JP2002319346A - Display device and its manufacturing method - Google Patents

Display device and its manufacturing method

Info

Publication number
JP2002319346A
JP2002319346A JP2001124685A JP2001124685A JP2002319346A JP 2002319346 A JP2002319346 A JP 2002319346A JP 2001124685 A JP2001124685 A JP 2001124685A JP 2001124685 A JP2001124685 A JP 2001124685A JP 2002319346 A JP2002319346 A JP 2002319346A
Authority
JP
Japan
Prior art keywords
sealing member
display device
sealing
envelope
front substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001124685A
Other languages
Japanese (ja)
Inventor
Masahiro Yokota
昌広 横田
Takashi Enomoto
貴志 榎本
Koji Nishimura
孝司 西村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP2001124685A priority Critical patent/JP2002319346A/en
Priority to EP02720557A priority patent/EP1389792A1/en
Priority to CNB028103106A priority patent/CN1306538C/en
Priority to KR10-2003-7013784A priority patent/KR20040015114A/en
Priority to PCT/JP2002/003994 priority patent/WO2002089169A1/en
Publication of JP2002319346A publication Critical patent/JP2002319346A/en
Priority to US10/690,744 priority patent/US7247072B2/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide a display device and its manufacturing method capable of remarkably reducing hours and facilities required for sealing in assembling an envelope in vacuum and of improving sealing accuracy. SOLUTION: This display device is provided with the envelope having a front substrate 11 and a back substrate 12 oppositely disposed with peripheral edge parts sealed. The sealed part has conductivity and is sealed by sealing members 21a and 21b melted by carrying a current. In the sealing process, after the sealing members are melted by carrying the current to the sealing members attached to the sealed part, the sealed part is sealed by stopping the current-carrying to cool and solidify the sealing members.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は平坦な形状の表示
装置に係り、特に、真空の外囲器内部に多数の電子放出
素子を設けた表示装置およびその製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat display device, and more particularly, to a display device having a large number of electron-emitting devices inside a vacuum envelope and a method of manufacturing the same.

【0002】[0002]

【従来の技術】近年、陰極線管(以下、CRTと称す
る)に代わる次世代の軽量、薄型の表示装置として様々
な平面型表示装置が開発されている。このような平面型
表示装置には、液晶の配向を利用して光の強弱を制御す
る液晶ディスプレイ(以下、LCDと称する)、プラズ
マ放電の紫外線により蛍光体を発光させるプラズマディ
スプレイパネル(以下、PDPと称する)、電界放出型
電子放出素子の電子ビームにより蛍光体を発光させるフ
ィールドエミッションディスプレイ(以下、FEDと称
する)、表面伝導型電子放出素子の電子ビームにより蛍
光体を発光させる表面伝導電子放出ディスプレイ(以
下、SEDと称する)などがある。
2. Description of the Related Art In recent years, various flat display devices have been developed as next-generation light-weight and thin display devices replacing cathode ray tubes (hereinafter referred to as CRTs). Such flat display devices include a liquid crystal display (hereinafter, referred to as LCD) that controls the intensity of light using the orientation of liquid crystal, and a plasma display panel (hereinafter, PDP) that emits a fluorescent material by ultraviolet rays of plasma discharge. ), A field emission display (hereinafter referred to as FED) in which a phosphor is emitted by an electron beam of a field emission type electron emission element, and a surface conduction electron emission display in which a phosphor is emitted by an electron beam of a surface conduction type electron emission element. (Hereinafter, referred to as SED).

