JPH0544160B2 - - Google Patents
Info
- Publication number
- JPH0544160B2 JPH0544160B2 JP58180702A JP18070283A JPH0544160B2 JP H0544160 B2 JPH0544160 B2 JP H0544160B2 JP 58180702 A JP58180702 A JP 58180702A JP 18070283 A JP18070283 A JP 18070283A JP H0544160 B2 JPH0544160 B2 JP H0544160B2
- Authority
- JP
- Japan
- Prior art keywords
- beryllium
- electron beam
- beryllium window
- welding
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 claims description 87
- 229910052790 beryllium Inorganic materials 0.000 claims description 86
- 238000003466 welding Methods 0.000 claims description 33
- 238000010894 electron beam technology Methods 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 26
- 229910052782 aluminium Inorganic materials 0.000 claims description 25
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 25
- 230000005469 synchrotron radiation Effects 0.000 claims description 25
- 238000005219 brazing Methods 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000011324 bead Substances 0.000 claims description 4
- 239000003960 organic solvent Substances 0.000 claims description 3
- 230000003746 surface roughness Effects 0.000 claims 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 12
- 229910052709 silver Inorganic materials 0.000 description 12
- 239000004332 silver Substances 0.000 description 12
- 239000001307 helium Substances 0.000 description 8
- 229910052734 helium Inorganic materials 0.000 description 8
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 8
- 229910001220 stainless steel Inorganic materials 0.000 description 8
- 239000010935 stainless steel Substances 0.000 description 8
- 238000011160 research Methods 0.000 description 7
- 239000000498 cooling water Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 238000003860 storage Methods 0.000 description 6
- 239000013078 crystal Substances 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 230000035882 stress Effects 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000001459 lithography Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000007872 degassing Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 229910001209 Low-carbon steel Inorganic materials 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- SOWHJXWFLFBSIK-UHFFFAOYSA-N aluminum beryllium Chemical compound [Be].[Al] SOWHJXWFLFBSIK-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000012472 biological sample Substances 0.000 description 1
- 229920001222 biopolymer Polymers 0.000 description 1
- 210000004204 blood vessel Anatomy 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 235000012489 doughnuts Nutrition 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920006332 epoxy adhesive Polymers 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000000191 radiation effect Effects 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000012916 structural analysis Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 238000004454 trace mineral analysis Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Description
【発明の詳細な説明】
本発明はシンクロトロン放射用ベリリウム窓の
製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method of manufacturing a beryllium window for synchrotron radiation.
Ｘ線発生装置としては、良く知られているよう
にＸ線管が挙げられる。Ｘ線管は電子発生源とな
るフイラメント等の陰極と、加速された電子が衝
突してＸ線を発生する陽極（金属ターゲツト）と
からなる。Ｘ線管には真空に封じ切つた封入管
と、真空排気しながら使用する組立式のものとが
ある。何れの場合も、発生したＸ線は雲母、ベリ
リウム薄板等でできた窓を通して空気中に取り出
し、実験に使用する。封入管の場合は、ステンレ
ス鋼製取り付け枠にベリリウム板を真空中で高周
波銀ろう付けしたものを、管球のメタライズした
部分と溶接して用いる場合が多い。組立式の場合
は窓材をエポキシ系接着材で枠に接着し、ゴムガ
スケツト等で真空シールして使用する。何れの場
合も水冷する必要はなく、真空度も10-5〜10-6
Torr程度の通常真空である。 An example of an X-ray generator is a well-known X-ray tube. An X-ray tube consists of a cathode such as a filament that serves as an electron generation source, and an anode (metal target) on which accelerated electrons collide to generate X-rays. There are two types of X-ray tubes: sealed tubes that are sealed in a vacuum, and assembled types that are used while being evacuated. In either case, the generated X-rays are extracted into the air through a window made of mica, beryllium thin plate, etc., and used for experiments. In the case of an encapsulated tube, a beryllium plate is often welded to a metalized part of the tube by high-frequency silver brazing in a vacuum to a stainless steel mounting frame. In the case of a prefabricated type, the window material is glued to the frame with epoxy adhesive and vacuum sealed with a rubber gasket. In either case, there is no need for water cooling, and the degree of vacuum is 10 -5 to 10 -6.
It is a normal vacuum of around Torr.
近年、従来使用されてきたＸ線管に較べて格段
に性能の優れたＸ線光源としてシンクロトロン放
射（SR）が注目されている。SRは従来のＸ線源
よりも強度が２〜３桁強く、指向性に優れ、連続
スペクトルを示す等の特徴をもつている。現在、
本出願人の研究所で25億電子ボルトの電子ストー
レジリングからＸ線を取り出すために使われてい
る窓は、鋼製の枠にベリリウム板を銀ろう付けし
て取り付け、それを水冷用の孔をあけたステンレ
ス鋼製コンフラツトフランジに稀ガス溶接したも
のである。この窓はベリリウム板の接着方法が銀
ろう付けなので、ベリリウム板の機械的強度を保
つためには細心の注意を必要とし、冷却も間接的
なのでＸ線強度がさらに増加した場合は改良を行
なう必要がある。一方、外国でのベリリウム窓の
使用例としては、スタンフオード大シンクロトロ
ン放射研究所（SSRL）が挙げられる。同所で使
用されているベリリウム窓は拡散接合により取り
付けたものであるが、接着強度が銀ろう付けに較
べて弱く、取出されるＸ線の強度はベリリウム窓
の強度により制限されている。現在では銀ろう付
けによるベリリウム窓に切り換えつつある。 In recent years, synchrotron radiation (SR) has attracted attention as an X-ray light source with significantly superior performance compared to conventionally used X-ray tubes. SR has features such as being two to three orders of magnitude stronger in intensity than conventional X-ray sources, having excellent directivity, and exhibiting a continuous spectrum. the current,
The window used in the applicant's laboratory to extract X-rays from the 2.5 billion electron volt electronic storage ring consists of a beryllium plate attached to a steel frame with silver brazing, and a water-cooled window. It is made by rare gas welding to a stainless steel conflat flange with holes drilled in it. This window uses silver brazing to bond the beryllium plates, so great care is required to maintain the mechanical strength of the beryllium plates, and since cooling is indirect, improvements will be needed if the X-ray intensity increases further. There is. Meanwhile, an example of the use of beryllium windows in other countries is the Stanford Synchrotron Radiation Laboratory (SSRL). The beryllium windows used at the site were attached by diffusion bonding, but the adhesive strength is weaker than silver soldering, and the intensity of the X-rays extracted is limited by the strength of the beryllium windows. Currently, they are switching to beryllium windows with silver soldering.
