JP2003257653A - Method of manufacturing organic electro-luminescence element and organic electro-luminescence element - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To dope a light emitting pigment of a predetermined color filmed on the recess of a second substrate in a light emitting layer formed by filming the light emitting layer on a plurality of pixel electrodes filmed on a first substrate. <P>SOLUTION: The projections 21a of a second substrate 21 are placed on the light emitting layer 13 of the first substrate 11, and the recesses 21b of the second substrate 21 are opposed to pixel electrodes 13 corresponding thereto through light emitting layer portions to which the light emitting pigment of the predetermined color must be doped. Both substrates 11 and 21 are inserted into a heating furnace while being overlapped with each other and heated at a given temperature in a heating furnace to diffuse the light emitting pigment of the predetermined color filmed on the recesses 21b in the doped light emitting layer portions. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to a method for manufacturing an organic electroluminescent device and an organic electroluminescent device.

[0002]

2. Description of the Related Art Recently, an organic electroluminescence element (organic EL element) having low power consumption has been attracting attention as a display panel used in a mobile phone, a PDA, etc., and it is driven by a low voltage and emits light with high brightness. Research and development of high-performance organic electroluminescent devices have been actively conducted.

In the above-mentioned organic electroluminescence element, a plurality of pixel electrodes (anode) formed by coating an organic electroluminescence thin film containing a fluorescent organic compound on a display panel and a plurality of these pixel electrodes (anode).
It has a structure sandwiched between a counter electrode (cathode) and a counter electrode facing each other, and a voltage is applied between the desired pixel electrode to emit light and the counter electrode to inject holes and electrons into the organic electroluminescence thin film. This is a light-emitting element in which excitons are generated by recombining with each other, and light is emitted when the excitons are deactivated to perform display on a portion corresponding to a desired pixel electrode to be emitted.

At this time, normally, by forming a counter electrode over the entire surface and facing all the pixel electrodes, the counter electrode becomes a common electrode for all the pixel electrodes. Further, a method is adopted in which a plurality of pixel electrodes are provided in parallel in a stripe shape, a plurality of counter electrodes are formed in a stripe shape so as to be orthogonal to the plurality of pixel electrodes, and light is emitted at a portion where both electrodes intersect. In this case, one counter electrode intersects at a plurality of locations on a plurality of pixel electrodes, and in this case also, one counter electrode is a common electrode for the plurality of pixel electrodes. In the description, the counter electrode is referred to as a common electrode for description.

Various manufacturing methods have been proposed for manufacturing an organic electroluminescent element. However, an organic material capable of finely transferring a light-emitting organic material onto a glass substrate corresponding to a pixel pattern on a display panel is proposed. An example of a method for manufacturing an electroluminescent element is disclosed in Japanese Patent Application Laid-Open No. 2-212058.
No. 000-12216.

FIGS. 47 (a) to 47 (c) are views for explaining a conventional color organic EL display and its manufacturing method.

The conventional color organic EL display shown in FIGS. 47A to 47C and the manufacturing method thereof are disclosed in the above-mentioned Japanese Patent Laid-Open No. 2000-12216, which is hereby incorporated by reference. Will be briefly described with reference to.

First, as shown in FIG. 47 (a), a transparent ITO (Indium Tin Oxide) film 102 is formed as an anode on a transparent glass substrate 101 which is a display surface of a display panel. In addition, the hole transport layer 103 is formed on the ITO film 102.

On the other hand, the transfer substrate 104 is made of a metal sheet, and the convex portions 104a and the concave portions 104b are alternately and repeatedly formed on the lower surface side along the ITO film 102 and the hole transport layer 103. A bottomed hole 104c is bored from the upper surface side at a portion corresponding to the convex portion 104a.

At this time, each convex portion 104 of the transfer substrate 104
a is a plane size of 100 μm so that three colors are arranged.
× 100 μm, the color arrangement pitch is 300 μm, and the height of each convex portion 104a is 5 with respect to each concave portion 104b.
It is set to 0 μm.

Then, for example, a red light-emitting organic material 105R is formed by vacuum vapor deposition on each convex portion 104a and each concave portion 104b formed on the lower surface side of the transfer substrate 104, and then on the upper surface side of this transfer substrate 104. The glass plate 106 is placed, and the red light-emitting organic material 105R formed on each convex portion 104a by the weight of the glass plate 106 is attached to the glass substrate 10.
It is pressure-bonded onto the hole transport layer 103 on the first side.

A shielding plate 107 is installed above the glass plate 106 at a distance from the glass plate 106. The shielding plate 107 corresponds to each bottomed hole 104c formed in the transfer substrate 104. Then, the through holes 107a are formed respectively.

Furthermore, when the glass plate 106 is irradiated with the laser light 108 from above the shielding plate 107 through each through hole 107a, the laser light 1 passing through each through hole 107a.
Since only 08 reaches the bottomed holes 104c of the transfer substrate 104 through the glass plate 106, the laser beam 1
The red light emitting organic material 105R formed on each convex portion 104a is sublimated by the heat of 08, and the red light emitting organic material 105R is transferred onto the hole transport layer 103 as shown in FIG. .

Each recess 1 formed on the transfer substrate 104
Since the through hole is not formed in the portion of the shield plate 107 corresponding to 04b, the laser light 108 is shielded by the shield plate 107, so that the red light emitting organic material 105R formed in each recess 104b is sublimated. Instead, it remains on the transfer substrate 104 side as it is.

Next, as shown in FIG. 47C, when the red light emitting organic material 105R is transferred onto the hole transport layer 103, the red light emitting organic material 105R is transferred in the same manner as above.
Next to the green light-emitting organic material 105G, and next to the green light-emitting organic material 105G, the blue light-emitting organic material 1
05B is transferred to obtain a light emitting element array of three colors.

After that, an ITO film 109 is formed as a cathode so as to be orthogonal to the light emitting element region, whereby the color organic EL display 100 is obtained.

[0017]

By the way, in the above-mentioned conventional color organic EL display 100 and its manufacturing method, when the number of pixels is increased to achieve miniaturization, fine pixel electrodes formed on the glass substrate 101. Each convex portion 10 formed on the lower surface side of the transfer substrate 104 according to the pattern
It is possible to narrow the plane size of the 4a and the pitch between the adjacent convex portions 104a, and based on this, the transfer substrate 10
No. 4, each of the convex portions 104a of No. 4 was finely formed, and an experiment was performed. For example, after the red light-emitting organic material 105R formed on each convex portion 104a was transferred onto the hole transport layer 103 of the glass substrate 101, When the substrate 101 and the transfer substrate 104 are separated from each other, the glass substrate 101 and the transfer substrate 104 cannot be separated well because the red light emitting organic material 105R has adhesiveness, and the red light emitting property transferred onto the glass substrate 101 is eliminated. The pattern of the organic material 105R collapses. Also,
Like the red light emitting organic material 105R, the glass substrate 10
Green light-emitting organic material 105G transferred onto the
It was found that each pattern of the blue light emitting organic material 105B also collapsed, and it was very difficult to satisfactorily manufacture the light emitting element array of three colors on the glass substrate 101.

Therefore, in manufacturing a color organic EL display in which the number of pixels of a display panel is increased to achieve miniaturization, a method for manufacturing a three-color organic electroluminescent element excellent in mass productivity and an organic electroluminescent element are provided. Is desired.

[0019]

The present invention has been made in view of the above problems, and a first invention is to uniformly form a light emitting layer on a plurality of pixel electrodes formed on a first substrate. First to do
Steps, a convex portion to be mounted on the light emitting layer of the first substrate, and the pixel corresponding to the light emitting layer portion to be depressed adjacent to the convex portion and to be doped with a luminescent dye of a predetermined color A pair of recesses having substantially the same area as the electrodes is used as a set, and a second substrate formed by repeating this set in the column direction and / or the row direction of the pixel electrode is used, and each protrusion formed on the second substrate is used. A second step of forming a film of the luminescent dye of the predetermined color on the parts and the recesses; and a third step of removing only the luminescent dye of the predetermined color formed on the projections of the second substrate. The convex portions of the second substrate are placed on the light emitting layer of the first substrate, and the concave portions of the second substrate are provided with light emitting layer sites to be doped with the luminescent dye of the predetermined color. A state in which both substrates are overlapped with each other, facing each pixel electrode corresponding to By heating the luminescent dye of the predetermined color formed on each of the recesses at a predetermined temperature, the luminescent dye of the predetermined color formed on each of the recesses is diffused into each luminescent layer site to be doped. And a fifth step of forming a counter electrode facing the pixel electrode on the light emitting layer after doping the luminescent dye of the predetermined color. It is a manufacturing method.

In a second aspect of the invention, a first step of uniformly forming a light emitting layer on a plurality of pixel electrodes formed on a first substrate and placing the light emitting layer on the first substrate are performed. And a convex portion having substantially the same area as the pixel electrode corresponding to the light emitting layer site to be doped with the luminescent dye of a predetermined color, and a concave portion adjacent to the convex portion, the concave portion being one set, Is repeatedly formed along the column direction and / or the row direction of the pixel electrode, and the luminescent dye of the predetermined color is formed on each convex portion and each concave portion formed on the second substrate. And a pixel electrode corresponding to each of the convex portions of the second substrate on the light emitting layer of the first substrate via each light emitting layer site to be doped with the light emitting dye of the predetermined color. Placed facing each other, and with both substrates superposed on each of the convex portions and the concave portions. Heating the luminescent dye of the predetermined color deposited on the luminescent layer at a predetermined temperature to diffuse only the luminescent dye of the predetermined color deposited on each of the convex portions into each luminescent layer site to be doped; A method for manufacturing an organic electroluminescence device, comprising: 3 steps; and a fourth step of forming a counter electrode facing the pixel electrode on the light emitting layer after doping the predetermined color of the luminescent dye. Is.

A third invention is the method for manufacturing an organic electroluminescent device according to the first or second invention, wherein the emission wavelength of the light emitting layer filmed on the first substrate is the second substrate. The method for producing an organic electroluminescence device is characterized in that the wavelength is shorter than the emission wavelength of the luminescent dye of the predetermined color attached to the film.

A fourth aspect of the present invention is the method for manufacturing an organic electroluminescent element according to the first or second aspect of the present invention, wherein the second substrate is formed in the light emitting layer to be film-formed on the first substrate. A method for manufacturing an organic electroluminescence device, characterized in that a luminescent dye that emits light having a wavelength shorter than the luminescent wavelength of the luminescent dye of the predetermined color to be formed is dispersed in advance.

The fifth aspect of the present invention is the above-mentioned first to fourth aspects.
In the method for manufacturing an organic electroluminescent element of any one of the inventions, the luminescent dye of the predetermined color is a fluorescent dye material of a predetermined color or a phosphorescent dye material of a predetermined color is used. Is a manufacturing method.

The sixth aspect of the present invention is the above-mentioned first to fifth aspects.
In the method for manufacturing an organic electroluminescence element according to any one of the present inventions, a plurality of the second substrates are prepared corresponding to a plurality of colors, and the plurality of the plurality of second substrates are formed by changing the color of the luminescent dye to be formed on each second substrate. When the color luminescent dyes are formed on the respective second substrates, the multi-color luminescent dyes use only fluorescent dye materials for all colors, or phosphorescent for all colors. A method for manufacturing an organic electroluminescence device, characterized in that only a dye material is used, or a fluorescent dye material and a phosphorescent dye material are selected and used for each color.

A seventh invention is the method for manufacturing an organic electroluminescence device according to the first or second invention, wherein the second substrate is made of R, G, B.
A red light-emitting dye prepared for each type and formed on the second substrate for R, a green light-emitting dye formed on the second substrate for G, and a blue film formed on the second substrate for B A luminescent dye, R, G,
A method for manufacturing an organic electroluminescence device, characterized in that the pixel electrode portions for B are respectively doped.

An eighth aspect of the present invention is the method for manufacturing an organic electroluminescent element according to the first or second aspect of the invention, in which a blue light-emitting dye is previously dispersed in the light-emitting layer formed on the first substrate. At the same time, two kinds of G and RG are prepared as the second substrate, and a green light emitting dye formed on the second substrate for G and a red light emitting dye formed on the second substrate for RG. + Green luminescent dye is doped into the R and G pixel electrode portions on the luminescent layer formed by pre-dispersing the blue luminescent pigment on the first substrate, and the B pixel electrode portion is The method for producing an organic electroluminescence device is characterized in that the blue light-emitting dye in the light-emitting layer is made to correspond.

A ninth aspect of the present invention is the method for manufacturing an organic electroluminescent element according to the first or second aspect of the invention, wherein each convex portion and each concave portion formed on the second substrate in the second step are formed. Before forming the luminescent dye of the predetermined color on the surface of the second substrate, a hydrophilic treatment is applied to a surface of the second substrate facing the luminescent layer formed on the first substrate. It is a manufacturing method.

A tenth aspect of the present invention is the method for manufacturing an organic electroluminescent element according to the first aspect, wherein the predetermined portions are formed on the convex portions and the concave portions formed on the second substrate in the second step. Before depositing the color luminescent dye,
A method for manufacturing an organic electroluminescence device, characterized in that a surface of the second substrate facing the light emitting layer formed on the first substrate is subjected to a water repellent treatment.

An eleventh aspect of the invention is the method for manufacturing an organic electroluminescent element according to the first aspect of the invention, in which the predetermined portions are formed on the respective convex portions and concave portions formed on the second substrate in the second step. Before depositing the color luminescent dye,
A method for manufacturing an organic electroluminescence device, characterized in that a metal having extremely weak adhesion is formed on a surface of the second substrate facing the light emitting layer formed on the first substrate.

The twelfth invention is an organic electroluminescence device characterized by being manufactured by using the method for manufacturing an organic electroluminescence device according to any one of the first to eleventh inventions.

[0031]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of a method for manufacturing an organic electroluminescence device and an organic electroluminescence device according to the present invention will be described below with reference to FIGS. 1 to 46. <First Embodiment> to <Sixth Embodiment>Example> will be described in detail in the order of.

FIGS. 1 (a) and 1 (b) show the first to the first embodiments of the present invention.
In the method for manufacturing an organic electroluminescent element and the organic electroluminescent element of the sixth embodiment,
The first substrate (TFT) commonly used in the first to sixth embodiments.
3A and 3B are a plan view and a front view for explaining a substrate).

As shown in FIGS. 1 (a) and 1 (b), in the method for manufacturing an organic electroluminescent device and the organic electroluminescent device according to the first to sixth embodiments of the present invention, the first to sixth embodiments are described. First commonly used in
A transparent TFT (Thin Film Transistor) substrate is used as the substrate 11, and a plurality of pixel electrodes 12 are film-formed on the first substrate 11 in a matrix in a column direction × row direction. At this time, the plurality of pixel electrodes 12 described above are made of transparent ITO (Indium Tin Oxide) having a high work function as an anode.
It uses a membrane and displays red green blue (RGB) 3 on the display.
In order to obtain the emission colors of each color at a width of 13 μm and at intervals of 1 μm, the vertical and horizontal dimensions of each pixel electrode 12 are formed in a square of 13 μm on a side, and the pixel electrodes 12 are arranged adjacent to each other in the vertical and horizontal directions. A gap of 1 μm is formed between them.

<First Embodiment> FIG. 2 is a schematic view for explaining a second substrate (stamp substrate) in the method for manufacturing an organic electroluminescence device and the organic electroluminescence device according to the first embodiment of the present invention. 3A and 3B are plan views showing the second substrate (stamp substrate) shown in FIG. 2 in a plan view, in which (a) shows a case where the second substrate (stamp substrate) is formed in a stripe shape, and (b) shows a staggered shape. It is the figure which showed the case where it formed.

In the method of manufacturing an organic electroluminescent element and the organic electroluminescent element of the first embodiment, the second substrate 21 as shown in FIG.
It is prepared in advance as a stamp substrate to be placed on the first substrate 11 described using (a) and (b).

Second substrate (stamp substrate) 21 described above
Is a light emitting layer 13 (FIG. 4), which will be described later, formed on the first substrate 11.
An area substantially the same as that of the convex portion 21a to be mounted on the pixel electrode 12 (FIG. 1) corresponding to the light emitting layer portion which is to be dented adjacent to the convex portion 21a and to be doped with the luminescent dye of a predetermined color. And a concave portion 21b having a groove are formed as one set, and this set is repeated along the column direction and / or the row direction of the pixel electrode 12 to form an uneven shape by a method such as photolithography or etching using a silicon substrate or the like. Has been done.

Here, each convex portion 2 formed on the second substrate 21.
The width of 1a is formed to include two widths of the pixel electrodes 12 on the first substrate 11 and the left and right gaps between the two pixel electrodes 12, and specifically, each of the convex portions 21a. Width of {2
× 13 + 1 × 3} μm = 29 μm, and the height of each convex portion 21 a is 10 μ with respect to each concave portion 21 b.
It projects about m. In addition, the width of each recess 21 b formed on the second substrate 21 is equal to that of one pixel electrode 1 on the first substrate 11.
The width is the same as the width of 2 and is set to 13 μm. Therefore,
The total area of one set of the convex portion 21a and the concave portion 21b is R
The areas of the three pixel electrodes 12 corresponding to the GB3 pixels are substantially matched.

The planar shape of the second substrate (stamp substrate) 21 is, as shown in FIG.
a and the recesses 21b are set to have the above-described dimensions in the width direction, and the protrusions 21a and the recesses 21b are formed to be long in the depth direction (the column direction or the row direction of the pixel electrodes 12). The convex portions 21a and the concave portions 21b are arranged in a stripe shape, or, as shown in FIG.
b are arranged in a staggered pattern with respect to the plurality of pixel electrodes 12 (FIG. 1).

Next, the first substrate (TFT substrate) 11 and the second substrate
A method of manufacturing the organic electroluminescent element of the first embodiment according to the present invention using the substrate (stamp substrate) 21 will be described in the order of steps with reference to FIGS. 4 to 9.

