JP2003339175A - Guiding apparatus using ultrasonic motor as drive source of movable unit - Google Patents
Guiding apparatus using ultrasonic motor as drive source of movable unitInfo
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- JP2003339175A JP2003339175A JP2002250679A JP2002250679A JP2003339175A JP 2003339175 A JP2003339175 A JP 2003339175A JP 2002250679 A JP2002250679 A JP 2002250679A JP 2002250679 A JP2002250679 A JP 2002250679A JP 2003339175 A JP2003339175 A JP 2003339175A
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- Prior art keywords
- ultrasonic motor
- unit
- friction
- driving
- drive
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、直線運動や回転運
動する可動体を超音波モータによって駆動する案内装置
に関するものであり、特に、位置決め精度だけでなく、
可動体の駆動中においても高い位置精度が要求される精
密加工用工作機械、精密測定装置、半導体製造工程等に
おける描画露光装置に用いられる案内装置として好適な
ものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a guide device for driving a movable body that moves linearly or rotationally by an ultrasonic motor, and particularly, not only the positioning accuracy but also
It is suitable as a guide device used for a precision machining machine tool, a precision measuring device, a drawing exposure device in a semiconductor manufacturing process or the like, which requires high positional accuracy even while driving a movable body.
【０００２】[0002]
【従来の技術】超音波モータは、最小振動振幅がナノメ
ートルオーダーと小さく、高分解能の位置決めが可能で
あり、しかも小型でありながら摩擦駆動であるために駆
動力が大きいといった特徴を有するため、これまでカメ
ラのレンズズーム機構や腕時計用バイブレーションアラ
ームなど回転系の装置へ実用化が行われてきた。2. Description of the Related Art Ultrasonic motors have the characteristics that the minimum vibration amplitude is small on the order of nanometers, high-resolution positioning is possible, and the driving force is large due to the friction drive while being small in size. Until now, it has been put to practical use in rotary devices such as camera lens zoom mechanisms and wristwatch vibration alarms.
【０００３】また、近年では超音波モータを直線系の案
内装置へ適用することも試みられている。In recent years, it has been attempted to apply an ultrasonic motor to a linear guide device.
【０００４】図５に超音波モータを可動体の駆動源とす
る従来の案内装置の一例を示すように、この案内装置
は、ベース基盤５１上にクロスローラガイドの如き一対
のガイド部材５２を備え、これらのガイド部材５２によ
って可動体としてのステージ５３が直線的に案内される
ようになっている。As shown in FIG. 5, which shows an example of a conventional guide device using an ultrasonic motor as a drive source for a movable body, this guide device has a pair of guide members 52 such as a cross roller guide on a base 51. The stage 53 as a movable body is linearly guided by these guide members 52.
【０００５】また、ステージ５３の一方の側面には、ガ
イド部材５２に対して平行に駆動力伝達部材５４が、ス
テージ５３の他方の側面には、駆動力伝達部材５４に対
して平行にリニアスケール５６ａが設置され、このリニ
アスケール５６ａと対向する位置には測定ヘッド５６ｂ
を設けて位置検出手段５６を構成するとともに、上記駆
動力伝達部材５４と対向する位置には超音波モータ５５
を設置し、超音波モータ５５の摩擦部材５５ａを上記駆
動力伝達部材５４の当接面に対して垂直に当接させてあ
る。A driving force transmission member 54 is provided on one side surface of the stage 53 in parallel with the guide member 52, and a linear scale is provided on the other side surface of the stage 53 in parallel with the driving force transmission member 54. 56a is installed, and a measuring head 56b is provided at a position facing the linear scale 56a.
Is provided to configure the position detecting means 56, and the ultrasonic motor 55 is provided at a position facing the driving force transmitting member 54.
And the friction member 55a of the ultrasonic motor 55 is brought into contact with the contact surface of the driving force transmission member 54 perpendicularly.
【０００６】なお、図中、５５ｄは超音波モータ５５を
収容するケース、５５ｃは超音波モータ５５をステージ
５３の駆動力伝達部材５４に当接させるためのバネ、５
５ｂはケース５５ｄ内に超音波モータ５５を保持するた
めの弾性体である。In the figure, 55d is a case for accommodating the ultrasonic motor 55, 55c is a spring for abutting the ultrasonic motor 55 to the driving force transmitting member 54 of the stage 53, and 5c.
Reference numeral 5b is an elastic body for holding the ultrasonic motor 55 in the case 55d.
【０００７】この超音波モータ５５は、楕円振動を発生
させる圧電駆動部５５ｅと、この圧電駆動部５５ｅに備
えるセラミックスやガラスからなる摩擦部材５５ａとか
らなり、圧電駆動部５５ｅは、圧電セラミック板５５ｆ
の一方の主面に４分割された電極膜５５ｇ，５５ｈ，５
５ｉ、５５ｊを有し、対角に位置する電極膜５５ｇと電
極膜５５ｉを結線するとともに、対角に位置する電極膜
５５ｈと電極膜５５ｊを結線し、かつ他方の主面には、
ほぼ全面に共通電極膜（不図示）を形成してあり、共通
電極膜をアースするとともに、電極膜５５ｉと電極膜５
５ｊにそれぞれ位相を異ならせた電圧を印加することに
より、圧電セラミック板５５ｆに縦振動と横振動を発生
させ、これらの振動の合力によって摩擦部材５５ａを楕
円運動させるようになっていた。The ultrasonic motor 55 is composed of a piezoelectric drive section 55e for generating elliptical vibration and a friction member 55a made of ceramics or glass for the piezoelectric drive section 55e. The piezoelectric drive section 55e is a piezoelectric ceramic plate 55f.
Electrode films 55g, 55h, 5 divided into four on one main surface
5i and 55j, which connect the electrode film 55g and the electrode film 55i diagonally located, connect the electrode film 55h and the electrode film 55j diagonally located, and on the other main surface,
A common electrode film (not shown) is formed on almost the entire surface. The common electrode film is grounded, and the electrode film 55i and the electrode film 5 are formed.
By applying voltages having different phases to 5j, longitudinal vibration and transverse vibration are generated in the piezoelectric ceramic plate 55f, and the frictional member 55a is caused to make an elliptical motion by the resultant force of these vibrations.
【０００８】そして、ステージ５３の移動に伴う位置検
出手段５６からの位置情報と、予め設定してあるステー
ジ５３の移動プロファイルに基づく基準位置情報との偏
差に応じて駆動制御部５０にて例えばＰＩＤ演算処理
し、超音波モータ５５へ指令信号を出力するフィードバ
ック制御を行うようになっていた。なお、ＰＩＤ演算を
行うための制御パラメータであるＰ項、Ｉ項、Ｄ項の決
定は、実駆動させる前にステージ５３の移動中における
位置偏差や位置決め精度が規格を満足するように実験に
より試行錯誤的に決定するようになっていた。Then, in accordance with the deviation between the position information from the position detecting means 56 associated with the movement of the stage 53 and the reference position information based on the preset movement profile of the stage 53, the drive control unit 50 uses, for example, a PID. Feedback control is performed to perform a calculation process and output a command signal to the ultrasonic motor 55. The determination of the P, I, and D terms that are the control parameters for performing the PID calculation is performed by an experiment so that the position deviation and the positioning accuracy during the movement of the stage 53 satisfy the standard before the actual driving. It was erroneously decided.
【０００９】ところで、精密加工用工作機械や精密測定
装置あるいは半導体製造工程における描画露光装置に用
いられる案内装置には、サブミクロンオーダーの高精度
な移動中の位置偏差や位置決め精度と、案内装置の長寿
命化、高信頼性化が望まれている。By the way, a guiding device used in a precision machining machine tool, a precision measuring device, or a drawing exposure device in a semiconductor manufacturing process has a position deviation and a positioning precision during movement of a submicron order with high accuracy. Longer life and higher reliability are desired.
【００１０】しかしながら、超音波モータ５５を用いた
駆動は摩擦駆動であるため、超音波モータ５５の摩擦部
材５５ａとステージ５３の駆動力伝達部材５４との間に
滑りが発生し易く、この滑りによってステージ５３の高
精度な位置決めが困難になるとともに、両者の接触状態
が変化するために異常摩耗が発生するといった課題があ
った。However, since the drive using the ultrasonic motor 55 is a friction drive, a slip is likely to occur between the friction member 55a of the ultrasonic motor 55 and the driving force transmission member 54 of the stage 53, and this slip causes the slip. There is a problem that it becomes difficult to position the stage 53 with high accuracy and abnormal wear occurs because the contact state between the two changes.
【００１１】そこで、超音波モータ５５とステージ５３
との間の滑りを監視して制御に反映させた案内装置が提
案されている。Therefore, the ultrasonic motor 55 and the stage 53
A guide device has been proposed that monitors slippage between the guide and the vehicle and reflects it in the control.
【００１２】例えば、特開２０００−３０８９３９公報
に開示された案内装置は、図６に示すように、超音波モ
ータ５５に予圧を与えるバネ（図５の５５ｃ）に代えて
電圧の印加により伸縮する圧電アクチュエータ等の予圧
調整部６１を用いるとともに、超音波モータ５５の駆動
中における摩擦部材５５ａの変位、速度、加速度等の位
置情報を測定するレーザー変位測定機等の非接触型測定
手段６２を設け、非接触型測定手段６２からの位置情報
と位置検出手段５６からの位置情報を基に滑り量計測部
６３にて超音波モータ５５とステージ５３との間の滑り
量を算出し、この滑り量に応じて予圧調整部６１を駆動
させることにより、超音波モータ５５のステージ５３へ
の押圧力を調整するようになっていた。For example, as shown in FIG. 6, the guide device disclosed in Japanese Unexamined Patent Publication No. 2000-308939 expands and contracts by applying a voltage in place of a spring (55c in FIG. 5) that applies a preload to the ultrasonic motor 55. A pre-load adjusting unit 61 such as a piezoelectric actuator is used, and a non-contact type measuring unit 62 such as a laser displacement measuring machine for measuring positional information such as displacement, speed, acceleration of the friction member 55a during driving of the ultrasonic motor 55 is provided. The slip amount measuring unit 63 calculates the slip amount between the ultrasonic motor 55 and the stage 53 based on the position information from the non-contact type measuring unit 62 and the position information from the position detecting unit 56, and the slip amount is calculated. By driving the preload adjusting unit 61 in accordance with the above, the pressing force of the ultrasonic motor 55 on the stage 53 is adjusted.
