JP2003270668A - Liquid crystal switch and optical modulating element for optical communication - Google Patents

Liquid crystal switch and optical modulating element for optical communication

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Publication number
JP2003270668A
JP2003270668A JP2002070308A JP2002070308A JP2003270668A JP 2003270668 A JP2003270668 A JP 2003270668A JP 2002070308 A JP2002070308 A JP 2002070308A JP 2002070308 A JP2002070308 A JP 2002070308A JP 2003270668 A JP2003270668 A JP 2003270668A
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JP
Japan
Prior art keywords
liquid crystal
transparent
switch
transparent substrate
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002070308A
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Japanese (ja)
Other versions
JP3939571B2 (en
Inventor
Tatatomi Sadaoka
忠臣 定岡
Akihiro Sato
顕博 佐藤
Yoshihiro Morifuji
義広 盛藤
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Nanox Corp
Original Assignee
Nanox Corp
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Publication of JP3939571B2 publication Critical patent/JP3939571B2/en
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Expired - Fee Related legal-status Critical Current

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Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid crystal switch which realizes exact light modulation control or deflection control without bringing about diffused reflection due to laser light and to provide a manufacturing method therefor and an optical modulating element (for communication) using the same. <P>SOLUTION: Two transparent substrates which have transparent conductive films formed on surfaces thereof and have liquid crystal alignment layers formed on the transparent conductive films are arranged so that the liquid crystal alignment layers may face each other, and a liquid crystal which horizontally aligns the alignment layer formed on one transparent substrate in one direction and horizontally aligns the alignment layer formed on the other transparent substrate in a direction opposite to the alignment direction of the alignment layer on one transparent substrate and satisfies Δn≥0.2 and 1.5≤Δn×d≤4 (d is the distance (mm) between two transparent substrates) is sealed in a seal part 2 provided with an outward extended projecting part 2a in the vicinity of a liquid crystal injection aperture between the substrates. <P>COPYRIGHT: (C)2003,JPO

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、光の散乱のないこ
とが求められる通信用の液晶素子に関し、特にレーザビ
ームを用いる通信用液晶スイッチ及び光変調素子に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal device for communication which is required not to scatter light, and more particularly to a liquid crystal switch and a light modulating device for communication using a laser beam.

【0002】[0002]

【従来の技術】従来の通信用液晶スイッチとしては、通
常のTN型液晶ディスプレイとして2枚のガラス基板間
に液晶を配置した素子を用いることがあった。
2. Description of the Related Art As a conventional communication liquid crystal switch, an element in which liquid crystal is arranged between two glass substrates has been used as a normal TN type liquid crystal display.

【0003】通信用液晶スイッチは、2枚の透明基板の
間に液晶を配置して、入射するレーザ光の直線偏光の度
合いを変えることができる。
The communication liquid crystal switch can arrange a liquid crystal between two transparent substrates to change the degree of linear polarization of incident laser light.

【0004】また、通信用液晶光変調素子は、2枚の前
記液晶スイッチを重ねて一組として用いて、該スイッチ
の第1の液晶スイッチに入射するレーザ光の円偏光を直
線偏光に変え、あるいはレーザ光の波長を変調して第2
の液晶スイッチを電圧印加しておくことで、第2の液晶
スイッチから出射するレーザ光の出射方向を変えること
ができる。
Further, in the liquid crystal light modulating element for communication, the two liquid crystal switches are stacked and used as a set, and the circularly polarized light of the laser light incident on the first liquid crystal switch of the switch is converted into the linearly polarized light, Alternatively, by modulating the wavelength of the laser light, the second
By applying a voltage to the liquid crystal switch, the emitting direction of the laser light emitted from the second liquid crystal switch can be changed.

【0005】上記の光変調素子に入射させるレーザビー
ムは直径1mm以下であることから、レーザを入射させ
る面積は小さくて良いので、光変調デバイスとして小型
化を一層図る上で、液晶スイッチ自体のサイズは小さい
ものが望まれている。
Since the diameter of the laser beam incident on the above light modulation element is 1 mm or less, the area on which the laser is incident may be small. Therefore, in order to further miniaturize the light modulation device, the size of the liquid crystal switch itself. Is desired to be small.

【0006】ところで、例えば縦10mm横30mm程
度の大きさの文字表示用に用いられる従来技術の液晶を
封入した液晶素子では、表示領域となる液晶封入面積が
比較的大きく、その場合、透明基板間に設けた液晶のシ
ール部で囲まれた空間に液晶を封入することはそれほど
困難でなかった。また液晶を封入した後の密封空間を形
成する2枚のガラス板などの透明基板の距離(ギャッ
プ)は、その中にガラス製あるいは樹脂製の球体(スぺ
ーサー)を介在させることにより保っていた。
By the way, in a liquid crystal element in which a liquid crystal of a conventional technique used for displaying characters having a size of, for example, 10 mm in length and 30 mm in width is filled with a liquid crystal as a display area, the area between the transparent substrates is relatively large. It was not so difficult to fill the liquid crystal in the space surrounded by the liquid crystal seal provided in the above. The distance (gap) between the transparent substrates such as two glass plates forming a sealed space after the liquid crystal is sealed is maintained by interposing glass or resin spheres (spacers) therein. It was

【0007】[0007]

【発明が解決しようとする課題】前述したように従来の
液晶スイッチは透明基板間に液晶を封止して作製される
が、液晶層の厚さを一定に保つための前記表示用素子に
用いられているスペーサーを用いると入射したレーザー
がスペーサーにより散乱されてしまい、厳密な光の変調
制御または偏向制御ができないことが問題点としてあっ
た。
As described above, the conventional liquid crystal switch is manufactured by sealing the liquid crystal between the transparent substrates, and is used for the display element for keeping the thickness of the liquid crystal layer constant. When the spacers used are used, the incident laser is scattered by the spacers, and there is a problem that strict light modulation control or deflection control cannot be performed.

【0008】また、液晶素子の前記密封空間が、例えば
1cm平方程度以下と小さくなると、密封区間に液晶を
注入封止するに際して液晶注入口に設ける封止剤は液晶
と混入したり、またギャップを密封空間の各部で一定に
保つことが困難であるという問題があった。とりわけ、
密封空間での場所による不揃いのないスペーサを用いな
いで液晶表示を製造することは困難であった。
Further, when the sealed space of the liquid crystal element is reduced to, for example, about 1 cm square or less, the sealant provided in the liquid crystal injection port for injecting and sealing the liquid crystal into the sealed section mixes with the liquid crystal or has a gap. There is a problem that it is difficult to keep constant in each part of the sealed space. Above all,
It was difficult to manufacture a liquid crystal display without using spacers that are not uneven depending on the location in the sealed space.

【0009】本発明の課題は、レーザ光により乱反射が
生じないで、厳密な光の変調制御または偏向制御が可能
な液晶スイッチ、とりわけサイズが小さい液晶スイッチ
とその製造方法及び該液晶スイッチを用いた光変調素子
を提供することである。
An object of the present invention is to use a liquid crystal switch capable of performing precise light modulation control or deflection control without irregular reflection due to laser light, especially a small size liquid crystal switch, its manufacturing method, and the liquid crystal switch. An object of the present invention is to provide a light modulation element.

