JP2003340359A5 - - Google Patents

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Publication number
JP2003340359A5
JP2003340359A5 JP2002158113A JP2002158113A JP2003340359A5 JP 2003340359 A5 JP2003340359 A5 JP 2003340359A5 JP 2002158113 A JP2002158113 A JP 2002158113A JP 2002158113 A JP2002158113 A JP 2002158113A JP 2003340359 A5 JP2003340359 A5 JP 2003340359A5
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JP
Japan
Prior art keywords
ultraviolet light
substrate
curable resin
irradiated
forming method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002158113A
Other languages
English (en)
Japanese (ja)
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JP2003340359A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002158113A priority Critical patent/JP2003340359A/ja
Priority claimed from JP2002158113A external-priority patent/JP2003340359A/ja
Publication of JP2003340359A publication Critical patent/JP2003340359A/ja
Publication of JP2003340359A5 publication Critical patent/JP2003340359A5/ja
Pending legal-status Critical Current

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JP2002158113A 2002-05-30 2002-05-30 高精度スピン成膜方法 Pending JP2003340359A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002158113A JP2003340359A (ja) 2002-05-30 2002-05-30 高精度スピン成膜方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002158113A JP2003340359A (ja) 2002-05-30 2002-05-30 高精度スピン成膜方法

Publications (2)

Publication Number Publication Date
JP2003340359A JP2003340359A (ja) 2003-12-02
JP2003340359A5 true JP2003340359A5 (cg-RX-API-DMAC7.html) 2005-10-06

Family

ID=29773614

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002158113A Pending JP2003340359A (ja) 2002-05-30 2002-05-30 高精度スピン成膜方法

Country Status (1)

Country Link
JP (1) JP2003340359A (cg-RX-API-DMAC7.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004095108A (ja) * 2002-09-03 2004-03-25 Global Mach Kk 光学記録媒体の製造方法
KR100775564B1 (ko) 2003-09-30 2007-11-09 니폰 쇼쿠바이 컴파니 리미티드 제진재용 수성 에멀젼
CN101027138B (zh) 2004-06-03 2010-08-25 芝浦机械电子装置股份有限公司 树脂层形成方法及树脂层形成装置、盘及盘的制造方法
DE112004002964B4 (de) * 2004-09-14 2014-01-16 Origin Electric Company, Ltd. Verfahren und Vorrichtung zum Herstellen einer optischen Platte
US20070105400A1 (en) * 2005-11-08 2007-05-10 Unaxis Balzers Ag Method and apparatus for control of layer thicknesses

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