17 by filling with the adhesive 19. In step 36, the tape-type optical fiber 10 is also fixed to the first holding unit 16 by the adhesive 19.

  The fiber holding substrate 12 to which each optical fiber 11 is fixed is removed from the pitch conversion jig 21 to have a structure shown in FIG. Finally, in step 37, the end faces of the fiber holding substrate 12, the optical fiber 11, and the fixing member 13 on the side of the second holding portion 17 are polished, and the optical fiber array 1 is completed.

  Therefore, by using the pitch conversion jig 21, when manufacturing the optical fiber array 1, the optical fibers 11 can be reliably and satisfactorily converted from the first pitch P1 to the second pitch P2. The completed optical fiber array 1 is detached from the pitch conversion jig 21 so that the guide surface 25a for converting the optical fibers 11 from the first pitch P1 to the second pitch P2 is provided on the fiber holding substrate 12. Does not remain on the side.

  That is, in the optical fiber array 1, each optical fiber 11 is allowed to move slightly in the space 18 of the fiber holding substrate 12, so that damage to each optical fiber 11 due to impact, vibration, or the like can be prevented. Furthermore, since the optical fiber 11 does not come into contact, damage can be prevented.

  Note that each optical fiber 11 may be fixed to the second holding portion 17 so as to be slightly bent in the concave portion 18a of the space portion 18 as necessary. By doing so, the optical fiber 11 in the space 18 acts as a damper, and it is possible to prevent the optical fiber 11 from protruding from the end face of the optical fiber array 1 and being pulled in due to expansion and contraction of the member.

  Further, the optical fiber 11 bent in the space 18 is held by the first and second holding portions so as to ensure a bending radius of curvature of the optical fiber of 30 [mm] or more which is generally determined. It is desirable to previously set the length of the space 18 parallel to the optical axis direction of the optical fiber. A method for setting the length of the space 18 will be described later.

  As described above, according to the optical fiber array 1, by providing the fiber holding substrate 12 in which the space 18 is provided between the first holding unit 16 and the second holding unit 17, each optical fiber 11 Since the slightly curved portion converted from the first pitch P1 to the second pitch P2 is not in contact with the fiber holding substrate 12, the position of each optical fiber 11 is not restricted. For this reason, the optical fiber array 1 can prevent the optical fiber 11 from being damaged when vibration, shock, or the like is applied during use, or when the fiber holding substrate 12 thermally expands or contracts. Can be improved. Further, since the optical fiber array 1 has a relatively simple configuration, the manufacturing cost can be reduced.

  Then, the optical fiber array 1 can set the pitch of the optical fibers 11 to be equal to the alignment pitch of the waveguides by reliably converting the pitch of each optical fiber 11 when applied to an example of a waveguide described later. Therefore, it is preferable.

  If necessary, the optical fiber 11 has an end on the side of the second holding portion 17 for converting a beam into parallel light or condensed light, for example, a collimator lens or a graded index type optical fiber. May be provided by being joined by fusion splicing or the like.

  By the way, the pitch conversion jig 21 used when manufacturing the above-described optical fiber array 1 has a configuration in which the guide surfaces 25a for guiding the optical fibers 11 on both sides in the arrangement direction of the tape-type optical fibers 10 are provided. However, a guide member may be provided to guide the central optical fiber 11 in the arrangement direction of the optical fibers 11 to the holding groove according to the second pitch P2.

  As shown in FIGS. 10A to 10C and 11, when the second holding portion 17 has the holding groove 17 b in which a plurality of different pitches are combined, as shown in FIGS. A guide member 41 is provided thereon.

  As shown in FIGS. 10A to 10C, the guide member 41 is provided on the outer peripheral portion of the fiber holding substrate 12 on the side of the second holding portion 17. One end of the optical fiber 11 protruding to the outer peripheral side of the optical fiber 17 is guided.

  As shown in FIG. 11, the guide member 41 is formed in a triangular cross section and is provided at the center of the optical fibers 11 in the arrangement direction. Have a guide surface 41a for guiding the optical fiber 11 to the holding groove 17b. By pushing the fixing member 13 along the guide concave portion 26 of the pitch conversion jig 21, each optical fiber 11 is moved along the guide surface 25 a and the guide surface 41 a, so that the holding groove of the second holding portion 17 is formed. 17b can hold each optical fiber 11 easily and reliably.

  Therefore, the pitch conversion jig 21 is provided with the guide portion 41, so that the pitch between the optical fibers 11 located at the center side in the arrangement direction of the optical fibers 11 can be adjusted by the optical fibers 11 at both ends in the arrangement direction. It can be arranged to be larger than the pitch.

  As shown in FIG. 12, when the second holding portion 17 has a holding groove 17c in which a plurality of pitches different from each other are combined, a plurality of guides having respective guide surfaces 42a are provided in the pitch conversion jig 21. A member 42 may be provided, and these guide members 42 may be formed integrally. According to these guide members 42, the optical fibers 11 on both ends in the arrangement direction of the optical fibers 11 can be arranged with a larger pitch than the pitch between the optical fibers 11 on the center side.