【0010】[0010]

【課題を解決するための手段】本発明の上記課題は次の
構成(1)(2)(3)により解決される。 (1)表面に透明導電膜を形成し、前記透明導電膜に液
晶配向膜をそれぞれ形成した2枚の透明基板を、前記液
晶配向膜が互いに対向するように配置し、それら基板間
に正の誘電異方性を有する液晶を封入し、前記透明導電
膜間に電圧を印加することにより入力光の透過率を制御
する液晶スイッチにおいて、前記液晶として、その正常
光と異常光の屈折率差△nとし、透明基板間の距離をd
(mm)としたとき、△n・dの値が1.5≦△n・d
≦4であり、電圧無印加時に、一方の透明基板に形成し
た液晶配向膜を一方向に水平配向し、他方の透明基板に
形成した液晶配向膜を前記一方の透明基板の液晶配向膜
の配向方向とは逆方向に水平配向させた液晶スイッチ。
The above-mentioned problems of the present invention can be solved by the following constitutions (1), (2) and (3). (1) Two transparent substrates, each having a transparent conductive film formed on its surface and a liquid crystal alignment film formed on the transparent conductive film, are arranged so that the liquid crystal alignment films face each other, and a positive electrode is provided between the substrates. In a liquid crystal switch in which a liquid crystal having a dielectric anisotropy is sealed and a voltage is applied between the transparent conductive films to control the transmittance of input light, a difference in refractive index between normal light and extraordinary light is used as the liquid crystal. n, and the distance between the transparent substrates is d
(Mm), the value of Δn · d is 1.5 ≦ Δn · d
≦ 4, and when no voltage is applied, the liquid crystal alignment film formed on one transparent substrate is horizontally aligned in one direction, and the liquid crystal alignment film formed on the other transparent substrate is aligned in the liquid crystal alignment film of the one transparent substrate. A liquid crystal switch that is horizontally aligned in the opposite direction.

【0011】2枚の透明基板に形成した液晶配向膜を互
いに逆向きに水平配向させたので、液晶層の厚み方向
(基板間方向)に存在する全ての液晶を確実に一定方向
に配向することができるという作用効果が得られる。水
平配向の角度のずれθは、±2度以下とするのが好まし
い。これを超えると電圧印加時の光透過率が低下すると
いう不具合を生じ、また配列に不連続部分が生じるので
好ましくない。θは、±0.5度以下とするのが更に好
ましい。
Since the liquid crystal alignment films formed on the two transparent substrates are horizontally aligned in opposite directions to each other, all liquid crystals existing in the thickness direction of the liquid crystal layer (direction between the substrates) are surely aligned in a fixed direction. It is possible to obtain the action and effect. The angle deviation θ of the horizontal orientation is preferably ± 2 degrees or less. If it exceeds this range, there is a problem that the light transmittance upon application of a voltage is lowered, and a discontinuous portion is generated in the array, which is not preferable. It is more preferable that θ be ± 0.5 degrees or less.

【0012】水平配向で正方向の配向とするのは、液晶
層内で不連続配列が生じるという不都合が生じる。
The horizontal orientation in the positive direction has a disadvantage that a discontinuous alignment occurs in the liquid crystal layer.

【0013】また、2枚の透明基板間の距離をd(m
m)としたとき、△n・dの値を1.5≦△n・d≦4
とすることが必要であるが、△n・dの値が1.5未満
であると光波長変調の制御範囲が狭くなるので好ましく
ない。また△n・dの値が4を超えると、液晶を垂直配
向させる応答スピード、また液晶のスイッチングスピー
ドが低下するので好ましくない。本発明をレーザー光を
用いるスイッチ光通信用のデバイスとして用いるのに好
ましいスイッチングスピードは1msec程度である。
Further, the distance between the two transparent substrates is d (m
m), the value of Δn · d is 1.5 ≦ Δn · d ≦ 4
However, if the value of Δn · d is less than 1.5, the control range of optical wavelength modulation becomes narrow, which is not preferable. Further, if the value of Δn · d exceeds 4, the response speed for vertically aligning the liquid crystal and the switching speed of the liquid crystal decrease, which is not preferable. A preferred switching speed for using the present invention as a device for switched optical communication using laser light is about 1 msec.

【0014】また、前記液晶は、ネマチック液晶または
コレステリック液晶からなり、その正常光と異常光の屈
折率差△nを0.2以上とすることが望ましい。液晶の
正常光と異常光の屈折率差△nを0.2以上とすること
により、ギャップを大きくすることなく、△n・dを大
きくできるという効果が得られる。好ましくは0.25
以上である。
Further, the liquid crystal is made of nematic liquid crystal or cholesteric liquid crystal, and it is desirable that the difference Δn in refractive index between normal light and extraordinary light is 0.2 or more. By setting the refractive index difference Δn between the normal light and the extraordinary light of the liquid crystal to be 0.2 or more, it is possible to obtain an effect that Δn · d can be increased without increasing the gap. Preferably 0.25
That is all.

【0015】2枚の透明基板間の距離d(ギャップ)
は、前記基板間に液晶を密封するための基板間の周辺部
に設けられた樹脂製の液晶注入用開口を有するシール部
で確保され、前記シール部には、前記開口の近傍に外側
に向かう張り出し部を設けることが望ましい。
Distance d (gap) between two transparent substrates
Is secured by a seal portion having a liquid crystal injection opening made of resin provided in the peripheral portion between the substrates for sealing the liquid crystal between the substrates, and the seal portion is directed to the outside in the vicinity of the opening. Providing an overhang is desirable.

【0016】液晶注入用開口を樹脂封止した時に生ずる
樹脂の収縮により、注入口近傍ではギャップが変動す
る。この反りは液晶封入空間(液晶スイッチ動作部)の
基板間の距離(ギャップ)を局部的に小さくする。この
ギャップの変動が生じると、場所により波長変調あるい
は偏向の大きさにバラツキを生じさせる。前記開口の近
傍に設けられた外側に向かう張り出し部の存在で樹脂封
止剤が内部に入らなかったり、樹脂封止剤のUV硬化前
に、UV照射時に受ける熱により液晶が膨張して樹脂封
止剤の戻り現象(封止剤がシール部外へ出ていく)を起
こすという不具合がある。
Due to the contraction of the resin that occurs when the liquid crystal injection opening is sealed with the resin, the gap changes near the injection port. This warpage locally reduces the distance (gap) between the substrates in the liquid crystal enclosed space (liquid crystal switch operating unit). When the gap fluctuates, the magnitude of wavelength modulation or deflection varies depending on the location. The resin encapsulant does not enter the inside due to the presence of an outwardly protruding portion provided near the opening, or the liquid crystal expands due to the heat received during UV irradiation before the resin encapsulant is cured by UV, and the resin encapsulant is sealed. There is a problem that the phenomenon of return of the stopper (the sealant goes out of the seal part) occurs.

【0017】また、前記液晶注入用開口の外側に向かう
張り出し部は、開口幅が外方向に向かって狭くなる形状
を有し、その幅方向ほぼ中央にストッパが設けられるこ
とが望ましい。
Further, it is preferable that the projecting portion toward the outside of the liquid crystal injection opening has a shape in which the opening width becomes narrower toward the outside, and a stopper is provided at approximately the center in the width direction.

