JP2003086367A - Manufacturing method of organic electroluminescence element and organic electroluminescence element - Google Patents

Abstract

PROBLEM TO BE SOLVED: To dope almost simultaneously the luminous coloring matters of at least two colors or more, that are formed on the recessed parts of the second substrate, in the luminous layer, when the luminous layer is formed on a plurality of picture element electrodes formed on the first substrate. SOLUTION: A luminous layer 13 is uniformly formed on a plurality of picture-element electrodes 12 that are formed on a first substrate 11, and luminous coloring matters Rc, Gc, Bc of at least two colors or more are formed in a prescribed arrangement on a plurality of recessed parts 21b formed on a second substrate 21 using a masking plate M. Then, the plural recessed parts 21b formed on the second substrate 21 are mounted on the luminous layer 13 of the first substrate 11 opposed to the plural picture-element electrodes 12, and the both substrates 11, 21 are heated at a prescribed temperature in a state of piling up, and the luminous coloring matters Rc, Gc, Bc of at least two colors or more formed on the plural recessed parts 21b are almost simultaneously diffused in the luminous layer 13.

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to a method for manufacturing an organic electroluminescent device and an organic electroluminescent device.

[0002]

2. Description of the Related Art Recently, an organic electroluminescence element (organic EL element) having low power consumption has been attracting attention as a display panel used in a mobile phone, a PDA, etc., and it is driven by a low voltage and emits light with high brightness. Research and development of high-performance organic electroluminescent devices have been actively conducted.

The above-mentioned organic electroluminescence device is composed of a plurality of pixel electrodes (anode) formed by coating an organic electroluminescence thin film containing a fluorescent organic compound on a display panel, and a counter electrode (cathode) facing the plurality of pixel electrodes. ), And is excited by injecting holes and electrons into the organic electroluminescent thin film by applying a voltage between the desired pixel electrode to emit light and the counter electrode to recombine. This is a light-emitting element that generates a child and utilizes the emission of light when the exciton is deactivated to perform display on a portion corresponding to a desired pixel electrode to be emitted.

At this time, normally, by forming a counter electrode on the entire surface and making it face the pixel electrode, the counter electrode becomes a common electrode for all the pixel electrodes. Further, a method is adopted in which a plurality of pixel electrodes are provided in parallel in a stripe shape, a plurality of counter electrodes are formed in a stripe shape so as to be orthogonal to the plurality of pixel electrodes, and light is emitted at a portion where both electrodes intersect. In this case, one counter electrode intersects at a plurality of locations on a plurality of pixel electrodes, and in this case also, one counter electrode is a common electrode for the plurality of pixel electrodes. In the description, the counter electrode is referred to as a common electrode for description.

Various manufacturing methods have been proposed for manufacturing an organic electroluminescent element. However, an organic material capable of finely transferring a light-emitting organic material onto a glass substrate corresponding to a pixel pattern on a display panel is proposed. An example of a method for manufacturing an electroluminescent element is disclosed in Japanese Patent Application Laid-Open No. 2-212058.
No. 000-12216.

FIGS. 33A to 33C are views for explaining a conventional color organic EL display and its manufacturing method.

The conventional color organic EL display shown in FIGS. 33 (a) to 33 (c) and its manufacturing method are disclosed in the above-mentioned Japanese Patent Application Laid-Open No. 2000-12216, which is hereby incorporated by reference. Will be briefly described with reference to.

First, as shown in FIG. 33 (a), a transparent ITO (Indium Tin Oxide) film 102 is formed as an anode on a transparent glass substrate 101 which is a display surface of a display panel. In addition, the hole transport layer 103 is formed on the ITO film 102.

On the other hand, the transfer substrate 104 is made of a metal sheet, and the convex portions 104a and the concave portions 104b are alternately and repeatedly formed on the lower surface side along the ITO film 102 and the hole transport layer 103. A bottomed hole 104c is bored from the upper surface side at a portion corresponding to the convex portion 104a.

At this time, each convex portion 104 of the transfer substrate 104
a is a plane size of 100 μm so that three colors are arranged.
× 100 μm, the color arrangement pitch is 300 μm, and the height of each convex portion 104a is 5 with respect to each concave portion 104b.
It is set to 0 μm.

Then, for example, a red light-emitting organic material 105R is formed by vacuum vapor deposition on each convex portion 104a and each concave portion 104b formed on the lower surface side of the transfer substrate 104, and then on the upper surface side of this transfer substrate 104. The glass plate 106 is placed, and the red light-emitting organic material 105R formed on each convex portion 104a by the weight of the glass plate 106 is attached to the glass substrate 10.
It is pressure-bonded onto the hole transport layer 103 on the first side.

A shielding plate 107 is installed above the glass plate 106 at a distance from the glass plate 106. The shielding plate 107 corresponds to each bottomed hole 104c formed in the transfer substrate 104. Then, the through holes 107a are formed respectively.

Furthermore, when the glass plate 106 is irradiated with the laser light 108 from above the shielding plate 107 through each through hole 107a, the laser light 1 passing through each through hole 107a.
Since only 08 reaches the bottomed holes 104c of the transfer substrate 104 through the glass plate 106, the laser beam 1
The red light emitting organic material 105R formed on each convex portion 104a is sublimated by the heat of 08, and the red light emitting organic material 105R is transferred onto the hole transport layer 103 as shown in FIG. .

Each recess 1 formed on the transfer substrate 104
Since the through hole is not formed in the portion of the shield plate 107 corresponding to 04b, the laser light 108 is shielded by the shield plate 107, so that the red light emitting organic material 105R formed in each recess 104b is sublimated. Instead, it remains on the transfer substrate 104 side as it is.

Next, as shown in FIG. 33C, when the red light emitting organic material 105R is transferred onto the hole transport layer 103, the red light emitting organic material 105R is transferred in the same manner as above.
Next to the green light-emitting organic material 105G, and next to the green light-emitting organic material 105G, the blue light-emitting organic material 1
05B is transferred to obtain a light emitting element array of three colors.

After that, an ITO film 109 is formed as a cathode so as to be orthogonal to the light emitting element region, whereby the color organic EL display 100 is obtained.

[0017]

By the way, in the above-mentioned conventional color organic EL display 100 and its manufacturing method, when the number of pixels is increased to achieve miniaturization, fine pixel electrodes formed on the glass substrate 101. Each convex portion 10 formed on the lower surface side of the transfer substrate 104 according to the pattern
It is possible to narrow the plane size of the 4a and the pitch between the adjacent convex portions 104a, and based on this, the transfer substrate 10
No. 4, each of the convex portions 104a of No. 4 was finely formed, and an experiment was performed. For example, after the red light-emitting organic material 105R formed on each convex portion 104a was transferred onto the hole transport layer 103 of the glass substrate 101, When the substrate 101 and the transfer substrate 104 are separated from each other, the glass substrate 101 and the transfer substrate 104 cannot be separated well because the red light emitting organic material 105R has adhesiveness, and the red light emitting property transferred onto the glass substrate 101 is eliminated. The pattern of the organic material 105R collapses. Also,
Like the red light emitting organic material 105R, the glass substrate 10
Green light-emitting organic material 105G transferred onto the
It was found that each pattern of the blue light emitting organic material 105B also collapsed, and it was very difficult to satisfactorily manufacture the light emitting element array of three colors on the glass substrate 101.

Further, three kinds of transfer substrates 104, one for red light emitting organic material, one for green light emitting organic material, and one for blue light emitting organic material, must be prepared.
While the cost of the three types of transfer substrates 104 is high,
Along with this, the transfer process also has to be repeated three times for each color, which causes a problem that the man-hours at the time of transfer are significantly increased.

Therefore, in manufacturing a color organic EL display in which the number of pixels of a display panel is increased to achieve miniaturization, a method for manufacturing an organic electroluminescent element of three colors having excellent mass productivity and an organic electroluminescent element are provided. Is desired.

[0020]

The present invention has been made in view of the above problems, and a first invention is to uniformly form a light emitting layer on a plurality of pixel electrodes formed on a first substrate. And a convex portion for mounting on the light emitting layer of the first substrate, and a concave portion having a substantially same area as the pixel electrode, which is concaved adjacent to the convex portion and is arranged in the column direction of the pixel electrode. And / or a plurality of second substrates formed alternately and repeatedly along the row direction, and a plurality of recesses formed in the second substrate having openings for allowing only the luminescent dye of the same color to pass through. A masking plate is formed corresponding to each recess where the luminescent dye is to be formed, and a masking part that shields parts other than each aperture is formed.Each opening of this masking plate is used to form a luminescent dye of one color. Align with the concave portions of the second substrate to be formed so as to face each other. The masking plate is placed on the second substrate in close contact, and the luminescent dye of one color is formed on each of the recesses of the second substrate. Then, the openings of the masking plate are shifted. By forming a luminescent dye of another color on each of the other concave portions of the second substrate, a luminescent dye of at least two colors or more is formed in a predetermined arrangement on each of the plurality of concave portions formed on the second substrate. And sequentially forming a film on each of the plurality of convex portions of the second substrate on the light emitting layer of the first substrate and forming a film on the plurality of concave portions of the second substrate in a predetermined arrangement. The luminescent dyes of at least two colors are made to face the corresponding pixel electrodes, and the luminescent dyes of at least two colors are diffused into the luminescent layer while heating the substrates at a predetermined temperature in a state where both substrates are superposed. And a step of adding at least two or more colors of luminescent dyes to the luminescent layer. After allowed to diffuse into a method for producing an organic electroluminescent device characterized by comprising the step of forming a counter electrode opposed to the pixel electrode on the light emitting layer.

A second invention is a step of uniformly forming a light emitting layer on a plurality of pixel electrodes formed on the first substrate,
A convex portion having a substantially same area as that of the pixel electrode and a concave portion adjacent to the convex portion, which is placed on the light emitting layer of the first substrate, are formed in the column direction and / or the row direction of the pixel electrode. I want to form a film of the same color luminescent dye among a plurality of second substrates formed repeatedly along the line and a plurality of convex portions formed on the second substrate with openings for passing only the same color luminescent dye. A masking plate that is formed corresponding to each convex portion and that has a shielding portion that shields a portion other than each opening portion is used, and each opening portion of the masking plate is used to form a luminescent dye of one color. The masking plate was placed in close contact with the convex portions of the substrate so as to be aligned with each other, and the luminescent dye of one color was deposited on the convex portions of the second substrate. After that, next, the openings of the masking plate are shifted to add other color luminescent dyes. By forming a film on each of the other convex portions of the second substrate, at least two or more colors of luminescent dye are sequentially formed in a predetermined array on each of the plurality of convex portions formed on the second substrate. A step of placing a plurality of convex portions of the second substrate on the light emitting layer of the first substrate, and forming a film on the plurality of convex portions of the second substrate in a predetermined array, at least two colors or more At least 2 in a state in which both the substrates are overlapped with each other so that the luminescent dyes of the above are opposed to the corresponding pixel electrodes.
A step of diffusing luminescent dyes of at least two colors into the luminescent layer while heating at a predetermined temperature; and a step of diffusing at least two or more luminescent dyes into the luminescent layer, and then forming a counter electrode facing the pixel electrode. A method of manufacturing an organic electroluminescence device, comprising the step of forming a film on the light emitting layer.

A fourth invention is an organic electroluminescence device manufactured by using the method for manufacturing an organic electroluminescence device according to the first or second invention described above.

[0023]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of a method for manufacturing an organic electroluminescence device and an organic electroluminescence device according to the present invention will be described below with reference to FIGS. 1 to 32. <First Embodiment> to <Fourth Embodiment>Example> will be described in detail in the order of.

1 (a) to 1 (c) show the first to the first embodiments of the present invention.
In the method for manufacturing an organic electroluminescence device and the organic electroluminescence device of the fourth embodiment,
It is the top view of an example for explaining the 1st substrate commonly used by the 1st-4th example, the front view, and the top view of other examples.

