JP2000308939A - Guide device with ultrasonic motor as drive source for mobile body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To find the slippage of an extreme tip of an ultrasonic motor normally in guide device employing the ultrasonic motor as a drive source for stages. SOLUTION: The guide device via which an ultrasonic motor 15 drives a stage 13 comprises position detecting means 18 for finding the position of the stage 13 as a mobile body movable under friction drive with an extreme chip 15a of the ultrasonic motor 15, a control part 1 for carrying out operations using parameters variable depending upon the deviation of the positional information from the position detecting means 18 produced from the reference positional information a preset movement profile specifies and outputting a command signal to drive the ultrasonic motor 15, a laser Doppler vibrometer 23 for measuring the positional information of the extreme chip 15a about its displacement, velocity, acceleration and the like while the ultrasonic motor 15 is driven, and a measuring part 22 for computing the slippage of the extreme chip 15a from the positional information from the laser Doppler vibrometer 23 and the positional information from the position detecting means 18.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a guide device for driving a movable body that moves linearly or rotationally by an ultrasonic motor, and is particularly used for a machine tool for precision machining, a precision measuring device, and a semiconductor manufacturing device. It is suitable as a guide device.

[0002]

2. Description of the Related Art Ultrasonic motors have the characteristics that the minimum vibration amplitude is as small as the nano-order, high-resolution positioning is possible, and the driving force is large due to the small size and friction drive. Until now, it has been put to practical use for rotating system guide devices such as camera lens zoom mechanisms and wristwatch vibration alarms.

In recent years, it has been attempted to apply an ultrasonic motor to a linear guide device. FIG. 3 shows an example of a conventional guide device using an ultrasonic motor as a drive source of a movable body. As shown in FIG. 3, a pair of guide members 32 such as a cross roller guide is provided on a base board 31 and movable by these guide members 32. The stage 33 as a body is guided linearly.

A guide member 34 is provided on one side of the stage 33 in parallel with the guide member 32, and a linear scale 36 is provided on the other side in parallel with the guide member 32. A measuring head 37 is provided at a position opposed to the position detecting means 38 to form a position detecting means 38, and a tip 35a of an ultrasonic motor 35 is brought into contact with the guide member 34 perpendicularly to its longitudinal direction. The control unit 39 uses, for example, a PID based on a parameter that changes according to the deviation between the position information from the position detection unit 38 accompanying the movement of the stage 33 and the reference position information based on a preset movement profile of the stage 33. By performing the arithmetic processing and performing feedback control for outputting a command signal to the ultrasonic motor 35, the ultrasonic motor 3
5 oscillates elliptically in response to the command signal, and moves the stage 33 to the guide member 3 by friction drive with the tip 35a.
It was designed to move along 2. Reference numeral 40 denotes a spring for bringing the ultrasonic motor 35 into contact with the guide member 34 of the stage 33. Reference numeral 41 denotes an elastic body for holding the ultrasonic motor 35 in a case 42 set on the base board 31. It is.

[0005]

When the guide device shown in FIG. 3 is used for a precision machining machine tool, a precision measuring device, or a semiconductor manufacturing device, the positioning accuracy on the order of submicrons and the moving speed of the stage 33 are reduced. It is desired to improve. In order to increase the moving speed of the stage 33, it is possible to reduce the transmission loss of the driving force, that is, without causing the tip 35a to slip.
Increasing the amplitude of “a” and increasing the amplitude speed leads to higher efficiency.

However, in order to move the stage 33 at high speed, the output of the ultrasonic motor 35 is increased and
If the amplitude amount of “a” is increased and the amplitude speed is increased, the frictional force with the guide member 34 exceeds the static friction coefficient at some point, causing slippage and transmission loss. However, there was a problem that it was not possible to fully exert the effect. Therefore, the stage 33 cannot be moved at high speed, and the stage 33 cannot be guided to the target position with high accuracy.

In addition, when slippage occurs, the stage 33
Guide member 34 and tip 35 of ultrasonic motor 35
There was also an inconvenience that abrasion of a progressed and the life was shortened. In addition, in the above-mentioned applications, the guide device also tends to be larger with an increase in the mounting weight. In such a case,
Since the weight of the stage 33 increases and the inertia force increases, overshoot occurs during braking and positioning, causing slippage. As a result, wear of the guide member 34 of the stage 33 and the tip 35a of the ultrasonic motor 35 is reduced. There was a fear that it would progress further.