FIG. 4 is a schematic diagram for explaining the first step in the method of manufacturing the organic electroluminescent element of the first embodiment, and FIGS. 5A to 5C show the organic electroluminescent element of the first embodiment. 6A to 6C are schematic views for explaining the second step in the manufacturing method, and FIG.
7A and 7B are views for explaining the pretreatment in the second step in the method for manufacturing an organic electroluminescence element of the example.
(A), (b) is a schematic diagram for demonstrating the 3rd process in the manufacturing method of the organic electroluminescent element of 1st Example, FIGS. 8 (a)-(c) are the organic electroluminescent of 1st Example. FIGS. 9A and 9B are schematic diagrams for explaining the fourth step in the method for manufacturing the element, and FIGS. 9A and 9B are schematic diagrams for explaining the fifth step in the method for manufacturing the organic electroluminescent element of the first example. is there.

First, in the first step of the first embodiment, as shown in FIG. 4, the first substrate 1 is formed on the plurality of pixel electrodes 12 formed on the first substrate (TFT substrate) 11 and between the pixel electrodes 12.
The light emitting layer 13 is uniformly formed on the first layer 1. The light emitting layer 13 is preferably made of a polymer material in consideration of the ease of film formation, the thermal stability of the film, the mechanical stability, and the like. For example, polyvinylcarbazole (PVC) that emits blue-violet light is used.
Z). At this time, the light emitting layer 1 that emits blue-violet light
As will be described later, 3 emits light on the shorter wavelength side than each emission color of each of the red, green and blue light emitting dyes doped in the light emitting layer 13, and energy transfer to the light emitting dyes of each color I use something that is easy to get up. Then, the light emitting layer 13 is formed on the first substrate 1 by spin coating or the like.
It is applied on the surface of No. 1 to a thickness of about 100 nm, and then sufficiently dried.

Next, in the second step of the first embodiment, as shown in FIG.
As shown in (a) to (c), the convex portion 21a and the concave portion 21b
Three second substrates (stamp substrates) 21 for which R and G are repeatedly formed are prepared for R, G, and B.

That is, as shown in FIG. 5A, on each convex portion 21a and each concave portion 21 formed on the second substrate 21 for R.
On the bottom surface of b (hereinafter referred to as each recess 21b), a red luminescent dye Rc is formed to a thickness of about 20 nm by a method such as a vacuum evaporation method, a spin coating method, a dip coating method, a wet process such as an inkjet method.

As the above-mentioned red luminescent dye Rc, one of a red fluorescent luminescent dye and a red phosphorescent luminescent dye is used. At this time, when the former red fluorescent dye is applied, Neil Red, DCM1 {4-Dicyanmethylen
e-2-methyl-6 (p-dimethylaminostyryl) -4H-pyran}, D
A pyran derivative such as CJT {4- (dicyanomethylene) -2-t-butyl-6- (julolidylstyryl) -pyran},
Known red fluorescent dye materials such as a squarylium derivative, a porphyrin derivative, a chlorin derivative, and a eurozirine derivative are used. On the other hand, when the latter red phosphorescent dye is applied, Btp ₂ Ir (acac), I
Known red phosphorescent dye materials such as r (btp) ₂ (acac) and PtOEP are used.

Further, as shown in FIG. 5B, on each convex portion 21a and each concave portion 21 formed on the second substrate 21 for G.
A green luminescent dye Gc is formed on the bottom surface of b (hereinafter referred to as each recess 21b) to a thickness of about 20 nm by a method such as a vacuum evaporation method, a spin coating method, a dip coating method, a wet process such as an inkjet method, or the like.

As the above-mentioned green luminescent dye Gc, one of a green fluorescent luminescent dye and a green phosphorescent luminescent dye is used. At this time, when the former green fluorescent light emitting dye is applied, known green fluorescent dye materials such as coumarin derivatives such as coumarin 6 and quinacridone derivatives are used, while the latter green phosphorescent light emitting dye is applied. Contains Ir (ppy) ₃ , (ppy) ₂ Ir (acac).
Known green phosphorescent dye materials such as

Further, as shown in FIG. 5C, on each convex portion 21a and each concave portion 21 formed on the second substrate 21 for B.
On the bottom surface of b (hereinafter referred to as each recess 21b), a blue luminescent dye Bc is formed to a thickness of about 20 nm by a method such as a vacuum evaporation method, a spin coating method, a dip coating method, a wet process such as an inkjet method.

As the blue luminescent dye Bc described above, either one of a blue fluorescent luminescent dye and a blue phosphorescent luminescent dye is used. At this time, when the former blue fluorescent dye is applied, coumarin derivatives such as coumarin 47 and TPB
Known blue fluorescent dye materials such as (tetraphenyl butadiene) and perylene are used, while when the latter green phosphorescent dye is applied, FIrpic, Ir (F
Known blue phosphorescent dye materials such as ppy) ₂ have been used.

Then, the above three color luminescent dyes Rc, G
For c and Bc, fluorescent dye materials are used for all three colors, or phosphorescent dye materials are used for all three colors, or fluorescent dye materials and phosphorescent dye materials are selected for each color and used. .

In this case, by using a fluorescent dye material in any two colors or less, there is an advantage that the amount of expensive phosphorescent dye material used can be reduced and the cost can be reduced.

On the other hand, since the luminous efficiency of the color emission using the fluorescent dye material is lower than that when the phosphorescent dye material is used, the balance of the luminous efficiency of each color is considered without using the fluorescent dye material for all colors. It is preferable to use a phosphorescent dye material for a color that is considered to be inferior in luminous efficiency to other colors and to use a fluorescent dye material for a color that is considered to be superior in luminous efficiency to other colors.

For example, as the green luminescent dye Gc, green phosphorescence is used.
Ir (ppy) among the functional pigment materials _ThreeWhich of the other colors
Extremely high luminous efficiency compared to the case of using luminescent dye materials
Although expensive, this Ir (ppy)_ThreeGreen color without using
Luminous efficiency among green fluorescent dye materials as the photo dye Gc
When using high coumarin 6, this coumarin 6 is blue
For example, among the blue phosphorescent dye materials as the color luminescent dye Bc
For example, when FIrpic is used, or the red luminescent dye Rc
Among the red phosphorescent dye materials, for example, PtOEP
Since it emits light with almost the same efficiency as when used, Ir
(Ppy)_ThreeMaterial cost can be reduced more than at the same time
In addition, since the luminous efficiency of each color is approximately the same,
It will reduce the difficulty of circuit design and further reduce the cost.
There is also an advantage.

By the way, as described above, for R, G,
The red luminescent pigment Rc and the green luminescent pigment G are formed on the convex portions 21a and the concave portions 21b formed on the second substrate 21 for B, respectively.
c and the blue luminescent dye Bc are respectively formed, the luminescent dyes Rc, Gc, and
Since Bc is unnecessary, it is removed in the third step described later, while each luminescent dye R formed on each recess 21b is formed.
c, Gc, and Bc are sequentially doped (diffused) in the light emitting layer 13 formed on the first substrate 11 in the fourth step described later.

At this time, on the convex portions 21a and the concave portions 21 formed on the R, G, and B second substrates 21 in the second step.
When the red luminescent dye Rc, the green luminescent dye Gc, and the blue luminescent dye Bc are formed on the surface b by using the vacuum deposition method, the particles of the luminescent dyes Rc, Gc, and Bc of each color are formed on the second substrate 21.
Since it goes straight toward the respective convex portions 21a and the concave portions 21b, the extra luminescent dyes Rc, Gc, and Bc particles do not adhere to the right and left vertical walls in the concave portions 21b. In the case of the vapor deposition method, the luminescent dye R of each color is formed on each convex portion 21a and each concave portion 21b of each second substrate 21.
It is possible to directly form c, Gc, and Bc.

On the other hand, when a film is formed by a wet process such as a spin coating method, a dip coating method or an ink jet method, the luminescent dyes Rc, Gc and Bc of each color are added to an organic solvent such as chloroform and acetone in a proportion of several wt%. Since the solution that has been dissolved to some extent is applied, extra particles of the respective luminescent dyes Rc, Gc, and Bc are attached to the right and left vertical walls inside the recesses 21b of the second substrates 21. Therefore, when the film is formed by using the wet process, the extra luminescent dyes Rc and G are formed on the left and right vertical walls in each recess 21b.
A hydrophilic treatment S as shown in FIG. 6A is performed as a pretreatment for the second step so that particles of c and Bc do not adhere.

That is, as shown in FIG. 6A, on each convex portion 21a and each concave portion 2 formed on the second substrate 21 in the second step.
1 has a predetermined color of luminescent dye (Rc), (Gc), (Bc)
The second layer for each color before the film is formed by the wet process.
The hydrophilic treatment S is applied to the surface of the substrate 21 facing the light emitting layer 13 formed on the first substrate 11. Here, when the hydrophilic treatment S is performed by ion milling the R, G, and B second substrates 21 with oxygen plasma or the like substantially perpendicularly, the convexes formed on the second substrates 21 are processed. Since the surface of the portion 21a and the surface of the bottom surface of each recess 21b are made uneven,
After performing ion milling, the luminescent dyes Rc and G of the respective colors are formed on the surface of each convex portion 21a and the bottom surface of each concave portion 21b.
Although the adhesive force of each of the luminescent dyes Rc, Gc, and Bc is increased when c and Bc are formed, the surfaces of the right and left vertical walls in each recess 21b are not formed to be uneven, and thus the left and right vertical sides in each recess 21b are not formed. Excessive luminescent dyes Rc, Gc,
Bc particles do not adhere.

In the second step, when the film is formed by the vacuum vapor deposition method, if the hydrophilic treatment S described above is performed in advance, if necessary, the right and left vertical walls in the recesses 21b of the second substrates 21 are formed. The extra particles of the respective luminescent dyes Rc, Gc, and Bc are less likely to adhere.

Further, in the second step, on each convex portion 21a and each concave portion 21b formed on each second substrate 21 for R, G, and B.
When the red light emitting dye Rc, the green light emitting dye Gc, and the blue light emitting dye Bc are formed on the upper surface by using a vacuum deposition method or a wet process, unnecessary deposition on each convex portion 21a of each second substrate 21 is unnecessary. In order to facilitate the removal of the luminescent dyes Rc, Gc, Bc of each color, a water repellent treatment H as shown in FIG. 6B is optionally performed as a pretreatment of the second step, or Gold A with extremely weak adhesion as shown in (c)
Metals such as u and silver Ag are formed as needed.

That is, as shown in FIG. 6 (b), on each convex portion 21a and each concave portion 2 formed on the second substrate 21 in the second step.
1 has a predetermined color of luminescent dye (Rc), (Gc), (Bc)
Of the first substrate 1 in the second substrate 21 for each color before film formation.
A water-repellent treatment H is applied to the surface facing the light emitting layer 13 formed in No. 1 as required. Here, by coating the solid material having a large surface tension, such as perfluorolauric acid, on each convex portion 21a and each concave portion 21b of the second substrate 21 by spin coating or sputtering, Thereafter, when the luminescent dyes Rc, Gc, and Bc of the respective colors are formed on the convex portions 21a and the concave portions 21b after the water-repellent treatment H, unnecessary light emission of the respective colors formed on the convex portions 21a is performed. The dyes Rc, Gc, Bc are easily removed in the third step described later, and the luminescent dyes Rc, Gc, B of the respective colors are formed at the time of film formation.
Since c will slide down the left and right vertical walls in each recess 21b that has been subjected to the water-repellent treatment H and collect on the bottom surface of each recess 21b, the extra luminescent dye Rc is added to the left and right vertical walls in each recess 21b. , Gc, Bc are less likely to adhere.

Further, as shown in FIG. 6C, on each convex portion 21a and each concave portion 2 formed on the second substrate 21 in the second step.
1 has a predetermined color of luminescent dye (Rc), (Gc), (Bc)
Before depositing a film, a metal such as gold Au or silver Ag, which has a very weak adhesion to the second substrate 21 for each color, is deposited as needed to have a thickness of about 100 nm. When the luminescent dyes Rc, Gc, and Bc of the respective colors are formed on the convex portions 21a and the concave portions 21b of the second substrate 21, respectively, the unnecessary color of each unnecessary color is further formed on the metal on each convex portion 21a. The luminescent dyes Rc, Gc, and Bc are easily removed in the third step described below, and even if a metal is formed on the bottom surface of each concave portion 21b other than each convex portion 21a, each light emission is performed in the fourth step described below. The heating of the dyes Rc, Gc, Bc does not affect the step of doping (diffusing) each of the light emitting dyes Rc, Gc, Bc into the light emitting layer 13 formed on the first substrate 11.

Next, in the third step of the first embodiment, as shown in FIG.
As shown in (a) and (b), the red light emitting dye Rc, the green light emitting dye Gc, and the blue light emitting dye which are formed on the respective convex portions 21a of the R, G, and B second substrates 21 respectively. Since Bc is unnecessary in the first embodiment, unnecessary luminescent dyes Rc, Gc and Bc of each color formed on each convex portion 21a are removed. At this time, as described above, the second
As a pretreatment of the process, a water-repellent treatment H as shown in FIG. 6 (b) is applied as necessary, or gold Au, silver Ag, etc. having extremely weak adhesion as shown in FIG. 6 (c) are used. By forming a metal film as needed, unnecessary luminescent dyes Rc, Gc, and Bc of each color formed on each convex portion 21a are easily peeled off.

That is, as shown in FIG. 7A, the red luminescent pigment Rc and the green luminescent pigment Gc, which are formed on the respective convex portions 21a of the respective second substrates 21 by using an adhesive tape or the like, are formed.
Peel off the blue luminescent pigment Bc, or, as shown in FIG.
As shown in Figure 2, use a blade with a sharp tip to
The red light emitting dye Rc, the green light emitting dye Gc, and the blue light emitting dye Bc, which are respectively formed on the respective convex portions 21a of the substrate 21, are removed by scraping or the like. As a result, R, G,
The red light-emitting dye Rc, the green light-emitting dye Gc, and the blue light-emitting dye Bc are left on the respective recesses 21b of the respective second substrates 21 for B as deposited.

Next, in the fourth step of the first embodiment, as shown in FIG.
As shown in (a) to (c), the red light-emitting dye Rc, the green light-emitting dye Gc, and the blue light-emitting dye Bc formed on the recesses 21b of the R, G, and B second substrates 21 respectively. To
The light emitting layers 13 formed on the first substrate 11 are sequentially doped (diffused). Here, each second substrate 2
As described above, the width of each recess 21b formed in
Since it is formed to have the same size as the width of one pixel electrode 12 on the substrate 11, the luminescent dyes Rc, Gc, and Bc of the respective colors are respectively included in the light emitting layer 13 at a portion corresponding to each one pixel electrode 12. It can be doped.

That is, as shown in FIG. 8A, the second substrate 2 for R is formed on the light emitting layer 13 formed on the first substrate 11.
Although the convex portions 21a formed in No. 1 are placed in contact with each other, the red light emitting dye Rc is peeled off from the convex portions 21a as described above.

Further, each recess 21b of the R second substrate 21
The red luminescent dye Rc formed above corresponds to the luminescent layer site to be doped on the luminescent layer 13 formed on the first substrate 11, and each of the recesses 21b is filled with the red luminescent dye Rc. Each pixel electrode 12 corresponding to the light emitting layer portion to be doped is opposed to each other, and each concave portion 21b is formed.
Are placed so as to face the pixel electrode 12 every three, and the red light-emitting dye Rc formed on each recess 21b forms the light-emitting layer 13 on each pixel electrode 12 corresponding thereto.
Is not in contact with.

After that, the second substrate 21 is overlaid on the first substrate 11 and inserted into a heating furnace (oven) having an optimum temperature atmosphere, and both the substrates 11 and 21 are kept for a predetermined time. To heat. The heating method is not particularly limited to the heating furnace (oven). For example, when the pixel electrode (anode) 12 film-formed on the first substrate 11 has a stripe shape, the stripe-shaped anode can be supplied with an appropriate current to obtain an optimum temperature, and the second temperature can be increased. Board 2
When a metal such as gold Au or silver Ag is deposited as a pretreatment on No. 1, the optimum temperature can be obtained by applying an appropriate current to the metal. During this heating period, the red light-emitting dye R formed on each recess 21b of the R second substrate 21
After c is evaporated and reaches the light emitting layer 13, the red light emitting dye Rc diffuses into the light emitting layer 13 at that position. Therefore, the red luminescent pigment Rc formed on each recess 21b is doped only in the corresponding portion of the luminescent layer 13 on the pixel electrode 12 corresponding thereto. Then, when the red light emitting dye Rc is doped in the light emitting layer 13, the red light emitting dye Rc is formed inside the light emitting layer 13.
Since energy is transferred to c, red light emission (R light emission) becomes possible at the portion doped with the red light emitting dye Rc.

At this time, the concentration of the luminescent dye in the luminescent layer 13 has an appropriate value, and if it is less than that, the luminescence of the luminescent dye cannot be obtained, and if it is more than that, the luminous efficiency is lowered due to concentration quenching. . Therefore, the luminescent dye concentration is optimized by controlling the heating temperature and the heating time.

Here, when DCJT, for example, is used as the red luminescent dye Rc among the red fluorescent dye materials described above, the optimum heating temperature at which the red fluorescent luminescent dye easily evaporates is 160 ° C. The time is about 10 minutes. When PtOEP, for example, is used as the red luminescent dye Rc among the above-mentioned red phosphorescent dye materials,
The optimum heating temperature is 20 for the red phosphorescent dye to easily evaporate.
The temperature is 5 ° C. and the heating time is about 10 minutes.