As shown in FIGS. 1 (a) and 1 (b), in the method for manufacturing an organic electroluminescent device and the organic electroluminescent device according to the first to fourth embodiments of the present invention, the first to fourth embodiments are described. First commonly used in
A transparent TFT (Thin Film Transistor) substrate is used as the substrate 11, and a plurality of pixel electrodes 12 are film-formed on the first substrate 11 in a matrix in a column direction × row direction. At this time, the plurality of pixel electrodes 12 described above are made of transparent ITO (Indium Tin Oxide) having a high work function as an anode.
It uses a membrane and displays red green blue (RGB) 3 on the display.
The vertical and horizontal dimensions of each pixel electrode 12 are 13 μm on a side so that the emission color of each color can be obtained at a width of 13 μm and at intervals of 1 μm.
It is formed in a square of m, and a gap of 1 μm is formed between the pixel electrodes 12 which are adjacent in the vertical and horizontal directions.

As shown in FIG. 1C, a plurality of pixel electrodes 12 each having a width of 13 μm are arranged in a column direction (or a row direction) at intervals of 1 μm on a first substrate 11 using a glass substrate or the like. There is also a method of providing a stripe shape.

<First Embodiment> FIG. 2 is a schematic view for explaining a second substrate (stamp substrate) in the method for manufacturing an organic electroluminescence device and the organic electroluminescence device according to the first embodiment of the present invention. 3A and 3B are plan views showing the second substrate (stamp substrate) shown in FIG. 2 in plan view, and FIG. 3A is a case where a plurality of concave portions formed in the second substrate are arranged in a matrix. Indicates
FIG. 4B is a diagram showing a case where a plurality of recesses formed on the second substrate are arranged in a stripe shape, and FIG. 4 illustrates a masking plate used when forming a plurality of colors of luminescent dyes on the second substrate. FIG. 3A is a plan view for doing so, FIG. 3A is a view corresponding to a case where luminescent dyes of a plurality of colors are formed in a matrix, and FIG.
[Fig. 3] is a diagram corresponding to a case where a plurality of luminescent pigments of different colors are formed in stripes.

In the method of manufacturing the organic electroluminescent element and the organic electroluminescent element of the first embodiment, the second substrate 21 as shown in FIG.
It is prepared in advance as a stamp substrate to be placed on the first substrate 11 described with reference to (a), (b) or FIG. 1 (c).

Second substrate (stamp substrate) 21 described above
Is a light emitting layer 13 (FIG. 5), which will be described later, formed on the first substrate 11.
A convex portion 21a to be placed on the convex portion 21a and a concave portion 21b which is concaved adjacent to the convex portion 21a and has substantially the same area as the pixel electrode 12 (FIG. 1) are arranged in the column direction of the pixel electrode 12 and / or It is repeatedly formed along the row direction, and is formed in an uneven shape by a method such as a photolithography method and an etching method using a silicon substrate or the like.

Here, the convex portion 21 formed on the second substrate 21
The width of a is defined by the pixel electrodes 12, 1 adjacent to each other on the first substrate 11.
The size of the gap between the two is set to 1 μm, and the height of the convex portion 21a is 10 μm with respect to the concave portion 21b.
It projects about m. Further, the width of the recess 21b formed in the second substrate 21 is set to 13 μm which is the same width as the width of the pixel electrode 12 on the first substrate 11, and the luminescent pigments of three colors RGB are formed on the plurality of recesses 21b. Rc, Gc and Bc are formed into a film in a predetermined arrangement.

The planar shape of the second substrate (stamp substrate) 21 is the matrix-shaped pixel electrodes 12 (see FIG. 1).
Corresponding to (a) and (b)}, as shown in FIG. 3 (a), a plurality of concave portions 21b formed in the second substrate 21 are arranged in a matrix, or a stripe-shaped pixel electrode is formed. Corresponding to {FIG. 1 (c)}, as shown in FIG. 3 (b), the plurality of recesses 21b formed in the second substrate 21 are arranged in a stripe shape. Therefore, as shown in FIG.
As shown in (b), the plurality of recesses 21b formed in the second substrate 21 have the same area as that of each pixel electrode 12 corresponding to each of the plurality of pixel electrodes 12 film-formed on the second substrate 11. Have

Next, as shown in FIGS. 4 (a) and 4 (b),
The masking plate M used when depositing a plurality of colors (RGB three colors) of luminescent dyes on the second substrate 21 is commonly used for each color. The masking plate M is formed by a method such as an etching method using a very thin stainless material, and a plurality of recesses 21b formed in the second substrate 21 with openings Ma for allowing only the luminescent dyes of the same color to pass therethrough. Each concave portion 2 in which one wants to form a luminescent dye of the same color
The shield portion Mb is formed corresponding to 1b and shields other than each opening Ma.

That is, the second substrate 21 corresponding to FIG.
When the luminescent dyes of three colors RGB are formed in a matrix on each of the recesses 21b, the masking plate M, as shown in FIG. 4 (a), has only one luminescent dye of one color on the second substrate 21. At the same time, each opening Ma is opened so as to face each of the recesses 21b for forming a film and have the same size and the same positional relationship as each recess 21b. Specifically, each opening Ma is 2 in the column direction × row direction. Every other piece is opened as shown in the drawing.

On the other hand, the second substrate 21 corresponding to FIG.
When the luminescent dyes of three colors of RGB are formed in a stripe shape on each of the concave portions 21b of the masking plate M, only one luminescent dye of one color is formed on the second substrate 21 as shown in FIG. 4B. At the same time, the openings Ma are opened so as to face the recesses 21b for film formation and have the same dimensions and the same positional relationship as the recesses 21b. Specifically, the openings Ma are arranged in the column direction (or the row direction). ), Every two lines are opened in stripes as shown in the drawing.

The masking plate M is commonly used not only in the first embodiment of the present invention but also in the second to fourth embodiments described later.

Next, using the first substrate (TFT substrate) 11, the second substrate (stamp substrate) 21 and the masking plate M, the organic electroluminescence device of the first embodiment according to the present invention is manufactured. The method will be described in the order of steps with reference to FIGS.

FIG. 5 is a schematic view for explaining the first step in the method of manufacturing the organic electroluminescent element of the first embodiment, and FIGS. 6A to 6C show the organic electroluminescent element of the first embodiment. FIG. 8 is a schematic view for explaining the second step in the manufacturing method, FIG. 7 is a schematic view for explaining the third step in the manufacturing method for the organic electroluminescent element of the first embodiment, and FIGS. Is the first
It is a schematic diagram for demonstrating the 4th process in the manufacturing method of the organic electroluminescent element of an Example.

First, in the first step of the first embodiment, as shown in FIG. 5, the first substrate 1 is formed on the plurality of pixel electrodes 12 formed on the first substrate (TFT substrate) 11 and between the pixel electrodes 12.
The light emitting layer 13 is uniformly formed on the first layer 1. The light emitting layer 13 is preferably made of a polymer material in consideration of the ease of film formation, the thermal stability of the film, the mechanical stability, and the like. For example, polyvinylcarbazole (PVC) that emits blue-violet light is used.
Z). At this time, the light emitting layer 1 that emits blue-violet light
As will be described later, 3 emits light on the shorter wavelength side than each emission color of each of the red, green and blue light emitting dyes doped in the light emitting layer 13, and energy transfer to the light emitting dyes of each color I use something that is easy to get up. Then, the light emitting layer 13 is formed on the first substrate 1 by spin coating or the like.
It is applied on the surface of No. 1 to a thickness of about 100 nm, and then sufficiently dried.

Next, in the second step of the first embodiment, as shown in FIG.
As shown in (a) to (c), the convex portion 21a and the concave portion 21b
One second substrate (stamp substrate) 21 for which three and are repeatedly formed is prepared for three colors of RGB, and one masking plate M is prepared. Then, using the masking plate M,
A red luminescent dye Rc, a green luminescent dye Gc, and a blue luminescent dye Bc are formed in a predetermined arrangement on each of the plurality of recesses 21b formed in the second substrate 21 by a method such as a vacuum deposition method for each color to have a thickness of about 20 nm.

That is, as shown in FIG. 6A, among the plurality of recesses 21b formed on the second substrate 21, for example, a red light emitting dye Rc is desired to be formed as a first color. Rc is formed simultaneously. In this case,
The openings Ma of the masking plate M are aligned so as to oppose the recesses 21b on which the red luminescent dye Rc is to be simultaneously formed on the second substrate 21, and the masking plate M is placed on the protrusions 21a of the second substrate 21. Place closely. After this, the red luminescent dye R
It is desired to pass c through the openings Ma of the masking plate M to form the red luminescent dye Rc on the second substrate 21.
A film of about 20 nm is formed on 1b by a method such as a vacuum evaporation method.

Here, when three consecutive recesses 21b on the second substrate 21 are made to correspond to the three colors RGB, each recess 21b on which the red luminescent dye Rc is to be simultaneously formed is repeatedly present every two recesses 21b. The red luminescent dye Rc is not deposited because it is shielded by the shielding portion Mb of the masking plate M except for the concave portions 21b where the red luminescent dye Rc is desired to be deposited.

At this time, as the red luminescent dye Rc, Neil Red, DCM1 {4-Dicyanmethylene-2-methyl-6 (p
-dimethylaminostyryl) -4H-pyran}, DCJT {4- (dicyanomethylene) -2-t-butyl-6- (jurolidylstyryl) -pyran}, and other pyran derivatives, squarylium derivatives, porphyrin derivatives, chlorin derivatives, eurogyrin A known red fluorescent dye material such as a derivative is used.

Next, when the film formation of the red luminescent dye Rc on the second substrate 21 is completed, as shown in FIG. 6B, for example, the green luminescent dye Gc as the second color is formed on the second substrate 21. The red luminescent dye Rc is simultaneously formed on each of the concave portions 21b on the right side of the concave portions 21b on which the red luminous pigment Rc is formed. In this case, the masking plate M is directed to the right side in the drawing on the second substrate 21 so that the recesses 21b formed by depositing the red light-emitting dye Rc on the second substrate 21 are shielded by the shielding portion Mb of the masking plate M. And position it by 14 μm. After that, the green light emitting dye Gc is passed through each opening Ma of the masking plate M, and the green light emitting dye Gc is formed on the second substrate 21 on the right side of the respective recesses 21b in which the red light emitting dye Rc is formed. A film having a thickness of about 20 nm is formed on each recess 21b by a method such as a vacuum evaporation method. In this case as well, the green light emitting dye Gc is shielded by the shield portion Mb of the masking plate M except for the concave portions 21b where the green light emitting dye Gc is to be formed on the second substrate 21.
Is not formed.

At this time, as the green luminescent dye Gc, a known green fluorescent dye material such as a coumarin derivative such as coumarin 6, a quinacridone derivative, or an iridium complex that emits triplet excitons is used.

Next, when the film formation of the red light emitting dye Rc and the green light emitting dye Rc on the second substrate 21 is completed, FIG.
As shown in FIG.
Are simultaneously formed on the recesses 21b on the right side of the recesses 21b on which the green luminescent dye Gc is formed on the second substrate 21. In this case, the masking plate M is used as the second substrate so that the respective concave portions 21b formed by depositing the red light emitting dye Rc and the green light emitting dye Gc on the second substrate 21 are shielded by the shielding portion Mb of the masking plate M. Positioning is carried out by shifting 14 μm further to the right on 21. After that, the blue luminescent dye Bc is passed through each opening Ma of the masking plate M, and the blue luminescent dye Gc is formed on the second substrate 21 on the right side of each recess 21b in which the green luminescent dye Gc is formed. A film having a thickness of about 20 nm is formed on each recess 21b by a method such as a vacuum evaporation method. In this case as well, the blue light-emitting dye Bc is shielded by the shielding portion Mb of the masking plate M except the concave portions 21b where the blue light-emitting dye Bc is to be formed on the second substrate 21.
Is not formed. Yes.

