JP2003241002A - Optical collimator and optical switch - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical collimator and an optical switch using the optical collimator, in which the loss of signal light due to a positional deviation between an optical fiber in which the signal light is made incident and a collimator lens which forms the signal light into parallel light is decreased. <P>SOLUTION: In the optical collimator which has a plurality of channel waveguides 18 formed on a substrate 10, and a plurality of two-dimensional lenses 20 which are formed on the substrate 10, provided at one end of each of the plurality of channel waveguides 18, and form the signal light propagating in the channel waveguides 18 into substantially parallel light, the pitch on one end of the plurality of channel waveguides 18 is broader than that on the other end. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical collimator for shaping signal light into parallel light and an optical switch for switching the path of signal light using the optical collimator.

[0002]

2. Description of the Related Art The structure of a conventional optical collimator is shown in FIG.
Will be explained. 8A is a plan view showing the structure of a conventional optical collimator, and FIG. 8B is a sectional view taken along the line AA ′ of FIG.
It is a line sectional view.

As shown in FIG. 8, as a structure of a conventional optical collimator, there is known a structure in which a plurality of collimating lenses 100 are arranged in parallel at a predetermined pitch.

An optical fiber 102 on which signal light is incident is connected to each collimator lens 100. The plurality of optical fibers 102 connected to the collimator lens 100 are arranged in parallel at the same pitch as the collimator lens 100.

Collimating lens 100 and optical fiber 10
2 are directly connected by, for example, an optical adhesive having a small difference in refractive index.

The signal light entering each optical fiber 102 propagates through the core of the optical fiber 100, and then enters the collimating lens 100 connected to the optical fiber 102. The signal light incident on the collimator lens 100 is shaped into substantially parallel light by the collimator lens 100.

[0007]

The collimating lens and the optical fiber described above are usually held on separate substrates. Therefore, when a difference in thermal expansion occurs between the base material holding the collimator lens and the base material holding the optical fiber, the positions of the collimator lens and the optical fiber are displaced.

In the state where such a position shift occurs,
When signal light enters the collimator lens from the optical fiber, the outgoing direction of the light changes. Further, when a collimator lens is used for focusing light, it becomes impossible to efficiently couple light to the optical fiber.

An object of the present invention is to provide an optical collimator capable of reducing the change in the propagation direction of signal light and the coupling loss due to the positional deviation between the optical fiber into which the signal light is incident and the collimating lens that shapes the signal light into parallel light. And to provide an optical switch using this optical collimator.

[0010]

The above object is to provide a plurality of optical waveguides formed on a substrate, and the optical waveguides formed on the substrate and provided at one end of each of the plurality of optical waveguides to propagate through the optical waveguides. An optical collimator having a plurality of collimating lenses for shaping the signal light into substantially parallel light, wherein the pitch at the one end of the optical waveguide is wider than the pitch at the other end. To be done.

Further, the above object is to provide a plurality of input side optical waveguides formed on the input side substrate and the input side optical waveguides formed on the input side substrate and provided at one ends of the plurality of input side optical waveguides, respectively. An input side optical transmission means having a plurality of input side collimator lenses that shape the signal light propagating through the side optical waveguide into substantially parallel light; and a deflection means that deflects the signal light emitted from the input side collimator lens, An optical switch having an output side optical transmission means on which the signal light deflected by the deflection means is incident, wherein the pitch at the one end of the input side optical waveguide and the output side optical waveguide is larger than the pitch at the other end. Achieved by an optical switch characterized by widening.

[0012]

[First Embodiment] An optical collimator and a method for manufacturing the same according to a first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a schematic view showing the structure of the optical collimator according to the present embodiment, and FIGS. 2 and 3 are process drawings showing the method for manufacturing the optical collimator according to the present embodiment.

First, the optical collimator according to the present embodiment will be explained with reference to FIG. FIG. 1A is a plan view showing the structure of the optical collimator according to the present embodiment, and FIG. 1B is a sectional view taken along the line AA ′ of FIG.

On the substrate 10, as shown in FIG. 1 (a), a plurality of channel waveguides 18 through which signal light propagates are formed in parallel. At one end of each channel waveguide 18,
Two-dimensional lenses 20 functioning as collimating lenses that shape the signal light propagating through the channel waveguide 18 into substantially parallel light in a plane parallel to the plane of the substrate 10 are formed.

As shown in FIG. 1B, a lower clad layer 12 made of epoxy resin is formed on the substrate 10. On the lower clad layer 12, a core layer 14 made of an epoxy resin having a higher refractive index than the epoxy resin forming the lower clad layer 12 is formed. Core layer 1
An upper clad layer 16 made of an epoxy resin having a refractive index lower than that of the epoxy resin forming the core layer 14 is formed on the surface 4. Thus, the lower clad layer 12, the core layer 14, and the upper clad layer 16 form the channel waveguide 18 and the two-dimensional lens 20 on the substrate 10.

A plurality of channel waveguides 1 formed in parallel
The vicinity of the other end of 8 has a narrow pitch so that a plurality of optical fibers on which signal light is incident can be connected in a state in which they are arranged at narrow intervals. The pitch of the plurality of channel waveguides 18 gradually narrows symmetrically from one end to which the two-dimensional lens 20 is connected to the other end.

Thus, the optical collimator according to the present embodiment is constructed.

