CN114918499B - Wire conveying system and device for micro-electric spark micro-nano coordination control wire electrode - Google Patents
Wire conveying system and device for micro-electric spark micro-nano coordination control wire electrode Download PDFInfo
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- CN114918499B CN114918499B CN202210607092.4A CN202210607092A CN114918499B CN 114918499 B CN114918499 B CN 114918499B CN 202210607092 A CN202210607092 A CN 202210607092A CN 114918499 B CN114918499 B CN 114918499B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H1/00—Electrical discharge machining, i.e. removing metal with a series of rapidly recurring electrical discharges between an electrode and a workpiece in the presence of a fluid dielectric
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H1/00—Electrical discharge machining, i.e. removing metal with a series of rapidly recurring electrical discharges between an electrode and a workpiece in the presence of a fluid dielectric
- B23H1/04—Electrodes specially adapted therefor or their manufacture
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H11/00—Auxiliary apparatus or details, not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
- B23H7/00—Processes or apparatus applicable to both electrical discharge machining and electrochemical machining
- B23H7/02—Wire-cutting
- B23H7/08—Wire electrodes
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Abstract
The invention discloses a micro-electric spark micro-nano coordination control wire electrode wire conveying system and a device, wherein the system comprises two high-precision tension sensors, a transmission type laser micrometer, a high-speed camera and a micro-nano coordination control wire conveying device which are connected with an upper computer, wherein the wire electrode moving line is provided with a wire conveying device; the wire conveying device realizes micron-level and nano-level motions by taking a piezoelectric ceramic actuator and an ultrasonic piezoelectric ceramic plate as core driving elements, thereby compensating regular fluctuation of a wire electrode by micron-level advanced active control in a time domain, compensating random fluctuation of the wire electrode by micron-level advanced active control in a space, applying intermittent nano-level ultrasonic vibration on a wire electrode guider, weakening creeping of the wire electrode caused by sliding friction and tension change between the wire electrode and the wire electrode guider by acoustic suspension effect, further realizing precise regulation and control of the discharge position of the wire electrode relative to a microscopic workpiece in fine electric spark machining, and improving machining precision.
Description
Technical Field
The invention belongs to the technical fields of precision machining, micro-nano manufacturing and special machining, and particularly relates to a micro-electric spark micro-nano coordinated control wire electrode wire conveying system and device.
Background
In the fields of biology, medical treatment, aviation, electronics, precision instruments and the like, a precision tool is an indispensable important tool whether in the field of micro-nano structure processing and manufacturing or directly applied to the field of basic scientific research on the precision operation of micro-nano scale objects. The critical feature size of the processing needs to reach the micron/submicron level, so the submicron/nanometer manufacturing precision of the microscopic tool is an important basis for ensuring the testing operability and accuracy, micro-nano processing performance and the like of the application microscopic tool.
To date, micro-nano manufacturing technology of fine tools has been attracting attention in industry, in which wire electrode micro-electric discharge machining is one of the main means of partial fine tool manufacturing, which is mainly represented by micro-wire electric discharge cutting and wire electrode grinding. Aiming at the performance index guarantee of a machining high-precision micro tool, the wire electrode fluctuation which is the first key problem that focusing directly influences the manufacturing precision of the precision micro tool is mainly caused by external excitation such as spark discharge and flushing, wire conveying system structure, wire electrode operation control parameters, physical characteristics of the wire electrode and the like. Therefore, the fluctuation of the wire electrode is unavoidable, so that micro-nano coordination control needs to be carried out on the fluctuation of the wire electrode, and the influence on the manufacturing precision of the micro-tool is reduced to the greatest extent.
Disclosure of Invention
Aiming at the influence of the fluctuation of the wire electrode on the manufacturing precision of the micro tool in the background technology, the invention provides a micro electric spark micro-nano coordination control wire electrode wire conveying system and a device. The device is realized based on a micro-nano coordination control wire electrode wire-transporting system, and micron-scale advanced active control of regular fluctuation of the wire electrode is realized in time on the basis of the dynamic physical rule of the wire electrode; the micron-sized advanced active control of the random fluctuation of the wire electrode is realized in space based on the on-line test feedback signal; and simultaneously, nanoscale ultrasonic vibration is applied to the wire electrode guide to improve the friction state of the wire electrode, so that the tension and the running state of the wire electrode tend to be stable, and the wire electrode wire conveying system with the micro-nano coordination control capability is formed by realizing the coordination of the micro-nano multi-control mode.