ベリリウム窓は、SR取出用の超高真空仕様ビ
ームラインの下流終端に接続されるので、超高真
空を得るためには窓を150℃〜250℃まで焼出す必
要がある。接着部が焼出しに耐え得るのは銀ろう
付け、拡散接合、電子ビーム溶接である。銀ろう
付けは接着幅が広くとれ、丈夫で確実であるが、
溶接温度が高く、ベリリウム板の再結晶化による
強度低下を招く危険性がある。拡散接合は接着温
度が低いが、ベリリウムと取付板との間の原子の
拡散で接着させるため、強度的に問題がある。当
然、材質、接着表面のエツチング、クリーニング
に細心の注意を払う必要がある。電子ビーム溶接
は加熱個所の幅が狭く、結晶成長が少なく、歪み
が小さいが、ベリリウム材を直接電子で照射する
と割れるという欠点がある。 The beryllium window is connected to the downstream end of the ultra-high vacuum specification beam line for SR extraction, so it is necessary to bake the window to 150°C to 250°C to obtain ultra-high vacuum. Bonds that can withstand bakeout include silver brazing, diffusion bonding, and electron beam welding. Silver brazing has a wide bonding width, is strong and reliable, but
The welding temperature is high, and there is a risk of a decrease in strength due to recrystallization of the beryllium plate. Diffusion bonding has a low bonding temperature, but there is a problem in terms of strength because the bond is made by diffusion of atoms between the beryllium and the mounting plate. Naturally, careful attention must be paid to the material, etching of the adhesive surface, and cleaning. Electron beam welding has a narrow heating area, less crystal growth, and less distortion, but it has the disadvantage that beryllium material can crack if it is directly irradiated with electrons.
本発明はベリリウム窓を窓枠に真空気密溶接す
ることを目的とする。 The present invention is directed to vacuum-tight welding of beryllium windows to window frames.
本発明は３つの分野に関連している。製作技術
の点で溶接工学に関連し、製造したベリリウム窓
を電子蓄積リングに取り付けるので加速器科学に
関連し、ベリリウム窓からＸ線を取り出して実用
に供するのでＸ線光学に関連する。 The invention relates to three areas. It is related to welding engineering in terms of fabrication techniques, it is related to accelerator science because the fabricated beryllium windows are attached to electron storage rings, and it is related to x-ray optics because the x-rays are extracted from the beryllium windows for practical use.
金属ベリリウムは軽く（比重はアルミニウムの
２／３）、強く（引張り強さは軟鋼以上）、比熱が大
で、熱伝導が良く（アルミニウムと同程度）、融
点が1278℃で軽金属中で最高である等の特性に加
えて、中性子の吸収断面積が小さく、Ｘ線の透過
率がアルミニウムの20〜60倍と非常に大きい等の
原子核的性質にも特徴がある。ところが、溶融等
の熱加工を行う場合には酸化し易く（酸化物は猛
毒）、700℃以上に熱せられると結晶粒が成長して
脆弱化し易い等の欠点を有する。例えば、780℃
で10分間銀ろう付けを行なうと、670℃で10分間
ろう付けしたときに比べてベリリウム板の剪断強
度が1/3に落ちる。この為、Ｘ線用ベリリウム窓
を作成するにあたつて、如何にすればベリリウム
板を本来の優れた特性を損わずに真空フランジに
接着できるかが、溶接工学上の問題とされてい
る。 Beryllium metal is light (specific gravity is 2/3 of aluminum), strong (tensile strength is higher than mild steel), has large specific heat, good thermal conductivity (same as aluminum), and has a melting point of 1278℃, the highest among light metals. In addition to these characteristics, it also has nuclear properties such as a small neutron absorption cross section and an extremely high X-ray transmittance of 20 to 60 times that of aluminum. However, when thermal processing such as melting is performed, it is easily oxidized (oxides are highly toxic), and when heated to 700°C or higher, crystal grains tend to grow and become brittle. For example, 780℃
If silver brazing is performed for 10 minutes at 670℃, the shear strength of the beryllium plate will be reduced to one third compared to when brazing for 10 minutes at 670℃. For this reason, when creating beryllium windows for X-rays, the problem in welding engineering is how to bond the beryllium plate to the vacuum flange without losing its original excellent properties. .
