JP2003297897A5 - - Google Patents

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Publication number
JP2003297897A5
JP2003297897A5 JP2002094039A JP2002094039A JP2003297897A5 JP 2003297897 A5 JP2003297897 A5 JP 2003297897A5 JP 2002094039 A JP2002094039 A JP 2002094039A JP 2002094039 A JP2002094039 A JP 2002094039A JP 2003297897 A5 JP2003297897 A5 JP 2003297897A5
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JP
Japan
Prior art keywords
semiconductor substrate
shelf
carrier
transfer
boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2002094039A
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English (en)
Japanese (ja)
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JP4346277B2 (ja
JP2003297897A (ja
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Publication date
Application filed filed Critical
Priority to JP2002094039A priority Critical patent/JP4346277B2/ja
Priority claimed from JP2002094039A external-priority patent/JP4346277B2/ja
Publication of JP2003297897A publication Critical patent/JP2003297897A/ja
Publication of JP2003297897A5 publication Critical patent/JP2003297897A5/ja
Application granted granted Critical
Publication of JP4346277B2 publication Critical patent/JP4346277B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2002094039A 2002-03-29 2002-03-29 半導体製造装置 Expired - Lifetime JP4346277B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002094039A JP4346277B2 (ja) 2002-03-29 2002-03-29 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002094039A JP4346277B2 (ja) 2002-03-29 2002-03-29 半導体製造装置

Publications (3)

Publication Number Publication Date
JP2003297897A JP2003297897A (ja) 2003-10-17
JP2003297897A5 true JP2003297897A5 (enExample) 2005-09-08
JP4346277B2 JP4346277B2 (ja) 2009-10-21

Family

ID=29386890

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002094039A Expired - Lifetime JP4346277B2 (ja) 2002-03-29 2002-03-29 半導体製造装置

Country Status (1)

Country Link
JP (1) JP4346277B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4719435B2 (ja) * 2004-07-26 2011-07-06 株式会社日立国際電気 半導体製造装置、半導体基板の移載方法及び半導体製造方法
JP6134173B2 (ja) * 2013-03-21 2017-05-24 東京エレクトロン株式会社 磁気アニール装置

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