At this time, as the blue luminescent dye Bc, a coumarin derivative such as coumarin 47, or a known blue fluorescent dye material such as TPB (tetraphenylbutadiene) or perylene is used.

When the masking plate M is removed from the second substrate 21 after the above-described second step is completed, the luminescent pigments Rc and Gc of three colors RGB are formed on the plurality of recesses 21b formed in the second substrate 21. , Bc are repeatedly formed into a matrix or stripes.

In the second step described above, the masking plate M is not in close contact with the second substrate 21, or the masking plate M is placed on the second substrate 21 slightly displaced from the predetermined position. In this case, the red luminescent dye Rc, the green luminescent dye Gc, and the blue luminescent dye Bc adhere to the plurality of convex portions 21a formed on the second substrate 21, and in this case, adhere to the plurality of convex portions 21a. Luminescent dyes of each color Rc, G
C and Bc may be removed by using an adhesive tape or a sharp blade.

Furthermore, in the above-mentioned second step, the red light emitting dye Rc, the green light emitting dye Gc, and the blue light emitting dye Bc are added to the second light emitting dye Rc.
The order of forming the films on each of the plurality of recesses 21b formed on the substrate 21 may start from any color.
The arrangement of the three RGB colors on the plurality of recesses 21b formed on the substrate 21 is not limited to the combination in the illustrated RGB order.
It may be appropriately arranged repeatedly in a predetermined arrangement.

Next, in the third step of the first embodiment, as shown in FIG. 7, a plurality of recesses 21b formed in the second substrate 21.
Red luminescent dyes Rc, each of which is formed in a predetermined array on the above,
The green luminescent dye Gc and the blue luminescent dye Bc are added to the first substrate 11
The light emitting layer 13 formed above is doped (diffused) at substantially the same time. Here, since the width of the concave portion 21b formed in the second substrate 21 is formed to have the same size as the width of the pixel electrode 12 on the first substrate 11 as described above, it corresponds to each one pixel electrode 12. The red light-emitting dye Rc, the green light-emitting dye Gc, and the blue light-emitting dye Bc can be doped in the light-emitting layer 13 at the portions to be filled.

That is, the light emitting layer 1 formed on the first substrate 11
Although the plurality of convex portions 21a formed on the second substrate 21 are placed on the third substrate 21 in contact with each other, the luminescent dyes Rc, Gc, Bc of the respective colors are formed on the plurality of convex portions 21a as described above. Not in a state.

The red light emitting dye Rc, the green light emitting dye Gc, and the blue light emitting dye Bc, which are repeatedly formed on the plurality of recesses 21b formed on the second substrate 21, are applied to the light emitting layer portions to be doped with respective colors. In a non-contact state, the respective pixel electrodes 12 corresponding thereto are positioned so as to face each other.

After that, the second substrate 21 is overlaid on the first substrate 11 and inserted into a heating furnace (oven) having an optimum temperature atmosphere, and both substrates 11 and 21 are kept for a predetermined time. To heat. During this heating period, the red luminescent dye Rc, the green luminescent dye Gc, and the blue luminescent dye Bc formed on the plurality of recesses 21b formed in the second substrate 21 are evaporated,
After reaching the light emitting layer 13, the red light emitting dye Rc, the green light emitting dye Gc, and the blue light emitting dye Bc are placed in the light emitting layer 13 at that position.
Spread almost simultaneously.

At this time, the luminescent dye concentration of each color in the luminescent layer 13 has an appropriate value. If it is less than that, the luminescent dye cannot emit light. Will end up. Therefore, by controlling the heating temperature and the heating time, the luminescent dye concentration of each color is optimized.

Here, for example, when the above-mentioned Neel Red is used as the red light-emitting dye Rc, the above-mentioned coumarin 6 is used as the green light-emitting dye Gc, and the above-mentioned TPB is used as the blue light-emitting dye Bc. The optimum heating temperature at which the luminescent dyes Rc, Gc, and Bc of each color are easily evaporated is about 140 ° C., and the heating time is about 10 minutes.

Then, the red light emitting dye Rc is contained in the light emitting layer 13.
Is doped, energy is transferred to the red luminescent dye Rc inside the light emitting layer 13. Therefore, the portion doped with the red luminescent dye Rc emits red light (R emission).
Will be possible. In addition, the green light emitting dye Gc is contained in the light emitting layer 13.
Is doped, energy is transferred to the green luminescent dye Gc inside the light emitting layer 13. Therefore, the portion doped with the green luminescent dye Gc emits green light (G emission).
Will be possible. Furthermore, in the light emitting layer 13, a blue light emitting dye Bc
Is doped, energy is transferred to the blue light emitting dye Bc inside the light emitting layer 13. Therefore, the portion doped with the blue light emitting dye Bc emits blue light (B light emission).
Will be possible.

Next, in the fourth step of the first embodiment, as shown in FIG.
As shown in (a), the luminescent layer 13 formed on the first substrate 11 is doped with the red luminescent dye Rc, the green luminescent dye Gc, and the blue luminescent dye Bc, and then the luminescent layer 1 is formed.
A common electrode (counter electrode) 14 serving as a cathode is formed on the electrode 3 so as to face the plurality of pixel electrodes 12, thereby forming an organic electroluminescence element EL1 according to the first embodiment of the present invention.
A is obtained.

At this time, the plurality of pixel electrodes 12 are arranged on the first substrate 1
When a film is formed in a matrix on the first electrode 1, the common electrode (counter electrode) 14 is formed on the light emitting layer 13 so as to face all the pixel electrodes 12. Further, when the plurality of pixel electrodes 12 are film-formed on the first substrate 11 in a stripe shape, the common electrode (counter electrode) 14 is orthogonal to the plurality of pixel electrodes 12 and is also orthogonal to each other. Films are formed in stripes on the light emitting layer 13 so as to face each other.

The common electrode 14 is a substance having a low work function and suitable for a cathode material and is an opaque film, for example, Mg _0.9 Ag _0.1 is formed by vacuum deposition to a thickness of about 100 nm. It's a film.

When the organic electroluminescence element EL1A of the first embodiment is manufactured by the above process, as shown in FIG. 8A, an arbitrary transparent pixel electrode (anode) 12 and an opaque common electrode are used. By applying a voltage to the electrode (cathode) 14, light emission of an arbitrary pixel can be taken out from the lower surface side of the transparent first substrate 11. At this time, R light is emitted from a portion of the light emitting layer 13 doped with the red light emitting dye Rc, G light is emitted from a portion of the light emitting layer 13 doped with the green light emitting dye Gc, and light is emitted from a portion of the light emitting layer 13 doped with the blue light emitting dye Bc. B light is emitted.

Further, as shown in FIG. 8B, an opaque film such as Mg _0.9 Ag _{0 . 1} or the like to form a plurality of pixel electrodes 12 on the first substrate 11, and
If the common electrode 14 is formed on the light emitting layer 13 by using an ITO film or the like as a transparent film, the first pixel can emit light from any pixel.
It can be taken out from the transparent common electrode 14 side which is the upper surface side of the substrate 11, and in this case, the first substrate 11 is made of Si.
An opaque substrate such as can also be used.

Here, a method for manufacturing the organic electroluminescent element according to the first embodiment of the present invention and a modified example in which the organic electroluminescent element is partially modified will be briefly described with reference to FIGS. 9 to 10. .

FIG. 9 is a view for explaining a method for manufacturing an organic electroluminescent element according to the first embodiment of the present invention and a first modified example in which the organic electroluminescent element is partially modified, and FIG. 10 is related to the present invention. It is a figure for demonstrating the manufacturing method of the organic electroluminescent element of 1st Example, and the 2nd modification which partially modified the organic electroluminescent element.

First, as shown in FIG. 9, in the first modified example in which the method for manufacturing the organic electroluminescent element according to the first embodiment of the present invention and the organic electroluminescent element is partially modified, a film is formed on the first substrate 11. A hole injection layer 15 is formed on the attached pixel electrode 12, and the hole injection layer 15 is formed.
The hole transporting layer 16 is formed on the hole transporting layer 16, and the light emitting layer 13 for doping the red light emitting dye Rc, the green light emitting dye Gc, and the blue light emitting dye Bc is further formed on the hole transporting layer 16. . Then, the luminescent dye R of each color to the luminescent layer 13
When the doping of c, Gc, and Bc is completed, the electron transport layer 17, the electron injection layer 18, and the common electrode 1 are formed on the light emitting layer 13.
By stacking 4 in order, the organic electroluminescence element EL1B of the first modified example is obtained, and this configuration makes it possible to further improve the light emission efficiency.

Next, as shown in FIG. 10, in the second modified example in which the method for manufacturing the organic electroluminescent element of the first embodiment according to the present invention and the organic electroluminescent element is partially modified, on the first substrate 11 The partition wall 19 is formed between the adjacent pixel element electrodes 12 by using SiO ₂ or the like to be slightly higher than the light emitting layer 13 by the CVD method or the like, and thus the organic electroluminescence element E of the second modified example.
We have L1C. Thus, when the second substrate 21 is placed on the first substrate 11, the plurality of convex portions 21a formed on the second substrate 21 are brought into contact with the upper ends of the partition walls 19 so that the plurality of convex portions 21a emit light. It is possible to avoid direct contact with layer 13.

<Second Embodiment> In the method of manufacturing an organic electroluminescent element and the organic electroluminescent element of the second embodiment according to the present invention, a film is formed on a first substrate (TFT substrate) unlike the first embodiment. By pre-dispersing the blue light emitting dye in the light emitting layer, the blue light emitting dye is formed among the light emitting dyes of a plurality of colors formed on the plurality of recesses formed on the second substrate which will be the stamp substrate as described later. It eliminates the need for filming.

For convenience of explanation, the same components as those in the first embodiment are designated by the same reference numerals, and the same luminescent dye materials as those in the first embodiment are designated by the same reference numerals. The description will be made focusing on the points different from the first embodiment.

FIG. 11 is a schematic view for explaining the second substrate (stamp substrate) in the method for manufacturing an organic electroluminescent element and the organic electroluminescent element according to the second embodiment of the present invention, FIG. FIG. 12 is a plan view showing the second substrate (stamp substrate) shown in FIG. 11 in plan view, (a) shows a case where a plurality of recesses formed in the second substrate are arranged in a matrix, and (b). FIG. 6 is a diagram showing a case where a plurality of concave portions formed on a second substrate are arranged in a stripe shape.

In the method of manufacturing the organic electroluminescent element and the organic electroluminescent element of the second embodiment, the second substrate 31 as shown in FIG. 11 will be described with reference to FIGS. 1 (a) and 1 (b). It is prepared in advance as a stamp substrate to be placed on the first substrate 11.

Second substrate (stamp substrate) 31 described above
Are the first and second convex portions 31a1 and 31a2 to be placed on the light emitting layer 13 (FIG. 13) formed by previously dispersing the blue light emitting dye Bc on the first substrate 11, and the first of these. , A plurality of recesses 31b, which are recessed adjacent to the second protrusions 31a1 and 31a2 and have substantially the same area as the pixel electrode 12 (FIG. 1), are repeated along the column direction and / or the row direction of the pixel electrode 12. , A silicon substrate or the like is used to form unevenness by a method such as photolithography or etching.