Optical fibers 22 to which the signal light to be shaped into substantially parallel light enters are connected to the other ends of the channel waveguides 18 where the pitch is narrow. The optical fiber 22 is arranged in parallel with each V-shaped groove as a guide on a substrate 24 in which a plurality of V-shaped grooves (not shown) are formed in parallel at a predetermined pitch.

As described above, in the optical collimator according to the present embodiment, the plurality of optical fibers 22 on which the signal light is incident can be connected in a state in which the optical fibers 22 are arranged at a narrow interval, and the plurality of them have a narrow pitch near the other end. The main characteristic is to have the channel waveguide 18 of.

In the conventional optical collimator, a plurality of optical fibers are arranged according to the pitch of the plurality of collimating lenses, and the optical fibers and the collimating lenses are directly connected to each other. Since the width of the collimator lens is usually larger than the diameter of the optical fiber, it is necessary to match the pitch of the optical fiber with the large pitch of the collimator lens.
As a result, the optical fibers connected to the collimator lens are in a large gap. In such a state where the space is wide, the position of the optical fiber may change significantly due to thermal expansion of the base material holding the optical fiber. As a result, misalignment is likely to occur between the optical fiber and the collimator lens, and loss of signal light due to misalignment is likely to occur.

In order to prevent such a positional deviation of the optical fibers, it is necessary to make the intervals between the adjacent optical fibers close to each other and suppress the fluctuation of the positions of the optical fibers due to the thermal expansion of the base material holding the optical fibers. is there. However, the width of the collimator lens is usually larger than the diameter of the optical fiber, and it is difficult to set the width smaller than the diameter of the optical fiber. Therefore, if the optical fiber is directly connected to each of the plurality of collimator lenses arranged in parallel, it is not possible to make the interval between the adjacent optical fibers close.

Therefore, in the optical collimator according to the present embodiment, the pitch at the end where the optical fiber 22 is connected is narrower than the pitch at the end where the two-dimensional lens 20 is provided. Is provided. Thereby, it is not necessary to arrange the optical fibers 22 according to the pitch of the two-dimensional lens 20, and the optical fibers 22 can be arranged at a narrow interval. Therefore, even if the substrate 24 thermally expands, the position of the optical fiber 22 does not largely shift, and the loss of signal light due to the positional shift can be reduced. Further, even when the two-dimensional lens 20 has a wide pitch, it is possible to use optical fibers arranged at a predetermined narrow pitch. Further, since the position of the channel waveguide 18 with respect to the two-dimensional lens 20 functioning as a collimator lens does not shift, it is possible to reduce the shift in the emitting direction of the signal light and the coupling loss at the time of focusing.

As shown in FIG. 8, the collimating lens 100
In a conventional optical collimator in which the optical fiber 102 and the optical fiber 102 are directly connected, for example, the pitch of the optical fiber 102 is set to 0.62 mm in accordance with the pitch of the collimator lens 100.

On the other hand, in the optical collimator according to the present embodiment, the two-dimensional lens 20 is provided via the channel waveguide 18.
The optical fiber 22 is connected to. Therefore, for example, the pitch of the optical fiber 22 having a diameter of 250 μm including a core having a diameter of 10 μm and a clad having a diameter of 125 μm and having a diameter of 250 μm can be narrowed to 0.25 mm. That is, the plurality of optical fibers 22 can be arranged without a gap, and the occurrence of positional deviation can be suppressed. As described above, it is not necessary to match the pitch of the optical fibers 22 with the large pitch of the two-dimensional lens 20, and the optical fibers 22 can be arranged without a gap at a predetermined narrow pitch defined by the diameter thereof.

Next, the operation of the optical collimator according to the present embodiment will be described with reference to FIG.

The input signal light to be shaped into substantially parallel light is made incident from one end of each optical fiber 22 arranged in parallel on the substrate 24 at a predetermined pitch.

The signal light emitted from each optical fiber 22 is
The light enters the channel waveguide 18 connected to each optical fiber 22.

The signal light incident on each channel waveguide 18 propagates inside each channel waveguide 18.

The signal light propagating through each channel waveguide 18 enters a two-dimensional lens 20 provided at the end of each channel waveguide 18.

The signal light incident on the two-dimensional lens 20 is shaped by the two-dimensional lens 20 into substantially parallel light in a direction substantially parallel to the plane of the substrate 10.

Thus, the signal light incident on each optical fiber 22 is shaped into a substantially parallel light in a direction substantially parallel to the plane of the substrate 10, and then emitted from each two-dimensional lens 20.

As described above, in the optical collimator according to the present embodiment, the pitch of the signal light incident on the plurality of optical fibers 22 arranged at narrow intervals is expanded by the channel waveguide 18, and then the signal light is two-dimensionally lensed. The light enters 20 and is shaped into substantially parallel light. As a result, the positional deviation of the optical fiber 22 can be prevented, and the position of the channel waveguide 18 with respect to the two-dimensional lens 20 can be set stably, so that the coupling loss of the signal light and the fluctuation of the emitting direction can be reduced. You can

Next, the method of manufacturing the optical collimator according to the present embodiment will be explained with reference to FIGS. In addition,
In each figure, the left side (FIG. 2 (a), FIG. 2 (c), FIG.
(E), FIG. 3 (a), FIG. 3 (c), and FIG. 3 (e) show process cross-sectional views, and the right side (FIG. 2 (b), FIG. 2 (d), FIG.
(F), FIG. 3 (b), FIG. 3 (d), and FIG. 3 (f) show plan views corresponding to the cross-sectional views.