Next, when doping of the light emitting layer 13 with the red light emitting dye Rc is completed, the second substrate 21 for R is removed from the first substrate 11 and, as shown in FIG.
The second substrate 21 for G is placed on the light emitting layer 13 formed on the first substrate 11 in the same procedure as described above. In this case, when the green luminescent dye Gc formed on each recess 21b of the second substrate 21 is aligned so as to face the pixel electrode 12 adjacent to the pixel electrode 12 doped with the red luminescent dye Rc, the inside of the heating furnace is heated. Then, only the portion of the light emitting layer 13 on the pixel electrode 12 corresponding to the above is doped with the green light emitting dye Gc. When the green light emitting dye Gc is doped in the light emitting layer 13, energy is transferred to the green light emitting dye Gc inside the light emitting layer 13, so that the portion doped with the green light emitting dye Gc emits green light ( G emission) becomes possible.

Here, when, for example, coumarin 6 is used as the green luminescent dye Gc among the above-mentioned green fluorescent dye materials, the optimum heating temperature at which the green fluorescent luminescent dye easily evaporates is 140 ° C. and The heating time is about 10 minutes. When Ir (ppy) ₃ is used as the green luminescent dye Gc among the above-mentioned green phosphorescent dye materials, the optimum heating temperature at which the green phosphorescent luminescent dye easily evaporates is 195 ° C. The heating time is about 10 minutes.

Further, after the green light emitting dye Gc is doped into the light emitting layer 13, the second substrate 21 for G is removed from the first substrate 11 and, as shown in FIG.
The second substrate 21 for B is placed on the light emitting layer 13 formed on the first substrate 11 in the same procedure as described above. In this case, if the blue luminescent dye Bc formed on each recess 21b of the second substrate 21 is positioned so as to face the pixel electrode 12 adjacent to the pixel electrode 12 doped with the green luminescent dye Gc, the heating furnace Then, only the portion of the light emitting layer 13 on the pixel electrode 12 corresponding to the above is doped with the blue light emitting dye Bc. When the blue light emitting dye Bc is doped in the light emitting layer 13, energy is transferred to the blue light emitting dye Bc inside the light emitting layer 13, so that the portion doped with the blue light emitting dye Bc emits blue light ( B emission) becomes possible.

Here, when TPB is used as the blue luminescent dye Bc among the above-mentioned blue fluorescent dye materials, the optimum heating temperature at which the blue fluorescent luminescent dye easily evaporates is 140 ° C. The time is about 10 minutes.
When FIrpic is used as the blue luminescent dye Bc among the above-mentioned blue phosphorescent dye materials, the optimum heating temperature at which the blue phosphorescent luminescent dye is easily evaporated is 200.
And the heating time is about 10 minutes.

The order of doping the red light emitting dye Rc, the green light emitting dye Gc, and the blue light emitting dye Bc into the light emitting layer 13 in the above-mentioned fourth step may be any color. Furthermore, the three-color array on the pixel electrode 12 is the RG shown in the figure.
The arrangement is not limited to the B order, and the arrangement order may be appropriately changed and combined, and the arrangement may be repeated.

Next, in the fifth step of the first embodiment, as shown in FIG.
As shown in (a) and (b), the red light emitting dye Rc and the green light emitting dye G are contained in the light emitting layer 13 formed on the first substrate 11.
c and blue luminescent dye Bc, respectively,
By forming a common electrode (counter electrode) 14 serving as a cathode on the light emitting layer 13 so as to face the plurality of pixel electrodes 12, the organic electroluminescence element EL1A according to the first embodiment of the present invention can be obtained.

At this time, the plurality of pixel electrodes 12 are arranged on the first substrate 1
When a film is formed in a matrix on the first electrode 1, the common electrode (counter electrode) 14 is formed on the light emitting layer 13 so as to face all the pixel electrodes 12. Further, when the plurality of pixel electrodes 12 are film-formed on the first substrate 11 in a stripe shape, the common electrode (counter electrode) 14 is orthogonal to the plurality of pixel electrodes 12 and is also orthogonal to each other. Films are formed in stripes on the light emitting layer 13 so as to face each other.

The common electrode 14 has a low work function and is a substance suitable for a cathode material and is an opaque film, for example, Mg _0.9 Ag _0.1 is formed by vacuum deposition to a thickness of about 100 nm. It's a film.

When the organic electroluminescent element EL1A of the first embodiment is manufactured by the above steps, as shown in FIG. 9A, an arbitrary transparent pixel electrode (anode) 12 and an opaque common electrode are used. By applying a voltage to the electrode (cathode) 14, light emission of an arbitrary pixel can be taken out from the lower surface side of the transparent first substrate 11. At this time, R light is emitted from a portion of the light emitting layer 13 doped with the red light emitting dye Rc, G light is emitted from a portion of the light emitting layer 13 doped with the green light emitting dye Gc, and light is emitted from a portion of the light emitting layer 13 doped with the blue light emitting dye Bc. B light is emitted.

Further, as shown in FIG. 9B, as an opaque film, for example, Mg _0.9 Ag _{0 . 1} or the like to form a plurality of pixel electrodes 12 on the first substrate 11, and
If the common electrode 14 is formed on the light emitting layer 13 by using an ITO film or the like as a transparent film, the first pixel can emit light from any pixel.
It can be taken out from the transparent common electrode 14 side which is the upper surface side of the substrate 11, and in this case, the first substrate 11 is made of Si.
An opaque substrate such as can also be used.

Here, a method for manufacturing the organic electroluminescent element according to the first embodiment of the present invention and a modified example in which the organic electroluminescent element is partially modified will be briefly described with reference to FIGS. 10 to 12. .

FIG. 10 is a view for explaining a method of manufacturing an organic electroluminescent element according to the first embodiment of the present invention and a first modified example in which the organic electroluminescent element is partially modified, and FIG. 11 is related to the present invention. The figure for demonstrating the manufacturing method of the organic electroluminescent element of 1st Example, and the 2nd modification which partially modified the organic electroluminescent element, FIG.12 (a), (b) is 1st Example which concerns on this invention. It is a figure for demonstrating the manufacturing method of the example organic electroluminescent element, and the 3rd modification which partially modified the organic electroluminescent element.

First, as shown in FIG. 10, in the first modification in which the method for manufacturing an organic electroluminescence element of the first embodiment according to the present invention and the organic electroluminescence element is partially modified, a film is formed on the first substrate 11. A hole injection layer 15 is formed on the attached pixel electrode 12, and the hole injection layer 1 is formed.
5, the hole transport layer 16 is formed, and the hole transport layer 16 is further formed.
A light emitting layer 13 for doping the red light emitting dye Rc, the green light emitting dye Gc, and the blue light emitting dye Bc is formed thereon. Then, the luminescent dye R of each color to the luminescent layer 13
When the doping of c, Gc, and Bc is completed, the electron transport layer 17, the electron injection layer 18, and the common electrode 1 are formed on the light emitting layer 13.
By stacking 4 in order, the organic electroluminescence element EL1B of the first modified example is obtained, and this configuration makes it possible to further improve the light emission efficiency.

Next, as shown in FIG. 11, in the second modified example in which the method for manufacturing the organic electroluminescent element according to the first embodiment of the present invention and the organic electroluminescent element is partially modified, on the first substrate 11 The partition wall 19 is formed between the adjacent pixel element electrodes 12 by using SiO ₂ or the like to be slightly higher than the light emitting layer 13 by the CVD method or the like, and thus the organic electroluminescence element E of the second modified example.
We have L1C. Accordingly, when the R, G, and B second substrates 21 are placed on the first substrate 11, the convex portions 21 a of the second substrates 21 are brought into contact with the upper ends of the partition walls 19. It is possible to prevent each convex portion 21a from directly contacting the light emitting layer 13.

Further, as shown in FIGS. 12A and 12B, in the method of manufacturing the organic electroluminescent element of the first embodiment according to the present invention and the third modified example in which the organic electroluminescent element is partially modified, , Polyvinylcarbazole (PVC) that emits blue-violet light on the first substrate 11.
Z) is used to form the light emitting layer 13, the light emitting layer 1
3 is preliminarily dispersed with a luminescent dye of a color that emits light with a wavelength shorter than the wavelength of the luminescent color of the luminescent dye of the predetermined color formed on the second substrate 21. Here, the blue luminescent dye Bc is previously dispersed. deep. As a result, it is not necessary to prepare the second substrate 21 for B, and the second substrate 21 for R and the second substrate 21 for G are used in the light emitting layer 13 in which the blue light emitting dye Bc is dispersed in advance. , The red light-emitting dye Rc and the green light-emitting dye Gc respectively formed on the respective concave portions 21b of the respective second substrates 21.
Is doped, the organic electroluminescence element EL1D of the third modification is obtained.

At this time, since the blue luminescent dye Bc dispersed in the luminescent layer 13 emitting blue violet emits energy to the blue luminescent dye Bc inside the luminescent layer 13, blue luminescence (B luminescence) is possible. become. Further, when the red light emitting dye Rc is doped in the light emitting layer 13 in which the blue light emitting dye Bc is dispersed, energy is transferred from the blue light emitting dye Bc to the red light emitting dye Rc.
A red light emission (R light emission) becomes possible in the portion doped with. Similarly, when the green light emitting dye Gc is doped in the light emitting layer 13 in which the blue light emitting dye Bc is dispersed, energy is transferred from the blue light emitting dye Bc to the green light emitting dye Gc. Green light emission (G light emission) becomes possible at the portion doped with Gc.

<Second Embodiment> In the method for manufacturing an organic electroluminescence device and the organic electroluminescence device according to the second embodiment of the present invention, the first embodiment described above is used.
Although the substrate (TFT substrate) 11 and the second substrate (stamp substrate) 21 described above are used, in the second embodiment, unlike the first embodiment, the first substrate (TFT substrate) is used.
A second substrate 21 for G on which a blue luminescent dye Bc is preliminarily dispersed in a luminescent layer 13 on 11 and a green luminescent dye Gc is formed, and a red luminescent dye Rc and a green luminescent dye Gc are co-deposited on RG. The second substrate 21 is used.

For convenience of explanation, the same components as those in the first embodiment are designated by the same reference numerals, and the same reference numerals are also assigned to the luminescent pigments of the same color as in the first embodiment. 1 will be described, focusing on the points different from the first embodiment.
It demonstrates in order of a process using FIGS.

FIG. 13 is a schematic diagram for explaining the first step in the method for manufacturing an organic electroluminescent element of the second embodiment, and FIGS. 14A and 14B are diagrams of the organic electroluminescent element of the second embodiment. The schematic diagram for demonstrating the 2nd process in a manufacturing method, FIG.15 (a), (b)
1 is a schematic view for explaining a third step in the method for manufacturing the organic electroluminescent element of the second embodiment, FIG.
6 (a) and 6 (b) are schematic diagrams for explaining the fourth step in the method for manufacturing an organic electroluminescent element of the second embodiment, and FIGS. 17 (a) and 17 (b) are organic electroluminescent devices of the second embodiment. Fifth in manufacturing method of luminescence element
It is a schematic diagram for demonstrating a process.

First, in the first step of the second embodiment, as shown in FIG.
As shown in FIG. 2, the light emitting layer 1 in which the blue light emitting dye Bc is pre-dispersed on the plurality of pixel electrodes 12 filmed on the first substrate (TFT substrate) 11 and on the first substrate 11 between the pixel electrodes 12.
3 is uniformly formed. The light emitting layer 13 is the first
As in the example, for example, polyvinylcarbazole (PVCZ) which emits blue-violet light is used, and the blue fluorescent material or the blue phosphorescent material described in the first example is used in the light emitting layer 13. The blue luminescent dye Bc is previously dispersed. More specifically, when, for example, TPB (tetraphenyl butadiene) is used as the blue light emitting dye Bc among blue fluorescent dye materials, T is contained in the light emitting layer 13.
About 5 mol% of PB is dispersed in advance. When FIrpic is used as the blue luminescent dye Bc among blue phosphorescent dye materials, FIr is contained in the luminescent layer 13.
About 5 wt% of pic is dispersed in advance. As a result, the chromaticity of blue can be improved, and energy can be smoothly transferred to the blue luminescent dye Bc inside the light emitting layer 13, so that blue emission (B emission) with an emission wavelength peak of about 440 nm becomes possible. .

From the viewpoint of light emission efficiency of blue and colors other than blue, PBD (derivative of oxadiazole) or the like is dispersed in the light emitting layer 13 as a low molecular weight material for improving the electron transporting property by about 30 wt%. If so, the electron transporting property is improved for each color. Further, the blue light emitting dye Bc previously dispersed in the light emitting layer 13 is the green light emitting dye Gc formed on the second substrate 21 for G and the red light emitting film formed on the second substrate 21 for RG as described later. It is a luminescent dye that emits light at a wavelength shorter than the wavelength of each luminescent color of the dye Rc + the green luminescent dye Gc.

Then, the light emitting layer 13 in which the blue light emitting dye Bc is previously dispersed is formed on the first substrate 11 by spin coating or the like.
It is applied to a thickness of about 100 nm and then sufficiently dried.

Next, in the second step of the second embodiment, as shown in FIG.
As shown in (a) and (b), the convex portion 21a and the concave portion 21b
Two second substrates (stamp substrates) 21 for which G and RG are repeatedly formed are prepared.

That is, as shown in FIG. 14A, on each convex portion 21a and each concave portion 2 formed on the second substrate 21 for G.
A green luminescent dye Gc is formed on the layer 1b to a thickness of about 20 nm by a method such as a vacuum deposition method, a spin coating method, a dip coating method, or a wet process such as an inkjet method. At this time, as the green luminescent dye Gc, a known type of green fluorescent dye material or green phosphorescent dye material is used as in the first embodiment.

Further, as shown in FIG. 14B, RG
A red luminescent dye Rc and a green luminescent dye Gc are co-evaporated at a volume ratio of 1: 1 on each convex portion 21a and each concave portion 21b formed on the second substrate 21 for use to form a film of about 20 nm.
At this time, as the red light emitting dye Rc, a known type of red fluorescent dye material or red phosphorescent dye material is used as in the first embodiment, while the green light emitting dye Gc is the same as in the first embodiment and the above. Similar known types of green fluorescent or blue phosphorescent dye materials are used. Here, of the red fluorescent dye materials used as the red luminescent dye Rc, for example, when Neil Red is used, the crystallinity is high,
If only that film is formed, it does not become a film and is crystallized.
However, when Neil Red or the like is used, co-evaporation with, for example, coumarin 6 or the like among the green fluorescent dye materials described above as the green luminescent dye Gc having high amorphousness forms an amorphous mixed film. There is also the effect.

Also in the second step of the second embodiment described above, when the film is formed by using the wet process, the second substrate 21 for G and the second substrate 21 for RG are substantially the same as in the first embodiment.
If a hydrophilic treatment S as shown in FIG. 6 (a) is performed as a pre-treatment, the surface of the right and left vertical walls in each recess 21b is not made uneven, so that the left and right vertical walls in each recess 21b are not formed. Excessive particles of each luminescent dye Gc, Rc + Gc do not need to adhere to the surface of the wall.

Further, when the film is formed by using the vacuum evaporation method or the wet process, the water repellent treatment H as shown in FIG. 6B is performed as the pretreatment for the second step, as in the first embodiment. Is formed as necessary, or as shown in FIG. 6C, a metal such as gold Au or silver Ag, which has an extremely weak adhesive force, is formed as needed to form a film on each convex portion 21a. The unnecessary luminescent dyes Gc and Rc + Gc formed on the film are easily removed in the third step described below.

Next, in the third step of the second embodiment, as shown in FIG.
As shown in (a) and (b), the green light-emitting dye Gc and the red light-emitting dye Rc + the green light-emitting dye Gc formed on the respective convex portions 21a of the second substrates 21 for G and RG are the first and the second, respectively. Since it is unnecessary even in the second embodiment, each luminescent pigment formed on each convex portion 21a of each second substrate 21 is removed by an adhesive tape or a blade. As a result, the green light-emitting dye Gc and the red light-emitting dye Rc + the green light-emitting dye Gc remain deposited on the recesses 21b of the G and RG second substrates 21 respectively.

Next, in the fourth step of the second embodiment, as shown in FIG.
As shown in (a) and (b), the green light-emitting dye Gc, the red light-emitting dye Rc + the green light-emitting dye Gc formed on the recesses 21b of the second substrates 21 for G and RG, respectively,
The light emitting layer 13 + the blue light emitting dye Bc formed on the substrate 11 are sequentially doped (diffused). Here, since the width of each recess 21b formed in each second substrate 21 is formed to have the same size as the width of one pixel electrode 12 on the first substrate 11 as described above, each recess 21b has one width. Pixel electrode 12
The luminescent dyes Gc and Rc + Gc of the respective colors can be doped into the luminescent layer 13 + the blue luminescent dye Bc in the region corresponding to.

That is, as shown in FIG. 16A, the first
On the light emitting layer 13 + blue light emitting dye Bc formed on the substrate 11, the second substrate 21 for G having the green light emitting dye Gc formed on each recess 21b is placed. At this time, although the respective convex portions 21a formed on the second substrate 21 are in contact with the light emitting layer 13 + the blue luminous pigment Bc, the green luminous pigment Gc is peeled off from each convex portion 21a as described above.

Further, each concave portion 21 formed on the second substrate 21.
b is aligned with the pixel electrode 12 and placed every three electrodes. At this time, the green light emitting dye Gc formed on each recess 21b formed on the second substrate 21 is not in contact with the corresponding light emitting layer 13 on each pixel electrode 12.