Here, the width of the first convex portion 31a1 formed on the second substrate 31 is equal to that of the pixel electrodes 1 adjacent to each other on the first substrate 11.
The size is the same as the size of the gap between 2 and 12, and is set to 1 μm. In addition, the second convex portion 31a formed on the second substrate 31
The width of 2 is set to 15 μm, which is the same as the size of the width of one pixel electrode 12 and the left and right gaps combined, and it is not necessary to form the blue luminescent dye Bc on the second convex portion 31a2. It corresponds to the part. Further, the height of the first and second convex portions 31a1 and 31a2 formed on the second substrate 31 is equal to that of the concave portion 31.
The protrusion is about 10 μm with respect to b. The width of the recess 31b formed on the second substrate 31 is set to 13 μm, which is the same as the width of the pixel electrode 12 on the first substrate 11,
In addition, the red light emitting dye Rc and the green light emitting dye Bc are formed on the plurality of recesses 31b.

The planar shape of the second substrate (stamp substrate) 31 is the matrix-shaped pixel electrodes 12 (see FIG. 1).
Corresponding to (a) and (b)}, as shown in FIG. 12 (a), a plurality of concave portions 31b formed in the second substrate 31 are arranged in a matrix, or a stripe-shaped pixel electrode is formed. Corresponding to {FIG. 1 (c)}, as shown in FIG. 12 (b), a plurality of recesses 31 formed in the second substrate 31.
b are arranged in stripes.

Next, the first substrate (TFT substrate) 11, the second substrate (stamp substrate) 31, and the masking plate M are used to manufacture the organic electroluminescent element of the second embodiment according to the present invention. Regarding the method, FIGS.
Will be described in the order of steps.

FIG. 13 is a schematic diagram for explaining the first step in the method of manufacturing the organic electroluminescent element of the second embodiment, and FIGS. 14 (a) and 14 (b) show the organic electroluminescent element of the second embodiment. FIG. 15 is a schematic diagram for explaining the second step in the manufacturing method, FIG. 15 is a schematic diagram for explaining the third step in the manufacturing method for the organic electroluminescent element of the second embodiment, FIG.
(B) is a schematic diagram for demonstrating the 4th process in the manufacturing method of the organic electroluminescent element of 2nd Example.

First, in the first step of the second embodiment, as shown in FIG.
As shown in FIG. 2, the light emitting layer 1 in which the blue light emitting dye Bc is pre-dispersed on the plurality of pixel electrodes 12 filmed on the first substrate (TFT substrate) 11 and on the first substrate 11 between the pixel electrodes 12.
3 is uniformly formed. The light emitting layer 13 is the first
As in the example, for example, polyvinylcarbazole (PVCZ) that emits blue-violet light is used, and TPB (tetraphenylbutadiene), for example, about 5 mol% is previously dispersed in this light emitting layer 13 as the blue light emitting pigment Bc. Therefore, this can improve the chromaticity of blue. At this time, energy is smoothly transferred to the blue light emitting dye Bc inside the light emitting layer 13, so that blue light emission (B light emission) with a peak emission wavelength of about 440 nm is possible.

From the viewpoint of blue and non-blue light emission efficiency, for example, PBD (dielectric material of oxadiazole) or the like is used as a low molecular weight material in the light emitting layer 13 to improve the electron transporting property by about 30 wt%. Dispersion improves the electron transport property for each color. Further, the blue light emitting dye Bc previously dispersed in the light emitting layer 13 is the red light emitting dye Rc and the green light emitting dye G formed on the second substrate 31 as described later.
It is a luminescent pigment that emits light at a wavelength shorter than the wavelength of each emission color of c.

Then, the light emitting layer 13 in which the blue light emitting dye Bc is previously dispersed is formed on the first substrate 11 by spin coating or the like.
It is applied to a thickness of about 100 nm and then sufficiently dried.

Next, in the second step of the second embodiment, as shown in FIG.
As shown in (a) and (b), the first and second convex portions 31a
One second substrate (stamp substrate) 31 in which 1, 31a2 and the concave portion 21b are repeatedly formed is prepared for two colors of RG, and one masking plate M is prepared. Then, using the masking plate M, the red luminescent dye Rc and the green luminescent dye Gc are formed on each of the plurality of recesses 31b formed in the second substrate 31 by a method such as a vacuum deposition method for each color by about 20 nm. Since the blue light-emitting dye Bc is already dispersed in the light-emitting layer 13, the step of forming the blue light-emitting dye Bc on the plurality of recesses 31b formed in the second substrate 31 is omitted and corresponding to this portion. As described above, the second convex portion 31
a2 is formed.

That is, as shown in FIG.
Of the plurality of recesses 31b formed on the substrate 31, each recess 31b for which a red luminescent pigment Rc, for example, is to be formed as the first color
The red light emitting dye Rc is simultaneously formed on the film. In this case, the openings Ma of the masking plate M are aligned so as to oppose the recesses 31b on which the red luminescent dye Rc is to be simultaneously formed on the second substrate 31, and the masking plate M is placed on the second substrate 3
The first and second convex portions 31a1 and 31a2 are closely mounted. After that, the red luminescent dye Rc is passed through each opening Ma of the masking plate M, and the red luminescent dye Rc is formed on the second substrate 31 on each recess 31b on which a film is to be formed. Form a film.

Of course, the red luminescent dye Rc is formed on the second substrate 31.
The red luminescent dye Rc is not deposited because it is shielded by the shielding portion Mb of the masking plate M except for the concave portions 31b where the film is to be deposited.

Next, when the film formation of the red luminescent dye Rc on the second substrate 31 is completed, as shown in FIG.
As a color, for example, a green light emitting dye Gc is simultaneously formed on each second recess 31b on the right side of each recess 31b on which the red light emitting dye Rc is formed on the second substrate 31. In this case, the masking plate M is directed to the right side in the figure on the second substrate 31 so that the recesses 31b formed by depositing the red light-emitting dye Rc on the second substrate 31 are shielded by the shielding portion Mb of the masking plate M. And position it by 14 μm. After that, the green luminescent dye Gc is passed through each opening Ma of the masking plate M, and the green luminescent dye Gc is formed on the second substrate 31 on the right side of each recess 31b in which the red luminescent dye Rc is formed. A film of about 20 nm is formed on each recess 31b by a method such as a vacuum evaporation method. Here, of course, the green light emitting dye Gc is shielded by the shield portion Mb of the masking plate M except for the concave portions 31b where the green light emitting dye Gc is to be formed on the second substrate 31.
The film c is not formed.

Then, when the masking plate M is removed from the second substrate 31 after the above-described second step is completed, the red light emitting dye Rc and the green light emitting dye Gc are deposited on the plurality of recesses 31b of the second substrate 31. The film is formed in a matrix shape or a stripe shape.

Next, in the third step of the second embodiment, as shown in FIG.
As shown in, the plurality of recesses 31 formed on the second substrate 31.
Red luminescent dyes R each formed in a predetermined array on b
The c and green luminescent dyes Gc are doped (diffused) into the luminescent layer 13 + blue luminescent dye Bc formed on the first substrate 11 at substantially the same time. Here, since the width of the recess 31b formed in the second substrate 31 is formed to have the same size as the width of the pixel electrode 12 on the first substrate 11 as described above, it corresponds to each one pixel electrode 12. The red light emitting dye Rc and the green light emitting dye Gc can be respectively doped in the light emitting layer 13 + blue light emitting dye Bc at the portion to be filled.

That is, the light emitting layer 1 formed on the first substrate 11
Although the plurality of first and second convex portions 31a1 and 31a2 formed on the second substrate 31 are placed in contact with each other on the 3 + blue luminescent dye Bc, the plurality of first and second convex portions 31a1 and 31a are placed.
As described above, the red light emitting dye Rc and the green light emitting dye Gc are not formed on the film 2.

The red luminescent dye Rc and the green luminescent dye Gc, which are repeatedly formed on the plurality of recesses 31b formed on the second substrate 31, are added to the luminescent layer 13 + the blue luminescent dye Bc site to be doped with respective colors. Contactless,
The pixel electrodes 12 corresponding to this are placed so as to face each other and be aligned.

Then, the second substrate 31 is placed on the first substrate 11 and inserted into a heating furnace (oven) having an optimum temperature atmosphere, and both the substrates 11 and 31 are kept for a predetermined time. To heat. During this heating period, the red luminescent dye Rc and the green luminescent dye Gc formed on the plurality of recesses 31b formed in the second substrate 31 are evaporated, respectively, and after reaching the luminescent layer 13 + the blue luminescent dye Bc, at that position. Red emitting dye Rc and green emitting dye Gc in the light emitting layer 13 + blue emitting dye Bc
Spread almost simultaneously.

Here, for example, TPB is used as the blue light-emitting dye Bc previously dispersed in the light-emitting layer 13, and the above-mentioned Neil red is used as the red light-emitting dye Rc, and further, the above-mentioned green light-emitting dye Gc is used, for example. When coumarin 6 is used, the luminescent dyes Rc, Gc,
The optimum heating temperature at which Bc easily evaporates is 140 °
The heating time is about 10 minutes.

When the red light emitting dye R and the green light emitting dye Gc are doped in the light emitting layer 13 in which the blue light emitting dye Bc is dispersed, the blue light emitting dye B is contained in the light emitting layer 13.
c, the green luminescent dye Gc, and the red luminescent dye Rc exist, but the luminescent layer 13 to the blue luminescent dye Bc, the blue luminescent dye Bc to the green luminescent dye Gc, or the red luminescent dye Rc.
Energy is gradually and smoothly transferred to the long wavelength side. Therefore, the red and green emission efficiencies are improved and the emission from other than the red emission dye Rc and the green emission dye Rc is suppressed as compared with the case where energy is directly received without relay by the emission dye having a short emission wavelength. Therefore, the chromaticity of red and green is improved.

Next, in the fourth step of the second embodiment, as shown in FIG.
As shown in (a), the light emitting layer 13 + the blue light emitting dye Bc formed on the first substrate 11 is doped with the red light emitting dye Rc and the green light emitting dye Gc, and then the light emitting layer 1 is formed.
By forming a common electrode (counter electrode) 14 serving as a cathode on the 3 + blue luminescent dye Bc so as to face the plurality of pixel electrodes 12, the organic electroluminescence element EL1A of the second embodiment according to the present invention can be obtained. .

At this time, the plurality of pixel electrodes 12 are arranged on the first substrate 1
When a film is formed in a matrix on the first electrode 1, the common electrode (counter electrode) 14 is opposed to all the pixel electrodes 12 and is formed on the light emitting layer 13 + the blue light emitting pigment Bc.
Further, when the plurality of pixel electrodes 12 are film-formed on the first substrate 11 in a stripe shape, the common electrode (counter electrode) 14 is orthogonal to the plurality of pixel electrodes 12 and is also orthogonal to each other. Light-emitting layer 13 + blue light-emitting dye B facing each other
The film is formed in stripes on c.

The common electrode 14 is a substance having a low work function and suitable for a cathode material and is an opaque film, for example, Mg _0.9 Ag _0.1 is formed by vacuum evaporation to a thickness of about 100 nm. It's a film.

In the second step and the third step of the second embodiment, the second substrate 21 (FIG. 2) used in the first embodiment may be used, and in this case, it is formed on the second substrate 21. The red light emitting dye Rc and the green light emitting dye Gc are formed on the plurality of recesses 21b.
Is formed, and the blue light-emitting dye Bc may be left empty without being formed.

When the organic electroluminescence device EL2A of the second embodiment is manufactured by the above process, as shown in FIG. 16 (a), an arbitrary transparent pixel electrode (anode) 12 and an opaque common pixel electrode 12 are used. By applying a voltage to the electrode (cathode) 14, light emission of an arbitrary pixel can be taken out from the lower surface side of the transparent first substrate 11. At this time, B light is emitted from a portion where the blue light emitting dye Bc is previously dispersed in the light emitting layer 13, and the light emitting layer 13 + the blue light emitting dye B
R light is emitted from a region in which the red light emitting dye Gc is doped in c, and the green light emitting dye G is included in the light emitting layer 13 + blue light emitting dye Bc.
G light is emitted from the portion doped with c.

