JP2003307383A - Dry furnace - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve efficiency of drying fluid on a surface of a glass substrate and the likes. <P>SOLUTION: A multistage type dry furnace 1 is provided for drying fluid adhered on a surface of the glass substrate which is treated with a cleaning process and the likes before proceeding to a next procedure. The multistage type dry furnace consists of heaters 9, 10, 11 and 12 for heating a flat panel 2 with radiant heat and an air blower 5 for supplying hot air to inside the furnace. The heater consists of a panel type heater for emitting radiant heat by utilizing crystallized glass. The heater is divided into a plurality of sections in a direction of flow of the hot air to adjust the radiant heat quantity in a phased manner. Thus, the whole flat panel 2 can be evenly heated. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a manufacturing process of semiconductors, flat panel displays (FPD), etc.
The present invention relates to a drying furnace for drying silicon wafers and the like.

[0002]

2. Description of the Related Art In the manufacturing process of semiconductors, FPDs, etc., flat plate materials such as silicon wafers, glass substrates, liquid crystal substrates, etc. are subjected to chemical treatment or cleaning treatment. In this case, since the liquid remaining on the surface of the flat plate material due to cleaning or the like may affect the treatment in the next step, it is necessary to dry it immediately. Therefore, a drying oven has been used conventionally.

In this drying furnace, hot air is passed through the flat plate material housed in the furnace, and the flat plate material is heated by the heat of the hot air to remove the moisture adhering to the surface.

In some cases, a hot plate that generates heat is used. In this case, the flat plate material is heated by the heat of the hot plate using the air (oxygen, nitrogen, etc.) around the hot plate as a medium to remove the moisture adhering to the surface.

[0005]

By the way, in the drying furnace for drying the flat plate material through the hot air, the temperature of the hot air on the inflow side is inevitably high and the temperature of the exhaust air is not low. Therefore, the temperature difference on the surface of the flat plate becomes large,
Drying efficiency deteriorates.

Further, in a drying furnace for drying a flat plate material using a hot plate that generates heat, the surrounding gas serves as a medium for heat transfer, so that the gas inside the furnace must be heated.
However, at this time, convection occurs in the furnace, the temperature near the center of the flat plate material rises, and the difference from the ambient temperature becomes large,
Drying efficiency deteriorates.

Further, in the case of the drying furnace using the hot air and the hot plate, the gas heated by the hot plate is swept away by the hot air, and the set amount of heat cannot be accurately transmitted to the flat plate material. As a result, uneven temperature occurs in the flat plate material, and the drying efficiency deteriorates.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a drying oven with improved drying efficiency.

[0009]

In order to solve the above-mentioned problems, the drying furnace according to the first aspect of the present invention employs a liquid that adheres to the surface of a flat plate material that has been subjected to a cleaning treatment or the like before proceeding to the next treatment step. In a drying furnace for drying, a heating device for heating the surface of the flat plate material with radiant heat and a blowing device for supplying hot air into the furnace are characterized.

With the above structure, the air blower supplies hot air into the furnace to heat the flat plate material. Further, the surface of the flat plate material is heated by the radiant heat from the heating device. Since the radiant heat does not use the surrounding air as a heat transfer medium, it is less likely to be affected by the hot air passing through the surface of the flat plate material. Therefore, the surface of the flat plate material can be heated with the set amount of radiant heat without being affected by the hot air. Accordingly, it is possible to accurately correct the temperature unevenness on the surface of the flat plate material due to the hot air. As a result, the entire flat plate material can be heated uniformly and the drying efficiency can be improved.

A drying furnace according to a second aspect of the present invention is the drying furnace according to the first aspect of the present invention, wherein the heating device is provided with a panel-type heater for emitting radiant heat using crystallized glass. And

With the above structure, a large amount of radiant heat can be efficiently emitted by using the crystallized glass.