電子ストーレジリング中では１兆分の１気圧
（10-10Torr）という超高真空が実現されており、
そこを高エネルギーの電子が高速で回転し、SR
を放出している。SRは赤外線からＸ線まで含む
連続スペクトルを示す。特にＸ線領域では、波長
範囲を任意に選べること、大強度が得られること
等の点で通常のＸ線管に較べて優れており、物性
研究、結晶構造解析、リソグラフイー、血管診断
等、多数にわたる用途が計画され、実現されてい
る。これらの仕事に用いられるＸ線成分は、ベリ
リウム窓を通して超高真空中から低真空又はヘリ
ウム雰囲気中に取り出され、供給される。この時
ベリリウム窓は全波長成分を含んだSRにより照
射される。SRは非常に強く、吸収されたエネル
ギーは熱に変換され、ベリリウム板の温度を上昇
させる。各種の用途を実現させるにあたり、必要
不可欠なベリリウム窓を制作する為には、大気圧
に耐え、必要なＸ線を良く透過し、熱負荷に耐え
る等、窓自身の性能の問題と、加速器及びＸ線実
験系に係わることから生ずる異なる真空度の状態
を結合し維持するという技術的要請を解決する必
要がある。 An ultra-high vacuum of one trillionth of an atmosphere (10 -10 Torr) has been achieved in the electronic storage ring.
High-energy electrons rotate through it at high speed, and SR
is emitting. SR indicates a continuous spectrum that includes everything from infrared to X-rays. In particular, in the X-ray region, it is superior to ordinary X-ray tubes in that it is possible to select any wavelength range and obtain high intensity, and is useful for research on physical properties, crystal structure analysis, lithography, blood vessel diagnosis, etc. A large number of applications are being planned and realized. The X-ray components used for these tasks are taken out from ultra-high vacuum to low vacuum or helium atmosphere through a beryllium window and supplied. At this time, the beryllium window is illuminated by SR containing all wavelength components. SR is very strong, and the absorbed energy is converted into heat, increasing the temperature of the beryllium plate. In order to produce beryllium windows, which are indispensable for a variety of applications, there are issues with the performance of the window itself, such as withstanding atmospheric pressure, good transmission of necessary X-rays, and resistance to heat loads, as well as issues with accelerator and There is a need to solve the technical requirements of combining and maintaining different vacuum conditions arising from the involvement of X-ray experimental systems.
シンクロトロン放射（SR）のスペクトル分布
は、電子ストーレジリングを周る電子のエネルギ
ーとその曲率半径のみで決められる。SRに含ま
れるＸ線成分は従来のＸ線管等の線源に較べると
数十倍から数百倍強い。SRに含まれるＸ線は物
質材料の構造解析、物性の研究、放射線効果、微
量分析等の手段として極めて有利である。また、
今のところ医療用としてのSR利用は端緒につい
たばかりであるが、この分野は将来、大きく発展
するものと予想されている。これらの研究開発は
通常の真空又はヘリウム雰囲気中で行なわれるも
のが多い。従つて、電子蓄積リングの超高真空ド
ーナツと低真空又はヘリウム雰囲気にある研究装
置を仕切り、かつＸ線を透過させるベリリウム窓
は必須のもので、これなしには研究を遂行するこ
とはできない。然しながら、ベリリウム窓は巨大
な電子蓄積リングに接続される為、それに見合つ
た厳しい使用条件が課せられる。即ち超高真空に
面するので、内表面からの脱ガスが小さく、リー
クが検出されない清浄な超高真空仕様である必要
がある。さらに、前述したように、超高真空
（10-9〜10-10Torr）と大気圧の空気又はヘリウム
を完全に遮断しながら、一方でＸ線をできるだけ
多量に実験装置に向けて透視させる役目が課せら
れる。さらにSRが窓に熱負荷をもたらし、ベリ
リウム板の温度を上昇させる為、窓材自身が熱応
力に耐えることができ、全体を冷却していること
が必要である。一度窓が破れて大気の流入を許す
と大きな被害が発生するので、なるべく厚くして
上記の応力に耐える方がいい。然し、他方では、
窓厚を厚くすると研究に必要なＸ線は透過し難く
なるので、両方の条件を満足するギリギリの厚さ
である約0.5mm以下、特に約0.2〜0.3mm以下を通常
選ぶ。 The spectral distribution of synchrotron radiation (SR) is determined only by the energy of the electrons orbiting the electron storage ring and its radius of curvature. The X-ray components contained in SR are tens to hundreds of times stronger than conventional sources such as X-ray tubes. The X-rays contained in SR are extremely useful as a means for structural analysis of materials, research on physical properties, radiation effects, trace analysis, etc. Also,
At present, the use of SR for medical purposes has only just begun, but this field is expected to develop significantly in the future. Many of these research and developments are carried out in a normal vacuum or helium atmosphere. Therefore, the beryllium window that separates the ultra-high vacuum donut of the electron storage ring from the research equipment in a low vacuum or helium atmosphere and that allows X-rays to pass through is essential, and research cannot be carried out without it. However, since beryllium windows are connected to large electron storage rings, they are subject to commensurately stringent operating conditions. That is, since it faces an ultra-high vacuum, it needs to be of a clean ultra-high vacuum specification with minimal degassing from the inner surface and no leakage detected. Furthermore, as mentioned above, the role is to completely block ultra-high vacuum (10 -9 to 10 -10 Torr) and atmospheric pressure air or helium, while directing as much X-rays as possible to the experimental equipment. is imposed. Furthermore, since SR imposes a heat load on the window and raises the temperature of the beryllium plate, the window material itself must be able to withstand thermal stress and cool the entire window. Once the window breaks and allows air to enter, it will cause major damage, so it is better to make it as thick as possible to withstand the stress mentioned above. However, on the other hand,
As the thickness of the window becomes thicker, it becomes difficult for the X-rays necessary for research to pass through, so a thickness of about 0.5 mm or less, especially about 0.2 to 0.3 mm or less, is usually selected, which is the last possible thickness that satisfies both conditions.
