JP2003242913A - Flat display device and manufacturing method of the same - Google Patents

Flat display device and manufacturing method of the same

Info

Publication number
JP2003242913A
JP2003242913A JP2002038844A JP2002038844A JP2003242913A JP 2003242913 A JP2003242913 A JP 2003242913A JP 2002038844 A JP2002038844 A JP 2002038844A JP 2002038844 A JP2002038844 A JP 2002038844A JP 2003242913 A JP2003242913 A JP 2003242913A
Authority
JP
Japan
Prior art keywords
substrate
front substrate
thin plate
display device
joining member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002038844A
Other languages
Japanese (ja)
Inventor
Masahiro Yokota
昌広 横田
Akiyoshi Yamada
晃義 山田
Takashi Enomoto
貴志 榎本
Koji Nishimura
孝司 西村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP2002038844A priority Critical patent/JP2003242913A/en
Publication of JP2003242913A publication Critical patent/JP2003242913A/en
Pending legal-status Critical Current

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  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a flat display device which can be easily sealed in vacuum environment at low cost, and to provide a manufacturing method of the same. <P>SOLUTION: A vacuum envelope 18 of the display device is composed of a front base plate 12 and a back base plate 1 facing each other, and a sealing part 13 sealing the peripheral part of the front base plate and the back base plate. The sealing part includes a frame-shaped jointing member 20 formed by pressing a seamless frame-shaped thin plate, and sealing members 22a, 22b sealing the gap between the front base plate and the back base plate, and the jointing member. The jointing member has conductivity and a melting point or a softening joint higher than that of the sealing member. <P>COPYRIGHT: (C)2003,JPO

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】この発明は、対向配置された
前面基板および背面基板を有した平坦な形状の平面表示
装置、およびその製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat display device having a front substrate and a rear substrate which are arranged to face each other, and a manufacturing method thereof.

【0002】[0002]

【従来の技術】近年、陰極線管(以下、CRTと称す
る)に代わる次世代の軽量、薄型の表示装置として様々
な平面表示装置が開発されている。このような平面表示
装置には、液晶の配向を利用して光の強弱を制御する液
晶ディスプレイ(以下、LCDと称する)、プラズマ放
電の紫外線により蛍光体を発光させるプラズマディスプ
レイパネル(以下、PDPと称する)、電界放出型電子
放出素子の電子ビームにより蛍光体を発光させるフィー
ルドエミッションディスプレイ(以下、FEDと称す
る)、表面伝導型電子放出素子の電子ビームにより蛍光
体を発光させる表面伝導電子放出ディスプレイ(以下、
SEDと称する)などがある。
2. Description of the Related Art In recent years, various flat display devices have been developed as next-generation lightweight and thin display devices which will replace cathode ray tubes (hereinafter referred to as CRTs). Such flat display devices include a liquid crystal display (hereinafter, referred to as LCD) that controls the intensity of light by utilizing the alignment of liquid crystals, a plasma display panel (hereinafter, referred to as PDP) that emits a phosphor by ultraviolet rays of plasma discharge. Field emission display (hereinafter, referred to as FED) that emits a phosphor by an electron beam of a field emission type electron emission device, and a surface conduction electron emission display that emits a phosphor by an electron beam of a surface conduction type electron emission device (hereinafter referred to as FED). Less than,
SED)) and so on.

【0003】例えばFEDは、一般に、所定の隙間を置
いて対向配置された前面基板および背面基板を有し、こ
れらの基板は、矩形枠状の側壁を介して周辺部同士を互
いに接合することにより真空の外囲器を構成している。
前面基板の内面には蛍光体スクリーンが形成され、背面
基板の内面には蛍光体を励起して発光させる電子源とし
て多数の電子放出素子が設けられている。
For example, an FED generally has a front substrate and a rear substrate which are arranged to face each other with a predetermined gap, and these substrates are formed by joining peripheral portions to each other via a rectangular frame-shaped side wall. It constitutes a vacuum envelope.
A phosphor screen is formed on the inner surface of the front substrate, and a large number of electron-emitting devices are provided on the inner surface of the rear substrate as electron sources for exciting the phosphors to emit light.

【0004】また、背面基板および前面基板に加わる大
気圧荷重を支えるために、これら基板の間には複数の支
持部材が配設されている。背面基板側の電位はほぼアー
ス電位であり、蛍光面にはアノード電圧が印加される。
そして、蛍光体スクリーンを構成する赤、緑、青の蛍光
体層に、電子放出素子から放出された電子ビームを照射
し、蛍光体を発光させることにより画像を表示する。
Further, in order to support the atmospheric pressure load applied to the back substrate and the front substrate, a plurality of supporting members are arranged between these substrates. The potential on the rear substrate side is almost the ground potential, and the anode voltage is applied to the phosphor screen.
Then, the red, green, and blue phosphor layers that form the phosphor screen are irradiated with the electron beams emitted from the electron-emitting devices to cause the phosphors to emit light, thereby displaying an image.

【0005】このような表示装置では、表示装置の厚さ
を数mm程度にまで薄くすることができ、現在のテレビ
やコンピュータのディスプレイとして使用されているC
RTと比較し、軽量化、薄型化を達成することができ
る。
In such a display device, the thickness of the display device can be reduced to about several millimeters, and C, which is currently used as a display for televisions and computers, is used.
Compared with RT, it is possible to achieve weight reduction and thickness reduction.