【００１３】また、本件出願人は、図７に示すような案
内装置も先に提案している（特願２００１−１３６７３
９）。この案内装置は、駆動制御部５０より出力される
駆動用指令信号のサーボループ間の変化率と位置偏差を
それぞれ時系列的に監視する監視部７１を備え、駆動面
５４ａでの伝達効率、すなわち超音波モータ５５の摩擦
部材５５ａの滑り具合を監視し、監視部７１より得られ
る伝達効率が予め設定した規格値内にあるか否か判定す
る判定部７２と、位置偏差及び／又は滑り量が各々しき
い値外となった時、駆動制御部５０のＰＩＤ演算に用い
る制御パラメータ（Ｐ項、Ｉ項、Ｄ項）をそれぞれ変更
するパラメータ調整部７３を備えたもので、これにより
ステージ５３の安定した駆動と超音波モータ５５の異常
摩耗を抑えるようになっていた。The applicant of the present application has previously proposed a guide device as shown in FIG. 7 (Japanese Patent Application No. 2001-13673).
9). This guide device includes a monitoring unit 71 that monitors the change rate and position deviation between the servo loops of the drive command signal output from the drive control unit 50 in time series, and the transmission efficiency on the drive surface 54a, that is, A determination unit 72 that monitors the sliding condition of the friction member 55a of the ultrasonic motor 55 and determines whether the transmission efficiency obtained from the monitoring unit 71 is within a preset standard value, and a position deviation and / or a slip amount. A parameter adjusting unit 73 is provided for changing the control parameters (P term, I term, D term) used for the PID calculation of the drive control section 50 when they are out of the threshold values, respectively. The stable driving and the abnormal wear of the ultrasonic motor 55 are suppressed.
【００１４】[0014]
【発明が解決しようとする課題】しかしながら、図６や
図７に示す案内装置では、超音波モータ５５とステージ
５３との間の滑り具合を把握し、摩耗増大の危険性を予
知することはできるが、超音波モータ５５の駆動速度や
予圧及びステージ５３の重量等が異なると、同じ滑り量
であっても摩耗度合いが大きく異なる場合があり、滑り
量のみの監視では駆動条件によってどの程度摩耗が進む
のかまでは予測することができなかった。However, in the guide device shown in FIGS. 6 and 7, it is possible to grasp the degree of slippage between the ultrasonic motor 55 and the stage 53 and predict the risk of increased wear. However, if the driving speed and preload of the ultrasonic motor 55, the weight of the stage 53, and the like are different, the degree of wear may vary greatly even with the same amount of slip. I couldn't predict until it would proceed.
【００１５】特に、ステージ５３を高速度や高加速度で
駆動させるような厳しい駆動条件を頻繁に続けると、超
音波モータ５５の摩擦部材５５ａやステージ５３の駆動
力伝達部材５４の異常摩耗が発生し易く、予期せぬトラ
ブルを招いて案内装置を故障させてしまったり、案内装
置の寿命が予想以上に速まる恐れがあり、案内装置の寿
命を判定することは難しいものであった。In particular, if a severe driving condition such as driving the stage 53 at high speed or high acceleration is frequently continued, abnormal wear of the friction member 55a of the ultrasonic motor 55 and the driving force transmission member 54 of the stage 53 occurs. It is difficult to determine the life of the guide device because the guide device may be broken easily due to an easy trouble and the life of the guide device may be shortened more than expected.
【００１６】その為、駆動途中におけるステージ５３の
高い位置精度が要求される精密加工用工作機械、精密測
定装置、半導体製造工程における描画露光装置等に用い
る場合、図６や図７に示す案内装置においても信頼性の
点で問題があった。Therefore, when it is used in a precision machining machine tool, a precision measuring apparatus, a drawing exposure apparatus in a semiconductor manufacturing process, etc., in which high positional accuracy of the stage 53 is required during driving, the guide apparatus shown in FIGS. 6 and 7 is used. There was also a problem in terms of reliability.
【００１７】[0017]
【課題を解決するための手段】そこで、本発明は上記課
題に鑑み、請求項１に係る発明は、摩擦部材を有する超
音波モータと、超音波モータの摩擦部材との摩擦駆動に
より可動する可動体と、可動体の位置を測定する位置検
出手段と、位置検出手段からの位置情報と予め設定した
移動プロファイルに基づく基準位置情報との偏差を基に
演算し、上記超音波モータを駆動させる駆動用指令信号
を出力する駆動制御部と、上記超音波モータの摩擦部材
の滑り量を算出する滑り量計測部及び上記超音波モータ
との摩擦駆動により可動体側の駆動面に作用する接線力
を算出する接線力計測部を具備する監視部とから超音波
モータを可動体の駆動源とする案内装置を構成したこと
を特徴とする。In view of the above problems, the present invention relates to an ultrasonic motor having a friction member and a movable member that is movable by frictional driving of the friction member of the ultrasonic motor. A drive for driving the ultrasonic motor, which is calculated based on the deviation between the body, a position detecting means for measuring the position of the movable body, and position information from the position detecting means and reference position information based on a preset movement profile. Drive control unit that outputs a command signal for use, a slip amount measuring unit that calculates the slip amount of the friction member of the ultrasonic motor, and a tangential force that acts on the drive surface on the movable body side by friction driving with the ultrasonic motor. A guide device using an ultrasonic motor as a drive source of a movable body is configured from a monitoring unit including a tangential force measuring unit.
【００１８】請求項２に係る発明は、請求項１の要件に
加え、上記監視部に、上記滑り量計測部で算出された滑
り量と、上記接線力計測部で算出された接線力との積を
算出する摩擦仕事量計測部を設けたことを特徴とする。According to the invention of claim 2, in addition to the requirements of claim 1, the monitoring unit includes a slip amount calculated by the slip amount measuring unit and a tangential force calculated by the tangential force measuring unit. It is characterized in that a frictional work measuring unit for calculating a product is provided.
【００１９】請求項３に係る発明は、請求項２の要件に
加え、上記摩擦仕事量計測部より得られる摩擦仕事量
が、予め設定した摩擦仕事量のしきい値内にあるか否か
を判定する判定部を設けたことを特徴とする。In addition to the requirements of claim 2, the invention according to claim 3 determines whether or not the friction work amount obtained from the friction work amount measuring unit is within a preset threshold value of the friction work amount. A feature is that a determination unit for determining is provided.
【００２０】請求項４に係る発明は、請求項３の要件に
加え、上記判定部にて判定した結果に基づき、上記摩擦
仕事量計測部より得られる摩擦仕事量がそのしきい内と
なるように、駆動制御部の制御パラメータをそれぞれ変
更するパラメータ調整部を設けたことを特徴とする。According to the invention of claim 4, in addition to the requirement of claim 3, the friction work amount obtained from the friction work amount measuring portion is within the threshold based on the result of judgment by the judging portion. In addition, a parameter adjusting unit for changing the control parameters of the drive control unit is provided.
【００２１】請求項５に係る発明は、請求項１乃至請求
項４の要件に加え、上記超音波モータの駆動中における
摩擦部材の変位、速度、加速度等の位置情報を非接触型
測定手段によって測定するようにしたことを特徴とす
る。According to a fifth aspect of the present invention, in addition to the requirements of the first to fourth aspects, position information such as displacement, speed, acceleration, etc. of the friction member during driving of the ultrasonic motor is measured by a non-contact type measuring means. The feature is that it is measured.
【００２２】請求項６に係る発明は、請求項１乃至請求
項５の要件に加え、上記滑り量計測部において、上記超
音波モータの駆動中における摩擦部材の変位、速度、加
速度等の位置情報と、上記位置検出手段からの位置情報
を基に以下の数式１により滑り量を算出するようにした
ことを特徴とする。
（数式１）
Ｌｓ＝（Ａ−Ｂ）×Ｔｃ
但し、Ｌｓ：超音波モータの摩擦部材の滑り量
Ａ：非接触型測定手段から得られる超音波モータの摩擦
部材の振動速度
Ｂ：位置検出手段から得られるステージの移動速度
Ｔｃ：超音波モータの摩擦部材の接触時間請求項７に係
る発明は請求項４の要件に加え、上記パラメータ調整部
で変更された制御パラメータを用いて駆動制御部で駆動
した場合、摩擦仕事量が前記予め設定したしきい値内超
えた場合に装置内に異常が発生したことを告知する警告
部を有することを特徴とする。In the invention according to claim 6, in addition to the requirements of claims 1 to 5, position information such as displacement, speed, acceleration, etc. of the friction member during driving of the ultrasonic motor in the slip amount measuring section is provided. Then, the slip amount is calculated by the following formula 1 based on the position information from the position detecting means. (Formula 1) Ls = (A−B) × Tc where Ls: Amount of sliding of friction member of ultrasonic motor A: Vibration velocity of friction member of ultrasonic motor obtained from non-contact type measuring means B: Position detecting means Moving speed Tc obtained from: contact time of friction member of ultrasonic motor The invention according to claim 7 uses the control parameter changed by the parameter adjusting part in the drive control part in addition to the requirement of claim 4. When driven, when the friction work exceeds the preset threshold value, a warning unit for notifying that an abnormality has occurred in the apparatus is provided.
【００２３】[0023]
【発明の実施の形態】以下、本発明の実施形態について
説明する。BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below.
【００２４】図１は超音波モータを可動体の駆動源とす
る本発明の案内装置の一例を示す模式図である。なお、
従来例と同一部分については同一符号で示す。FIG. 1 is a schematic view showing an example of a guide device of the present invention in which an ultrasonic motor is used as a drive source for a movable body. In addition,
The same parts as those of the conventional example are indicated by the same reference numerals.
【００２５】この案内装置は、ベース基盤５１上にクロ
スローラガイドの如き一対のガイド部材５２を備え、こ
の一対のガイド部材５２に沿って可動体としてのステー
ジ５３を直線的に案内するようになっている。This guide device is provided with a pair of guide members 52 such as a cross roller guide on a base substrate 51, and linearly guides a stage 53 as a movable body along the pair of guide members 52. ing.
【００２６】また、ステージ５３の一方の側面には、上
記ガイド部材５２に対して平行に駆動力伝達部材５４
を、他方の側面にはガイド部材５２に対して平行にリニ
アスケール５６ａをそれぞれ設置し、リニアスケール５
６ａと対向する位置には測定ヘッド５６ｂを設けて位置
検出手段５６を構成するとともに、上記駆動力伝達部材
５４と対向する位置には超音波モータ５５を設置し、超
音波モータ５５の摩擦部材５５ａを上記駆動力伝達部材
５４の駆動面５４ａに対して垂直に当接させてある。A driving force transmission member 54 is provided on one side surface of the stage 53 in parallel with the guide member 52.
On the other side, linear scales 56a are installed parallel to the guide member 52, respectively.
6a is provided at a position facing the driving force transmitting member 54, and an ultrasonic motor 55 is installed at a position facing the driving force transmitting member 54, and a friction member 55a of the ultrasonic motor 55 is provided. Is abutted perpendicularly to the driving surface 54a of the driving force transmission member 54.