In order to realize the technical scheme, the invention adopts the following specific technical scheme: the wire transporting system comprises a wire electrode micro-electric spark machining micro-tool, a wire electrode micro-wire moving device, two high-precision tension sensors, a transmission type laser micrometer and a high-speed camera, wherein the wire electrode micro-electric spark machining micro-tool is adopted, the micro-wire tool is clamped by a machining main shaft, the wire electrode performs electric discharge machining on the micro-wire tool, the micro-wire moving device is arranged on a micro-nano coordination control machine tool, the wire electrode moving line is provided with the two high-precision tension sensors, the two high-precision tension sensors are respectively positioned at two sides of the micro-nano coordination control wire transporting device, the wire electrode moving line positioned in a machining main shaft area is respectively provided with the transmission type laser micrometer and the high-speed camera, the transmission type laser micrometer and the high-speed camera are respectively positioned between the two high-precision tension sensors, the transmission type laser micrometer and the high-speed camera are respectively arranged on the micro-wire moving machine tool, the output ends of the micro-wire moving device are respectively connected with the input end of an upper computer, and the output end of the upper computer is connected with the micro-nano coordination control wire transporting device; the two high-precision tension sensors are respectively used for detecting the information of the tension value of the wire feeding end and the tension value of the wire receiving end of the wire electrode on line and transmitting the information to the upper computer; the transmission type laser micrometer is used for detecting the position fluctuation information of the wire electrode in the X direction and the Z direction in the processing area on line and transmitting the information to the upper computer, and the upper computer sends a control signal to the micro-nano coordination control wire conveying device so as to respectively control the wire electrode to act along the opposite direction of the fluctuation of the X direction and the Z direction and compensate the position fluctuation of the wire electrode; the high-speed camera is used for detecting the position and speed change information of the wire electrode in the wire conveying direction of the processing area and transmitting the information to the upper computer, the upper computer forms regular prediction of the position and speed fluctuation of the wire electrode in the wire conveying direction based on a large amount of acquired data, and before the position and speed fluctuation of the wire electrode in the wire conveying direction are formed, the upper computer sends control signals in advance to enable the micro-nano coordination control wire conveying device to do nanoscale amplitude ultrasonic vibration, and the position and speed fluctuation of the wire electrode in the wire conveying direction is restrained by changing the running friction state and the tension state of the wire electrode; the upper computer performs tension test on the fluctuation time sequence of the wire electrode through the information of the tension value of the wire feeding end and the tension value of the wire receiving end, and sends an advance control signal to the micro-nano coordination control wire conveying device according to the test result and the position fluctuation and speed fluctuation information advance position of the wire electrode; the micro-nano coordination control wire conveying device carries out micro-nano coordination on wire conveying of wire electrodes positioned on two sides of a processing main shaft by executing an advanced control signal of an upper computer, and carries out active intervention and compensation on the regular micron-sized fluctuation quantity of the wire electrodes along the wire conveying direction, so that the wire electrode tension and the running state tend to be stable.
In order to realize the micro-electric spark micro-nano coordination control wire electrode wire conveying system in the technical scheme, further, the micro-nano coordination control wire conveying device for realizing the micro-electric spark micro-nano coordination control wire electrode wire conveying system comprises a base arranged on a micro tool machine tool, a first high-precision sliding table is arranged on the base in a sliding mode, the first high-precision sliding table is connected with a first core driving element through a first connecting block and drives the first high-precision sliding table to realize micron-sized movement in the X-axis direction, the first core driving element is arranged on the base through a first bolt, a connecting plate is arranged on the first high-precision sliding table, a second high-precision sliding table is arranged on the second high-precision sliding table in a sliding mode, the second high-precision sliding table is connected with a second core driving element through a second connecting block and drives the second high-precision sliding table to realize micron-sized movement in the Z-axis direction, the second core driving element is arranged on two sides of a second guide wire, the second core driving element is arranged on two sides of a second guide wire driving element, and the guide wire driving element is arranged on two sides of a first guide wire driving element and is respectively arranged on two sides of a core assembly.
As a further step of the above embodiment, the two mounting legs comprise fixing blocks fixedly connected with the wire guide frame, the fixing blocks are connected with movable blocks through two flexible connecting belts, the nanoscale compensation adjustment assemblies are adhered to the mounting blocks, the movable blocks are rotatably connected with adjusting bolts, adjusting screw holes are formed in the fixing blocks corresponding to the adjusting bolts, and the two adjusting bolts enable the two nanoscale compensation adjustment assemblies to extend forwards or retract backwards along the X-axis direction through screwing or unscrewing respectively, so that the vertical coplanarity of the two nanoscale compensation adjustment assemblies is parallel to the YZ plane.
As a further example of the above embodiment, each nanoscale compensation adjustment assembly includes a wire electrode guide, two insulating sheets, and a third core driving element is bonded between the wire electrode guide and the two insulating sheets, and the two insulating sheets are bonded together on the movable block, and the third core driving element is connected to the host computer, and is used for enabling the wire electrode guide to obtain nanoscale motion along the X-axis direction.