On the other hand, in view of the fact that the setting state of the ultrasonic motor 35 affects the positioning accuracy of the stage 33, the applicant of the present application has shown in FIG.
A piezoelectric actuator 45 as a preload adjusting mechanism is provided at the rear end of the ultrasonic motor 35 in order to adjust the pressing force of the ultrasonic motor 35 to the ultrasonic motor 35 (hereinafter, referred to as a preload). It has previously been proposed to optimize the guide device by setting a suitable preload (see Japanese Patent Application No. 9-294458).

[0009] However, in the system disclosed in Japanese Patent Application No. 9-294458, the pre-load on the guide member 34 is not always kept at a constant pressure while the ultrasonic motor 35 is being driven. And it was difficult to drive it stably.

As described above, in the conventional guide apparatus, there is no means for grasping the degree of sliding of the tip 35a in the ultrasonic motor 35. Therefore, it is difficult to drive the stage 33 stably within the stroke. In addition, the life was short.

[0011]

SUMMARY OF THE INVENTION In view of the above-mentioned problems, the present invention provides a guide device using an ultrasonic motor as a drive source for a movable member, and a guide device that is movable by frictional driving with the tip of the ultrasonic motor. Position detecting means for measuring the position of the movable body, position information (displacement, speed, acceleration) from the position detecting means, and reference position information (displacement, speed, acceleration) based on a preset movement profile. A control unit that calculates a parameter based on a parameter that changes in accordance with the deviation and outputs a command signal for driving the ultrasonic motor, and the displacement, speed, and displacement of the tip during driving of the ultrasonic motor.
Non-contact type measuring means for measuring position information such as acceleration, position information (displacement, speed, acceleration) from the non-contact type measuring means and position information (displacement, speed,
(Acceleration) and a measuring unit for calculating the degree of slippage of the tip.

Further, according to the present invention, another guide device using an ultrasonic motor as a driving source of a movable member is provided with a movable member movable by friction drive with a tip of the ultrasonic motor, and a position of the movable member is measured. The position information (displacement, velocity, acceleration) from the position detection means, and a reference position information (displacement, velocity, acceleration) based on a preset movement profile. A control unit that calculates based on parameters and outputs a command signal for driving the ultrasonic motor, and a non-contact unit that measures positional information such as displacement, speed, acceleration, and the like of the tip during driving of the ultrasonic motor. Mold measuring means, a preload adjusting mechanism for adjusting a preload to the movable body of the ultrasonic motor, position information (displacement, speed, acceleration) from the non-contact type measuring means and position information from the position detecting means (A displacement, a speed, an acceleration) and a measuring unit for calculating the degree of slippage of the tip, and if the tip is slipping based on information from the measuring unit, increase the preload of the ultrasonic motor to the movable body. And a preload control unit that outputs a command signal for driving the preload adjusting mechanism.

[0013]

Embodiments of the present invention will be described below.

FIG. 1 is a schematic view showing an example of a guide device using an ultrasonic motor according to the present invention as a driving source of a movable body. The guide device includes a pair of guide members 12 such as a cross roller guide on a base substrate 11. And the pair of guide members 12
Thereby, the stage 13 as a movable body is guided linearly. A guide member 14 is provided on one side surface of the stage 13 in parallel with the guide member 12.
On the other side, a linear scale 16 is provided, and a measuring head 17 is installed at a position facing the linear scale 16 to constitute a position detecting means 18.
The leading end 15a of the ultrasonic motor 15 is brought into contact with the guide member 14 perpendicularly to the longitudinal direction, and the stage 13 is moved along the guide member 12 by driving the ultrasonic motor 15. It has become. Reference numeral 20 denotes a spring for bringing the ultrasonic motor 15 into contact with the guide member 14 of the stage 13, and reference numeral 21 denotes an elastic body for holding the ultrasonic motor 15 in a case 22 installed on the base substrate 11. It is.