【0006】[0006]

【発明が解決しようとする課題】上記のようなFEDで
は、外囲器の内部を真空にすることが必要となる。ま
た、PDPにおいても、外囲器の内部を一度真空にして
から放電ガスを充填する必要がある。外囲器を真空にす
る手段として、例えば、特開2001−229825号
公報には、外囲器を構成する前面基板と背面基板との最
終組立てを真空槽内で行う方法が示されている。
In the above FED, it is necessary to make the inside of the envelope vacuum. Also in the PDP, it is necessary to evacuate the inside of the envelope once and then fill the discharge gas. As means for evacuating the envelope, for example, Japanese Unexamined Patent Application Publication No. 2001-229825 discloses a method of performing final assembly of a front substrate and a rear substrate forming the envelope in a vacuum chamber.

【0007】ここでは、最初に真空槽内に配置された前
面基板および背面基板を十分に加熱しておく。これは、
外囲器真空度を劣化させる主因となっている外囲器内壁
からのガス放出を軽減するためである。次に、前面基板
と背面基板が冷えて真空槽内の真空度が十分に向上した
ところで、外囲器真空度を改善、維持させるためのゲッ
タ膜を蛍光面スクリーン上に形成する。その後、封着材
を介して前面基板および背面基板を貼り合わせ、封着材
が溶解する温度まで前面基板と背面基板とを再び加熱す
る。そして、前面基板および背面基板を所定の位置に組
み合わせた状態で封着材が固化するまで冷却する。
Here, first, the front substrate and the rear substrate arranged in the vacuum chamber are sufficiently heated. this is,
This is to reduce gas emission from the inner wall of the envelope, which is the main cause of deterioration of the vacuum degree of the envelope. Then, when the front substrate and the rear substrate are cooled and the degree of vacuum in the vacuum chamber is sufficiently improved, a getter film for improving and maintaining the degree of vacuum of the envelope is formed on the phosphor screen. Then, the front substrate and the back substrate are bonded together via the sealing material, and the front substrate and the back substrate are heated again to a temperature at which the sealing material melts. Then, the front substrate and the rear substrate are combined in a predetermined position and cooled until the sealing material is solidified.

【0008】このような方法で作成された真空外囲器
は、封着工程および真空封止工程を兼ねるうえ、排気管
を用いて外囲器内を排気する場合のような時間を必要と
せず、かつ、極めて良好な真空度を得ることができる。
The vacuum envelope manufactured by such a method has both a sealing step and a vacuum sealing step, and does not require the time required for exhausting the inside of the envelope using an exhaust pipe. In addition, a very good degree of vacuum can be obtained.

【0009】しかしながら、上記の方法では、真空中で
行う封着工程が、加熱、位置合わせ、冷却と多岐に渡
り、かつ、封着材が溶解固化する間、長時間に亘って前
面基板と背面基板とを所定の位置に維持し続けなければ
ならない。また、封着時の加熱、冷却に伴い前面基板お
よび背面基板が熱膨張し、位置合わせ精度が劣化し易
い。更に、封着時の加熱によりゲッタ膜が劣化すること
など、封着に伴なう生産性、特性面での問題がある。ま
た、FEDなどでは前面基板と背面基板との隙間を1m
m以上設けることが多く、これらにおいては一般的にガ
ラスなどからなる側壁を用いており、この側壁の加工の
コストが問題であった。
However, in the above method, the sealing process performed in vacuum includes heating, positioning, and cooling, and the front substrate and the back surface are covered for a long time while the sealing material is melted and solidified. The substrate and must be kept in place. In addition, the front substrate and the rear substrate thermally expand due to heating and cooling during sealing, and the alignment accuracy is likely to deteriorate. Further, there is a problem in productivity and characteristics associated with the sealing, such as deterioration of the getter film due to heating during sealing. In addition, for FED, etc., the gap between the front substrate and the rear substrate is 1 m.
In many cases, a side wall made of glass or the like is used, and the cost of processing the side wall is a problem.

【0010】この発明は以上の点に鑑みなされたもの
で、その目的は、真空雰囲気中で容易に、かつ低コスト
で封着を行うことが可能な平面型表示装置、およびその
製造方法を提供することにある。
The present invention has been made in view of the above points, and an object thereof is to provide a flat-panel display device which can be easily sealed in a vacuum atmosphere at low cost, and a manufacturing method thereof. To do.

【0011】[0011]

【課題を解決するための手段】上記の課題を解決するた
め、この発明の態様に係る平面型表示装置は、対向配置
された前面基板および背面基板と、上記前面基板および
背面基板の周辺部を互いに封着した封着部と、を有した
外囲器を備え、上記封着部は、継ぎ目のない枠状の薄板
からプレス成形された枠状の接合部材と、上記前面基板
および背面基板と上記接合部材との間を封着した封着材
とを含み、上記接合部材は、導電性を有しているととも
に、上記封着材よりも高い融点あるいは軟化点を有して
いる。
In order to solve the above problems, a flat panel display device according to an aspect of the present invention has a front substrate and a rear substrate which are arranged to face each other, and a peripheral portion of the front substrate and the rear substrate. A sealing portion that is sealed to each other, and an envelope having the sealing portion, the sealing portion, a frame-shaped joining member press-molded from a seamless frame-shaped thin plate, the front substrate and the back substrate The bonding member includes a sealing material that seals between the bonding member and the bonding member, and the bonding member has electrical conductivity and has a higher melting point or softening point than the sealing material.