First, the lower clad layer 12 is formed on the substrate 10.
To form. For example, epoxy resin V-259PA (manufactured by Nippon Steel Chemical Co., Ltd.) and epoxy resin EHPE-315
A lower clad layer 12 made of an epoxy resin is obtained by applying a clad material mixed with 0 (manufactured by Daicel Chemical Industries, Ltd.) to a thickness of 5 μm by a spin coating method, and irradiating it with ultraviolet rays and heating it under a predetermined condition to cure it. To form.

Next, the core layer 14 having a refractive index larger than that of the lower clad layer 12 is formed on the lower clad layer 12 (FIGS. 2 (a) and 2 (b)). For example, epoxy resin V-259PA is applied to a thickness of 5 μm by a spin coating method, and heat treatment is performed under a predetermined condition to cure the epoxy resin V-259PA to form a core layer 20 made of an epoxy resin.

Then, a hard mask 26 having a channel waveguide pattern is formed on the core layer 14 (FIG. 2).
(C), FIG. 2 (d). For example, after forming an aluminum layer by a sputtering method, patterning the aluminum layer by photolithography and etching,
A hard mask 26 made of an aluminum layer is formed.
The hard mask 26 remains in the region where the channel waveguide 18 is to be formed and at least in the region where the two-dimensional lens 20 is to be formed.

Then, the core layer 14 is patterned using the hard mask 26 having the above-mentioned channel waveguide pattern as a mask, and the plurality of channel waveguides 1 are formed in the core layer 14.
8 is formed.

The plurality of channel waveguides 18 thus formed have, for example, a pitch of 250 μm near one end connected to the optical fiber 22, and a two-dimensional lens 20 to be formed later.
The pitch in the vicinity of the other end connected to is 750 μm. The width of each channel waveguide 18 is, for example, 5 μm.

Next, the hard mask 26 is removed by wet etching using, for example, acid (FIG. 2).
(E), FIG. 2 (f)).

Next, an upper clad layer 16 having a smaller refractive index than the core layer 14 is formed on the lower clad layer 12 and the patterned core layer 14 (FIGS. 3A and 3).
(B)). For example, a clad material obtained by mixing an epoxy resin V-259PA with an epoxy resin EHPE-3150 is applied to a thickness of 5 μm by a spin coating method, and is irradiated with ultraviolet rays and heat-treated under predetermined conditions to cure the epoxy resin. The upper clad layer 16 is formed.

Then, a hard mask 28 having a two-dimensional lens pattern is formed on the upper cladding layer 16 (FIGS. 3C and 3D). For example, after forming an aluminum layer by a sputtering method, the aluminum layer is patterned by photolithography and etching to form a hard mask 28 made of the aluminum layer. The hard mask 28 remains on the region where the two-dimensional lens 20 is to be formed, and at least on the patterned upper clad layer 16 on the upper surface of the core layer 14.

Next, the upper clad layer 16, the core layer 14, and the lower clad layer 12 are patterned using the hard mask 28 as a mask. Thus, the plurality of two-dimensional lenses 20 connected to each of the plurality of channel waveguides 18
To form.

Then, the hard mask 28 is removed by wet etching using, for example, acid (FIG. 3).
(E), FIG. 3 (f)).

Thus, the channel waveguide 18 and the two-dimensional lens 20 are formed on the substrate 10.

As described above, the optical collimator according to the present embodiment shown in FIG. 1 is manufactured.

The optical fiber 22 on which the signal light is incident is connected to the optical collimator according to the present embodiment as follows. First, on the end side of the substrate 10 in which the pitch of the channel waveguides 18 is narrow, the substrate 24 in which the plurality of optical fibers 22 are arranged in parallel is arranged by using the V-shaped groove as a guide.
Next, each optical fiber 22 arranged on the substrate 24 is
It is optically connected to each channel waveguide 18 formed on the substrate 10.

An optical adhesive, for example, can be used to connect the optical fiber 22 and the channel waveguide 18. In this case, an optical adhesive for reducing the difference in refractive index is applied to each end face of each channel waveguide 18, and each end face of each channel waveguide 18 coated with the optical adhesive is connected to each end face of each optical fiber 22.

As described above, according to this embodiment, the signal light incident on the plurality of optical fibers 22 arranged in parallel is incident on the two-dimensional lens 20 via the channel waveguide 18 for converting the pitch. Since the light is shaped into substantially parallel light, it is not necessary to match the pitch of the plurality of optical fibers 22 arranged in parallel with the large pitch of the plurality of two-dimensional lenses 20 arranged in parallel. Therefore, the optical fibers 22 can be arranged at a predetermined narrow interval. Therefore, the substrate 2
4 can be prevented from being displaced due to thermal expansion of the optical fiber 22 and the position of the end of the channel waveguide 18 with respect to the two-dimensional lens 20 functioning as a collimating lens can be set stably, so that the displacement of the signal light in the emitting direction can be prevented. It is possible to reduce the coupling loss at the time of collecting light.

As shown in FIG. 4, a plurality of sets of the above-mentioned plurality of channel waveguides 18 and two-dimensional lenses 20 may be formed in parallel on the same substrate 10. In this case, a plurality of optical fibers 22 arranged in parallel on the substrate 10 having a V-shaped groove for a plurality of channel waveguides 18 of each set.
Connect each. With this, in a state where the pitches of the two-dimensional lens 20 and the optical fiber 22 are maintained,
If necessary, a plurality of these can be connected.