【0018】前記液晶注入用開口の外側に向かう張り出
し部の開口幅が外方向に向かって狭くなる形状であるこ
とと、その幅方向ほぼ中央にストッパが設けられること
で、樹脂封入剤が内部に侵入して液晶と混ざることが無
くなる。
Since the opening width of the projecting portion toward the outside of the liquid crystal injection opening is narrowed toward the outside and the stopper is provided at substantially the center in the width direction, the resin encapsulant is provided inside. It will not invade and mix with the liquid crystal.

【0019】液晶注入用開口の幅方向の長さをw(m
m)とし、シール部の液晶注入用開口が設けられている
辺の長さをW(mm)とすると、 0.5≦w≦2.0 w/W≦0.1 5≦W≦10 なる関係があることが望ましい。
The length in the width direction of the liquid crystal injection opening is w (m
m) and the length of the side of the seal portion where the liquid crystal injection opening is provided is W (mm): 0.5 ≦ w ≦ 2.0 w / W ≦ 0.1 5 ≦ W ≦ 10 It is desirable to have a relationship.

【0020】液晶注入用開口の幅方向の寸法wと液晶封
入空間の液晶注入用開口が設けられているシール部の辺
の長さWが上記関係にあるとサイズが小さい液晶密封空
間内に気泡を生じることなく更に確実迅速に液晶を充填
注入できる。また、液晶注入用開口の封入用の樹脂が封
止時に内部へ侵入するのを防止することができる。
If the dimension w in the width direction of the liquid crystal injection opening and the length W of the side of the seal portion of the liquid crystal filling space where the liquid crystal injection opening is provided have the above-mentioned relationship, bubbles will be generated in the small liquid crystal sealed space. It is possible to fill and inject the liquid crystal more surely and quickly without causing the occurrence. Further, it is possible to prevent the resin for filling the liquid crystal injection opening from entering the inside during the sealing.

【0021】液晶注入用開口の幅wが0.5mm未満で
あると液晶の注入に時間がかかりすぎる。また液晶注入
用開口の幅wが2mmを超えると封止剤が液晶注入用開
口から入りすぎ、液晶にレーザーを当てたとき光変調の
むらができる。
If the width w of the liquid crystal injection opening is less than 0.5 mm, it takes too much time to inject the liquid crystal. Further, when the width w of the liquid crystal injection opening exceeds 2 mm, the sealant enters too much from the liquid crystal injection opening, which causes uneven light modulation when a laser is applied to the liquid crystal.

【0022】前記w/Wが0.1を超えると封止剤の開
口部での引き込みを行いにくくなり、封止部が薄いと液
晶漏れが生じるという不具合がある。
If the w / W exceeds 0.1, it becomes difficult to draw in the sealant at the opening, and if the seal is thin, liquid crystal leakage occurs.

【0023】また液晶注入用開口が設けられているシー
ル部の辺の長さWが、5mm未満であると光照射して光
変調する有効面積が小さくなり、前記Wが10を超える
とスペーサーを用いないで光の散乱を抑えながらギャッ
プを維持するのが困難になる。
If the length W of the side of the seal portion provided with the liquid crystal injection opening is less than 5 mm, the effective area for light irradiation and light modulation becomes small, and if W exceeds 10, the spacer is not used. Without it, it becomes difficult to maintain the gap while suppressing the light scattering.

【0024】また、シール部の辺に、該シール部の辺よ
り外側に向かう突起部を一以上形成することが望まし
い。とりわけ、液晶注入用開口がある部位の反対側(外
部接続用ピンの端子取り付け側)に設けるのがより好ま
しい。
Further, it is desirable to form one or more protrusions on the sides of the seal portion, the protrusions extending outward from the sides of the seal portion. In particular, it is more preferable to provide it on the side opposite to the part having the liquid crystal injection opening (on the side where the external connection pin is attached to the terminal).

【0025】前記突起部によりUV硬化樹脂の硬化収縮
により前記開口がある部位の反対側のシール部のセルの
中央部が窪むことがなくなり、透明基板間のギャップの
変動防止効果がある。このように基板間距離をスペーサ
を入れなくても全体にわたって透明基板間のギャップを
均一に保つことができるため、入射したレーザ光の散乱
ロスを小さくすることができる。
The protrusion prevents the center portion of the cell of the seal portion opposite to the portion having the opening from being depressed due to the curing shrinkage of the UV curable resin, and has the effect of preventing the variation of the gap between the transparent substrates. In this way, since the gap between the transparent substrates can be kept uniform over the entire substrate without inserting a spacer, the scattering loss of the incident laser light can be reduced.

【0026】(2)前記液晶スイッチを2個一組で平行
に重ねるように配置し、電圧無印加時における第1の液
晶スイッチの液晶の水平配向方向と第2の液晶スイッチ
の液晶の水平配向方向のなす角度が大略45度とした光
変調素子。
(2) The two liquid crystal switches are arranged in parallel so as to be stacked in parallel, and the horizontal alignment direction of the liquid crystal of the first liquid crystal switch and the horizontal alignment of the liquid crystal of the second liquid crystal switch when no voltage is applied. A light modulation element in which the angle formed by the directions is approximately 45 degrees.

【0027】第1の液晶スイッチで入射光を円偏光を直
線偏光とするとともに、その波長と印加電圧に応じた波
長を調整し、第2の液晶スイッチで出力光の出射方向を
変化させることができる。
The first liquid crystal switch can change the incident light into a circularly polarized light into a linearly polarized light, adjust the wavelength and the wavelength according to the applied voltage, and the second liquid crystal switch can change the outgoing direction of the output light. it can.

【0028】こうして本発明の光変調素子は、レーザ光
の波長の波長変調と偏向を行うことができ、通信のバリ
エーションを多くすることができる。
In this way, the light modulation element of the present invention can perform wavelength modulation and deflection of the wavelength of the laser light, and can increase communication variations.

【0029】第1の液晶スイッチの液晶の水平配向方向
と第2の液晶スイッチの液晶の水平配向方向のなす角度
が大略45度とすることで、光変調を効果的に行うこと
ができる。
By making the angle between the horizontal alignment direction of the liquid crystal of the first liquid crystal switch and the horizontal alignment direction of the liquid crystal of the second liquid crystal switch approximately 45 degrees, the light modulation can be effectively performed.

【0030】(3)2枚の透明基板の表面に透明導電膜
を形成した後、前記透明導電膜上に液晶配向膜を形成
し、電圧無印加時に一方の透明基板の液晶配向膜を一方
向に水平配向させ、他方の透明基板の液晶配向膜を前記
一方の透明基板の液晶配向膜の配向方向とは逆方向に水
平配向させ、次いで、2枚の透明基板の少なくとも一方
の透明基板に液晶注入用開口を有するシール部を形成
し、前記2枚の透明基板を貼り合わせて前記シール部に
より液晶密封空間を区画し、前記液晶注入口から基板間
に正の誘電異方性を有する液晶を密封する液晶スイッチ
の作製方法。
(3) After forming a transparent conductive film on the surfaces of two transparent substrates, a liquid crystal alignment film is formed on the transparent conductive film, and the liquid crystal alignment film on one transparent substrate is unidirectionally applied when no voltage is applied. Horizontally, the liquid crystal alignment film of the other transparent substrate is horizontally aligned in the direction opposite to the alignment direction of the liquid crystal alignment film of the one transparent substrate, and then the liquid crystal is applied to at least one of the two transparent substrates. A seal portion having an injection opening is formed, the two transparent substrates are attached to each other to define a liquid crystal sealed space, and a liquid crystal having a positive dielectric anisotropy is provided between the liquid crystal injection port and the substrate. A method for manufacturing a liquid crystal switch to be sealed.