As a further development of the above embodiment, the first and second core drive elements are piezo-ceramic actuators.
As a further embodiment of the foregoing embodiment, the third core driving element is an ultrasonic piezoelectric ceramic sheet, and the back surfaces of the positive and negative electrode wires of the ultrasonic piezoelectric ceramic sheet are fixedly connected to the wire electrode guide, and the front surfaces of the positive and negative electrode wires are fixedly connected to the two insulating sheets.
As a further example of the above embodiment, each wire electrode guide includes a ceramic upper plate and a ceramic lower plate bonded on an ultrasonic piezoelectric ceramic plate, and a ceramic adjusting plate is bonded between the ceramic upper plate and the ceramic lower plate, so that a narrow gap is formed between the ceramic upper plate and the ceramic lower plate, and the ceramic adjusting plate is used for positioning and guiding the wire electrode, and the thickness of the ceramic adjusting plate is smaller than the diameter of the wire electrode.
Compared with the prior art, the invention has the following advantages: aiming at the problem of wire electrode discharge machining position fluctuation in micro-electric spark machining, the invention provides a micro-nano coordinated direct control method and a corresponding wire conveying device structure aiming at wire electrode fluctuation for the first time, wherein micrometer-scale advanced active control is used for compensating wire electrode regular fluctuation in a time domain, micrometer-scale advanced active control is used for compensating wire electrode random fluctuation in a space, and intermittent nanometer-scale ultrasonic vibration is applied to a wire electrode guider so as to weaken wire electrode creeping caused by sliding friction and tension change between the wire electrode and the fixed guider under the action of acoustic suspension. The wire electrode discharging position is controlled to be submicron or smaller relative to the workpiece to be processed through the system and the device, so that submicron or smaller processing errors of the fine workpiece are ensured.
Drawings
FIG. 1 is a schematic diagram of the arrangement of the components of a micro-nano coordination control wire electrode wire transporting system in an embodiment of the invention;
FIG. 2 is an isometric view of a micro-nano coordination control wire handling device in an embodiment of the invention;
FIG. 3 is an isometric northeast view of a micro-nano coordination control wire handling device in an embodiment of the invention;
FIG. 4 is a top view of a micro-nano coordination control wire transporting device in an embodiment of the invention;
FIG. 5 is a schematic diagram illustrating the installation of a nanoscale compensation adjustment assembly and a guide wire frame according to an embodiment of the present invention;
FIG. 6 is a schematic diagram of an exploded view of a nanoscale compensation adjustment assembly and a guidewire frame according to an embodiment of the present invention;
FIG. 7 is a logic block diagram of the sensor signal transmission and motion execution devices of the micro-nano coordination control wire electrode wire transporting system in an embodiment of the invention;
FIG. 8 is an electron microscope image of a fine axis with a diameter of 100 μm processed by the micro-nano coordinated control wire electrode wire transporting system and device of the present invention, wherein the image (a) is an electron microscope image of 40 times the fine axis, and the image (b) is an electron microscope image of 500 times the straight line section of the fine axis.
In fig. 1, a machining spindle 001, a high-precision tension sensor 002, a transmission-type laser micrometer 003, a high-speed camera 004, and a wire electrode 005 are shown.
In fig. 2 to 7, the base 1, the connecting plate 2, the wire guide frame 3, the first core driving element 4, the second core driving element 5, the first connecting block 6, the second connecting block 7, the first high-precision sliding table 8, the second high-precision sliding table 9, the first high-precision sliding chute seat 10, the second high-precision sliding chute seat 11, the first bolt 12, the second bolt 13, the adjusting bolt 14, the mounting foot 15 and the nanoscale compensation adjustment assembly 16;
wherein, the installation foot includes: a fixed block 1501, a flexible connection strap 1502, a movable block 1503, and an adjustment screw 1504;
the nanoscale compensation adjustment assembly includes: an insulating sheet 1601, a third core driving element 1602, a wire electrode guide 1603, a ceramic upper sheet 1603a, a ceramic tab 1603b, and a ceramic lower sheet 1603c.
Detailed Description
In order to further illustrate the technical scheme of the invention, the invention is further illustrated by the following examples.