  Similarly, in the pitch conversion jig 21, as shown in FIG. 13, when the second holding unit 17 has a holding groove 17 d in which a plurality of pitches different from each other are combined, a plurality of guide surfaces 43 a are provided. A guide member 43 may be provided. According to the guide member 43, only the optical fibers 11 at one end in the arrangement direction of the optical fibers 11 can be arranged with a larger pitch than the pitch between the other optical fibers 11.

  In addition, these guide members 41, 42, and 43 may be provided detachably with respect to the pitch conversion jig 21 as necessary. As described above, the series of optical fiber arrays described with reference to the drawings has four cores. However, a plurality of optical fibers having two or more cores can be similarly manufactured.

(Second embodiment)
Next, an optical fiber array according to a second embodiment will be described with reference to the drawings. In the optical fiber array of the second embodiment, the same members as those of the above-described optical fiber array 1 are denoted by the same reference numerals, and description thereof will be omitted.

  As shown in FIGS. 14A to 14C and 15, the optical fiber array 2 converts the pitch of the tape type optical fiber 10 having the plurality of optical fibers 11 and the pitch of the plurality of optical fibers 11. A fiber holding substrate 52 for holding, a fixing member 53 for fixing the tape type optical fiber 10 and each optical fiber 11, and a fixing member 54 for fixing each optical fiber 11 whose pitch has been converted are provided. ing.

  The fiber holding substrate 52 is formed of, for example, silicon in a flat plate shape, and includes a first holding portion 56 that holds the plurality of optical fibers 11 at a first pitch P1, and a plurality of optical fibers 11 that have a second pitch P2. And a space 58 for converting the plurality of optical fibers 11 from the first pitch P1 to the second pitch P2.

  As shown in FIGS. 16A to 16C, the first holding portion 56 has a V-shaped cross section for holding each optical fiber 11 from which the coating material of the tape-type optical fiber 10 has been removed. A holding groove 56a is provided. The tape type optical fiber 10 is placed in the holding groove 56 a and fixed by the adhesive 19. Further, one end side of the tape type optical fiber 10 held by the first holding portion 56 is guided to the space portion 58 side in a state where the coating material of each optical fiber 11 is removed and the clad is exposed. I have.

  In the second holding portion 57, a plurality of holding grooves 57a having a V-shaped cross section for holding each optical fiber 11 are formed at a second pitch P2 smaller than the first pitch P1.

  The space portion 58 is provided between the first holding portion 56 and the second holding portion 57, as shown in FIGS. A concave portion 58a that is continuous with the holding groove 56a is formed.

  As shown in FIG. 15, the first holding portion 56 and the second holding portion 57 have the same height from the bottom surface of the fiber holding substrate 52 and are formed continuously. In addition, the recess 58 a of the space 58 is formed to be slightly lower than the first holding portion 56 and the second holding portion 57, and the non-contact state with each optical fiber 11 is ensured.

  Therefore, the distance between the optical fibers 11 guided from the first holding portion 56 is gradually narrowed without contacting the inner wall and the bottom surface in the width direction of the space portion 58, and the optical fibers 11 are held by the second holding portion 57. Have been.

  The holding groove 56a of the first holding part 56, the holding groove 57a of the second holding part 57, and the recess 58a of the space 58 are formed with high precision by performing anisotropic etching on the Si substrate. .

  The fixing member 53 is formed in a substantially L-shaped block shape using, for example, silicon or glass. One end of the fixing member 53 is abutted on each optical fiber 11 held in the holding groove 56a of the first holding portion 56 with the cladding exposed by removing the covering material of the tape-type optical fiber 10 and contacting the same. And is fixed on the first holding portion 56 via the adhesive 19. Further, the tape-type optical fiber 10 is fixed to the other end of the fixing member 53 by an adhesive 19.

  The fixing member 54 is formed in a rectangular parallelepiped block shape by, for example, silicon or glass. The fixing member 54 is placed so as to straddle each optical fiber 11 held in the holding groove 57 a of the second holding portion 57 so as to be in contact therewith, and is placed on the second holding portion 57 via the adhesive 19. Fixed. Further, in the second embodiment, the 56a of the first holding portion 56 and the 57a of the second holding portion 57 are V-shaped, but may be rectangular or circular.

  In the optical fiber array 2, since each optical fiber 11 is slightly movable in the space portion 58 of the fiber holding substrate 52, damage to each optical fiber 11 due to impact or vibration can be prevented. Further, since the optical fiber 11 does not come into contact, breakage can be prevented.

  In addition, each optical fiber 11 may be fixed to the second holding portion 57 so as to be slightly bent in the concave portion 58 a of the space portion 58 as necessary. By doing so, the optical fiber in the space acts as a damper, and it is possible to prevent the optical fiber at the end face of the optical fiber array from protruding and retracting due to expansion and contraction of the member.

