JP2003344741A - 補正部材、保持装置、露光装置及びデバイス製造方法 - Google Patents

補正部材、保持装置、露光装置及びデバイス製造方法

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Publication number
JP2003344741A
JP2003344741A JP2003076618A JP2003076618A JP2003344741A JP 2003344741 A JP2003344741 A JP 2003344741A JP 2003076618 A JP2003076618 A JP 2003076618A JP 2003076618 A JP2003076618 A JP 2003076618A JP 2003344741 A JP2003344741 A JP 2003344741A
Authority
JP
Japan
Prior art keywords
optical
optical member
lens
holding device
spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2003076618A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003344741A5 (enExample
Inventor
Yuji Sudo
裕次 須藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2003076618A priority Critical patent/JP2003344741A/ja
Publication of JP2003344741A publication Critical patent/JP2003344741A/ja
Publication of JP2003344741A5 publication Critical patent/JP2003344741A5/ja
Withdrawn legal-status Critical Current

Links

Landscapes

  • Mounting And Adjusting Of Optical Elements (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2003076618A 2002-03-20 2003-03-19 補正部材、保持装置、露光装置及びデバイス製造方法 Withdrawn JP2003344741A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003076618A JP2003344741A (ja) 2002-03-20 2003-03-19 補正部材、保持装置、露光装置及びデバイス製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002078118 2002-03-20
JP2002-78118 2002-03-20
JP2003076618A JP2003344741A (ja) 2002-03-20 2003-03-19 補正部材、保持装置、露光装置及びデバイス製造方法

Publications (2)

Publication Number Publication Date
JP2003344741A true JP2003344741A (ja) 2003-12-03
JP2003344741A5 JP2003344741A5 (enExample) 2006-05-11

Family

ID=29781927

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2003076618A Withdrawn JP2003344741A (ja) 2002-03-20 2003-03-19 補正部材、保持装置、露光装置及びデバイス製造方法

Country Status (1)

Country Link
JP (1) JP2003344741A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103901571A (zh) * 2014-02-13 2014-07-02 中国科学院上海光学精密机械研究所 大型透反式镜片非垂直放置的挠性支撑装置和支撑方法
KR20210124234A (ko) * 2019-02-06 2021-10-14 칼 짜이스 에스엠테 게엠베하 광학 요소의 지지

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103901571A (zh) * 2014-02-13 2014-07-02 中国科学院上海光学精密机械研究所 大型透反式镜片非垂直放置的挠性支撑装置和支撑方法
KR20210124234A (ko) * 2019-02-06 2021-10-14 칼 짜이스 에스엠테 게엠베하 광학 요소의 지지
JP2022519867A (ja) * 2019-02-06 2022-03-25 カール・ツァイス・エスエムティー・ゲーエムベーハー 光学素子の支持
JP7526192B2 (ja) 2019-02-06 2024-07-31 カール・ツァイス・エスエムティー・ゲーエムベーハー 光学素子の支持
KR102885161B1 (ko) * 2019-02-06 2025-11-13 칼 짜이스 에스엠테 게엠베하 광학 요소의 지지

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