JP2003273703A - 水晶振動子と水晶振動子の製造方法 - Google Patents
水晶振動子と水晶振動子の製造方法Info
- Publication number
- JP2003273703A JP2003273703A JP2003040389A JP2003040389A JP2003273703A JP 2003273703 A JP2003273703 A JP 2003273703A JP 2003040389 A JP2003040389 A JP 2003040389A JP 2003040389 A JP2003040389 A JP 2003040389A JP 2003273703 A JP2003273703 A JP 2003273703A
- Authority
- JP
- Japan
- Prior art keywords
- tuning fork
- groove
- fork arm
- arm
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 title claims abstract description 25
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 25
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 239000013078 crystal Substances 0.000 claims description 163
- 238000005452 bending Methods 0.000 claims description 27
- 238000000034 method Methods 0.000 claims description 25
- 230000007935 neutral effect Effects 0.000 description 13
- 230000005684 electric field Effects 0.000 description 12
- 230000010355 oscillation Effects 0.000 description 12
- 239000003990 capacitor Substances 0.000 description 11
- 235000012431 wafers Nutrition 0.000 description 11
- 238000006243 chemical reaction Methods 0.000 description 8
- 238000003486 chemical etching Methods 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 238000000206 photolithography Methods 0.000 description 6
- 230000002950 deficient Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 4
- 238000005304 joining Methods 0.000 description 3
- 230000035939 shock Effects 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000010329 laser etching Methods 0.000 description 2
- 238000010297 mechanical methods and process Methods 0.000 description 2
- 238000000053 physical method Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003040389A JP2003273703A (ja) | 2002-01-11 | 2003-01-14 | 水晶振動子と水晶振動子の製造方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002-40795 | 2002-01-11 | ||
| JP2002040795 | 2002-01-11 | ||
| JP2003040389A JP2003273703A (ja) | 2002-01-11 | 2003-01-14 | 水晶振動子と水晶振動子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003273703A true JP2003273703A (ja) | 2003-09-26 |
| JP2003273703A5 JP2003273703A5 (enrdf_load_stackoverflow) | 2005-06-09 |
Family
ID=29217958
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003040389A Pending JP2003273703A (ja) | 2002-01-11 | 2003-01-14 | 水晶振動子と水晶振動子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003273703A (enrdf_load_stackoverflow) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007329879A (ja) * | 2006-06-09 | 2007-12-20 | Kyocera Kinseki Hertz Corp | 音叉型屈曲水晶振動片とその製造方法 |
| JP2011097562A (ja) * | 2009-10-01 | 2011-05-12 | Seiko Epson Corp | 振動片、振動子、発振器、及び電子機器 |
| JP2011216924A (ja) * | 2010-03-15 | 2011-10-27 | Nippon Dempa Kogyo Co Ltd | 圧電振動片および圧電デバイス |
| JP2013066211A (ja) * | 2012-11-15 | 2013-04-11 | Seiko Epson Corp | 振動片、振動子、発振器、センサー及びデバイス |
| JP2014003711A (ja) * | 2008-12-27 | 2014-01-09 | Seiko Epson Corp | 振動片、振動子、センサー及び電子部品 |
| US9088264B2 (en) | 2013-03-29 | 2015-07-21 | Seiko Epson Corporation | Resonator element, resonator, oscillator, electronic device, and moving object |
-
2003
- 2003-01-14 JP JP2003040389A patent/JP2003273703A/ja active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007329879A (ja) * | 2006-06-09 | 2007-12-20 | Kyocera Kinseki Hertz Corp | 音叉型屈曲水晶振動片とその製造方法 |
| JP2014003711A (ja) * | 2008-12-27 | 2014-01-09 | Seiko Epson Corp | 振動片、振動子、センサー及び電子部品 |
| JP2011097562A (ja) * | 2009-10-01 | 2011-05-12 | Seiko Epson Corp | 振動片、振動子、発振器、及び電子機器 |
| JP2011216924A (ja) * | 2010-03-15 | 2011-10-27 | Nippon Dempa Kogyo Co Ltd | 圧電振動片および圧電デバイス |
| US8736152B2 (en) | 2010-03-15 | 2014-05-27 | Nihon Dempa Kogyo Co., Ltd. | Piezoelectric vibrating pieces and associated devices exhibiting enhanced electrical field |
| JP2013066211A (ja) * | 2012-11-15 | 2013-04-11 | Seiko Epson Corp | 振動片、振動子、発振器、センサー及びデバイス |
| US9088264B2 (en) | 2013-03-29 | 2015-07-21 | Seiko Epson Corporation | Resonator element, resonator, oscillator, electronic device, and moving object |
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Legal Events
| Date | Code | Title | Description |
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| A871 | Explanation of circumstances concerning accelerated examination |
Effective date: 20040216 Free format text: JAPANESE INTERMEDIATE CODE: A871 |
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