【0031】前述のように2枚の透明基板に形成した液
晶配向膜を互いに逆向きに水平配向させたので、液晶層
の厚み方向(基板間方向)に存在する全ての液晶を確実
に一定方向に配向することができるという効果が得られ
る。水平配向の角度のずれθは、±2度以下とするのが
好ましい。ずれθがこれを超えると電圧印加時の光透過
率が低下するという不具合を生じ、また、配列に不連続
部分が生じるので好ましくない。ずれθは、±0.5度
以下とするのが更に好ましい。水平配向で正方向の配向
とするのは、液晶層内で不連続配列が生じるという不都
合が生じるからである。
As described above, since the liquid crystal alignment films formed on the two transparent substrates are horizontally aligned in the opposite directions to each other, all liquid crystals existing in the thickness direction of the liquid crystal layer (direction between the substrates) can be surely directed in a fixed direction. The effect of being able to orient the film is obtained. The angle deviation θ of the horizontal orientation is preferably ± 2 degrees or less. If the deviation θ exceeds this, there is a problem that the light transmittance upon application of a voltage decreases, and a discontinuous portion occurs in the array, which is not preferable. The deviation θ is more preferably ± 0.5 degrees or less. The reason why the horizontal orientation is the positive orientation is that a disadvantage that discontinuous alignment occurs in the liquid crystal layer occurs.

【0032】また、2枚の透明基板の配向膜を互いに逆
向きに行う水平配向処理は、ラビング処理により行い、
そのラビング方向を逆向きに回転する布を押し当てて行
うことが望ましい。数ある配向処理方法の中で円筒状の
回転体にラシャ布を巻き付けて回転体を回転させながら
こするラビング処理法を採用することで、確実にかつ略
均一にポリイミドなどの配向膜に方向溝をつけることが
できるという利点がある。
Further, the horizontal alignment process for making the alignment films of the two transparent substrates in mutually opposite directions is performed by a rubbing process,
It is desirable to press a cloth that rotates in the rubbing direction in the opposite direction. Among the many alignment treatment methods, by adopting a rubbing treatment method in which a lathe cloth is wrapped around a cylindrical rotating body and is rubbed while rotating the rotating body, it is possible to surely and substantially uniformly form a directional groove on an alignment film such as polyimide. There is an advantage that can be attached.

【0033】さらに、前記シール部の液晶注入用開口の
断面積が液晶密封空間内部方向に行くに従い大きくなる
ように形成することで、透明基板に反りが発生すること
を防止できる。
Further, since the cross-sectional area of the liquid crystal injecting opening of the seal portion is formed so as to increase toward the inside of the liquid crystal hermetically sealed space, it is possible to prevent the transparent substrate from warping.

【0034】また、前記シール部の形成と同時に液晶注
入用開口の幅方向略中央でシール部の内側線より外側
で、かつ外側線より内側にストッパを形成することでシ
ール部内に注入した液晶がシール部の外方に漏れ出るお
それがなくなる。
Further, at the same time as the formation of the seal portion, a stopper is formed outside the inner line of the seal portion and inside the outer portion of the liquid crystal injecting opening substantially at the center in the width direction so that the liquid crystal injected into the seal portion is prevented. There is no risk of leakage to the outside of the seal.

【0035】また、前記液晶の密封を、透明基板を加圧
して途明基板間の距離を減ずる工程、液晶注入用開口に
液晶封止樹脂を前記加圧下で塗布する工程、透明基板へ
の加圧を減ずる工程、液晶封止樹脂を硬化する工程の各
工程を順次経由することにより、サイズが小さい液晶密
封空間に気泡を生じることなく、かつ確実に充填注入で
きる。
Further, the liquid crystal is sealed by applying pressure to the transparent substrate to reduce the distance between the transparent substrates, applying liquid crystal sealing resin to the liquid crystal injection opening under the pressure, and applying the liquid crystal to the transparent substrate. By sequentially passing through the steps of reducing the pressure and hardening the liquid crystal sealing resin, it is possible to reliably fill and inject the liquid crystal sealed space having a small size without generating bubbles.

【0036】[0036]

【発明の実施の形態】本発明の実施の形態について図面
と共に説明する。
BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described with reference to the drawings.

【0037】まず、液晶スイッチの作製方法について図
2と共に説明する。 工程1. 透明導電膜付きガラス板の準備:700Ω/
平方のITO透明導電膜を被覆した0.7mm厚のガラ
ス板(コーニング社製7059ガラス)を準備した。
First, a method of manufacturing the liquid crystal switch will be described with reference to FIG. Step 1. Preparation of glass plate with transparent conductive film: 700Ω /
A 0.7 mm thick glass plate (7059 glass manufactured by Corning Co., Ltd.) coated with a square ITO transparent conductive film was prepared.

【0038】工程2. ITO電極のパターニング:I
TO透明導電膜を、所定形状に塩酸を主成分とするエッ
チング水溶液を用いるフォトリソグラフ法により電極形
成して透明基板とした。
Step 2. Patterning of ITO electrode: I
The TO transparent conductive film was formed into an electrode by a photolithography method using an etching aqueous solution containing hydrochloric acid as a main component in a predetermined shape to obtain a transparent substrate.

【0039】工程3. 液晶配向膜の形成:ITO電極
形成した面にポリイミド前駆体溶液を塗布して、約25
0℃に30分加熱してポリイミド重合体膜とした。液晶
配向膜は、このポリイミド膜の表面に黒色ラシャ布を巻
いた回転体を回転、移動させながら押し当ててポリイミ
ド膜表面に一定方向に溝を形成する方法を採用した。ア
ンカリング(液晶に対する配向膜の規制力)が強い配向
処理(表1に「強」で表示)は回転体の回転速度を17
00rpm、10mm/秒で1スキャンで行い、アンカ
リングの弱い例(表1に「弱」で表示)として、430
rpm、30秒、1スキャンで行った。配向膜を形成し
たガラス基板を2枚一組で四種類の液晶用に作製した。
液晶A〜Dはいずれもネマティック液晶であって、表1
に示す△nとなるように試作したものを用いた。
Step 3. Formation of liquid crystal alignment film: A polyimide precursor solution is applied to the surface on which the ITO electrode is formed,
It was heated at 0 ° C. for 30 minutes to form a polyimide polymer film. For the liquid crystal alignment film, a method of forming a groove in a certain direction on the surface of the polyimide film by pressing while rotating and moving a rotating body of a black Rasha cloth wound on the surface of the polyimide film was adopted. Alignment treatment with strong anchoring (regulatory force of the alignment film against the liquid crystal) (shown as “strong” in Table 1) increases the rotational speed of the rotating body by 17
430 as an example of weak anchoring (indicated as “weak” in Table 1) at 1 rpm at 00 rpm and 10 mm / sec.
It was carried out at 1 scan for 30 seconds at rpm. Two glass substrates with the alignment film formed were prepared for four types of liquid crystals.
Liquid crystals A to D are all nematic liquid crystals, and are shown in Table 1.
A prototype was used so as to have Δn shown in.