【0003】例えばFEDやSEDでは、一般に、所定
の隙間を置いて対向配置された前面基板および背面基板
を有し、これらの基板は、矩形枠状の側壁を介して周辺
部同士を互いに接合することにより真空の外囲器を構成
している。前面基板の内面には蛍光体スクリーンが形成
され、背面基板の内面には蛍光体を励起して発光させる
電子放出源として多数の電子放出素子(以下、エミッタ
と称する)が設けられている。また、背面基板および前
面基板に加わる大気圧荷重を支えるために、これら基板
の間には複数の支持部材が配設されている。背面基板側
の電位はほぼアース電位であり、蛍光体スクリーンには
アノード電圧Vaが印加される。そして、蛍光体スクリ
ーンを構成する赤、緑、青の蛍光体にエミッタから放出
された電子ビームを照射し、蛍光体を発光させることに
よって画像を表示する。
[0003] For example, an FED or SED generally has a front substrate and a rear substrate which are opposed to each other with a predetermined gap therebetween, and these substrates are joined to each other at their peripheral portions via a rectangular frame-like side wall. This constitutes a vacuum envelope. A phosphor screen is formed on the inner surface of the front substrate, and a number of electron-emitting devices (hereinafter, referred to as emitters) are provided on the inner surface of the rear substrate as electron emission sources for exciting the phosphor to emit light. Further, in order to support the atmospheric pressure load applied to the rear substrate and the front substrate, a plurality of support members are disposed between these substrates. The potential on the rear substrate side is almost the ground potential, and the anode voltage Va is applied to the phosphor screen. Then, an image is displayed by irradiating the red, green, and blue phosphors constituting the phosphor screen with an electron beam emitted from the emitter to cause the phosphors to emit light.

【0004】このようなFEDやSEDでは、表示装置
の厚さを数mm程度にまで薄くすることができ、現在の
テレビやコンピュータのディスプレイとして使用されて
いるCRTと比較して、軽量化、薄型化を達成すること
ができる。
[0004] In such an FED or SED, the thickness of the display device can be reduced to about several mm, and it is lighter and thinner than a CRT currently used as a display of a television or a computer. Can be achieved.

【0005】[0005]

【発明が解決しようとする課題】上記のようなFEDや
SEDでは、外囲器の内部を高真空にすることが必要と
なる。また、PDPにおいても一度真空にしてから放電
ガスを充填する必要がある。
In the above-mentioned FED and SED, it is necessary to make the inside of the envelope high vacuum. Also, in the case of a PDP, it is necessary to fill the discharge gas with a vacuum once.

【0006】外囲器を真空にする手段としては、まず外
囲器の構成部材である前面基板、背面基板および側壁を
適当な封着材料により大気中で加熱して接合し、その
後、前面基板または背面基板に設けた排気管を通して内
部を排気した後、排気管を真空封止する方法がある。し
かし、平面型の外囲器の場合、排気管を介した排気では
速度が極めて遅く、到達できる真空度も低い。そのた
め、量産性および特性面に問題があった。
As means for evacuating the envelope, first, the front substrate, the rear substrate, and the side walls, which are the constituent members of the envelope, are joined by heating in an atmosphere with a suitable sealing material, and then the front substrate is bonded. Alternatively, there is a method of evacuating the inside through an exhaust pipe provided on the rear substrate and then vacuum-sealing the exhaust pipe. However, in the case of a flat type envelope, the speed of exhausting through an exhaust pipe is extremely low, and the achievable vacuum degree is also low. Therefore, there were problems in terms of mass productivity and characteristics.

【0007】また、他の方法として、外囲器を構成する
前面基板および背面基板の最終組立を真空槽内で行う方
法が考えられる。この方法では、始めに真空槽内に持ち
込まれた前面基板および背面基板を十分に加熱してお
く。これは、外囲器真空度を劣化させる主因となってい
る外囲器内壁からのガス放出を軽減するためである。次
に、前面基板および背面基板が冷えて真空槽内の真空度
が十分に向上した時点で、外囲器真空度を改善、維持さ
せるためのゲッター膜を蛍光面スクリーン上に形成す
る。その後、封着材料が溶解する温度まで前面基板およ
び背面基板を再び加熱し、前面基板と背面基板とを所定
の位置に組み合わせた状態で封着材料が固化するまで冷
却する。
As another method, there is a method in which the final assembly of the front substrate and the rear substrate constituting the envelope is performed in a vacuum chamber. In this method, the front substrate and the rear substrate brought into the vacuum chamber are heated sufficiently. This is to reduce the gas emission from the inner wall of the envelope, which is a main cause of deteriorating the degree of vacuum of the envelope. Next, when the front substrate and the rear substrate are cooled and the degree of vacuum in the vacuum chamber is sufficiently improved, a getter film for improving and maintaining the degree of vacuum of the envelope is formed on the phosphor screen. Thereafter, the front substrate and the rear substrate are heated again to a temperature at which the sealing material dissolves, and the front substrate and the rear substrate are combined with each other at a predetermined position and cooled until the sealing material is solidified.