  As shown in FIGS. 17A and 17B, and FIGS. 18A and 18B, the fiber holding substrate 52 includes a first holding portion 56 of a space 58, Each optical fiber 11 is formed at a boundary portion with the space portion 58, and each inclined surface 60 is formed continuously with each holding groove 56a and the bottom surface of the concave portion 58a to prevent the boundary portion from contacting the optical fiber 11. Preferably. It is publicly known that when the first holding portion 56 and the space 58 of the fiber holding substrate 52 are formed by one mask pattern by anisotropic etching, A so-called under-etching occurs due to a difference in the etching rate depending on the crystal orientation, and an inclined surface 60 is formed continuously at the boundary between each holding groove 56a and the bottom surface of the recess 58a. By providing these inclined surfaces 60, it is possible to prevent each optical fiber 11 from being damaged at the boundary between the first holding portion 56 and the space portion 58.

(Third embodiment)
An optical switch to which the above-described optical fiber arrays 1 and 2 are applied will be described with reference to the drawings. The optical fiber array provided in the optical switch according to the present embodiment has almost the same basic configuration as the above-described optical fiber array 1 except that the pitch of each optical fiber is different. For convenience, the same members are denoted by the same reference numerals. The description is omitted.

  As shown in FIG. 19, the optical switch 3 includes an optical fiber array 1 having optical fibers 11a to 11d, a substrate 81 provided with fixed mirrors 86a to 86d and movable mirrors 87a and 87b, And driving means (not shown) arranged above or below.

  The optical fiber array 1 is provided on a substrate 81, and the distal ends of the optical fibers 11a to 11d are arranged at unequal intervals so that the optical path length is adjusted as described later. In the present embodiment, the optical fiber is divided into a set of optical fibers 11a and 11c and a set of optical fibers 11b and 11d, and one of the sets (for example, the optical fibers 11a and 11c) is an emission-side optical fiber and the other set ( For example, the optical fibers 11b and 11d) are the incident side optical fibers.

  The fixed mirrors 86a to 86d are directly fixed on the substrate 81. On the other hand, the movable mirrors 87a and 87b are provided on a movable portion 89 that can move upward or downward with respect to the substrate 81. The movable portion 89 is located in a concave portion 81a provided in the substrate 81, and is continuous with a flat portion 89a, a beam portion 89b having elasticity connecting the flat portion 89a to the inner peripheral surface of the concave portion 81a, and a continuous portion from the flat portion 89a. And a stage portion 89c formed as described above. The movable mirrors 87a and 87b are provided on the stage 89c. As shown schematically in FIG. 20, the fixed mirror 86a is located in front of the tip of the optical fiber 11a, and the movable mirror 87a and the fixed mirror are located in front of the tip of the optical fiber 11b. The movable mirror 87b and the fixed mirror 86c are located in front of the tip of the optical fiber 11c, and the fixed mirror 86d is located in front of the tip of the optical fiber 11d. When viewed in the thickness direction of the substrate 81, the movable mirrors 87a and 87b face the optical fibers 11b and 11c when the movable portion 89 is at the initial position as shown in FIG. Or, when it moves downward, it comes to a position not facing the optical fibers 11b and 11c. The tips of the optical fibers 11a to 11d are arranged at unequal intervals, but their optical axes are parallel to each other, and the reflecting surfaces of the fixed mirrors 86a to 86d and the movable mirrors 87a and 87b are all located at these optical axes. It is arranged in a posture inclined at 45 degrees to the other.

  In the present embodiment, a dummy stage section 89c, movable mirrors 87a and 87b, and fixed mirrors 86a to 86d, which are exactly the same as described above, are provided on the opposite side of the movable section 89 from the optical fibers 11a to 11d. I have. Accordingly, the movable portion 89 has a completely symmetrical shape, so that unnecessary movement such as twisting does not occur during movement. Therefore, the relative angles and relative positions of the movable mirrors 87a and 87b with respect to the beam are accurately maintained.

  Note that the optical fibers 11a to 11d of the present embodiment are fiber collimators provided with graded index optical fibers, the end faces of which are inclined about 3 to 8 degrees by cleave or polishing, and are provided with an anti-reflection coating. Return loss has been reduced. Each of the optical fibers 11a to 11d is arranged such that the distal ends where the graded index optical fibers are provided are substantially aligned.

  The driving means provided above or below the substrate 81 is an electromagnet or an electrostatic actuator which exerts an attractive force or a repulsive force on the movable portion 89. Since this is a conventionally well-known structure, it is shown and described here. Is omitted. When an electromagnet is used as the driving unit, a magnetic body (not shown) is provided in the movable unit 89. When an electrostatic actuator is used as the driving means, the movable part 89 is inserted between a pair of electrodes (not shown).