Then, positional information such as displacement, speed, acceleration, etc. from the position detecting means 18 accompanying the movement of the stage 13 is sent to the control unit 1 and the movement profile of the stage 13 set in advance by the control unit 1 A deviation is calculated by comparing with a reference position signal (displacement, velocity, acceleration) based on PID, and PID calculation processing is performed based on a parameter that changes according to the deviation, and an output value of the ultrasonic motor 1 is used as a command signal.
5 to perform an elliptical vibration of the ultrasonic motor 15 in accordance with the command signal,
The stage 13 is driven by friction driving with the tip 15a.
Is moved along the guide member 12.

The guide device includes an ultrasonic motor 1
A laser Doppler vibrometer 23 as non-contact type measuring means for measuring positional information such as displacement, velocity or acceleration of the tip 15a during driving of the tip 5 is installed perpendicular to the tip 15a. Position information (displacement, velocity, acceleration) from vibration meter 23
And the position information (displacement, speed,
A measurement unit 24 is provided for performing arithmetic processing based on the acceleration (acceleration) and measuring the degree of slippage of the tip 15a of the ultrasonic motor 15.

That is, since the movement of the stage 13 is a friction drive by the ultrasonic motor 15, when the movement of the stage 13 and the amplitude of the tip 15a of the ultrasonic motor 15 are equal, the tip 15a does not slip and is most excellent. Transmission efficiency can be obtained.

The movement of the stage 13 can be obtained as position information from the position detecting means 18, and the amplitude of the tip 15a can be obtained as position information from the laser Doppler vibrometer 23. By calculating the transmission efficiency W by performing the arithmetic processing shown in Equation 1 based on the above, it is possible to confirm the degree of slippage of the distal end tip 15a. That is, the transmission efficiency W is measured by the measuring unit 24 such that the smaller the transmission efficiency W, the greater the slip of the tip 15a, and conversely, the greater the transmission efficiency W, the less the slip of the tip 15a. The state of sliding of the tip 15a can always be grasped.

Therefore, based on the information from the measuring unit 24, the preload of the ultrasonic motor 15 while the stage 13 is moving is controlled, or the ultrasonic motor 15 is driven before the stage 13 is actually driven. It is possible to check the mounting state.

W = B / A × 100 (%) where W: transmission efficiency A: position information from laser Doppler vibrometer 23 B: position information from position detecting means 18 In FIG. A laser Doppler vibrometer 23 was used as the measuring means, and a linear scale was used as the position detecting means 18. However, a photonic sensor or an acceleration sensor was used as another non-contact type measuring means, and a laser length meter was used as the other position detecting means 18. You may use it.

Next, as another embodiment of the present invention, FIG.
FIG. 2 shows an application example of the guide device shown in FIG.

In this guide device, a piezoelectric actuator 25 as a preload adjusting mechanism is installed via a load cell 26 behind a spring 20 for pressing the ultrasonic motor 15 shown in FIG. Based on the information,
When the transmission efficiency W is less than 90%, a preload control unit 27 that outputs a command signal for driving the piezoelectric actuator 25 so as to increase the preload of the ultrasonic motor 15 is provided.

Various methods can be adopted as a control method in the preload control unit 27. For example, the position information of the stage 13 from the position detecting means 18 and the tip 15a from the laser Doppler vibrometer 23 are used. When the transmission efficiency W becomes less than 90% based on the information (transmission efficiency W) calculated by the measuring unit 24 based on the position information of the above, the transmission efficiency W becomes 9
Feedback control may be performed so that a command signal for expanding the piezoelectric actuator 25 is output by PID calculation processing so that the preload of the ultrasonic motor 15 increases stepwise until the pressure becomes 0% or more. Note that the standard for adjusting the preload of the ultrasonic motor 15 is set to 90% in the transmission efficiency W. When the transmission efficiency W is smaller than 90%, the tip 15a slides sharply. This is because the positioning accuracy cannot be obtained.

In controlling the preload of the ultrasonic motor 15, it is preferable to make the tip as small as possible in order to prevent early wear of the tip 15 a and the guide member 14, as long as the drive characteristics are not adversely affected (such as slippage). Therefore, when the transmission efficiency W is always 95% or more, there is a margin in the driving force, and control is performed so as to reduce the preload in a range where the transmission efficiency W does not become less than 90%. Is also good. Further, information from the load cell 26 may be fed back to the preload control unit as information for controlling the preload of the ultrasonic motor 15.