本発明の目的は、上記の使用条件を満すSR用
ベリリウム窓を製作するにある。 An object of the present invention is to produce a beryllium window for SR that satisfies the above usage conditions.
本発明によれば、耐久性に富んだ性能の良いベ
リリウム窓を確実に製作し、使用でき、SR利用
を目指す広い分野に貢献することができる。ま
た、放射線検出窓、中性子線透過用真空窓、各種
Ｘ線管取出窓、シンクロトロン放射応用研究用Ｘ
線取出窓等の各種製品を作製することができる。 According to the present invention, a durable and high-performance beryllium window can be reliably manufactured and used, and it can contribute to a wide range of fields aiming at SR utilization. We also provide radiation detection windows, vacuum windows for neutron beam transmission, various X-ray tube exit windows, X-rays for synchrotron radiation applied research.
Various products such as wire exit windows can be manufactured.
本発明においては、薄いベリリウム窓板とアル
ミニウム窓枠とを電子ビーム溶接により溶接して
大気圧に耐える気密なベリリウム窓を形成する。 In the present invention, a thin beryllium window plate and an aluminum window frame are welded together by electron beam welding to form an airtight beryllium window that can withstand atmospheric pressure.
ベリリウム窓板は厚さ約0.5mm以下特に約0.3mm
以下のものである。アルミニウムの溶接面は特別
に溝などを加工する必要はなく、表面約６ミクロ
ン程度の平面が良い。ベリリウム板は縁を研磨し
て酸化物を除去することが好ましい。何れも有機
溶媒で脱脂洗浄することが好ましい。電子ビーム
真空槽中にアルミニウム窓枠とベリリウム板を銅
ブロツク等の錘りで抑えつけ固定する。真空度は
約10-4〜10-5Torrとする。SR用ベリリウム窓は
横広の幅広いビームを利用するため、長方形であ
る必要がある。従来、電子ビーム溶接の場合、溶
接の始まりの点でビームをオンする時、及び溶接
の終りの点でオフする時に、クレーター状の孔が
生じ、ここから真空洩れが生じ易い。本発明では
アルミニウム台枠に深さ１mm程度の溝が生じるよ
うにビーム電流を調節し、長方形のベリリウム板
の縁に平行に第１図に示すように直線的に走査
し、コーナーを余分に長く走査して直線の非連続
的組合せしで井の字形の溶接ビードを得る（第１
図中、ａ〜ｄは溶接の順序を示す）。このときコ
ーナーは電子ビームを直交して重ね合せる。これ
により、真空シール部分にクレーターを生成する
ことは防止される。電子ビームの典型的使用例は
加速電圧約50〜150KV、電流約５〜8mAである。
電子ビーム溶接の始点終点は、すべてベリリウム
板から数mm離れたアルミニウム窓枠上とする、従
つて、クレーター状の孔はベリリウム窓の溶接部
分には生成しない。クレーター状の孔の生成を防
止する為、容易に真空気密な溶接を得ることがで
きる。 The thickness of the beryllium window plate is about 0.5mm or less, especially about 0.3mm.
These are as follows. The welding surface of aluminum does not need to be specially machined with grooves, and a flat surface of approximately 6 microns is preferable. The beryllium plates are preferably edge polished to remove oxides. It is preferable to degrease and wash both with an organic solvent. The aluminum window frame and beryllium plate are fixed in an electron beam vacuum chamber by pressing them down with weights such as copper blocks. The degree of vacuum is approximately 10 -4 to 10 -5 Torr. Beryllium windows for sound reinforcement must be rectangular in order to utilize a wide horizontal beam. Conventionally, in the case of electron beam welding, when the beam is turned on at the beginning of the weld and turned off at the end of the weld, a crater-like hole is created from which vacuum leaks are likely to occur. In the present invention, the beam current is adjusted so that a groove with a depth of about 1 mm is created in the aluminum underframe, and the beam current is scanned in a straight line parallel to the edge of the rectangular beryllium plate as shown in Figure 1, making the corners extra long. By scanning and discontinuously combining straight lines, a square-shaped weld bead is obtained (first
In the figure, a to d indicate the welding order). At this time, the corners overlap the electron beams orthogonally. This prevents the formation of craters in the vacuum seal area. Typical use of an electron beam is an accelerating voltage of about 50-150 KV and a current of about 5-8 mA.
The start and end points of electron beam welding are all on the aluminum window frame a few mm away from the beryllium plate, so no crater-like holes are created in the welded part of the beryllium window. Since the formation of crater-like holes is prevented, vacuum-tight welds can be easily obtained.