Then, the second substrate 21 is overlaid on the first substrate 11 and inserted into a heating furnace (oven) having an optimum temperature atmosphere to heat both substrates 11 and 21 for a predetermined time. Then, the green light emitting dye Gc formed on each recess 21b is evaporated, and the blue light emitting dye Bc is dispersed in the light emitting layer 1.
After reaching 3, the green luminescent dye Gc diffuses into the luminescent layer 13 in which the blue luminescent dye Bc is dispersed at that position. Therefore, the green light emitting dye Gc formed on each recess 21b is doped only in the region corresponding to the green light emitting dye Gc on the pixel electrode 12 + the blue light emitting dye Bc. Then, the green light emitting dye Gc is contained in the light emitting layer 13 in which the blue light emitting dye Bc is dispersed.
Is doped with blue luminescent dye Bc and green luminescent dye Gc, the blue luminescent dye Bc receives energy from the luminescent layer 13 and
It plays a role of relaying the green luminescent dye Gc. In addition, the green luminescent dye Gc can receive energy more smoothly than when it receives energy directly without relay by the luminescent dye having a shorter emission wavelength, and thus the green emission efficiency is improved. Since the luminescence other than the green luminescent pigment Gc is suppressed, the chromaticity of green is improved.

At this time, the luminescent dye concentration in the luminescent layer 13 in which the blue luminescent dye Bc is dispersed has an appropriate value, below which the luminescence of the luminescent dye cannot be obtained, and above that concentration. The light emission efficiency decreases due to the quenching. Therefore, the luminescent dye concentration is optimized by controlling the heating temperature and the heating time. Here, the green luminescent dye G
Among the green fluorescent dye materials as c, for example, coumarin 6
In the case of using, the green fluorescent dye is heated at 140 ° C., which is an optimum heating temperature at which the green fluorescent dye is easily evaporated, for about 10 minutes, whereby the green fluorescent dye is dispersed in an optimum amount. Also, the green luminescent dye G
For example, Ir (pp
y) When ₃ is used, heating at an optimum heating temperature of 195 ° C. for about 10 minutes causes the green phosphorescent dye to easily evaporate,
An optimal amount of green fluorescent dye is dispersed.

Next, when the light emitting layer 13 + the blue light emitting dye Bc is completely doped with the green light emitting dye Gc, the second substrate 21 for G is removed from the first substrate 11 and the structure shown in FIG.
As shown in (b), the second substrate 21 for RG is
It is mounted on the light emitting layer 13 + blue light emitting pigment Bc formed on the substrate 11 in the same procedure as described above. In this case, the red light emitting dye R formed on each recess 21b of the second substrate 21
When the c + green luminescent dye Gc is aligned so as to face the pixel electrode 12 adjacent to the pixel electrode 12 doped with the green luminescent dye Gc, the luminescent layer 13 + blue on the corresponding pixel electrode 12 + blue in the heating furnace as described above. The red light emitting dye Rc + the green light emitting dye Gc is doped only in the region of the light emitting dye Bc. Then, when the red light emitting dye Rc + the green light emitting dye Gc is doped in the light emitting layer 13 in which the blue light emitting dye Bc is dispersed, the blue light emitting dye B is added in the light emitting layer 13.
c, the green luminescent dye Gc, and the red luminescent dye Rc are present, but the long wavelengths from the luminescent layer 13 to the blue luminescent dye Bc, from the blue luminescent dye Bc to the green luminescent dye Gc, and from the green luminescent dye Gc to the red luminescent dye Rc. The energy transfer is smoothly performed toward the. Therefore, as compared with the case where energy is directly received without the relay by the luminescent dye having a shorter emission wavelength than this, the emission efficiency of red is improved, and the emission from other than the red luminescent dye Rc is suppressed, so that the chromaticity of red is reduced. improves.

Here, of the red fluorescent dye materials, for example, Neil Red is used as the red luminescent dye Rc, and
When coumarin 6 is used among the green fluorescent dye materials as the green luminescent dye Gc, the red fluorescent luminescent dye and the green fluorescent luminescent dye are easily vaporized at an optimum heating temperature of 140 ° C.
When heated for about 10 minutes, the red fluorescent dye and the green fluorescent dye are dispersed in optimum amounts. In addition, the red luminescent dye R
Among red phosphorescent dye materials as c, for example, PtOEP
And Ir (ppy) ₃ of the green phosphorescent dye material is used as the green luminescent dye Gc, the optimum heating temperature 205 ° at which the red phosphorescent luminescent dye and the green phosphorescent luminescent dye are easily evaporated. When heated at C for about 10 minutes, the optimum amounts of the red phosphorescent dye and the green phosphorescent dye are dispersed.

In the fourth step, the order of doping the green light emitting dye Gc, the red light emitting dye Rc + the green light emitting dye Gc to the light emitting layer 13 may be started.

Next, in the fifth step of the second embodiment, FIG.
As shown in (a) and (b), the green light emitting dye G is formed in the light emitting layer 13 + the blue light emitting dye Bc formed on the first substrate 11.
c, the red luminescent dye Rc + the green luminescent dye Gc, respectively, and then, the common electrode (counter electrode) 14 serving as a cathode is made to face the plurality of pixel electrodes 12 on the light emitting layer 13 in which the blue luminescent dye Bc is dispersed in advance. By forming the film, the organic electroluminescence element EL2A of the second embodiment according to the present invention can be obtained.

At this time, the common electrode 14 is a substance having a low work function and suitable for a cathode material and is an opaque film, for example, Mg _0.9 Ag _0.1 or the like is formed to a thickness of about 100 nm by a vacuum deposition method or the like. The film is being formed.

When the organic electroluminescence device EL2A of the second embodiment is manufactured by the above process, as shown in FIG. 17A, an arbitrary transparent pixel electrode (anode) 12 and an opaque common pixel electrode 12 are used. By applying a voltage to the electrode (cathode) 14, light emission of an arbitrary pixel can be taken out from the lower surface side of the transparent first substrate (TFT substrate) 11. At this time, B light is emitted from a portion in which the blue light emitting dye Bc is previously dispersed in the light emitting layer 13, and the light emitting layer 13+
G light is emitted from the site where the blue light emitting dye Bc is doped with the green light emitting dye Gc, and R light is emitted from the region where the red light emitting dye Rc + the green light emitting dye Gc is doped into the light emitting layer 13 + blue light emitting dye Bc.

In addition, as shown in FIG.
As a clear film, for example Mg_0.9Ag _0.1Using
A plurality of pixel electrodes 12 are film-formed on the first substrate 11, and
And the common electrode 14 using an ITO film or the like as a transparent film.
Is formed on the light emitting layer 13 in which the blue light emitting dye Bc is dispersed.
Then, the light emission of an arbitrary pixel is transmitted to the upper surface side of the first substrate 11.
Can be taken out from the transparent common electrode 14 side.
In this case, the first substrate 11 may be an opaque substrate such as Si.
Plates can also be used.

Here, a method of manufacturing the organic electroluminescent element according to the second embodiment of the present invention and a modified example in which the organic electroluminescent element is partially modified will be briefly described with reference to FIGS. 18 and 19. .

FIG. 18 is a view for explaining a method of manufacturing an organic electroluminescent element according to the second embodiment of the present invention and a first modified example in which the organic electroluminescent element is partially modified, and FIG. 19 is related to the present invention. It is a figure for demonstrating the manufacturing method of the organic electroluminescent element of 2nd Example, and the 2nd modification which partially modified the organic electroluminescent element.

First, as shown in FIG. 18, in the first modification in which the method for manufacturing an organic electroluminescence element of the second embodiment according to the present invention and the organic electroluminescence element is partially modified, a film is formed on the first substrate 11. A hole injection layer 15 is formed on the attached pixel electrode 12, and the hole injection layer 1 is formed.
5, the hole transport layer 16 is formed, and the hole transport layer 16 is further formed.
In order to dope the green luminescent dye Gc and the red luminescent dye Rc + the green luminescent dye Gc on the top, the blue luminescent dye B is added.
The light emitting layer 13 in which c is dispersed is formed. Then, the luminescent dyes Gc of the respective colors to the luminescent layer 13 + blue luminescent dye Bc,
When the doping of Rc + Gc is completed, the light emitting layer 13
The electron transport layer 17, the electron injection layer 18, and the common electrode 14 are sequentially stacked on the above to obtain the organic electroluminescence element EL2B of the first modified example, and this configuration makes it possible to further improve the light emission efficiency. .

Next, as shown in FIG. 19, in the second modified example in which the method for manufacturing an organic electroluminescent element of the second embodiment according to the present invention and the organic electroluminescent element is partially modified, on the first substrate 11 The partition wall 19 is formed between the adjacent pixel element electrodes 12 by using SiO ₂ or the like to be slightly higher than the light emitting layer 13 by the CVD method or the like, and thus the organic electroluminescence element E of the second modified example.
You have L2C. As a result, each second for G and RG
When the substrate 21 is placed on the first substrate 11, each second substrate 2
It is possible to prevent each convex portion 21a from directly contacting the light emitting layer 13 by bringing each convex portion 21a of No. 1 into contact with the upper end of the partition wall 19.

<Third Embodiment> In the method of manufacturing an organic electroluminescence device and the organic electroluminescence device of the third embodiment according to the present invention, the first embodiment described above is used.
A substrate (TFT substrate) 11, a second R substrate (stamp substrate) 21 formed for the third embodiment, and a third G substrate.
A substrate (stamp substrate) 31 is used.

For convenience of explanation, the same components as those in the first and second embodiments are designated by the same reference numerals, and
The same reference numerals will be given to the luminescent pigments of the same color as in the second embodiment, and constituent members different from those in the first and second embodiments will be given new reference numerals.

20 (a) and 20 (b) show a third embodiment of the present invention.
In the method for manufacturing an organic electroluminescent element and the organic electroluminescent element of the embodiment,
It is the figure shown typically in order to demonstrate a board | substrate (stamp board) and a 3rd board | substrate (stamp board).

In the method for manufacturing an organic electroluminescent element and the organic electroluminescent element of the third embodiment, the second substrate 21 and the third substrate 31 as shown in FIGS. Two types of stamp substrates are prepared in advance as the stamp substrates to be mounted on the first substrate 11 described using 1 (a) and (b).

Second substrate (stamp substrate) 21 described above
Has exactly the same shape as that described in the first embodiment with reference to FIGS. 2 and 3 (a) and 3 (b), and the convex portion 21a and the concave portion 21b correspond to three pixels of RGB. As a set, this set is repeated a plurality of sets along the column direction and / or the row direction of the pixel electrode 12 (FIG. 1), and is formed into an uneven shape by a method such as a photolithography method or an etching method using a silicon substrate or the like. ing.

Here, each convex portion 2 formed on the second substrate 21.
The width of 1a is formed to include two widths of the pixel electrodes 12 on the first substrate 11 and the left and right gaps between the two pixel electrodes 12, and specifically, each of the convex portions 21a. Width of {2
× 13 + 1 × 3} μm = 29 μm, and the height of each convex portion 21 a is 10 μ with respect to each concave portion 21 b.
It projects about m. In addition, the width of each recess 21 b formed on the second substrate 21 is equal to that of one pixel electrode 1 on the first substrate 11.
The width is the same as the width of 2 and is set to 13 μm. On the other hand, the above-mentioned third substrate (stamp substrate) 31 is newly formed for the third embodiment, and on the light emitting layer 13 formed by previously dispersing the blue light emitting dye Bc on the first substrate 11. And a concave portion 31b having a substantially same area as the pixel electrode 12 corresponding to the light emitting layer portion to be dented adjacent to the convex portion 31a and to be doped with a luminescent dye of a predetermined color. As one set, and this set is repeated along the column direction and / or the row direction of the pixel electrode 12 to form unevenness by a method such as a photolithography method or an etching method using a silicon substrate or the like.

Here, each convex portion 3 formed on the third substrate 31.
The width of 1a is formed to include the width of one pixel electrode 12 on the first substrate 11 and the gap between the left and right of the pixel electrode 12, and specifically, the width of each convex portion 31a is 1a. {13+
It is set to 1 × 2} μm = 15 μm, and the height of each convex portion 31a projects about 10 μm with respect to each concave portion 31b. In addition, each recess 31 formed in the third substrate 31
The width of b is formed to include two widths of the pixel electrode 12 on the first substrate 11, and specifically, each recess 31 is formed.
The width of b is set to {2 × 13 + 1} μm = 27 μm. Therefore, the total area of one set of the convex portion 31a and the concave portion 31b is set to the three pixel electrodes 1 corresponding to the three RGB pixels.
The area is approximately equal to 2.

The planar shapes of the second and third substrates 21 and 31 are the same as in FIGS. 3 (a) and 3 (b) described above, although the illustration thereof is omitted here. 21a, 31
a and the recesses 21b and 31b are formed in parallel with each other in a stripe shape, or the recesses 21b and 31b are arranged in a staggered pattern.

Next, the first substrate (TFT substrate) 11 and 2
21 to 2 for the method of manufacturing the organic electroluminescence device of the third embodiment according to the present invention using the second and third substrates (stamp substrates) 21 and 31 of the kind
5 will be described in the order of steps.

FIG. 21 is a schematic diagram for explaining the first step in the method for manufacturing an organic electroluminescent element of the third embodiment, and FIGS. 22 (a) and 22 (b) are the organic electroluminescent element of the third embodiment. 23A and 23B are schematic views for explaining the second step in the manufacturing method.
2 is a schematic diagram for explaining a third step in the method for manufacturing the organic electroluminescent element of the third embodiment, FIG.
4 (a) and 4 (b) are schematic diagrams for explaining the fourth step in the method for manufacturing an organic electroluminescent element of the third embodiment, and FIGS. 25 (a) and 25 (b) are organic electroluminescent elements of the third embodiment. Fifth in manufacturing method of luminescence element
It is a schematic diagram for demonstrating a process.

First, in the first step of the third embodiment, as shown in FIG.
As shown in FIG. 2, the light emitting layer 1 in which the blue light emitting dye Bc is pre-dispersed on the plurality of pixel electrodes 12 filmed on the first substrate (TFT substrate) 11 and on the first substrate 11 between the pixel electrodes 12.
3 is uniformly formed. The light emitting layer 13 described above uses, for example, polyvinyl carbazole (PVCZ) that emits blue-violet light, as in the first and second embodiments. The blue luminescent dye Bc is previously dispersed by using a conductive material or a blue phosphorescent material. More specifically, when, for example, TPB (tetraphenyl butadiene) is used as the blue light emitting dye Bc among blue fluorescent dye materials, T is contained in the light emitting layer 13.
About 5 mol% of PB is dispersed in advance. When FIrpic is used as the blue luminescent dye Bc among blue phosphorescent dye materials, FIr is contained in the luminescent layer 13.
About 5 wt% of pic is dispersed in advance. Thereby, the chromaticity of blue can be improved, and energy can be smoothly transferred from the light emitting layer 13 to the blue light emitting pigment Bc, so that the blue light emission (B
Light emission) is possible.

Further, from the viewpoint of light emission efficiency of blue and colors other than blue, PBD (derivative of oxadiazole) or the like is dispersed in the light emitting layer 13 as a low molecular weight material for improving the electron transporting property by about 30 wt%. If so, the electron transporting property is improved for each color. Further, the blue light emitting dye Bc previously dispersed in the light emitting layer 13 is the red light emitting dye Rc formed on the second substrate 21 for R and the third light emitting dye for G which is formed on the second substrate 21 for R as described later.
It is a luminescent dye that emits light at a wavelength shorter than the wavelength of each luminescent color by the green luminescent dye Gc formed on the substrate 31.

Then, the light emitting layer 13 in which the blue light emitting dye Bc is previously dispersed is formed on the first substrate 11 by spin coating or the like.
It is applied to a thickness of about 100 nm and then sufficiently dried.

Next, in the second step of the third embodiment, as shown in FIG.
As shown in (a) and (b), the convex portion 21a and the concave portion 21b
The second substrate (stamp substrate) 21 in which the above is repeatedly formed is prepared for R, and the third substrate (stamp substrate) 31 in which the convex portion 31a and the concave portion 31b are repeatedly formed is prepared for G.

That is, as shown in FIG. 22A, on each convex portion 21a and each concave portion 2 formed on the R second substrate 21.
A red luminescent dye Rc is formed on the layer 1b to a thickness of about 20 nm by a method such as a vacuum evaporation method, a spin coating method, a dip coating method, or a wet process such as an inkjet method. At this time, as the red luminescent dye Rc, a known red fluorescent dye material or a known red phosphorescent dye material is used as in the first and second embodiments.

Further, as shown in FIG. 22B, on each convex portion 31a and each concave portion 3 formed on the G third substrate 31.
A green luminescent dye Gc is formed on the layer 1b to a thickness of about 20 nm by a method such as a vacuum deposition method, a spin coating method, a dip coating method, or a wet process such as an inkjet method. At this time, as the green luminescent dye Gc, a known green fluorescent dye material or a known green phosphorescent dye material is used as in the first and second embodiments.

Also in the second step of the third embodiment described above, when the film is formed by the wet process, the second substrate 21 for R and the third substrate 31 for G are substantially the same as in the first embodiment. As a pretreatment to the hydrophilic treatment S as shown in FIG.
By doing so, the surfaces of the right and left vertical walls in the recesses 21b of the second and third substrates 21 and 31 and in the recesses 31b are not made uneven, so that the left and right vertical walls in the recesses 21b and the recesses 31b are not formed. Excessive particles of the luminescent dyes Rc and Gc do not adhere to the surface of the transparent wall.

Further, when the film is formed by using the vacuum evaporation method or the wet process, the water repellent treatment H as shown in FIG. 6B is performed as the pretreatment for the second step, as in the first embodiment. Is performed as necessary, or as shown in FIG. 6C, a metal such as gold Au or silver Ag, which has an extremely weak adhesive force, is formed as needed to form the second and third substrates 21. , 31 of the unnecessary luminescent dyes Rc and Gc formed on the respective convex portions 21a and the respective convex portions 31a can be easily removed in the third step described below.