The drying furnace according to the third invention is the first or the second.
In the drying furnace according to the invention, the blower device convects a heater for heating gas, a high-performance filter for collecting gas dust and the like, and a gas that is heated and collects dust and the like into the furnace. And a blower.

With the above structure, the heater heats the gas,
A high-performance filter is used to collect gas dust and the like, and then a blower is used to convect the inside of the furnace. With this, hot air can be passed through the flat plate member while preventing dust and the like from adhering to the flat plate member, and the flat plate member can be uniformly heated in combination with the heating device. As a result, the drying efficiency can be improved.

The drying furnace according to the fourth aspect of the present invention is the first to third aspects.
In the drying furnace according to any one of the present inventions, the heating device is divided into a plurality of parts in the flow direction of the hot air, and the radiant heat amount is adjusted stepwise.

With the above structure, the heating device is set to have a low temperature on the hot air inlet side and a high temperature on the hot air outlet side. As a result, the entire flat plate material can be uniformly heated and dried together with the hot air.

The drying furnace according to the fifth aspect of the present invention is a drying furnace for drying a liquid adhering to the surface of a flat plate material that has been subjected to cleaning treatment or the like before proceeding to the next processing step. A hollow thin hexahedron-shaped drying unit for insertion and support, a frame body for stacking and supporting one or more of the drying units, a blower for supplying hot air into the drying unit, and the drying unit And a heating device that is mounted inside to heat the surface of the flat plate material with radiant heat.

With the above structure, the flat plate material is inserted into the drying unit supported by the frame body, and hot air is supplied by the blower. Further, the surface of the flat plate material is heated by the radiant heat emitted from the heating device, and the temperature unevenness of the surface of the flat plate material due to hot air is accurately corrected. As a result, the flat plate material can be heated uniformly and the drying efficiency can be improved.

A drying furnace according to a sixth aspect of the present invention is the drying furnace according to the fifth aspect, wherein the heating device is provided with a panel-type heater that emits radiant heat using crystallized glass. It is characterized in that it is attached to at least both upper and lower sides of the inside.

With the above structure, the heating device heats the flat plate material in the drying unit from at least the upper and lower side surfaces by radiant heat. Thereby, the flat plate material can be efficiently dried in combination with the hot air.

A drying furnace according to a seventh aspect of the present invention is the drying furnace according to the sixth aspect, wherein the heating device is divided into a plurality of portions in the flow direction of hot air in the drying unit, and the amount of radiant heat is adjusted stepwise. It is characterized by doing.

With the above construction, the heating device is set to have a low temperature on the inflow side and a high temperature on the discharge side. As a result, the entire flat plate material can be uniformly heated and dried together with the hot air.

The drying oven according to the eighth aspect of the present invention is the fifth to seventh aspects.
In the drying oven according to any one of the inventions, the drying unit is detachably attached to the frame body, and the drying unit is attached to the frame body in a number according to a required processing capacity. Characterize.

With the above structure, it is possible to provide a drying furnace suitable for each manufacturing process having different processing capabilities.

[0025]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the accompanying drawings. Here, a multi-stage drying furnace in which flat plate materials are stacked in four stages will be described.

FIG. 1 is a side view showing a multi-stage drying oven according to this embodiment, FIG. 2 is a front view showing a multi-stage drying oven according to this embodiment, and FIG. 3 is a front view showing a drying unit according to this embodiment. FIG. 4 is a side view showing the drying unit according to the present embodiment, FIG. 5 is a rear view showing the drying unit according to the present embodiment, FIG. 6 is a plan view showing the drying unit according to the present embodiment, and FIG. The top view which shows the pattern of the heating wire of the heating apparatus which concerns on this embodiment, FIG. 8 is the side view which shows the pattern of the heating wire of the heating apparatus which concerns on this embodiment, FIG. 9 shows the multistage drying furnace which concerns on this embodiment. FIG. 10 is a rear view showing the same, FIG. 10 is a plan view showing a multi-stage drying furnace according to the present embodiment, FIG. 11 is a side view showing a blower of the multi-stage drying furnace according to the present embodiment, and FIG. It is a top view which shows the air blower of a dry oven.