【００２７】なお、図１に示す超音波モータ５５の構造
及び取付け構造は図５に示した超音波モータ５５の構造
及び取付け構造と同一であるため、ここでは説明を省略
する。 また、位置検出手段５６として、ステージ５３
上に反射ミラーを設け、レーザー測長計で位置を検出す
るようにしても構わない。Since the structure and mounting structure of the ultrasonic motor 55 shown in FIG. 1 are the same as the structure and mounting structure of the ultrasonic motor 55 shown in FIG. 5, description thereof will be omitted here. Further, as the position detecting means 56, the stage 53
It is also possible to provide a reflection mirror on the top and detect the position with a laser length meter.
【００２８】そして、ステージ５３の移動に伴う位置検
出手段５６からの変位、速度、加速度等の位置情報を駆
動制御部５０に送り、この駆動制御部５０にて予め設定
してあるステージ５３の移動プロファイルに基づく基準
位置情報（変位、速度、加速度）との偏差を基に、例え
ばＰＩＤ演算処理し、その出力値を駆動用指令信号とし
て超音波モータ５５へ出力するフィードバック制御を行
うことで超音波モータ５５をその駆動用指令信号に応じ
て楕円運動させ、超音波モータ５５に備える摩擦部材５
５ａとの摩擦駆動によりステージ５３をガイド部材５２
に沿って移動、位置決めさせるようになっている。Then, positional information such as displacement, velocity, acceleration, etc., from the position detecting means 56 in accordance with the movement of the stage 53 is sent to the drive control section 50, and the movement of the stage 53 preset by the drive control section 50. Based on the deviation from the reference position information (displacement, velocity, acceleration) based on the profile, for example, PID calculation processing is performed, and the output value is output to the ultrasonic motor 55 as a drive command signal to perform feedback control. The friction member 5 provided in the ultrasonic motor 55 by causing the motor 55 to make an elliptical motion in accordance with the driving command signal.
The stage 53 is guided to the guide member 52 by friction drive with the 5a.
It is designed to move and position along.
【００２９】ここで、上記ステージ５３の移動プロファ
イルとは、ステージ５３の目標移動位置までの時間、変
位、速度、加速度等から求まる一括した情報を示す。Here, the movement profile of the stage 53 refers to collective information obtained from time, displacement, speed, acceleration, etc. of the stage 53 to the target movement position.
【００３０】また、図１に示す本発明の案内装置には、
超音波モータ５５の摩擦部材５５ａの滑り量と、超音波
モータ５５との摩擦駆動により駆動力伝達部材５４の駆
動面５４ａに作用する接線力、さらに滑り量と接線力の
積により求められる摩擦仕事量をそれぞれモニタリング
する監視部１と、超音波モータ５５の駆動中における摩
擦部材５５ａの変位、速度、加速度等の位置情報を測定
するレーザードップラー振動計、フォトセンサー等の非
接触型測定手段５を設けてあり、監視部１内には、非接
触型測定手段５からの位置情報と位置検出手段５６から
の位置情報より超音波モータ５５の摩擦部材５５ａの滑
り量を算出する滑り量計測部２と、超音波モータ５５に
より駆動させる搬送物の重量（ステージ５３上に搭載物
がある場合、搭載物を含めた合計重量）と位置検出手段
５６より得られる位置情報から算出した加速度を基に超
音波モータ５５との摩擦駆動により駆動力伝達部材５４
の駆動面５４ａに作用する接線力を算出する接線力計測
部３、及び上記滑り量計測部２で算出された滑り量と、
上記接線力計測部３で算出された接線力との積を算出す
る摩擦仕事量計測部４をそれぞれ配置してある。Further, the guide device of the present invention shown in FIG.
Friction work obtained by the amount of sliding of the friction member 55a of the ultrasonic motor 55, the tangential force acting on the drive surface 54a of the driving force transmission member 54 by friction driving with the ultrasonic motor 55, and the product of the amount of sliding and the tangential force. A monitoring unit 1 for respectively monitoring the amount, and a non-contact type measuring means 5 such as a laser Doppler vibrometer and a photo sensor for measuring positional information such as displacement, speed and acceleration of the friction member 55a during driving of the ultrasonic motor 55. A slip amount measuring unit 2 is provided in the monitoring unit 1 for calculating the slip amount of the friction member 55a of the ultrasonic motor 55 based on the position information from the non-contact measuring unit 5 and the position information from the position detecting unit 56. And the weight of the transported object driven by the ultrasonic motor 55 (total weight including the loaded object when the loaded object is on the stage 53) and the position detection means 56. Driving force transmission on the basis of the acceleration calculated from the location information by the friction drive of the ultrasonic motor 55 members 54
A tangential force measuring unit 3 for calculating a tangential force acting on the driving surface 54a of the above, and a slip amount calculated by the slip amount measuring unit 2;
A friction work amount measuring unit 4 for calculating a product with the tangential force calculated by the tangential force measuring unit 3 is arranged.
【００３１】ここで、滑り量は超音波モータ５５の駆動
時における摩擦部材５５ａの振動速度とステージ５３の
移動速度とを比較することにより求めることができ、数
式１により算出することができる。
（数式１）
Ｌｓ＝（Ａ−Ｂ）×Ｔｃ
但し、Ｌｓ：超音波モータの摩擦部材の滑り量
Ａ：非接触型測定手段から得られる超音波モータの摩擦
部材の振動速度
Ｂ：位置検出手段から得られるステージの移動速度
Ｔｃ：超音波モータの摩擦部材の接触時間
なお、上記滑り量（Ｌｓ）はフィードバック制御時にお
けるサーボループ間毎に算出すれば良く、例えば、サー
ボループ時間が超音波モータ５５の駆動周波数より長
く、サーボループ間に楕円周期が複数回生じる場合はサ
ーボループ間での振動速度（Ａ）を平均化して算出すれ
ば良い。また、超音波モータ５５の摩擦部材５５ａの接
触時間（Ｔｃ）は、非接触型測定手段５から得られる摩
擦部材５５ａの振動速度（Ａ）の波形を基に振動速度
（Ａ）が遅くなる領域に相当する時間を接触時間とし、
接触時間（Ｔｃ）においてもサーボループ間で判断すれ
ば良く、さらに、サーボループ間に楕円周期が複数回生
じる場合はサーボループ間での接触時間（Ｔｃ）を平均
化すれば良い。Here, the slip amount can be obtained by comparing the vibration speed of the friction member 55a and the moving speed of the stage 53 when the ultrasonic motor 55 is driven, and can be calculated by the mathematical formula 1. (Formula 1) Ls = (A−B) × Tc where Ls: Amount of sliding of friction member of ultrasonic motor A: Vibration velocity of friction member of ultrasonic motor obtained from non-contact type measuring means B: Position detecting means Moving speed Tc obtained from: contact time of friction member of ultrasonic motor The slip amount (Ls) may be calculated for each servo loop during the feedback control. For example, the servo loop time is the ultrasonic motor. If the elliptic period is longer than the driving frequency of 55 and occurs in the servo loops a plurality of times, the vibration speed (A) between the servo loops may be averaged and calculated. Further, the contact time (Tc) of the friction member 55a of the ultrasonic motor 55 is a region where the vibration speed (A) becomes slow based on the waveform of the vibration speed (A) of the friction member 55a obtained from the non-contact measuring means 5. The time equivalent to is the contact time,
The contact time (Tc) may also be determined between the servo loops. Further, when elliptic cycles occur a plurality of times between the servo loops, the contact time (Tc) between the servo loops may be averaged.
【００３２】また、接触力は位置検出手段５６から得ら
れるステージ５３の位置情報より算出したサーボループ
間での加速度と、超音波モータ５５により駆動させる搬
送物の重量とから求めることができ、数式２により算出
することができる。
（数式２）
Ｆ＝Ｇ×Ｗ
但し、Ｆ：超音波モータとの摩擦駆動により駆動力伝達
部材の駆動面に作用する接線力
Ｇ：位置検出手段より得られる位置情報から算出した加
速度
Ｗ：超音波モータにより駆動させる搬送物の重量
ここで、超音波モータ５５との摩擦駆動により駆動力伝
達部材５４の駆動面５４ａに作用する接線力を監視する
のは、滑り量（Ｌｓ）が一定でも接線力は超音波モータ
５５の駆動速度、加速度、押圧力や搬送物の重量によっ
て常に変化し、この接線力の増加によっても摩耗量が増
加するからである。The contact force can be obtained from the acceleration between the servo loops calculated from the position information of the stage 53 obtained from the position detecting means 56 and the weight of the conveyed product driven by the ultrasonic motor 55, It can be calculated by 2. (Formula 2) F = G × W, where F: tangential force acting on the driving surface of the driving force transmitting member by frictional driving with the ultrasonic motor G: acceleration W calculated from position information obtained by the position detecting means W: super Weight of conveyed object driven by sonic motor Here, the tangential force acting on the driving surface 54a of the driving force transmission member 54 due to frictional driving with the ultrasonic motor 55 is to monitor the tangential line even if the slip amount (Ls) is constant. This is because the force constantly changes depending on the driving speed, acceleration, pressing force of the ultrasonic motor 55 and the weight of the conveyed object, and the wear amount also increases due to the increase of this tangential force.
【００３３】即ち、本件発明者らは、駆動源に超音波モ
ータ５５を用いた場合、最も把握しておかなければなら
ない超音波モータ５５の摩擦部材５５ａとステージ５３
の駆動力伝達部材５４の摩耗状態の判断について種々研
究を重ねた結果、超音波モータ５５の摩擦部材５５ａの
滑り量（Ｌｓ）とともに、搬送物の重量や超音波モータ
５５の振動速度、加速度、押圧力等によっても変化する
超音波モータ５５との摩擦駆動により駆動力伝達部材５
４の駆動面５４ａに作用する接線力（Ｆ）を監視すれば
良いことを見出し、本発明に至った。That is, when the ultrasonic motor 55 is used as the drive source, the present inventors must understand the most about the friction member 55a of the ultrasonic motor 55 and the stage 53.
As a result of various studies on the determination of the wear state of the driving force transmission member 54, the amount of slip (Ls) of the friction member 55a of the ultrasonic motor 55, the weight of the conveyed object, the vibration speed and acceleration of the ultrasonic motor 55, The driving force transmission member 5 is driven by friction with the ultrasonic motor 55, which changes depending on the pressing force or the like.
The inventors have found that it is sufficient to monitor the tangential force (F) acting on the driving surface 54a of No. 4 and have completed the present invention.