電子ビームを透過させないでベリリウム板を照
射加熱するとベリリウム板に亀裂が入り破損して
しまう。また、ベリリウム板のちょうど縁上を照
射すると、溶接ビードにひび割れが入ることが多
い。本発明者等は電子ビームのスポツト径を目視
で２〜３mm程度にし、ビームの中心位置を板の縁
の約0.2〜0.3mm外側に照準して照射する（第２図
参照）と最良の結果が得られることを見出した。
即ち、大部分アルミニウムを溶融し、ベリリウム
を少量溶かし込む。溶接速度は毎秒約1.7cm（毎
分約1m）程度を可とする。 If a beryllium plate is heated by irradiation without transmitting the electron beam, the beryllium plate will crack and break. Additionally, if the area just above the edge of the beryllium plate is irradiated, the weld bead often cracks. The inventors of the present invention obtained the best results by visually setting the spot diameter of the electron beam to approximately 2 to 3 mm, and aiming the center of the beam approximately 0.2 to 0.3 mm outside the edge of the plate (see Figure 2). was found to be obtained.
That is, most of the aluminum is melted and a small amount of beryllium is melted. The welding speed is approximately 1.7 cm per second (approximately 1 m per minute).
熱伝導性の良い材料として、銅、アルミニウム
があるが、銅を上述の方法で溶接しても、長方形
の４辺目の溶接で大きな応力がかかり必ずベリリ
ウム窓に亀裂が入る。真空気密な溶接はアルミニ
ウムを使用した場合にのみ得られる。 Copper and aluminum are materials with good thermal conductivity, but even if copper is welded using the method described above, a large stress will be applied when welding the fourth side of the rectangle, and the beryllium window will inevitably crack. Vacuum-tight welds can only be obtained when using aluminum.
本発明を応用して製作したアルミニウム製ベリ
リウム窓は、例えば第３〜４図に示すような超高
真空フランジ１０の構造をしている。第３〜４図
において、１はBe板、２はアルミニウム、３は
溶接部、４はステンレス鋼、５はアルミニウムと
ステンレス鋼とのクラツド板、６はコンフラツト
溝又は金属中空Ｏリング溝、７は冷却水送入部、
８は冷却水排出部、９は取付ボルト孔、１０は超
高真空フランジである。 An aluminum beryllium window manufactured by applying the present invention has the structure of an ultra-high vacuum flange 10 as shown in FIGS. 3 and 4, for example. In Figures 3 and 4, 1 is a Be plate, 2 is aluminum, 3 is a welded part, 4 is stainless steel, 5 is a clad plate of aluminum and stainless steel, 6 is a conflat groove or metal hollow O-ring groove, and 7 is a cooling water inlet,
8 is a cooling water discharge part, 9 is a mounting bolt hole, and 10 is an ultra-high vacuum flange.
アルミニウム板とステンレス鋼板を爆発圧着し
たクラツド板（旭化成製）を加工して超高真空フ
ランジ１０を製作する。ステンレス鋼４側を加工
し、コンフラツト溝あるいはＯリングシール溝６
を設ける。フランジ１０のアルミニウム部分２に
孔をあけ、終端をステンレス鋼板で溶接し、蓋を
する。冷却水送入部７に図示せぬ流水用コネクタ
をつけて通水し、フランジ１０全体を冷却する。
ベリリウム板１は冷却されたアルミニウム台枠２
上に電子ビーム溶接されているので、SR照射に
より温度上昇しても極めて効率良く冷却すること
ができる。 An ultra-high vacuum flange 10 is manufactured by processing a clad plate (manufactured by Asahi Kasei) in which an aluminum plate and a stainless steel plate are explosively crimped. Machining the stainless steel 4 side to create a conflat groove or O-ring seal groove 6
will be established. A hole is made in the aluminum part 2 of the flange 10, the end is welded with a stainless steel plate, and a lid is placed. A running water connector (not shown) is attached to the cooling water inlet 7 to allow water to flow through the cooling water inlet 7 to cool the entire flange 10.
The beryllium plate 1 is placed on a cooled aluminum frame 2
Since the top is electron beam welded, even if the temperature rises due to SR irradiation, it can be cooled extremely efficiently.
本発明の好適な一実施例においては、ベリリウ
ム板を２枚使用し、中間を真空排気して最初の１
枚目で熱負荷のみを受け止め、次の２枚目で大気
圧を支えて、ベリリウム窓の安全性を高める。１
枚窓の場合は熱負荷による圧縮応力と大気圧によ
る圧縮応力の双方が１枚のベリリウム窓にかかる
からである。 In a preferred embodiment of the present invention, two beryllium plates are used, the middle is evacuated, and the first one is
The first sheet absorbs only the heat load, and the second sheet supports atmospheric pressure, increasing the safety of the beryllium window. 1
This is because in the case of a single window, both compressive stress due to thermal load and compressive stress due to atmospheric pressure are applied to one beryllium window.
本発明によれば、全金属製で150〜250℃まで焼
出し可能な超高真空ベリリウム窓を容易に作製で
きる。SRの照射により熱せられたベリリウム板
を効果的に冷却するべく、水冷管を近接して配置
することができる。また、電子ビームスポツトの
中心をベリリウム板の縁から僅か外側に外して狙
いをつけ、かつ迅速に被溶接体を走査する為、熱
がベリリウム板に作用する時間は約１〜２秒であ
り、ベリリウム板の温度が上昇し結晶粒が成長し
てベリリウム板自身を脆弱化させる危険性は小さ
い。この方法は約0.3mm以下特に約0.1mm以下の薄
いベリリウム窓を製作する時に効果的である。薄
い窓を製作する場合に通常の銀ろう付けによると
周囲温度が上がり過ぎて結晶粒子が成長し易く、
薄板が皺になつて脆い窓ができるからである。 According to the present invention, it is possible to easily produce an ultra-high vacuum beryllium window that is made entirely of metal and can be baked out at temperatures of 150 to 250°C. In order to effectively cool the beryllium plate heated by SR irradiation, water cooling tubes can be placed close to it. In addition, since the center of the electron beam spot is aimed slightly outside the edge of the beryllium plate and the object to be welded is quickly scanned, the time for heat to act on the beryllium plate is approximately 1 to 2 seconds. There is little risk that the temperature of the beryllium plate will rise and crystal grains will grow, thereby weakening the beryllium plate itself. This method is effective when producing thin beryllium windows of about 0.3 mm or less, especially about 0.1 mm or less. When manufacturing thin windows, if you use regular silver brazing, the ambient temperature will rise too much and crystal particles will grow easily.
