JP2003272535A - Electron beam tube - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electron beam tube equipped with a long lifetime by preventing breakage of the peripheral part (rim) of a thin film part of a window member. <P>SOLUTION: The electron beam tube is equipped with a tubing 5 furnished internally with an electron beam generator 4, a lid 6 installed in such a way as covering the opening of the tubing 5 and having an aperture 7 to admit passage of an electron beam, and a window member 8 sealing the aperture 7 and having an electron beam emitting window part 81 consisting of a thin film formed by an etching process, wherein a shielding means 61 is installed between the beam generator 4 and the window member 8 so that the electron beam emitted from the beam generator 4 is not incident to the edge 83 of the window part 81. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to an electron beam tube for emitting an electron beam. In particular, the present invention relates to an electron beam tube in which damage to the edge of the thin film portion of the window member is prevented and the service life is extended.

[0002]

2. Description of the Related Art In recent years, electron beams have been used to cure printing paints and semiconductor materials, improve their materials, and sterilize them. As an electron beam tube for generating such an electron beam, the one shown in FIG. 21 is known.

FIG. 22 is a sectional view of the electron beam tube as seen from the front direction, and FIGS. 22 and 23 are enlarged views of the different window members of the electron beam tube as seen from XX in FIG. It is the expanded sectional view shown.

This electron beam tube is composed of a vacuum container, a metal sleeve provided inside the vacuum container for preventing turbulent emission of an electron beam, and an electron beam generator provided inside the sleeve. ing.

The vacuum container has a tube member whose lower side is sealed, a lid member having an electron beam passage hole through which an electron beam from an electron beam generator passes, and an electron beam passage hole of the lid member on the front surface. And a window member provided so as to be hermetically sealed. The electron beam passage hole has a rectangular shape elongated in the left-right direction in the central region of the lid member.

The window member is made of a silicon wafer or the like,
It is formed by etching a predetermined area of a substantially rectangular silicon wafer, and is formed side by side in the left-right direction as a plurality of thinned electron beam emission window portions. A supporting portion is formed between adjacent electron beam emission window portions so that the supporting portion remains, and the window member is airtightly welded to the lid member.

[0007]

By the way, it has been found that the above electron beam tube has the following problems. FIG. 24 is an enlarged cross-sectional view showing the configuration of the window member of the electron beam tube, which is shown for explaining this problem.

In order to increase the electron beam transmittance, it is preferable to reduce the thickness of the electron beam emission window portion of the window member. However, when the thickness is set to 3 μm or less, As shown in the figure, the window member is curved, and further, due to the loss of a part of energy when the electron beam passes through the thin film of the electron beam emission window portion, and also due to the electric current flowing through the window member. There is a problem that heat is generated in the steel sheet, thermal stress is generated, and further, the mechanical strength is lowered due to the temperature rise.

Particularly, when the electron beam collides with the stress concentration portion formed on the peripheral portion of the electron beam emission window, the interatomic bond is broken at this portion, and the thin film is deformed at this stress concentration portion. Moreover, since the inside of the electron beam tube is in a vacuum state, a large stress is applied to this stress concentration part due to the atmospheric pressure difference between the inside and the outside of the electron beam tube, and as a result, the window part starts from this stress concentration part. Were easily broken, and the service life of the electron beam tube could not be extended.

In view of the above-mentioned conventional problems, an object of the present invention is to provide an electron beam tube having a long service life by preventing damage to the peripheral edge (edge) of the thin film portion of the window member. is there.

[0011]

The present invention employs the following means in order to solve the above problems. The first means is a tube member having an electron beam generator provided therein,
A lid member provided so as to cover the opening of the tube member and having an electron beam passage hole for passing an electron beam, and an electron beam emission window made of a thin film formed by etching while sealing the electron beam passage hole. An electron beam tube comprising a window member having a portion, the electron beam generator and the window so that the electron beam emitted from the electron beam generator does not enter the edge portion of the electron beam emission window portion. It is characterized in that a shielding means is provided between the member and the member.

A second means is the same as the first means, wherein the shielding means is formed on the lid member.