【0008】このような方法で作成された真空外囲器
は、封着工程と真空封止工程とを兼ねるうえ、排気管の
排気に伴なう多大な時間が要らず、かつ、極めて良好な
真空度を得ることができる。
[0008] The vacuum envelope produced by such a method serves not only as a sealing step but also as a vacuum sealing step, does not require much time associated with exhausting the exhaust pipe, and is extremely good. A degree of vacuum can be obtained.

【0009】しかしながら、このような真空中で組立を
行う場合、封着工程で行なう処理が、加熱、位置合わ
せ、冷却と多岐に渡り、かつ、封着材料が溶解固化する
長い時間に渡って前面基板と背面基板とを所定の位置に
維持し続けなければならない。また、封着時の加熱冷却
に伴い前面基板および背面基板が熱膨張して位置合わせ
精度が劣化し易いことなど、封着に伴なう生産性、特性
面で問題がある。
However, in the case of assembling in such a vacuum, the processing performed in the sealing step includes heating, positioning, and cooling, and the sealing material melts and solidifies for a long time. The substrate and the back substrate must be kept in place. In addition, there is a problem in productivity and characteristics associated with sealing, such as that the front substrate and the rear substrate are thermally expanded due to heating and cooling at the time of sealing, and the alignment accuracy is likely to deteriorate.

【0010】この発明は、以上の点に鑑みなされたもの
で、その目的は、真空中で外囲器を組立てる場合に封着
に掛かる時間と設備を大幅に低減し、封着精度を向上さ
せることが可能な表示装置およびその製造方法を提供す
ることにある。
The present invention has been made in view of the above points, and has as its object to greatly reduce the time and equipment required for sealing when assembling an envelope in a vacuum, and to improve sealing accuracy. And a method of manufacturing the same.

【0011】[0011]

【課題を解決するための手段】上記目的を達成するた
め、この発明に係る表示装置およびその製造方法は、対
向配置されているとともに周縁部が封着された前面基板
および背面基板を有する外囲器を備え、上記前面基板と
背面基板との間に位置した封着部は、導電性を有してい
るとともに通電することにより融解する封着部材によっ
て封着されていることを特徴としている。すなわち、封
着部分に設けられた封着部材に通電することで、封着部
材を溶解し封着することを特徴としている。
In order to achieve the above object, a display device and a method of manufacturing the same according to the present invention provide an outer enclosure having a front substrate and a rear substrate which are opposed to each other and whose peripheral edges are sealed. And a sealing portion located between the front substrate and the rear substrate, wherein the sealing portion has conductivity and is sealed by a sealing member which is melted by energization. That is, by applying a current to the sealing member provided at the sealing portion, the sealing member is melted and sealed.

【0012】上記のように構成された表示装置およびそ
の製造方法によれば、導電性を有した封材部材に流れる
電流から生じる熱により主に封着部材のみが加熱溶融さ
れる。そして、封着部材を溶融した直後に電流供給を止
めることで、封着部材はその熱が速やかに前面基板およ
び背面基板に拡散伝導され、冷却固化する。これによ
り、封着工程において、前面基板および背面基板の全体
を加熱するための加熱装置が不要となり、更に、封着工
程に掛かる時間を大幅に短縮することができる。また、
前面基板および背面基板の熱膨張が極めて小さくなり、
これらを封着する際、位置精度劣化を改善することがで
きる。
According to the display device and the method of manufacturing the same as described above, only the sealing member is mainly heated and melted by the heat generated by the current flowing through the conductive sealing member. Then, by stopping the current supply immediately after the sealing member is melted, the heat of the sealing member is quickly diffused and transmitted to the front substrate and the rear substrate and solidified by cooling. This eliminates the need for a heating device for heating the entire front substrate and the rear substrate in the sealing step, and further significantly reduces the time required for the sealing step. Also,
The thermal expansion of the front substrate and the rear substrate is extremely small,
When these are sealed, the deterioration of positional accuracy can be improved.