The multi-stage drying furnace 1 according to this embodiment is shown in FIG.
Also, as shown in FIG. 2, the apparatus is a device for drying the liquid adhering to the surface of the flat plate material 2 such as a silicon wafer or a glass substrate that has been subjected to a cleaning process before proceeding to the next processing step. This multi-stage drying oven 1 mainly comprises a drying unit 3
And a frame 4 and a blower 5.

As shown in FIGS. 3 to 6, the drying unit 3 is a device for inserting and supporting one flat plate member 2 for drying. The drying unit 3 includes a top plate 3A and a bottom plate 3
B, both side plates 3C and 3D, a front plate 3E and a rear plate 3F, which are formed in a hollow thin hexahedral shape. The upper surface, the lower surface, and the left and right side surfaces (the lower side surface of the top plate 3A, the upper side surface of the bottom plate 3B, and the inner side surfaces of the side plates 3C and 3D) inside the drying unit 3 include upper and lower side surfaces of the flat plate member 2 inserted therein. Heating devices 9, 10, 11, 12 for heating the radiant heat with radiant heat are provided. Each of the heating devices 9, 10, 11, and 12 is composed of a panel-type heater that emits radiant heat using crystallized glass. Since crystallized glass efficiently emits a large amount of radiant heat when heated, it is a material suitable as a heating element for a panel-type heater that emits radiant heat.

An example of a panel type heater which constitutes the heating devices 9, 10, 11 and 12 is shown in FIGS. 7 and 8. The panel-type heater of FIG. 7 constituting the heating devices 9 and 10 is the top plate 3
Heating wires 15 and 16 are arranged on the crystallized glass 14 set according to the sizes of A and the bottom plate 3B. It should be noted that here, although it is composed of one piece of crystallized glass 14 matched to the size of the top plate 3A and the bottom plate 3B, the top plate 3A
If the value is large, it may be divided into two.

The heating wires 15 and 16 are divided and arranged at a ratio of 3 to 7 with respect to the flow direction of the hot air. The heating wire 15 having a ratio of 3 is set to a high temperature, and the heating wire 16 having a ratio of 7 is set to a low temperature. This is because the flat plate material 2 is high on the upstream side of the hot air and low on the downstream side. That is, it is distributed so as to compensate for the temperature unevenness of the flat plate member 2 due to hot air. Since the temperature unevenness of the flat plate member 2 varies depending on the conditions such as the size of the flat plate member 2, it may be divided at a ratio other than the ratio of 3: 7. Further, the electric power value supplied to the heating wires 15 and 16 is also appropriately set according to the difference in conditions such as the amount of heat supplied by the blower device 5 and the size of the flat plate material 2.

The panel type heater of FIG. 8 which constitutes the heating devices 11 and 12 is formed in a rectangular shape and has both side plates 3C and 3D.
Two are combined according to. Each panel type heater is configured by disposing a heating wire 19 on a crystallized glass 18. The basic structure is the same as that of the panel type heater shown in FIG. 7, but the heating wire 19 is divided into five to five parts. The heating wire 19 on the upstream side of the hot air is set to a low temperature, and the heating wire 19 on the upstream side is set to a high temperature. Heating device 11, 12
Heats the flat plate material 2 from the lateral direction, but since the radiant heat does not significantly affect the difference in distance, the entire upper and lower surfaces of the flat plate material 2 are heated from the oblique direction by the radiant heat. As a result, the heating devices 9 and 10 are 3 to 7, and the heating devices 11 and 12 are
Then, it will be heated at a ratio of 5 to 5, respectively. As a result, the flat plate material 2 is divided at a ratio of 5: 2: 3 from the upstream side of the hot air to adjust the heating temperature.