A third means is characterized in that, in the first means, the shielding means is formed on a member interposed between the lid member and the window member.

A fourth means is the means according to any one of the first means to the third means, wherein the electron beam has a predetermined electron beam emission region, and the shielding means is the electron beam. It is characterized in that it is provided between the electron beam generator and the window member so as not to be incident on the edge portion of the electron beam emission window portion which is suspended in the emission region of the electron beam.

[0015]

BEST MODE FOR CARRYING OUT THE INVENTION A first embodiment of the present invention will be described with reference to FIGS. 1 is a front sectional view showing the structure of an electron beam tube according to the present invention, FIG. 2 is a plan view of the electron beam tube, and FIG. 3 is a structure of a window member and a lid member of the electron beam tube shown in FIG. FIG. 4 is an enlarged cross-sectional view, and FIG. 4 is an enlarged cross-sectional view showing the configurations of the window member and the lid member of the electron beam tube having a shape different from the shielding portion of the lid member shown in FIG.

In these figures, 1 is an electron beam tube,
Reference numeral 2 is a vacuum container, 3 is a metal sleeve provided in the vacuum container 2 for preventing electron beam turbulent radiation, 4 is an electron beam generator arranged inside the metal sleeve 3, and 5 is a vacuum container 2 A glass tube member whose lower side is sealed,
Reference numeral 6 denotes a lid member which is provided so as to cover the opening on the front side of the tube member 5 and in which an electron beam passage hole 7 for passing the electron beam from the electron beam generator 4 is formed, and 8 denotes an electron beam passage hole of the lid member 6. 7 is a window member provided so as to hermetically close the front surface.

The window member 8 is made of a silicon wafer or the like, and for example, an electron beam emission window portion 81 is formed by subjecting a predetermined region of a substantially rectangular silicon wafer having a thickness of 500 to 1000 μm to an etching process up to about 3 μm. As shown in these drawings, a plurality of thin rectangular electron beam emission window portions 81 are formed side by side in the left-right direction. The supporting portion 82 is formed between the adjacent electron beam emission window portions 81 so as to remain.

The lid member 6 is arranged so that the electron beam does not enter the peripheral edge portion (edge portion) 83 of the electron beam emission window portion 81.
Between the electron beam generator 4 and the peripheral portion (edge portion) 83, the shielding portion 61 as a shielding means is projected on the center side of the electron beam emission window portion 81 so as to cover the entire circumference of the side portion of the lid member 6. It is formed over. For example, the shielding portion 61 is formed so as to project from the peripheral edge portion (edge portion) 83 of the electron beam emission window portion 81 to the center side of the electron beam emission window portion 81 by about 100 μm.

The window member 8 and the lid member 6 are hermetically welded to each other by a brazing material, but the joining is not limited to this method.

Since the electron beam tube 1 of this embodiment is constructed as described above, the electron beam emitted from the electron beam generator 4 and passing through the electron beam passage hole 7 passes through the electron beam emission window portion 81. Are emitted to the outside of the electron beam tube 1, but the electron beam emitted to the shield portion 61 of the lid member 6 is shielded by the shield portion 61 and the electron beam emission window portion 8 is formed.
It does not enter the peripheral edge portion (edge portion) 83 of No. 1.

As a result, since the electron beam is not irradiated onto the peripheral edge portion (edge portion) 83 of the electron beam emission window portion 81, the interatomic bond at the stress concentration portion of the peripheral edge portion (edge portion) 83 is cut. A peripheral edge portion (edge portion) 83 of the electron beam emission window portion 81 formed in the thin film shape of the window member 8 that can be prevented.
Since damage to the electron beam tube 1 can be prevented, the service life of the electron beam tube 1 can be extended.

The cover member 6 including the shielding portion 61 of the present embodiment has a trapezoidal sectional shape as shown in FIG. 3, but may have a rectangular shape as shown in FIG. Needless to say, the same effect can be obtained.