  In the optical switch 1 having such a configuration, in the state shown in FIG. 19, the beam portion 89b of the movable portion 89 is not elastically deformed, and the movable mirrors 87a and 87b on the flat portion 89a are connected to the optical fibers 11b and 11c. And is located to face. Therefore, for example, as shown by a solid line in FIG. 20, the beam emitted from the optical fiber 11a is reflected by the fixed mirror 86a, further reflected by the movable mirror 87a, and enters the optical fiber 11b. The beam emitted from the optical fiber 11c is reflected by the movable mirror 87b, further reflected by the fixed mirror 86d, and enters the optical fiber 11d. Thus, an optical path from the optical fibers 11a to 11b and an optical path from the optical fibers 11c to 11d are formed.

  On the other hand, when the driving means is driven to exert a suction force or a repulsive force on the movable portion 89, the beam portion 89b is elastically deformed, and the flat portion 89a and the stage portion 89c move above or below the substrate 81. As a result, the movable mirrors 87a and 87b on the stage 89c move to positions that do not face the distal ends of the optical fibers 11a to 11d. That is, since the movable mirrors 87a and 87b retreat from the optical paths of the optical fibers 11a to 11d, the beam emitted from the optical fiber 11a is reflected by the fixed mirror 86a, for example, as shown by a dashed line in FIG. Further, the light is reflected by the fixed mirror 86d and enters the optical fiber 11d. Since the movable mirrors 87a and 87b do not exist on the optical path, the beam emitted from the optical fiber 11c is reflected by the fixed mirror 86c, further reflected by the fixed mirror 86b, and enters the optical fiber 11b. Thus, an optical path from the optical fibers 11a to 11d and an optical path from the optical fibers 11c to 11b are formed.

  The optical path length in this case will be described. First, in a state where the movable section 89 is at the initial position shown (before switching), an optical path from the optical fiber 11a to the optical fiber 11c via the fixed mirror 86a and the movable mirror 87a is formed. The length (the distance between the distal ends of the optical fibers) is E + A + E = A + 2E, as shown in FIG. Then, an optical path from the optical fiber 11c to the optical fiber 11d via the movable mirror 87b and the fixed mirror 86d is also formed, and the optical path length is E + C + E = C + 2E. On the other hand, when the movable part 89 is moved, an optical path from the optical fiber 11a to the optical fiber 11d via the fixed mirror 86a and the fixed mirror 86d is formed, and the optical path length is E + A + B + C + E = A + B + C + 2E. Then, an optical path from the optical fiber 11c to the optical fiber 11b via the fixed mirror 86c and the fixed mirror 86b is also formed, and the optical path length is E + D + B + D + E = B + 2D + 2E. Here, by setting the relative positional relationship between each of the optical fibers 11a to 11d, the fixed mirrors 86a to 86d, and the movable mirrors 87a and 87b as A = C = B + 2D, three optical paths out of four possible optical paths are set. Lengths are equal. Therefore, with respect to these three optical paths, even when the optical fibers 11a to 11d are fiber collimators, light can be transmitted between the optical fibers under all the optimum conditions.

  In the optical means of the optical communication system generally called an add-drop system, an optical path is configured by combining four optical fibers “IN”, “OUT”, “ADD”, and “DROP”. "-OUT", "ADD"-"OUT", and "IN"-"DROP" are important so that these paths can transmit light with as low loss as possible. Therefore, at least these optical path lengths, specifically, the distances between the ends of the optical fibers are made to coincide with each other, and are arranged so as to be an optimum distance according to the characteristics of the fiber collimator. However, the optical path "ADD"-"DROP" is usually not required much in the optical communication of the add-drop method, so that the optical path length is not particularly limited. Therefore, in the configuration shown in FIG. 20, if the optical fibers 11a to 11d are set in the order of, for example, "ADD", "OUT", "IN", and "DROP", the optical path length of the "IN"-"OUT" optical path ( B + 2D + 2E), the optical path length of the "ADD"-"OUT" optical path (A + 2E), and the optical path length of the "IN"-"DROP" optical path (C + 2E) can be made equal, and the "ADD"-"DROP" optical path Only the optical path length (A + B + C + 2E) can be different. According to this, although the optical path lengths of all the optical paths are not the same, a sufficient effect can be obtained. Note that the combination of “ADD”, “OUT”, “IN”, and “DROP” is not limited to the above, and the relationship between the incidence and emission of light is appropriate, and three combinations other than “ADD” − “DROP” Any combination can be set freely so long as the optical path lengths of the optical paths are all equal.

  As described above, by setting A = C = B + 2D, three optical paths (“IN” − “OUT”, “ADD” − “OUT”, “IN” − “DROP” in the case of the add / drop method) are set. The optical path length can be made equal. Actually, appropriate dimensions are selected in consideration of the characteristics of the fiber collimator, the diameter of the fiber, the size of each mirror, and the like.