【0012】また、この発明の他の態様に係る平面型表
示装置の製造方法は、対向配置された前面基板および背
面基板と、上記前面基板および背面基板の周辺部を互い
に封着した封着部と、を有する外囲器を備えた平面型表
示装置の製造方法において、導電性を有しているととも
に、上記封着材よりも高い融点あるいは軟化点を有した
継ぎ目のない枠状の薄板を用意し、上記枠状の薄板から
プレス成形により枠状の接合部材を形成し、上記前面基
板および背面基板と上記接合部材との間に封着材を充填
し、上記封着材が充填された上記前面基板、背面基板お
よび接合部材を所定の位置に位置合わせして真空雰囲気
中に配置し、上記真空雰囲気中で上記接合部材に通電し
て接合部材および封着材を加熱し、上記封着材が溶融し
た後、通電を停止して上記封着材を冷却し、上記前面基
板および背面基板と上記接合部材とを封着することを特
徴としている。
According to another aspect of the present invention, there is provided a method of manufacturing a flat panel display device, wherein a front substrate and a rear substrate which are opposed to each other and a sealing portion in which the peripheral portions of the front substrate and the rear substrate are mutually sealed. In the method for manufacturing a flat-panel display device including an envelope having, a seamless frame-shaped thin plate having conductivity and having a melting point or a softening point higher than that of the sealing material is provided. A frame-shaped joining member was formed from the frame-shaped thin plate by press molding, and a sealing material was filled between the front substrate and the back substrate and the joining member, and the sealing material was filled. The front substrate, the back substrate, and the bonding member are aligned in predetermined positions and arranged in a vacuum atmosphere, and the bonding member and the sealing material are heated by energizing the bonding member in the vacuum atmosphere to perform the sealing. Stop energizing after the material melts Te cooled the sealing material, is characterized in that to seal the said front and rear substrates and the joining member.

【0013】上記構成の平面表示装置および製造方法に
よれば、ガラス等によって形成された側壁の代わりに安
価な金属等の薄板プレス加工部材を接合部材として用
い、真空雰囲気中で前面基板および背面基板の周縁部を
容易に封着することができるとともに、製造コストの低
減を図ることが可能となる。
According to the flat-panel display device and the manufacturing method having the above-described structure, a thin plate press member made of an inexpensive metal or the like is used as the joining member instead of the side wall made of glass or the like, and the front substrate and the rear substrate are used in a vacuum atmosphere. It is possible to easily seal the peripheral edge portion of and to reduce the manufacturing cost.

【0014】[0014]

【発明の実施の形態】以下、図面を参照ながら、この発
明に係る平面型表示装置をFEDに適用した実施の形態
について詳細に説明する。
BEST MODE FOR CARRYING OUT THE INVENTION Embodiments in which the flat panel display device according to the present invention is applied to an FED will be described in detail below with reference to the drawings.

【0015】図1および図2に示すように、このFED
は、それぞれ透明な矩形状の絶縁基板、例えば、厚さ
2.8mmのガラス板からなる背面基板11および前面
基板12を備え、これらの基板は所定の隙間を置いて対
向配置されている。そして、背面基板11および前面基
板12は、後述する封着部13により周縁部同志が接合
され、偏平な矩形状の真空外囲器18を構成している。
As shown in FIGS. 1 and 2, this FED
Includes a transparent rectangular insulating substrate, for example, a back substrate 11 and a front substrate 12 each made of a glass plate having a thickness of 2.8 mm, and these substrates are arranged to face each other with a predetermined gap. The rear substrate 11 and the front substrate 12 are joined together at their peripheral edge portions by a sealing portion 13 to be described later to form a flat rectangular vacuum envelope 18.

【0016】背面基板11および前面基板12の間に
は、これら基板間の間隔を維持するため、それぞれ板状
あるいは柱状に形成された多数のスペーサ14が配置さ
れている。スペーサ14は、その両端がそれぞれ背面基
板11および前面基板12に当接することにより、これ
らの基板に作用する大気圧荷重を支持し、基板間の間隔
を1mm以上、例えば2.0mmに維持している。
Between the rear substrate 11 and the front substrate 12, a large number of spacers 14 each formed in a plate shape or a column shape are arranged in order to maintain the distance between these substrates. Both ends of the spacer 14 are brought into contact with the rear substrate 11 and the front substrate 12, respectively, to support the atmospheric pressure load acting on these substrates, and maintain the distance between the substrates at 1 mm or more, for example, 2.0 mm. There is.

【0017】前面基板12の内面には蛍光体スクリーン
16が形成されている。この蛍光体スクリーン16は、
赤、青、緑の蛍光体層、および黒色着色層を並べて構成
されている。これらの蛍光体層はストライプ状あるいは
ドット状に形成されている。また、蛍光体スクリーン1
6上には、アルミニウム等からなりアノード電極として
機能するメタルバック17が形成されている。また、背
面基板11の内面上には、電子源として、フィールドエ
ミッションにより電子を放出する複数の電子放出素子2
4、およびこれらの電子放出素子を駆動するための複数
の配線15が設けられている。
A phosphor screen 16 is formed on the inner surface of the front substrate 12. This phosphor screen 16 is
The red, blue, and green phosphor layers and the black coloring layer are arranged side by side. These phosphor layers are formed in stripes or dots. Also, the phosphor screen 1
A metal back 17 made of aluminum or the like and functioning as an anode electrode is formed on the metal plate 6. On the inner surface of the rear substrate 11, a plurality of electron-emitting devices 2 that emit electrons by field emission are used as electron sources.
4 and a plurality of wirings 15 for driving these electron-emitting devices.

【0018】封着部13は、導電性を有した矩形枠状の
接合部材20、接合部材と背面基板11および前面基板
12との間を封着した封着材22a、22bを有してい
る。接合部材20は、封着材22a、22bよりも高い
融点あるいは軟化点を有しているとともに、継ぎ目のな
い枠状の薄板をプレス成形により折曲げて形成されてい
る。
The sealing portion 13 has a conductive rectangular frame-shaped bonding member 20, and sealing materials 22a and 22b that seal the space between the bonding member and the rear substrate 11 and the front substrate 12. . The joining member 20 has a melting point or a softening point higher than that of the sealing materials 22a and 22b, and is formed by bending a seamless frame-shaped thin plate by press molding.