【0040】工程4. シール部の形成:一方のガラス
基板にエポキシ樹脂(三井東圧化学(株)製商品名:ス
トラクトボンドXN−21S)を所定形状にスクリーン
印刷法により印刷した。スクリーン印刷により、図1の
平面図に示すように、一方のガラス基板1に液晶を密封
区画するための液晶注入用の開口と外方に向けて狭くな
る張り出し部2aを有するシール部2とストッパ3を同
時に印刷した。液晶注入用開口の幅方向の寸法wは1.
25mmとし、液晶封入空間の液晶注入用開口が設けら
れているシール部の辺の長さをWを10mmシールの幅
w1を1.0mmとしたので、サイズが小さい液晶密封
空間内に気泡を生じることなく更に確実迅速に充填注入
できる。さらに、液晶注入用開口のあるシール部2の辺
とは反対側の長辺に一対の突起部2bを設けている。こ
うして、外方に向けて狭くなる前記張り出し部2aと一
対の前記突起部2bにより、シール部2の反りが無くな
り、基板間にスペーサを設けなくても基板間のギャップ
の均一性が保持できる。
Step 4. Formation of seal part: Epoxy resin (trade name: Struct Bond XN-21S manufactured by Mitsui Toatsu Chemicals, Inc.) was printed on one glass substrate in a predetermined shape by a screen printing method. As shown in the plan view of FIG. 1, by screen printing, a seal portion 2 having a liquid crystal injection opening for hermetically partitioning the liquid crystal in one glass substrate 1 and a protruding portion 2a narrowing outward and a stopper. 3 were printed simultaneously. The width w of the liquid crystal injection opening is 1.
Since the length of the side of the seal portion in which the liquid crystal injection space of the liquid crystal filled space is 25 mm is set to 25 mm and the width w1 of the seal is set to 1.0 mm, bubbles are generated in the liquid crystal sealed space having a small size. The filling and injecting can be performed more surely and quickly without using. Further, a pair of protrusions 2b is provided on the long side opposite to the side of the seal portion 2 having the liquid crystal injection opening. In this manner, the protrusion 2a and the pair of protrusions 2b that become narrower toward the outside eliminate warpage of the seal portion 2, and the uniformity of the gap between the substrates can be maintained without providing a spacer between the substrates.

【0041】工程5. 貼り合わせ:2枚のガラス基板
をシール部2を介して貼り合わせ、150℃、90分の
シール部材の加熱硬化により、液晶密封区画を有する液
晶セルとした。液晶セルの基板間距離は、11.5μm
とした。
Step 5. Bonding: Two glass substrates were bonded together via the seal part 2, and the seal member was heated and cured at 150 ° C. for 90 minutes to obtain a liquid crystal cell having a liquid crystal sealed section. The distance between the substrates of the liquid crystal cell is 11.5 μm
And

【0042】工程6. 液晶の注入:本工程6.の液晶
の注入と次工程7.の液晶の封止は図5に示す加圧と減
圧状態で行う。まず、液晶セル内に、減圧可能な容器内
で液晶皿内に充填した液晶を液晶セル内に公知の方法に
より吸い上げて注入した。用いた液晶は表3の通りの屈
折率△nが0.20〜0.25の前記A〜Dの4種でネ
マチック液晶である。
Step 6. Liquid crystal injection: this step 6. 6. Liquid crystal injection and the next step 7. The liquid crystal is sealed under the pressurized and depressurized conditions shown in FIG. First, the liquid crystal filled in the liquid crystal dish in a container capable of depressurizing was sucked up and injected into the liquid crystal cell by a known method. The liquid crystal used is a nematic liquid crystal of four types A to D having a refractive index Δn of 0.20 to 0.25 as shown in Table 3.

【0043】工程7. 液晶の封止:液晶セルを減圧可
能な容器から取り出し、一方の基板から外圧を加えて基
板間距離を減じ、その状態でUV硬化樹脂ケミテック社
(株)製商品名:ケミシール5X009を封止剤として
液晶注入用の開口に塗布した。外圧力の一部を解除した
状態で前記樹脂を紫外線により重縮合硬化させた。その
後、外力を完全に取り除いた。
Step 7. Liquid crystal encapsulation: Remove the liquid crystal cell from the depressurizable container, apply external pressure from one substrate to reduce the distance between the substrates, and in that state UV curable resin Chemitech Co., Ltd. trade name: ChemiSeal 5X009 Was applied to the opening for liquid crystal injection. The resin was polycondensed and cured by ultraviolet rays with a part of the external pressure being released. After that, the external force was completely removed.

【0044】工程8. 外部入力金属ピンの取り付け:
図3(a)のシール部2のある平面を含めた液晶スイッ
チの平面図、図3(a)のA−A線矢視図である図3
(b)の液晶スイッチの側断面図に示すように2枚の透
明電極間に外部から電圧を印加するための一対の金属ピ
ン9、10を紫外線硬化型樹脂を用いてガラス板に接着
により取り付けて、液晶スイッチ部の外形寸法が10m
m×7.5mm×1.4mmの液晶スイッチを作製し
た。一方の金属ピン9は基板4の配線電極5を介してス
イッチ電極16に接続し、他方の金属ピン10は、透明
基板4上の配線電極6から導電ペースト7を介して基板
1の図示しない配線電極からスイッチ電極に接続する。
また、この液晶スイッチの電極形成部は、6mm×2.
0mmであった。得られた液晶物性値を表1に示す。ま
た当該た液晶A〜Eを用いて得られた液晶スイッチセル
のガラス板間のギャップdと△n・dの値を表2に示
す。
Step 8. External Input Metal Pin Installation:
3A is a plan view of the liquid crystal switch including a plane having the seal portion 2 of FIG. 3A, and FIG. 3A is a view taken along the line AA of FIG. 3A.
As shown in the side sectional view of the liquid crystal switch of (b), a pair of metal pins 9 and 10 for applying a voltage from the outside between two transparent electrodes are attached to a glass plate by using an ultraviolet curable resin by adhesion. And the external dimension of the liquid crystal switch is 10m
A liquid crystal switch of m × 7.5 mm × 1.4 mm was produced. One metal pin 9 is connected to the switch electrode 16 via the wiring electrode 5 of the substrate 4, and the other metal pin 10 is wired from the wiring electrode 6 on the transparent substrate 4 via the conductive paste 7 to the wiring (not shown) of the substrate 1. Connect the electrode to the switch electrode.
The electrode forming portion of this liquid crystal switch has a size of 6 mm × 2.
It was 0 mm. Table 1 shows the obtained liquid crystal physical property values. Table 2 shows the values of the gap d and Δn · d between the glass plates of the liquid crystal switch cell obtained by using the liquid crystals A to E.