【0013】[0013]

【発明の実施の形態】以下、図面を参照しながら、本発
明の表示装置をFEDに適用した実施の形態について詳
細に説明する。図1ないし図3に示すように、このFE
Dは、絶縁基板としてそれぞれ矩形状のガラスからなる
前面基板11、および背面基板12を備え、これらの基
板は1〜2mmの隙間を置いて対向配置されている。そ
して、前面基板11および背面基板12は、矩形枠状の
側壁13を介して周縁部同士が接合され、内部が真空状
態に維持された偏平な矩形状の真空外囲器10を構成し
ている。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, an embodiment in which a display device of the present invention is applied to an FED will be described in detail with reference to the drawings. As shown in FIGS. 1 to 3, this FE
D includes a front substrate 11 and a rear substrate 12 each made of rectangular glass as an insulating substrate, and these substrates are opposed to each other with a gap of 1 to 2 mm. The front substrate 11 and the rear substrate 12 are joined to each other via a rectangular frame-shaped side wall 13 to form a flat rectangular vacuum envelope 10 in which the inside is maintained in a vacuum state. .

【0014】本実施の形態において、前面基板11と側
壁13とは後述する導電性を有した封着部材21a、2
1bにより接合され、背面基板12と側壁13とはフリ
ットガラス等の低融点封着部材40により接合されてい
る。
In the present embodiment, the front substrate 11 and the side wall 13 are made of a conductive sealing member 21a,
1b, the back substrate 12 and the side wall 13 are joined by a low melting point sealing member 40 such as frit glass.

【0015】真空外囲器10の内部には、前面基板11
および背面基板12に加わる大気圧荷重を支えるため、
複数の板状のスペーサ14が設けられている。これらの
スペーサ14は、真空外囲器10の長辺と平行な方向に
配置されているとともに、短辺と平行な方向に沿って所
定の間隔を置いて配置されている。なお、スペーサ14
の形状については、特にこれに限定されるものではな
く、例えば、柱状のスペーサ等を用いることもできる。
Inside the vacuum envelope 10, a front substrate 11 is provided.
And to support the atmospheric pressure load applied to the rear substrate 12,
A plurality of plate-shaped spacers 14 are provided. These spacers 14 are arranged in a direction parallel to the long side of the vacuum envelope 10 and at predetermined intervals along a direction parallel to the short side. The spacer 14
Is not particularly limited, and for example, a columnar spacer or the like can be used.

【0016】前面基板11の内面上には、図4に示すよ
うな赤、緑、青の蛍光体層16とマトリクス状の黒色光
吸収層17とを有した蛍光体スクリーン15が形成さ
れ、この蛍光体スクリーン上にメタルバックとしてアル
ミニウム膜(図示せず)が蒸着されている。
On the inner surface of the front substrate 11, a phosphor screen 15 having a red, green, and blue phosphor layer 16 and a matrix-like black light absorbing layer 17 as shown in FIG. 4 is formed. An aluminum film (not shown) is deposited as a metal back on the phosphor screen.

【0017】背面基板12の内面上には、蛍光体層16
を励起する電子放出源として多数の電子放出素子18が
設けられている。電子放出素子18は、それぞれの蛍光
体層16と対向する位置に配置され、対応する蛍光体層
に向けて電子ビームを放出する。
On the inner surface of the back substrate 12, a phosphor layer 16
Many electron-emitting devices 18 are provided as electron-emitting sources for exciting the electrons. The electron-emitting devices 18 are arranged at positions facing the respective phosphor layers 16 and emit electron beams toward the corresponding phosphor layers.