【００３４】このように、本発明の案内装置によれば、
監視部１にて摩耗と関連性のある滑り量（Ｌｓ）と接線
力（Ｆ）の双方をモニタリングするようにしたことか
ら、滑り量（Ｌｓ）の増加や接線力（Ｆ）の低下が発生
した場合、超音波モータ５５のステージ５３との接触状
態に変化が見られたことを意味するため、駆動中におけ
るステージ５３の位置精度の劣化や、超音波モータ５５
の摩擦部材５５ａとステージ５３の駆動力伝達部材５４
の異常摩耗を未然に防止することができ、滑り量（Ｌ
ｓ）だけを監視していたものと比較して摩耗の度合いを
より精度良く把握することができる。Thus, according to the guide device of the present invention,
Since the monitoring unit 1 monitors both the slip amount (Ls) and the tangential force (F) that are associated with wear, an increase in the slip amount (Ls) and a decrease in the tangential force (F) occur. In that case, since it means that the contact state of the ultrasonic motor 55 with the stage 53 has changed, the positional accuracy of the stage 53 is deteriorated during driving, and the ultrasonic motor 55
Friction member 55a and the driving force transmission member 54 of the stage 53
Abnormal wear can be prevented in advance, and the slip amount (L
The degree of wear can be more accurately grasped as compared with the case where only s) is monitored.
【００３５】なお、本実施形態では、監視部１の滑り量
計測部２にて滑り量（Ｌｓ）を監視するようにしたが、
滑り量（Ｌｓ）に代えて本件出願人が先に提案している
特開２０００−３０８９３９公報に開示するように、数
式３に示す伝達効率として把握しても構わない。
（数式３）
Ｈ＝Ｂ／Ａ×１００（％）
但し、Ｈ：伝達効率
Ａ：非接触型測定手段から得られる振動速度
Ｂ：位置検出手段からの位置情報
また、図１に示す案内装置の監視部１には、滑り量計測
部２で算出した滑り量（Ｌｓ）と接線力計測部３で算出
した接線力（Ｆ）の積を算出する摩擦仕事量計測部４を
設けてある。In this embodiment, the slip amount measuring unit 2 of the monitoring unit 1 monitors the slip amount (Ls).
Instead of the slip amount (Ls), the transmission efficiency shown in Formula 3 may be understood as disclosed in Japanese Patent Laid-Open No. 2000-308939 proposed by the applicant of the present application. (Equation 3) H = B / A × 100 (%) where H: transmission efficiency A: vibration speed obtained from non-contact type measuring means B: position information from position detecting means, and the guide device shown in FIG. The monitoring unit 1 is provided with a friction work amount measuring unit 4 that calculates a product of the slip amount (Ls) calculated by the slip amount measuring unit 2 and the tangential force (F) calculated by the tangential force measuring unit 3.
【００３６】駆動部における摩耗は、滑り量（Ｌｓ）と
接触の過酷度を表す接線力（Ｆ）の両方で観察すること
が重要であることは先に示したが、両者の積の値で監視
すれば総合的に定量値として摩耗状態を監視することが
できる。Although it has been shown above that it is important to observe wear in the drive section by both the amount of slippage (Ls) and the tangential force (F) representing the severity of contact, the value of the product of both is shown. If monitored, the wear state can be comprehensively monitored as a quantitative value.
【００３７】即ち、本件発明者らは駆動源として超音波
モータ５５を用いた場合に最も大きな問題となる摩耗量
についてさらに鋭意研究を重ねたところ、滑り量（Ｌ
ｓ）と接線力（Ｆ）の積と摩耗量との間に数式４に示す
関係式が得られることを見出した。
（数式４）
Ｖ＝Ｋ×Ｌｓ×Ｆ
但し、Ｖ：超音波モータの摩擦部材とステージの駆動力
伝達部材の合計摩耗量Ｋ：定数
Ｌｓ：超音波モータの摩擦部材の滑り量
Ｆ：超音波モータとの摩擦駆動により駆動力伝達部材の
駆動面に作用する接線力
ここで、Ｋは定数で，駆動条件を予め設定しておけば、
超音波モータ５５の摩擦部材５５ａ及びステージ５３の
駆動力伝達部材５４を形成する材質とその組み合わせに
よって決定されるものである。例えば、超音波モータ５
５の摩擦部材５５ａ及びステージ５３の駆動力伝達部材
５４を形成する材質が共にアルミナセラミックスである
場合、定数（Ｋ）は約３．５×１０-5であり、この摩耗
量は、滑り量（Ｌｓ）×接線力（Ｆ）×定数（Ｋ）とし
て算出することができる。That is, when the inventors of the present invention further conducted extensive studies on the wear amount, which is the biggest problem when the ultrasonic motor 55 is used as the drive source, the slip amount (L
It was found that the relational expression shown in Formula 4 can be obtained between the product of s) and the tangential force (F) and the wear amount. (Formula 4) V = K × Ls × F where V: total wear amount of the friction member of the ultrasonic motor and the driving force transmission member of the stage K: constant Ls: slip amount F of the friction member of the ultrasonic motor F: ultrasonic wave Tangent force acting on the driving surface of the driving force transmitting member by frictional driving with the motor, where K is a constant and the driving condition is set in advance,
It is determined by the material forming the friction member 55a of the ultrasonic motor 55 and the driving force transmission member 54 of the stage 53 and the combination thereof. For example, the ultrasonic motor 5
When the materials forming the friction member 55a of No. 5 and the driving force transmission member 54 of the stage 53 are both alumina ceramics, the constant (K) is about 3.5 × 10 −5 , and this wear amount is the slip amount ( It can be calculated as Ls) × tangential force (F) × constant (K).
【００３８】その為、本発明の案内装置によれば、監視
部１の摩擦仕事量計測部４にて摩擦仕事量を算出して単
位距離あたりの摩耗量を求め、これに駆動距離をかけて
摩耗量を算出することにより摩耗の度合いを定量的に予
測し、案内装置の寿命を把握することができる。Therefore, according to the guide device of the present invention, the friction work amount is calculated by the friction work amount measuring unit 4 of the monitoring unit 1 to obtain the wear amount per unit distance, and this is multiplied by the driving distance. By calculating the amount of wear, it is possible to quantitatively predict the degree of wear and grasp the life of the guide device.
【００３９】また、摩擦仕事量計測部４にて摩擦仕事量
を常に監視して摩耗量を算出し、予め計算しておいた摩
耗量となった時、案内装置を自動的に停止させるように
しておけば、駆動中におけるステージ５３の位置精度の
劣化や、超音波モータ５５の摩擦部材５５ａ及びステー
ジ５３の駆動力伝達部材５４の異常摩耗を未然に防止す
ることができ、不必要なメンテナンスをなくすことがで
きるため、案内装置の稼動効率を向上させることができ
る。Further, the friction work amount measuring section 4 constantly monitors the friction work amount to calculate the wear amount, and when the wear amount is calculated in advance, the guide device is automatically stopped. By doing so, it is possible to prevent deterioration of the positional accuracy of the stage 53 during driving and abnormal wear of the friction member 55a of the ultrasonic motor 55 and the driving force transmission member 54 of the stage 53, and unnecessary maintenance is performed. Since it can be eliminated, the operating efficiency of the guide device can be improved.
【００４０】次に、監視部を有する本発明の案内装置の
応用例について図２を基に説明する。Next, an application example of the guide device of the present invention having a monitor will be described with reference to FIG.
【００４１】この案内装置は、監視部１の摩擦仕事量計
測部４にて算出した摩擦仕事量が予め設定した摩擦仕事
量のしきい値内にあるか否かを判定する判定部６と、こ
の判定部６の結果が常に予め設定した摩擦仕事量のしき
い値内となるように駆動制御部５０の制御パラメータを
変更するパラメータ調整部７と摩擦部材の摩耗が進み調
整できるパラメータの範囲が狭くなり、予め設定した摩
擦仕事量のしきい値を超えてしまいメンテナンスが必要
である場合に装置の異常を警告する警告部８を図１に示
す案内装置に設けたものである。This guide device includes a judging unit 6 for judging whether or not the friction work amount calculated by the friction work amount measuring unit 4 of the monitoring unit 1 is within a preset threshold value of the friction work amount. The range of the parameter adjustment unit 7 that changes the control parameter of the drive control unit 50 so that the result of the determination unit 6 is always within the preset threshold value of the friction work amount and the range of the parameter that can be adjusted due to the wear of the friction member is adjusted. The guide unit shown in FIG. 1 is provided with a warning unit 8 that warns of an abnormality of the apparatus when the maintenance becomes necessary due to the narrowing and exceeding a preset friction work amount threshold value.
【００４２】ここで、上記摩擦仕事量のしきい値は摩擦
部材の寿命を考慮して設定される値であり、摩擦部材の
材質やかかる荷重等によってその範囲を決定する。摩擦
部材の寿命が短ければその範囲は狭く長ければ範囲は広
い。Here, the threshold value of the friction work is a value set in consideration of the life of the friction member, and its range is determined by the material of the friction member, the applied load, and the like. If the life of the friction member is short, the range is narrow, and if it is long, the range is wide.
【００４３】そして、ステージ５３を駆動させるにあた
り、偏差が同じ状態で駆動するならば摩擦仕事量計測部
４により得られる摩擦仕事量の値が小さい程、超音波モ
ータ５５の滑りがなく効率良く駆動力をステージ５３に
伝達することができ、さらに摩耗量を最小限に抑えるこ
とになる。When the stage 53 is driven with the same deviation, the smaller the value of the friction work amount obtained by the friction work amount measuring unit 4, the more efficiently the ultrasonic motor 55 is driven without slipping. The force can be transmitted to the stage 53, and the amount of wear can be minimized.
【００４４】その為、摩擦仕事量のしきい値を設けて判
定部６にて確認することにより、摩擦仕事量計測部４に
て算出した摩擦仕事量が予め設定した摩擦仕事量のしき
い値を超える場合、超音波モータ５５の摩擦部材５５ａ
及びステージ５３の駆動力伝達部材５４の異常摩耗を招
く恐れがあることを容易に確認することができる。Therefore, by setting a threshold value of the friction work amount and confirming it by the judging unit 6, the friction work amount calculated by the friction work amount measuring unit 4 is set to a preset threshold value of the friction work amount. The friction member 55a of the ultrasonic motor 55
Also, it can be easily confirmed that there is a risk of abnormal wear of the driving force transmission member 54 of the stage 53.
【００４５】なお、判定部６における摩擦仕事量のしき
い値は数式４より得られる摩耗仕事量と摩耗量との関係
から摩擦仕事量の最小値を把握し、この最小値を基に摩
擦仕事量のしきい値を適宜決定すれば良い。As for the threshold value of the friction work amount in the judging section 6, the minimum value of the friction work amount is grasped from the relationship between the wear work amount and the wear amount obtained by the equation 4, and the friction work amount is calculated based on this minimum value. The amount threshold value may be determined appropriately.