Next, in the third step of the third embodiment, as shown in FIG.
As shown in (a) and (b), the red luminescent dye Rc formed on each of the convex portions 21a of the R second substrate 21,
Since the green luminescent dye Gc formed on each of the convex portions 31a of the third substrate 31 for G is unnecessary in this third embodiment as well, the green luminescent dye Gc is not necessary on each of the convex portions 21a of the second substrate 21. Each luminescent pigment formed on each convex portion 31a of the substrate 31 is removed by an adhesive tape or a blade. As a result, the red luminescent pigment Rc is formed on each recess 21b of the R second substrate 21.
And the green luminescent dye Gc remains deposited on the respective concave portions 31b of the G third substrate 31.

Next, in the fourth step of the third embodiment, as shown in FIG.
As shown in (a) and (b), the green light-emitting dye Gc formed on each recess 31b of the G third substrate 31 respectively,
The red luminescent dye Rc formed on each recess 21b of the R second substrate 21 is sequentially doped (diffused) into the luminescent layer 13 + blue luminescent dye Bc formed on the first substrate 11 respectively. There is. Also in this third embodiment, the order of doping is not limited.

Here, each recess 2 formed on the second substrate 21.
Since the width of 1b is formed to have the same size as the width of one pixel electrode 12 on the first substrate 11 as described above, the light emitting layer 13 of the portion corresponding to the one pixel electrode 12 + the blue light emitting pigment The red light emitting dye Rc can be doped into Bc. In addition, since the width of each recess 31a formed on the third substrate 31 is formed to be the width of two pixels on the first substrate 11 as described above, a portion corresponding to each two pixel electrodes 12 is formed. Green light emitting dye G in light emitting layer 13 + blue light emitting dye Bc
c can be doped.

That is, as shown in FIG. 24 (a), the first
The convex portions 31a formed on the third substrate 31 for G are placed in contact with each other on the light emitting layer 13 + blue light emitting pigment Bc formed on the substrate 11, but the convex portions 31a are green as described above. The luminescent dye Gc is peeled off.

The green luminescent dye Gc formed on each recess 31b of the third substrate 31 corresponds to the luminescent layer portion to be doped with the green luminescent dye Gc.
The respective concave portions 31b are opposed to the corresponding pixel electrodes 12 through the light emitting layer portion to be doped with the green light emitting dye Gc, and the respective concave portions 31b formed with a width of two pixels are formed on the first substrate. When facing each of the two pixel electrodes on 11 and mounting the concave portions 31b so as to be aligned at intervals of 3 pixels, the green luminescent dye G formed on each concave portion 21b is deposited.
c is the light emitting layer 1 on each of the two pixel electrodes 12 corresponding to this.
It is not in contact with 3.

After that, the third substrate 31 is placed on the first substrate 11 and inserted into a heating furnace (oven) having an optimum temperature atmosphere to heat both substrates 11 and 31 for a predetermined time. Then, the green light emitting dye Gc formed on each recess 31b is evaporated, and the light emitting layer 1 in which the blue light emitting dye Bc is dispersed.
After reaching 3, the green luminescent dye Gc diffuses into the luminescent layer 13 in which the blue luminescent dye Bc is dispersed at that position. Therefore, the green luminescent dye Gc formed on each of the recesses 31b is doped only in the corresponding portions of the luminescent layer 13 + the blue luminescent dye Bc on each of the two pixel electrodes 12.

When the green luminescent dye Gc is doped in the luminescent layer 13 in which the blue luminescent dye Bc is dispersed,
In the light emitting layer 13, a blue light emitting dye Bc and a green light emitting dye Gc
And the blue luminescent dye Bc is present in the luminescent layer 1
It plays a role of a relay that receives the energy from 3 and transfers it to the green luminescent dye Gc. Further, the green luminescent dye Gc is
As compared with the case where the energy is received directly without the relay by the luminescent dye having a short emission wavelength, the energy can be received more smoothly, so that the emission efficiency of the green color is improved, whereby the emission other than the green luminescent pigment Gc is increased. Since it is held down, the chromaticity of green is improved.

At this time, the luminescent dye concentration in the luminescent layer 13 in which the blue luminescent dye Bc is dispersed has an appropriate value, below which the luminescence of the luminescent dye cannot be obtained, and above that concentration. The light emission efficiency decreases due to the quenching. Therefore, the luminescent dye concentration is optimized by controlling the heating temperature and the heating time. Here, the green luminescent dye G
Among the green fluorescent dye materials as c, for example, coumarin 6
In the case of using, the green fluorescent dye is heated at 140 ° C., which is an optimum heating temperature at which the green fluorescent dye is easily evaporated, for about 10 minutes, whereby the green fluorescent dye is dispersed in an optimum amount. Also, the green luminescent dye G
For example, Ir (pp
y) When ₃ is used, heating at an optimum heating temperature of 195 ° C. for about 10 minutes causes the green phosphorescent dye to easily evaporate,
An optimal amount of green phosphorescent dye is dispersed.

Next, when the light emitting layer 13 + the blue light emitting dye Bc has been doped with the green light emitting dye Gc, the third substrate 31 for G is removed from the first substrate 11 and the structure shown in FIG.
As shown in (b), the second substrate 21 for R is placed on the light emitting layer 13 + the blue light emitting pigment Bc formed on the first substrate 11 in the same procedure as described above. In this case, the second
Red luminescent dye Rc formed on each recess 21b of the substrate 21
Are two pixel electrodes 1 doped with green luminescent dye Gc
When aligned so as to face any one of the pixel electrodes 12 of the two, only the region of the light emitting layer 13 + the blue light emitting dye Bc + the green light emitting dye Gc on the pixel electrode 12 corresponding to the above in the heating furnace. Is doped with the red light emitting dye Rc. When the red light emitting dye Rc is further doped into the light emitting layer 13 in which the blue light emitting dye Bc is dispersed and the green light emitting dye Gc is doped, the green light emitting dye Gc is changed from the blue light emitting dye Bc to the red light emitting dye Rc. Energy plays a role of relay when transferring energy, and energy is smoothly transferred as compared with the case where energy is directly transferred from the blue light-emitting dye Bc in the light-emitting layer 13 to the red light-emitting dye Rc. Efficiency is improved. Therefore, as compared with the case where energy is directly received without the relay by the luminescent dye having a shorter emission wavelength than this, the emission efficiency of red is improved, and the emission from other than the red luminescent dye Rc is suppressed, so that the chromaticity of red is reduced. improves.

Here, when, for example, DCJT is used as the red luminescent dye Rc among red fluorescent dye materials, the optimum heating temperature 160 ° at which the red fluorescent luminescent dye easily evaporates.
When heated at C for about 10 minutes, the red luminescent dye Rc is dispersed in an optimum amount. Further, when, for example, PtOEP is used among the red phosphorescent dye materials as the red light emitting dye Rc, the optimum heating temperature 205 ° at which the red phosphorescent light emitting dye easily evaporates.
When heated at C for about 10 minutes, the red luminescent dye Rc is dispersed in an optimum amount.

Next, in the fifth step of the third embodiment, as shown in FIG.
As shown in (a) and (b), the green light emitting dye G is formed in the light emitting layer 13 + the blue light emitting dye Bc formed on the first substrate 11.
c and the red luminescent dye Rc are doped in the above order respectively, and the blue luminescent dye Bc is previously dispersed in the luminescent layer 13.
A common electrode (counter electrode) 14 serving as a cathode is formed on the pixel electrode 12 so as to face the pixel electrodes 12, thereby forming an organic electroluminescent element EL3A according to the third embodiment of the present invention.
Is obtained.

At this time, the common electrode 14 is a substance having a low work function and suitable for the cathode material and is an opaque film, for example, Mg _0.9 Ag _0.1 or the like is formed to a thickness of about 100 nm by a vacuum deposition method or the like. The film is being formed.

When the organic electroluminescent element EL3A of the third embodiment is manufactured by the above steps, as shown in FIG. 25 (a), an arbitrary transparent pixel electrode (anode) 12 and an opaque common pixel electrode 12 are used. By applying a voltage to the electrode (cathode) 14, light emission of an arbitrary pixel can be taken out from the lower surface side of the transparent first substrate (TFT substrate) 11. At this time, B light is emitted from a portion in which the blue light emitting dye Bc is previously dispersed in the light emitting layer 13, and the light emitting layer 13+
G light is emitted from a site where the blue light emitting dye Bc is doped with the green light emitting dye Gc, and R light is emitted from a region where the red light emitting dye Rc is doped into the light emitting layer 13 + blue light emitting dye Bc + green light emitting dye Gc.

In addition, as shown in FIG.
As a clear film, for example Mg_0.9Ag _0.1Using
A plurality of pixel electrodes 12 are film-formed on the first substrate 11, and
And the common electrode 14 using an ITO film or the like as a transparent film.
Is formed on the light emitting layer 13 in which the blue light emitting dye Bc is dispersed.
Then, the light emission of an arbitrary pixel is transmitted to the upper surface side of the first substrate 11.
Can be taken out from the transparent common electrode 14 side.
In this case, the first substrate 11 may be an opaque substrate such as Si.
Plates can also be used.

Here, a method of manufacturing the organic electroluminescent element according to the third embodiment of the present invention and a modified example in which the organic electroluminescent element is partially modified will be briefly described with reference to FIGS. 26 and 27. .

FIG. 26 is a view for explaining a method of manufacturing an organic electroluminescent element according to the third embodiment of the present invention and a first modified example in which the organic electroluminescent element is partially modified, and FIG. 27 is related to the present invention. It is a figure for demonstrating the manufacturing method of the organic electroluminescent element of 3rd Example, and the 2nd modification which partially modified the organic electroluminescent element.

First, as shown in FIG. 26, in the method of manufacturing an organic electroluminescent element according to the third embodiment of the present invention and the first modified example in which the organic electroluminescent element is partially modified, a film is formed on the first substrate 11. A hole injection layer 15 is formed on the attached pixel electrode 12, and the hole injection layer 1 is formed.
5, the hole transport layer 16 is formed, and the hole transport layer 16 is further formed.
The light emitting layer 13 in which the blue light emitting dye Bc is dispersed for doping the green light emitting dye Gc and the red light emitting dye Rc is formed thereon. Then, the electron transport layer 17, the electron injection layer 18, and the common electrode 14 are sequentially stacked on the light emitting layer 13 at the stage when the light emitting layer 13 + the blue light emitting dye Bc is doped with the respective light emitting dyes Rc and Gc. The organic electroluminescent element EL3B of the first modified example is obtained, and this configuration makes it possible to further improve the light emission efficiency.

Next, as shown in FIG. 27, in the second modified example in which the method for manufacturing an organic electroluminescent element of the third embodiment according to the present invention and the organic electroluminescent element is partially modified, on the first substrate 11. The partition wall 19 is formed between the adjacent pixel element electrodes 12 by using SiO ₂ or the like to be slightly higher than the light emitting layer 13 by the CVD method or the like, and thus the organic electroluminescence element E of the second modified example.
L3C is obtained, and when the second substrate 21 for R is placed on the first substrate 11, for example, by bringing each convex portion 21a of the second substrate 21 into contact with the upper end of the partition wall 19, It is possible to prevent each convex portion 21a from directly contacting the light emitting layer 13, and the same applies to the third substrate 31 for G as the second substrate 21.

<Fourth Embodiment> In the method for manufacturing an organic electroluminescence device and the organic electroluminescence device according to the fourth embodiment of the present invention, the first embodiment described above is used.
The doping technical idea in the embodiment is applied, and in the fourth embodiment, the red light-emitting dye formed on each convex portion 41a of each second substrate (stamp substrate) 41 for R, G, and B. Rc, green luminescent dye Gc, blue luminescent dye Bc
The feature is that only the light emitting layer 13 formed on the first substrate 11 is doped. Accordingly, the shape of the second substrate 41 used in the fourth embodiment is the same as that shown in FIGS.
The dimensional relationship of each concavo-convex portion is opposite to that of the second substrate (stamp substrate) 21 used in the first embodiment described in (a) and (b).

FIG. 28 is a schematic view for explaining the second substrate (stamp substrate) in the method of manufacturing an organic electroluminescent element and the organic electroluminescent element of the fourth embodiment according to the present invention, FIG. 29A and 29B are plan views showing the second substrate (stamp substrate) shown in FIG. 28 in a plan view, in which (a) shows a case of being formed in a stripe shape and (b) shows a case of forming in a staggered shape. It is a figure.

As shown in FIG. 28, the second substrate (stamp substrate) 41 used in the fourth embodiment is placed on the light emitting layer 13 formed on the first substrate 11 and doped with a light emitting dye of a predetermined color. A convex portion 41a having substantially the same area as that of the pixel electrode 12 corresponding to the light emitting layer portion to be formed and a concave portion 41b which is recessed adjacent to the convex portion 41a are set as one set, and this set is arranged in a row of the pixel electrodes 12. It is repeatedly formed along the direction and / or the row direction, and is formed in an uneven shape by a method such as a photolithography method or an etching method using a silicon substrate or the like.

Here, each convex portion 4 formed on the second substrate 41
The width of 1a is set to 13 μm, which is the same as the width of one pixel electrode 12 on the first substrate 11, and each convex portion 4
The height of 1a projects by about 10 μm with respect to each recess 41b. The width of each recess 41b formed on the second substrate 41 is equal to the width of the two pixel electrodes 12 on the first substrate 11,
The size is formed to include the left and right gaps between the two pixel electrodes 12, and specifically, the width of each recess 41b is {2 × 13.
+ 1 × 3} μm = 29 μm is set. Therefore,
The total area of one set of the convex portion 41a and the concave portion 41b is R
The areas of the three pixel electrodes 12 corresponding to the GB3 pixels are substantially matched.

Accordingly, the planar shape of the second substrate 41 is set such that the convex portions 41a and the concave portions 41b have the above-described dimensions in the width direction, as shown in FIG. In addition, the convex portions 4a and the concave portions 41b are formed to be long in the depth direction (column direction or row direction of the pixel electrode 12).
1a and each recess 41b are arranged in a stripe pattern,
Alternatively, as shown in FIG. 29B, the convex portions 41 a are arranged in a staggered pattern with respect to the plurality of pixel electrodes 12.

Next, the first substrate (TFT substrate) 11 and the second substrate
A method of manufacturing the organic electroluminescent element of the fourth embodiment of the present invention using the substrate (stamp substrate) 41 will be described in the order of steps with reference to FIGS. 30 to 33.

FIG. 30 is a schematic diagram for explaining the first step in the method for manufacturing an organic electroluminescent element of the fourth embodiment, and FIGS. 31 (a) to 31 (c) show the organic electroluminescent element of the fourth embodiment. FIGS. 32A and 32B are schematic diagrams for explaining the second step in the manufacturing method.
3 is a schematic diagram for explaining a third step in the method for manufacturing the organic electroluminescent element of the fourth embodiment, FIG.
3 (a) and 3 (b) are schematic diagrams for explaining a fourth step in the method for manufacturing an organic electroluminescent element of the fourth embodiment.

First, in the first step of the fourth embodiment, as shown in FIG.
As shown in FIG. 10, the light emitting layer 13 is formed on the plurality of pixel electrodes 12 formed on the first substrate (TFT substrate) 11 and on the first substrate 11 between the pixel electrodes 12 by spin coating or the like.
It is applied to a thickness of about 0 nm to form a uniform film, and then sufficiently dried.

Next, in the second step of the fourth embodiment, as shown in FIG.
As shown in (a) to (c), on each convex portion 41a and each concave portion 41b formed on each second substrate 41 for R, G, and B.
A red luminescent dye Rc, a green luminescent dye Gc, and a blue luminescent dye Bc are formed on the upper surface by a vacuum deposition method, a spin coating method, a dip coating method, a wet process such as an inkjet method, or the like to have a thickness of about 20 nm. Also here, as the luminescent dyes Rc, Gc, and Bc of each color, a fluorescent dye material and / or a phosphorescent dye material is appropriately used.

At this time, in the second step, on the convex portions 41a and the concave portions 41 formed on the R, G, and B second substrates 41 respectively.
When the red luminescent dye Rc, the green luminescent dye Gc, and the blue luminescent dye Bc are formed on b by using the vacuum deposition method, the particles of the luminescent dyes Rc, Gc, and Bc of each color are formed on the second substrate 41.
Since they go straight toward the respective convex portions 41a and the respective concave portions 41b, the extra luminescent dyes R are formed on the right and left vertical walls (= the walls on both sides of the respective convex portions 41a) in the respective concave portions 41b.
Particles of c, Gc and Bc do not adhere.

On the other hand, when a film is formed by a wet process such as a spin coating method, a dip coating method or an ink jet method, the luminescent dyes Rc, Gc and Bc of each color are added in an organic solvent such as chloroform and acetone by several wt%. Since the solution which has been dissolved to some extent is applied, the right and left vertical walls (= each convex portion 4) in each concave portion 41b of each second substrate 41 are
Excessive luminescent dyes Rc, Gc, Bc on both sides of 1a)
Particles will adhere. Therefore, when a film is formed using a wet process, as a pretreatment of the second step, as a pretreatment of the second step, in order to prevent extra particles of the respective luminescent dyes Rc, Gc, and Bc from adhering to the right and left vertical walls in each recess 41b, as shown in FIG. The hydrophilic treatment S as shown in (a) is performed, and since it has been described in detail in the first embodiment, the description thereof is omitted.

Next, in the third step of the fourth embodiment, FIG.
As shown in (a) to (c), the red luminescent pigment Rc, the green luminescent pigment Gc, and the blue luminescent pigment formed on the respective convex portions 41a of the R, G, and B second substrates 41 respectively. Bc
Since the light emitting layers 13 formed on the first substrate 11 are sequentially doped (diffused), the light emitting dyes R of the respective colors formed on the respective convex portions as described in the first embodiment.
The step of removing c, Gc and Bc is eliminated.