【0018】次に、上記のように構成されたFEDの製
造方法について説明する。図5および図6に示すよう
に、組み立て前の状態において、前面基板11の内面に
は蛍光体スクリーン15が形成されている。また、前面
基板11の内面上において蛍光体スクリーン15の外側
には、封着部材21aとして導電性を持つ金属はんだが
矩形枠状に充填され、前面基板11の周縁に沿って配置
されている。封着部材21aの対角の2個所には、封着
時に封着部材へ通電するための電極部22a、22bが
外側に突出して形成されている。
Next, a method of manufacturing the FED configured as described above will be described. As shown in FIGS. 5 and 6, the phosphor screen 15 is formed on the inner surface of the front substrate 11 before the assembly. Further, on the inner surface of the front substrate 11, a metal solder having conductivity is filled in a rectangular frame shape as a sealing member 21 a outside the phosphor screen 15, and is disposed along the periphery of the front substrate 11. Electrodes 22a and 22b for energizing the sealing member at the time of sealing are formed to protrude outward at two opposite corners of the sealing member 21a.

【0019】なお、各電極部22a、22bの断面積
は、封着部材21の他の部分の断面積よりも大きく形成
されている。
The cross-sectional area of each of the electrode portions 22a and 22b is formed larger than the cross-sectional area of other portions of the sealing member 21.

【0020】一方、背面基板12の内面上には、多数の
電子放出素子18が予め形成されているとともに、組立
時に前面基板11との隙間を確保するため、側壁13お
よびスペーサ14が低融点封着部材40により取り付け
られている。また、側壁13上には、封着部材21bと
して導電性を持つ金属はんだが前面基板11側の封着部
材21aと対向する位置に矩形枠状に充填されている。
On the other hand, a large number of electron-emitting devices 18 are previously formed on the inner surface of the rear substrate 12, and the side walls 13 and the spacers 14 are sealed with a low melting point to secure a gap with the front substrate 11 during assembly. The attachment member 40 is attached. On the side wall 13, a metal solder having conductivity as the sealing member 21b is filled in a rectangular frame shape at a position facing the sealing member 21a on the front substrate 11 side.

【0021】上記のような前面基板11および背面基板
12は、図7に示す工程に沿って真空槽中で組立てられ
る。すなわち、まず、前面基板11および背面基板12
を真空槽に導入し、この真空層内を真空排気した後、加
熱により前面基板11および背面基板12を十分に脱ガ
スする。加熱温度は200℃〜500℃程度に適時設定
される。これは、真空外囲器となった後の真空度を劣化
させる内壁からのガス放出速度を軽減し、残留ガスによ
る特性劣化を防ぐためである。
The front substrate 11 and the rear substrate 12 as described above are assembled in a vacuum chamber along the steps shown in FIG. That is, first, the front substrate 11 and the rear substrate 12
Is introduced into a vacuum chamber, the inside of the vacuum layer is evacuated, and then the front substrate 11 and the rear substrate 12 are sufficiently degassed by heating. The heating temperature is appropriately set at about 200 ° C. to 500 ° C. This is to reduce the rate of gas release from the inner wall, which deteriorates the degree of vacuum after the vacuum envelope is formed, and to prevent characteristic deterioration due to residual gas.

【0022】次に、脱ガスが完了し冷却された前面基板
11の蛍光体スクリーン15にゲッター膜を形成する。
これは、真空外囲器となった後の残留ガスをゲッター膜
により吸着排気し、真空外囲器内の真空度を良好なレベ
ルに保つためである。
Next, a getter film is formed on the phosphor screen 15 of the front substrate 11 which has been degassed and cooled.
This is because the residual gas after forming the vacuum envelope is adsorbed and exhausted by the getter film, and the degree of vacuum in the vacuum envelope is maintained at a favorable level.