【００４６】また、図２に示す案内装置によれば、超音
波モータ５５の摩擦部材５５ａ及びステージ５３の駆動
力伝達部材５４の摩耗状態を監視する判定部６ととも
に、摩擦仕事量計測部４にて算出した摩擦仕事量が予め
設定した摩擦仕事量のしきい値を超えないように駆動制
御部５０の制御パラメータ（ＰＩＤ制御ではＰ項、Ｉ
項，Ｄ項）を変更するパラメータ調整部７を設けたこと
から、超音波モータ５５の異常摩耗を未然に防ぎ、摩耗
の発生を抑えることができるとともに、長期間にわたっ
てステージ５３の安定した駆動を実現することができ
る。Further, according to the guide device shown in FIG. 2, the friction work measuring section 4 is provided with the judging section 6 for monitoring the wear states of the friction member 55a of the ultrasonic motor 55 and the driving force transmitting member 54 of the stage 53. The control parameter of the drive control unit 50 (P term, P term in the PID control, I so that the calculated friction work amount does not exceed a preset threshold value of the friction work amount).
Since the parameter adjusting unit 7 for changing the items (D and D) is provided, abnormal wear of the ultrasonic motor 55 can be prevented, occurrence of wear can be suppressed, and stable driving of the stage 53 for a long period of time can be performed. Can be realized.
【００４７】また、パラメータ調整部７での制御パラメ
ータの調整を行っても判定部６での摩擦仕事量がしきい
値を満足できなくなったときは装置の稼働が突然停止す
るため、製品の製造ラインに本発明の案内装置を導入し
た場合、製造中の製品が不良となるばかりか、製造ライ
ンが完全にストップしてしまうために多大な損失を被る
恐れがある。よって装置の異常を種々の手段によって事
前にメンテナンス可能な人員に知らせるために警告部８
が必要となる。なお、装置の異常を警告する手段として
は、例えば判定部６に警告音や警告ランプ等の直接的に
異常を知らせる装置を接続する手段や、判定部６と製造
ラインの電源装置を接続する手段、或いは判定部６と本
発明の案内装置のユーザを間接的にオンラインで接続す
る手段等を設置し、摩擦仕事量がしきい値を超えた場合
にはこれらの警告部が作動し、装置の異常を早急に把握
しメンテナンスを実施できるようにする。Further, even if the parameter adjusting unit 7 adjusts the control parameter, when the friction work in the judging unit 6 cannot satisfy the threshold value, the operation of the apparatus is suddenly stopped, so that the product is manufactured. When the guide device of the present invention is introduced into the line, not only the product being manufactured becomes defective, but also the manufacturing line stops completely, which may cause a great loss. Therefore, in order to notify the personnel who can maintain in advance by various means of abnormality of the device, the warning unit 8
Is required. As a means for warning the abnormality of the apparatus, for example, a means for connecting a device such as a warning sound or a warning lamp to the determination section 6 to directly notify the abnormality, or a means for connecting the determination section 6 to the power supply device of the manufacturing line. Alternatively, a means or the like for indirectly connecting the determination unit 6 and the user of the guide device of the present invention online is installed, and when the friction work exceeds a threshold value, these warning units are activated, Make it possible to quickly grasp abnormalities and perform maintenance.
【００４８】このように、摩擦仕事量がしきい値内にあ
るか否かを判定する判定部６と、この判定部６の結果が
予め設定した摩擦仕事量のしきい値内となるように駆動
制御部５０の制御パラメータを調整するパラメータ調整
部７と摩擦部材の摩耗が進み調整できるパラメータの範
囲が狭くなり、予め設定した摩擦仕事量のしきい値を超
えてしまいメンテナンスが必要である場合に装置の異常
を警告する警告部８を設けることにより、超音波モータ
５５の異常摩耗を未然に防ぐとともに、摩耗を抑え、ス
テージ５３の安定した駆動を長期間にわたって実現する
ことが可能な案内装置を提供することができる。In this way, the judgment unit 6 for judging whether the friction work amount is within the threshold value or not, and the result of this judgment unit 6 is set within the preset friction work amount threshold value. When the parameter adjustment unit 7 that adjusts the control parameters of the drive control unit 50 and the wear of the friction member are advanced and the range of the adjustable parameter is narrowed, and the preset threshold value of the friction work amount is exceeded and maintenance is required. By providing a warning portion 8 for warning the abnormality of the device in the guide device, it is possible to prevent abnormal wear of the ultrasonic motor 55 in advance, suppress wear, and realize stable driving of the stage 53 for a long period of time. Can be provided.
【００４９】その為、本発明の案内装置は、駆動途中に
おけるステージ５３の高い位置精度が要求される精密加
工用工作機械、精密測定装置、半導体製造工程における
描画露光装置等に用いる案内装置として好適に用いるこ
とができる。Therefore, the guiding device of the present invention is suitable as a guiding device used for a precision machining machine tool, a precision measuring device, a drawing exposure device in a semiconductor manufacturing process, which requires high positional accuracy of the stage 53 during driving. Can be used for.
【００５０】以上、本発明の実施形態について説明した
が、本発明の案内装置に用いる超音波モータ５５の振動
形式は特に限定するものではなく、単一の振動モードの
みならず、モード変換型、多重モード型、モード回転
型、複合振動型等の複数の振動モードのものを適用する
こともできる。Although the embodiment of the present invention has been described above, the vibration mode of the ultrasonic motor 55 used in the guide device of the present invention is not particularly limited, and not only a single vibration mode but also a mode conversion type, It is also possible to apply a plurality of vibration modes such as a multi-mode type, a mode rotation type, and a complex vibration type.
【００５１】さらに、本発明の案内装置では、ステージ
５３をなす可動体が直線運動する例を説明したが、可動
体が回転運動する案内装置に適用することもでき、本発
明の範囲を逸脱しない範囲で種々改良や変更したものに
も適用できることは言うまでもない。Further, in the guide device of the present invention, an example in which the movable body forming the stage 53 moves linearly has been described, but the present invention can be applied to a guide device in which the movable body makes a rotational motion, and does not depart from the scope of the present invention. It goes without saying that the present invention can be applied to various modifications and changes within the range.
【００５２】[0052]
【実施例】ここで、図１に示す本発明の案内装置の具体
例について説明する。EXAMPLE A specific example of the guide device of the present invention shown in FIG. 1 will now be described.
【００５３】ステージ５３を案内するガイド部材５２に
は、２００ｍｍのストロークを有するクロスローラガイ
ドを用い、ステージ５３は２５０ｍｍ×１２０ｍｍ×３
０ｍｍの板状体とし、アルミニウムにより形成した。そ
して、ステージ５３上には重り（不図示）を載せ、搬送
物（ステージ５３と重り）の重量が１００Ｎとなるよう
にした。A cross roller guide having a stroke of 200 mm is used as the guide member 52 for guiding the stage 53, and the stage 53 is 250 mm × 120 mm × 3.
A 0 mm plate-shaped body was formed using aluminum. Then, a weight (not shown) was placed on the stage 53 so that the weight of the conveyed product (the stage 53 and the weight) was 100N.
【００５４】また、ステージ５３を駆動させる超音波モ
ータ５５は、幅８ｍｍ、長さ３０ｍｍ、厚み３ｍｍの圧
電駆動部５５ｅの端面にアルミナセラミック製の摩擦部
材５５ａを備え、圧電駆動部５５ｅの一方の主面には４
つの電極膜５５ｇ，５５ｈ，５５ｉ、５５ｊを形成し、
対角に位置する電極膜５５ｇ，５５ｈ，５５ｉ、５５ｊ
同士を結線するとともに、他方の主面全体に１つの共通
電極膜を形成してなり、４つの電極膜５５ｉ，５５ｊに
互いの位相差を９０度ずらした指令電圧を印加すること
により、摩擦部材５５ａが楕円運動するようにしたもの
を用いた。なお、摩擦部材５５ａの当接面は、曲率半径
が３ｍｍの球面とし、表面粗度を中心線平均粗さ（Ｒ
ａ）で０．０５μｍとした。The ultrasonic motor 55 for driving the stage 53 is provided with a friction member 55a made of alumina ceramic on the end face of a piezoelectric drive portion 55e having a width of 8 mm, a length of 30 mm and a thickness of 3 mm. 4 on the main surface
Forming five electrode films 55g, 55h, 55i, 55j,
Electrode films 55g, 55h, 55i, 55j diagonally located
By connecting the two to each other and forming one common electrode film on the entire other main surface, and applying a command voltage with a phase difference of 90 degrees to each other to the four electrode films 55i and 55j, a friction member is formed. 55a was used so as to make an elliptical motion. The contact surface of the friction member 55a is a spherical surface having a radius of curvature of 3 mm, and the surface roughness is the center line average roughness (R
It was set to 0.05 μm in a).
【００５５】さらに、ステージ５３の位置検出手段５６
を構成するリニアスケール５６ａには、ミツトヨ製のリ
ニアスケールＳ３３Ｃを用い、ステージ５３の一方の側
面に設置するとともに、このリニアスケール５６ａと対
向する位置に検出ヘッド５６ｂを設置して位置検出手段
５６を構成し、ステージ５３の他方の側面にはアルミナ
セラミック製の駆動力伝達部材５４を設置した。Further, the position detecting means 56 of the stage 53
A linear scale S33C manufactured by Mitutoyo Corporation is used as the linear scale 56a constituting the above, and the linear scale 56a is installed on one side surface of the stage 53, and the detection head 56b is installed at a position facing the linear scale 56a. A driving force transmission member 54 made of alumina ceramic was installed on the other side surface of the stage 53.
【００５６】また、駆動制御部５０と監視部１をそれぞ
れ接続するとともに、非接触型測定手段５にレーザード
ップラ振動計を用い、このレーザードップラ振動計を超
音波モータ５５の摩擦部材５５ａに対して垂直に設置
し、超音波モータ５５を駆動させた時の位置情報（変
位、速度、加速度）と、位置検出手段５６からの位置情
報（変位、速度、加速度）を基に監視部１の滑り量計測
部２にて数式１により滑り量（Ｌｓ）を算出するように
した。
（数式１）
Ｌｓ＝（Ａ−Ｂ）×Ｔｃ
但し、Ｌｓ：超音波モータの摩擦部材の滑り量
Ａ：非接触型測定手段から得られる超音波モータの摩擦
部材の振動速度
Ｂ：位置検出手段から得られるステージの移動速度
Ｔｃ：超音波モータの摩擦部材の接触時間
但し、滑り量（Ｌｓ）の算出に用いる振動速度（Ａ）
は、サーボループ間での平均値を用いた。また、接触時
間（Ｔｃ）は振動速度（Ａ）の波形を基に、摩擦部材５
５ａの振動速度が遅くなる部分を接触時間とし、サーボ
ループ間での平均値を用いた。The drive control unit 50 and the monitoring unit 1 are connected to each other, and a laser Doppler vibrometer is used as the non-contact type measuring means 5. The laser Doppler vibrometer is used for the friction member 55a of the ultrasonic motor 55. The amount of slippage of the monitoring unit 1 based on the position information (displacement, speed, acceleration) when the ultrasonic motor 55 is installed vertically and the position information (displacement, speed, acceleration) from the position detection means 56. The measurement unit 2 is configured to calculate the slip amount (Ls) according to Formula 1. (Formula 1) Ls = (A−B) × Tc where Ls: Amount of sliding of friction member of ultrasonic motor A: Vibration velocity of friction member of ultrasonic motor obtained from non-contact type measuring means B: Position detecting means Moving speed Tc obtained from: contact time of friction member of ultrasonic motor However, vibration speed (A) used for calculation of slip amount (Ls)
Used the average value between the servo loops. The contact time (Tc) is based on the waveform of the vibration velocity (A), and the friction member 5
An average value between the servo loops was used with the contact time being the portion of 5a where the vibration speed was slow.
