JP2003318360A - 半導体装置およびその製造方法 - Google Patents

半導体装置およびその製造方法

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Publication number
JP2003318360A
JP2003318360A JP2002116982A JP2002116982A JP2003318360A JP 2003318360 A JP2003318360 A JP 2003318360A JP 2002116982 A JP2002116982 A JP 2002116982A JP 2002116982 A JP2002116982 A JP 2002116982A JP 2003318360 A JP2003318360 A JP 2003318360A
Authority
JP
Japan
Prior art keywords
semiconductor chip
semiconductor device
semiconductor
tab
electrode pads
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002116982A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003318360A5 (enExample
Inventor
Daiki Ishimura
大樹 石村
Katsunori Takahashi
勝則 高橋
Mitsuru Sakamoto
満 坂本
Tadashi Asari
直史 浅利
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Renesas Semiconductor Package and Test Solutions Co Ltd
Original Assignee
Hitachi Ltd
Renesas Northern Japan Semiconductor Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Renesas Northern Japan Semiconductor Inc filed Critical Hitachi Ltd
Priority to JP2002116982A priority Critical patent/JP2003318360A/ja
Priority to US10/417,092 priority patent/US6849952B2/en
Publication of JP2003318360A publication Critical patent/JP2003318360A/ja
Publication of JP2003318360A5 publication Critical patent/JP2003318360A5/ja
Pending legal-status Critical Current

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    • HELECTRICITY
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    • H01L23/00Details of semiconductor or other solid state devices
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    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
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    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Wire Bonding (AREA)
JP2002116982A 2002-04-19 2002-04-19 半導体装置およびその製造方法 Pending JP2003318360A (ja)

Priority Applications (2)

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US8432015B2 (en) 2007-09-13 2013-04-30 Toyota Jidosha Kabushiki Kaisha Semiconductor device and wire bonding method
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US7554179B2 (en) * 2005-02-08 2009-06-30 Stats Chippac Ltd. Multi-leadframe semiconductor package and method of manufacture
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100192179B1 (ko) * 1996-03-06 1999-06-15 김영환 반도체 패키지
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JP2001015644A (ja) 1999-06-28 2001-01-19 Toshiba Corp 半導体パッケージ及びその製造方法
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JP3737333B2 (ja) 2000-03-17 2006-01-18 沖電気工業株式会社 半導体装置
KR100559664B1 (ko) * 2000-03-25 2006-03-10 앰코 테크놀로지 코리아 주식회사 반도체패키지
JP2002076248A (ja) * 2000-08-29 2002-03-15 Oki Micro Design Co Ltd マルチチップパッケージ
JP3683179B2 (ja) * 2000-12-26 2005-08-17 松下電器産業株式会社 半導体装置及びその製造方法
US6388313B1 (en) * 2001-01-30 2002-05-14 Siliconware Precision Industries Co., Ltd. Multi-chip module
TW523887B (en) * 2001-11-15 2003-03-11 Siliconware Precision Industries Co Ltd Semiconductor packaged device and its manufacturing method
US6472736B1 (en) * 2002-03-13 2002-10-29 Kingpak Technology Inc. Stacked structure for memory chips

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