【0019】図2および図5に示すように、接合部材2
0は、背面基板11の内面とほぼ平行に対向した第1対
向部20a、前面基板12の内面とほぼ平行に対向した
第2対向部20b、および背面基板、前面基板と交差す
る方向に沿って第1および第2対向部間を延びた立ち上
がり部20cと、を一体に有し、その断面形状はクラン
ク状をなしている。接合部材20の厚さ、すなわち、背
面基板11および前面基板12の内面と直交する方向の
高さは、1mm以上に形成されている。
As shown in FIGS. 2 and 5, the joining member 2
0 indicates a first facing portion 20a facing substantially parallel to the inner surface of the rear substrate 11, a second facing portion 20b facing substantially parallel to the inner surface of the front substrate 12, and a rear substrate and a direction crossing the front substrate. The rising portion 20c extending between the first and second facing portions is integrally formed, and its cross-sectional shape is a crank shape. The thickness of the joining member 20, that is, the height in the direction orthogonal to the inner surfaces of the back substrate 11 and the front substrate 12 is formed to be 1 mm or more.

【0020】そして、第1対向部20aと背面基板11
との間は封着材22aにより、また、第2対向部20b
と前面基板12との間は封着材22bにより、それぞれ
封着されている。これにより、背面基板11および前面
基板12の周縁部は、封着部13を介して互いに気密に
接合されている。封着材22a、22bとしては、低融
点金属材料、例えば、インジウムが用いられている。な
お、図1に示すように、第1対向部20aの各コーナー
には、放射方向外方へ突出した後述の突出部21が一体
に設けられているまた、スペーサ14は柱状に形成され
ているが、これらのスペーサ14は矩形状の薄板部材2
6に固定されている。薄板部材26は、背面基板11と
前面基板12との間にほぼ平行に配置され、その周縁部
は固定台28を介して背面基板11の内面上に固定され
ている。また、薄板部材26には、電子放出素子24か
ら放出される電子ビームを遮蔽しないように、各電子放
出素子と対応する位置に電子ビーム通過孔30が形成さ
れている。なお、薄板部材26の外形寸法は、接合部材
20の内側寸法よりも小さく設定されている。
Then, the first facing portion 20a and the rear substrate 11
And the second facing portion 20b.
The front substrate 12 and the front substrate 12 are sealed by a sealing material 22b. Thereby, the peripheral portions of the rear substrate 11 and the front substrate 12 are airtightly joined to each other via the sealing portion 13. As the sealing materials 22a and 22b, a low melting point metal material, for example, indium is used. As shown in FIG. 1, each corner of the first facing portion 20a is integrally provided with a protrusion 21 to be described later that protrudes outward in the radial direction, and the spacer 14 is formed in a columnar shape. However, these spacers 14 are rectangular thin plate members 2
It is fixed at 6. The thin plate member 26 is arranged substantially in parallel between the back substrate 11 and the front substrate 12, and its peripheral edge portion is fixed on the inner surface of the back substrate 11 via a fixing base 28. Further, in the thin plate member 26, electron beam passage holes 30 are formed at positions corresponding to the electron emitting elements so as not to block the electron beams emitted from the electron emitting elements 24. The outer dimension of the thin plate member 26 is set smaller than the inner dimension of the joining member 20.

【0021】上記のように構成されたFEDでは、蛍光
体スクリーン16に所定のアノード電圧を印加した状態
で電子放出素子24を駆動し、電子放出素子から放出さ
れた電子ビームによって対応する蛍光体層を励起させ
る。これにより、蛍光体層が発光し所望の画像を表示す
る。
In the FED constructed as described above, the electron-emitting device 24 is driven while a predetermined anode voltage is applied to the phosphor screen 16, and the corresponding phosphor layer is generated by the electron beam emitted from the electron-emitting device. Excite. As a result, the phosphor layer emits light to display a desired image.

【0022】次に、以上のように構成されたFEDの製
造方法について説明する。まず、図3に示すように、前
面基板12および背面基板11とほぼ等しい熱膨張係数
を有したロール状の母材薄板32を連続的にエッチング
加工することで、薄板部材26の切り出し、電子ビーム
通過孔30の形成を行う。この際、接合部材20を成形
するための母材を、母材薄板32から同時に切出す。
Next, a method of manufacturing the FED configured as above will be described. First, as shown in FIG. 3, by continuously etching a roll-shaped base material thin plate 32 having a thermal expansion coefficient substantially equal to that of the front substrate 12 and the rear substrate 11, the thin plate member 26 is cut out and the electron beam is removed. The passage hole 30 is formed. At this time, the base material for forming the joining member 20 is cut out from the base material thin plate 32 at the same time.

【0023】詳細に述べると、まず、母材薄板32に薄
板部材26に対応する矩形状の切出し領域50を規定
し、この切出し領域の輪郭や電子ビーム通過孔の部分だ
けが露出するように母材薄板上にレジスト層を形成す
る。この状態で母材薄板32をエッチング加工し、薄板
部材26を形成する。この際、切出し領域50の外側
に、接合部材20を形成するための枠状の切出し領域5
2を規定し、この切出し領域52の輪郭のみが露出する
ように母材薄板32上にレジスト層を形成する。そし
て、母材薄板32をエッチングすることにより、接合部
材の成形に用いる枠状の母材54を薄板部材26と同時
に切出す。
More specifically, first, a rectangular cutout area 50 corresponding to the thin plate member 26 is defined in the base material thin plate 32, and the mother board is so exposed that only the contour of the cutout area and the electron beam passage hole portion are exposed. A resist layer is formed on the thin plate. In this state, the base material thin plate 32 is etched to form the thin plate member 26. At this time, the frame-shaped cut-out region 5 for forming the joining member 20 is provided outside the cut-out region 50.
2 is defined, and a resist layer is formed on the base material thin plate 32 so that only the contour of the cutout region 52 is exposed. Then, by etching the base material thin plate 32, the frame-shaped base material 54 used for forming the joining member is cut out at the same time as the thin plate member 26.