  In the present embodiment, one mirror does not simultaneously reflect a plurality of beams, and one mirror reflects only one beam. Therefore, each mirror can be downsized. Since the disposition area can be reduced, the distal ends of the optical fibers 11a to 11d can be brought closer to each other, and the optical path length can be shortened. Then, by shortening the optical path length, the allowable range for the deviation of the position or angle of the optical fibers 11a to 11d and each of the mirrors 86a to 86d, 87a, 87b is increased.

  Further, since the movable mirrors 87a and 87b are small, preferably three times or less, more preferably about 1.5 times the spot diameter of the beam, the entire movable part is reduced in size and weight, and the output of the driving means such as an electromagnet is reduced. Can be reduced, and the switching speed can be increased for high-speed optical communication by increasing the resonance frequency. Furthermore, it is also possible to reduce the manufacturing cost by increasing the number of optical switches that can be manufactured from one wafer by reducing the size of the entire optical switch.

  Here, a specific manufacturing process of the fiber holding substrate 12 shown in FIGS. 3A to 3C will be described with reference to the drawings.

  As a Si substrate constituting the fiber holding substrate 12, for example, a rectangular structure having a length of 12 mm, a width of 4 mm, and a thickness of 0.4 mm was produced.

First, an SiO ₂ film serving as a mask material is deposited on both surfaces of a Si wafer by, for example, a thermal oxidation method or a CVD (Chemical Vapor Deposition) method. The thickness of the SiO ₂ film varies depending on the depth of the groove to be processed by the etching process, and is set, for example, to several hundred μm to several μm. Subsequently, a photoresist is applied on the main surface of the Si wafer on which the holding recess 16a, the holding grooves 17a and the space 18 are processed, for example, by a spin coating method. Similarly, a photoresist is applied to the back surface of the unprocessed Si wafer. After applying a photoresist, the photoresist is exposed and developed to form a photoresist in a desired pattern.

Then, as shown in FIGS. 21A and 21B, the silicon substrate 37 is subjected to wet etching with a solution such as buffered hydrofluoric acid (BHF) or hydrofluoric acid (HF). SiO ₂ film 38 on the main surface of is formed in a predetermined mask pattern. In this mask pattern, as shown in FIG. 21 (b), in consideration of forming the inclined surface 60 by under-etching, a boundary portion where the holding groove 17a and the concave portion 18a are formed is extended by a predetermined dimension m. Is secured. In addition, it may be processed by reactive ion etching (RIE), and in that case, it is not necessary to apply a photoresist (not shown) on the back surface.

Subsequently, as shown in FIG. 21C, on the Si substrate 37 on which a predetermined mask pattern is formed by the SiO ₂ film 38, for example, tetramethyl ammonium hydroxide (TMAH), potassium hydroxide (KOH), or the like. By performing wet etching with an alkaline aqueous solution, the space 18 having the holding recess 16a, the holding groove 17a, and the recess 18a is processed, and the inclined surface 60 is formed by underetching.

Then, as shown in FIG. 21 (d) and FIGS. 21 (e) to 21 (g), after the holding groove 17a, the space 18 and the like are respectively formed in the Si substrate 37, a wet etching process using BHF or the like is performed. By removing the mask pattern by the SiO ₂ film 38 on the front and back surfaces of the Si substrate 37, the fiber holding substrate 12 in which the first and second holding portions 16, 17 and the space 18 are integrally formed is obtained. . FIGS. 21D and 21E to 21G show only one fiber holding substrate 12 and omit the other fiber holding substrates, but actually hold a plurality of optical fibers on a Si wafer. After the shape of the substrate 12 is formed, the substrate 12 is cut into a predetermined length × width by dicing.

  Next, a specific manufacturing process of the fiber holding substrate 52 shown in FIGS. 16A to 16C will be described with reference to the drawings.

  As the Si substrate constituting the fiber holding substrate 52, for example, a rectangular structure having a length of 15 mm, a width of 4 mm, and a thickness of 0.4 mm was produced. The manufacturing process of the fiber holding substrate 52 is basically the same as the manufacturing process of the fiber holding substrate 12 described above, and thus will be briefly described.

First, a mask pattern of the SiO ₂ film 38 is formed on the Si substrate 37 by photolithography in the same manner as in the above-described manufacturing process of the fiber holding substrate 12.

Subsequently, as shown in FIGS. 22A and 22B, wet etching is performed using a solution such as BHF or HF, so that the SiO ₂ film 38 on the main surface of the Si substrate 37 has a predetermined mask pattern. Formed. In this mask pattern, as shown in FIG. 22B, in consideration of forming the inclined surface 60 by under-etching, a boundary portion between the holding concave portion 56a and the space portion 58a, a holding groove 57a and the space portion are formed. An extension of a predetermined dimension m is secured at a boundary portion forming 58a.