As described above, according to the guide device of FIG. 2, the slippage of the tip 15a of the ultrasonic motor 15 is constantly monitored by the measuring unit 24, and the slippage is detected when the transmission efficiency W becomes less than 90%. Then, based on the command signal from the preload control unit 27, the piezoelectric actuator 25 expands, the preload on the guide member 14 of the ultrasonic motor 15 is increased to increase the static friction force, and the transmission efficiency W is always reduced by eliminating slip. Since it can be controlled to be 90% or more, the ultrasonic motor 1
5 can exhibit its original drive characteristics, and can move the stage 13 to the target position at high speed and accurately, so that positioning can be performed with high precision.

Further, by monitoring the information from the load cell 26, the degree of sliding of the tip 15a while the stage 13 is moving, and furthermore, the tip 15
Changes with time such as a can be observed.

Although the piezoelectric actuator 25 is used as the preload adjusting mechanism in FIG. 2, other actuators such as an air cylinder and a hydraulic cylinder may be used.

As described above, the linear guide device has been described with reference to FIGS. 1 and 2 as an example. However, in the rotary guide device, an ultrasonic wave provided with a tip which oscillates elliptically as a driving means of a movable body is also used. It goes without saying that the present invention can be applied to any motor using a motor. Further, the type of the ultrasonic motor 15 is not limited to a single vibration mode, and a mode conversion type, a multi-mode type, a mode rotation type, or a composite vibration type may be used.

[0029]

EXAMPLES (Example 1) Hereinafter, specific examples of the present invention will be described.

A guide device using the ultrasonic motor shown in FIG. 1 as a driving source of a movable body was prototyped.

On the base substrate 11, a pair of guide members 1
A cross roller guide having a stroke of 200 mm was used as No. 2 to guide a plate-like aluminum stage 13 of 250 mm × 120 mm × 50 mm.

The ultrasonic motor 15 for driving the stage 13 is formed by bonding a tip element 15a made of alumina ceramic having a spherical contact surface to a piezoelectric element obtained by combining four SP1 made in Israel. At the same time, alumina ceramic was used for the guide member 14 that slides with the tip 15a of the ultrasonic motor 15. The contact surface of the tip 15a has a center line average roughness (R
In a), the thickness was finished to 0.05 μm, and the radius of curvature was 3 mm.

A linear scale S33C made by Mitutoyo is used as the position detecting means 18 of the stage 13, and the linear scale 16 is installed on one side surface of the stage 13 in parallel with the guide member 12, and faces the linear scale 16. A detection head 17 is set at a position to obtain position information of the stage 13, and the guide member 14 is set on the other side surface of the stage 13, and an ultrasonic wave is perpendicular to the longitudinal direction of the guide member 14. Motor 15
, And the tip 15a of the ultrasonic motor 15 is brought into contact with the guide member 14 by applying a preload of 3 kg by the pressing force of the spring 20.

Then, the position information from the position detecting means 18 is sent to the control unit 1, and PID calculation processing is performed based on a parameter based on a deviation from reference position information set in the control unit 1 in advance. Feedback control for driving the stage 13 by outputting a command signal to the motor 15 is performed.

Further, on the base substrate 11, a laser Doppler vibrometer 23 as a non-contact type measuring means is installed vertically to the tip 15a of the ultrasonic motor 15,
While the ultrasonic motor 15 is being driven, the amplitude speed of the tip 15a is measured, and the position information (amplitude speed) from the laser Doppler vibrometer 23 and the position information (speed) from the position detecting means 18 are measured. Part 24
And performs the arithmetic processing of Equation 1 on the basis of the positional information, thereby performing the tip 15a while the ultrasonic motor 15 is being driven.
, That is, the transmission efficiency W is calculated.

In the experiment, the moving profile of the stage 13 set in advance in the control unit 1 is set to a moving distance (target value) of 200 mm and an acceleration / deceleration of 0.01 G to 0.2 G.
^{(98mm / s 2 ~1960mm / s} 2), maximum speed 100
The trapezoidal control was set to mm / s, and the ultrasonic motor 15 was driven at a driving frequency of 50 kHz.

The results are as shown in Table 1.
The results of the transmission efficiency W shown in Table 1 are values obtained by extracting data collected in time series with the sampling time set to 1 ms into an acceleration region and a constant speed region.
The zero point is the transmission efficiency W for each value obtained by dividing the time from the start of acceleration to immediately before entering the constant speed by 10; Is the transmission efficiency W.