【0045】[0045]

【表1】 [Table 1]

【表2】 [Table 2]

【0046】実施例1 表1に示す液晶Aを用いて、上記の工程1〜8により、
液晶スイッチを作製した。この液晶スイッチは、全体に
わたってガラス基板間距離11.5μmの均一な値を有
し、△n・dの値は表2に示すように2.31であっ
た。このように本発明のシール部2には、液晶注入用開
口の近傍に外側に向かう張り出し部2aと(突起部2
b)を設け、シール部2の形状により、ギャップ不均一
に起因するナトリウムランプ光照射時の光干渉縞がセル
表面で認められることがなく、基板間距離が均一になっ
た。直径60μm、波長1.55nmの出力0.5Wの
レーザーを入射させて、直線偏光の度合いを入射光の位
置を変えて測定したところ光波長の変調特性が得られ
た。
Example 1 Using liquid crystal A shown in Table 1, the above steps 1 to 8 were carried out.
A liquid crystal switch was produced. This liquid crystal switch had a uniform value with a glass substrate distance of 11.5 μm throughout, and the value of Δn · d was 2.31 as shown in Table 2. As described above, in the seal portion 2 of the present invention, the projecting portion 2a (protruding portion 2) extending outward in the vicinity of the liquid crystal injection opening is formed.
b) is provided, and due to the shape of the seal portion 2, the inter-substrate distance becomes uniform without the occurrence of optical interference fringes due to the nonuniformity of the gap at the time of sodium lamp light irradiation on the cell surface. When a laser having a diameter of 60 μm and a wavelength of 1.55 nm and an output of 0.5 W was made incident and the degree of linearly polarized light was measured by changing the position of the incident light, a modulation characteristic of the light wavelength was obtained.

【0047】実施例2 表1に示す液晶Bを用いて、上記の工程1〜8により、
液晶スイッチを作製した。この液晶スイッチは、全体に
わたって基板間距離11.5μmの均一な値を有し、△
n・dは表2に示すように2.79であった。直径60
μm、波長1.55nmの出力0.5Wのレーザーを入
射させて、直線偏光の度合いを入射光の位置を変えて測
定したところ実施例1とほぼ同じ光波長の変調特性が得
られた。
Example 2 Using the liquid crystal B shown in Table 1, the above steps 1 to 8 were carried out.
A liquid crystal switch was produced. This liquid crystal switch has a uniform value with a substrate-to-substrate distance of 11.5 μm throughout, and Δ
n · d was 2.79 as shown in Table 2. Diameter 60
When a laser having a wavelength of 1.55 nm and an output of 0.5 W was incident and the degree of linearly polarized light was measured by changing the position of the incident light, the same modulation characteristic of the light wavelength as in Example 1 was obtained.

【0048】実施例3 表1に示す液晶Cを用いて、上記の工程1〜8により、
液晶スイッチを作製した。この液晶スイッチは、全体に
わたって基板間距離11.5μmの均一な値を有し、△
n・dは表2に示すように2.86であった。直径60
μm、波長1.55nmの出力0.5Wのレーザーを入
射させて、直線偏光の度合いを入射光の位置を変えて測
定したところ実施例1とほぼ同じ光波長の変調特性が得
られた。
Example 3 Using the liquid crystal C shown in Table 1, the above steps 1 to 8 were repeated.
A liquid crystal switch was produced. This liquid crystal switch has a uniform value with a substrate-to-substrate distance of 11.5 μm throughout, and Δ
n · d was 2.86 as shown in Table 2. Diameter 60
When a laser having a wavelength of 1.55 nm and an output of 0.5 W was incident and the degree of linearly polarized light was measured by changing the position of the incident light, the same modulation characteristic of the light wavelength as in Example 1 was obtained.

【0049】実施例4 表1に示す液晶Dを用いて、上記の工程1〜8により、
液晶スイッチを作製した。この液晶スイッチは、全体に
わたって基板間距離11.5μmの均一な値を有し、△
n・dは表2に示すように2.92であった。直径60
μm、波長1.55nmの出力0.5Wのレーザーを入
射させて、直線偏光の度合いを入射光の位置を変えて測
定したところ実施例1とほぼ同じ光波長の変調特性が得
られた。
Example 4 Using liquid crystal D shown in Table 1, the above steps 1 to 8 were carried out.
A liquid crystal switch was produced. This liquid crystal switch has a uniform value with a substrate-to-substrate distance of 11.5 μm throughout, and Δ
n · d was 2.92 as shown in Table 2. Diameter 60
When a laser having a wavelength of 1.55 nm and an output of 0.5 W was incident and the degree of linearly polarized light was measured by changing the position of the incident light, the same modulation characteristic of the light wavelength as in Example 1 was obtained.

【0050】実施例5 実施例1で作製した2個の液晶スイッチを1組とする光
変調素子を作製した。この光変調素子は、図C4に示す
ように、第1の液晶スイッチ13と第2の液晶スイッチ
14を、それぞれの電圧無印加時の液晶の水平配向方向
がほぼ45度となるような位置関係になるように貼り合
わせることにより作製した。この光変調素子に、直径6
0μm、波長1.55nmの出力0.5Wのレーザーを
第1の液晶スイッチ14側から入射させ、第2の液晶ス
イッチから出射するレーザ光の波長および出射方向を調
べた。第1の液晶スイッチ14の印加電圧を変えること
により円偏光を直線偏光にするとともに、その波長又は
位相を変えることができることが確認された。また、第
2の液晶スイッチ14に印加する電圧を変えることによ
り光の出射方向を変化させることを確認した。
Example 5 An optical modulator including the two liquid crystal switches produced in Example 1 as a set was produced. In this light modulation element, as shown in FIG. C4, the first liquid crystal switch 13 and the second liquid crystal switch 14 are placed in such a positional relationship that the horizontal alignment direction of the liquid crystal is approximately 45 degrees when no voltage is applied to each. It was manufactured by laminating so that This light modulator has a diameter of 6
A laser with an output of 0.5 W having a wavelength of 1.5 μm and a wavelength of 0.5 μm was made incident from the first liquid crystal switch 14 side, and the wavelength and the emission direction of the laser light emitted from the second liquid crystal switch were examined. It was confirmed that by changing the voltage applied to the first liquid crystal switch 14, the circularly polarized light can be changed to linearly polarized light and its wavelength or phase can be changed. Moreover, it was confirmed that the light emission direction was changed by changing the voltage applied to the second liquid crystal switch 14.

【0051】実施例6 表1に示す、専ら画像表示用に用いられる液晶E(△n
=0.139、旭電化工業(株)製商品名:ADK−9
051C)を用いたことと、基板間距離を7μmとした
ことを除いて、実施例1と同じようにして上記の工程1
〜8により、液晶スイッチを作製した。この液晶スイッ
チは、液晶スイッチの大きさが小さいにもかかわらず全
体にわって基板間距離7μmの均一な値を有していた。
すなわち、ナトリウムランプ光でガラス表面を照射した
ところ、ギャップ不均一に起因する光干渉縞がセル表面
で観察されることがなかった。
Example 6 As shown in Table 1, a liquid crystal E (Δn
= 0.139, product name: Asahi Denka Kogyo KK: ADK-9
No. 051C) was used and the distance between the substrates was 7 μm, and the above Step 1 was performed in the same manner as in Example 1.
The liquid crystal switch was produced by This liquid crystal switch had a uniform value with a substrate-to-substrate distance of 7 μm throughout, though the size of the liquid crystal switch was small.
That is, when the glass surface was irradiated with sodium lamp light, optical interference fringes due to the nonuniformity of the gap were not observed on the cell surface.