Next, a second embodiment of the present invention will be described with reference to FIGS. 5 is a front sectional view showing the configuration of the electron beam tube according to the invention of the present embodiment, FIG. 6 is a plan view of the electron beam tube, and FIG. 7 is a configuration of a window member and a lid member of the electron beam tube shown in FIG. 8 is an enlarged sectional view of FIG.
FIG. 8 is a cross-sectional view showing an enlarged configuration of a window member and a lid member of an electron beam tube having a shape different from the shielding portion of the lid member shown in FIG. 7.

In these figures, 9 is a radiation area of the electron beam emitted from the electron beam generator 4 toward the window member 8, and 62 is an edge portion of the electron beam emission window portion 81 hanging on the radiation area 9 of the electron beam. It is a shielding portion as a shielding means formed on the side portion of the lid member 6 between the electron beam generator 4 and the edge portion 84 so as not to be incident on 84. The shield portion 62 is also formed in a portion of the lid member 6 that is suspended in the electron beam emission region 9 so as to project toward the center of the electron beam emission window portion 81. For example, the shielding portion 62 is formed so as to project from the edge portion 84 of the electron beam emission window portion 81 to the center side of the electron beam emission window portion 81 by about 100 μm. Since the other configurations correspond to the configurations of the same reference numerals shown in FIGS. 1 to 4 according to the first embodiment, the description thereof will be omitted.

Since the electron beam tube of this embodiment is constructed as described above, the electron beam passage hole 7 of the electron beam emitted from the electron beam generator 4 and having the electron beam emission region 9 as shown in the drawing is used. The electron beam that has passed through is emitted to the outside of the electron beam tube 1 through the electron beam emission window portion 81, but the electron beam emitted to the shield portion 62 of the lid member 6 is shielded by the shield portion 62. It does not enter the edge portion 84 of the electron beam emission window portion 81.

As a result, the edge 84 of the electron beam emission window 81 is not irradiated with the electron beam, so that the edge 8
4 can prevent breakage of interatomic bonds in the stress concentration portion, and can prevent damage to the edge portion 84 of the electron beam emission window portion 81 formed in the thin film shape of the window member 8, and thus the electron beam tube. The service life of No. 1 can be extended.

The cross-sectional shape of the lid member 6 including the shielding portion 62 of this embodiment is also trapezoidal as shown in FIG. 7, but may be rectangular as shown in FIG. Needless to say, the same effect can be obtained.

Next, a third embodiment of the present invention will be described with reference to FIGS. 9 is a front sectional view showing the configuration of the electron beam tube according to the invention of the present embodiment, FIG. 10 is a plan view of the electron beam tube, and FIG. 11 is a window member, an interposing member, and a window member of the electron beam tube shown in FIG. It is sectional drawing which expanded and showed the structure of the lid member.

In these figures, 10 is an interposing member interposed between the lid member 6 and the window member 8, and 101 is an electron beam on the peripheral edge portion (edge portion) 83 of the electron beam emitting window portion 81. Between the electron beam generator 4 and the peripheral edge portion (edge portion) 83 so as not to enter, so as to project toward the center side of the electron beam emission window portion 81, over the entire circumference of the side portion of the interposition member 10. It is a shielding portion that is formed as shielding means. This shield 10
1 also has an electron beam emission window portion 81 of about 100 μm from a peripheral edge portion (edge portion) 83 of the electron beam emission window portion 81.
Is formed so as to protrude toward the center of the. Here, the lid member 6 and the interposition member 10 and the interposition member 10 and the window member 8 are welded to each other.

The interstitial member 10 has, for example, a thickness of 50.
It is made of 0 μm plate-shaped silicon and is welded airtight by a brazing material. Note that the other configurations correspond to the configurations of the same reference numerals shown in FIGS. 1 to 3 according to the first embodiment, and therefore description thereof will be omitted.

Since the electron beam tube of this embodiment is also constructed as described above, the electron beam emitted from the electron beam generator 4 and passing through the electron beam passage hole 7 passes through the electron beam emission window portion 81. The electron beam emitted to the outside of the electron beam tube 1 but emitted to the shield portion 101 of the interposition member 10 is shielded by the shield portion 101 and enters the peripheral edge portion (edge portion) 83 of the electron beam emission window portion 81. It will not be done.

