JP2003269908A5 - - Google Patents

Download PDF

Info

Publication number
JP2003269908A5
JP2003269908A5 JP2002066890A JP2002066890A JP2003269908A5 JP 2003269908 A5 JP2003269908 A5 JP 2003269908A5 JP 2002066890 A JP2002066890 A JP 2002066890A JP 2002066890 A JP2002066890 A JP 2002066890A JP 2003269908 A5 JP2003269908 A5 JP 2003269908A5
Authority
JP
Japan
Prior art keywords
measured
shape
light
measuring
reflected light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002066890A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003269908A (ja
JP3740427B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002066890A priority Critical patent/JP3740427B2/ja
Priority claimed from JP2002066890A external-priority patent/JP3740427B2/ja
Priority to US10/374,142 priority patent/US6972850B2/en
Priority to DE10309586A priority patent/DE10309586B4/de
Publication of JP2003269908A publication Critical patent/JP2003269908A/ja
Publication of JP2003269908A5 publication Critical patent/JP2003269908A5/ja
Application granted granted Critical
Publication of JP3740427B2 publication Critical patent/JP3740427B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2002066890A 2002-03-06 2002-03-12 干渉計を用いた形状測定方法および装置 Expired - Fee Related JP3740427B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2002066890A JP3740427B2 (ja) 2002-03-12 2002-03-12 干渉計を用いた形状測定方法および装置
US10/374,142 US6972850B2 (en) 2002-03-06 2003-02-27 Method and apparatus for measuring the shape of an optical surface using an interferometer
DE10309586A DE10309586B4 (de) 2002-03-06 2003-03-05 Form-Messverfahren und -vorrichtung unter Verwendung eines Interferometers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002066890A JP3740427B2 (ja) 2002-03-12 2002-03-12 干渉計を用いた形状測定方法および装置

Publications (3)

Publication Number Publication Date
JP2003269908A JP2003269908A (ja) 2003-09-25
JP2003269908A5 true JP2003269908A5 (cg-RX-API-DMAC7.html) 2005-04-07
JP3740427B2 JP3740427B2 (ja) 2006-02-01

Family

ID=29198475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002066890A Expired - Fee Related JP3740427B2 (ja) 2002-03-06 2002-03-12 干渉計を用いた形状測定方法および装置

Country Status (1)

Country Link
JP (1) JP3740427B2 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12498293B2 (en) * 2023-03-20 2025-12-16 Mloptic Corp. Multi-configurable wavefront tester

Similar Documents

Publication Publication Date Title
CN102095385B (zh) 新型球面绝对测量系统及方法
CN106885787A (zh) 一种测量玻璃表面粗糙薄膜复折射率的方法和装置
CN102788683B (zh) 一种基于牛顿法和泰伯效应的微透镜阵列焦距的检测方法
CN103335950B (zh) 一种测量大气湍流非等晕性波前误差及湍流特征参数的测量装置及方法
CN100549676C (zh) 基于迈克尔逊干涉仪的4f相位相干成像装置
CN111751012A (zh) 动态高分辨光学波前相位测量装置及测量方法
CN100533123C (zh) 基于迈克尔逊干涉仪的4f相位相干成像方法
CN104034272B (zh) 一种宽光谱光干涉法测量薄膜厚度的系统
Miao et al. Surface profile and stress field evaluation using digital gradient sensing method
CN103335982A (zh) 利用波长调谐移相干涉仪测量平行平板光学均匀性的方法
FR2813391B1 (fr) Procede et appareil de mesure en transmission de la structure geometrique d'un composant optique
CN1228526A (zh) 一种快速投影结构光的三维轮廓相位测量方法及装置
CN113167720B (zh) 使用光散射偏振测定来表征玻璃基样品的光学阻滞
CN104897369A (zh) 镜片屈光度莫尔测量装置和测量方法
WO2018000943A1 (zh) 一种凹柱面及柱面发散镜的检测方法及装置
CN105004286A (zh) 一种基于激光束衍射光斑特性的超精密车削加工表面三维微观形貌测量方法
JP2003269908A5 (cg-RX-API-DMAC7.html)
JPH03225259A (ja) 屈折率分布、透過波面の測定方法およびこの方法に用いる測定装置
CN106769532B (zh) 一种利用光干涉法测量光学平板玻璃弯曲刚度的方法
CN100378442C (zh) 光波波前探测装置及其探测方法
JP3694298B2 (ja) 表面測定装置及びその測定方法
JP2005302825A5 (cg-RX-API-DMAC7.html)
JP2004033276A5 (cg-RX-API-DMAC7.html)
CN2597944Y (zh) 一种测量工件平行度的装置
CN1252445C (zh) 一种金属薄带厚度的测量方法及测量装置