JPS6074300A - Method of producing beryllium window for radiating synchrotron - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a synchromion window for radiation.

An example of an X-ray generator is a well-known X-ray tube. The X-ray beam consists of an electron source, a cathode such as ficimen 1, and a cathode 14i (to the metal target 1) from which the accelerated electrons collide and generate X-rays. There are two types of X-ray tubes: an enclosed tube that is sealed in a vacuum, and an assembled type that is used while being evacuated.

In either case, the generated X-rays are taken out into the atmosphere through a tube made of mica, beryllium thin plate, etc., and used for experiments. In the case of sealed tubes, stainless steel mounting is often done by welding a beryllium plate to the frame with high-frequency silver brazing in a vacuum to the metallized part of the tube. In case of assembly type 1. Glue the J window to the frame with epoxy adhesive and vacuum seal it with rubber gas grips. In either case, water cooling f7. ) Necessary lJ'J

In recent years, synchro I-ron radiation (SR
) is attracting attention. SR is two to three orders of magnitude stronger in intensity than conventional X-ray sources, has a cloudy directivity, exhibits a continuous spectrum, and has other characteristics. Xi from electron volt electron storage
The window used to take out the outside (well, a beryllium plate is brazed and attached to a steel frame, and then it is welded to a stainless steel conflag with holes for water cooling. This window uses silver brazing to bond the beryllium plates, so it requires very careful care and maintenance to maintain the mechanical strength of the beryllium plates, and since the cooling is indirect, the X-ray intensity is even higher. If the increase occurs, it is necessary to make improvements. - An example of the use of beryllium windows in foreign countries is the Stafford University Synchro 1-Lon Radio Institute (
S S RL '). The beryllium windows used at the site are attached by diffusion bonding, but the adhesive strength is weaker than that of silver solder f=11J, and the intensity of the X-rays extracted is limited by the strength of the beryllium window. Currently, there has been a switch to beryllium windows with IJ silver brazing.

The beryllium window is connected to the downstream end of the ultra-fine beam line for SR extraction, so in order to obtain an ultra-high vacuum, the window must be heated between 0°C and 250°C. of'
It is necessary to get out a. Bonds that can withstand bakeout include silver brazing, diffusion bonding, and electron beam welding. Silver brazing is adhesive @ wide, strong and stable, but the d junction temperature is high and the strength decreases due to crystallization of the beryllium plate.
13 <There is a risk. In diffusion bonding, the bonding temperature is low, or the bonding is done by diffusion of the original f between the beryllium and the number of attachments, so there may be problems with strength.63 Of course, pay close attention to the material, etching and cleaning of the bonding surface. There is a need. Electron Dome Nagisa 11; has a narrow heating area, little crystal growth, and small depression;
・There is a drawback that the irradiation string cracks.

The present invention is directed to vacuum-tight welding of beryllium windows to window frames.

The present invention is related to three fields: the fabrication technology is related to welding engineering; the fabricated beryllium window is attached to an electronic implantation ring; therefore, it is related to accelerator technology; It is related to X-ray optics because it extracts X-rays from η- and uses them for realization.

Metallic steel is light (specific gravity is 2 to 3 that of aluminum), strong (tensile strength is higher than mild steel), has a specific heat or heat conduction), and has good Z fertility (same as aluminum). ? ,
ii! Point force 1278°C-'C'The highest among light metals, BI
In addition to the characteristics such as C, -C1 neutron absorption cross section 41'
l is small and X Oi! Transmission 4' of aluminum 2
O-60 times and very (two large B; one nuclear i9.
M also has a 1"J sign.In fact, it has 4() additions such as melting."
When performing 2, it is easy to oxidize (oxide (J)
, when heated to 700'C or higher, crystal grains tend to grow and become brittle. For example, brazing at 780"C for 10 minutes, brazing at 670"C for 10 minutes (compared to the shearing strength of the beryllium plate is reduced to 1/3. When making a beryllium window for wires, it is a problem in welding engineering how to bond the beryllium plate to a narrow plate without damaging its original excellent properties. There is.