[A Second Embodiment] The optical collimator according to a second embodiment of the present invention will be explained with reference to FIG. Figure 5
FIG. 3 is a schematic diagram showing the structure of the optical collimator according to the present embodiment. The same components as those of the optical collimator according to the first embodiment are designated by the same reference numerals to omit or simplify the description.

First, the optical collimator according to the present embodiment will be explained with reference to FIG. FIG. 5A is a plan view showing the structure of the optical collimator according to the present embodiment, and FIG. 5B is a sectional view taken along the line AA ′ of FIG.

The optical collimator according to the present embodiment is shown in FIG.
As shown in FIGS. 5A and 5B, a cylindrical lens 30 is provided so as to face each two-dimensional lens 20 of the optical collimator according to the first embodiment.

As shown in FIG. 5B, the surface of the cylindrical lens 30 facing the two-dimensional lens 20 is a plane substantially perpendicular to the plane of the substrate 10. The surface on the opposite side is a cylindrical convex surface. The axial direction of the cylindrical lens 30 is substantially parallel to the arrangement direction of the plurality of two-dimensional lenses 20.

The optical collimator according to the present embodiment has a cylindrical lens 30 facing the two-dimensional lens 20.
The main characteristic is to have. With the cylindrical lens 30, the signal light shaped by the two-dimensional lens 20 into substantially parallel light in the direction substantially parallel to the plane of the substrate 10 can be further shaped into substantially parallel light in the direction substantially perpendicular to the plane of the substrate 10. Becomes

Next, the operation of the optical collimator according to the present embodiment will be explained with reference to FIG.

The input signal light to be shaped into substantially parallel light is incident from one end of each optical fiber 22 arranged in parallel on the substrate 10 at a predetermined pitch.

The signal light emitted from each optical fiber 22 is
Similar to the first embodiment, the two-dimensional lens 20 allows
The light is shaped into substantially parallel light in a direction substantially parallel to the plane of the substrate 10.

After being shaped into substantially parallel light, the two-dimensional lens 2
The signal light emitted from 0 enters the cylindrical lens 30.

The signal light incident on the cylindrical lens 30 is shaped into substantially parallel light in a direction substantially perpendicular to the plane of the substrate 10 due to the difference in refractive index between the cylindrical lens 30 and the outside.

In this way, the signal light incident on the optical fiber 22 is shaped into a substantially parallel light by the two-dimensional lens 20 in a direction substantially parallel to the 18 plane, and then, by the cylindrical lens 30 in a direction substantially perpendicular to the plane of the substrate 10. Is shaped into a substantially parallel light.

The optical collimator according to the present embodiment is manufactured by disposing the cylindrical lens 30 so as to face each two-dimensional lens 20 in the optical collimator according to the first embodiment. The cylindrical lens 30 can be manufactured by, for example, molding a commonly used transparent plastic.

As described above, according to this embodiment, the signal light incident on the plurality of optical fibers 22 arranged in parallel is incident on the two-dimensional lens 20 via the channel waveguide 18 for converting the pitch. Since the light is shaped into substantially parallel light, it is not necessary to match the pitch of the plurality of optical fibers 22 arranged in parallel with the large pitch of the plurality of two-dimensional lenses 20 arranged in parallel. Therefore, the optical fibers 22 can be arranged at a predetermined narrow interval. Therefore, the substrate 2
4 can be prevented from being displaced due to thermal expansion of the optical fiber 22 and the position of the end of the channel waveguide 18 with respect to the two-dimensional lens 20 functioning as a collimating lens can be set stably, so that the displacement of the signal light in the emitting direction can be prevented. It is possible to reduce the coupling loss at the time of collecting light.

Further, the two-dimensional lens 20 allows the substrate 10
Signal light shaped into substantially parallel light in a direction substantially parallel to the plane,
The cylindrical lens 30 can shape light into substantially parallel light in a direction substantially perpendicular to the plane of the substrate 10.

[A Third Embodiment] The optical switch according to a third embodiment of the present invention will be explained with reference to FIG. FIG. 6 is a schematic diagram showing the structure of the optical switch according to the present embodiment. The same components as those of the optical collimator according to the first embodiment are designated by the same reference numerals to omit or simplify the description.

First, the structure of the optical switch according to the present embodiment will be explained with reference to FIG. 6A is a plan view showing the structure of the optical switch according to the present embodiment, and FIG. 6B is a sectional view taken along the line AA ′ of FIG. 6A.

In the optical switch according to the present embodiment, as shown in FIG.
As shown in FIGS. 6A and 6B, the optical collimator 32a according to the first embodiment is provided on the signal light input side.

Near the two-dimensional lens 20 of the optical collimator 32a, a deflector section 44a for deflecting the signal light emitted from the two-dimensional lens 20 is arranged. In the deflector section 44a, as shown in FIG. 6B, an electrode layer 48a made of SRO (SrRuO ₃ ) having a thickness of 0.3 μm is formed on a substrate 46a. On the electrode layer 48a,
PLZT ((Pb _1-x La _x ) (Zr _y Ti with a thickness of 3 μm
A lower cladding layer 50a composed of _1-y) O ₃₎ is formed. A PZ layer having a thickness of 5 μm is formed on the lower clad layer 50a.
A core layer 52a made of T (Pb (Zr _1-x Ti _x ) O ₃ ).
Are formed. An upper clad layer 54a made of PLZT and having a thickness of 3 μm is formed on the core layer 52a. Furthermore, each two-dimensional lens 20 of the optical collimator 32a
A prism electrode layer 56a made of platinum (Pt) and having a thickness of 0.3 μm is formed on the nearby upper clad layer 54a.