【0024】なお、枠状の切出し領域52の各コーナー
には、外方に突出した突出部21を形成する。これらの
突出部21は、接合部材20を搬送する際の把持部とし
て、および封着時の通電加熱用の端子として用いられ
る。
In addition, at each corner of the frame-shaped cutout region 52, a protruding portion 21 protruding outward is formed. These projecting portions 21 are used as a grip portion when the joining member 20 is conveyed and as a terminal for energization heating during sealing.

【0025】上記のように母材薄板32から切出された
薄板部材26は、予め用意した背面基板11上に固定台
28を介して固定される。また、同時に切出された母材
54を、図4に示すように、プレス型60a、60b間
に装着し、プレス成形する。これにより、図5に示す所
望形状の接合部材20が成形される。
The thin plate member 26 cut out from the base material thin plate 32 as described above is fixed on the rear substrate 11 prepared in advance via the fixing table 28. Further, the base material 54 cut out at the same time is mounted between the press dies 60a and 60b as shown in FIG. 4, and press-molded. As a result, the joining member 20 having the desired shape shown in FIG. 5 is molded.

【0026】続いて、接合部材20の第1および第2対
向部20a、20bの封着面に封着材22a、22bを
充填する。そして、この接合部材20、予め用意した背
面基板11、および前面基板12を真空槽内に投入し、
真空雰囲気中で所定の相対位置に位置合わせする。この
状態で、接合部材20に設けられた突出部21の内、対
向する2つの突出部21から電流を流して接合部材を発
熱させ、封着材22a、22bを溶融あるいは軟化させ
る。その後、接合部材20への通電を停止すると、封着
材22a、22bが速やかに冷却されて固化する。これ
により、接合部材20と背面基板11との間、および接
合部材と前面基板12との間が封着され、真空外囲器1
8が形成される。
Then, the sealing surfaces of the first and second facing portions 20a, 20b of the joining member 20 are filled with the sealing materials 22a, 22b. Then, the joining member 20, the back substrate 11 and the front substrate 12 prepared in advance are put into a vacuum chamber,
It is aligned at a predetermined relative position in a vacuum atmosphere. In this state, of the protrusions 21 provided on the joining member 20, current is passed from two opposing protrusions 21 to heat the joining member, and the sealing materials 22a and 22b are melted or softened. After that, when the energization of the joining member 20 is stopped, the sealing materials 22a and 22b are rapidly cooled and solidified. As a result, the space between the bonding member 20 and the rear substrate 11 and the space between the bonding member and the front substrate 12 are sealed, and the vacuum envelope 1
8 is formed.

【0027】(実施例)上述した実施の形態と同様に、
厚さ2.8mmのガラス板からなる背面基板11および
前面基板12を用意し、背面基板上に電子放出素子2
4、配線15等を形成する。また、前面基板12の内面
上に蛍光体スクリーン16およびメタルバック17を形
成する。
(Example) Similar to the above-described embodiment,
A rear substrate 11 and a front substrate 12 made of a glass plate having a thickness of 2.8 mm are prepared, and the electron-emitting device 2 is formed on the rear substrate.
4, wiring 15 and the like are formed. Further, the phosphor screen 16 and the metal back 17 are formed on the inner surface of the front substrate 12.

【0028】接合部材20および薄板部材26には、厚
さ0.25mmの鉄−ニッケル合金を用い、その熱膨張
係数を背面基板および前面基板とほぼ同一とする。封着
材22a、22bには、約150℃で溶融するインジウ
ムを用いる。
An iron-nickel alloy having a thickness of 0.25 mm is used for the joining member 20 and the thin plate member 26, and the thermal expansion coefficients thereof are almost the same as those of the back substrate and the front substrate. Indium that melts at about 150 ° C. is used for the sealing materials 22a and 22b.

【0029】接合部材20用の母材54は、薄板部材2
6と同じロール状の母材薄板32からエッチング加工に
より、幅10mmの枠状一体物として切出す。この母材
54をプレス加工して所定形状に折曲げ成形し、接合部
材20を得る。このため、継ぎ目などが無く、気密性に
優れた接合部材20が得られる。また、プレス加工によ
り接合部材を任意の厚さに成形でき、側壁部材の代用が
可能となる。
The base material 54 for the joining member 20 is the thin plate member 2
The same roll-shaped base material thin plate 32 as 6 is cut into a frame-shaped integral body having a width of 10 mm by etching. The base material 54 is pressed and bent into a predetermined shape to obtain the joining member 20. Therefore, the joint member 20 having no seam and excellent in airtightness can be obtained. Further, the joining member can be formed into an arbitrary thickness by press working, and the side wall member can be substituted.

【0030】ここで、母材54は枠状一体物として切出
しているが、枠の内側領域はスクラップになるわけでは
なく、薄板部材26として活用しているため、母材薄板
32を効率良く利用することができる。
Here, the base material 54 is cut out as a frame-shaped integrated body, but the inner region of the frame is not scrapped and is utilized as the thin plate member 26, so the base material thin plate 32 is efficiently used. can do.