As shown in fig. 1, a micro-electric spark micro-nano coordination control wire electrode wire conveying system comprises a micro-electric spark machining micro-tool which is clamped by a machining main shaft 001, wherein a wire electrode 005 performs electric discharge machining on the micro-tool, the micro-nano coordination control wire conveying system further comprises a micro-nano coordination control wire conveying device which is arranged on a micro-tool machine tool, two high-precision tension sensors 002 are arranged on a moving line of the wire electrode 005, the two high-precision tension sensors 002 are respectively positioned at two sides of the micro-nano coordination control wire conveying device, a transmission type laser micrometer 003 and a high-speed camera 004 are respectively arranged on a moving line of the wire electrode 005 in a machining main shaft 001 area, the transmission type laser micrometer 003 and the high-speed camera 004 are respectively positioned between the two high-precision tension sensors 002, the transmission type laser micrometer 003 and the high-speed camera 004 are respectively arranged on the micro-tool machine tool, and the output ends of the two high-precision tension sensors 002 are respectively connected with an input end of an upper computer, and the output end of the upper computer is in coordination control wire conveying device; the two high-precision tension sensors 002 are respectively used for detecting the information of the tension value of the wire feeding end and the tension value of the wire receiving end of the wire electrode 005 on line and transmitting the information to an upper computer; the transmission-type laser micrometer 003 is used for detecting the position fluctuation information of the wire electrode 005 in the X direction and the Z direction in the processing area on line and transmitting the information to the upper computer, and the upper computer sends a control signal to the micro-nano coordination control wire conveying device so as to respectively control the wire electrode 005 to act along the opposite direction of the fluctuation of the X direction and the Z direction and compensate the position fluctuation of the wire electrode 005; the high-speed camera 004 is used for detecting the position and speed change information of the wire electrode 005 in the wire conveying direction in a processing area and transmitting the information to the upper computer, the upper computer forms regular prediction of the position and speed fluctuation of the wire electrode 005 in the wire conveying direction based on a large amount of acquired data, and before the position and speed fluctuation of the wire electrode 005 in the wire conveying direction are formed, the upper computer sends control signals in advance to enable the micro-nano coordination control wire conveying device to do nanoscale amplitude ultrasonic vibration, and the position and speed fluctuation of the wire electrode 005 in the wire conveying direction is restrained by changing the running friction state and the tension state of the wire electrode 005; the upper computer performs tension test on the fluctuation time sequence of the wire electrode 005 through the information of the tension value of the wire feeding end and the tension value of the wire receiving end, and sends an advance control signal to the micro-nano coordination control wire conveying device according to the test result and the position fluctuation and speed fluctuation information advance position of the wire electrode 005; the micro-nano coordination control wire moving device carries out micro-nano coordination on the wire moving of the wire electrodes 005 positioned on two sides of the processing main shaft 001 by executing an advanced control signal of the upper computer, carries out active intervention and compensates the regular micron-sized fluctuation quantity of the wire electrodes 005 along the wire moving direction, and leads the tension and the running state of the wire electrodes 005 to be stable.
As shown in fig. 2 to 7, the micro-nano coordination control wire transporting device for realizing the micro-electric spark micro-nano coordination control wire electrode wire transporting system comprises a base 1 arranged on a micro tool machine tool, wherein a first high-precision sliding table 8 is arranged on the base 1, a first high-precision sliding table seat 10 is arranged on the first high-precision sliding table 8 in a sliding manner, the first high-precision sliding table seat 10 is connected with a first core driving element 4 through a first connecting block 6 and drives the first high-precision sliding table seat 10 to realize micron-sized movement in the X-axis direction, the first core driving element 4 is arranged on the base 1 through a first bolt 12, a connecting plate 2 is arranged on the first high-precision sliding table seat 10, a second high-precision sliding table 9 is arranged on the connecting plate 2, the second high-precision sliding table seat 11 is connected with a second core driving element 5 through a second connecting block 7, the first high-precision sliding table seat 10 is driven by the first high-precision sliding seat 10 to realize micron-sized movement in the Z-axis direction, the first core driving element 4 is arranged on two sides of a second guide wire seat 3 through a second connecting block 7, the second core driving element is arranged on two sides of a second guide wire seat 5, and is respectively arranged on two sides of a second guide wire seat 3 and is arranged on two sides of a second guide wire seat 3, and a core assembly is arranged on the second guide wire seat 3 and is respectively arranged on the second wire seat 5.
As a preferred embodiment of the foregoing technical solution, the two mounting legs 15 each include a fixed block 1501 fixedly connected to the wire guide frame 3, the fixed blocks 1501 are connected to a movable block 1503 by two flexible connection belts 1502, the nanoscale compensation adjustment assemblies 16 are adhered to the mounting blocks, the movable blocks 1503 are rotatably connected to adjusting bolts 14, the fixed blocks 1501 are provided with adjusting screw holes 1504 corresponding to the adjusting bolts 14, and the two adjusting bolts 14 respectively enable the two nanoscale compensation adjustment assemblies 16 to extend forward or retract along the X-axis direction by screwing or backing, so that the vertical coplanarity of the two nanoscale compensation adjustment assemblies 16 is parallel to the YZ plane.