The slab waveguide 34 through which the signal light propagates is arranged on the other end side of the deflector portion 44a. As shown in FIG. 6B, the slab waveguide 34 includes a lower clad layer 38 formed on a substrate 36 and made of quartz (SiO ₂ ) having a thickness of 10 μm, and a lower clad layer formed on the lower clad layer 38. The core layer 40 is made of quartz and has a larger refractive index than the layer 38 and has a thickness of 5 μm. The upper clad layer 42 is made of quartz and has a smaller refractive index than the core layer 40 and is 10 μm. Has been done.

On the other end side of the slab waveguide 34, there is provided a deflector section 44b for deflecting the signal light emitted from the slab waveguide 34 and returning the angle. Deflection part 44
In FIG. 6B, as shown in FIG. 6B, an electrode layer 48b made of SRO having a thickness of 0.3 μm is formed on the substrate 46b. A lower clad layer 50b made of PLZT and having a thickness of 3 μm is formed on the electrode layer 48b. A core layer 52b made of PZT and having a thickness of 5 μm is formed on the lower clad layer 50b. An upper clad layer 54b made of PLZT and having a thickness of 3 μm is formed on the core layer 52b. On the upper clad layer 54b, a thickness of 0.
A prism electrode layer 56b made of Pt of 3 μm is formed.

At the other end of the deflector section 44b, the output side optical collimator 32b according to the first embodiment is provided, together with the input side optical collimator a, the deflector section 44a and the slab waveguide 3 are provided.
4 and the deflector portion 44b are sandwiched therebetween.
The prism electrode layer 56b of the deflector portion 44b is located near each two-dimensional lens 20 of the optical collimator 32b.

Thus, on the input side and the output side of the signal light,
The optical switch according to the present embodiment including the optical collimators 32a and 32b according to the first embodiment is configured.

The channel waveguide 18 of the optical collimator 32a
The input optical fiber 22i is connected to the optical fiber 22i in the same manner as in the first embodiment. The output optical fiber 22o is connected to the channel waveguide 18 of the optical collimator 32b as in the case of the first embodiment.

Next, the operation of the optical switch according to the present embodiment will be explained with reference to FIG.

The input signal light incident on the predetermined input optical fiber 22i connected to the optical collimator 32a is
As in the case of the embodiment, the channel waveguide 18
After being transmitted, the two-dimensional lens 20 shapes the light into substantially parallel light in a direction substantially parallel to the plane of the substrate 10.

The signal light shaped into a substantially parallel light by the two-dimensional lens 20 enters the deflector section 44a.

The lower cladding layer 50a of the deflector portion 44a,
The prism electrode layer 56a and the electrode layer 4 are provided on the upper and lower surfaces of the optical waveguide including the core layer 52a and the upper clad layer 54a.
8a are formed. By applying a predetermined voltage between the prism electrode layer 56a and the electrode layer 48a,
The refractive index of the portion sandwiched between the prism electrode layer 56a and the electrode layer 48a changes due to the electro-optical effect. As a result, a prism effect based on the refractive index difference between the region to which the voltage is applied and the region to which the voltage is not applied is generated, and the traveling direction of the signal light can be bent. Since the deflection angle of the signal light changes depending on the voltage applied between the prism electrode layer 56a and the electrode layer 48a, the output destination of the signal light can be switched by changing this voltage.

The signal light deflected by a predetermined angle in the deflector section 44a propagates through the slab waveguide 34 and then enters the area of the deflector section 44b in which the predetermined prism electrode layer 56b is formed.

The signal light incident on the deflector section 44b is returned to an angle by applying a predetermined voltage between the prism electrode layer 56b and the electrode layer 48b, and the prism electrode layer 56b.
The light enters the two-dimensional lens 20 of the optical collimator 32b in the vicinity.

The signal light that has entered the two-dimensional lens 20 is condensed by the two-dimensional lens 20 and enters the channel waveguide 18. The signal light incident on the channel waveguide 18 propagates through the channel waveguide 18 and then is output to the output optical fiber 22o.
Incident on.

Thus, the signal light incident on the predetermined input optical fiber 22i connected to the optical collimator 32a is incident on the predetermined output optical fiber 22o connected to the optical collimator 32b.

By appropriately adjusting the voltage applied between the prism electrode layers 56a and 56b of the deflector portions 44a and 44b and the electrode layers 48a and 48b, any input light connected to the optical collimator 32a can be obtained. The signal light incident on the fiber 22i can be guided to an arbitrary output optical fiber 22o connected to the optical collimator 32b.

As described above, according to this embodiment, an optical switch can be constructed using the optical collimators 32a and 32b according to the first embodiment. Therefore, even if the pitch of the two-dimensional lenses 20 of the optical collimators 32a and 32b is wide, the input optical fiber 22i and the output optical fiber 22
The o's can be arranged at predetermined narrow intervals.
As a result, it is possible to prevent the positional deviation of the input optical fiber 22i and the output optical fiber 22o, and reduce the deviation of the signal light emission direction and the coupling loss at the time of condensing on both the input side and the output side. As a result, signal light can be switched.