【００５７】また、合わせて監視部１の接線力計測部３
にて、サーボループ間での駆動時の位置情報を基に加速
度を算出し、数式２にて接線力（Ｆ）を算出するように
した。
（数式２）
Ｆ＝Ｇ×Ｗ
但し、Ｆ：超音波モータとの摩擦駆動により駆動力伝達
部材の駆動面に作用する接線力
Ｇ：位置検出手段より得られる位置情報から算出した加
速度
Ｗ：超音波モータにより駆動させる搬送物の重量
そして、超音波モータ５５の駆動制御にＰＩＤ制御を用
い、ステージ５３の移動プロファイルとして、ステージ
５３の移動距離２００ｍｍ、加速度０．１Ｇ、最高速度
５０ｍｍ／ｓの台形制御と、ステージ５３の移動距離２
００ｍｍ、加速度０．１Ｇ、最高速度１００ｍｍ／ｓの
台形制御の２種類を用意して予め駆動制御部５０に設定
した後、上記移動プロファイルに基づいて位置偏差が１
μｍ以内に入るようにＰＩＤ制御した。In addition, the tangential force measuring unit 3 of the monitoring unit 1 is also included.
Then, the acceleration is calculated based on the position information at the time of driving between the servo loops, and the tangential force (F) is calculated by Formula 2. (Formula 2) F = G × W, where F: tangential force acting on the driving surface of the driving force transmitting member by frictional driving with the ultrasonic motor G: acceleration W calculated from position information obtained by the position detecting means W: super The weight of the object to be driven by the sonic motor, and the PID control is used to control the drive of the ultrasonic motor 55. Control and movement distance 2 of stage 53
Two types of trapezoidal control of 00 mm, acceleration 0.1 G, and maximum speed 100 mm / s are prepared and set in the drive control unit 50 in advance, and then the position deviation is set to 1 based on the movement profile.
PID control was performed so as to be within μm.
【００５８】そして、超音波モータ５５を４０ＫＨｚの
周波数で駆動させ、その時の予圧と速度を水準に取り、
ステージ５３を１００ｋｍ駆動させた後の超音波モータ
５５の摩擦部材５５ａの滑り量（Ｌｓ）と摩耗率を測定
する実験を行った。Then, the ultrasonic motor 55 is driven at a frequency of 40 KHz, and the preload and speed at that time are set to levels,
An experiment was conducted to measure the sliding amount (Ls) and wear rate of the friction member 55a of the ultrasonic motor 55 after driving the stage 53 for 100 km.
【００５９】ただし、サーボループは０．３ｍｓとし、
滑り量（Ｌｓ）は駆動用指令信号のサーボループ間内で
の平均値とした。また、摩耗率は、駆動後の超音波モー
タ５５の摩擦部材５５ａ及びステージ５３の駆動力伝達
部材５４の摩耗体積を駆動距離で割った値とした。な
お、制御パラメータ（Ｐ項、Ｉ項、Ｄ項）のうちＤ項を
高くした場合についても同様に実験を行った。However, the servo loop is 0.3 ms,
The slip amount (Ls) is the average value of the drive command signal within the servo loop. The wear rate is a value obtained by dividing the wear volume of the friction member 55a of the ultrasonic motor 55 and the driving force transmission member 54 of the stage 53 after driving by the driving distance. The same experiment was performed when the D term of the control parameters (P term, I term, D term) was increased.
【００６０】結果は図３に示す通りである。ただし、等
速度駆動内での滑り量（Ｌｓ）のばらつきはＤ項の設定
値のばらつきによるものである。The results are shown in FIG. However, the variation of the slip amount (Ls) in the constant speed driving is due to the variation of the set value of the D term.
【００６１】この結果、図３より判るように、速度を上
げると滑り量（Ｌｓ）が大きくなり、さらに滑り量（Ｌ
ｓ）の増加に比例して摩耗量も増加することが判る。As a result, as can be seen from FIG. 3, when the speed is increased, the slip amount (Ls) increases, and the slip amount (Ls) further increases.
It can be seen that the amount of wear also increases in proportion to the increase in s).
【００６２】つまり、同じ位置偏差１μｍ以内に入る条
件下でも駆動速度やＰＩＤ設定により滑り量（Ｌｓ）は
大きく異なり、特にＰＩＤ設定の高い状態では摩耗が大
きくなる。即ち、Ｄ項を上げたことで本来低いＰＩＤで
十分な値であるのに過剰なＰＩＤを与えたため、ステー
ジ５３が不安定挙動となり、超音波モータ５５の滑りが
発生したものと考えられる。That is, the slip amount (Ls) greatly varies depending on the driving speed and the PID setting even under the condition that the same positional deviation is within 1 μm, and the wear becomes large especially when the PID setting is high. That is, it is considered that the increase of the D term gives an excessive PID, which is originally a sufficient value with a low PID, but causes the stage 53 to behave in an unstable manner, causing the ultrasonic motor 55 to slip.
【００６３】また、予圧を変更すると滑り量（Ｌｓ）が
同じでも摩耗量が異なることが判る。予圧変更に相当す
る接線力の違いを見ると、予圧増加に伴い接線力も増加
しており、駆動力は十分あるにも関わらず余計な予圧を
掛けて駆動してしまったため、接触面圧が高くなり、摩
耗が進行したものである。Further, it can be seen that when the preload is changed, the wear amount is different even if the slip amount (Ls) is the same. Looking at the difference in tangential force corresponding to the change in preload, the tangential force also increased with increasing preload, and although the driving force was sufficient, it was driven by applying an extra preload, so the contact surface pressure was high. And the wear has progressed.
【００６４】この結果、滑り量（Ｌｓ）と接線力（Ｆ）
を小さく駆動させることが摩耗低減につながることが判
る。As a result, the slip amount (Ls) and the tangential force (F)
It can be seen that driving a small value reduces wear.
【００６５】そして、監視部１にて滑り量（Ｌｓ）と、
超音波モータ５５との摩擦駆動により駆動力伝達部材５
４の駆動面５４ａに作用する接線力（Ｆ）の双方を監視
することにより、摩耗度合いを精度良く判断することが
できる。Then, the slip amount (Ls) in the monitoring unit 1
Driving force transmission member 5 by friction drive with ultrasonic motor 55
By monitoring both the tangential force (F) acting on the drive surface 54a of No. 4, it is possible to accurately determine the degree of wear.
【００６６】このように超音波モータ５５の駆動中にお
ける摩擦部材５５aの位置情報を測定する非接触型測定
手段５を設けると共に、この非接触型測定手段５からの
位置情報と位置検出手段５６からの位置情報とを相対的
に比較、演算する滑り量計測部２を設けたことにより、
超音波モータ５５の滑り量（Ｌｓ）を把握することがで
き、さらに搬送物の重量と位置検出手段５６からの位置
情報より得られる加速度を基に駆動力伝達部材５４の駆
動面５４ａに作用する接線力を算出する接線力計測部３
を監視部１に設けることにより、ステージ５３の駆動中
における超音波モータ５５の摩擦部材５５ａ及び駆動力
伝達部材５４の駆動面５４ａの摩耗状態を把握すること
ができる。As described above, the non-contact type measuring means 5 for measuring the position information of the friction member 55a during the driving of the ultrasonic motor 55 is provided, and the position information from the non-contact type measuring means 5 and the position detecting means 56 are used. By providing the slip amount measuring unit 2 that relatively compares and calculates the position information of
The slip amount (Ls) of the ultrasonic motor 55 can be grasped, and further, it acts on the driving surface 54a of the driving force transmission member 54 based on the weight of the conveyed object and the acceleration obtained from the position information from the position detecting means 56. Tangent force measuring unit 3 for calculating tangential force
By providing the monitoring unit 1 with, the wear state of the friction member 55a of the ultrasonic motor 55 and the driving surface 54a of the driving force transmission member 54 during driving of the stage 53 can be grasped.
【００６７】また、図４に、図３の滑り量（Ｌｓ）と接
線力（Ｆ）との積により得られる摩擦仕事量と摩耗量と
の関係を示すように、摩擦仕事量と摩耗量との間には比
例関係があることが判る。Further, as shown in FIG. 4, which shows the relationship between the friction work amount and the wear amount obtained by the product of the slip amount (Ls) and the tangential force (F) in FIG. It turns out that there is a proportional relationship between.
【００６８】従って、監視部１に摩擦仕事量計測部４に
て摩擦仕事量をモニタリングすることにより摩耗量を予
測することが可能となり、案内装置の寿命を判断できる
ことが判る。
（実施例２）次に、実施例１の案内装置に判定部６とパ
ラメータ調整部７を設けた図２に示す案内装置と、判定
部６及びパラメータ調整部７を持たない案内装置を用意
し、ステージ５３の最高速度を１００ｍｍ／ｓとする以
外は実施例１と同様の移動プロファイルとしてステージ
５３を１０００ｋｍ駆動させたときの監視部１で監視さ
れる滑り量（Ｌｓ）と摩擦仕事量、及び摩耗量を調べる
実験を行った。Therefore, it can be understood that the wear amount can be predicted by monitoring the friction work amount in the monitoring work unit 1 in the friction work amount measuring unit 4, and the life of the guide device can be determined. (Embodiment 2) Next, a guide device shown in FIG. 2 in which the judging unit 6 and the parameter adjusting unit 7 are provided in the guide device of Embodiment 1 and a guiding device having neither the judging unit 6 nor the parameter adjusting unit 7 are prepared. The sliding amount (Ls) and the friction work amount monitored by the monitoring unit 1 when the stage 53 is driven 1000 km as the same movement profile as in Example 1 except that the maximum speed of the stage 53 is 100 mm / s, and An experiment was conducted to check the amount of wear.
【００６９】結果は表１に示す通りである。The results are shown in Table 1.
【００７０】[0070]
【表１】 [Table 1]
【００７１】この結果、判定部６とパラメータ調整部７
を持たない図１の案内装置は、ステージ５３の駆動距離
が５００ｋｍに達した時、超音波モータ５５の摩擦部材
５５ａの滑り量（Ｌｓ）が１２０nｍに増加し、さらに
摩擦仕事量も３．３×１０-4Ｎｍに上昇した。As a result, the judging section 6 and the parameter adjusting section 7
In the guide device of FIG. 1 which does not have the above, when the driving distance of the stage 53 reaches 500 km, the sliding amount (Ls) of the friction member 55a of the ultrasonic motor 55 increases to 120 nm, and the friction work amount also becomes 3.3. It rose to × 10 −4 Nm.