This is because the slats wrinkle, creating a brittle window.
ベリリウム窓を透過してきたＸ線を各分野に利
用する場合、窓の外側は低真空又はヘリウムガス
雰囲気にする。空気中に直接取り出すと、強力な
Ｘ線により酸素がイオン化されオゾンになつてベ
リリウムを腐食する。ベリリウム板を隔てて内部
を超高真空を保つ必要がある為、溶接部はヘリウ
ムガスに対してどんな小さな洩れ（例えば10-10
Torr・／秒程度の洩れ）があつてもいけない。
本発明によれば、洩れに対して最も敏感なヘリウ
ムに対しても気密なベリリウム窓が手軽に確実に
得られる。 When the X-rays transmitted through the beryllium window are used in various fields, the outside of the window is placed in a low vacuum or helium gas atmosphere. When taken directly into the air, the powerful X-rays ionize oxygen and turn it into ozone, which corrodes beryllium. Since it is necessary to maintain an ultra-high vacuum inside the beryllium plate, the welded part will not leak any helium gas (for example, 10 -10
There should not be any leakage (about Torr/second).
According to the present invention, a beryllium window that is airtight even against helium, which is most sensitive to leakage, can be easily and reliably obtained.
詳述すると、本発明は次の如く種々の優れた効
果を有する。 Specifically, the present invention has various excellent effects as follows.
(1) 短時間の電子ビーム溶接によりベリリウム板
とアルミニウム枠を直接溶接し、超高真空及び
ヘリウムガス雰囲気に対してリークのない窓を
製作することができる。従来の銀ろう付けでは
溶接に要する時間と温度が成否を決める重要な
因子であつた。本発明によれば溶接時間は数秒
のオーダーで済み、ベリリウム板材の変質は断
面写真により調べても殆んど見当たらない。こ
の方法は特に約0.1mm以下の薄いベリリウム窓
を作製する場合に有効である。薄いベリリウム
窓は超高真空と低真空を仕切るもので、低真空
内で行なう超微細加工（リソグラフイー）、生
体高分子の研究等に欠かすことができない。試
料照射槽は10-4〜10-6Torr程度の低真空にし
て、リソグラフイー用のマスクや感光材、脱ガ
スの多い湿つた生物試料等をセツトしても、短
い真空排気時間で照射実験を繰り返すことがで
きる。作業能率が著しく向上する。(1) By directly welding beryllium plates and aluminum frames using short-time electron beam welding, it is possible to manufacture leak-free windows in ultra-high vacuum and helium gas atmospheres. In conventional silver brazing, the time and temperature required for welding are important factors that determine success or failure. According to the present invention, the welding time is on the order of several seconds, and almost no deterioration of the beryllium plate material is found even when examined by cross-sectional photographs. This method is particularly effective when producing thin beryllium windows of approximately 0.1 mm or less. Thin beryllium windows separate ultra-high vacuum from low vacuum, and are essential for ultrafine processing (lithography) and biopolymer research conducted in low vacuum. The sample irradiation tank is set to a low vacuum of about 10 -4 to 10 -6 Torr, and even when lithography masks, photosensitive materials, and wet biological samples with a lot of degassing are set, irradiation experiments can be performed in a short evacuation time. can be repeated. Work efficiency is significantly improved.
(2) シンクロトロン放射は超高真空中で発生す
る。本発明により作製されたベリリウム窓は、
超高真空コンフラツトフランジとしてそのまま
使用できる。また、簡単な構造であり、かつ
150℃〜200℃に焼出して容易に超高真空に到達
できる。従来の銀ろう付けで製作したものに比
較すると、構造の簡単さ、冷却効率の良さで格
段に優れている。(2) Synchrotron radiation occurs in ultra-high vacuum. The beryllium window made according to the present invention is
Can be used as is as an ultra-high vacuum conflat flange. In addition, it has a simple structure and
It can be baked at 150°C to 200°C and easily reach ultra-high vacuum. Compared to those manufactured using conventional silver brazing, it is much superior in terms of simpler structure and better cooling efficiency.