As a preferred embodiment of the foregoing technical solution, each nanoscale compensation adjustment assembly 16 includes a wire electrode guide 1603 and two insulating plates 1601, a third core driving element 1602 is bonded between the wire electrode guide 1603 and the two insulating plates 1601, the two insulating plates 1601 are jointly bonded on the movable block 1503, the third core driving element 1602 is connected with an upper computer and is used for enabling the wire electrode guide 1603 to obtain nanoscale motion along the X-axis direction, the first core driving element 4 and the second core driving element 5 are both piezoelectric ceramic actuators, the third core driving element 1602 is an ultrasonic piezoelectric ceramic plate, the back surfaces of positive and negative electrode wires of the ultrasonic piezoelectric ceramic plate are fixedly connected to the wire electrode guide 1603, the front surfaces of the positive and negative electrode wires of the ultrasonic piezoelectric ceramic plate are fixedly connected to the two insulating plates 1601, each wire electrode guide 1603 includes a ceramic upper plate 1603a and a ceramic lower plate 3c bonded on the ultrasonic piezoelectric ceramic plate, a ceramic adjustment plate 1603b is bonded between the ceramic upper plate and the ceramic plate lower plate 1603c, and the ceramic adjustment plate 1603b is used for positioning the ceramic wire electrode guide 1603b with small diameter, and the ceramic adjustment slit is formed between the ceramic plates 1603.
The system and the device work principle are as follows:
(1) Micro-nano coordination control system
a) The high-frequency and small-amplitude piezoelectric effect of the single-layer ultrasonic piezoelectric ceramic plate is applied, the high-frequency and small-amplitude piezoelectric effect is applied to the wire electrode guide according to the change of the tension characteristic of the wire electrode detection line, the acoustic suspension effect and the vibration transmission are formed between the wire electrode and the wire electrode guide, the vibration frequency and the vibration amplitude with obvious effect of improving the fluctuation of the wire electrode are obtained, and the peristaltic and crawling phenomena caused by the tension change accompanied by the extremely low-speed operation of the wire electrode in the micro electric spark machining are improved;
b) The micron-scale advanced active control of periodic fluctuation of the wire electrode is realized on the time domain by taking the dynamic physical rule of the fluctuation of the wire electrode as the basis: the wire electrode fluctuation state has the time sequence of tension, speed, acceleration and position change, a fluctuation signal has a periodic component, a piezoelectric ceramic actuator applies motion to a wire electrode guide assembly and leads the wire electrode fluctuation time sequence on the basis of revealing the time sequence relation, the periodic rule and the fluctuation characteristic physical quantity, and the regular micron-scale fluctuation quantity of the wire electrode along the normal direction of wire transportation is compensated through micron-scale reciprocation active intervention of the position of the guide assembly;
c) The micron-scale advanced active control of the random fluctuation of the wire electrode is realized on the space position based on the on-line test feedback signal: because of the time sequence of the fluctuation of the wire electrode, tension testing with priority on the time sequence of the fluctuation of the wire electrode is applied to the wire feeding side and the wire receiving side relative to the wire electrode processing position and the wire conveying direction, and the piezoelectric ceramic actuator is subjected to advanced control action according to the testing result; meanwhile, by using the ultra-high speed transmission type laser micrometer, the electrode fluctuation quantity is detected on line at a position where the wire moving direction is advanced relative to the processing position, and the piezoelectric ceramic actuator is subjected to advanced control action according to the relationship between the advanced position and the processing position fluctuation, so that the advanced active control of the random micron-level normal fluctuation quantity of the wire electrode along the wire moving direction is realized.
d) And comparing the signal of the tension T1 of the wire feeding end measured by the high-precision tension sensor at the wire feeding side with the signal of the tension T2 of the wire feeding end measured by the high-precision tension sensor at the wire discharging side by an upper computer, and when the difference between the T1 and the T2 exceeds a preset threshold value, issuing a control signal by the upper computer to enable the ultrasonic piezoelectric ceramic chip controller to drive the ultrasonic piezoelectric ceramic chip to perform the action, wherein the wire electrode guide performs nanoscale amplitude ultrasonic vibration, and forms an acoustic suspension effect with the wire electrode respectively until the difference between the T1 and the T2 is reduced below the threshold value, and stopping.
e) When the transmission type laser online micrometer detects the position fluctuation of the wire electrode in the X direction and the Z direction in the processing area, the upper computer motion controller transmits a control signal to the piezoelectric ceramic actuator controller to drive the piezoelectric ceramic actuator to act along the opposite directions of the fluctuation of the wire electrode in the X direction and the Z direction respectively so as to compensate the position fluctuation of the wire electrode.
f) The high-speed photographic camera detects the position and speed change of the wire electrode in the wire conveying direction in the processing area on line, and based on a large amount of acquired data, forms regular prediction of the position and speed fluctuation of the wire electrode in the wire conveying direction, and the upper computer pre-transmits a control signal to enable the ultrasonic piezoelectric ceramic chip controller to drive the ultrasonic piezoelectric ceramic chip to act before the position and speed fluctuation of the wire electrode in the wire conveying direction is formed, and the wire electrode guide performs nanoscale amplitude ultrasonic vibration to inhibit the position and speed fluctuation of the wire electrode in the wire conveying direction by changing the running friction state and the tension state of the wire electrode.