【００７２】これに対し、判定部６とパラメータ調整部
７を有する図２の案内装置は、ステージ５３を１０００
ｋｍ駆動させても超音波モータ５５の摩擦部材５５ａの
滑り量（Ｌｓ）は５０ｎｍ、摩擦仕事量は１．４×１０
-4Ｎｍで安定しており、駆動後の摩耗量を測定したとこ
ろ、図１の案内装置の摩耗量に対して１／５以下とする
ことができた。On the other hand, in the guide device of FIG. 2 having the judging section 6 and the parameter adjusting section 7, the stage 53 is set to 1000
Even if it is driven for km, the sliding amount (Ls) of the friction member 55a of the ultrasonic motor 55 is 50 nm, and the friction work amount is 1.4 × 10.
It was stable at -4 Nm, and when the amount of wear after driving was measured, it was able to be 1/5 or less of the amount of wear of the guide device in FIG.
【００７３】この結果、監視部１、判定部６、パラメー
タ調整部７を設けて図２に示す案内装置を構成すれば、
超音波モータ５５の摩擦部材５５ａ及びステージ５３の
駆動力伝達部材５４の摩耗を抑え、案内装置の寿命を大
幅に向上させることができる。ことが判る。As a result, if the monitoring unit 1, the determination unit 6, and the parameter adjustment unit 7 are provided to construct the guide device shown in FIG.
Wear of the friction member 55a of the ultrasonic motor 55 and the driving force transmission member 54 of the stage 53 can be suppressed, and the life of the guide device can be significantly improved. I understand.
【００７４】また、滑り量（Ｌｓ）と接線力（Ｆ）の積
である摩擦仕事量を常に測定し、１０ｋｍ毎に摩擦仕事
量を測定し摩耗定数を掛けて摩耗量を測定し、それを１
０００ｋｍ駆動する間の摩耗量の総和を摩耗量の予測値
として計算させて実際の摩耗量と比較したところ、予測
値と実測値のばらつきが５％未満とはほぼ一致してい
た。Further, the friction work which is the product of the slip amount (Ls) and the tangential force (F) is constantly measured, the friction work is measured every 10 km, and the wear constant is multiplied to measure the wear amount. 1
When the total amount of wear during driving for 000 km was calculated as a predicted value of the amount of wear and compared with the actual amount of wear, it was found that the variation between the predicted value and the actually measured value was less than 5%.
【００７５】更に、上述した案内装置に判定部６にて摩
擦仕事量のしきい値を超えた場合に警告音を発し、製造
ラインを自動的に停止させ、案内装置のユーザにもオン
ラインでメンテナンスの必要性を知らせる警告部８を設
け、各種製造装置と平行して稼働する製造ラインに導入
したところ、案内装置に異常が発生しても自動的に製造
ラインを停止させ、装置のメンテナンス時期を知ること
ができるために、製品不良や製造ラインの停止等の問題
が発生することはなかった。Further, when the judging unit 6 makes a warning sound in the above-mentioned guiding device when the threshold value of the friction work is exceeded, the manufacturing line is automatically stopped, and the user of the guiding device performs online maintenance. When a warning unit 8 that informs the necessity of is installed in a production line that operates in parallel with various manufacturing equipment, even if an abnormality occurs in the guide device, the production line is automatically stopped and the maintenance time of the equipment is set. Since the information can be known, problems such as product defects and production line stoppage did not occur.
【００７６】[0076]
【発明の効果】以上のように、請求項１に係る発明によ
れば、摩擦部材を有する超音波モータと、超音波モータ
の摩擦部材との摩擦駆動により可動する可動体と、可動
体の位置を測定する位置検出手段と、位置検出手段から
の位置情報と予め設定した移動プロファイルに基づく基
準位置情報との偏差を基に演算し、上記超音波モータを
駆動させる駆動用指令信号を出力する駆動制御部と、上
記超音波モータの摩擦部材の滑り量を算出する滑り量計
測部及び上記超音波モータとの摩擦駆動により可動体側
の駆動面に作用する接線力を算出する接線力計測部を具
備する監視部とから超音波モータを可動体の駆動源とす
る案内装置を構成するようにしたことから、超音波モー
タの摩擦部材及び可動体側の駆動面の摩耗状態を的確に
把握することができ、案内装置の信頼性を向上させるこ
とができるとともに、不必要なメンテナンスによって案
内装置を止める必要がなく、稼働効率を向上させること
ができる。As described above, according to the first aspect of the invention, the ultrasonic motor having the friction member, the movable body that is movable by frictional driving of the friction member of the ultrasonic motor, and the position of the movable body. Drive for outputting a drive command signal for driving the ultrasonic motor, which is calculated based on a deviation between position detection means for measuring the position information and reference position information based on a preset movement profile from the position detection means. A control unit, a slip amount measuring unit that calculates a slip amount of a friction member of the ultrasonic motor, and a tangential force measuring unit that calculates a tangential force acting on a driving surface on the movable body side by friction driving with the ultrasonic motor. Since the guide unit using the ultrasonic motor as the drive source of the movable body is configured from the monitoring unit that operates, it is possible to accurately grasp the wear state of the friction member of the ultrasonic motor and the drive surface on the movable body side. , It is possible to improve the reliability of the guiding device, it is not necessary to stop the guide device in unnecessary maintenance, thereby improving the operation efficiency.
【００７７】また、請求項２に係る発明によれば、上記
監視部に、上記滑り量計測部で算出された滑り量と、上
記接線力計測部で算出された接線力との積を算出する摩
擦仕事量計測部を設けたことから、超音波モータの摩擦
部材及び可動体側の駆動面の摩耗を定量的に把握するこ
とができる。According to the second aspect of the present invention, the monitoring unit calculates the product of the slip amount calculated by the slip amount measuring unit and the tangential force calculated by the tangential force measuring unit. Since the friction work amount measuring unit is provided, it is possible to quantitatively grasp the wear of the friction member of the ultrasonic motor and the drive surface on the movable body side.
【００７８】さらに、請求項３に係る発明によれば、上
記摩擦仕事量計測部より得られる摩擦仕事量が、予め設
定した摩擦仕事量のしきい値内にあるか否かを判定する
判定部を設けたことから、摩擦仕事量計測部より得られ
る摩擦仕事量がそのしきい値を超えた場合、超音波モー
タの摩擦部材や可動体側の駆動面に異常摩耗が発生する
恐れがあることを把握することができる。Further, according to the third aspect of the present invention, the judging unit for judging whether or not the friction work amount obtained from the friction work amount measuring unit is within a preset threshold value of the friction work amount. Therefore, if the friction work amount obtained from the friction work amount measuring unit exceeds the threshold value, abnormal wear may occur on the friction member of the ultrasonic motor or the drive surface on the movable body side. You can figure it out.
【００７９】請求項４に係る発明によれば、上記判定部
にて判定した結果に基づき、上記摩擦仕事量計測部より
得られる摩擦仕事量がそのしきい値内となるように、駆
動制御部の制御パラメータをそれぞれ変更するパラメー
タ調整部を設けたことから、超音波モータの摩擦部材や
可動体側の駆動面の異常摩耗を未然に防ぐことができ、
摩耗を抑えて可動体の安定した駆動を長期間にわたって
実現することができる。According to the fourth aspect of the present invention, the drive control unit is controlled so that the frictional work amount obtained from the frictional work amount measuring unit is within the threshold value based on the result determined by the determining unit. Since a parameter adjusting section for changing each control parameter of is provided, it is possible to prevent abnormal wear of the friction member of the ultrasonic motor or the drive surface of the movable body in advance.
It is possible to suppress wear and realize stable driving of the movable body over a long period of time.
【００８０】請求項５に係る発明によれば、上記超音波
モータの駆動中における摩擦部材の変位、速度、加速度
等の位置情報を非接触型測定手段によって測定するよう
にしたことから、摩擦部材の位置情報を正確に把握する
ことができる。According to the fifth aspect of the present invention, since the positional information such as the displacement, speed, acceleration, etc. of the friction member during the driving of the ultrasonic motor is measured by the non-contact type measuring means, the friction member is measured. The position information of can be grasped accurately.
【００８１】請求項６に係る発明によれば、上記滑り量
計測部において、上記超音波モータの駆動中における摩
擦部材の変位、速度、加速度等の位置情報と、上記位置
検出手段からの位置情報を基に数式１により滑り量を算
出するようにしたことから、超音波モータの摩擦部材の
滑り量を正確に算出することができる。
（数式１）
Ｌｓ＝（Ａ−Ｂ）×Ｔｃ
但し、Ｌｓ：超音波モータの摩擦部材の滑り量
Ａ：非接触型測定手段から得られる超音波モータの摩擦
部材の振動速度
Ｂ：位置検出手段から得られるステージの移動速度
Ｔｃ：超音波モータの摩擦部材の接触時間
請求項７に係る発明によれば、上記パラメータ調整部で
変更された制御パラメータを用いて駆動制御部が駆動し
た場合、摩擦仕事量が前記予め設定したしきい値を超え
た場合に装置内に異常が発生したことを告知する警告部
を有するため、装置の異常を早急に察知することがで
き、メンテナンスを実施できる。According to the sixth aspect of the invention, in the slip amount measuring section, position information such as displacement, speed and acceleration of the friction member during driving of the ultrasonic motor, and position information from the position detecting means. Since the slip amount is calculated by Equation 1 based on, the slip amount of the friction member of the ultrasonic motor can be accurately calculated. (Formula 1) Ls = (A−B) × Tc where Ls: Amount of sliding of friction member of ultrasonic motor A: Vibration velocity of friction member of ultrasonic motor obtained from non-contact type measuring means B: Position detecting means Moving speed Tc obtained from: contact time of friction member of ultrasonic motor According to the invention according to claim 7, when the drive control unit drives using the control parameter changed by the parameter adjusting unit, the friction Since the device has a warning part for notifying that an abnormality has occurred in the device when the work amount exceeds the preset threshold value, the abnormality of the device can be detected immediately and maintenance can be performed.
【００８２】その為、本発明の案内装置は、駆動途中に
おける可動体の高い位置精度が要求される精密加工用工
作機械、精密測定装置、半導体製造工程における描画露
光装置等に好適に用いることができる。Therefore, the guide device of the present invention is suitable for use in a precision machining machine tool, a precision measuring device, a drawing exposure device in a semiconductor manufacturing process, etc., in which a high positional accuracy of a movable body is required during driving. it can.
【図１】超音波モータを可動体の駆動源とする本発明の
案内装置の一例を示す模式図である。FIG. 1 is a schematic view showing an example of a guide device of the present invention using an ultrasonic motor as a drive source for a movable body.