The side plate 3C of the drying unit 3 is provided with an inflow port 21 as shown in FIG. This inlet 2
1 is connected to a blower opening 39 of the blower device 5 described later,
It is a connecting means for introducing hot air into the drying unit 3. The inflow port 21 and the blower port 39 are butted against each other and fixed with screws.

An outlet 22 is provided in the side plate 3D. The outflow port 22 is constituted by an opening provided in the side plate 3D, and packing (not shown) is provided at the periphery of the opening. The packing is a member for sealing a connecting portion of the opening / closing door 26, which will be described later, with the front duct 27.
The outflow port 22 is in direct contact with an inflow port (not shown) of the front duct 27 of the opening / closing door 26, and seals a connection portion between the outflow port 22 and the inflow port.

The front plate 3E of the drying unit 3 is hingedly supported by the bottom plate 3B so as to be openable and closable. This front plate 3E
The flat plate material 2 inside is taken out and put in by opening.

Both side plates 3C and 3D of the drying unit 3 are supported by slide rails 25 described later. As a result, the drying unit 3 is slidably supported on the frame body 4. A plurality of support pins (not shown) are provided inside the drying unit 3. The support pin is a member for supporting the peripheral edge of the flat plate member 2 inserted in the drying unit 3. The flat plate member 2 is supported by the support pins at substantially the center of the drying unit 3.

As shown in FIGS. 1, 2, 9, and 10, the frame body 4 is a member for supporting one or more drying units 3 in a laminated manner. The frame body 4 is configured by combining a pillar and a lateral beam. The size of the frame body 4 is set according to the number of the drying units 3 to be supported. Here, since the four drying units 3 are provided, the height is set in consideration of the total height of the four drying units 3 and the gaps that need to be provided in design. On both sides inside the frame body 4, slide rails 25 are provided in upper and lower four stages.
Is provided. The slide rails 25 are members for supporting both sides of the drying unit 3 and guiding and supporting the taking in and out of the drying unit 3 from the frame 4. The drying unit 3 is supported by the slide rail 25 so that it can be easily taken in and out. The drying unit 3 is pulled out by the slide rails 25, and maintenance or the like is performed.

An opening / closing door 26 is provided on the front side of the frame body 4. A front duct 27 is provided inside the opening / closing door 26. The front duct 27 is inside the opening / closing door 26,
Two of them are arranged in parallel in the vertical direction. An inflow port (not shown) is provided at a position of the front duct 27 facing each drying unit 3. This inlet has a drying unit 3
It is adapted to be aligned with the outlet 22 of the. The inlet is
Five front ducts 27 and ten left and right ducts are provided, which are vacated or blocked as needed. Here, from the top 4
There are 8 inlets on the left and right, and 2 inlets are closed.

By closing the opening / closing door 26, the opening / closing door 2
6 and the drying unit 3 are directly brought into contact with each other, and the front duct 2
The inlet of 7 and the outlet 22 of the drying unit 3 are aligned. The circumference of the inflow port and the outflow port is sealed with packing.

An outlet (not shown) is provided in the lower portion of the front duct 27. This outlet is brought into contact with the front opening of the lower duct 28 described later.

A lower duct 28 is provided at the bottom of the frame body 4. The lower duct 28 is provided so as to penetrate from the front surface to the back surface of the frame body 4. A packing (not shown) is provided around the front opening of the lower duct 28. When the opening / closing door 26 is closed, the front opening of the lower duct 28 and the outlet of the front duct 27 are brought into contact with each other, and the space between them is sealed with packing.

The blowing device 5 is a device for supplying hot air into the drying unit 3. The blower device 5 is configured as an independent device separated from the frame body 4. As shown in FIGS. 11 and 12, the blower device 5 includes a main body 31.
, Heater 32, high-performance filter 33, and blower 34
And an operation panel 35.

The main body 31 constitutes the outer shell of the blower 5, and the heater 32 and the like are housed therein.