【0031】こうして成形された接合部材20の第1お
よび第2対向部20a、20bの封着面に封着材22
a、22bとしてインジウムをそれぞれ厚さ0.3mm
に充填する。次に、真空槽内の真空雰囲気中で、接合部
材20、前面基板12、および背面基板11を100℃
の温度で所定の位置に位置合わせする。そして、突出部
21から接合部材20に150Aの電流を40秒間通電
し、インジウムを180℃まで加熱して溶融させた後、
通電を停止する。通電を止めて150秒後には、インジ
ウムが120℃まで冷却されて固化し、真空外囲器18
が完成する。
The sealing material 22 is attached to the sealing surfaces of the first and second facing portions 20a and 20b of the joint member 20 thus molded.
Indium as a and 22b each has a thickness of 0.3 mm
To fill. Next, the bonding member 20, the front substrate 12, and the rear substrate 11 are heated to 100 ° C. in a vacuum atmosphere in a vacuum chamber.
Align in place at the temperature of. Then, a current of 150 A is applied from the protruding portion 21 to the joining member 20 for 40 seconds to heat indium to 180 ° C. to melt it,
Stop energizing. 150 seconds after stopping the power supply, the indium was cooled to 120 ° C. and solidified, and the vacuum envelope 18
Is completed.

【0032】以上のように構成されたFEDおよびその
製造方法によれば、真空外囲器18を形成する際、封着
部13のみを局所的に加熱し周囲への伝熱により速やか
に冷却させるため、前面基板および背面基板の熱膨張が
ほとんど無く、短時間に、かつ、高い位置精度を維持し
て封着処理することができる。また、接合部材は、継ぎ
目の無い一体物の枠状薄板をプレス加工して形成されて
いるため、この接合部材を用いて封着することにより、
気密性の高い真空外囲器を得ることができ、同時に、製
造コストの低減を図ることができる。特に、真空外囲器
内部に薄板部材26を用いた構造の場合、共通の母材か
ら接合部材用の枠状母材および薄板部材を同時に切出す
ことで、材料を無駄なく使用し、材料コスト軽減を図る
ことが可能となる。
According to the FED and the manufacturing method thereof having the above-described structure, when the vacuum envelope 18 is formed, only the sealing portion 13 is locally heated and quickly cooled by heat transfer to the surroundings. Therefore, there is almost no thermal expansion of the front substrate and the rear substrate, and the sealing process can be performed in a short time while maintaining high positional accuracy. Further, since the joining member is formed by pressing a frame-shaped thin plate of a seamless single body, by sealing using this joining member,
A vacuum envelope having high airtightness can be obtained, and at the same time, manufacturing cost can be reduced. In particular, in the case of the structure in which the thin plate member 26 is used inside the vacuum envelope, the frame-shaped base material for the joining member and the thin plate member are simultaneously cut out from the common base material, so that the material is used without waste and the material cost It is possible to reduce it.

【0033】なお、この発明は上述した実施の形態に限
定されることなく、この発明の範囲内で種々変形可能で
ある。例えば、接合部材は、上述したクランク状の断面
形状に限らず、図6に示すような断面形状に形成しても
よい。図6(a)に示す接合部材20は、1つの第1対
向部20aと、それぞれ立ち上がり部20cを介して第
1対向部の両側に連続した一対の第2対向部20bと、
を一体に備えている。また、図6(b)に示す接合部材
20は、立ち上がり部20cを介して連続した第1およ
び第2対向部20a、20bに加えて、第1および第2
対向部からそれぞれ延びた他の立ち上がり部20cを一
体に備えている。このような接合部材20を用いた場合
でも、上述した実施の形態と同様の作用効果を得ること
ができる。
The present invention is not limited to the above-described embodiments, but can be variously modified within the scope of the present invention. For example, the joining member is not limited to the crank-shaped cross-sectional shape described above, but may be formed in the cross-sectional shape as shown in FIG. The joining member 20 illustrated in FIG. 6A includes one first facing portion 20a, and a pair of second facing portions 20b that are continuous on both sides of the first facing portion via the rising portions 20c.
It is equipped with. In addition, the joining member 20 shown in FIG. 6B includes the first and second opposing portions 20a and 20b which are continuous via the rising portion 20c, and the first and second opposing portions 20a and 20b.
Another rising portion 20c extending from the facing portion is integrally provided. Even when such a joining member 20 is used, it is possible to obtain the same effects as those of the above-described embodiment.

【0034】また、製造工程において、封着材22a、
22bは、接合部材20ではなく、前面基板12および
背面基板11側に充填してもよく、あるいは、接合部材
と基板との両者に充填してもよい。更に、適当な下地を
介して封着材を充填してもよい。母材から薄板部材およ
び枠状の薄板を切出す方法は、エッチングに限らず他の
方法を用いてもよい。
In the manufacturing process, the sealing material 22a,
22b may be filled in the front substrate 12 and the rear substrate 11 side instead of the joining member 20, or may be filled in both the joining member and the substrate. Furthermore, the sealing material may be filled through a suitable base. The method of cutting the thin plate member and the frame-shaped thin plate from the base material is not limited to etching, and another method may be used.

【0035】接合部材は、導電性を有しその融点あるい
は軟化点が封着材よりも高ければよく、接合部材と封着
材の組合わせは、鉄−ニッケル合金とインジウムに限ら
ず、必要に応じて種々選択可能である。更に、この発明
は、FEDやSEDなどの真空外囲器を必要とする平面
型表示装置に限るものではなく、PDPのように一度真
空にしてから放電ガスを注入するような他の平面型表示
装置にも有効である。
It is sufficient that the joining member has conductivity and its melting point or softening point is higher than that of the sealing material. The combination of the joining member and the sealing material is not limited to the iron-nickel alloy and indium, and may be necessary. Various selections can be made according to this. Further, the present invention is not limited to a flat panel display device that requires a vacuum envelope such as an FED or SED, but other flat panel display devices such as a PDP in which a discharge gas is injected after a vacuum is made. It is also effective for devices.