  Next, as shown in FIG. 22C, the silicon substrate 37 on which the mask pattern is formed is subjected to wet etching with a solution such as TMAH or KOH, for example, so that the holding recess 56a, the holding groove 57a, and The space portions 58 having the concave portions 58a are respectively processed, and the inclined surfaces 60 are formed by under-etching.

  Then, as shown in FIG. 22 (d) and FIGS. 22 (e) to 22 (g), after the holding groove 57a, the space 58 and the like are respectively formed in the Si substrate 37, a wet etching process using BHF or the like is performed. By removing the mask pattern, the fiber holding substrate 52 in which the first and second holding portions 56 and 57 and the space 58 are integrally formed is obtained. FIGS. 22 (d) and 22 (e) to 22 (g) show only one fiber holding substrate 12 and omit the other fiber holding substrates, but actually hold a plurality of optical fibers on a Si wafer. After forming the substrate 12, the substrate 12 is cut into a predetermined size of length × width by dicing.

  Next, a method of setting the length of the space provided in the fiber holding substrate will be described. In the above-described optical fiber array, the light that is curved with the smallest radius of curvature in the space, such as the optical fiber located on the outermost periphery side of the first holding unit or the optical fiber with the largest displacement due to pitch conversion, for example. A space parallel to the optical axis direction of the optical fiber held by the first and second holding portions so that the fiber has an allowable curvature bending radius of 30 [mm] or more to prevent breakage or the like. The length of the part needs to be set.

First, as shown in FIG. 23, when the pitch of the optical fiber 11 is converted smaller through the space 63, a position P _a of the optical axis of the first holding portion 61 optical fiber 11 held in , the maximum displacement amount in the direction orthogonal to the optical axis between the position P _b of the optical axis of the second holding portion 62 optical fiber 11 held by the delta _P, the allowable radius of curvature r of the optical fiber 11 in the space portion 63 if but 30mm or _{more, | P a -P b | =} Δ P, a r ≧ 30 [mm],
Assuming that the position of the center of curvature with respect to the inflection point of the curved portion of the optical fiber 11 is dimension a in the length direction of the space 63 and dimension b in the width direction of the space 63, a ² = r ² − b ² is obtained,
The length L of the space 63 is
b = from being a _{(2r-Δ P) / 2} ,
a = 1/2 _{[√ {Δ P (4r-Δ} P)} ], and the
Since L = 2a,
_{L ≧ √ {Δ P (4r} -Δ P)} ··· Equation 1
It is calculated by

Also, as shown in FIG. 24, similarly, when the pitch of the optical fiber 11 is largely changed via the space 68, the position P _a of the optical axis of the optical fiber 11 held by the first holding unit 66 is similarly set. When the allowable curvature of the second holding portion maximum displacement amount in the direction orthogonal to the optical axis between the position P _b of the optical axis of the optical fiber 11 held by the 67 delta _P, the optical fiber 11 in the space portion 68 radius Assuming that r is 30 mm or more, the length L of the space 68 is calculated by the above equation (1).

  Therefore, the length L of the space portion is set so that the optical fiber that is bent most in the space portion satisfies Equation 1, thereby ensuring the reliability of the bent portion of the optical fiber that is bent in the space portion. You.

  As shown in FIG. 25, the length L of the space portion is such that the second pitch P2 of the optical fibers 11 is a displacement amount with respect to the 250 μm pitch when each optical fiber 11 is adjacent to the outer periphery of the coating material. It is necessary to set a larger value as becomes larger. When the optical fibers 11 are adjacent to each other on the outer periphery of the clad, the second pitch P2 is 125 μm, and the length L of the space is set to about 4 mm.

(Fourth embodiment)
An optical device in which the above-described optical fiber array is applied to an optical waveguide member will be described with reference to the drawings.

  As shown in FIG. 26, the optical device 4 includes an optical fiber array 69 that largely changes the pitch of the plurality of optical fibers 11, and an optical waveguide for guiding light emitted from each optical fiber 11 of the optical fiber array 69. A waveguide member 70 and a support substrate (not shown) that supports the optical fiber array 69 and the optical waveguide member 70 are provided.

  The optical fiber array 69 includes a first holding unit 71 that holds the plurality of optical fibers 11 at a first pitch P1, a second holding unit 72 that holds each optical fiber 11 at a second pitch P2, There is a space 73 for converting the optical fiber 11 from the first pitch P1 to the second pitch P2, and the optical fiber array 69 and the optical waveguide member 70 are connected using a refractive index matching agent. I have. The second pitch P2 is larger than the first pitch P1 and is unequally spaced.

  The optical waveguide member 70 is provided facing the emission end side of the optical fiber array 69. A plurality of optical paths 70a and 70b for guiding the light emitted from each optical fiber 11 are provided on the light guide path member 70, and the light of each optical fiber 11 held by the first and second holding portions 71 and 72 is provided. It is formed to be aligned in parallel with the axial direction, and an arbitrary optical path is selectively used.