(3) 通常のシンクロトロン放射は水平方向に広が
つているので、有効に使うため横幅の広いビー
ムを取り出している。銀ろう付けによる窓はそ
れ故長楕円のレーストラツク形状である。同じ
形状のものを電子ビーム溶接によつて作ろうと
すると、レーストラツク形の窓周辺を一定の線
速度で走査しつつ溶接を行なわなければならな
い。通常、電子線源を走査することは難しいの
で、被溶接物体を走査する。このとき、問題に
なるのはコーナー部分の溶接で、特殊な治具か
マイクロプロセツサーで走査の線速度と方向を
精密に制御する必要がある。ところが本発明で
は第１図に示すように、直線走査の組合せによ
り井の字形に溶接することで、特殊な装置を使
用することなく長方形窓を簡単に得ることがで
きる。即ち、ビードを直交させることによつ
て、重なつた部分に孔もあかずに良好な溶接結
果が得られる。ベリリウム板は脆く、銅とは相
性が悪くて割れが入る。アルミニウムとは整合
性が良く、電子ビーム溶接が可能である。(3) Normal synchrotron radiation spreads horizontally, so in order to use it effectively, a beam with a wide width is extracted. The silver soldered window is therefore oblong racetrack in shape. If we try to make something with the same shape by electron beam welding, welding must be carried out while scanning the area around the racetrack window at a constant linear velocity. Usually, it is difficult to scan the electron beam source, so the object to be welded is scanned. At this time, the problem is welding the corners, which requires precise control of the linear speed and direction of scanning using a special jig or microprocessor. However, in the present invention, as shown in FIG. 1, a rectangular window can be easily obtained without using any special equipment by welding in a square shape using a combination of linear scans. That is, by making the beads orthogonal, a good welding result can be obtained without creating holes in the overlapping parts. Beryllium plates are brittle and do not mix well with copper, causing them to crack. It has good compatibility with aluminum and can be electron beam welded.
(4) ベリリウム板を直接電子線で照射すると、亀
裂が生じる。ベリリウム板の縁を照射しても割
れる。ベリリウム板の縁の僅か0.2〜0.3mm程度
の外側を照射すると初めて良好な溶接結果が得
られる。この方法は熱的に脆い金属薄膜を溶接
する場合の溶接技術として応用できる（第２図
参照）。(4) When a beryllium plate is directly irradiated with an electron beam, cracks occur. Even if the edge of the beryllium plate is irradiated, it will crack. Good welding results can only be obtained by irradiating just 0.2 to 0.3 mm outside the edge of the beryllium plate. This method can be applied as a welding technique when welding thermally brittle metal thin films (see Figure 2).
以上本発明を特定の例につき詳細に説明した
が、本発明がこれらの例のみに限定されるもので
はなく、本発明の広汎な精神と視野を逸脱するこ
となく種々の変更と修整が可能なこと勿論であ
る。 Although the present invention has been described in detail with reference to specific examples, the present invention is not limited to these examples, and various changes and modifications can be made without departing from the broad spirit and scope of the present invention. Of course.
第１図は本発明方法により長方形ベリリウム薄
板をアルミニウム台枠に井の字形に電子ビーム溶
接する状態を示す説明図、第２図はベリリウム薄
板と電子ビーム照射位置との関係を示す説明図、
第３図は本発明方法により製作したシンクロトロ
ン放射用ベリリウム窓を有する超高真空フランジ
の正面図、第４図はそのＡ−Ａ線上の断面図であ
る。
１……ベリリウム板、２……アルミニウム窓
枠、３……溶接部、４……ステンレス鋼、５……
クラツド板、６……コンフラツト溝又は金属中空
Ｏリング溝、７……冷却水送入部、８……冷却水
排出部、９……取付ボルト孔、１０……超高真空
フランジ、ａ〜ｄ……溶接の順序。
FIG. 1 is an explanatory diagram showing the state in which a rectangular beryllium thin plate is electron beam welded to an aluminum frame in a square shape according to the method of the present invention, and FIG. 2 is an explanatory diagram showing the relationship between the beryllium thin plate and the electron beam irradiation position.
FIG. 3 is a front view of an ultra-high vacuum flange having a beryllium window for synchrotron radiation manufactured by the method of the present invention, and FIG. 4 is a cross-sectional view taken along the line A--A. 1... Beryllium plate, 2... Aluminum window frame, 3... Welded part, 4... Stainless steel, 5...
Cladding plate, 6... Conflat groove or metal hollow O-ring groove, 7... Cooling water inlet, 8... Cooling water outlet, 9... Mounting bolt hole, 10... Ultra-high vacuum flange, a to d ...Welding order.
Claims (1)
窓枠とを電子ビームをベリリウム窓板の縁と平行
な外方に直線的にベリリウム窓板のコーナーの近
くを通るように井の字形に非連続的に走査し、端
点で交差させて、電子ビーム溶接によりろう付け
材を介在させることなく直接溶接して、ベリリウ
ム窓板を外方から取囲む井の字形の溶接ビードを
得ることにより大気圧に耐える気密なベリリウム
窓を形成することを特徴とするシンクロトロン放
射用ベリリウム窓の製造方法。 ２ 特許請求の範囲１記載の方法において、ベリ
リウム窓板の厚さが約0.5mm以下である方法。 ３ 特許請求の範囲２記載の方法において、ベリ
リウム窓板の厚さが約0.3mm以下である方法。 ４ 特許請求の範囲１記載の方法において、ベリ
リウム窓板の形状が横広の長方形である方法。 ５ 特許請求の範囲１記載のアルミニウム窓枠と
して表面粗さ約６ミクロン程度の平面のものを用
いる方法。 ６ 特許請求の範囲１記載の方法において、ベリ
リウム窓板として縁を研磨して酸化物を除去した
ものを用いる方法。 ７ 特許請求の範囲１記載の方法において、ベリ
リウム窓板として有機溶媒で脱脂洗浄したものを
用いる方法。 ８ 特許請求の範囲１記載の方法において、アル
ミニウム窓枠として有機溶媒で脱脂洗浄したもの
を用いる方法。 ９ 特許請求の範囲第１記載の方法において、電
子ビーム溶接を約10-4〜10-5Torrの真空度で行
なう方法。 １０ 特許請求の範囲１記載の方法において、加
速電圧約50〜150KV、電流約５〜8mAの電子ビ
ームを用いる方法。 １１ 特許請求の範囲１０記載の方法において、
アルミニウム窓枠に深さ約１mmの溝が生じるよう
に電子ビームを調節する方法。 １２ 特許請求の範囲１記載の方法において、電
子ビーム溶接の始点終点はベリリウム窓板から数
mm離れたアルミニウム窓枠上とする方法。 １３ 特許請求の範囲１記載の方法において、電
子ビームの井の字形の走査を井の字の左縦棒、右
縦棒、上横棒、下横棒の順序に行なう方法。 １４ 特許請求の範囲１記載の方法において、電
子ビームの中心位置をベリリウム窓板の縁の約
0.2〜0.3mm外側に照準する方法。 １５ 許請求の範囲１記載の方法において、電子
ビームのスポツト径を目視で約２〜３mmとする方
法。 １６ 特許請求の範囲１記載の方法において、溶
接速度を毎秒約1.7cmとする方法。 １７ 特許請求の範囲１記載の方法において、２
枚のベリリウム窓板を相互に離間してアルミニウ
ム窓枠に溶接し、中間を排気して真空としたベリ