The heater 32 is a member for heating the gas convection in the multi-stage drying furnace 1. The heater 32 is provided below the main body 31. An inflow chamber 36 is provided below the main body 31, and a heater 32 is disposed in the inflow chamber 36. An inflow port 37 is provided on the front surface of the inflow chamber 36. The inflow port 37 is provided in the lower duct 2 of the frame body 4.
8 is provided at a position facing the rear opening. With the blower 5 attached to the frame 4, the inlet 37 and the rear opening of the lower duct 28 are in contact with each other, and a gap (not shown) is sealed between them. The gas flowing in from the inflow port 37 is heated to the set temperature by the heater 32 in the inflow chamber 36.

The high performance filter 33 is a member for collecting dust and the like from the gas heated by the heater 32. The high-performance filter 33 is provided on the upper part of the main body 31. Two high performance filters 33 are arranged side by side vertically. Blower 3 is provided on the front side of each high-performance filter 33.
9 is provided. The blower port 39 is a member for connecting to the inflow port 21 of the drying unit 3. Blower 3
9 are provided in upper and lower four stages according to the drying unit 3. Further, they are provided in two rows on the left and right in accordance with the inlet 21 of the drying unit 3. As a result, a total of eight air blow ports 39 are provided. In addition, although 10 openings are provided to attach the air blowing ports 39, eight air blowing ports 39 are provided in accordance with the four drying units 3 here. The remaining two openings are closed.

The front opening of the blower port 39 is provided in alignment with the inflow port 21 of the drying unit 3. These blower openings 3
The front opening 9 and the inflow port 21 of the drying unit 3 are fixed to each other by screws in a state of being butted against each other.

The blower ports 39 are provided according to the number of installed drying units 3. The blower port 39 is provided so as to be removable. If the number of drying units 3 is increased, the ventilation port 39
Is newly installed. When the drying unit 3 is used up, the blower port 39 is removed to close the opening.

The blower 34 is a member for convection of gas into the multi-stage drying furnace 1. The blower 34 includes a sirocco fan 41 and a drive motor 42. The sirocco fan 41 is provided so as to open in the inflow chamber 36, and blows the gas in the inflow chamber 36 to the high-performance filter 33.

The operation panel 35 is a member for starting and stopping the operation and setting the heating temperature. The operator controls the multi-stage drying furnace 1 using the operation panel 35.

In FIG. 11, reference numeral 45 is an intake port and 46 is an exhaust port. These are provided as needed. When the amount of the liquid adhering to the surface of the flat plate material 2 is large, the humidity in the multi-stage drying furnace 1 becomes high, so that it is provided to reduce the humidity. The intake port 45 is provided to connect the inflow chamber 36 and the outside. The exhaust port 46 is provided to connect the room in which the high-performance filter 33 is stored and the outside.

[Operation] The multi-stage drying furnace 1 configured as described above is used as follows.

First, the number of drying units 3 is determined according to the required processing capacity. The determined number of drying units 3 are attached to the frame body 4. At this time, the dimensions of the frame body 4 are set according to the number of the drying units 3.

The inflow port provided in the front duct 27 of the opening / closing door 26 is opened depending on the number of the drying units 3.
The blower ports 39 are also attached according to the number of the drying units 3.

Next, the frame 4 and the blower 5 are connected to each other. As a result, the multi-stage drying furnace 1 is assembled according to the required processing capacity.

The drying process is performed as follows.

The front plate 3E is opened and inserted into the flat plate member 2. Then, the front plate 3E is closed and the start button of the operation panel 35 is pressed.

As a result, the heater 32 and the drive motor 4 are
The set electric power is supplied to 2. The set power of the heater 32 is a power value at which the gas in the multi-stage drying furnace 1 reaches a set temperature. This has been experimentally determined using the multi-stage drying oven 1. The set power of the drive motor 42 is set in consideration of the heater 32.

Further, the set electric power is supplied to the heating devices 9, 10, 11, and 12. The set power is a power value set according to the temperature difference between the upstream side and the downstream side when the flat plate material 2 is heated by the hot air produced by the heater 32.