In this embodiment, the optical switch is constructed by using the optical collimators according to the first embodiment on both the input side and the output side of the signal light, but the optical collimators according to the first embodiment are not necessarily used for both. No need. For example,
The optical collimator according to the first embodiment is used for either the signal input side or the output side, and the optical collimator composed of a plurality of two-dimensional lenses arranged in parallel is used for the other side, and the optical fiber is directly connected to the two-dimensional lens. May be.

[A Fourth Embodiment] The optical switch according to a fourth embodiment of the present invention will be explained with reference to FIG. FIG. 7 is a plan view showing the structure of the optical switch according to the present embodiment. The same components as those of the optical collimator according to the first embodiment are designated by the same reference numerals to omit or simplify the description.

First, the optical switch according to the present embodiment will be explained with reference to FIG.

As shown in FIG. 7, the plurality of channel waveguides 18 and the two-dimensional lens 20 in the optical collimator according to the first embodiment are divided into two sets. This allows
A signal input unit 60 made up of one set of the divided channel waveguide 18 and the two-dimensional lens 20 and a signal output unit 62 made up of the other set are configured.

In the vicinity of the two-dimensional lens 20 of the signal input section 60 and the signal output section 62, cylindrical lenses 64a and 64b are provided as in the case of the second embodiment.

In the vicinity of each two-dimensional lens 20, a micro electro mechanical system (MEMS) that changes the propagation direction of the signal light via cylindrical lenses 64a and 64b.
ms) A mirror 66 is provided. Each two-dimensional lens 20
The distance between the MEMS mirror 66 and the MEMS mirror 66 is set so that the optical path of the signal light reflected between the MEMS mirrors 66 can be secured.

The MEMS mirror 66 is, for example, a micromirror formed on a substrate. An electrode (not shown) is provided adjacent to each MEMS mirror 66. The angle of each MEMS mirror 66 can be freely changed three-dimensionally by the electrostatic force from this electrode. The MEMS mirror 66 is manufactured, for example, by forming a movable mirror portion by an etching process using polysilicon and depositing a metal that reflects light such as Au.

In this way, the optical switch according to the present embodiment is constructed.

The input optical fiber 22i is connected to the channel waveguide 18 of the signal input section 60 as in the case of the first embodiment. The output optical fiber 22o is connected to the channel waveguide 18 of the signal output unit 62 as in the case of the first embodiment.

Next, the operation of the optical switch according to the present embodiment will be explained with reference to FIG.

The input signal light enters from any one of the optical fibers 22i of the signal input section 60.

The signal light incident on the optical fiber 22i of the signal input section 60 is shaped into substantially parallel light by the two-dimensional lens 20 and the cylindrical lens 64a as in the case of the second embodiment.

The signal light that has been shaped into substantially parallel light and has passed through the cylindrical lens 64a is M provided on its optical path.
It is reflected by the EMS mirror 66. As a result, the signal light is guided to a predetermined MEMS mirror 66 provided near the two-dimensional lens 12 of the signal output unit 62.

The signal light guided to a predetermined MEMS mirror 66 provided in the vicinity of the two-dimensional lens 20 of the signal output unit 62 is reflected by the MEMS mirror 66 and is passed to the nearby two-dimensional lens 20 via the cylindrical lens 64b. Incident.

The predetermined two-dimensional lens 20 of the signal output unit 62
The signal light that has entered the two-dimensional lens 20 is condensed by the two-dimensional lens 20 and is connected to the two-dimensional lens 20.
Incident on.

The signal light incident on the channel waveguide 18 is
After propagating through the channel waveguide 18, the channel waveguide 18
The light is emitted from the optical fiber 22o connected to.

Thus, the signal light incident on the predetermined optical fiber 22i connected to the channel waveguide 18 of the signal input section 60 is transmitted from the predetermined optical fiber 22o connected to the channel waveguide 18 of the signal output section 62. Is emitted.

The signal light incident on the optical fiber 22i of the signal input section 60 can be guided to an arbitrary optical fiber 22o of the signal output section 62 by appropriately changing the angle of the MEMS mirror 66.

As described above, according to this embodiment, an optical switch can be constructed using the optical collimator according to the first embodiment. Therefore, even when the pitch of the two-dimensional lens 20 is wide, the input optical fiber 22i and the output optical fiber 22o can be arranged at predetermined narrow intervals. As a result, it is possible to prevent the positional deviation of the input optical fiber 22i and the output optical fiber 22o, and in both the signal input section 60 and the signal output section 62, the deviation of the outgoing direction of the signal light and the coupling at the time of condensing are performed. The loss can be reduced and the signal light can be switched.

In the present embodiment, the MEMS mirror 6
I changed the propagation direction of the signal light using 6
The MEMS mirror 66 is not limited to the mirror 66, and can be used instead of the MEMS mirror 66 as long as it can deflect the signal light.

[Modified Embodiments] Various modifications are possible without being limited to the above-mentioned embodiments of the present invention.

For example, in the above embodiment, the pitch of the channel waveguides 18 is narrowed symmetrically from the side connected to the two-dimensional lens 20 to the side connected to the optical fiber 22. However, the optical fiber 22 and the two-dimensional lens 20 are arranged. The pitches of the channel waveguides 18 do not have to be symmetrical as long as they can be connected.

Further, in the above embodiment, the plurality of channel waveguides 18 and the two-dimensional lens 20 are formed on the same substrate 10, but they do not necessarily have to be formed on the same substrate.