Since the width of each convex portion 41a formed on each second substrate 41 is the same as the width of one pixel electrode 12 on the first substrate 11 as described above, 1 each
The luminescent dyes Rc, Gc, and Bc of the respective colors can be doped in the luminescent layer 13 at the portions corresponding to the individual pixel electrodes 12.

That is, as shown in FIG. 32 (a), the first
When the second substrate 41 for R having the red luminescent pigment Rc formed on each of the convex portions 41a and each of the concave portions 41b is placed on the light emitting layer 13 formed on the substrate 11, the second substrate 41 is placed. The red luminescent dye Rc formed on each convex portion 41a of the
This corresponds to the light emitting layer site to be doped on the light emitting layer 13 formed above, and the red light emitting dye Rc film formed on each convex portion 41b is brought into contact with the light emitting layer site to be doped and And the convex portions 41b are placed in alignment with the pixel electrode 12 so as to face the pixel electrode 12 at intervals of three. At this time, the red luminescent pigment Rc formed on each recess 41b of the second substrate 41 is separated from the top of the luminescent layer 13 by about 10 μm. In the fourth embodiment, each recess 4 is controlled by the temperature control of the heating furnace (oven).
The light emitting layer 13 is not doped with the red light emitting dye Rc formed on 1b.

Then, the second substrate 41 is placed on the first substrate 11 and inserted into a heating furnace (oven) having an optimum temperature atmosphere to heat both substrates 11 and 41 for a predetermined time. To do. During this heating period, the red luminescent pigment Rc formed on each convex portion 41a of the second R substrate 41 dissolves and disperses in the luminescent layer 13 at this position, and R luminescence becomes possible. Here, if the temperature of the heating furnace is set higher than the optimum temperature, the red luminescent pigment Rc formed on each recess 41b of the R second substrate 41 is evaporated and reaches the luminescent layer 13. Therefore, the temperature control of the heating furnace is important so that the red luminescent dye Rc formed on each of the recesses 41b is not dispersed in the light emitting layer 13 because it is dispersed in the light emitting layer 13 in a portion where it is not desired to dope. In this case, the optimum heating condition of the heating furnace is such that, for example, when DCJT is used among the red fluorescent dye materials as the red light emitting dye Rc, the red light emitting dye Rc formed on each convex portion 41a is the light emitting layer 13 The temperature at which the red luminescent dye Rc that can be doped inside and formed on each recess 41b cannot reach the luminescent layer 13 is 140 ° C., and the heating time is about 10 minutes. When PtOEP, for example, is used as the red luminescent dye Rc among red phosphorescent dye materials, the heating temperature is 165 ° C. and the heating time is 10
It's about a minute.

Next, after the red light emitting dye Rc is doped into the light emitting layer 13, the second substrate 41 for R is removed from the first substrate 11 and, as shown in FIG. The second substrate 41 for use is placed on the light emitting layer 13 formed on the first substrate 11. In this case, when the green light emitting dye Gc formed on each convex portion 41a of the second substrate 41 is aligned so as to face the pixel electrode 12 adjacent to the pixel electrode 12 doped with the red light emitting dye Rc, 2 board 41
In the heating furnace having the optimum temperature atmosphere for the green luminescent dye Gc formed on each of the convex portions 41a, the green luminescent dye G is formed only on the corresponding portion of the luminescent layer 13 on the pixel electrode 12 as described above.
It is doped with c to enable G emission. Even in this step, the green light emitting dye Gc formed on each recess 41b of the second substrate 41 for G is not doped in the light emitting layer 13. In this case, the optimum heating condition of the heating furnace is that, when, for example, coumarin 6 is used among the green fluorescent dye materials as the green light emitting dye Gc, the green light emitting dye Gc formed on each convex portion 41a is the light emitting layer. The temperature is 120 ° C. at which the green light-emitting dye Gc that can be doped in 13 and formed on each recess 41b cannot reach the light-emitting layer 13, and the heating time is 10
It's about a minute. Further, when, for example, Ir (ppy) ₃ is used among the green phosphorescent dye materials as the green luminescent dye Gc, the heating temperature is 155 ° C. and the heating time is about 10 minutes.

Further, after the green light emitting dye Gc has been doped into the light emitting layer 13, the second substrate 41 for G is removed from the first substrate 11 and, as shown in FIG. The second substrate 41 is placed on the light emitting layer 13 formed on the first substrate 11. In this case, when the blue light emitting dye Bc formed on each convex portion 41a of the second substrate 41 is aligned so as to face the pixel electrode 12 adjacent to the pixel electrode 12 doped with the green light emitting dye Gc, Convex portion 41a
The blue luminescent dye Bc is doped only in the portion of the luminescent layer 13 on the pixel electrode 12 corresponding to the above in the heating furnace of the optimum temperature atmosphere with respect to the blue luminescent dye Bc formed above, and the B luminescent light is emitted. Will be possible. Also in this step, the blue luminescent dye B formed on each recess 41b of the second substrate 41 for B is formed.
The light emitting layer 13 is not doped with c. In this case, the optimum heating condition of the heating furnace is that, when TPB is used as the blue luminescent dye Bc among the blue fluorescent dye materials, the blue luminescent dye Bc formed on each convex portion 41a is the light emitting layer 13 The temperature is 120 ° C. at which the blue luminescent dye Bc that can be doped inside and formed on each recess 41b cannot reach the luminescent layer 13, and the heating time is about 10 minutes. Further, when FIrpic, for example, of blue phosphorescent dye materials is used as the blue luminescent dye Bc, the heating temperature is 16
The temperature is 0 ° C., and the heating time is about 10 minutes.

In the above, the temperature at which the luminescent dyes Rc, Gc, Bc of the respective colors formed on the recesses 41b cannot reach the luminescent layer 13 is set to the temperatures at which the luminescent dyes Rc, Gc, Bc of the respective colors are reached.
Is equivalent to the temperature at which is hard to evaporate.

Next, in the fourth step of the fourth embodiment, as shown in FIG.
As shown in (a) and (b), the red light emitting dye Rc and the green light emitting dye G are contained in the light emitting layer 13 formed on the first substrate 11.
c and blue luminescent dye Bc, respectively,
By forming a common electrode (counter electrode) 14 serving as a cathode on the light emitting layer 13 so as to face the plurality of pixel electrodes 12, an organic electroluminescence element EL4A according to a fourth embodiment of the present invention can be obtained. At this time, the organic electroluminescence element EL4A has the same structure as that shown in FIG.
The structure is the same as that of the first embodiment (b), and the light emission of an arbitrary pixel is extracted from the lower surface side of the transparent first substrate 11, or the light emission of an arbitrary pixel is emitted from the first substrate 11.
One of the structural forms is taken out from the transparent common electrode 14 side which is the upper surface side of.

Here, a method of manufacturing the organic electroluminescent element according to the fourth embodiment of the present invention and a modified example in which the organic electroluminescent element is partially modified will be briefly described with reference to FIGS. 34 and 35. .

FIG. 34 is a view for explaining a method for manufacturing an organic electroluminescent element according to the fourth embodiment of the present invention and a first modified example in which the organic electroluminescent element is partially modified, and FIGS. FIG. 7B is a diagram for explaining a second modified example in which the method for manufacturing an organic electroluminescent element and the organic electroluminescent element according to the fourth embodiment of the present invention are partially modified.

First, as shown in FIG. 34, in the method of manufacturing an organic electroluminescent element according to the fourth embodiment of the present invention and in the first modified example in which the organic electroluminescent element is partially modified, as shown in FIG. The first substrate 1 has the same structure as that of the first modified example of the first embodiment.
1. The hole injecting layer 15 and the hole transporting layer 16 are formed between the pixel electrode 12 and the light emitting layer 13 which are attached to the film 1.
By forming the electron transport layer 17 and the electron injection layer 18 between the electrode 3 and the common electrode 14, the organic electroluminescence element EL4B of the first modified example capable of further improving the light emission efficiency is obtained.

Next, as shown in FIGS. 35 (a) and 35 (b), a method for manufacturing an organic electroluminescent element according to the fourth embodiment of the present invention and a second modified example in which the organic electroluminescent element is partially modified. Then, the structure is the same as that of the third modification example of the first embodiment of FIGS. 12A and 12B described above, and the blue luminescent dye B is formed on the first substrate 11.
c is pre-dispersed to form the light-emitting layer 13, and the second substrate 41 for R and the second substrate 41 for G are used to form each first layer in the light-emitting layer 13 in which the blue luminescent dye Bc is pre-dispersed. 2 board 41
Red luminescent dye R formed on each convex portion 41a of
The organic electroluminescent element EL4C of the second modified example is obtained by doping the c and green luminescent dyes Gc.

<Fifth Embodiment> In the method for manufacturing an organic electroluminescence device and the organic electroluminescence device according to the fifth embodiment of the present invention, the second embodiment described above is used.
Although the doping technical idea in the embodiment is applied, in the fifth embodiment, the second substrate (stamp substrate) 41 described in the fourth embodiment is used for G and RG, and for G and RG. Green luminescent dye Gc and red luminescent dye Rc formed on the respective convex portions 41a of the respective second substrates 41 for
The feature is that + green luminescent dye Gc is doped in the light emitting layer 13 formed by previously dispersing the blue luminescent dye Bc on the first substrate 11.

FIG. 36 is a schematic diagram for explaining the first step in the method for manufacturing an organic electroluminescent element of the fifth embodiment, and FIGS. 37 (a) and 37 (b) are the organic electroluminescent element of the fifth embodiment. 38A and 38B are schematic diagrams for explaining the second step in the manufacturing method.
3 is a schematic diagram for explaining a third step in the method for manufacturing the organic electroluminescent element of the fifth embodiment, FIG.
9 (a) and 9 (b) are schematic diagrams for explaining a fourth step in the method for manufacturing an organic electroluminescent element of the fifth embodiment.

First, in the first step of the fifth embodiment, as shown in FIG.
As shown in FIG. 2, the light emitting layer 1 in which the blue light emitting dye Bc is pre-dispersed on the plurality of pixel electrodes 12 filmed on the first substrate (TFT substrate) 11 and on the first substrate 11 between the pixel electrodes 12.
3 is applied to a thickness of about 100 nm by a spin coating method or the like to form a uniform film, and then sufficiently dried. At this time, the blue luminescent dye Bc is a blue fluorescent dye material or a blue phosphorescent dye material.

Next, in the second step of the fifth embodiment, FIG.
As shown in (a) and (b), the green light-emitting dye Gc, the red light-emitting dye Rc + the green light-emitting dye is formed on each convex portion 41a and each concave portion 41b formed on each second substrate 41 for G and RG. Gc is deposited to a thickness of about 20 nm by a method such as a vacuum deposition method, a spin coating method, a dip coating method, or a wet process such as an inkjet method. even here,
As the luminescent dyes Rc and Rc + Gc of each color, a fluorescent dye material and / or a phosphorescent dye material is appropriately used.

Also in the second step of the fifth embodiment described above, when the film is formed by using the wet process, the second substrate 41 for G and the second substrate 41 for RG are substantially the same as in the fourth embodiment.
If a hydrophilic treatment S as shown in FIG. 6 (a) is performed as a pre-treatment, the surface of the left and right vertical walls (= walls on both sides of each convex portion 41a) in each concave portion 41b becomes uneven. Since it is not formed, extra luminescent dyes Gc, Rc + Gc are formed on the surfaces of the right and left vertical walls (= walls on both sides of each protrusion 41a) in each recess 41b.
Particles do not adhere.

Next, in the third step of the fifth embodiment, FIG.
As shown in (a) and (b), the green light emitting dye Gc, the red light emitting dye Rc + the green light emitting dye Gc, which are formed on the respective convex portions 41a of the second substrates 41 for G and RG, respectively, 1
The light emitting layer 13 + the blue light emitting dye Bc formed on the substrate 11 are sequentially doped (diffused). Here, since the width of each convex portion 41a formed on each second substrate 41 is formed to have the same dimension as the width of one pixel electrode 12 on the first substrate 11 as described above, each one is one. Pixel electrode 12
The luminescent dyes Gc and Rc + Gc of the respective colors can be doped into the luminescent layer 13 + the blue luminescent dye Bc in the region corresponding to.

That is, as shown in FIG. 38 (a), the first
When placing the second substrate 41 for G having the green light emitting dye Gc formed on each of the convex portions 41a and the concave portions 41b on the light emitting layer 13 + the blue light emitting dye Bc formed on the substrate 11, Green luminescent dye G formed on each convex portion 41a of the second substrate 41
c corresponds to the light emitting layer portion to be doped with the green light emitting dye Gc, and the light emitting layer 13+ to be doped with the green light emitting dye Gc formed on each convex portion 41b.
The blue light-emitting pigment Bc is brought into contact with and faces each pixel electrode 12 corresponding to the blue light-emitting pigment Bc, and the respective convex portions 41b are aligned and placed so as to face the pixel electrode 12 at intervals of three. At this time, the green light emitting dye Gc formed on each recess 41b of the second substrate 41 is the light emitting layer 13 + the blue light emitting dye Bc.
It is separated from the top by about 10 μm, and in this fifth embodiment, as described below, the green luminescent dye Gc formed on each recess 41b by the temperature control of the heating furnace (oven) is used to emit the green luminescent dye Gc.
The blue luminescent dye Bc is not doped.

Then, the second substrate 41 is superposed on the first substrate 11 and inserted into a heating furnace (oven) having an optimum temperature atmosphere to heat both substrates 11 and 41 for a predetermined time. To do. During this heating period, the green light-emitting dye Gc formed on each convex portion 41a of the second substrate 41 for G is dissolved and dispersed in the light-emitting layer 13 + blue light-emitting dye Bc at this position, which will be described in the second embodiment. The energy transfer from blue to green as described above enables G light emission. Here, if the temperature of the heating furnace is set higher than the optimum temperature, the green luminescent dye Gc formed on each recess 41b of the second substrate 41 for G is evaporated and the luminescent layer 13 + blue luminescent dye Bc is evaporated. The green luminescent dye Gc formed on each recess 41b does not disperse in the luminescent layer 13 + blue luminescent dye Bc because it reaches the upper part and disperses in the luminescent layer 13 + blue luminescent dye Bc in a portion which is not desired to be doped. As such, temperature control of the heating furnace is important. In this case, the optimum heating condition of the heating furnace is that, when, for example, coumarin 6 is used among the green fluorescent dye materials as the green light emitting dye Gc, the green light emitting dye Gc formed on each convex portion 41a is the light emitting layer. The temperature is 120 ° C. at which the green luminescent dye Gc that can be doped in the 13 + blue luminescent dye Bc and cannot be reached on the luminescent layer 13 + blue luminescent dye Bc by the film formation on each recess 41b is 120 ° C., and the heating time is about 10 minutes.
Further, when, for example, Ir (ppy) ₃ is used among the green phosphorescent dye materials as the green luminescent dye Gc, the heating temperature is 155 ° C. and the heating time is about 10 minutes.

Then, the light emitting layer 13+ of the green light emitting dye Gc
After the doping of the blue luminescent dye Bc is completed,
The second substrate 41 is removed from the top of the first substrate 11 and
As shown in (b), the second substrate 41 for RG is
On the light emitting layer 13 + blue light emitting pigment Bc formed on the substrate 11.
Place it. In this case, each convex portion 41a of the second substrate 41
The red luminescent dye Rc and the green luminescent dye Gc formed on the film are green.
The image next to the pixel electrode 12 doped with the color luminescent dye Gc
When aligned so as to face the element electrode 12, each convex portion
Red light emitting dye Rc + green light emitting dye G formed on 41a
As described above in a heating furnace with an optimal temperature atmosphere for c
Emitting layer 13 on the corresponding pixel electrode 12 + blue luminescent pigment B
The red light-emitting dye Rc + green light-emitting dye Gc is present only in the area c
Is doped and is blue as described in the second embodiment
R emission is possible by energy transfer from green to green to red
It becomes Noh. Also in this step, each concave portion of the second substrate 41 for RG is formed.
Red luminescent dye Rc + green luminescent dye formed on the portion 41b
Gc is doped in the light emitting layer 13 + blue light emitting dye Bc.
I haven't. In this case, the optimum heating condition for the heating furnace is red
For example, among the red fluorescent dye materials as the color luminescent dye Rc
For example, Neil Red is used as the green luminescent dye Gc
Among the green fluorescent dye materials, for example, coumarin 6 was used
In this case, the red luminescent pigment Rc + green formed on each convex portion 41a
The color luminescent dye Gc is contained in the luminescent layer 13 + blue luminescent dye Bc.
Red emission color that can be reinforced and is formed on each recess 41b
Element Rc + green light emitting dye Gc is light emitting layer 13 + blue light emitting dye
The temperature that cannot reach above Bc is 120 ° C, and the heating time is
Is about 10 minutes. In addition, red is used as the red light emitting dye Rc.
Of the color phosphorescent dye materials, for example, PtOEP is used, and
Among the green phosphorescent dye materials as the green luminescent dye Gc
And for example Ir (ppy) _ThreeWhen using, the heating temperature is
The temperature is 165 ° C, and the heating time is about 10 minutes.

Next, in the fourth step of the fifth embodiment, FIG.
As shown in (a) and (b), the green light emitting dye G is formed in the light emitting layer 13 + the blue light emitting dye Bc formed on the first substrate 11.
c, the red luminescent dye Rc + the green luminescent dye Gc, respectively, and then, the common electrode (counter electrode) 14 serving as a cathode is made to face the plurality of pixel electrodes 12 on the light emitting layer 13 in which the blue luminescent dye Bc is dispersed in advance. By forming the film, the organic electroluminescence element EL5A of the fifth embodiment according to the present invention is obtained. At this time, the organic electroluminescence element EL5A has the same structure as that shown in FIG.
The structure is the same as that of the second embodiment in (b), and the light emission of an arbitrary pixel is extracted from the lower surface side of the transparent first substrate 11, or the light emission of an arbitrary pixel is emitted from the first substrate 11.
One of the structural forms is taken out from the transparent common electrode 14 side which is the upper surface side of.