The heater 32, the drive motor 42 and the heating devices 9, 10, 11, 12 are operated for a set time.

As a result, the gas heated by the heater 32 in the inflow chamber 36 is sent to the high-performance filter 33 side by the sirocco fan 41 of the blower 34. Then, dust and the like are collected by the high-performance filter 33 and flow into the drying unit 3 through the air blow port 39 and the inflow port 21.
Then, the flat plate material 2 is heated by flowing on both upper and lower side surfaces of the flat plate material 2 in the drying unit 3. After that, it flows out from the outlet 22 to the front duct 27.

On the other hand, the heating devices 9, 10, 11, 12 are
The flat plate material 2 is heated from the upstream side with a radiant heat amount adjusted at a ratio of 5: 2: 3 to correct temperature unevenness due to hot air. That is, the surface of the flat plate material 2 is heated in three steps by radiant heat that is hardly affected by hot air, and the temperature unevenness is corrected. As a result, the front surface of the flat plate material 2 is heated to almost the same temperature. In this state, the surface of the flat plate material 2 is removed for a certain period of time to remove water.

Next, the stop button of the operation panel 35 is pushed, the front plate 3E is opened, and the flat plate material 2 is taken out.

[Effect] As described above, since the flat plate material 2 is heated by hot air and the temperature unevenness due to hot air is corrected by radiant heat, the entire flat plate material 2 can be uniformly heated and the drying efficiency is improved. be able to.

At this time, the heating devices 9, 10, 11, 12
Since a panel type heater that emits radiant heat using crystallized glass is provided, a large amount of radiant heat can be efficiently emitted.

The heater 32, the high-performance filter 33, and the blower 34 constitute the blower unit 5. Therefore, hot air is passed through the flat plate member 2 while preventing dust and the like from adhering to the flat plate member 2, and the heating unit 9, The flat plate material 2 can be uniformly heated in combination with 10, 11, and 12.

Since the heating devices 9, 10, 11, 12 are divided into a plurality of parts in the flow direction of the hot air and set to be low on the inflow side and high on the exhaust side, the flat plate material 2 is uniformly heated in combination with the hot air. It can be dried.

Since one flat plate member 2 is inserted into the drying unit 3 and heated from above and below by hot air and radiant heat, temperature unevenness can be accurately corrected and the flat plate member 2 can be heated uniformly. The drying efficiency can be improved.

A flat plate 2 is inserted into the drying unit 3 and a heating device 9 for emitting radiant heat using crystallized glass,
Since heating is performed from 10, 11 and 12 at least from both upper and lower sides, the flat plate material 2 can be efficiently dried in combination with hot air.

Since one flat plate member 2 is inserted into the drying unit 3 and the heating devices 9, 10, 11, 12 are set low on the hot air inlet side and high on the discharge side, the flat plate member 2 is combined with the hot air. The whole can be uniformly heated and dried.

Since the drying unit 3 is detachably attached to the frame body 4 and the drying units 3 are attached to the frame body 4 in a number corresponding to the required processing capacity, each drying process having different processing capacity is performed. It is possible to provide a drying furnace suitable for each manufacturing process.

The heating devices 9, 10, 11 and 12 for emitting radiant heat using crystallized glass can be significantly reduced in weight as compared with the conventional hot plate. As a result,
The weight of the multi-stage drying oven 1 can be reduced.

[Modification] In the above embodiment, the drying unit 3 has four stages, but it goes without saying that it may have one to three stages or five or more stages. Also in this case, the same operation and effect as the above-described embodiment can be obtained.

[0072]

As described in detail above, according to the drying furnace of the present invention, the entire flat plate material can be uniformly heated, and the drying efficiency can be greatly improved.

Since the heating device for emitting radiant heat using the crystallized glass is used, the weight of the device can be greatly reduced.

[Brief description of drawings]

FIG. 1 is a side view showing a multi-stage drying oven according to an embodiment of the present invention.

