JP2003297897A5 - - Google Patents
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- Publication number
- JP2003297897A5 JP2003297897A5 JP2002094039A JP2002094039A JP2003297897A5 JP 2003297897 A5 JP2003297897 A5 JP 2003297897A5 JP 2002094039 A JP2002094039 A JP 2002094039A JP 2002094039 A JP2002094039 A JP 2002094039A JP 2003297897 A5 JP2003297897 A5 JP 2003297897A5
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- shelf
- carrier
- transfer
- boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Claims (1)
- 半導体基板が収納されたキャリアを載置するバッファ棚と、前記キャリア内の半導体基板をボートに移すための 移載棚と、当該移載棚と前記バッファ棚との間で前記キャリアの移動を行うキャリアローダと、前記半導体基板に所定の処理を行う処理装置と、当該処理装置内に前記半導体基板を収納するボートと、当該ボートと前記移載棚の間で前記半導体基板の移動を行う移載機と、前記バッファ棚から移載された前記キャリアの半導体基板検知を前記移載棚において行う検知器を具備することを特徴とする半導体製造装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002094039A JP4346277B2 (ja) | 2002-03-29 | 2002-03-29 | 半導体製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002094039A JP4346277B2 (ja) | 2002-03-29 | 2002-03-29 | 半導体製造装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003297897A JP2003297897A (ja) | 2003-10-17 |
| JP2003297897A5 true JP2003297897A5 (ja) | 2005-09-08 |
| JP4346277B2 JP4346277B2 (ja) | 2009-10-21 |
Family
ID=29386890
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002094039A Expired - Lifetime JP4346277B2 (ja) | 2002-03-29 | 2002-03-29 | 半導体製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4346277B2 (ja) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4719435B2 (ja) * | 2004-07-26 | 2011-07-06 | 株式会社日立国際電気 | 半導体製造装置、半導体基板の移載方法及び半導体製造方法 |
| JP6134173B2 (ja) * | 2013-03-21 | 2017-05-24 | 東京エレクトロン株式会社 | 磁気アニール装置 |
-
2002
- 2002-03-29 JP JP2002094039A patent/JP4346277B2/ja not_active Expired - Lifetime
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