【0052】比較例1 液晶を密封区画するシールとして、張り出し部2bがな
いシール部2を形成したこと以外は、実施例1と同じよ
うにして、上記の工程1〜8により液晶スイッチを作製
した。この液晶スイッチはガラス表面にナトリウムラン
プ光を照射すると、干渉縞が視認されギャップが不均一
であった(凹んでいた)。この液晶スイッチに、直径6
0μm、波長1.55nmの出力0.5Wのレーザーを
入射させて、直線偏光の度合いを入射光の位置を変えて
測定したところ、入射位置により光変調の特性がばらつ
いていることが判明した。これは突起部2bがないシー
ル部2であるために基板間距離が全体に均一にならなか
ったためと考えられる。
Comparative Example 1 A liquid crystal switch was manufactured by the above steps 1 to 8 in the same manner as in Example 1 except that the seal portion 2 having no protruding portion 2b was formed as a seal for hermetically partitioning the liquid crystal. . When the glass surface of this liquid crystal switch was irradiated with sodium lamp light, interference fringes were visually recognized and the gap was nonuniform (it was concave). This LCD switch has a diameter of 6
When a laser of 0 μm and a wavelength of 1.55 nm and an output of 0.5 W was made incident and the degree of linearly polarized light was measured by changing the position of incident light, it was found that the characteristics of light modulation varied depending on the incident position. It is considered that this is because the distance between the substrates was not uniform as a whole because the seal portion 2 did not have the protruding portion 2b.

【0053】[0053]

【発明の効果】本発明によれば、レーザ光により乱反射
が生じないで、厳密な光の波長変調制御または偏向制御
が可能な液晶スイッチ及び該液晶スイッチを用いた光変
調素子を得ることができる。
According to the present invention, it is possible to obtain a liquid crystal switch capable of strict wavelength modulation control or deflection control of light without causing irregular reflection by laser light and a light modulation element using the liquid crystal switch. .

【図面の簡単な説明】[Brief description of drawings]

【図1】 本発明の液晶スイッチ作製工程での透明基板
上に設けられるシール部の平面図である。
FIG. 1 is a plan view of a seal portion provided on a transparent substrate in a liquid crystal switch manufacturing process of the present invention.

【図2】 本発明の液晶スイッチ作製プログラムであ
る。
FIG. 2 is a program for producing a liquid crystal switch of the present invention.

【図3】 本発明の液晶スイッチのシール部を含む面の
平面図(図3(a))と図3(a)のA−A線断面視図
(図3(b))。
3 is a plan view (FIG. 3A) of a surface including a seal portion of the liquid crystal switch of the present invention and a sectional view taken along line AA of FIG. 3A (FIG. 3B).

【図4】 本発明の光変調素子の構造図である。FIG. 4 is a structural diagram of a light modulation element of the present invention.

【図5】 本発明の液晶スイッチのシール部への液晶封
圧力制御の様子を示す図である。
FIG. 5 is a diagram showing how the liquid crystal sealing pressure is controlled on the seal portion of the liquid crystal switch of the present invention.

【図6】 本発明の液晶のラビング方向を示す図であ
る。
FIG. 6 is a diagram showing a rubbing direction of the liquid crystal of the present invention.

【符号の説明】[Explanation of symbols]

1 透明基板 2 シール部 2a 張り出し部 2b 突起部 3 ストッパ 4 透明基板 5、6 配線電極 7 ペースト 9、10 金属ピン 13、14 液晶 15 ビームスプリッター 16 スイッチ電極 1 Transparent substrate 2 Seal part 2a Overhang part 2b Projection part 3 Stopper 4 Transparent substrate 5, 6 Wiring electrode 7 Paste 9, 10 Metal pin 13, 14 Liquid crystal 15 Beam splitter 16 Switch electrode

───────────────────────────────────────────────────── フロントページの続き (72)発明者 盛藤 義広 福島県福島市岡島字長岬6番地の7 ナノ ックス株式会社内 Fターム(参考) 2H088 EA44 EA45 EA47 FA04 GA02 GA03 HA01 HA02 HA03 JA04 KA01 KA06 KA07 LA07 MA17 MA20 2H089 LA22 LA28 LA29 LA35 MA03Y MA03Z NA41 NA44 NA48 QA11 QA14 QA16 RA04 SA03 SA04 TA01 TA02 TA04 UA09 2H090 HA11 HB08Y HC05 HD14 JB02 KA04 LA02 LA03 MA02 MA06 MB01    ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Yoshihiro Morito             7 nano at 6 Nagasaki, Okajima, Fukushima City, Fukushima Prefecture             X Co., Ltd. F term (reference) 2H088 EA44 EA45 EA47 FA04 GA02                       GA03 HA01 HA02 HA03 JA04                       KA01 KA06 KA07 LA07 MA17                       MA20                 2H089 LA22 LA28 LA29 LA35 MA03Y                       MA03Z NA41 NA44 NA48                       QA11 QA14 QA16 RA04 SA03                       SA04 TA01 TA02 TA04 UA09                 2H090 HA11 HB08Y HC05 HD14                       JB02 KA04 LA02 LA03 MA02                       MA06 MB01

Claims (10)