In the above embodiment, the lower clad layer, the core layer, and the upper clad layer are formed of epoxy resin to form the channel waveguide 18 and the two-dimensional lens 20, but these materials are limited to epoxy resin. It is not something that will be done. In addition, the thickness of each layer, the width of the channel waveguide 18, the size of the two-dimensional lens 20, etc.
The design can be appropriately changed according to the diameter of the optical fiber 22 connected to the optical fiber 8 and the like.

(Supplementary Note 1) A plurality of optical waveguides formed on a substrate and a plurality of optical waveguides formed on the substrate, which are respectively provided at one ends of the plurality of optical waveguides, propagate signal light propagating through the optical waveguides into substantially parallel light. An optical collimator having a plurality of collimating lenses that are shaped into a shape, wherein the pitch at the one end of the optical waveguide is wider than the pitch at the other end.

(Supplementary Note 2) In the optical collimator according to Supplementary Note 1, optical fibers are respectively connected to the other ends of the optical waveguides, and the pitch of the optical waveguides extends from the other end toward the one end. The optical collimator is characterized by gradually expanding from the same pitch as the optical fiber pitch to the same pitch as the collimating lens pitch.

(Supplementary Note 3) In the optical collimator according to Supplementary Note 2, the pitch of the optical fibers is defined by the diameter of the optical fibers.

(Supplementary Note 4) In the optical collimator according to any one of Supplementary Notes 1 to 3, the collimating lens is
A two-dimensional lens that shapes the signal light into substantially parallel light in a direction substantially parallel to the substrate plane, is arranged near the collimator lens, and is emitted from the collimator lens in a direction substantially perpendicular to the substrate plane. An optical collimator further comprising a cylindrical lens that shapes signal light into substantially parallel light.

(Supplementary Note 5) A plurality of input side optical waveguides formed on the input side substrate, and formed on the input side substrate,
Provided at one end of each of the plurality of input side optical waveguides,
Input side optical transmission means having a plurality of input side collimator lenses for shaping the signal light propagating through the input side optical waveguide into substantially parallel light, and deflecting means for deflecting the signal light emitted from the input side collimator lenses. And an output side optical transmission means on which the signal light deflected by the deflection means is incident, wherein the pitch at the one end of the input side optical waveguide is wider than the pitch at the other end. An optical switch characterized by being

(Supplementary Note 6) In the optical switch according to Supplementary Note 5, an input side optical fiber is connected to the other end of the input side optical waveguide, and the pitch of the input side optical waveguide is the other end. To the one end, the optical switch is characterized by gradually expanding from the same pitch as the pitch of the input side optical fiber to the same pitch as the pitch of the input side collimating lens.

(Supplementary Note 7) In the optical switch according to Supplementary Note 5 or 6, the output side optical transmission means is formed on the output side substrate with a plurality of output side optical waveguides formed on the output side substrate, A plurality of output-side collimator lenses that are respectively provided at one ends of the plurality of output-side optical waveguides, enter the signal light deflected by the deflecting means, and collect the incident signal light. An optical switch, wherein the pitch at the one end of the output side optical waveguide is wider than the pitch at the other end.

(Supplementary Note 8) In the optical switch according to Supplementary Note 7, an output side optical fiber is connected to the other end of the output side optical waveguide, and the pitch of the output side optical waveguide is the other end. To the one end, the optical switch is gradually expanded from the same pitch as the output side optical fiber to the same pitch as the output side collimating lens.

(Supplementary Note 9) In the optical switch according to Supplementary Note 7 or 8, the input side optical transmission means and the output side optical transmission means are arranged such that the input side collimating lens and the output side collimating lens face each other. Optical switch characterized by being.

(Supplementary Note 10) In the optical switch according to any one of Supplementary Notes 5 to 9, the input side optical transmission means,
An optical switch, further comprising a slab waveguide through which the signal light propagates between the output side optical transmission means.

(Supplementary Note 11) In the optical switch according to Supplementary Note 10, the deflecting means is provided between the input side optical transmission means and the slab waveguide, and the signal light emitted from the input side collimating lens. Is provided between the slab waveguide and the output side optical transmission means for deflecting the signal light which is deflected by the first deflection means and propagates through the slab waveguide. And a second deflecting means which is incident on the output side optical transmitting means.

(Supplementary Note 12) In the optical switch according to Supplementary Note 7 or 8, the input side substrate and the output side substrate are the same substrate, and the input side collimating lens and the output side collimating lens are in the same direction. Optical switch characterized by facing.

(Supplementary Note 13) In the optical switch according to any one of Supplementary Notes 5 to 12, the deflecting means is a deflecting element that deflects the signal light by utilizing a change in refractive index due to an electro-optic effect. And optical switch.

(Supplementary Note 14) In the optical switch described in any one of Supplementary Notes 5 to 12, the deflecting means includes a plurality of micromirrors arranged in the vicinity of the input side collimating lens and the output side collimating lens. Optical switch characterized by becoming.

[0121]

As described above, according to the present invention, a plurality of optical waveguides formed on a substrate and a signal which is formed on the substrate and is provided at one end of each of the plurality of optical waveguides and propagates through the optical waveguides. In an optical collimator having a plurality of collimating lenses that shape light into substantially parallel light, since the pitch at one end of the plurality of optical waveguides is wider than the pitch at the other end, a plurality of optical fibers on which signal light is incident Can be arranged at a predetermined narrow interval. Therefore,
It is possible to prevent the positional deviation of the optical fiber and reduce the deviation of the signal light in the emitting direction and the coupling loss at the time of condensing.