【0036】[0036]

【発明の効果】以上に述べたように、この発明によれ
ば、真空雰囲気中で容易に、かつ低コストで封着を行う
ことが可能な平面型表示装置、およびその製造方法を提
供することができる。
As described above, according to the present invention, it is possible to provide a flat-panel display device which can be easily sealed in a vacuum atmosphere at low cost, and a manufacturing method thereof. You can

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の実施の形態に係る平面型表示装置を
示す斜視図。
FIG. 1 is a perspective view showing a flat-panel display device according to an embodiment of the present invention.

【図2】図1の線A−Aに沿った上記平面型表示装置の
断面図。
FIG. 2 is a cross-sectional view of the flat display device taken along line AA of FIG.

【図3】上記平面型表示装置における接合部材および薄
板部材の母材加工を示す平面図。
FIG. 3 is a plan view showing the base material processing of the joining member and the thin plate member in the flat display device.

【図4】上記接合部材のプレス加工を示す断面図。FIG. 4 is a cross-sectional view showing press working of the joining member.

【図5】プレス加工された接合部材を示す斜視図。FIG. 5 is a perspective view showing a press-bonded joining member.

【図6】上記接合部材の変形例をそれぞれ示す斜視図。FIG. 6 is a perspective view showing a modification of each of the joining members.

【符号の説明】[Explanation of symbols]

11…背面基板 12…前面基板 13…封着部 14…スペーサ 15a、15b…封着層 16…蛍光体スクリーン 17…メタルバック層 18…真空外囲器 20…接合部材 20a…第1対向部 20b…第2対向部 20c…立ち上げ部 22a、22b…封着材、 24…電子放出素子 26…薄板部材 11 ... Rear substrate 12 ... Front substrate 13 ... Sealing part 14 ... Spacer 15a, 15b ... Sealing layer 16 ... Phosphor screen 17 ... Metal back layer 18 ... Vacuum envelope 20 ... Joining member 20a ... 1st facing part 20b ... Second opposing portion 20c ... Startup section 22a, 22b ... sealing material, 24 ... Electron emitting device 26 ... Thin plate member

フロントページの続き (72)発明者 榎本 貴志 埼玉県深谷市幡羅町一丁目9番地2 株式 会社東芝深谷工場内 (72)発明者 西村 孝司 埼玉県深谷市幡羅町一丁目9番地2 株式 会社東芝深谷工場内 Fターム(参考) 5C012 AA05 BC03 5C032 AA01 BB16 BB18 5C036 EE14 EF01 EF06 EG02 EG05 EG06 EG15 EH05 EH11 Continued front page    (72) Inventor Takashi Enomoto             2 shares, 1-9-1 Harara-cho, Fukaya City, Saitama Prefecture             Company Toshiba Fukaya Factory (72) Inventor Koji Nishimura             2 shares, 1-9-1 Harara-cho, Fukaya City, Saitama Prefecture             Company Toshiba Fukaya Factory F-term (reference) 5C012 AA05 BC03                 5C032 AA01 BB16 BB18                 5C036 EE14 EF01 EF06 EG02 EG05                       EG06 EG15 EH05 EH11

Claims (10)

