JP2003283010A - ガスレーザ装置 - Google Patents
ガスレーザ装置Info
- Publication number
- JP2003283010A JP2003283010A JP2002086603A JP2002086603A JP2003283010A JP 2003283010 A JP2003283010 A JP 2003283010A JP 2002086603 A JP2002086603 A JP 2002086603A JP 2002086603 A JP2002086603 A JP 2002086603A JP 2003283010 A JP2003283010 A JP 2003283010A
- Authority
- JP
- Japan
- Prior art keywords
- laser
- gas
- motor
- partition wall
- circulation fan
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims abstract description 74
- 238000004804 winding Methods 0.000 claims abstract description 17
- 238000005260 corrosion Methods 0.000 claims abstract description 15
- 230000007797 corrosion Effects 0.000 claims abstract description 14
- 239000000463 material Substances 0.000 claims abstract description 7
- 238000006073 displacement reaction Methods 0.000 claims description 20
- 239000007769 metal material Substances 0.000 claims description 13
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 10
- 239000000919 ceramic Substances 0.000 claims description 10
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract description 7
- 230000007423 decrease Effects 0.000 abstract description 4
- 238000011109 contamination Methods 0.000 abstract description 2
- 230000010355 oscillation Effects 0.000 abstract description 2
- 230000005389 magnetism Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 8
- 230000001965 increasing effect Effects 0.000 description 7
- 229910000831 Steel Inorganic materials 0.000 description 5
- 230000008859 change Effects 0.000 description 5
- 230000006698 induction Effects 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- 239000010959 steel Substances 0.000 description 5
- 230000004323 axial length Effects 0.000 description 4
- 229910052736 halogen Inorganic materials 0.000 description 4
- 150000002367 halogens Chemical class 0.000 description 4
- 230000001360 synchronised effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 229910000963 austenitic stainless steel Inorganic materials 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000001939 inductive effect Effects 0.000 description 2
- 230000013011 mating Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000012811 non-conductive material Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000003292 diminished effect Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
- F16C32/047—Details of housings; Mounting of active magnetic bearings
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Lasers (AREA)
- Motor Or Generator Frames (AREA)
- Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002086603A JP2003283010A (ja) | 2002-03-26 | 2002-03-26 | ガスレーザ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002086603A JP2003283010A (ja) | 2002-03-26 | 2002-03-26 | ガスレーザ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003283010A true JP2003283010A (ja) | 2003-10-03 |
| JP2003283010A5 JP2003283010A5 (OSRAM) | 2004-12-24 |
Family
ID=29233149
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002086603A Pending JP2003283010A (ja) | 2002-03-26 | 2002-03-26 | ガスレーザ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003283010A (OSRAM) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010527507A (ja) * | 2007-04-27 | 2010-08-12 | エドワーズ株式会社 | プレート回転装置、排気路開閉度変更装置、被排気装置、搬送装置、ビーム装置、及び、ゲートバルブ |
| JP2010272670A (ja) * | 2009-05-21 | 2010-12-02 | Panasonic Corp | ガスレーザ発振装置の制御方法およびガスレーザ発振装置およびレーザ加工機 |
| JP2013027097A (ja) * | 2011-07-19 | 2013-02-04 | Ulvac Japan Ltd | モータ |
| CN110848256A (zh) * | 2019-12-16 | 2020-02-28 | 常州工学院 | 一种磁悬浮轴承系统中转子所受干扰力实时补偿的方法 |
-
2002
- 2002-03-26 JP JP2002086603A patent/JP2003283010A/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010527507A (ja) * | 2007-04-27 | 2010-08-12 | エドワーズ株式会社 | プレート回転装置、排気路開閉度変更装置、被排気装置、搬送装置、ビーム装置、及び、ゲートバルブ |
| US8763985B2 (en) | 2007-04-27 | 2014-07-01 | Edwards Japan Limited | Plate rotating device, exhaust path opening degree changing device, exhausted device, transfer device, beam device, and gate valve |
| JP2010272670A (ja) * | 2009-05-21 | 2010-12-02 | Panasonic Corp | ガスレーザ発振装置の制御方法およびガスレーザ発振装置およびレーザ加工機 |
| JP2013027097A (ja) * | 2011-07-19 | 2013-02-04 | Ulvac Japan Ltd | モータ |
| CN110848256A (zh) * | 2019-12-16 | 2020-02-28 | 常州工学院 | 一种磁悬浮轴承系统中转子所受干扰力实时补偿的方法 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TW445682B (en) | Gas discharge laser with magnetic bearings and magnetic reluctance centering for fan drive assembly | |
| EP1075074A2 (en) | Gas transfer machine | |
| JPH09238438A (ja) | 密閉型アクチュエ−タ | |
| JP2002354767A (ja) | 磁気浮上電動機 | |
| JP2007232215A (ja) | ジャケット付き駆動磁気ベアリング | |
| JP2001093967A (ja) | 基板回転装置 | |
| US6519273B2 (en) | Magnetic bearing and circulation fan apparatus | |
| JPH0521197U (ja) | キヤンドモータポンプ | |
| JP2001304258A (ja) | 磁気軸受及び磁気浮上装置 | |
| JP2002242876A (ja) | 磁気軸受式ポンプ | |
| KR100654409B1 (ko) | 엑시머 레이저장치 | |
| JP2018178908A (ja) | 真空ポンプ、真空ポンプに備わる磁気軸受部およびシャフト | |
| WO2009104376A1 (ja) | スラスト力発生装置及び該スラスト力発生装置を適用した電磁機械 | |
| JP2003283010A (ja) | ガスレーザ装置 | |
| JP2000307175A5 (OSRAM) | ||
| US6809448B2 (en) | Excimer laser apparatus | |
| JPH07264793A (ja) | 回転電気機械 | |
| JP4049531B2 (ja) | 磁気軸受モータおよびエキシマレーザ装置 | |
| JP4196433B2 (ja) | 密閉型アクチュエータ | |
| JP6927343B1 (ja) | 圧縮機 | |
| JP2000170766A (ja) | 磁気軸受を利用した発電装置 | |
| KR100708925B1 (ko) | 방전펌핑된 엑시머 레이저 장치 | |
| US6532246B1 (en) | Excimer laser apparatus | |
| US6404794B1 (en) | Excimer laser apparatus | |
| JP4230640B2 (ja) | 血液ポンプ装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20040129 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20040129 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20060215 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20060221 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20060419 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20060523 |