As a result, since the electron beam is not irradiated onto the peripheral edge portion (edge portion) 83 of the electron beam emission window portion 81, the interatomic bond at the stress concentration portion of the peripheral edge portion (edge portion) 83 is cut. A peripheral edge portion (edge portion) 83 of the electron beam emission window portion 81 formed in the thin film shape of the window member 8 that can be prevented.
Can be prevented, and the service life of the electron beam tube 1 can be extended.

Next, a fourth embodiment of the present invention will be described with reference to FIGS. FIG. 12 is a front sectional view showing the structure of the electron beam tube according to the invention of the present embodiment, FIG.
3 is a plan view of the electron beam tube, and FIG. 14 is an enlarged cross-sectional view showing the configurations of the window member, the mounting member and the lid member of the electron beam tube shown in FIG.

In these figures, 102 is an edge portion 84 of the electron beam emission window portion 81 which is suspended in the electron beam radiation region 9.
This is a shielding portion as a shielding means formed on a side portion of the interposing member 10 which is interposed between the electron beam generator 4 and the edge portion 84 so as not to be incident on. The shielding portion 102 is also formed in the portion of the interposing member 10 that is hung on the electron beam emission region 9 so as to protrude toward the center of the electron beam emitting window portion 81. The shield portion 102 is also formed so as to protrude from the edge portion 84 of the electron beam emission window portion 81 to the center side of the electron beam emission window portion 81 by about 100 μm, for example. Note that the other configurations correspond to the configurations of the same reference numerals shown in FIGS. 5 to 7 according to the second embodiment, and thus the description thereof will be omitted.

Since the electron beam tube of this embodiment is also constructed as described above, the electron beam passage hole 7 of the electron beam emitted from the electron beam generator 4 and having the electron beam emission region 9 as shown in the drawing is used. The electron beam that has passed through is emitted to the outside of the electron beam tube 1 through the electron beam emission window portion 81, but the electron beam emitted to the shield portion 102 of the interposition member 10 is shielded by the shield portion 102. Therefore, it does not enter the edge portion 84 of the electron beam emission window portion 81.

As a result, the edge 84 of the electron beam emission window 81 is not irradiated with the electron beam, so that the edge 8
4 can prevent breakage of interatomic bonds in the stress concentration portion, and can prevent damage to the edge portion 84 of the electron beam emission window portion 81 formed in the thin film shape of the window member 8, and thus the electron beam tube. The service life of No. 1 can be extended.

Next, a fifth embodiment of the present invention will be described with reference to FIGS. FIG. 15 is a front sectional view showing the structure of an electron beam tube according to the invention of this embodiment, and FIG.
6 is a plan view of the electron beam tube, and FIG. 17 is an enlarged cross-sectional view showing the configurations of the window member, interposing member and lid member of the electron beam tube shown in FIG.

In these figures, a part 11 is provided between the lid member 6 and the window member 8, and the surface on which the window member 8 is placed has the window member 8 placed on the lid member 6. The interposition member 111, which is formed on the same surface as the surface to be shielded, is connected to the electron beam generator 4 and the peripheral edge (edge) so that the electron beam does not enter the peripheral edge (edge) 83 of the electron beam emission window 81. Part) 83 so as to project toward the center of the electron beam emission window 81, and is a shielding part as a shielding means formed over the entire circumference of the side part of the interposition member 11. The shield portion 111 is also formed so as to project from the peripheral edge portion (edge portion) 83 of the electron beam emission window portion 81 to the center side of the electron beam emission window portion 81 by about 100 μm, for example. Since the other configurations correspond to the configurations of the same reference numerals shown in FIGS. 9 to 11 according to the third embodiment, the description thereof will be omitted.

Since the electron beam tube of this embodiment is also constructed as described above, the electron beam emitted from the electron beam generator 4 and passing through the electron beam passage hole 7 passes through the electron beam emission window portion 81. The electron beam emitted to the outside of the electron beam tube 1 but emitted to the shield portion 111 of the interposing member 11 is shielded by the shield portion 111 and enters the peripheral edge portion (edge portion) 83 of the electron beam emission window portion 81. It will not be done.