[0038]

[Table 1]

As a result, as can be seen from Table 1, when the acceleration was small, the transmission efficiency was 90% or more in all the regions from the acceleration region to the constant region. Efficiency is less than 90%,
It can be confirmed that slippage has occurred.

As described above, the non-contact type measuring means for measuring the position information (amplitude velocity) of the tip 15a during the driving of the ultrasonic motor 15 is provided, and the position information from the non-contact type measuring means and the position Relative to the position information (moving speed) of the stage 13 from the detecting means 18,
By providing the measuring unit 24 for calculating, the contact state between the distal end tip 15a and the guide member 14, which could not be grasped so far, can be always grasped.

In this experiment, the transmission efficiency when the set value of the acceleration was changed was grasped. However, not only the acceleration region but also the constant speed region was changed by changing the set value of the mounting weight and the maximum speed. Also, the transmission efficiency W in the deceleration region or the speed change can be grasped.

(Embodiment 2) Next, among the movement profiles of the stage 13 preset in the controller 1, the acceleration / deceleration is fixed to 0.2 G (1960 mm / s ² ), and the springs 20 having different spring rates are used. The stage 13 was moved under the same conditions as in Example 1 except that the preload of the ultrasonic motor 15 was changed using, and the transmission efficiency W in the acceleration region and the constant speed region was measured.

The results are as shown in Table 2.

[0044]

[Table 2]

As a result, as can be seen from Table 2, when the preload of the ultrasonic motor 15 is 5 kg or less, the transmission efficiency becomes less than 90% at the initial stage of acceleration, slip occurs, and the preload becomes 2 kg.
In the case of, the transmission efficiency W did not exceed 90% in the acceleration region.

Therefore, it is understood that the preload of the ultrasonic motor 15 should be 6 kg or more under the conditions of the second embodiment.

(Embodiment 3) Therefore, a piezoelectric actuator 25 as a preload adjusting mechanism is installed via a load cell 26 behind a spring 20 for applying a preload of the ultrasonic motor 15, and information from a measuring unit 24 is used based on the piezoelectric actuator 25. 2 is provided with a preload control unit 27 that outputs a command signal to drive the piezoelectric actuator 25, and the stage 13 is moved under the following driving conditions. The transmission efficiency W in the constant speed region was compared.

(Driving conditions) Set in advance in the control unit 1 Movement profile of the stage 13: Movement distance (target value) 200 mm Acceleration / deceleration 0.1 G (980 mm / s ² ) Maximum speed 100 mm / s Ultrasonic motor 15 Driving frequency: 50 kHz Preload of ultrasonic motor 15: 3 kg Each result is as shown in Table 3.

[0049]

[Table 3]

As a result, in the guide device shown in FIG. 1, the tip tip 15a slipped when the transmission efficiency W was less than 90% in the initial stage of acceleration. After 1000 hours of operation, the preload is reduced due to wear, and the guide member 14 and the tip
The contact state of a changes, and the transmission efficiency W decreases as a whole in the acceleration region, and the transmission efficiency W also deteriorates in the deceleration region.
When stopped, overshoot was observed.

On the other hand, in the guide device of FIG. 2, a transmission efficiency W of 90% or more was achieved in the entire range from the acceleration region to the deceleration region, and it was confirmed that the tip tip 15a hardly slipped. Further, even after 1000 hours, the above characteristics were satisfied, and there was no overshoot at the time of stoppage.
It can be seen that the stage 13 can be positioned quickly and accurately.

Also, comparing the amount of wear of both tip tips 15a after driving for 1000 hours, the guide device of FIG. 2 can reduce the wear to about 1/10 of the guide device of FIG. It was confirmed that it could be connected.

[0053]

As described above, according to the present invention, a guide device using an ultrasonic motor as a drive source of a movable member is provided with a movable member movable by frictional driving with the tip of the ultrasonic motor;
Position detection means for measuring the position of the movable body, position information from the position detection means, based on a parameter that changes according to the deviation of the reference position information based on a previously set movement profile, based on a calculation, A control unit that outputs a command signal for driving the ultrasonic motor; a non-contact type measuring unit that measures position information such as displacement, speed, and acceleration of the tip during driving of the ultrasonic motor; Since it is composed of a measuring unit that calculates the sliding degree of the tip from the position information from the mold measuring means and the position information from the position detecting means, the tip during driving of the ultrasonic motor could not be grasped until now. The state of sliding of the movable body can be grasped based on this information, and the setting state of the ultrasonic motor (for example, preload) can be grasped based on this information. It can be used as a guide to determine the optimum control values of the movable body.