An ultra-high vacuum of 1/1 trillionth of a month (101-orr) has been achieved in the electron beam Schilling, and Cd3
The electrons of the high-L Nel key rotate there, and the S
Releases R and enters C. SR indicates a continuous spectrum including infrared rays to X-rays.

Compared to Toto's X-Ray Shin, it's a5 better in terms of being able to choose the range arbitrarily, being able to receive great strength, etc. i
1+ study, crystal 4M structural analysis, lithography, 11! ,1
A large number of applications have been planned and realized, such as prenatal care, etc.
There is. The X-ray component tit used for these 4K, /
＼Low J″r <:′ from ultra-high vacuum through a lyllium window
:')/, 1. L/＼taken out into a lium atmosphere,
Supplied. This lo1 beryllium window contains all wavelength components.
J is irradiated to υ. The SR is very strong and the absorbed 16 lg is converted into heat, making the beryllium plate furnish -1'I'l'. In order to produce beryllium windows, which are indispensable for a variety of applications, it is necessary to improve the performance of the window body, such as being able to cut it down for popular use, transmitting X-rays well, and withstanding heat loads. Is it necessary to solve the problem and the technical requirement of combining and linking a range of different degrees of vacuum as it relates to accelerators and X-ray experimental systems?
Vine.

Synchro 1-Subek 1 Hell distribution 1 of Ron radiation (S R)
It is determined only by the energy of the electrons orbiting the i, fj ternary storage ring and its radius of curvature. The X-ray component contained in SR is several tens of thousands of rays higher than that of conventional X-ray tubes, etc.
From 3 onwards, it's twice as strong as white. The X-rays contained in SR are a substance A'A
'#a1'If structural analysis, physical properties? 11F research, radiation effects, microscopic fraction 4iT': "l-'s means t(hA
It is very useful. In addition, at present, the use of SR for 1 monme and 1 λ is limited to ICs, and it is predicted that this field will develop greatly in the future. Most of these studies are conducted in a normal vacuum or helium atmosphere. The ultra-high vacuum donut of the electron phase storage ring and the beryllium window that serves as a research device in a low vacuum or helium atmosphere and that transmits X-rays are essential. cannot be carried out. However, since the beryllium window is connected to a giant electronic device, strict usage conditions are imposed on it. ! Since it faces the I j ultra-high 1'↓ volume, it is essential that it has a clean ultra-high vacuum specification in which the outgassing from the thick rR1 is small and no leakage is detected. Roughly, as mentioned above, super high ij 7. Y(10-!l
~io 1-Orr) How popular is air at the intersection (, 1) While completely blocking helium, CX-rays can be produced!'go(
The first thing you need to do is point it at the experimental equipment and see through it. Roughly, S l'< gives a negative heat to the window, and in order to increase the temperature of the beryllium plate, the window 4A j', J /
)Y: 1 It is necessary to be able to withstand stress and to cool the whole. -The antipathy is broken C atmospheric 'LIIN'
If the person A'ii'l were to do so, it would cause severe damage 73X, so it is better to be strong enough to withstand the above stress. However, if the window thickness is made thicker, the X-rays necessary for research will pass through and the window will become H. Especially about 0.2~0
, 3a or higher is usually selected.

The purpose of the present invention is to improve the above-mentioned conditions of use. l S l<
The company is in the process of manufacturing beryllium windows.

A (According to the invention, a beryllium window with excellent durability and performance can be produced and used, which can contribute to a wide range of fields that involve the use of SR. 13j detector window, neutron beam transmission equipment narrow window, various X-ray tube extraction drawers, in front of X-ray extraction for synchrotron radiation applied research)
We can manufacture various products.

In the present invention, the number of beryllium windows is +9 and the aluminum UNO is used. Welded using d-beam welding to form an airtight beryllium window that can withstand atmospheric pressure.

