JP2003340359A5 - - Google Patents

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Publication number
JP2003340359A5
JP2003340359A5 JP2002158113A JP2002158113A JP2003340359A5 JP 2003340359 A5 JP2003340359 A5 JP 2003340359A5 JP 2002158113 A JP2002158113 A JP 2002158113A JP 2002158113 A JP2002158113 A JP 2002158113A JP 2003340359 A5 JP2003340359 A5 JP 2003340359A5
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JP
Japan
Prior art keywords
ultraviolet light
substrate
curable resin
irradiated
forming method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002158113A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003340359A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002158113A priority Critical patent/JP2003340359A/ja
Priority claimed from JP2002158113A external-priority patent/JP2003340359A/ja
Publication of JP2003340359A publication Critical patent/JP2003340359A/ja
Publication of JP2003340359A5 publication Critical patent/JP2003340359A5/ja
Pending legal-status Critical Current

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JP2002158113A 2002-05-30 2002-05-30 高精度スピン成膜方法 Pending JP2003340359A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002158113A JP2003340359A (ja) 2002-05-30 2002-05-30 高精度スピン成膜方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002158113A JP2003340359A (ja) 2002-05-30 2002-05-30 高精度スピン成膜方法

Publications (2)

Publication Number Publication Date
JP2003340359A JP2003340359A (ja) 2003-12-02
JP2003340359A5 true JP2003340359A5 (enrdf_load_stackoverflow) 2005-10-06

Family

ID=29773614

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002158113A Pending JP2003340359A (ja) 2002-05-30 2002-05-30 高精度スピン成膜方法

Country Status (1)

Country Link
JP (1) JP2003340359A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004095108A (ja) * 2002-09-03 2004-03-25 Global Mach Kk 光学記録媒体の製造方法
KR100775564B1 (ko) 2003-09-30 2007-11-09 니폰 쇼쿠바이 컴파니 리미티드 제진재용 수성 에멀젼
KR100745635B1 (ko) 2004-06-03 2007-08-03 시바우라 메카트로닉스 가부시끼가이샤 수지층 형성 방법 및 수지층 형성 장치, 디스크 및 디스크제조 방법
US20080057181A1 (en) * 2004-09-14 2008-03-06 Origin Electric Company, Limited Resin Layer Forming Method And Apparatus For The Same
US20070105400A1 (en) * 2005-11-08 2007-05-10 Unaxis Balzers Ag Method and apparatus for control of layer thicknesses

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