In addition, as shown in FIG.
As a clear film, for example Mg_0.9Ag _0.1Using
A plurality of pixel electrodes 12 are film-formed on the first substrate 11, and
And the common electrode 14 using an ITO film or the like as a transparent film.
Is formed on the light emitting layer 13 in which the blue light emitting dye Bc is dispersed.
Then, the light emission of an arbitrary pixel is transmitted to the upper surface side of the first substrate 11.
Can be taken out from the transparent common electrode 14 side.
In this case, the first substrate 11 may be an opaque substrate such as Si.
Plates can also be used.

Here, a method of manufacturing the organic electroluminescent element according to the second embodiment of the present invention and a modified example in which the organic electroluminescent element is partially modified will be briefly described with reference to FIGS. 17 and 18. .

FIG. 17 is a view for explaining a method of manufacturing an organic electroluminescent element according to the second embodiment of the present invention and a first modified example in which the organic electroluminescent element is partially modified, and FIG. 18 is related to the present invention. It is a figure for demonstrating the manufacturing method of the organic electroluminescent element of 2nd Example, and the 2nd modification which partially modified the organic electroluminescent element.

First, as shown in FIG. 17, in the method of manufacturing an organic electroluminescent element according to the second embodiment of the present invention and the first modified example in which the organic electroluminescent element is partially modified, a film is formed on the first substrate 11. A hole injection layer 15 is formed on the attached pixel electrode 12, and the hole injection layer 1 is formed.
5, the hole transport layer 16 is formed, and the hole transport layer 16 is further formed.
A light emitting layer 13 in which a blue light emitting dye Bc is dispersed for doping the red light emitting dye Rc and the green light emitting dye Gc is formed thereon. Then, when doping of the red light emitting dye Rc and the green light emitting dye Gc into the light emitting layer 13 + blue light emitting dye Bc is completed, the electron transport layer 17, the electron injection layer 18, and the common electrode 1 are formed on the light emitting layer 13 + blue light emitting dye Bc.
The organic electroluminescence element EL2B of the first modified example is obtained by stacking 4 in order, and this configuration makes it possible to further improve the light emission efficiency.

Next, as shown in FIG. 18, in the second modified example in which the method for manufacturing the organic electroluminescent element of the second embodiment according to the present invention and the organic electroluminescent element is partially modified, on the first substrate 11. Is formed between the adjacent pixel element electrodes 12 of SiO ₂ or the like by a CVD method or the like which is slightly higher than the light emitting layer 13 + the blue light emitting pigment Bc by using SiO ₂ or the like, and thus the organic electroluminescence element EL2C of the second modified example is formed. Is getting Thereby, when the second substrate 31 is placed on the first substrate 11, the second substrate 3
The plurality of first and second convex portions 31a1 and 31a2
It is possible to prevent the plurality of first and second convex portions 31a1 and 31a2 from coming into direct contact with the light emitting layer 13 + the blue light emitting pigment Bc by bringing them into contact with the upper end of the partition wall 19.

<Third Embodiment> In the method of manufacturing an organic electroluminescence device and the organic electroluminescence device according to the third embodiment of the present invention, the first embodiment described above is used.
The doping technical idea in the embodiment is applied, and in the third embodiment, as will be described later, RGB formed by repeatedly forming films on a plurality of convex portions formed on the second substrate (stamp substrate).
The feature is that the luminescent dyes of three colors are doped in the luminescent layer formed on the first substrate. With this, the third
The shape of the second substrate used in the embodiment is as shown in FIGS.
The dimensional relationship of each concave and convex portion is opposite to that of the second substrate (stamp substrate) used in the first embodiment described in (a) and (b).

FIG. 19 is a schematic view for explaining the second substrate (stamp substrate) in the method for manufacturing an organic electroluminescent element and the organic electroluminescent element according to the third embodiment of the present invention, FIG. FIG. 20 is a plan view showing the second substrate (stamp substrate) shown in FIG. 19 in plan view, (a) shows a case where a plurality of convex portions formed on the second substrate are arranged in a matrix, (b) FIG. 8A is a diagram showing a case where a plurality of convex portions formed on the second substrate are arranged in a stripe shape.

As shown in FIG. 19, the second substrate (stamp substrate) 41 used in the third embodiment is mounted on the light emitting layer 13 (FIG. 21) formed on the first substrate 11 and the pixel electrode 12 is formed.
A plurality of convex portions 41a having substantially the same area and concave portions 41b that are formed adjacent to the convex portions 41a are repeated in the column direction and / or the row direction of the pixel electrode 12, and a silicon substrate or the like is used. Are formed in a concavo-convex shape by methods such as photolithography and etching.

Here, the convex portion 41 formed on the second substrate 41
The width of a is set to 13 μm, which is the same width as the width of the pixel electrode 12 on the first substrate 11, and the height of the convex portion 41a projects about 10 μm from the concave portion 41b. Then, the RG is formed on the plurality of convex portions 41a formed on the second substrate 41.
The B3 color luminescent dyes Rc, Gc, and Bc are formed in a predetermined array. The width of the recess 41b formed in the second substrate 41 is set to 1 μm, which is the same as the size of the gap between the pixel electrodes 12 and 12 adjacent to each other on the first substrate 11.

The planar shape of the second substrate (stamp substrate) 41 is such that the matrix-shaped pixel electrodes 12 (see FIG. 1).
Corresponding to (a) and (b)}, as shown in FIG. 20 (a), a plurality of convex portions 41a formed on the second substrate 41 are arranged in a matrix, or pixels in stripes are arranged. Corresponding to the electrodes {FIG. 1 (c)}, as shown in FIG. 20 (b), the plurality of convex portions 41 formed on the second substrate 41.
a is arranged in a stripe shape, and then the first substrate (TF
21 to 24 for the method of manufacturing the organic electroluminescence element of the third embodiment according to the present invention by using the T substrate 11, the second substrate (stamp substrate) 41 and the masking plate M. The steps will be described in order.

FIG. 21 is a schematic diagram for explaining the first step in the method of manufacturing an organic electroluminescent element of the third embodiment, and FIGS. 22 (a) to 22 (c) show the organic electroluminescent element of the third embodiment. FIG. 23 is a schematic diagram for explaining the second step in the manufacturing method, FIG. 23 is a schematic diagram for explaining the third step in the manufacturing method for the organic electroluminescent element of the third embodiment, and FIG.
(B) is a schematic diagram for demonstrating the 4th process in the manufacturing method of the organic electroluminescent element of 3rd Example.

First, in the first step of the third embodiment, as shown in FIG.
As shown in FIG. 10, the light emitting layer 13 is formed on the plurality of pixel electrodes 12 formed on the first substrate (TFT substrate) 11 and on the first substrate 11 between the pixel electrodes 12 by spin coating or the like.
It is applied to a thickness of about 0 nm to form a uniform film, and then sufficiently dried. At this time, the above-mentioned light emitting layer 13 is
As in the first embodiment, for example, polyvinylcarbazole (PVCZ) which emits blue-violet light is used.

Next, in the second step of the third embodiment, as shown in FIG.
As shown in (a) to (c), the convex portion 41a and the concave portion 41b are formed.
One second substrate (stamp substrate) 41, which is formed by repeatedly forming and, is prepared for three colors of RGB, and one masking plate M is prepared. Then, using the masking plate M,
The red luminescent dye Rc, the green luminescent dye Gc, and the blue luminescent dye Bc are formed in a predetermined arrangement on each of the plurality of convex portions 41a formed on the second substrate 41 by a method such as a vacuum deposition method for each color to a thickness of about 20 nm. .

That is, as shown in FIG. 22A, the second
Among the plurality of convex portions 41a formed on the substrate 41, each convex portion 41a for which a red luminescent pigment Rc, for example, is to be formed as the first color
The red light emitting dye Rc is simultaneously formed on the film. In this case, the openings Ma of the masking plate M are aligned so as to oppose the respective convex portions 41a on which the red luminescent dye Rc is to be simultaneously formed on the second substrate 41, and the masking plate M is positioned to the red luminescent dye Rc. Is closely placed on each of the other convex portions 41a on which no film is formed. After that, the red luminescent dye Rc is passed through each opening Ma of the masking plate M, and 20 nm is formed on each convex portion 41a where the red luminescent dye Rc is to be formed on the second substrate 41 by a method such as a vacuum deposition method. Form a film.

Here, when three continuous convex portions 41a on the second substrate 41 are made to correspond to the three colors RGB, the convex portions 41a on which the red luminescent pigment Rc is to be simultaneously formed are repeatedly arranged every two. At the same time, the red light-emitting dye Rc is not formed because it is shielded by the shield portion Mb of the masking plate M except for the respective convex portions 41a where the red light-emitting dye Rc is desired to be formed.

At this time, as the red light emitting dye Rc, the first
Similar to the example, Neil Red, DCM1 {4-Dicyanme
thylene-2-methyl-6 (p-dimethylaminostyryl) -4H-pyra
n}, DCJT {4- (dicyanomethylene) -2-t-butyl-
6- (jurolidylstyryl) -pyran} and other pyran derivatives, squarylium derivatives, porphyrin derivatives,
Known red fluorescent dye materials such as chlorin derivatives and eurodiline derivatives are used.

Next, when the film formation of the red luminescent dye Rc on the second substrate 41 is completed, as shown in FIG.
As the color, for example, the green luminescent dye Gc is simultaneously formed on the respective convex portions 41a on the right side of the respective convex portions 41a on which the red luminescent pigment Rc is formed on the second substrate 41. In this case, the masking plate M is placed on the second substrate 41 on the right side in the figure so that the respective convex portions 41a formed by depositing the red luminescent dye Rc on the second substrate 41 are shielded by the shielding portion Mb of the masking plate M. Positioning is carried out with a shift of 14 μm. After that, the green light emitting dye Gc is passed through each opening Ma of the masking plate M, and the green light emitting dye Gc is formed on the second substrate 41 on the right side of the respective projections 41a on which the red light emitting dye Rc is formed. A film of about 20 nm is formed on each of the convex portions 41a by a method such as a vacuum vapor deposition method. In this case as well, the green light-emitting dye Gc is shielded by the shielding portion Mb of the masking plate M except for the projections 41a on which the green light-emitting dye Gc is to be formed on the second substrate 41.
Is not formed.

At this time, as the green luminescent dye Gc, the first
Similar to the examples, known green fluorescent dye materials such as coumarin derivatives such as coumarin 6, quinacridone derivatives, and iridium complexes that emit triplet excitons are used.

Next, after the film formation of the red light emitting dye Rc and the green light emitting dye Rc on the second substrate 41 is completed, the process shown in FIG.
As shown in (c), for example, a blue luminescent dye Bc is simultaneously formed as a third color on each convex portion 41a on the right side of the convex portion 41a on which the green luminescent pigment Gc is formed on the second substrate 41. To film. In this case, the masking plate M is moved to the second position so that the respective convex portions 41a formed by depositing the red light emitting dye Rc and the green light emitting dye Gc on the second substrate 41 are shielded by the shielding portion Mb of the masking plate M. Positioning is carried out on the substrate 41 by further shifting to the right by 14 μm. After this,
The blue luminescent dye Bc is passed through each opening Ma of the masking plate M, and the blue luminescent dye Gc is formed on the second substrate 41 to form the green luminescent dye Gc. 20 nm on the portion 41a by a method such as vacuum deposition
Form a film. Here, of course, except for the respective convex portions 41a on which the blue luminescent dye Gc is to be formed on the second substrate 41, the blue luminescent dye Bc is not formed because it is shielded by the shielding portion Mb of the masking plate M. .

At this time, as the blue luminescent dye Bc, the first
A coumarin derivative such as coumarin 47 as in the example,
Known blue fluorescent dye materials such as TPB (tetraphenyl butadiene) and perylene are used.