Because of the symbiotic possibility of the position fluctuation of the wire electrode along the X direction and the Z direction and the position fluctuation and the speed fluctuation along the wire conveying direction, the embodiment of the invention designs the coordination of the process, namely the simultaneous action of the process.
(2) Micro-nano coordination control wire conveying device
The invention installs the wire guide frame of the fixed wire electrode guider on the double-shaft micron-sized motion platform; the double-shaft micron-sized motion platform is realized by fixedly connecting a piezoelectric ceramic actuator with a high-precision linear sliding table; an ultrasonic piezoelectric ceramic sheet and an insulating sheet are fixed between the wire electrode guide and the wire guide frame and are used for realizing ultrasonic vibration of the wire electrode guide.
The wire electrode guide is made of insulating materials such as ceramics and is divided into an upper piece and a lower piece, a gap adjusting gasket is arranged between the upper piece and the lower piece, and a narrow slit formed between the upper piece and the lower piece is used for guiding the wire electrode to form the combined wire electrode guide. The wire electrode guides are fixedly connected with the ultrasonic piezoelectric ceramic plates by using an adhesive, then the whole body is adhered to the movable block by an insulating plate, and the vertical coplanarity formed by the two wire electrode guides is parallel to the YZ plane by adjusting bolts.
In the micro-nano coordination control system, nano-scale ultrasonic vibration, advanced micro-scale compensation movement on a time domain and a space position are respectively realized by respectively pushing a first high-precision chute seat and a second high-precision chute seat by two ultrasonic piezoelectric ceramic plates and two piezoelectric ceramic actuators. In the embodiment of the wire electrode micro electric spark machining spindle, two high-precision tension sensors are respectively arranged on the wire inlet side and the wire outlet side of the wire electrode wire conveying device; the high-speed photographic camera and the transmission type laser position micrometer can be placed at the suspended section of the wire electrode along the wire electrode wire conveying direction, and the high-speed photographic camera and the transmission type laser position micrometer are placed at the front end of the machining position, wherein the front end, namely the wire electrode does not enter the side of the electric discharge machining position along the wire conveying direction.
The information data detected by the sensors with different functions are firstly transmitted to an upper computer controller, and then a motion control command is transmitted to controllers of different motion units by the upper computer controller, so that the actions of the two ultrasonic piezoelectric ceramic plates and the two piezoelectric ceramic actuators are controlled, and micro-nano coordination control of wire electrode position fluctuation is realized, wherein the data information flow is shown in figure 7.
As shown in fig. 8, two electron microscope pictures in detail shown in fig. (a) and (b) are respectively 40 times and 500 times of a micro-shaft with the diameter of 100 μm which is processed by the micro-nano coordination control wire conveying device under the control of the micro-nano coordination system, and the micro-shaft is mainly used as a micro-punch for micro-hole punching. Under the precise control of the micro-nano coordination control system and the micro-nano coordination control wire conveying device for carrying out the wire electrode position fluctuation in the micro-electric spark machining, the diameter deviation of the main working section of the micro-punch is controlled below 1 mu m, so that the system and the device protected by the invention can ensure that the micro-workpiece achieves the machining error of submicron level or even smaller.
The micro-nano coordination control wire conveying device in the technical scheme is only an optimal embodiment for embodying a micro-electric spark micro-nano coordination control wire electrode wire conveying system in the invention, and compared with the prior art, the micro-nano coordination control wire conveying device in the technical scheme can carry out insubstantial changes on the invention within the scope of thought, technology and device described by the invention, and belongs to the protection scope infringement of the invention.
The micro-nano coordination control wire conveying device adopted by the invention takes a commercial piezoelectric ceramic actuator and an ultrasonic piezoelectric ceramic chip as core driving elements, and is respectively used for realizing micro-scale and nano-scale movements, wherein the realization modes of the micro-scale linear movements and the nano-scale ultrasonic vibrations are not limited to the examples provided by the invention, and any mechanism capable of realizing high-precision micro-scale linear movements and nano-scale ultrasonic vibrations can equivalently replace the movement mechanism in the examples and are included in the technical range of the invention.