FIG. 2 is a front view showing a multi-stage drying furnace according to an embodiment of the present invention.

FIG. 3 is a front view showing the drying unit according to the embodiment of the present invention.

FIG. 4 is a side view showing the drying unit according to the embodiment of the present invention.

FIG. 5 is a rear view showing the drying unit according to the embodiment of the present invention.

FIG. 6 is a plan view showing a drying unit according to the embodiment of the present invention.

FIG. 7 is a plan view showing a pattern of a heating wire of the heating device according to the embodiment of the present invention.

FIG. 8 is a side view showing a heating wire pattern of the heating device according to the embodiment of the present invention.

FIG. 9 is a rear view showing the multi-stage drying oven according to the embodiment of the present invention.

FIG. 10 is a plan view showing a multi-stage drying furnace according to an embodiment of the present invention.

FIG. 11 is a side view showing an air blower for a multi-stage drying furnace according to an embodiment of the present invention.

FIG. 12 is a plan view showing an air blower for a multi-stage drying furnace according to an embodiment of the present invention.

[Explanation of symbols]

1: multi-stage drying oven, 2: flat plate material, 3: drying unit,
4: Frame, 5: Air blower, 9, 10, 11, 12: Heating device, 14: Crystallized glass, 15, 16: Heating wire, 2
1: inlet, 22: outlet, 23: hinge, 25: slide rail, 26: open / close door, 27: front duct, 28: lower duct, 32: heater, 33: high performance filter, 3
4: blower, 35: operation panel, 36: inflow chamber, 37:
Inlet, 39: Blower, 41: Sirocco fan, 42:
Drive motor, 45: intake port, 46: exhaust port.

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁷ Identification code FI theme code (reference) H01L 21/304 651 H01L 21/304 651M H05B 3/20 326Z H05B 3/84 H01L 21/30 567 F-term ( Reference) 3K034 AA02 AA04 AA12 AA16 AA22 BB05 BC21 BC29 HA01 HA10 JA10 3L113 AA03 AB02 AC08 BA34 CB24 CB35 5F046 KA04 KA05

Claims (8)

[Claims] 1. A drying furnace for drying a liquid adhering to a surface of a flat material that has been subjected to cleaning treatment, etc. before proceeding to the next processing step, and a heating device for heating the surface of the flat material with radiant heat, and a furnace. A drying furnace provided with a blower for supplying hot air therein. 2. The drying furnace according to claim 1, wherein the heating device includes a panel-type heater that emits radiant heat using crystallized glass. 3. The drying furnace according to claim 1 or 2, wherein the air blower includes a heater for heating a gas, a high-performance filter for collecting dust and the like of the gas, and dust and the like when heated. And a blower for convection the generated gas into the furnace. 4. The drying furnace according to any one of claims 1 to 3, wherein the heating device is divided into a plurality of parts in the flow direction of hot air, and the radiant heat amount is adjusted stepwise. Furnace. 5. A hollow thin hexahedron in which one flat plate material is inserted and supported in a drying furnace for drying a liquid adhering to the surface of the flat plate material that has been subjected to a cleaning treatment, etc. before proceeding to the next treatment step. -Shaped drying unit, a frame body that supports one or more of the drying units in a laminated manner, an air blower that supplies hot air into the drying unit, and the flat plate member that is installed in the drying unit. And a heating device for heating the surface of the radiant heat with radiant heat. 6. The drying furnace according to claim 5, wherein the heating device includes a panel-type heater that emits radiant heat by using crystallized glass, and is attached to at least upper and lower side surfaces of the drying unit. A drying oven characterized by having been done. 7. The drying furnace according to claim 6, wherein the heating device is divided into a plurality of parts in the flow direction of the hot air in the drying unit, and the radiant heat amount is adjusted stepwise. . 8. The drying furnace according to claim 5, wherein the drying unit is detachably attached to the frame body, and the number of the drying units corresponds to a required processing capacity. A drying furnace in which a drying unit is mounted on the frame.