The beryllium window plate is approximately 0, b +++in
Below, in particular, there is about 0.3m1i JsF's C'. It is not necessary to specially process the aluminum bath-contacting surface, and it is best to have a flat surface of about 6 mm. The beryllium plate is preferably edge-treated to remove oxides. (It is preferable to degrease and clean with solvent C. Electron beam ↓ empty) Inside one aluminum window frame, a beryllium plate is pressed down and fixed with a weight such as a copper block. The degree of vacuum is approximately 10″4~10-′″
lo+godoriru. The beryllium window for SR needs to be rectangular because it uses a wide beam. Conventional, electron beam)? In the case of bath welding, when the beam is turned on at the beginning of welding and when it is turned off at the end of bath welding, a turret-shaped JL is generated, from which vacuum leakage is likely to occur. X invention ℃゛ has a depth of 11 IIN on an aluminum underframe.
Adjust the beam current so that the degree of
S L, rectangular helical horn, first parallel to the edge of the board
7. In a straight line like hydraulic power in the figure. Lloi, make extra corners and set the 'Cli'i wire・l) Obtain a good-shaped welding heat with silk wire (No. 11)・Medium, a-1 (1 indicates the welding order) . Nowadays, Koh-now is 1. Superposition of l beams orthogonally -U◇. This (23), 1'
1) It is possible to create a crater in the empty seal part.
II will be done. An example of using the 91j type f beam is a different speed electric IL #'50~150KV, current about 5~8
m A r u 7* +l The starting and ending points of the same beam welding are to the bow (/\Lilium Jl* /)l +-.

The aluminum window frame is 1iill apart, and (!)
-) C, the crater-shaped hole is a welded hethulium window 141
It does not generate in 1 minute. generation of crater-shaped holes by 1iJ
)+l<,) Therefore, it is easy to obtain vacuum-like welding.7E 'ja''<).

If the beryllium plate is irradiated and heated without the electron beam passing through it, the helium will crack and break. Also, if you put it just above the edge of the beryllium plate in front of it;? Cracks often appear in the welding bead. New non-inventor (J
Spot the five electron beams ~ 1'' with 2 ~ J 1ll
Set Ifl to 4￥ degrees, and set the center position of the beam to about 0 of the temporary edge.
．． Aim and irradiate 2 to O, J mm outside (Fig. 2 6
I found that the best result was 15 points.

141] B. People! ':Ttminofluminium)TaniF
AI: L, pour in a little helium. The welding speed can be approximately 1.7 CIIl per second (approximately lm per minute).

Research) Legend ii411. (1) The material used is 1, aluminum is 0, and S is welded using the above method C'.
However, when welding four sides of a rectangle, a large amount of stress is applied and the beryllium window inevitably cracks. Vacuum-tight welds can only be obtained using aluminum.

An aluminum beryllium conductor fabricated by applying the present invention has a structure of an ultra-high purity nitride flange 10 as shown in Figures 3 to 1. d3 in Figures 3-4,
1 is F3e4&, 2 is aluminum, 3 is welded part, 4 is stainless steel, 5 is cladding of aluminum and stainless steel, 6 is Confunots 1~) 11° or fully bent hollow O
Ring groove, 7 is cooling water (j water) snow II;, ε1 is cooling water 4/1 outlet, 9 is receiving port h hole, l OIIl, a
fj 1″:+1:”Jl is empty.

Aluminum plate and stainless steel plate 1) Q”r for light
L, C super high-'↓ by processing + cladding (manufactured by Fukaisei)
Build 10 waS Noranshi. Stainless steel 6014 +
! ! 'I'c +1 shift, conflat vortex or O
Link sticker! i': (,) 'e M''t ril.

A hole is made in the aluminum part 2 of the flange 10, and the end is welded to a stainless steel plate. 5. Water is passed through the cooling water inlet 7 through one (-) tank for running water (not shown) to cool the entire flange 10.
]1 is cooled/this aluminum kumu stand (7I2-.1.
L Ji Yuj'Hibby Nagisa is touched, so S F<
1J for irradiation +'iuj j'JJ='j'? In a preferred embodiment of the present invention, two beryllium plates are used, and the middle is vacuumed with a vacuum 'IJ + air 1]. One opening can receive only the heat load, and the next two openings (supporting atmospheric pressure,
\ High safety of Lilium windows + V) 1, 'In the case of single-pane windows, compressive stress due to heat load and human pressure J, pressure #! ? i
This is because both of the f+6 forces cover 11 beryllium windows.