[Brief description of drawings]

FIG. 1 is a schematic view showing a structure of an optical collimator according to a first embodiment of the present invention.

FIG. 2 is a process diagram (1) showing the method of manufacturing the optical collimator according to the first embodiment of the invention.

FIG. 3 is a process diagram (2) showing the method of manufacturing the optical collimator according to the first embodiment of the invention.

FIG. 4 is a plan view showing a structure of an optical collimator according to a modification of the first embodiment of the present invention.

FIG. 5 is a schematic view showing a structure of an optical collimator according to a second embodiment of the present invention.

FIG. 6 is a plan view showing the structure of an optical switch according to a third embodiment of the present invention.

FIG. 7 is a plan view showing the structure of an optical switch according to a fourth exemplary embodiment of the present invention.

FIG. 8 is a schematic view showing a structure of a conventional optical collimator.

[Explanation of symbols]

10 ... Substrate 12 ... Lower clad layer 14 ... Core layer 16 ... Upper clad layer 18 ... Channel waveguide 20 ... Two-dimensional lens 22 ... Optical fiber 22i ... Optical fiber for input 22o ... Optical fiber for output 24 ... Substrate 26 ... Hard mask 28 ... Hard mask 30 ... Cylindrical lens 32a, 32b ... Optical collimator 34 ... Slab waveguide 36 ... Substrate 38 ... Lower clad layer 40 ... Core layer 42 ... Upper clad layer 44a, 44b ... Deflection part 46a, 46b ... Substrate 48a, 46b ... Electrode layer 50a, 50b ... Lower clad layer 52a, 52b ... Core layer 54a, 54b ... Upper clad layer 56a, 56b ... Prism electrode layer 60 ... Signal input section 62 ... Signal output unit 64a, 64b ... Cylindrical lens 66 ... MEMS mirror 100 ... Collimating lens 102 ... Optical fiber

Front page continuation (51) Int.Cl. ⁷ Identification code FI theme code (reference) G02F 1/313 G02F 1/313 2K002 F term (reference) 2H036 JA04 LA07 LA08 NA00 2H037 AA01 BA24 BA32 CA12 CA32 CA38 2H041 AA16 AB14 AB27 AC01 AC06 AZ01 2H046 AA03 AA05 AA32 AA48 AB12 AD22 2H079 AA02 AA12 BA03 CA05 DA04 DA25 DA28 EA02 EA33 EB04 EB12 GA01 GA03 KA11 KA20 2K002 AA02 AB04 BA06 CA02 CA25 DA05 EA09 EB05 HA03

Claims (10)

[Claims] 1. A plurality of optical waveguides formed on a substrate,
An optical collimator having a plurality of collimator lenses formed on the substrate, provided at one end of each of the plurality of optical waveguides, and shaping the signal light propagating through the optical waveguides into substantially parallel light. The optical collimator, wherein the pitch at the one end is wider than the pitch at the other end. 2. The optical collimator according to claim 1, wherein an optical fiber is respectively connected to the other end of the optical waveguide, and a pitch of the optical waveguide is from the other end toward the one end. An optical collimator, wherein the pitch is the same as the pitch of the optical fiber and gradually widens to the same pitch as the pitch of the collimating lens. 3. The optical collimator according to claim 1, wherein the collimator lens is a two-dimensional lens that shapes the signal light into substantially parallel light in a direction substantially parallel to the plane of the substrate, and the vicinity of the collimator lens. The optical collimator further comprising: a cylindrical lens which is arranged in a direction substantially perpendicular to the plane of the substrate and shapes the signal light emitted from the collimator lens into substantially parallel light. 4. A plurality of input-side optical waveguides formed on an input-side substrate and a plurality of input-side optical waveguides formed on the input-side substrate and provided at one ends of the plurality of input-side optical waveguides, respectively. The input side optical transmission means having a plurality of input side collimator lenses for shaping the propagating signal light into substantially parallel light, the deflection means for deflecting the signal light emitted from the input side collimator lens, and the deflection means An optical switch having an output-side optical transmission unit on which the deflected signal light is incident, wherein a pitch at the one end of the input-side optical waveguide is wider than a pitch at the other end. Optical switch. 5. The optical switch according to claim 4, wherein the output side optical transmission means is formed on the output side substrate and a plurality of output side optical waveguides formed on the output side substrate.
Provided on one end of each of the plurality of output side optical waveguides,
A plurality of output-side collimator lenses that enter the signal light deflected by the deflecting unit and collect the incident signal light, and the pitch at the one end of the output-side optical waveguide is different. Optical switch characterized by being wider than the pitch at the edge. 6. The optical switch according to claim 5, wherein the input side optical transmission means and the output side optical transmission means are arranged such that the input side collimator lens and the output side collimator lens face each other. An optical switch characterized by that. 7. The optical switch according to claim 4, wherein the signal light propagates between the input side optical transmission means and the output side optical transmission means. An optical switch further comprising: 8. The optical switch according to claim 5, wherein the input-side substrate and the output-side substrate are the same substrate, and the input-side collimating lens and the output-side collimating lens face the same direction. An optical switch characterized by that. 9. The optical switch according to claim 4, wherein the deflecting means is a deflecting element that deflects the signal light by utilizing a refractive index change due to an electro-optic effect. Characteristic optical switch. 10. The optical switch according to claim 4, wherein the deflection unit includes a plurality of micromirrors arranged in the vicinity of the input side collimator lens and the output side collimator lens. An optical switch characterized by that.