Now, a method of manufacturing the organic electroluminescent element according to the fifth embodiment of the present invention and a modified example in which the organic electroluminescent element is partially modified will be briefly described with reference to FIG.

FIG. 40 is a view for explaining a method of manufacturing an organic electroluminescent element according to the fifth embodiment of the present invention and a modified example in which the organic electroluminescent element is partially modified.

As shown in FIG. 40, in the method of manufacturing an organic electroluminescent element according to the fifth embodiment of the present invention and the modification in which the organic electroluminescent element is partially modified, the second embodiment of FIG. The structure is the same as that of the first modified example in the example, and the hole injection layer 1 is provided between the pixel electrode 12 filmed on the first substrate 11 and the light emitting layer 13.
5. By forming the hole transport layer 16 and forming the electron transport layer 17 and the electron injection layer 18 between the light emitting layer 13 and the common electrode 14, the light emission efficiency can be further improved. A modified organic electroluminescent element EL5B is obtained.

<Sixth Embodiment> In the method for manufacturing an organic electroluminescence device and the organic electroluminescence device according to the sixth embodiment of the present invention, the third embodiment described above is used.
The doping technical idea in the embodiment is applied, and in the sixth embodiment, the second substrate (stamp substrate) 41 for R is used.
And a third substrate (stamp substrate) 51 for G, and each convex portion 41 of the second substrate (stamp substrate) 41 for R.
On the first substrate 11, a red luminescent dye Rc formed on a and a green luminescent dye Gc formed on each convex portion 51a of the G third substrate (stamp substrate) 51 are formed. The feature is that the light emitting layer 13 is doped. Along with this, the shapes of the second substrate 41 and the third substrate 51 used in the sixth embodiment are the same as the second substrate (stamp substrate) 21 and the third substrate (stamp substrate) 21 used in the third embodiment described above with reference to FIG. The dimensional relationship of each uneven portion with respect to the stamp substrate 31 is reversed.

41 (a) and 41 (b) show a sixth embodiment of the present invention.
In the method for manufacturing an organic electroluminescent element and the organic electroluminescent element of the embodiment,
It is the figure shown typically in order to demonstrate a board | substrate (stamp board) and a 3rd board | substrate (stamp board).

In the method of manufacturing an organic electroluminescent element and the organic electroluminescent element of the sixth embodiment, the second substrate 41 and the third substrate 51 as shown in FIGS. Two types of stamp substrates are prepared in advance as the stamp substrates to be mounted on the first substrate 11 described using 1 (a) and (b).

That is, the second substrate 41 has exactly the same shape as that described in the fourth embodiment with reference to FIGS. 28 and 29 (a), (b), and corresponds to three pixels of RGB. As a set, the convex portion 41a and the concave portion 41b are set as one set, and a plurality of sets are repeated along the column direction and / or the row direction of the pixel electrode 12 (FIG. 1), and a photolithography method and an etching method are performed using a silicon substrate or the like. And the like are formed in an uneven shape.

Here, each convex portion 4 formed on the second substrate 41.
The width of 1a is set to 13 μm, which is the same as the width of one pixel electrode 12 on the first substrate 11, and each convex portion 4
The height of 1a projects by about 10 μm with respect to each recess 41b. The width of each recess 41b formed on the second substrate 41 is equal to the width of the two pixel electrodes 12 on the first substrate 11,
The size is formed to include the left and right gaps between the two pixel electrodes 12, and specifically, the width of each recess 41b is {2 × 13.
+ 1 × 3} μm = 29 μm is set.

On the other hand, the above-mentioned third substrate (stamp substrate)
51 is a pixel newly formed for the sixth embodiment, and is a pixel which is placed on the light emitting layer 13 formed on the first substrate 11 and corresponds to a light emitting layer site to be doped with a light emitting dye of a predetermined color. A convex portion 51a having substantially the same area as the electrode 12,
The concave portion 51b which is recessed adjacent to the convex portion 51a is
As a set, this set is repeated along the column direction and / or the row direction of the pixel electrode 12, and is formed in a concavo-convex shape by a method such as a photolithography method or an etching method using a silicon substrate or the like.

Here, each convex portion 5 formed on the third substrate 51.
The width of 1a is formed to have a size including two widths of the pixel electrode 12 on the first substrate 11, and specifically, each of the protrusions 5 is formed.
The width of 1a is set to {2 × 13 + 1} μm = 27 μm, and the height of each convex portion 51a projects about 10 μm from each concave portion 51b. In addition, the width of each recess 51b formed in the third substrate 51 is formed to include the width of one pixel electrode 12 on the first substrate 11 and the gap between the left and right of the pixel electrode 12. Specifically, each recess 51
The width of b is set to {13 + 1 × 2} μm = 15 μm. Therefore, the total area of one set of the convex portion 51a and the concave portion 51b is set to the three pixel electrodes 1 corresponding to the three RGB pixels.
The area is approximately equal to 2.

Next, the first substrate (TFT substrate) 11 and 2
42 to 4 for a method of manufacturing an organic electroluminescence device according to a sixth embodiment of the present invention using the second and third substrates (stamp substrates) 41 and 51 of various types.
5 will be described in the order of steps.

FIG. 42 is a schematic diagram for explaining the first step in the method of manufacturing an organic electroluminescent element of the sixth embodiment, and FIGS. 43 (a) and 43 (b) are the schematic diagrams of the organic electroluminescent element of the sixth embodiment. Schematic diagrams for explaining the second step in the manufacturing method, FIGS. 44 (a) and 44 (b).
4 is a schematic view for explaining a third step in the method for manufacturing an organic electroluminescent element of the sixth embodiment, FIG.
5 (a) and 5 (b) are schematic diagrams for explaining a fourth step in the method for manufacturing an organic electroluminescent element of the sixth embodiment.

First, in the first step of the sixth embodiment, as shown in FIG.
As shown in FIG. 2, the light emitting layer 1 in which the blue light emitting dye Bc is pre-dispersed on the plurality of pixel electrodes 12 filmed on the first substrate (TFT substrate) 11 and on the first substrate 11 between the pixel electrodes 12.
3 is applied to a thickness of about 100 nm by a spin coating method or the like to form a uniform film, and then sufficiently dried. At this time, the blue luminescent dye Bc is a blue fluorescent dye material or a blue phosphorescent dye material.

Next, in the second step of the sixth embodiment, as shown in FIG.
As shown in (a) and (b), the red luminescent dye Rc is formed on each convex portion 41a and each concave portion 41b formed on the R second substrate 41, and each is formed on the G third substrate 51. Convex portion 51
20n of green luminescent dye Gc on a and on each recess 51b is formed by a method such as a vacuum deposition method, a wet process such as a spin coating method, a dip coating method, or an inkjet method.
Each m is formed into a film. Here again, the luminescent dye R of each color
For c and Gc, a fluorescent dye material and / or a phosphorescent dye material is appropriately used.

Also in the second step of the sixth embodiment, when the film is formed by using the wet process, the second substrate 41 for R and the third substrate 51 for G are substantially the same as in the fourth embodiment. As a pretreatment to the hydrophilic treatment S as shown in FIG.
By doing so, the left and right vertical walls (= each convex portion 41a) in each concave portion 41b of each of the second and third substrates 41 and 51 and each concave portion 51b.
And the walls on both sides of each convex portion 51a) are not uneven, so that the right and left vertical walls in each concave portion 41b and each concave portion 51b (= each convex portion 41a and each side wall of each convex portion 51a). Excessive particles of the luminescent dyes Rc and Gc do not adhere to the surface of the.

Next, in the third step of the sixth embodiment, as shown in FIG.
As shown in (a) and (b), the red luminescent pigment Rc and G which are formed on the respective convex portions 41a of the R second substrate 41,
The green luminescent dye Gc formed on each of the convex portions 51a of the third substrate 51 for light is sequentially doped (diffused) into the luminescent layer 13 + the blue luminescent dye Bc formed on the first substrate 11, respectively. Therefore, the luminescent dyes Rc and Gc of the respective colors formed on the respective convex portions as described in the third embodiment.
There is no step to remove. Also in this sixth embodiment, the order of doping is not limited.

Here, each convex portion 4 formed on the second substrate 41
Since the width of 1a is formed to be the same as the width of one pixel electrode 12 on the first substrate 11 as described above, the light emitting layer 13 + blue light emission of the portion corresponding to each one pixel electrode 12 is formed. The red light emitting dye Rc can be doped in the dye Bc. Further, since the width of each convex portion 51a formed on the third substrate 51 is formed to be the width of two pixels on the first substrate 11 as described above, a portion corresponding to each two pixel electrodes 12 is formed. The green light emitting dye Gc can be doped in the light emitting layer 13 + blue light emitting dye Bc.

That is, as shown in FIG. 44 (a), the first
On the light emitting layer 13 + the blue light emitting dye Bc formed on the substrate 11, the green light emitting dye Gc is provided on each convex portion 51a and each concave portion 51.
When the third substrate 51 for B formed on b is placed, since each convex portion 51a formed on the third substrate 51 is formed with a width of two pixels, each convex portion 51b is The two pixel electrodes on one substrate 11 are opposed to each other, and the respective convex portions 51b are aligned and placed at intervals of three pixels. At this time, the third substrate 5
The green luminescent dye Gc formed on each convex portion 51a of No. 1 is in contact with the luminescent layer 13 + the blue luminescent dye Bc to be doped. On the other hand, the green luminescent dye Gc formed on each recess 51b of the third substrate 51 is separated from the luminescent layer 13 + blue luminescent dye Bc by about 10 μm. In this sixth embodiment, the heating furnace (oven) is as follows. The green luminescent dye Gc formed on each recess 51b is not doped in the luminescent layer 13 + the blue luminescent dye Bc by controlling the temperature.

Then, the third substrate 51 is superposed on the first substrate 11 and inserted into a heating furnace (oven) having an optimum temperature atmosphere to heat both the substrates 11 and 51 for a predetermined time. To do. During this heating period, the green light-emitting dye Gc formed on each convex portion 51a of the third substrate 41 for G is dissolved and dispersed in the light-emitting layer 13 + blue light-emitting dye Bc at this position, so the third embodiment will be described. The energy transfer from blue to green as described above enables G light emission. Here, if the temperature of the heating furnace is set higher than the optimum temperature, the green luminescent dye Gc formed on each recess 51b of the G third substrate 51 is evaporated and reaches the luminescent layer 13. Since it is dispersed in the light emitting layer 13 + the blue light emitting dye Bc in a portion that is not desired to be doped, the green light emitting dye Gc formed on each recess 51b is prevented from being dispersed in the light emitting layer 13 + the blue light emitting dye Bc. Temperature control is important. In this case, the optimum heating condition of the heating furnace is that, when, for example, coumarin 6 is used among the green fluorescent dye materials as the green light emitting dye Gc, the green light emitting dye Gc formed on each convex portion 51a is the light emitting layer. 13+ the green light-emitting dye Gc which can be doped in the blue light-emitting dye Bc and is formed on each recess 51b.
The temperature at which the blue luminescent dye Bc cannot be reached is 120 ° C., and the heating time is about 10 minutes. Further, as the green light emitting dye Gc, for example, Ir (p
When py) ₃ is used, the heating temperature is 155 ° C. and the heating time is about 10 minutes.

Next, when the light emitting layer 13 + the blue light emitting dye Bc is completely doped with the green light emitting dye Gc, the third substrate 51 for G is removed from the first substrate 11 and the structure shown in FIG.
As shown in (b), the second substrate 41 for R is placed on the light emitting layer 13 + blue light emitting pigment Bc + green light emitting pigment Gc formed on the first substrate 11. In this case, the second substrate 4
When the red luminescent dye Rc formed on each of the convex portions 41a of No. 1 is aligned so as to face any one of the two pixel electrodes 12 doped with the green luminescent dye Gc, Only in the region of the light emitting layer 13 + the blue light emitting dye Bc + the green light emitting dye Gc on the pixel electrode 12 corresponding to the above in the heating furnace of the optimum temperature atmosphere for the red light emitting dye Rc formed on the convex portion 41a. Red luminescent pigment Rc
Is doped, and R light emission becomes possible by energy transfer from blue to green to red as described in the third embodiment. Also in this step, the red luminescent dye Rc formed on each recess 41b of the R second substrate 41 is mixed with the luminescent layer 13+.
The blue luminescent dye Bc is not doped. In this case, the optimum heating condition of the heating furnace is that, when, for example, DCJT is used among the red fluorescent dye materials as the red light emitting dye Rc, the red light emitting dye Rc formed on each convex portion 51a is the light emitting layer 13+. The red light emitting dye Rc which can be doped in the blue light emitting dye Bc and is formed on each recess 51b is the light emitting layer 1.
3 + Temperature 120 ° C that cannot reach above blue luminescent dye Bc
And the heating time is about 10 minutes. Further, as the red light emitting dye Rc, for example, Pt among red phosphorescent dye materials is used.
When using OEP, the heating temperature is 165 ° C,
The heating time is about 10 minutes.

Next, in the fourth step of the sixth embodiment, as shown in FIG.
As shown in (a) and (b), the green light emitting dye G is formed in the light emitting layer 13 + the blue light emitting dye Bc formed on the first substrate 11.
c and the red luminescent dye Rc are doped in the above order respectively, and the blue luminescent dye Bc is previously dispersed in the luminescent layer 13.
A common electrode (counter electrode) 14 serving as a cathode is formed on the upper surface of the plurality of pixel electrodes 12 so as to face the film, thereby forming an organic electroluminescent element EL5A according to a sixth embodiment of the present invention.
Is obtained. At this time, the organic electroluminescence element EL5A has the same structural form as that of the third embodiment shown in FIGS. 25 (a) and 25 (b) described above, and the light emission of an arbitrary pixel is on the lower surface side of the transparent first substrate 11. Structural form taken out from,
Alternatively, either one of the structural forms in which the light emission of an arbitrary pixel is taken out from the transparent common electrode 14 side which is the upper surface side of the first substrate 11 is obtained.

Here, a method of manufacturing the organic electroluminescent element according to the sixth embodiment of the present invention and a modified example in which the organic electroluminescent element is partially modified will be briefly described with reference to FIG.

FIG. 46 is a diagram for explaining a method of manufacturing an organic electroluminescent element according to the sixth embodiment of the present invention and a modified example in which the organic electroluminescent element is partially modified.

As shown in FIG. 46, in the method of manufacturing an organic electroluminescent element according to the sixth embodiment of the present invention and in the modified example in which the organic electroluminescent element is partially modified, the third embodiment shown in FIG. The structure is the same as that of the first modified example in the example, and the hole injection layer 1 is provided between the pixel electrode 12 filmed on the first substrate 11 and the light emitting layer 13.
5. By forming the hole transport layer 16 and forming the electron transport layer 17 and the electron injection layer 18 between the light emitting layer 13 and the common electrode 14, the light emission efficiency can be further improved. A modified organic electroluminescence element EL6B is obtained.

[0206]

According to the method of manufacturing an organic electroluminescence device and the organic electroluminescence device according to the present invention described in detail above, according to claim 1, in particular, each projection of the second substrate is formed on the light emitting layer of the first substrate. A state in which both the substrates are overlapped with each other by mounting the parts and facing the respective concave portions of the second substrate to the corresponding pixel electrodes through the respective light emitting layer portions to be doped with the light emitting dye of a predetermined color. In the heating furnace, both substrates are heated at a predetermined temperature in order to diffuse the luminescent dye of a predetermined color formed on each recess into each luminescent layer site to be doped. For example, when a red light emitting dye, a green light emitting dye, and a blue light emitting dye are used as the light emitting dyes of a predetermined color, light emission by the light emitting dyes of the respective colors can be favorably performed.

According to the second aspect of the invention, in particular, on the light emitting layer of the first substrate, each convex portion of the second substrate is provided with each light emitting layer site to be doped with a light emitting dye of a predetermined color. It is placed facing each pixel electrode, both substrates are placed in a heating furnace in a state where they are overlapped with each other, and both substrates are heated at a predetermined temperature in the heating furnace to form on each convex portion. Since only the filmed luminescent dye of a predetermined color is diffused into each luminescent layer site to be doped, for example, a red luminescent dye, a green luminescent dye, and a blue luminescent dye are used as the luminescent dye of a predetermined color in the same manner as described above. When used, the luminescent dyes of the respective colors can favorably emit light.

According to a third aspect of the present invention, in the method of manufacturing an organic electroluminescent element according to the first or second aspect, in particular, the emission wavelength of the light emitting layer formed on the first substrate is equal to that of the second substrate. Since the wavelength is shorter than the emission wavelength of the film-formed luminescent dye of the predetermined color, good luminescence can be obtained by the luminescent dye of the predetermined color doped in the light emitting layer.

According to claim 4, in the method of manufacturing an organic electroluminescence device according to claim 1 or 2, in particular, a film is formed on the second substrate in the light emitting layer to be formed on the first substrate. Since the luminescent dye that emits light with a wavelength shorter than the emission wavelength of the luminescent dye of the predetermined color is dispersed in advance, it is not necessary to prepare a second substrate for forming the luminescent dye that emits light with a short wavelength.

Further, according to claim 5,
In the method for producing an organic electroluminescent element according to claim 4, particularly, when a fluorescent dye material of a predetermined color is used, the production cost of the luminescent dye of the predetermined color is low, and When the phosphorescent dye material of a predetermined color is used, the light emitting performance of the luminescent dye of a predetermined color becomes good.

[0211] According to claim 6,
The method for manufacturing an organic electroluminescent device according to claim 5, wherein a plurality of second substrates are prepared corresponding to a plurality of colors, and a luminescent dye is formed for each second substrate. When different colors are used to form a plurality of luminescent dyes on each second substrate, the luminescent dyes of a plurality of colors are
Whether to use only fluorescent dye materials for all colors or only phosphorescent dye materials for all colors,
Alternatively, since the fluorescent dye material and the phosphorescent dye material are selected and used for each color, the same effect as in claim 5 can be obtained for the luminescent dyes of a plurality of colors depending on the dye material used.