According to the present invention, it is possible to easily produce a silium window for the glabella vacuum, which is made of all-metal metal and can be baked out at temperatures of 150 to 250°C. Beryllium k oxidized by SR irradiation
In order to effectively cool the water, it is necessary to place the water-cooled parts close to each other. 7) Remove the center of the electron beam from the edge of the beryllium plate to the outside +i11
In order to quickly scan the object to be welded, the time it takes for the heat to act on the helium plate is approximately 1 to 2 seconds, and the temperature of the beryllium plate reaches an upper limit, causing the crystal grains to melt. grows to 7C
／＼Danger of weakening Lilium board grain (J small.

This method yields approximately 0.3 + nnj1,1nn characteristics.
This is particularly useful when creating irises and beryllium windows with a diameter of less than 1vhi1.

According to a representative of 11 (Roui) of '71'+, when a new window is made, the C crystal grains tend to grow and become warped. 'Cf+i
This is because there is a dangerous window.

X-rays that pass through the beryllium window are used in various fields. Ionized to A-syn k',)'-("Beryllium (beryllium)
-Is it necessary to maintain a super 17 stone vacuum inside the CC? y
J & Department (:, Helipa) - What kind of small i [rere〈example λfi11 (
There is no leakage (on the order of ITOI/r-℃/sec).

According to the present invention, CNr is also sensitive to leakage, and l\ium can be reduced to beryllium 4 or -T'ili\, which is disappointing!
If' J51 Go 1 ■ is received.

In detail, 7i (the invention includes various Ht4 +t
/、Ladles the fruit of my father iH.

(1) Direct welding of the aluminum frame to the J, Sl beryllium plates in a short-time electron beam bath, ultra%' = 'Q λ) L, -? in a purple and helium gas atmosphere. :Leak 43
- I can make roasted rice. In conventional silver attachment, the only factor that affects the success of the welding process is the time required for welding and the quality of the product. According to the present invention, the contact time is on the order of several seconds, and the deterioration of the plate material was investigated using cross-sectional photographs.If: No Al was found. This method is particularly effective for producing thin beryllium windows of approximately 0.11[lN or less] -C(s'+). C is indispensable for ultrafine processing (lithography), research on biological high-strength particles, etc.The sample irradiation tank is 10-4 to 4O-
J- Even if you make a low vacuum of about 1 ゛, use a lithography mask, photosensitive material, etc. to remove the captured biological sample M 1, etc.
(The OJ experiment will be repeated in 1 hour.The working surface will be dark, 11'?l.

(2) Sink 1-11 to F-1 D9.04 generate light in an ultra-high vacuum. Is the beryllium window super 6-i + true? Used as is as 72J's Noratfu Shinji C'saru. Sushita, fi3+ i
11% structure, and can be baked out at 150°C to 200'C and easily reach ultra-high vacuum. Comparing with the manufactured one, (
The simplicity of 1-S construction, coldness] The advantages of JI Ekutei are far less than 1.

(3) Output sink 1' The tron radiation is wide in the horizontal direction and the width is wide because it can be used effectively. ; There is a 1-circle race track shape C. If we try to make a circle of the same shape with an electron beam bath 1'i CL , l, -), we can create a racetrack shape ()) with a constant linear velocity C around the periphery at λ1.゛Scan Tsu2):'jJ case? -1'%, l)
Normally, it is difficult to scan the electron beam source, so scan the object to be welded by 4 degrees.
The problem is that a part of the cope is in contact with the bath, so a special jig or microbe is required to set the linear velocity and direction of tree C scanning to N'+e; .

However, in the present invention (as shown in FIG.
It is possible to easily convert a rectangular window into a rectangular window using special equipment. plJLJ>, by orthogonalizing the heat, small 4. H7) A good scratch with no holes in this part. Beryllium 4 and Al6 have a compatibility of 7.4 and 3 and 4 and 3, respectively. Beryllium 4 and 3 have a compatibility of 1'l-hll, , 1, and are compatible with alumina l\, and electron beam welding is possible.