As a result, since the electron beam is not irradiated onto the peripheral edge portion (edge portion) 83 of the electron beam emission window portion 81, the interatomic bond at the stress concentration portion of the peripheral edge portion (edge portion) 83 is cut. A peripheral edge portion (edge portion) 83 of the electron beam emission window portion 81 formed in the thin film shape of the window member 8 that can be prevented.
Can be prevented, and the service life of the electron beam tube 1 can be extended.

Next, a sixth embodiment of the present invention will be described with reference to FIGS. FIG. 18 is a front sectional view showing the configuration of an electron beam tube according to the invention of this embodiment, and FIG.
9 is a plan view of the electron beam tube, and FIG. 20 is an enlarged sectional view showing the configurations of the window member, the interposing member and the lid member of the electron beam tube shown in FIG.

In these figures, a part 11 is provided between the lid member 6 and the window member 10, but the surface on which the window member 8 is placed has the window member 8 placed on the lid member 6. And 112, which is formed on the same surface as the surface to be irradiated, is the radiation area 9 of the electron beam.
So as not to enter the edge portion 84 of the electron beam emission window portion 81 as a shielding means formed on the side portion of the interposing member 11 interposed between the electron beam generator 4 and the edge portion 84. This is a shield portion, and this shield portion 112 is also formed in a portion of the interposing member 11 that is suspended in the electron beam radiation region 9 so as to project toward the center of the electron beam emission window portion 81. This shielding portion 112 is also, for example, the edge portion 8 of the electron beam emission window portion 81.
4 to about 100 μm so as to project toward the center of the electron beam emission window 81. Note that the other configurations correspond to the configurations of the same reference numerals shown in FIGS. 12 to 14 according to the fourth embodiment, and therefore description thereof will be omitted.

Since the electron beam tube of this embodiment is also constructed as described above, the electron beam passage hole 7 of the electron beam emitted from the electron beam generator 4 and having the electron beam emission region 9 as shown in the drawing is used. The electron beam that has passed through is emitted to the outside of the electron beam tube 1 through the electron beam emission window portion 81, but the electron beam emitted to the shield portion 112 of the interposition member 11 is shielded by the shield portion 112. Therefore, it does not enter the edge portion 84 of the electron beam emission window portion 81.

As a result, the edge 84 of the electron beam emission window 81 is not irradiated with the electron beam, so that the edge 8
4 can prevent breakage of interatomic bonds in the stress concentrated portion and can prevent damage to the edge portion 84 of the electron beam emission window portion 81 formed in the thin film shape of the window member 8. The service life of the tube 1 can be extended.

In the third to sixth embodiments, the interposition member including the shield portion is formed in a trapezoidal cross section, but the same effect can be obtained by forming it in a rectangular shape. Needless to say.

[0046]

According to the invention described in claim 1, between the electron beam generator and the window member, the electron beam emitted from the electron beam generator is prevented from entering the edge of the electron beam emission window. Since the shielding means is provided at the edge, the electron beam is not irradiated to the edge portion of the electron beam emission window portion, so it is possible to prevent disconnection of interatomic bonds in the stress concentration portion of the edge portion, and Since it is possible to prevent the electron beam emitting window portion formed in a thin film from being damaged, it is possible to extend the service life of the electron beam tube.

According to the second aspect of the invention, the shielding means can be easily formed by using the lid member.

According to the third aspect of the invention, the shielding means can be easily formed by using the member provided between the lid member and the window member.

According to the fourth aspect of the present invention, the shielding means is provided at a position where it does not enter the edge portion of the electron beam emission window portion which is suspended in the electron beam emission region. Only by doing so, it is possible to effectively prevent breakage of the electron beam emission window portion formed in the thin film shape of the window member.

[Brief description of drawings]

FIG. 1 is a front sectional view showing a configuration of an electron beam tube according to a first embodiment of the invention.

FIG. 2 is a plan view of an electron beam tube according to the invention of the first embodiment.