【特許請求の範囲】[Claims] 【請求項1】対向配置された前面基板および背面基板
と、上記前面基板および背面基板の周辺部を互いに封着
した封着部と、を有した外囲器を備え、 上記封着部は、継ぎ目のない枠状の薄板からプレス成形
された枠状の接合部材と、上記前面基板および背面基板
と上記接合部材との間を封着した封着材とを含み、上記
接合部材は、導電性を有しているとともに、上記封着材
よりも高い融点あるいは軟化点を有していることを特徴
とする平面型表示装置。
1. An envelope having a front substrate and a rear substrate that are arranged to face each other, and a sealing portion that seals the peripheral portions of the front substrate and the rear substrate to each other, the sealing portion comprising: A frame-shaped joining member that is press-formed from a seamless frame-shaped thin plate, and a sealing material that seals between the front substrate and the back substrate and the joining member, and the joining member is conductive. And a melting point or softening point higher than that of the sealing material.
【請求項2】上記接合部材は、上記前面基板および背面
基板とそれぞれほぼ平行に対向しているとともに上記封
着材を介して封着された第1および第2対向部と、上記
前面基板および対向基板と交差する方向に沿って上記第
1および第2対向部の間を延びた立ち上がり部と、を一
体に有していることを特徴とする請求項1に記載の平面
型表示装置。
2. The joining member faces the front substrate and the back substrate substantially in parallel, and has first and second facing portions sealed by the sealing material, the front substrate and 2. The flat-panel display device according to claim 1, further comprising a rising portion that integrally extends between the first and second facing portions along a direction intersecting with the facing substrate.
【請求項3】上記前面基板と背面基板の隙間は1mm以
上あることを特徴とする請求項1又は2に記載の平面型
表示装置。
3. The flat panel display device according to claim 1, wherein a gap between the front substrate and the rear substrate is 1 mm or more.
【請求項4】上記接合部材は、厚さ1mm未満の薄板か
らプレス成形され、上記前面基板および背面基板と直行
する方向の高さが1mm以上に成形されていることを特
徴とする請求項1ないし3のいずれか1項に記載の平面
型表示装置。
4. The joining member is press-formed from a thin plate having a thickness of less than 1 mm, and has a height of 1 mm or more in a direction perpendicular to the front substrate and the rear substrate. 4. The flat panel display device according to any one of items 1 to 3.
【請求項5】上記外囲器内で上記前面基板および背面基
板に対向して、薄板部材が設けられ、この薄板部材は、
上記接合部材の内側寸法よりも小さな外形寸法を有して
いることを特徴とする請求項1に記載の記載の平面型表
示装置。
5. A thin plate member is provided in the envelope so as to face the front substrate and the rear substrate, and the thin plate member comprises:
The flat panel display device according to claim 1, wherein the flat panel display device has an outer dimension smaller than an inner dimension of the joining member.
【請求項6】上記接合部材は、封着部よりも外側に突出
し通電端子を形成した複数の突出部を一体に有している
ことを特徴とする請求項1ないし5のいずれか1項に記
載の平面型表示装置。
6. The joint member according to claim 1, wherein the joint member integrally has a plurality of projecting portions projecting outward from the sealing portion and forming current-carrying terminals. The flat-panel display device described.
【請求項7】上記突出部は、上記接合部材の4隅からそ
れぞれ突出していることを特徴とする請求項6に記載の
平面型表示装置。
7. The flat-panel display device according to claim 6, wherein the protrusions protrude from four corners of the joining member, respectively.
【請求項8】上記前面基板の内面上に形成された蛍光体
スクリーンと、上記背面基板上に設けられ、上記蛍光体
スクリーンに向けて電子ビームを放出する複数の電子源
と、上記前面基板と背面基板との間に設けられ、これら
前面基板および背面基板間の間隔を維持した複数のスペ
ーサと、を備えていることを特徴とする請求項1ないし
7のいずれか1項に記載の平面型表示装置。
8. A phosphor screen formed on the inner surface of the front substrate, a plurality of electron sources provided on the back substrate for emitting electron beams toward the phosphor screen, and the front substrate. 8. The flat mold according to claim 1, further comprising a plurality of spacers provided between the back substrate and the front substrate and maintaining a distance between the front substrate and the back substrate. Display device.
【請求項9】対向配置された前面基板および背面基板
と、上記前面基板および背面基板の周辺部を互いに封着
した封着部と、を有する外囲器を備えた平面型表示装置
の製造方法において、 導電性を有しているとともに、上記封着材よりも高い融
点あるいは軟化点を有した継ぎ目のない枠状の薄板を用
意し、 上記枠状の薄板からプレス成形により枠状の接合部材を
形成し、 上記前面基板および背面基板と上記接合部材との間に封
着材を充填し、 上記封着材が充填された上記前面基板、背面基板および
接合部材を所定の位置に位置合わせして真空雰囲気中に
配置し、 上記真空雰囲気中で上記接合部材に通電して接合部材お
よび封着材を加熱し、 上記封着材が溶融した後、通電を停止して上記封着材を
冷却し、上記前面基板および背面基板と上記接合部材と
を封着することを特徴とする平面型表示装置の製造方
法。
9. A method of manufacturing a flat-panel display device, comprising an envelope having a front substrate and a rear substrate which are arranged opposite to each other, and a sealing portion which seals the peripheral portions of the front substrate and the rear substrate to each other. In, a seamless frame-shaped thin plate having conductivity and a melting point or softening point higher than that of the sealing material is prepared, and the frame-shaped joining member is press-formed from the frame-shaped thin plate. And filling a sealing material between the front substrate and the rear substrate and the bonding member, and aligning the front substrate, the rear substrate and the bonding member filled with the sealing material at predetermined positions. The bonding member and the sealing material are heated in the vacuum atmosphere by heating the bonding member and the sealing material, and after the sealing material is melted, the energization is stopped to cool the sealing material. And above the front substrate and back substrate Method of manufacturing a flat-panel display is characterized in that to seal the joint member.
【請求項10】母材薄板から、上記接合部材を成形する
ための上記枠状の薄板と、第1の薄板の内側に位置した
矩形状の薄板部材と、を同時に切出し、 上記切出された枠状の薄板からプレス成形により上記接
合部材を形成した後、 上記切出され薄板部材を上記前面基板と背面基板との間
に配置した状態で、上記接合部材を封着することを特徴
とする請求項9に記載の平面型表示装置の製造方法。
10. The frame-shaped thin plate for molding the joining member and the rectangular thin-plate member located inside the first thin plate are simultaneously cut out from the base metal thin plate, and the cut-out is performed. The joining member is formed by pressing from a frame-shaped thin plate, and then the joining member is sealed in a state where the cut-out thin plate member is arranged between the front substrate and the back substrate. The method for manufacturing the flat panel display device according to claim 9.
JP2002038844A 2002-02-15 2002-02-15 Flat display device and manufacturing method of the same Pending JP2003242913A (en)

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Application Number Priority Date Filing Date Title
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Publications (1)

Publication Number Publication Date
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Country Link
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005083737A1 (en) * 2004-03-02 2005-09-09 Kabushiki Kaisha Toshiba Production method and production device for image display unit
JP2009181840A (en) * 2008-01-31 2009-08-13 Sony Corp Flat display device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005083737A1 (en) * 2004-03-02 2005-09-09 Kabushiki Kaisha Toshiba Production method and production device for image display unit
US7303457B2 (en) 2004-03-02 2007-12-04 Kabushiki Kaisha Toshiba Method of bonding display substrates by application of an electric current to heat and melt a bonding material
JP2009181840A (en) * 2008-01-31 2009-08-13 Sony Corp Flat display device

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