Claims (7)
1. The utility model provides a little coordinated control line electrode fortune silk system of fine electric spark, is including adopting the little electric spark of line electrode to process the fine tool, fine tool is held by processing main shaft (001), and line electrode (005) carry out electric discharge machining to fine tool, its characterized in that: the wire feeding device is characterized by further comprising a micro-nano coordination control wire conveying device arranged on the fine and micro tool machine tool, wherein two high-precision tension sensors (002) are arranged on a wire electrode (005) moving line, the two high-precision tension sensors (002) are respectively positioned at two sides of the fine and micro coordination control wire conveying device, a transmission type laser micrometer (003) and a high-speed camera (004) are respectively arranged on the wire electrode (005) moving line in the machining main shaft (001) area, the transmission type laser micrometer (003) and the high-speed camera (004) are respectively positioned between the two high-precision tension sensors (002), the transmission type laser micrometer (003) and the high-speed camera (004) are respectively arranged on the fine and micro tool machine, the output ends of the fine and micro tool machine tool are respectively connected with the input end of an upper computer, and the output end of the upper computer is connected with the fine and micro coordination control wire conveying device;
the two high-precision tension sensors (002) are respectively used for detecting the information of the tension value of the wire feeding end and the tension value of the wire receiving end of the wire electrode (005) on line and transmitting the information to an upper computer;
the transmission type laser micrometer (003) is used for detecting position fluctuation information of the wire electrode (005) in the X direction and the Z direction in the processing area on line and transmitting the information to the upper computer, and the upper computer sends control signals to the micro-nano coordination control wire conveying device so as to respectively control the wire electrode (005) to act along the opposite direction of the fluctuation of the X direction and the Z direction and compensate the position fluctuation of the wire electrode (005);
the high-speed camera (004) is used for detecting position and speed change information of the wire electrode (005) in the wire conveying direction in a processing area and transmitting the information to the upper computer, the upper computer forms regular prediction of position and speed fluctuation of the wire electrode (005) in the wire conveying direction based on a large amount of acquired data, and before the position and speed fluctuation of the wire electrode (005) in the wire conveying direction are formed, the upper computer sends control signals in advance to enable the micro-nano coordination control wire conveying device to do nano-scale amplitude ultrasonic vibration, and the position and speed fluctuation of the wire electrode (005) in the wire conveying direction are restrained by changing the running friction state and the tension state of the wire electrode (005);
the upper computer performs tension test on the fluctuation time sequence of the wire electrode (005) through the information of the tension value of the wire feeding end and the tension value of the wire receiving end, and sends an advance control signal to the micro-nano coordination control wire conveying device according to the test result and the position fluctuation and speed fluctuation information advance position of the wire electrode (005);
the micro-nano coordination control wire conveying device carries out micro-nano coordination on the wires conveyed by the wire electrodes (005) positioned on two sides of the processing main shaft (001) by executing an advanced control signal of the upper computer, and carries out active intervention and compensates the regular micron-sized fluctuation quantity of the wire electrodes (005) along the wire conveying direction, so that the tension and the running state of the wire electrodes (005) tend to be stable.
2. A micro-nano coordination control wire transporting device for realizing the micro-electric spark micro-nano coordination control wire transporting system of claim 1 comprises a base (1) arranged on a micro-tool machine tool, wherein a first high-precision sliding table (8) is arranged on the base (1), a first high-precision sliding groove seat (10) is arranged on the first high-precision sliding table (8) in a sliding manner, the first high-precision sliding groove seat (10) is connected with a first core driving element (4) through a first connecting block (6) and drives the first high-precision sliding groove seat (10) to realize micron-sized movement in the X-axis direction, the first core driving element (4) is arranged on the base (1) through a first bolt (12), a connecting plate (2) is arranged on the first high-precision sliding groove seat (10), a second high-precision sliding table (9) is arranged on the connecting plate (2), the second high-precision sliding groove seat (11) is arranged on the second high-precision sliding table (9) in a sliding manner, the second high-precision sliding groove seat (11) is connected with a second core driving element (5) through a second connecting block (7) and drives a second high-precision sliding groove seat (11) in the Z-axis direction through a second connecting block (5), two mounting feet (15) are symmetrically arranged on the wire guide frame (3), nanoscale compensation adjustment assemblies (16) are arranged on each mounting foot (15), wire electrodes (005) located on two sides of the processing main shaft (001) are respectively arranged on the two nanoscale compensation adjustment assemblies (16), and the first core driving element (4) and the second core driving element (5) are connected with an upper computer.