リウム窓を製作する方法。[Claims] 1. A rectangular thin beryllium window plate and an aluminum window frame are arranged in a rectangular shape so that an electron beam passes outward in a straight line parallel to the edge of the beryllium window plate and near the corner of the beryllium window plate. By scanning discontinuously, intersecting at the end points, and directly welding by electron beam welding without intervening brazing material, we obtain a square-shaped weld bead that surrounds the beryllium window plate from the outside. A method for manufacturing a beryllium window for synchrotron radiation, characterized by forming an airtight beryllium window that can withstand atmospheric pressure. 2. The method according to claim 1, wherein the beryllium window plate has a thickness of about 0.5 mm or less. 3. The method according to claim 2, wherein the beryllium window plate has a thickness of about 0.3 mm or less. 4. The method according to claim 1, wherein the beryllium window plate has a wide rectangular shape. 5. A method of using a flat aluminum window frame with a surface roughness of about 6 microns as claimed in claim 1. 6. A method according to claim 1, in which a beryllium window plate whose edges are polished to remove oxides is used. 7. The method according to claim 1, using a beryllium window plate that has been degreased and cleaned with an organic solvent. 8. A method according to claim 1, in which an aluminum window frame that has been degreased and cleaned with an organic solvent is used. 9. The method according to claim 1, wherein electron beam welding is performed at a vacuum degree of about 10 -4 to 10 -5 Torr. 10. The method according to claim 1, using an electron beam with an accelerating voltage of about 50 to 150 KV and a current of about 5 to 8 mA. 11 In the method according to claim 10,
A method of adjusting the electron beam to create a groove approximately 1 mm deep in the aluminum window frame. 12 In the method set forth in claim 1, the start and end points of electron beam welding are several distances from the beryllium window plate.
How to place mm away on aluminum window frame. 13. The method according to claim 1, in which the electron beam scans the square shape in the order of the left vertical bar, right vertical bar, upper horizontal bar, and lower horizontal bar of the square. 14 In the method according to claim 1, the center position of the electron beam is set approximately at the edge of the beryllium window plate.
How to aim 0.2-0.3mm outward. 15. The method according to claim 1, in which the spot diameter of the electron beam is visually determined to be approximately 2 to 3 mm. 16. The method according to claim 1, wherein the welding speed is approximately 1.7 cm per second. 17 In the method according to claim 1, 2
A method of manufacturing a beryllium window by welding beryllium window panels to an aluminum window frame at a distance from each other and creating a vacuum by evacuating the middle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18070283A JPS6074300A (en) | 1983-09-30 | 1983-09-30 | Method of producing beryllium window for radiating synchrotron |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18070283A JPS6074300A (en) | 1983-09-30 | 1983-09-30 | Method of producing beryllium window for radiating synchrotron |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6074300A JPS6074300A (en) | 1985-04-26 |
| JPH0544160B2 true JPH0544160B2 (en) | 1993-07-05 |
Family
ID=16087816
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18070283A Granted JPS6074300A (en) | 1983-09-30 | 1983-09-30 | Method of producing beryllium window for radiating synchrotron |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6074300A (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6364253A (en) * | 1986-09-04 | 1988-03-22 | Nec Corp | Soft x-ray pickup window |
| JPS6391944A (en) * | 1986-10-03 | 1988-04-22 | Nec Corp | Berylium window for x-ray |
| US4783674A (en) * | 1986-10-13 | 1988-11-08 | Minolta Camera Kabushiki Kaisha | Photographic camera with built-in E2PROM |
| US7190617B1 (en) | 1989-04-13 | 2007-03-13 | Sandisk Corporation | Flash EEprom system |
| JP4998786B2 (en) * | 2007-07-03 | 2012-08-15 | 株式会社Ｉｈｉ | Laser introduction and X-ray extraction mechanism for X-ray generator |
| KR101461829B1 (en) * | 2013-11-26 | 2014-11-13 | 스마트전자 주식회사 | Manufacturing method of current sensing resistor and Current sensing resistor assembly |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57158600A (en) * | 1981-03-03 | 1982-09-30 | Siemens Ag | Radiation projecting window and manufacture thereof |
-
1983
- 1983-09-30 JP JP18070283A patent/JPS6074300A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57158600A (en) * | 1981-03-03 | 1982-09-30 | Siemens Ag | Radiation projecting window and manufacture thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6074300A (en) | 1985-04-26 |
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