Further, according to claim 7, in the method for producing an organic electroluminescent device according to claim 1 or 2, in particular, a red luminescent dye, a green luminescent dye and a blue luminescent dye are provided on the first substrate. By doping the light emitting layer attached to the film, three colors of RGB can be obtained.

Further, according to claim 8, in the method of manufacturing an organic electroluminescence device according to claim 1 or 2, in particular, a blue luminescent dye is preliminarily dispersed on the first substrate to form a light emitting layer. Therefore, it is not necessary to prepare a second substrate for forming the blue light emitting dye, and the green light emitting dye formed on the second substrate for G and the red light emission formed on the second substrate for RG. Since the blue light emitting dye is dispersed in advance on the first substrate and the light emitting layer formed by film-forming is doped with the dye + the green light emitting dye, three colors of RGB can be realized.

According to a ninth aspect, in the method of manufacturing an organic electroluminescent element according to the first or second aspect, in particular, on each convex portion and each concave portion formed on the second substrate in the second step. Before the film of the luminescent dye of a predetermined color is formed on the surface of the second substrate, the surface facing the luminescent layer formed on the first substrate is subjected to the hydrophilic treatment, so that the right and left vertical walls in each recess are It becomes difficult for extra luminescent pigments of a predetermined color to adhere.

According to claim 10, claim 1
In the method for manufacturing an organic electroluminescence element described above, in particular, before forming a film of a luminescent dye of a predetermined color on each convex portion and each concave portion formed on the second substrate in the second step, Since the surface opposite to the light emitting layer formed on one substrate is subjected to the water repellent treatment, the unnecessary luminescent dye of a predetermined color formed on each convex portion can be easily removed in the third step. .

[0216] According to claim 11, claim 1
In the method for manufacturing an organic electroluminescence element described above, in particular, before forming a film of a luminescent dye of a predetermined color on each convex portion and each concave portion formed on the second substrate in the second step, Since a metal having extremely weak adhesive force is formed on the surface facing the light emitting layer formed on one substrate, unnecessary luminescent dye of a predetermined color formed on each convex portion can be easily formed in the third step. Can be removed.

According to claim 12, claim 1
The organic electroluminescent element manufactured by using the method for manufacturing an organic electroluminescent element according to any one of claims 11 to 11 has good emission performance for a predetermined color.

[Brief description of drawings]

FIG. 1A and FIG. 1B are commonly used in the first to sixth embodiments of the organic electroluminescence device manufacturing method and the organic electroluminescence device of the first to sixth embodiments according to the present invention. It is the top view and front view for explaining the 1st substrate (TFT substrate).

FIG. 2 is a diagram schematically illustrating a second substrate (stamp substrate) in the method for manufacturing an organic electroluminescent element and the organic electroluminescent element according to the first embodiment of the present invention.

3A and 3B are plan views showing the second substrate (stamp substrate) shown in FIG. 2 in a plan view, in which (a) shows a case of being formed in a stripe shape, and (b) shows a case of forming in a staggered shape. It is the figure which showed.

FIG. 4 is a schematic diagram for explaining a first step in the method for manufacturing the organic electroluminescent element of the first embodiment.

5A to 5C are schematic views for explaining a second step in the method for manufacturing the organic electroluminescent element of the first embodiment.

6 (a) to 6 (c) are views for explaining a pretreatment in a second step in the method for manufacturing an organic electroluminescent element of the first embodiment.

7A and 7B are schematic diagrams for explaining a third step in the method for manufacturing the organic electroluminescent element of the first embodiment.

8A to 8C are schematic diagrams for explaining a fourth step in the method for manufacturing the organic electroluminescent element of the first embodiment.

9 (a) and 9 (b) are schematic views for explaining a fifth step in the method for manufacturing the organic electroluminescent element of the first embodiment.

FIG. 10 is a diagram for explaining a method of manufacturing an organic electroluminescent element according to a first embodiment of the present invention and a first modified example in which the organic electroluminescent element is partially modified.

FIG. 11 is a diagram for explaining a second modified example in which the method for manufacturing an organic electroluminescent element and the organic electroluminescent element of the first embodiment according to the present invention are partially modified.

FIGS. 12 (a) and 12 (b) are views for explaining a method for manufacturing an organic electroluminescence element according to the first embodiment of the present invention and a third modification in which the organic electroluminescence element is partially modified. .

FIG. 13 is a schematic diagram for explaining the first step in the method for manufacturing an organic electroluminescent element of the second example.

14 (a) and 14 (b) are schematic views for explaining a second step in the method for manufacturing the organic electroluminescent element of the second embodiment.

15 (a) and 15 (b) are schematic views for explaining a third step in the method for manufacturing the organic electroluminescent element of the second embodiment.

16 (a) and 16 (b) are schematic views for explaining a fourth step in the method for manufacturing the organic electroluminescent element of the second embodiment.

17 (a) and 17 (b) are schematic views for explaining a fifth step in the method for manufacturing an organic electroluminescent element of the second embodiment.

FIG. 18 is a drawing for explaining the manufacturing method of the organic electroluminescent element of the second embodiment according to the present invention and the first modified example in which the organic electroluminescent element is partially modified.

FIG. 19 is a diagram for explaining a second modified example in which the method for manufacturing an organic electroluminescent element and the organic electroluminescent element according to the second embodiment of the present invention are partially modified.

20 (a) and 20 (b) are a second substrate (stamp substrate) and a third substrate (stamp substrate) in a method for manufacturing an organic electroluminescent device and an organic electroluminescent device according to a third embodiment of the present invention. It is the figure shown typically in order to demonstrate.

FIG. 21 is a schematic diagram for explaining the first step in the method for manufacturing an organic electroluminescent element of the third example.

22 (a) and 22 (b) are schematic views for explaining a second step in the method for manufacturing the organic electroluminescent element of the third embodiment.

23 (a) and 23 (b) are schematic views for explaining a third step in the method for manufacturing the organic electroluminescent element of the third embodiment.

24 (a) and 24 (b) are schematic views for explaining a fourth step in the method for manufacturing an organic electroluminescent element of the third embodiment.

25 (a) and 25 (b) are schematic diagrams for explaining a fifth step in the method for manufacturing an organic electroluminescent element of the third embodiment.

FIG. 26 is a diagram for explaining a method for manufacturing an organic electroluminescent element and a first modified example in which the organic electroluminescent element is partially modified, according to a third embodiment of the present invention.

FIG. 27 is a diagram for explaining a second modified example in which the method for manufacturing an organic electroluminescent element and the organic electroluminescent element of the third embodiment according to the present invention are partially modified.

FIG. 28 is a diagram schematically illustrating a second substrate (stamp substrate) in the method for manufacturing an organic electroluminescent element and the organic electroluminescent element according to the fourth example of the present invention.

FIG. 29 is a plan view showing the second substrate (stamp substrate) shown in FIG. 28 in a plan view, in which (a) shows a case of forming in a stripe shape and (b) shows a case of forming in a zigzag shape. It is the figure which showed.

FIG. 30 is a schematic diagram for explaining the first step in the method for manufacturing an organic electroluminescent element of the fourth example.

FIGS. 31 (a) to 31 (c) are schematic views for explaining the second step in the method for manufacturing an organic electroluminescent element of the fourth example.

32 (a) to 32 (c) are schematic views for explaining a third step in the method for manufacturing an organic electroluminescent element of the fourth example.

FIGS. 33 (a) and 33 (b) are schematic views for explaining a fourth step in the method for manufacturing an organic electroluminescent element of the fourth example.

FIG. 34 is a diagram for explaining a method for manufacturing an organic electroluminescent element and a first modified example in which the organic electroluminescent element is partially modified, according to the fourth embodiment of the present invention.

FIGS. 35 (a) and 35 (b) are views for explaining a method for manufacturing an organic electroluminescent element according to a fourth embodiment of the present invention and a second modified example in which the organic electroluminescent element is partially modified. .

FIG. 36 is a schematic diagram for explaining the first step in the method for manufacturing an organic electroluminescent element of the fifth example.

37 (a) and 37 (b) are schematic diagrams for explaining a second step in the method for manufacturing an organic electroluminescent element of the fifth example.

38 (a) and 38 (b) are schematic views for explaining a third step in the method for manufacturing the organic electroluminescent element of the fifth embodiment.

FIGS. 39 (a) and 39 (b) are schematic diagrams for explaining a fourth step in the method for manufacturing an organic electroluminescent element of the fifth example.

FIG. 40 is a diagram for explaining a method for manufacturing an organic electroluminescent element and a modified example in which the organic electroluminescent element is partially modified, according to the fifth embodiment of the present invention.

41 (a) and 41 (b) are a second substrate (stamp substrate) and a third substrate (stamp substrate) in a method for manufacturing an organic electroluminescent device and an organic electroluminescent device according to a sixth embodiment of the present invention. It is the figure shown typically in order to demonstrate.

FIG. 42 is a schematic diagram for explaining the first step in the method for manufacturing an organic electroluminescent element of the sixth example.

43 (a) and 43 (b) are schematic views for explaining a second step in the method for manufacturing an organic electroluminescent element of the sixth example.

44 (a) and 44 (b) are schematic views for explaining a third step in the method for manufacturing an organic electroluminescent element of the sixth embodiment.

45 (a) and 45 (b) are schematic views for explaining a fourth step in the method for manufacturing an organic electroluminescent element of the sixth embodiment.

FIG. 46 is a diagram illustrating a method for manufacturing an organic electroluminescent element and a modified example in which the organic electroluminescent element is partially modified, according to the sixth embodiment of the present invention.

47 (a) to (c) are diagrams for explaining a conventional color organic EL display and a method for manufacturing the same.

[Explanation of symbols]

11 ... First substrate (TFT substrate), 12 ... Pixel electrode, 13
... Light emitting layer, 21 ... Second substrate (stamp substrate), 21a ...
Convex part, 21b ... concave part, 31 ... third substrate (stamp substrate), 31a ... convex part, 31b ... concave part, 41 ... second substrate (stamp substrate), 41a ... convex part, 41b ... concave part, 51
... third substrate (stamp substrate), 51a ... projections, 51b ...
Recesses, Rc ... Red light emitting dye, Gc ... Green light emitting dye, Bc
... blue light-emitting dye, EL1A ... organic electroluminescence element of the first embodiment, EL1B ... organic electroluminescence element of first modification of the first embodiment, EL1C ...
Organic electroluminescence element of second modification of first embodiment, EL1D ... Organic electroluminescence element of third modification of first embodiment, EL2A ... Organic electroluminescence element of second embodiment, EL2B ... Second embodiment An organic electroluminescent element of a first modified example of
EL2C ... Organic electroluminescent element of second modified example of second example, EL3A ... Organic electroluminescent element of third example, EL3B ... First of third example
Modified organic electroluminescent device, EL3C
... Organic electroluminescence element of second modification of third embodiment, EL4A ... Organic electroluminescence element of fourth embodiment, EL4B ... Organic electroluminescence element of first modification of fourth embodiment, EL4C ... Fourth embodiment Example 2 organic electroluminescent element of second modified example, EL5A ... Organic electroluminescent element of fifth example, EL5B ... Organic electroluminescent element of first modified example of fifth example, EL6A ... Organic electroluminescent element of sixth example Luminescence element, EL6B ... Organic electroluminescence element of the first modification of the sixth embodiment, S ... Hydrophilic treatment, H ... Water repellent treatment, Au, Ag ... Metals such as gold and silver.

Claims (12)

[Claims] 1. A first step of uniformly forming a light emitting layer on a plurality of pixel electrodes formed on a first substrate, and a convex portion for mounting on the light emitting layer of the first substrate. ,
One set of concave portions adjacent to the convex portion and having a substantially same area as the pixel electrode corresponding to the light emitting layer portion to be doped with a luminescent dye of a predetermined color is formed, and this set is formed into a row of the pixel electrode. A second substrate formed repeatedly along the direction and / or the row direction, and forming a film of the luminescent dye of a predetermined color on each convex portion and each concave portion formed on the second substrate
A third step of removing only the luminescent pigment of the predetermined color formed on each of the convex portions of the second substrate, and each of the convex portions of the second substrate on the luminescent layer of the first substrate. A substrate is placed, and the concave portions of the second substrate are opposed to the pixel electrodes corresponding to the respective concave portions of the second substrate through the luminous layer portions to be doped with the luminous pigment of the predetermined color, and the both substrates are overlapped with each other. Each luminescent layer portion to be doped with the luminescent dye of the predetermined color formed on each of the recesses by heating the luminescent dye of the predetermined color formed on each of the recesses in a combined state at a predetermined temperature A fourth step of diffusing the light into the light emitting layer; and a fifth step of forming a counter electrode facing the pixel electrode on the light emitting layer after doping the luminescent dye of the predetermined color.
The manufacturing method of the organic electroluminescent element characterized by comprising the following process. 2. A first step of uniformly forming a light emitting layer on a plurality of pixel electrodes formed on a first substrate; and a step of placing the light emitting layer on the light emitting layer of the first substrate and emitting light of a predetermined color. A set of a convex portion having substantially the same area as the pixel electrode corresponding to a light emitting layer site to be doped with a dye and a concave portion adjacent to the convex portion is formed, and this set is formed into a row of the pixel electrodes. A second substrate that is repeatedly formed along the direction and / or the row direction, and a second step of forming a film of the luminescent dye of the predetermined color on each convex portion and each concave portion formed on the second substrate, The convex portions of the second substrate are placed on the light emitting layer of the first substrate so as to face the corresponding pixel electrodes through the respective light emitting layer portions to be doped with the luminescent dye of the predetermined color. Then, a film is formed on each of the protrusions and on each of the recesses in a state where both substrates are overlapped with each other. A third step of heating a constant color luminescent dye at a predetermined temperature to diffuse only the predetermined color luminescent dye formed on each convex portion into each luminescent layer site to be doped; Forming a counter electrode facing the pixel electrode on the light emitting layer after doping a color luminescent dye;
The manufacturing method of the organic electroluminescent element characterized by comprising the following process. 3. The method for manufacturing an organic electroluminescence device according to claim 1, wherein the light emitting layer having a wavelength shorter than an emission wavelength of the emission dye of the predetermined color attached to the second substrate is formed. A method for manufacturing an organic electroluminescence device, characterized in that a film is formed on the first substrate. 4. The method for manufacturing an organic electroluminescent element according to claim 1, wherein the light emission of the predetermined color is formed on the second substrate in the light emitting layer formed on the first substrate. A method for producing an organic electroluminescence device, characterized in that a luminescent dye which emits light at a wavelength shorter than the emission wavelength of the dye is dispersed in advance. 5. The method for manufacturing an organic electroluminescent element according to claim 1, wherein the luminescent dye of the predetermined color is a fluorescent dye material of a predetermined color or a phosphorescent property of a predetermined color. A method for manufacturing an organic electroluminescence device, characterized by using a dye material. 6. The method for manufacturing an organic electroluminescence device according to claim 1, wherein a plurality of the second substrates are prepared corresponding to a plurality of colors, and each second substrate is provided. When changing the color of the luminescent dye to be formed for each of the plurality of luminescent dyes on each of the second substrates,
The plurality of colors of luminescent dyes use only fluorescent dye materials for all colors, or only phosphorescent dye materials for all colors, or fluorescent dye materials for each color, A method for manufacturing an organic electroluminescence device, which comprises selecting and using a phosphorescent dye material. 7. The method for manufacturing an organic electroluminescence element according to claim 1, wherein three types of R, G, and B are prepared as the second substrate,
And a red light emitting dye formed on the second substrate for R,
A green luminescent dye formed on the second substrate for G, and a blue luminescent dye formed on the second substrate for B are R, G, and R on the luminescent layer formed on the first substrate. A method for manufacturing an organic electroluminescent element, characterized in that the pixel electrode portions for B are each doped. 8. The method for manufacturing an organic electroluminescent element according to claim 1, wherein a blue luminescent dye is preliminarily dispersed in the light emitting layer formed on the first substrate, and the second substrate is used as the second substrate. For G, R
Two types for G are prepared, and the green luminescent dye formed on the second substrate for G and the red luminescent dye + green luminescent dye formed on the second substrate for RG are used for the first On the light emitting layer in which the blue light emitting dye is preliminarily dispersed and film-formed on the substrate, the pixel electrode parts for R and G are doped respectively, and the pixel electrode part for B is made to contain the blue light emitting dye in the light emitting layer. A method for manufacturing an organic electroluminescence device, which is characterized by correspondingly. 9. The method for manufacturing an organic electroluminescent device according to claim 1, wherein the luminescent dye of the predetermined color is formed on each convex portion and each concave portion formed on the second substrate in the second step. A method for manufacturing an organic electroluminescence device, wherein a surface of the second substrate facing the light emitting layer is subjected to a hydrophilic treatment before the film is formed. 10. The method for manufacturing an organic electroluminescence device according to claim 1, wherein the luminescent dye of the predetermined color is formed on each of the convex portions and each of the concave portions formed on the second substrate in the second step. A method for manufacturing an organic electroluminescence device, characterized in that the surface of the second substrate facing the light emitting layer is subjected to a water repellent treatment before. 11. The method for manufacturing an organic electroluminescent device according to claim 1, wherein the luminescent dye of the predetermined color is formed on each of the convex portions and the concave portions formed on the second substrate in the second step. A method for manufacturing an organic electroluminescence device, characterized in that a metal having a very weak adhesive force is formed on a surface of the second substrate facing the light emitting layer, which is formed on the first substrate. 12. An organic electroluminescence device manufactured by using the method for manufacturing an organic electroluminescence device according to claim 1.