FIG. 3 is an enlarged sectional view showing the configurations of a window member and a lid member of the electron beam tube shown in FIG.

FIG. 4 is an enlarged cross-sectional view showing configurations of a window member and a lid member of an electron beam tube having a shape different from that of the shielding portion of the lid member shown in FIG.

FIG. 5 is a front sectional view showing the configuration of an electron beam tube according to the invention of the second embodiment.

FIG. 6 is a plan view of an electron beam tube according to a second embodiment of the invention.

FIG. 7 is an enlarged sectional view showing the configurations of a window member and a lid member of the electron beam tube shown in FIG.

8 is an enlarged cross-sectional view showing configurations of a window member and a lid member of an electron beam tube having a shape different from that of the shielding portion of the lid member shown in FIG.

FIG. 9 is a front sectional view showing the structure of an electron beam tube according to the invention of a third embodiment.

FIG. 10 is a plan view of an electron beam tube according to the invention of the third embodiment.

11 is an enlarged cross-sectional view showing the configurations of a window member, an interposing member and a lid member of the electron beam tube shown in FIG.

FIG. 12 is a front sectional view showing the structure of an electron beam tube according to the invention of a fourth embodiment.

FIG. 13 is a plan view of an electron beam tube according to a fourth embodiment of the invention.

14 is an enlarged sectional view showing the configurations of a window member, an interposing member and a lid member of the electron beam tube shown in FIG.

FIG. 15 is a front sectional view showing the structure of an electron beam tube according to the invention of a fifth embodiment.

FIG. 16 is a plan view of an electron beam tube according to the fifth embodiment of the invention.

FIG. 17 is a cross-sectional view showing an enlarged configuration of a window member, an interposing member and a lid member of the electron beam tube shown in FIG.

FIG. 18 is a front sectional view showing the structure of an electron beam tube according to the invention of a sixth embodiment.

FIG. 19 is a plan view of an electron beam tube according to the sixth embodiment of the invention.

20 is an enlarged sectional view showing the configurations of a window member, an interposing member and a lid member of the electron beam tube shown in FIG.

FIG. 21 is a front sectional view showing a configuration of an electron beam tube according to a conventional technique.

22 is a cross-sectional view showing an enlarged configuration of the window member of the electron beam tube viewed from XX in FIG.

23 is a cross-sectional view showing an enlarged configuration of the window member of the electron beam tube, which is different from that of FIG. 22 as seen from XX in FIG. 21.

FIG. 24 is an enlarged cross-sectional view showing the configuration of the window member of the electron beam tube shown for explaining the problems of the conventional technique.

[Explanation of symbols]

1 electron beam tube 2 vacuum container 3 metal sleeve 4 Electron beam generator 5 Pipe members 6 Lid member 61 Shield 62 Shield 7 Electron beam passage hole 8 window members 81 Electron beam exit window 82 Support 83 Peripheral part (edge) 84 Edge Radiation range of 9 electron beam 10 Interior mounting members 101 Shield 102 Shield 11 Intermounting members 111 Shield 112 Shield

Claims (4)

[Claims] 1. A tube member in which an electron beam generator is provided, a lid member provided so as to cover an opening of the tube member and having an electron beam passage hole for passing an electron beam, and the electron beam passage. An electron beam tube having a hole and a window member having an electron beam emitting window portion made of a thin film formed by etching, wherein the electron beam emitted from the electron beam generator is the electron beam emitting. An electron beam tube, characterized in that shielding means is provided between the electron beam generator and the window member so as not to enter the edge portion of the window portion. 2. The electron beam tube according to claim 1, wherein the shielding means is formed on the lid member. 3. The electron beam tube according to claim 1, wherein the shielding means is formed on a member interposed between the lid member and the window member. 4. The electron beam has a predetermined electron beam emission area, and the shielding means prevents the electron beam from entering an edge portion of an electron beam emission window portion which is suspended in the electron beam emission area. The electron beam tube according to any one of claims 1 to 3, wherein the electron beam tube is provided between the electron beam generator and the window member.