  The optical waveguide member 70 is configured such that a beam is incident on each optical path 70a of the plurality of optical paths 70a and 70b, which faces the emission end of each optical fiber 11 of the optical fiber array 69, and faces the emission end of each optical fiber 11. The incident end of each optical path 70b that has not been subjected to light-shielding processing is optically terminated.

(Fifth embodiment)
As shown in FIG. 27, the optical device 5 includes an optical fiber array 74 for largely changing the pitch of the plurality of optical fibers 11 and an optical waveguide for guiding the light emitted from each optical fiber 11 of the optical fiber array 74. A waveguide member 75 and a support substrate (not shown) that supports the optical fiber array 74 and the optical waveguide member 75 are provided.

  The optical fiber array 74 includes a first holding unit 76 that holds the plurality of optical fibers 11 at a first pitch P1, a second holding unit 77 that holds each optical fiber 11 at a second pitch P2, There is a space 78 for converting the optical fiber 11 from the first pitch P1 to the second pitch P2, and the optical fiber array 69 and the optical waveguide member 70 are connected using a refractive index matching agent. I have. The second pitch P2 is smaller than the first pitch P1 and is equally spaced.

  The optical waveguide member 75 is provided to face the emission end side of the optical fiber array 74. A plurality of optical paths 75a for guiding outgoing light from each optical fiber 11 are provided in the optical waveguide member 75 in the optical axis direction of each optical fiber 11 held by the first and second holding portions 71 and 72. The optical paths 75a are formed at a pitch equal to the second pitch P2 of the optical fibers 11 held by the second holding section 72. Then, in the optical waveguide member 75, the beam is respectively incident on each optical path 75 a of the optical fiber array 74 where the emission end of each optical fiber 11 is opposed.

  Note that the optical fiber array according to the present invention is not limited to the configuration applied to the optical switch and the optical device having the optical waveguide described above, and as the optical element, for example, a light emitting element, a light receiving element, a mirror, It is suitably applied to another optical device including a lens, an attenuation filter, a wavelength filter, and the like.

1A and 1B are diagrams illustrating an optical fiber array according to a first embodiment of the present invention, wherein FIG. 1A is a plan view, FIG. 1B is a side view on one end, and FIG. 1C is a side view on the other end. FIG. 3 is a longitudinal sectional view showing the optical fiber array. It is a figure which shows a fiber holding substrate, (a) is a top view, (b) is a side view of one end side, (c) is a side view of the other end side. It is a figure which shows a pitch conversion jig, (a) is a top view and (b) is a side view. It is a figure which shows the guide member of a pitch conversion jig, (a) is a top view and (b) is a side view. It is a figure which shows the support member of a pitch conversion jig, (a) is a top view and (b) is a side view. 5 is a flowchart illustrating a method for manufacturing an optical fiber array. It is a figure for explaining a manufacturing method of an optical fiber array. It is a longitudinal cross-sectional view which shows typically the state in which an optical fiber is guided along the guide surface of a pitch conversion jig. It is a longitudinal cross-sectional view which shows the state which changes the pitch of an optical fiber using another guide part together, (a) is a top view, (b) is a side view which shows before pitch conversion, (c) is pitch conversion. It is a side view which shows a back. It is a longitudinal cross-sectional view which shows typically the state in which an optical fiber is guided by another guide part. It is a longitudinal cross-sectional view which shows the other example of the state which changes the pitch of an optical fiber using the said other guide part. It is a longitudinal cross-sectional view which shows another example of the state which changes the pitch of an optical fiber using the said other guide part. It is a figure which shows the optical fiber array of 2nd Embodiment, (a) is a top view, (b) is a side view of one end side, (c) is a side view of the other end side. FIG. 3 is a longitudinal sectional view showing the optical fiber array. It is a figure which shows a fiber holding substrate, (a) is a top view, (b) is a side view of one end side, (c) is a side view of the other end side. It is a figure which shows the guide surface of a fiber holding substrate, (a) is a top view and (b) is a longitudinal cross-sectional view. 3A and 3B are diagrams illustrating a state where an optical fiber is held by the fiber holding substrate, wherein FIG. 2A is a plan view and FIG. It is a top view showing an example of an optical switch to which an optical fiber array is applied. FIG. 3 is a schematic diagram for explaining an optical path length of each optical fiber. FIG. 4 is a schematic diagram for explaining a manufacturing process of the fiber holding substrate of FIG. 3. FIG. 17 is a schematic diagram for explaining a manufacturing process of the fiber holding substrate in FIG. 16. FIG. 4 is a diagram for explaining setting of a length of a space portion when a pitch of an optical fiber is converted into a small value. FIG. 4 is a diagram for explaining setting of a length of a space portion when a pitch of an optical fiber is largely changed. It is a figure showing the relation between the 2nd pitch after pitch conversion, and the length of the space. It is a top view showing the optical device of a 4th embodiment. It is a top view showing the optical device of a 5th embodiment. It is a top view showing an example of the conventional pitch conversion part. It is an exploded perspective view showing a pitch conversion part of the conventional optical fiber array.