【図２】超音波モータを可動体の駆動源とする本発明の
案内装置の応用例を示す模式図である。FIG. 2 is a schematic diagram showing an application example of the guide device of the present invention in which an ultrasonic motor is used as a drive source of a movable body.
【図３】図１に示す本発明の案内装置を用いてステージ
を駆動させた時の滑り量と摩耗率との関係を示す線図で
ある。FIG. 3 is a diagram showing a relationship between a slip amount and a wear rate when a stage is driven using the guide device of the present invention shown in FIG.
【図４】図１に示す本発明の案内装置を用いてステージ
を駆動させた時の摩擦仕事量と摩耗率との関係を示す線
図である。FIG. 4 is a diagram showing a relationship between a friction work amount and a wear rate when a stage is driven by using the guide device of the present invention shown in FIG.
【図５】超音波モータを可動体の駆動源とする従来の案
内装置の一例を示す模式図である。FIG. 5 is a schematic view showing an example of a conventional guide device using an ultrasonic motor as a drive source of a movable body.
【図６】超音波モータを可動体の駆動源とする従来の案
内装置の他の例を示す模式図である。FIG. 6 is a schematic view showing another example of a conventional guide device using an ultrasonic motor as a drive source for a movable body.
【図７】本件出願人が先に提案した超音波モータを可動
体の駆動源とする案内装置を示す模式図である。FIG. 7 is a schematic diagram showing a guide device using an ultrasonic motor previously proposed by the applicant of the present application as a drive source of a movable body.
１：監視部 ２：滑り量計測部 ３：接線力計測部 ４：摩擦仕事量計測部 ５，６２：非接触型測定手段 ６：判定部 ７：パラメータ調整部 ８：警告部 ５０：駆動制御部 ５１：ベース基盤 ５２：ガイド部材 ５３：ステージ ５４：駆動力伝達部材 ５４ａ：駆動面 ５５：超音波モータ ５５ａ：摩擦部材 ５５ｂ：弾性体 ５５ｃ：バネ ５５ｄ：ケース ５５ｅ：圧電駆動部 ５５ｆ：圧電セラミック板 ５５ｇ〜５５ｊ：電極膜 ５６：位置検出手段 ５６ａ：リニアスケール ５６ｂ：検出ヘッド ６１：予圧調整部 ６３：滑り量計測部 ７１：監視部 ７２：判定部 ７３：パラメータ調整部 1: Monitoring unit 2: Sliding amount measuring unit 3: tangential force measurement unit 4: Friction work measurement unit 5,62: Non-contact measuring means 6: Judgment unit 7: Parameter adjustment unit 8: Warning section 50: Drive control unit 51: Base substrate 52: Guide member 53: Stage 54: Driving force transmission member 54a: drive surface 55: Ultrasonic motor 55a: Friction member 55b: elastic body 55c: spring 55d: Case 55e: Piezoelectric drive unit 55f: Piezoelectric ceramic plate 55g-55j: Electrode film 56: Position detecting means 56a: Linear scale 56b: Detection head 61: Preload adjusting unit 63: Sliding amount measuring unit 71: Monitoring unit 72: Judgment unit 73: Parameter adjustment unit
───────────────────────────────────────────────────── フロントページの続き (72)発明者 足立 幸志 宮城県仙台市青葉区吉成３丁目17−20 (72)発明者 石峯 裕作 鹿児島県国分市山下町１番１号 京セラ株 式会社鹿児島国分工場内 Ｆターム(参考） 5H680 AA06 BB02 BB13 BC10 CC02 CC06 DD01 DD15 DD23 DD34 DD53 DD55 DD59 DD65 DD73 DD82 FF24 FF30 FF33 ─────────────────────────────────────────────────── ─── Continued front page (72) Inventor Satoshi Adachi 3-17-20 Yoshinari, Aoba-ku, Sendai City, Miyagi Prefecture (72) Inventor Yusaku Ishimine Kyocera Co., Ltd. 1-1 Yamashita-cho, Kokubun City, Kagoshima Prefecture Inside the Kagoshima Kokubu Factory F term (reference) 5H680 AA06 BB02 BB13 BC10 CC02 CC06 DD01 DD15 DD23 DD34 DD53 DD55 DD59 DD65 DD73 DD82 FF24 FF30 FF33
Claims (7)
波モータの摩擦部材との摩擦駆動により可動する可動体
と、該可動体の位置を測定する位置検出手段と、該位置
検出手段からの位置情報と予め設定した移動プロファイ
ルに基づく基準位置情報との偏差を基に演算し、上記超
音波モータを駆動させる駆動用指令信号を出力する駆動
制御部と、上記超音波モータの摩擦部材の滑り量を算出
する滑り量計測部及び上記超音波モータとの摩擦駆動に
より可動体側の駆動面に作用する接線力を算出する接線
力計測部を具備する監視部とを有することを特徴とする
超音波モータを可動体の駆動源とする案内装置。1. An ultrasonic motor having a friction member, a movable body movable by frictional driving of the friction member of the ultrasonic motor, a position detecting means for measuring the position of the movable body, and the position detecting means. Of the friction member of the ultrasonic motor, which is calculated based on the deviation between the position information of the position information and the reference position information based on the preset movement profile, and which outputs a drive command signal for driving the ultrasonic motor. And a monitoring unit having a tangential force measuring unit for calculating a tangential force acting on the drive surface on the movable body side by friction driving with the ultrasonic motor. A guide device that uses a sound wave motor as a drive source of a movable body.
された滑り量と、上記接線力計測部で算出された接線力
との積を算出する摩擦仕事量計測部を有することを特徴
とする請求項１に記載の超音波モータを可動体の駆動源
とする案内装置。2. The monitoring unit includes a friction work amount measuring unit for calculating a product of a slip amount calculated by the slip amount measuring unit and a tangential force calculated by the tangential force measuring unit. A guide device using the ultrasonic motor according to claim 1 as a drive source for a movable body.
事量が、予め設定した摩擦仕事量のしきい値内にあるか
否かを判定する判定部を有することを特徴とする請求項
２に記載の超音波モータを可動体の駆動源とする案内装
置。3. A determination unit for determining whether or not the friction work amount obtained from the friction work amount measuring unit is within a preset threshold value of the friction work amount. A guide device using the ultrasonic motor according to 2 as a drive source of a movable body.
記摩擦仕事量計測部より得られる摩擦仕事量がそのしき
い値内となるように、駆動制御部の制御パラメータをそ
れぞれ変更するパラメータ調整部を有することを特徴と
する請求項３に記載の超音波モータを可動体の駆動源と
する案内装置。4. A parameter for changing each control parameter of the drive control unit so that the frictional work amount obtained from the frictional work amount measuring unit is within the threshold value based on the result determined by the determining unit. The guide device using the ultrasonic motor as a drive source of a movable body according to claim 3, further comprising an adjusting unit.
材の変位、速度、加速度等の位置情報は非接触型測定手
段によって測定することを特徴とする請求項１乃至請求
項４のいずれかに記載の超音波モータを可動体の駆動源
とする案内装置。5. The position information such as displacement, speed, acceleration, etc. of the friction member during the driving of the ultrasonic motor is measured by a non-contact type measuring means. A guide device using the described ultrasonic motor as a drive source for a movable body.
駆動中における摩擦部材の変位、速度、加速度等の位置
情報と、上記位置検出手段からの位置情報を基に以下の
数式１により算出することを特徴とする請求項１乃至請
求項５のいずれかに記載の超音波モータを可動体の駆動
源とする案内装置。 (数式１) Ｌｓ＝（Ａ−Ｂ）×Ｔｃ 但し、Ｌｓ：超音波モータの摩擦部材の滑り量 Ａ：非接触型測定手段から得られる超音波モータの摩擦
部材の振動速度 Ｂ：位置検出手段から得られるステージの移動速度 Ｔｃ：超音波モータの摩擦部材の接触時間6. The slip amount measuring unit uses the following formula 1 based on position information such as displacement, velocity, acceleration, etc. of a friction member during driving of the ultrasonic motor, and position information from the position detecting means. A guide device using the ultrasonic motor according to any one of claims 1 to 5 as a drive source for a movable body, which is calculated. (Formula 1) Ls = (A−B) × Tc where Ls: Amount of slip of friction member of ultrasonic motor A: Vibration velocity of friction member of ultrasonic motor obtained from non-contact type measuring means B: Position detecting means Moving speed Tc obtained from: contact time of friction member of ultrasonic motor
ラメータを用いて駆動制御部が駆動した場合、摩擦仕事
量が前記予め設定したしきい値を超えた場合に装置内に
異常が発生したことを告知する警告部を有することを特
徴とする請求項４に記載の超音波モータを可動体の駆動
源とする案内装置。7. When the drive control unit is driven by using the control parameter changed by the parameter adjusting unit, an abnormality occurs in the device when the friction work amount exceeds the preset threshold value. The guide device using the ultrasonic motor as a drive source of a movable body according to claim 4, further comprising a warning unit that notifies the user.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002250679A JP4127633B2 (en) | 2002-03-15 | 2002-08-29 | Guide device using ultrasonic motor as drive source of movable body |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002073024 | 2002-03-15 | ||
| JP2002-73024 | 2002-03-15 | ||
| JP2002250679A JP4127633B2 (en) | 2002-03-15 | 2002-08-29 | Guide device using ultrasonic motor as drive source of movable body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003339175A true JP2003339175A (en) | 2003-11-28 |
| JP4127633B2 JP4127633B2 (en) | 2008-07-30 |
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ID=29714249
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|---|---|---|---|
| JP2002250679A Expired - Fee Related JP4127633B2 (en) | 2002-03-15 | 2002-08-29 | Guide device using ultrasonic motor as drive source of movable body |
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| JP (1) | JP4127633B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006101579A (en) * | 2004-09-28 | 2006-04-13 | Kyocera Corp | Management and control method for device having movable part, and precise drive unit using it |
| WO2022172731A1 (en) * | 2021-02-12 | 2022-08-18 | 株式会社村田製作所 | Drive control device and ultrasonic motor system |
-
2002
- 2002-08-29 JP JP2002250679A patent/JP4127633B2/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006101579A (en) * | 2004-09-28 | 2006-04-13 | Kyocera Corp | Management and control method for device having movable part, and precise drive unit using it |
| JP4731146B2 (en) * | 2004-09-28 | 2011-07-20 | 京セラ株式会社 | Management control method of apparatus having movable part and precision driving apparatus using the same |
| WO2022172731A1 (en) * | 2021-02-12 | 2022-08-18 | 株式会社村田製作所 | Drive control device and ultrasonic motor system |
| JP7448041B2 (en) | 2021-02-12 | 2024-03-12 | 株式会社村田製作所 | Drive control device and ultrasonic motor system |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4127633B2 (en) | 2008-07-30 |
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