JP2003273647A - 水晶発振器とその製造方法 - Google Patents
水晶発振器とその製造方法Info
- Publication number
- JP2003273647A JP2003273647A JP2002383282A JP2002383282A JP2003273647A JP 2003273647 A JP2003273647 A JP 2003273647A JP 2002383282 A JP2002383282 A JP 2002383282A JP 2002383282 A JP2002383282 A JP 2002383282A JP 2003273647 A JP2003273647 A JP 2003273647A
- Authority
- JP
- Japan
- Prior art keywords
- tuning fork
- crystal oscillator
- groove
- fork arm
- mode vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 216
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 11
- 238000005452 bending Methods 0.000 claims abstract description 31
- 238000000034 method Methods 0.000 claims description 21
- 239000010453 quartz Substances 0.000 claims description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 16
- 239000003990 capacitor Substances 0.000 claims description 15
- 239000000853 adhesive Substances 0.000 claims description 7
- 230000001070 adhesive effect Effects 0.000 claims description 7
- 229910000679 solder Inorganic materials 0.000 claims description 7
- 230000003321 amplification Effects 0.000 abstract description 10
- 238000003199 nucleic acid amplification method Methods 0.000 abstract description 10
- 230000005684 electric field Effects 0.000 description 13
- 230000010355 oscillation Effects 0.000 description 12
- 238000006243 chemical reaction Methods 0.000 description 9
- 230000007935 neutral effect Effects 0.000 description 9
- 238000003486 chemical etching Methods 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 238000000206 photolithography Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 238000005304 joining Methods 0.000 description 4
- 230000035939 shock Effects 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000001939 inductive effect Effects 0.000 description 2
- 238000010329 laser etching Methods 0.000 description 2
- 238000010297 mechanical methods and process Methods 0.000 description 2
- 238000000053 physical method Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
Landscapes
- Oscillators With Electromechanical Resonators (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002383282A JP2003273647A (ja) | 2002-01-11 | 2002-12-13 | 水晶発振器とその製造方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002-40795 | 2002-01-11 | ||
| JP2002040795 | 2002-01-11 | ||
| JP2002383282A JP2003273647A (ja) | 2002-01-11 | 2002-12-13 | 水晶発振器とその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003273647A true JP2003273647A (ja) | 2003-09-26 |
| JP2003273647A5 JP2003273647A5 (enExample) | 2004-12-24 |
Family
ID=29217950
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002383282A Pending JP2003273647A (ja) | 2002-01-11 | 2002-12-13 | 水晶発振器とその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003273647A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014200048A (ja) * | 2013-03-29 | 2014-10-23 | セイコーエプソン株式会社 | 振動子、発振器、電子機器および移動体 |
| CN113285686A (zh) * | 2020-02-19 | 2021-08-20 | 瑞昱半导体股份有限公司 | 低噪声低辐射的晶体振荡器及其方法 |
-
2002
- 2002-12-13 JP JP2002383282A patent/JP2003273647A/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014200048A (ja) * | 2013-03-29 | 2014-10-23 | セイコーエプソン株式会社 | 振動子、発振器、電子機器および移動体 |
| CN113285686A (zh) * | 2020-02-19 | 2021-08-20 | 瑞昱半导体股份有限公司 | 低噪声低辐射的晶体振荡器及其方法 |
| CN113285686B (zh) * | 2020-02-19 | 2024-02-13 | 瑞昱半导体股份有限公司 | 低噪声低辐射的晶体振荡器及其方法 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20040119 |
|
| A977 | Report on retrieval |
Effective date: 20051129 Free format text: JAPANESE INTERMEDIATE CODE: A971007 |
|
| A131 | Notification of reasons for refusal |
Effective date: 20060808 Free format text: JAPANESE INTERMEDIATE CODE: A131 |
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| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20061002 |
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| A02 | Decision of refusal |
Effective date: 20070403 Free format text: JAPANESE INTERMEDIATE CODE: A02 |