4) When a beryllium plate is directly irradiated with electron beam C, cracks occur. Even if the edge of the beryllium plate is illuminated, '+';') will be applied. A good bath can only be obtained by irradiating the edge of the helium plate or the outside of the helium plate. This method is a welding technique that can be thermally welded with 11 degrees of full bending and 1 spot ICj.
(See Figure 2).

That's all for this invention! Although the example of iq constant has been described in detail, the present invention is not limited to only one of these examples.
Without departing from the broad spirit and vision of the present invention (・1
Of course, the history of J-7 is complete.

[Brief explanation of the drawing]

, 2'i11♀1 (J Suichou Akiman) An explanatory diagram of a state in which a rectangular beryllium Li-19 plate is welded to an aluminum underframe in a square shape, and Figure 2 shows a beryllium Li9 plate and 1 also shows the relationship with the child beam irradiation position. Figure 3 shows the positive m1 of the ultra-high vacuum flange with a helidium window for radiation on the synchro 1 made by the method of the present invention.
Figure 4 is a sectional view taken along the line A--A. 1... Helium board 2... Aluminum window frame 3.
...Welding part 4...Stainless steel 1145...Kutsurado plate 6...Conflan 1 to vortex or metal: qt O-link iM7...Cold comb 1j/FK feeding part 8...Cooling 1]
Water discharge part 9...Mounting port I~hole 10...Ultra high vacuum flange a~d...Weld j length l1li! H-special 9
1911 people 1 Field Energy Physics 11) 1 Institute Director - 1 Agent Patent Attorney Akihide Sugimura,',・4,) Figure 1, b Figure 2 Figure 3 Figure 4

Claims (1)

[Claims] 1. A synchrotron characterized by welding an f% rectangular thin beryllium window plate and an aluminum cum window frame by electron beam welding to form a strong beryllium window that can withstand atmospheric pressure. Method of manufacturing radiant beryllium windows. 2. In the method according to claim 1, the thickness of the beryllium window plate is approximately 0.5 vm or less. 3. In the method according to claim 2, the thickness of the beryllium window plate is about 0.3+11 m or less. 4. In the method according to claim 1,
The shape of the window board must be a rectangular shape. 5. Use an aluminum window frame with a flat surface of about 6 microns, such as the one described in the Special Edition of the Crystal Report 1811. 64. Claim 10: Use a beryllium window plate whose edges have been polished and the C-resistance removed by Jj in the method of claim 10. 7. In the method described in claim 1, C. using an organic solvent as the beryllium window plate. 8. In the method according to claim 1, a -P aluminum window frame containing an organic solvent (v ++ q fat washing) is used. 98 Claims] According to the method described in the claim, iU electron beam welding is carried out at about 10-4 to 11-5 orr. 10. In the method of claim 1, at d'3, the acceleration voltage is about 50 to 150 KV, and the current is about! □)～8111
``Using an electron beam to 11. In the method described in claim 10, the electron beam is adjusted so as to create a groove approximately 1 inch deep in the C1-1 fulminium window frame. 12. In the method recited in claim 1, the start and end points of electron beam welding are several Ti11 away from the beryllium window plate.
'28 aluminum window frame top. 13. In the method according to claim 1, the electron beam is scanned outward in a straight line parallel to the edge of the beryllium window plate so as to pass near the corner of the beryllium window plate, so that the electron beam is scanned outwardly from the beryllium window plate. 1. The well-shaped weld bead surrounding the
q things. 14. In the method described in claim 1-13, the electron beam scans the square shape in the order of the left vertical bar of the square, the stone vertical bar, the lower horizontal frame, and the lower horizontal frame. 15. In the method described in claim +114113-
The center position of the C1 electron beam is approximately 0 on the edge of the beryllium window plate.
．． 2-0, 3 +i++ Aim outward. 16. In the method according to claim 13, the diameter of the electron beam sporae is about 2 to 3 by visual observation. 17. In the method according to claim 1, the welding speed is about 1.7 CIII per second. 18. In the method according to claim 1, a beryllium window is manufactured by welding two beryllium window plates spaced apart from each other to an aluminum window frame and evacuating the middle to create a vacuum.