When the masking plate M is removed from the second substrate 41 after the above-mentioned second step is completed, the luminescent dyes Rc, Gc, Rc, Gc, and Rc of three colors R, G, and C are formed on the plurality of convex portions 41a of the second substrate 41. Bc is repeatedly formed into a matrix or stripe.

Furthermore, in the above-mentioned second step, the red light emitting dye Rc, the green light emitting dye Gc, and the blue light emitting dye Bc are added to the second light emitting dye Rc.
The order in which the films are respectively formed on the plurality of convex portions 41a formed on the substrate 41 may start from any color, and the arrangement of the three RGB colors on the plurality of convex portions 41a formed on the second substrate 41 is as illustrated. The combination is not limited to the RGB order, and may be repeatedly arranged in a predetermined arrangement as appropriate.

Next, in the third step of the fourth embodiment, as shown in FIG.
As shown in, the plurality of convex portions 41 formed on the second substrate 41
Red light-emitting dye R formed in a predetermined array on a
c, the green light emitting dye Gc, and the blue light emitting dye Bc are doped (diffused) into the light emitting layer 13 formed on the first substrate 11 at substantially the same time. Here, since the width of the convex portion 41a formed on the second substrate 41 is formed to have the same size as the width of the pixel electrode 12 on the first substrate 11 as described above, one pixel electrode 12 is formed for each pixel electrode 12. The red light-emitting dye Rc, the green light-emitting dye Gc, and the blue light-emitting dye Bc can be doped in the light-emitting layer 13 at the corresponding portions.

That is, the red luminescent pigment Rc, the green luminescent pigment Gc, and the blue luminescent pigment Bc deposited on the plurality of convex portions 41a of the second substrate 41 are deposited on the first substrate 11 to form the luminescent layer 13.
The red light emitting dye Rc, the green light emitting dye Gc, and the blue light emitting dye Bc, which are placed in contact with each other on the upper side, are arranged in the respective pixel electrodes 12 corresponding to the light emitting layer portions to be doped with the respective colors.
It is placed so as to face and align with.

After that, the second substrate 41 is placed on the first substrate 11 and inserted into a heating furnace (oven) having an optimum temperature atmosphere, and both the substrates 11 and 41 are allowed to stand for a predetermined time. To heat. During this heating period, the red light emitting dye Rc, the green light emitting dye Gc, and the blue light emitting dye Bc formed on the plurality of convex portions 41a formed on the second substrate 41 diffuse into the light emitting layer 13 at that position substantially at the same time.

At this time, the luminescent dye concentration of each color in the luminescent layer 13 has an appropriate value, and if it is less than that, the luminescence of the luminescent dye cannot be obtained. Will end up. Therefore, by controlling the heating temperature and the heating time, the luminescent dye concentration of each color is optimized.

Here, for example, the above-mentioned TPB is used as the blue light-emitting dye Bc previously dispersed in the light-emitting layer 13, the above-mentioned Neel red is used as the red light-emitting dye Rc, and further, the green light-emitting dye Gc is used as the green light-emitting dye Gc. When the above-mentioned coumarin 6 is used, the luminescent dyes Rc,
The optimum heating temperature for Gc and Bc is 120 ° to 140 ° C.
The heating time is about 10 minutes. At this time, the red light emitting dye Rc, the green light emitting dye Gc, and the blue light emitting dye Bc formed on the plurality of convex portions 41a formed on the second substrate 41.
Since it is in contact with the light emitting layer 13, the heating temperature can be set to be slightly lower than that in the first and second embodiments described above.

Then, the red light emitting dye Rc is contained in the light emitting layer 13.
Is doped, energy is transferred to the red luminescent dye Rc inside the light emitting layer 13. Therefore, the portion doped with the red luminescent dye Rc emits red light (R emission).
Will be possible. In addition, the green light emitting dye Gc is contained in the light emitting layer 13.
Is doped, energy is transferred to the green luminescent dye Gc inside the light emitting layer 13. Therefore, the portion doped with the green luminescent dye Gc emits green light (G emission).
Will be possible. Furthermore, in the light emitting layer 13, a blue light emitting dye Bc
Is doped, energy is transferred to the blue light emitting dye Bc inside the light emitting layer 13. Therefore, the portion doped with the blue light emitting dye Bc emits blue light (B light emission).
Will be possible.

Next, in the fourth step of the third embodiment, as shown in FIG.
As shown in (a), the luminescent layer 13 formed on the first substrate 11 is doped with the red luminescent dye Rc, the green luminescent dye Gc, and the blue luminescent dye Bc, and then the luminescent layer 1 is formed.
A common electrode (counter electrode) 14 serving as a cathode is formed on the electrode 3 so as to face the plurality of pixel electrodes 12, thereby forming an organic electroluminescence element EL3 of the third embodiment according to the present invention.
A is obtained in the same structural form as the organic electroluminescent element EL1A {FIG. 8 (a)} of the first embodiment described above.

When the organic electroluminescent element EL3A of the third embodiment is manufactured by the above process, as shown in FIG. 24 (a), an arbitrary transparent pixel electrode (anode) 12 and an opaque common pixel electrode 12 are used. By applying a voltage to the electrode (cathode) 14, light emission of an arbitrary pixel can be taken out from the lower surface side of the transparent first substrate 11. At this time, R light is emitted from a portion of the light emitting layer 13 doped with the red light emitting dye Rc, G light is emitted from a portion of the light emitting layer 13 doped with the green light emitting dye Gc, and light is emitted from a portion of the light emitting layer 13 doped with the blue light emitting dye Bc. B light is emitted.

In addition, as shown in FIG.
As a clear film, for example Mg_0.9Ag _0.1Using
A plurality of pixel electrodes 12 are film-formed on the first substrate 11, and
And the common electrode 14 using an ITO film or the like as a transparent film.
Is formed on the light emitting layer 13, the light emission of any pixel
From the transparent common electrode 14 side that is the upper surface side of the first substrate 11
Can be taken out, and in this case the first substrate 11
An opaque substrate such as Si can also be used.

Here, a method of manufacturing the organic electroluminescent element according to the third embodiment of the present invention and a modified example in which the organic electroluminescent element is partially modified will be briefly described with reference to FIG.

FIG. 25 is a view for explaining a method of manufacturing an organic electroluminescent element according to the third embodiment of the present invention and a modified example in which the organic electroluminescent element is partially modified.

As shown in FIG. 25, in the method of manufacturing an organic electroluminescent element according to the third embodiment of the present invention and in the modified example in which the organic electroluminescent element is partially modified, the first embodiment of FIG. 9 described above is used. First in the example
The structure is the same as that of the modification, and the hole injection layer 15 is provided between the pixel electrode 12 and the light emitting layer 13 which are film-formed on the first substrate 11.
A modified example in which the hole transport layer 16 is formed and the electron transport layer 17 and the electron injection layer 18 are formed between the light emitting layer 13 and the common electrode 14 to further improve the light emission efficiency. The organic electroluminescence element EL3B is obtained.

<Fourth Embodiment> In the method for manufacturing an organic electroluminescence device and the organic electroluminescence device according to the fourth embodiment of the present invention, the doping technical ideas in the second and third embodiments described above are combined. This fourth embodiment is different from the third embodiment in that the blue luminescent dye is dispersed in the light emitting layer on the first substrate (TFT substrate) in advance to form a stamp substrate, which will be described later. Among the luminescent dyes of a plurality of colors formed on the plurality of convex portions formed on the two substrates, it is not necessary to form a blue luminescent dye.

For convenience of explanation, the same components as those in the third embodiment are designated by the same reference numerals, and the same luminescent dye materials as those in the third embodiment are designated by the same reference numeral. The description will be made focusing on the points different from the third embodiment.

FIG. 26 is a schematic view for explaining the second substrate (stamp substrate) in the method for manufacturing an organic electroluminescent element and the organic electroluminescent element according to the fourth embodiment of the present invention, FIG. FIG. 27 is a plan view showing the second substrate (stamp substrate) shown in FIG. 26 in plan view, FIG. 26A shows a case where a plurality of convex portions formed on the second substrate are arranged in a matrix, and FIG. FIG. 8A is a diagram showing a case where a plurality of convex portions formed on the second substrate are arranged in a stripe shape.

In the method of manufacturing an organic electroluminescent element and the organic electroluminescent element of the fourth embodiment, the second substrate 51 as shown in FIG. 26 will be described with reference to FIGS. 1 (a) and 1 (b). It is prepared in advance as a stamp substrate to be placed on the first substrate 11.

The second substrate (stamp substrate) 51 described above
Is a convex portion 51a which is placed on the light emitting layer 13 (FIG. 28) formed by preliminarily dispersing the blue light emitting dye Bc on the first substrate 11 and which has substantially the same area as the pixel electrode 12 (FIG. 1). , The first and second concave portions 51 which are recessed adjacent to the convex portion 51a.
b1 and 51b2 are repeated a plurality of times along the column direction and / or the row direction of the pixel electrode 12, and are formed in an uneven shape by a method such as a photolithography method and an etching method using a silicon substrate or the like.

Here, the convex portion 51 formed on the second substrate 51.
The width of a1 is set to 13 μm, which is the same as the width of the pixel electrode 12 on the first substrate 11, and the plurality of convex portions 51 are formed.
The red luminescent dye Rc and the green luminescent dye Bc are formed on b, and the height of the convex portion 51a is the first
The second recesses 51b1 and 51b2 are projected by about 10 μm.

Further, the first concave portion 5 formed on the second substrate 51.
The width of 1b1 is equal to that of the pixel electrodes 1 adjacent to each other on the first substrate 11.
The size is the same as the size of the gap between 2 and 12, and is set to 1 μm. In addition, the second recess 51b formed in the second substrate 51
The width of 2 is set to 15 μm, which is the same size as the width of one pixel electrode 12 plus the left and right gaps, and the second concave portion 51b2 is a portion where it is not necessary to form the blue luminescent dye Bc. It corresponds to.

The planar shape of the second substrate (stamp substrate) 51 is the matrix-shaped pixel electrodes 12 (see FIG. 1).
Corresponding to (a) and (b)}, as shown in FIG. 27 (a), a plurality of convex portions 51a formed on the second substrate 51 are arranged in a matrix, or stripe-shaped pixels are formed. Corresponding to the electrodes {FIG. 1 (c)}, as shown in FIG. 27 (b), the plurality of convex portions 51 formed on the second substrate 51.
a is arranged in stripes.

Next, using the first substrate (TFT substrate) 11, the second substrate (stamp substrate) 51, and the masking plate M, the organic electroluminescent element of the fourth embodiment according to the present invention is manufactured. Regarding the method, FIGS.
Will be described in the order of steps.

FIG. 28 is a schematic diagram for explaining the first step in the method for manufacturing an organic electroluminescent element of the fourth embodiment, and FIGS. 29 (a) and 29 (b) show the organic electroluminescent element of the fourth embodiment. FIG. 30 is a schematic diagram for explaining the second step in the manufacturing method, FIG. 30 is a schematic diagram for explaining the third step in the manufacturing method for the organic electroluminescent element of the fourth example, FIG.
(B) is a schematic diagram for demonstrating the 4th process in the manufacturing method of the organic electroluminescent element of 4th Example.

First, in the first step of the fourth embodiment, as shown in FIG.
As shown in FIG. 2, the light emitting layer 1 in which the blue light emitting dye Bc is pre-dispersed on the plurality of pixel electrodes 12 filmed on the first substrate (TFT substrate) 11 and on the first substrate 11 between the pixel electrodes 12.
3 is uniformly formed. The light emitting layer 13 described above is the second
As in the example, for example, polyvinylcarbazole (PVCZ) that emits blue-violet light is used, and TPB (tetraphenylbutadiene), for example, about 5 mol% is previously dispersed in this light emitting layer 13 as the blue light emitting pigment Bc. Therefore, this can improve the chromaticity of blue. At this time, energy is smoothly transferred to the blue light emitting dye Bc inside the light emitting layer 13, so that blue light emission (B light emission) with a peak emission wavelength of about 440 nm is possible.