Explanation of reference numerals

1, 2 optical fiber array 3 optical switch 4, 5 optical device 10 tape type optical fiber 11 optical fiber 12 fiber holding substrate 13 fixing member 16 first holding portion 16a holding recess 17 second holding portion 17a holding groove 18 space 18a concave portion 21 pitch conversion jig 25 guide portion 25a guide surface 60 inclined surface P1 first pitch P2 second pitch

Claims (22)

A first holding unit that holds a plurality of optical fibers arranged at a first pitch;
A second holding unit that holds the plurality of optical fibers arranged and held at a second pitch different from the first pitch;
A space located between the first holding unit and the second holding unit for converting the first pitch to the second pitch without contacting the plurality of optical fibers; Optical fiber array.   The optical fiber array according to claim 1, wherein the first holding unit holds a covering material that covers the plurality of optical fibers.   The optical fiber array according to claim 1, further comprising a fiber holding substrate provided with each of the first holding unit, the second holding unit, and the space.   The optical fiber array according to claim 3, wherein the first holding unit and the second holding unit are integrally formed on the fiber holding substrate.   The optical fiber array according to claim 1, wherein the optical fibers are held at an equal pitch in the second holding unit.   The optical fiber array according to claim 1, wherein the optical fibers are held at a plurality of different pitches in the second holding unit.   7. The optical fiber array according to claim 1, wherein the optical fibers are held at the second pitch smaller than the first pitch in the second holding unit. 8.     The optical fiber array according to any one of claims 1 to 6, wherein each of the optical fibers is held at the second holding portion at the second pitch larger than the first pitch.   9. The tape optical fiber according to claim 1, wherein the first holding unit holds a tape-type optical fiber in which the plurality of optical fibers are arranged integrally with their optical axes arranged in parallel with each other. 10. Fiber optic array.   The optical fiber array according to any one of claims 1 to 8, wherein the first holding unit is provided with a plurality of holding grooves for holding the plurality of optical fibers, respectively.   11. The optical fiber according to claim 1, wherein a lens member for converting light emitted from the end into parallel light is provided at an end on the side of the second holding unit. 12. 2. The optical fiber array according to claim 1.   At least one of the boundary between the first holding unit and the space and the boundary between the second holding unit and the space is in contact with the optical fiber. The optical fiber array according to any one of claims 1 to 11, further comprising an inclined portion for avoiding the inclination. The maximum displacement of the position of the optical axis of the optical fiber held by the first holding portion and the position of the optical axis of the optical fiber held by the second holding portion in a direction orthogonal to the optical axis. the amount of delta _P, the aforementioned radius of curvature r of the optical fiber in the space portion is not less than 30 mm, the length L of the space portion of the optical axis of the optical fiber,
_{L ≧ √ {Δ P (4r} -Δ P)}
The optical fiber array according to any one of claims 1 to 12, which satisfies the following.   14. The optical fiber array according to claim 1, wherein the fiber holding substrate is made of silicon.   The optical fiber array according to claim 14, wherein the first holding unit, the second holding unit, and the space are formed by an etching process.   An optical device comprising: the optical fiber array according to claim 1; and an optical element corresponding to the plurality of optical fibers. A first holding unit that holds a plurality of optical fibers at a first pitch, a second holding unit that holds the plurality of optical fibers at a second pitch different from the first pitch, A fiber holding substrate which is located between a holding portion and the second holding portion and has a space for converting the first pitch to the second pitch without contacting the plurality of optical fibers; Having a step of mounting the plurality of optical fibers,
In the step, at least one end in the arrangement direction of the plurality of optical fibers, using a pitch conversion jig provided with a guide surface for guiding the holding groove of the second holding unit, the optical fiber, A method for manufacturing an optical fiber array for converting the plurality of optical fibers to the second pitch by pushing the plurality of optical fibers by a fixing member for fixing the plurality of optical fibers to the holding groove.   The method of manufacturing an optical fiber array according to claim 17, wherein the optical fibers are held at an equal pitch by the second holding unit.   The method of manufacturing an optical fiber array according to claim 17, wherein the second holding unit holds the optical fibers at a plurality of different pitches.   20. The method of manufacturing an optical fiber array according to claim 17, wherein the second pitch is smaller than the first pitch.     20. The method of manufacturing an optical fiber array according to claim 17, wherein the second pitch is larger than the first pitch.   In the step, a guide portion having another guide surface for guiding the plurality of optical fibers to the holding groove of the second holding portion is provided on a side of the second holding portion on an outer peripheral portion of the fiber holding substrate. 18. The method of manufacturing an optical fiber array according to claim 17, wherein the pitch conversion jig is provided at a midpoint in the arrangement direction of the plurality of optical fibers.

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