Further, the present invention provides a pressing force adjusting mechanism for adjusting the pressing force of the ultrasonic motor against the movable body on the guide device, and an ultra-small tip tip based on positional information from a measuring unit. Since the preload control unit that outputs a command signal to drive the preload adjusting mechanism to increase the preload to the movable body of the ultrasonic motor is provided, during driving of the ultrasonic motor, a slip occurs at the tip end. As soon as the slip condition is detected by the measuring unit, the preload control mechanism is driven by the command signal from the preload control unit to increase the preload of the ultrasonic motor and prevent the tip from slipping.
Since the original drive characteristics of the ultrasonic motor can be exhibited, the movable body can be moved and positioned quickly and accurately to the target position, and the wear of the tip of the ultrasonic motor and the movable body can be suppressed. , A guide device having a long life can be provided.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing an example of a guide device using an ultrasonic motor according to the present invention as a drive source of a movable body.

FIG. 2 is a schematic view showing an application example of the present invention using the guide device shown in FIG.

FIG. 3 is a schematic view showing an example of a guide device using a conventional ultrasonic motor as a drive source of a movable body.

FIG. 4 is a schematic diagram showing a guide device using an ultrasonic motor proposed by the applicant as a driving source of a movable body.

[Explanation of symbols]

1, 39: control unit 11, 31: base board 12, 3
2: Guide member 13, 33: Stage 14, 34: Guide member 15,
35: Ultrasonic motor 15a, 35a: Tip 16, 36: Linear scale 17, 37: Detection head 18, 38: Position detecting means
20, 40: spring 21, 41: elastic body 22, 42: case 23: laser Doppler vibrometer 24: measuring section 25: piezoelectric actuator 26: load cell 27: preload control section

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Yusaku Ishimine 1-1-1, Yamashita-cho, Kokubu-shi, Kagoshima F-term in the Kokubu Plant of Kyocera Corporation (reference) 5H303 AA01 AA05 AA20 BB01 BB07 BB11 CC02 CC05 CC07 DD14 DD19 DD22 EE03 EE07 FF04 FF06 FF20 GG13 HH02 JJ02 JJ04 JJ05 KK02 KK03 KK04 MM05 5H680 AA00 AA04 AA12 BB01 BB13 BC00 BC09 BC10 DD01 DD02 DD23 DD53 DD59 DD73 EE10 EE22 EE24 FF24 FF30 GG18

Claims (2)

[Claims] 1. A movable body which is movable by friction driving with a tip of an ultrasonic motor, position detecting means for measuring a position of the movable body, and positional information from the position detecting means, are preset. A control unit that calculates based on a parameter that changes in accordance with a deviation from reference position information based on a movement profile, and outputs a command signal for driving the ultrasonic motor, and a tip tip during driving of the ultrasonic motor Non-contact type measuring means for measuring position information such as displacement, velocity, acceleration, etc., and a measuring unit for calculating the degree of slippage of the tip from the position information from the non-contact type measuring means and the position information from the position detecting means. And a guide device using an ultrasonic motor comprising: 2. A movable body movable by friction drive with a tip of an ultrasonic motor, position detecting means for measuring a position of the movable body, and positional information from the position detecting means, are preset. A control unit that calculates based on a parameter that changes in accordance with a deviation from reference position information based on a movement profile, and outputs a command signal for driving the ultrasonic motor, and a tip tip during driving of the ultrasonic motor Non-contact type measuring means for measuring position information such as displacement, speed, acceleration, etc., a preload adjusting mechanism for adjusting the pressing force of the ultrasonic motor on the movable body, and position information from the non-contact type measuring means. A measuring unit for calculating the degree of slippage of the tip from the position information from the position detecting means, and when the tip is slipping based on information from the measuring unit, the ultrasonic motor Guide device for an ultrasonic motor comprising a preload control unit for outputting a command signal for driving the preload adjusting mechanism to increase the pressing force of the moving body and the driving source of the movable body.