3. The micro-nano coordination control wire conveying device according to claim 2, wherein: the two installation feet (15) comprise fixed blocks (1501) fixedly connected with the guide wire frame (3), the fixed blocks (1501) are connected with movable blocks (1503) through two flexible connecting belts (1502) together, the nanoscale compensation adjustment assemblies (16) are adhered to the installation blocks, adjusting bolts (14) are rotationally connected to the movable blocks (1503), adjusting screw holes (1504) are formed in the fixed blocks (1501) corresponding to the adjusting bolts (14), and the two adjusting bolts (14) enable the two nanoscale compensation adjustment assemblies (16) to stretch forwards or shrink backwards along the X-axis direction through screwing or unscrewing respectively, so that the vertical coplanarity of the two nanoscale compensation adjustment assemblies (16) is parallel to the YZ plane.
4. A micro-nano coordination control wire conveying device according to claim 3, wherein: each nanoscale compensation adjustment assembly (16) comprises a wire electrode guide (1603) and two insulating sheets (1601), a third core driving element (1602) is bonded between the wire electrode guide (1603) and the two insulating sheets (1601), the two insulating sheets (1601) are jointly bonded on the movable block (1503), and the third core driving element (1602) is connected with an upper computer and is used for enabling the wire electrode guide (1603) to obtain nanoscale motion along the X-axis direction.
5. The micro-nano coordination control wire conveying device according to any one of claims 2 to 4, wherein: the first core driving element (4) and the second core driving element (5) are piezoelectric ceramic actuators.
6. The micro-nano coordination control wire conveying device according to claim 4, wherein: the third core driving element (1602) is an ultrasonic piezoelectric ceramic plate, the back of the positive and negative electrode wiring of the ultrasonic piezoelectric ceramic plate is fixedly connected to the wire electrode guide (1603), and the front of the positive and negative electrode wiring is fixedly connected to the two insulating plates (1601).
7. The micro-nano coordination control wire conveying device according to claim 6, wherein: each wire electrode guide (1603) comprises a ceramic upper plate (1603 a) and a ceramic lower plate (1603 c) which are bonded on an ultrasonic piezoelectric ceramic plate, and a ceramic adjusting plate (1603 b) is bonded between the ceramic upper plate (1603 a) and the ceramic lower plate (1603 c) so as to form a narrow gap between the ceramic upper plate and the ceramic lower plate and be used for positioning and guiding a wire electrode (005), and the thickness of the ceramic adjusting plate (1603 b) is smaller than the diameter of the wire electrode (005).
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS642825A (en) * | 1987-06-25 | 1989-01-06 | Inoue Japax Res Inc | Wire-cut electric discharge machining apparatus |
| CN102019474A (en) * | 2010-09-16 | 2011-04-20 | 南京航空航天大学 | Online preparing system and method for electrochemical grinding micro tool for line electrode |
| CN105710465A (en) * | 2016-04-20 | 2016-06-29 | 中国工程物理研究院机械制造工艺研究所 | On-position manufacturing and finishing device for micro tool electrode |
| CN106270845A (en) * | 2016-08-26 | 2017-01-04 | 太原理工大学 | Mirror image mariages fine electric spark grinding micro axis machining apparatus and method |
| CN111570947A (en) * | 2020-06-18 | 2020-08-25 | 杭州华方数控机床有限公司 | Method and device for controlling tension dual-frequency change of electrode wire of high-speed wire-moving electric spark wire-cutting machine tool |
| CN113210779A (en) * | 2021-06-11 | 2021-08-06 | 北京东兴润滑剂有限公司 | Wire feeding device, wire barrel driving assembly, wire conveying system and wire feeding method |
-
2022
- 2022-05-31 CN CN202210607092.4A patent/CN114918499B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS642825A (en) * | 1987-06-25 | 1989-01-06 | Inoue Japax Res Inc | Wire-cut electric discharge machining apparatus |
| CN102019474A (en) * | 2010-09-16 | 2011-04-20 | 南京航空航天大学 | Online preparing system and method for electrochemical grinding micro tool for line electrode |
| CN105710465A (en) * | 2016-04-20 | 2016-06-29 | 中国工程物理研究院机械制造工艺研究所 | On-position manufacturing and finishing device for micro tool electrode |
| CN106270845A (en) * | 2016-08-26 | 2017-01-04 | 太原理工大学 | Mirror image mariages fine electric spark grinding micro axis machining apparatus and method |
| CN111570947A (en) * | 2020-06-18 | 2020-08-25 | 杭州华方数控机床有限公司 | Method and device for controlling tension dual-frequency change of electrode wire of high-speed wire-moving electric spark wire-cutting machine tool |
| CN113210779A (en) * | 2021-06-11 | 2021-08-06 | 北京东兴润滑剂有限公司 | Wire feeding device, wire barrel driving assembly, wire conveying system and wire feeding method |
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