Further, from the viewpoint of blue and non-blue light emission efficiency, for example, PBD (dielectric substance of oxadiazole) or the like is used as a material in the light emitting layer 13 which is a low molecular weight material for improving the electron transporting property. Dispersion improves the electron transport property for each color.

Further, the blue luminescent dye Bc previously dispersed in the luminescent layer 13 is shorter than the wavelength of each luminescent color by the red luminescent dye Rc and the green luminescent dye Gc formed on the second substrate 51 as described later. It is a luminescent dye that emits light at a wavelength.

Then, the light emitting layer 13 in which the blue light emitting dye Bc is previously dispersed is formed on the first substrate 11 by spin coating or the like.
It is applied to a thickness of about 100 nm and then sufficiently dried.

Next, in the second step of the fourth embodiment, as shown in FIG.
As shown in (a) and (b), the convex portion 51a and the first and second
One second substrate (stamp substrate) 51 in which the concave portions 51b1 and 51b2 are repeatedly formed is prepared for two colors of RG, and one masking plate M is prepared. Then, using the masking plate M, the red light emitting dye Rc and the green light emitting dye Gc are formed on each of the plurality of convex portions 51a formed on the second substrate 51 by a method such as a vacuum deposition method for each color by about 20 nm. Since the blue light emitting dye Bc is already dispersed in the light emitting layer 13, the step of forming the blue light emitting dye Bc on the plurality of convex portions 51a formed on the second substrate 51 is omitted, and corresponding to this portion. The second recess 51b2 is formed.

That is, as shown in FIG. 29A, the second
Of the plurality of convex portions 51a formed on the substrate 51, each convex portion 51a for which a red luminescent dye Rc, for example, is to be formed as the first color
The red light emitting dye Rc is simultaneously formed on the film. In this case, the respective openings Ma of the masking plate M are aligned so as to face the respective convex portions 51a on which the red luminescent dye Rc is to be simultaneously formed on the second substrate 51, and the masking plate M is placed on the second substrate 5
The red luminescent pigment Rc is placed on the convex portion 51a on which the red luminescent pigment Rc is not deposited. After that, the red luminescent dye Rc is passed through the openings Ma of the masking plate M, and the red luminescent dye Rc is formed on the second substrate 51 on each convex portion 51a on which a film is to be formed. Form a film. Of course, the second
Each convex portion 51 on which a red luminescent dye Rc is to be formed on the substrate 51
Except for a, the red luminescent dye Rc is not deposited because it is shielded by the shield Mb of the masking plate M.

Next, when the film formation of the red luminescent dye Rc on the second substrate 51 is completed, as shown in FIG.
As the color, for example, the green luminescent dye Gc is simultaneously formed on the respective convex portions 51a on the right side of the respective convex portions 51a on which the red luminescent pigment Rc is formed on the second substrate 51. In this case, the masking plate M is placed on the right side of the second substrate 51 in the figure so that the convex portions 51b formed by depositing the red luminescent dye Rc on the second substrate 51 are shielded by the shielding portion Mb of the masking plate M. Positioning is carried out with a shift of 14 μm. After that, the green light-emitting dye Gc is passed through each opening Ma of the masking plate M, and the green light-emitting dye Gc is formed on the second substrate 51 on the right side of the respective projections 51a on which the red light-emitting dye Rc is formed. A film of about 20 nm is formed on each of the convex portions 51a by a method such as a vacuum vapor deposition method. Here, of course, except the respective convex portions 51a on which the green luminescent dye Gc is to be formed on the second substrate 51, the green luminescent dye Gc is shielded by the shield portion Mb of the masking plate M.
The film c is not formed.

Then, when the masking plate M is removed from the second substrate 51 after the above-mentioned second step is completed, the red light emitting dye Rc and the green light emitting dye Gc are formed on the plurality of convex portions 51a of the second substrate 51. Are formed into a matrix or stripes.

Next, in the third step of the fourth embodiment, FIG.
As shown in, the plurality of convex portions 51 formed on the second substrate 51
Red light-emitting dye R formed in a predetermined array on a
The c and green luminescent dyes Gc are doped (diffused) into the luminescent layer 13 + blue luminescent dye Bc formed on the first substrate 11 at substantially the same time. Here, since the width of the convex portion 51a formed on the second substrate 51 is formed to have the same size as the width of the pixel electrode 12 on the first substrate 11 as described above, one pixel electrode 12 is formed for each pixel electrode 12. The red light emitting dye Rc and the green light emitting dye Gc can be doped into the light emitting layer 13 + blue light emitting dye Bc at the corresponding portions.

That is, the red light emitting dye Rc and the green light emitting dye Gc formed on the plurality of convex portions 51a of the second substrate 51 are combined with the light emitting layer 13 + blue light emitting dye Bc formed on the first substrate 11.
The red light emitting dye Rc and the green light emitting dye Gc are placed in contact with each other, but the red light emitting dye Rc and the green light emitting dye Gc are each pixel electrode 12 corresponding to the light emitting layer + blue light emitting dye Bc site to be doped with each color.
It is placed so as to face and align with.

After that, the second substrate 51 is placed on the first substrate 11 and inserted into a heating furnace (oven) having an optimum temperature atmosphere, and both the substrates 11 and 51 are kept for a predetermined time. To heat. During this heating period, the red luminescent pigment Rc and the green luminescent pigment Gc formed on the plurality of convex portions 51a formed on the second substrate 51 are diffused at that position into the luminescent layer 13 + the blue luminescent pigment Bc substantially at the same time.

Here, for example, TPB is used as the blue light-emitting dye Bc previously dispersed in the light-emitting layer 13, and, for example, Neil red is used as the red light-emitting dye Rc.
When, for example, coumarin 6 is used as the green luminescent dye Gc, the optimum heating temperature for the luminescent dyes Rc, Gc, Bc of each color is about 120 ° to 140 ° C, and the heating time is 1
It takes about 0 minutes. At this time, since the red light emitting dye Rc and the green light emitting dye Gc formed on the plurality of convex portions 51a formed on the second substrate 51 are in contact with the light emitting layer 13 + the blue light emitting dye Bc, the heating temperature is previously described. It can be set to be slightly lower than those of the first and second embodiments.

When the red light emitting dye R and the green light emitting dye Gc are doped in the light emitting layer 13 in which the blue light emitting dye Bc is dispersed, the blue light emitting dye B is contained in the light emitting layer 13.
c, the green luminescent dye Gc, and the red luminescent dye Rc exist, but the luminescent layer 13 to the blue luminescent dye Bc, the blue luminescent dye Bc to the green luminescent dye Gc, or the red luminescent dye Rc.
Energy is gradually and smoothly transferred to the long wavelength side. Therefore, the red and green emission efficiencies are improved and the emission from other than the red emission dye Rc and the green emission dye Rc is suppressed as compared with the case where energy is directly received without relay by the emission dye having a short emission wavelength. Therefore, the chromaticity of red and green is improved.

Next, in the fourth step of the fourth embodiment, as shown in FIG.
As shown in (a) and (b), the red light emitting dye R is contained in the light emitting layer 13 + the blue light emitting dye Bc formed on the first substrate 11.
c and green luminescent dye Gc, respectively,
By forming a common electrode (counter electrode) 14 serving as a cathode on the light emitting layer 13 + blue light emitting pigment Bc so as to face the plurality of pixel electrodes 12, the organic electroluminescence element EL4A according to the fourth embodiment of the present invention is formed. The organic electroluminescent element EL2A of the second embodiment described above {FIG.
6 (a)} in the same structural form.

In the second and third steps of the fourth embodiment, the second substrate 41 (FIG. 19) used in the third embodiment may be used. In this case, it is formed on the second substrate 41. The red light emitting dye Rc and the green light emitting dye G are formed on the plurality of convex portions 41a.
It suffices to form c and form the blue luminescent dye Bc without forming a film.

When the organic electroluminescence device EL4A of the fourth embodiment is manufactured by the above process, as shown in FIG. 31A, an arbitrary transparent pixel electrode (anode) 12 and an opaque common pixel electrode 12 are used. By applying a voltage to the electrode (cathode) 14, light emission of an arbitrary pixel can be taken out from the lower surface side of the transparent first substrate 11. At this time, B light is emitted from a portion where the blue light emitting dye Bc is previously dispersed in the light emitting layer 13, and the light emitting layer 13 + the blue light emitting dye B
R light is emitted from a region in which the red light emitting dye Gc is doped in c, and the green light emitting dye G is included in the light emitting layer 13 + blue light emitting dye Bc.
G light is emitted from the portion doped with c.

In addition, as shown in FIG.
As a clear film, for example Mg_0.9Ag _0.1Using
A plurality of pixel electrodes 12 are film-formed on the first substrate 11, and
And the common electrode 14 using an ITO film or the like as a transparent film.
Is formed on the light emitting layer 13 in which the blue light emitting dye Bc is dispersed.
Then, the light emission of an arbitrary pixel is transmitted to the upper surface side of the first substrate 11.
Can be taken out from the transparent common electrode 14 side.
In this case, the first substrate 11 may be an opaque substrate such as Si.
Plates can also be used.

Now, a method of manufacturing the organic electroluminescent element according to the fourth embodiment of the present invention and a modified example in which the organic electroluminescent element is partially modified will be briefly described with reference to FIG.

FIG. 32 is a view for explaining a method of manufacturing an organic electroluminescent element according to the fourth embodiment of the present invention and a modified example in which the organic electroluminescent element is partially modified.

First, as shown in FIG. 32, in the method of manufacturing an organic electroluminescent element according to the fourth embodiment of the present invention and in the modified example in which the organic electroluminescent element is partially modified, as shown in FIG. The second embodiment has the same structural form as the first modified example, and the pixel electrode 12 and the light emitting layer 13 + the blue light emitting pigment B film-formed on the first substrate 11 are formed.
a hole injection layer 15 and a hole transport layer 16 are formed between
In addition, by forming the electron transport layer 17 and the electron injection layer 18 between the light emitting layer 13 + the blue light emitting dye Bc and the common electrode 14, the organic electroluminescent element EL4B of the modified example capable of further improving the light emitting efficiency. Is getting

[0158]

In the method of manufacturing an organic electroluminescence device and the organic electroluminescence device according to the present invention described in detail above, according to claim 1, in particular, light is emitted on a plurality of pixel electrodes film-formed on the first substrate. The layer is uniformly formed, and the luminescent dyes of at least two colors or more are formed in a predetermined array on the plurality of recesses formed on the second substrate by using the masking plate. A plurality of recesses formed in the second substrate were placed on the light emitting layer so as to face the plurality of pixel electrodes, and both substrates were stacked and heated at a predetermined temperature to form a film on the plurality of recesses. At least 2
Since luminescent dyes of at least two colors are diffused into the luminescent layer substantially at the same time, for example, as luminescent dyes of at least two colors,
When the red luminescent dye, the green luminescent dye, and the blue luminescent dye are used, the luminescent dyes of the respective colors can satisfactorily emit light and the mass productivity of the organic electroluminescent element can be improved.