【特許請求の範囲】[Claims] 【請求項1】 表面に透明導電膜を形成し、前記透明導
電膜に液晶配向膜をそれぞれ形成した2枚の透明基板
を、前記液晶配向膜が互いに対向するように配置し、そ
れら基板間に正の誘電異方性を有する液晶を封入し、前
記透明導電膜間に電圧を印加することにより入力光を変
調制御する液晶スイッチにおいて、 前記液晶として、その正常光と異常光の屈折率差を△n
とし、透明基板間の距離をd(mm)としたとき、△n
・dの値が1.5≦△n・d≦4であり、電圧無印加時
に、一方の透明基板に形成した液晶配向膜を一方向に水
平配向し、他方の透明基板に形成した液晶配向膜を前記
一方の透明基板の液晶配向膜の配向方向とは逆方向に水
平配向させたことを特徴とする液晶スイッチ。
1. A transparent conductive film is formed on a surface of the transparent conductive film, and two liquid crystal alignment films are formed on the transparent conductive film. The two transparent substrates are arranged so that the liquid crystal alignment films face each other. In a liquid crystal switch in which a liquid crystal having a positive dielectric anisotropy is enclosed and a voltage is applied between the transparent conductive films to control the modulation of input light, the liquid crystal has a difference in refractive index between normal light and extraordinary light. △ n
And the distance between the transparent substrates is d (mm), Δn
・ The value of d is 1.5 ≦ Δn · d ≦ 4, and when no voltage is applied, the liquid crystal alignment film formed on one transparent substrate is horizontally aligned in one direction, and the liquid crystal alignment formed on the other transparent substrate. A liquid crystal switch, wherein the film is horizontally aligned in a direction opposite to the alignment direction of the liquid crystal alignment film on the one transparent substrate.
【請求項2】 前記液晶は、ネマチック液晶またはコレ
ステリック液晶からなることを特徴とする請求項1記載
の液晶スイッチ。
2. The liquid crystal switch according to claim 1, wherein the liquid crystal is a nematic liquid crystal or a cholesteric liquid crystal.
【請求項3】 前記2枚の透明基板間の距離は、前記基
板間に液晶を密封するための基板間の周辺部に設けられ
た樹脂製の液晶注入用開口を有するシール部で確保さ
れ、前記シール部には、前記開口の近傍に外側に向かう
張り出し部が設けられていることを特徴とする請求項1
または2記載の液晶スイッチ。
3. The distance between the two transparent substrates is ensured by a sealing portion having a resin-made liquid crystal injection opening provided in a peripheral portion between the substrates for sealing liquid crystal between the substrates, 2. The seal portion is provided with an outwardly projecting portion in the vicinity of the opening.
Or the liquid crystal switch described in 2.
【請求項4】 前記液晶注入用開口の外側に向かう張り
出し部は、開口幅が外方向に向かって狭くなる形状を有
し、その幅方向ほぼ中央にストッパが設けられているこ
とを特徴とする請求項4記載の液晶スイッチ。
4. The protruding portion extending outward of the liquid crystal injection opening has a shape in which the opening width narrows outward, and a stopper is provided at substantially the center in the width direction. The liquid crystal switch according to claim 4.
【請求項5】 液晶注入用開口の幅方向の長さをw(m
m)とし、シール部の液晶注入用開口が設けられている
の辺の長さをW(mm)としたときに、 0.5≦w≦2.0 w/W≦0.1 5≦W≦10 なる関係があることを特徴とする請求項3または4記載
の液晶スイッチ。
5. The length in the width direction of the liquid crystal injection opening is w (m
m) and the length of the side of the seal portion where the liquid crystal injection opening is provided is W (mm), 0.5 ≦ w ≦ 2.0 w / W ≦ 0.1 5 ≦ W The liquid crystal switch according to claim 3 or 4, characterized in that there is a relationship of ≤10.
【請求項6】 前記シール部の辺に、該辺より外側に向
かう一以上の突起部を形成したことを特徴とする請求項
1〜5のいずれかに記載の液晶スイッチ。
6. The liquid crystal switch according to claim 1, wherein one or more protrusions are formed on the sides of the seal portion, the protrusions extending outward from the sides.
【請求項7】 請求項1から6のいずれかに記載の液晶
スイッチを2個一組で平行に重ねるように配置し、電圧
無印加時における第1の液晶スイッチの液晶の水平配向
方向と第2の液晶スイッチの液晶の水平配向方向のなす
角度を大略45度としたことを特徴とする光変調素子。
7. A liquid crystal switch according to claim 1, wherein two liquid crystal switches are arranged in parallel so as to be stacked in parallel, and a horizontal alignment direction of liquid crystal of the first liquid crystal switch when no voltage is applied and An optical modulation element characterized in that the angle formed by the horizontal alignment direction of the liquid crystal of the second liquid crystal switch is approximately 45 degrees.
【請求項8】 2枚の透明基板の表面に透明導電膜を形
成した後、前記透明導電膜上に液晶配向膜を形成し、電
圧無印加時に一方の透明基板の液晶配向膜を一方向に水
平配向させ、他方の透明基板の液晶配向膜を前記一方の
透明基板の液晶配向膜の配向方向とは逆方向に水平配向
させ、次いで、2枚の透明基板の少なくとも一方の透明
基板に液晶注入用開口を有するシール部を形成し、前記
2枚の透明基板を貼り合わせて前記シール部により液晶
密封空間を区画し、その後、前記液晶注入用開口から透
明基板間に正の誘電異方性を有する液晶を密封する液晶
スイッチの製造方法において、 前記シール部の液晶注入用開口の断面積が液晶密封空間
内部方向に行くに従い大きくなるように形成することを
特徴とする液晶スイッチの製造方法。
8. A transparent conductive film is formed on the surfaces of two transparent substrates, and then a liquid crystal alignment film is formed on the transparent conductive films, and when no voltage is applied, the liquid crystal alignment film on one transparent substrate is oriented in one direction. Horizontally align the liquid crystal alignment film on the other transparent substrate horizontally opposite to the alignment direction of the liquid crystal alignment film on the one transparent substrate, and then inject liquid crystal into at least one transparent substrate of the two transparent substrates. A sealing portion having an opening for liquid crystal is formed, the two transparent substrates are attached to each other to define a liquid crystal sealed space by the sealing portion, and then a positive dielectric anisotropy is provided between the liquid crystal injection opening and the transparent substrate. A method of manufacturing a liquid crystal switch for sealing a liquid crystal, which comprises forming a cross-sectional area of the liquid crystal injection opening of the seal portion so as to increase toward an inner direction of the liquid crystal sealing space.
【請求項9】 前記シール部の形成と同時に液晶注入用
開口の幅方向略中央でシール部の内側線より外側で、か
つ外側線より内側にストッパを形成したことを特徴とす
る請求項8に記載の液晶スイッチの製造方法。
9. The stopper is formed at the same time as the formation of the seal portion, outside the inner line of the seal portion and at the inner side of the outer portion of the liquid crystal injection opening in the approximate center in the width direction. A method for manufacturing the described liquid crystal switch.
【請求項10】 前記液晶の密封を、 1)透明基板を加圧して途明基板間の距離を減ずる工
程、 2)液晶注入用開口に液晶封止樹脂を前記加圧下で塗布
する工程、 3)透明基板への加圧を減ずる工程、 4)液晶封止樹脂を硬化する工程、 の各工程を順次経由することを特徴とする請求項8また
は9に記載の液晶スイッチの製造方法。
10. The hermetically sealing the liquid crystal, 1) a step of pressing a transparent substrate to reduce the distance between the transparent substrates, 2) a step of applying a liquid crystal sealing resin to the liquid crystal injection opening under the pressure, 3. The method of manufacturing a liquid crystal switch according to claim 8 or 9, wherein each step of 4) a step of reducing the pressure applied to the transparent substrate and 4) a step of curing the liquid crystal sealing resin is sequentially performed.
JP2002070308A 2002-03-14 2002-03-14 Liquid crystal switch and optical modulator for optical communication Expired - Fee Related JP3939571B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002070308A JP3939571B2 (en) 2002-03-14 2002-03-14 Liquid crystal switch and optical modulator for optical communication

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JP2003270668A true JP2003270668A (en) 2003-09-25
JP3939571B2 JP3939571B2 (en) 2007-07-04

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ID=29200917

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Country Status (1)

Country Link
JP (1) JP3939571B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008304493A (en) * 2007-06-05 2008-12-18 Hitachi Displays Ltd Liquid crystal display and liquid crystal display panel
WO2017209908A1 (en) * 2016-06-03 2017-12-07 Applied Materials, Inc. Energy efficient communication and display device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008304493A (en) * 2007-06-05 2008-12-18 Hitachi Displays Ltd Liquid crystal display and liquid crystal display panel
WO2017209908A1 (en) * 2016-06-03 2017-12-07 Applied Materials, Inc. Energy efficient communication and display device
CN109313290A (en) * 2016-06-03 2019-02-05 应用材料公司 Energy efficient communication and display device
US10215368B2 (en) 2016-06-03 2019-02-26 Applied Materials, Inc. Energy efficient communication and display device

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