According to the second aspect, in particular, the light emitting layer is uniformly formed on the plurality of pixel electrodes film-formed on the first substrate, and is formed on the second substrate by using the masking plate. At least two or more colors of luminescent dyes are formed in a predetermined array on the plurality of protrusions, and then the plurality of protrusions formed on the second substrate on the light emitting layer of the first substrate face the plurality of pixel electrodes. The two substrates are placed on top of each other and heated at a predetermined temperature in a state where the two substrates are superposed on each other, so that the luminescent dyes of at least two colors or more formed on the plurality of convex portions are diffused into the luminescent layer substantially at the same time. For example, when a red luminescent dye, a green luminescent dye, and a blue luminescent dye are used as the luminescent dyes of at least two colors or more, the luminescent dyes of the respective colors can satisfactorily emit light, and the organic electroluminescent element Mass productivity can be improved.

Further, according to claim 3, the organic electroluminescence device manufactured by using the method for manufacturing an organic electroluminescence device according to claim 1 or 2 has a luminous performance of at least two colors of luminescent dyes. It is good.

[Brief description of drawings]

FIG. 1A to FIG. 1C are commonly used in the first to fourth examples of the method for manufacturing an organic electroluminescent element and the organic electroluminescence element of the first to fourth examples according to the present invention. It is a top view of an example for explaining the 1st substrate, a front view, and a plan view of other examples.

FIG. 2 is a diagram schematically illustrating a second substrate (stamp substrate) in the method for manufacturing an organic electroluminescent element and the organic electroluminescent element according to the first embodiment of the present invention.

FIG. 3 is a plan view showing the second substrate (stamp substrate) shown in FIG. 2 in a plan view, and FIG. 3 (a) shows a case where a plurality of recesses formed in the second substrate are arranged in a matrix,
(B) is a diagram showing a case where a plurality of concave portions formed on the second substrate are arranged in a stripe shape.

FIG. 4 is a plan view for explaining a masking plate used in forming a plurality of colors of luminescent dyes on a second substrate, and FIG. 4A is a matrix view of forming a plurality of colors of luminescent dyes. FIG. 6B is a diagram corresponding to the case, and FIG. 9B is a diagram corresponding to the case where the luminescent dyes of a plurality of colors are formed in a stripe shape.

FIG. 5 is a schematic diagram for explaining a first step in the method for manufacturing the organic electroluminescent element of the first embodiment.

6 (a) to 6 (c) are schematic views for explaining a second step in the method for manufacturing the organic electroluminescent element of the first embodiment.

FIG. 7 is a schematic diagram for explaining a third step in the method for manufacturing the organic electroluminescent element of the first embodiment.

8A and 8B are schematic diagrams for explaining a fourth step in the method for manufacturing the organic electroluminescent element of the first embodiment.

FIG. 9 is a diagram for explaining a method for manufacturing an organic electroluminescent element according to a first embodiment of the present invention and a first modified example in which the organic electroluminescent element is partially modified.

FIG. 10 is a drawing for explaining the method for manufacturing an organic electroluminescent element and the second modified example in which the organic electroluminescent element is partially modified according to the first embodiment of the present invention.

FIG. 11 is a schematic view for explaining a second substrate (stamp substrate) in the method for manufacturing an organic electroluminescent element and the organic electroluminescent element of the second example according to the present invention.

12 is a plan view showing the second substrate (stamp substrate) shown in FIG. 11 in plan view, and FIG. 12 (a) shows a case where a plurality of recesses formed in the second substrate are arranged in a matrix, (B) is a diagram showing a case where a plurality of concave portions formed on the second substrate are arranged in a stripe shape.

FIG. 13 is a schematic diagram for explaining the first step in the method for manufacturing an organic electroluminescent element of the second example.

14 (a) and 14 (b) are schematic views for explaining a second step in the method for manufacturing the organic electroluminescent element of the second embodiment.

FIG. 15 is a schematic diagram for explaining a third step in the method for manufacturing the organic electroluminescent element of the second embodiment.

16 (a) and 16 (b) are schematic views for explaining a fourth step in the method for manufacturing the organic electroluminescent element of the second embodiment.

FIG. 17 is a diagram for explaining a method for manufacturing an organic electroluminescent element according to a second embodiment of the present invention and a first modified example in which the organic electroluminescent element is partially modified.

FIG. 18 is a diagram for explaining a second modified example in which the method for manufacturing an organic electroluminescent element and the organic electroluminescent element of the second embodiment according to the present invention are partially modified.

FIG. 19 is a diagram schematically showing a second substrate (stamp substrate) in the method for manufacturing an organic electroluminescent element and the organic electroluminescent element of the third example according to the present invention.

20 is a plan view showing the second substrate (stamp substrate) shown in FIG. 19 in a plan view, and FIG. 20A shows a case where a plurality of convex portions formed on the second substrate are arranged in a matrix. , (B) are diagrams showing a case where a plurality of convex portions formed on the second substrate are arranged in a stripe shape.

FIG. 21 is a schematic diagram for explaining the first step in the method for manufacturing an organic electroluminescent element of the third example.

22 (a) to 22 (c) are schematic views for explaining a second step in the method for manufacturing an organic electroluminescent element of the third embodiment.

FIG. 23 is a schematic diagram for explaining a third step in the method for manufacturing an organic electroluminescent element of the third embodiment.

24 (a) and 24 (b) are schematic views for explaining a fourth step in the method for manufacturing an organic electroluminescent element of the third embodiment.

FIG. 25 is a diagram for explaining a method of manufacturing an organic electroluminescent element and a modified example in which the organic electroluminescent element is partially modified, according to the third embodiment of the present invention.

FIG. 26 is a diagram schematically illustrating a second substrate (stamp substrate) in the method for manufacturing an organic electroluminescent element and the organic electroluminescent element according to the fourth example of the present invention.

27 is a plan view showing the second substrate (stamp substrate) shown in FIG. 26 in a plan view, and FIG. 27A shows a case where a plurality of convex portions formed on the second substrate are arranged in a matrix. , (B) are diagrams showing a case where a plurality of convex portions formed on the second substrate are arranged in a stripe shape.

FIG. 28 is a schematic diagram for explaining the first step in the method for manufacturing an organic electroluminescent element of the fourth example.

FIGS. 29 (a) and 29 (b) are schematic views for explaining a second step in the method for manufacturing an organic electroluminescent element of the fourth example.

FIG. 30 is a schematic diagram for explaining a third step in the method for manufacturing the organic electroluminescent element of the fourth example.

31 (a) and 31 (b) are schematic views for explaining a fourth step in the method for manufacturing an organic electroluminescent element of the fourth example.

FIG. 32 is a view for explaining a method for manufacturing an organic electroluminescent element and a modified example in which the organic electroluminescent element is partially modified, according to the fourth embodiment of the present invention.

33A to 33C are diagrams for explaining a conventional color organic EL display and a method for manufacturing the same.

[Explanation of symbols]

11 ... First substrate (TFT substrate), 12 ... Pixel electrode, 13
... Light emitting layer, 21 ... Second substrate (stamp substrate), 21a ...
Convex part, 21b ... concave part, 31 ... second substrate (stamp substrate), 31a1 ... first convex part, 31a2 ... second convex part, 31
b ... concave part, 41 ... second substrate (stamp substrate), 41a ...
Convex part, 41b ... concave part, 51 ... second substrate (stamp substrate), 51a ... convex part, 51b1 ... first uneven part, 51b2 ...
2nd recessed part, Rc ... red light emitting dye, Gc ... green light emitting dye,
Bc ... Blue light-emitting dye, EL1A ... Organic electroluminescence element of first example, EL1B ... Organic electroluminescence element of first modified example of first example, EL1
C ... Organic electroluminescence element of second modification of first embodiment, EL2A ... Organic electroluminescence element of second embodiment, EL2B ... Organic electroluminescence element of first modification of second embodiment, EL2C ... Second
Organic electroluminescent element of second modified example of example, EL3A ... Organic electroluminescent element of third example, EL3B ... Organic electroluminescent element of first modified example of third example, EL4A ... Organic of fourth example Electroluminescence device, EL4B ... Organic electroluminescence device of ninth modified example of the fourth embodiment, M ... Masking plate, Ma ... Opening part, Mb ... Shielding part.

Front page continuation (51) Int.Cl. ⁷ identification code FI theme code (reference) H05B 33/22 H05B 33/22 DF term (reference) 3K007 AB04 AB17 AB18 BA06 BB07 CB01 DA01 DB03 EB00 FA01 FA03 5C094 AA03 AA05 AA08 AA42 AA43 AA46 AA48 BA03 BA12 BA27 CA19 CA24 DA13 EA04 EA05 EA07 FA01 FB01 FB20 GB10 5G435 AA04 AA17 BB05 CC09 CC12 HH01 HH20 KK05 KK10

Claims (3)

[Claims] 1. A step of uniformly forming a light emitting layer on a plurality of pixel electrodes formed on a first substrate, a convex portion for mounting on the light emitting layer of the first substrate, and the convex portion. A second substrate in which a plurality of recesses that are indented adjacent to the pixel electrode and have substantially the same area as the pixel electrode are alternately and repeatedly formed along the column direction and / or the row direction of the pixel electrode; Each opening for passing only the dye is formed corresponding to each recess of the plurality of recesses formed in the second substrate where the luminescent dye of the same color is to be formed,
A masking plate formed with a shielding part that shields parts other than the openings is used, and the openings of the masking plate are aligned so as to oppose the recesses of the second substrate on which the luminescent dye of one color is to be formed. The masking plate is closely placed on the second substrate to form a film of the luminescent dye of one color on each recess of the second substrate, and then each opening of the masking plate is opened. The luminescent dyes of other colors are shifted and deposited on the other recesses of the second substrate to form a predetermined array of luminescent dyes of at least two colors on the plurality of recesses formed on the second substrate. A step of sequentially forming films for each color; placing a plurality of convex portions of the second substrate on the light emitting layer of the first substrate, and forming a plurality of concave portions of the second substrate in a predetermined arrangement. The film-formed at least two or more colors of luminescent dyes face the corresponding pixel electrodes. And a step of diffusing the luminescent dyes of at least two colors or more into the luminescent layer while heating the luminescent dyes of two or more colors at a predetermined temperature in a state where the two substrates are overlapped with each other; A method of manufacturing an organic electroluminescence device, comprising the step of forming a counter electrode facing the pixel electrode on the light emitting layer after diffusion. 2. A step of uniformly forming a light emitting layer on a plurality of pixel electrodes formed on a first substrate, the step of placing the light emitting layer on the light emitting layer of the first substrate, and substantially the same as the pixel electrode. Only a luminescent pigment of the same color is formed on the second substrate, which is formed by repeatedly forming a plurality of convex portions having an area and concave portions that are dented adjacent to the convex portions along the column direction and / or the row direction of the pixel electrode. A shield part that forms each opening to be passed through in correspondence with each of the plurality of projections formed on the second substrate to which the luminescent dye of the same color is desired to be deposited, and shields other than the openings. A masking plate formed with the masking plate, and aligning the openings of the masking plate so as to oppose the respective convex portions of the second substrate on which the luminescent dye of one color is to be formed, The luminescent dye of one color is placed on the substrate in close contact with the second substrate and After forming a film on the convex portion, next, by shifting each opening of the masking plate and forming a luminescent dye of another color on each other convex portion of the second substrate, at least two colors are formed. A step of sequentially depositing the above-mentioned luminescent dye on the plurality of convex portions formed on the second substrate in a predetermined arrangement for each color, and a plurality of convex portions of the second substrate on the light emitting layer of the first substrate. Part, and at least two luminescent dyes of at least two colors formed in a predetermined arrangement on the plurality of convex portions of the second substrate are made to face the corresponding pixel electrodes, and the two substrates are superposed on each other. And diffusing into the light emitting layer while heating at least two or more color emitting dyes at a predetermined temperature, and after diffusing at least two or more color emitting dyes into the light emitting layer, A step of forming a facing counter electrode on the light emitting layer. Method of manufacturing an organic electroluminescent device, characterized in that. 3. An organic electroluminescence device manufactured by using the method for manufacturing an organic electroluminescence device according to claim 1.