【0023】最後に、蛍光体層16と電子放出素子18
とが対向するように前面基板11および背面基板12を
互いの所定の位置に重ね合わせる。この状態で、電極部
22a、22bを介して封着部材21a、21bに通電
し、これらの封着部材を加熱して溶解する。その後、通
電を止めて封着部材21a、21bの熱を速やかに前面
基板11および側壁13に拡散伝導させ、封着部材21
a、21bを固化させる。これにより、封着部材21
a、21bにより前面基板11と側壁13とを互いに封
着する。
Finally, the phosphor layer 16 and the electron-emitting device 18
The front substrate 11 and the rear substrate 12 are superimposed on each other at predetermined positions such that they face each other. In this state, power is supplied to the sealing members 21a and 21b via the electrode portions 22a and 22b, and the sealing members are heated and melted. Thereafter, the power supply is stopped, and the heat of the sealing members 21a and 21b is quickly diffused and conducted to the front substrate 11 and the side wall 13, so that the sealing member 21
a, 21b are solidified. Thereby, the sealing member 21
The front substrate 11 and the side wall 13 are sealed with each other by a and 21b.

【0024】次に、上述した封着工程に用いる製造装置
およびFEDの各構成部材について説明する。図8に示
すように、封着前の状態において、前面基板11および
背面基板12の温度は、封着部材21a、21bの融点
よりも低くなるよう設定され、封着部材21a、21b
は固化した状態にある。この状態で、前面基板11およ
び背面基板12は所定の位置に重ね合わされ、封着部材
21a、21bも互いに重なっている。前面基板11お
よび背面基板12には、加圧装置23a、23bにより
互いに接近する方向に所定の封着荷重が印加される。ま
た、画像表示領域は、スペーサ14により所定の隙間に
保持され、封着部材21a、21bも互いに接触してい
る。更に、封着部材21aの電極部22a、22bに
は、それぞれ給電端子24a、24bが接触し、これら
の給電端子24a、24bは電源25に接続されてい
る。
Next, each component of the manufacturing apparatus and the FED used in the above-mentioned sealing step will be described. As shown in FIG. 8, before the sealing, the temperatures of the front substrate 11 and the rear substrate 12 are set to be lower than the melting points of the sealing members 21a, 21b.
Is in a solidified state. In this state, the front substrate 11 and the rear substrate 12 are overlapped at a predetermined position, and the sealing members 21a and 21b also overlap each other. A predetermined sealing load is applied to the front substrate 11 and the rear substrate 12 in directions approaching each other by the pressing devices 23a and 23b. The image display area is held in a predetermined gap by the spacer 14, and the sealing members 21a and 21b are also in contact with each other. Further, power supply terminals 24a and 24b are in contact with the electrode portions 22a and 22b of the sealing member 21a, respectively, and these power supply terminals 24a and 24b are connected to a power supply 25.

【0025】この状態で、給電端子24a、24bを通
して封着部材21a、21bに所定の電流を通電する
と、封着部材21a、21bのみが発熱し溶解する。こ
の後、通電を止めると、熱容量の小さい封着部材21
a、21bの熱は温度勾配によって前面基板11および
側壁13に放熱され、熱容量の大きい前面基板11およ
び側壁13と熱平衡に達し、速やかに冷却固化される。
In this state, when a predetermined current is supplied to the sealing members 21a and 21b through the power supply terminals 24a and 24b, only the sealing members 21a and 21b generate heat and melt. Thereafter, when energization is stopped, the sealing member 21 having a small heat capacity is used.
The heat of a and 21b is radiated to front substrate 11 and side wall 13 by the temperature gradient, reaches thermal equilibrium with front substrate 11 and side wall 13 having a large heat capacity, and is quickly cooled and solidified.

【0026】このような方法によれば、極めて短時でか
つ簡単な製造装置により、真空外囲器を真空封着するこ
とができる。すなわち、導電性を有した封着部材を用い
ることにより、基板を加熱することなく熱容量の小さ
い、つまり体積の小さい、封着部材のみを選択的に加熱
することができ、基板の熱膨張による位置精度の劣化等
を抑制することができる。
According to such a method, the vacuum envelope can be vacuum sealed with a very short and simple manufacturing apparatus. In other words, by using a sealing member having conductivity, it is possible to selectively heat only the sealing member having a small heat capacity without heating the substrate, that is, a small volume, without heating the substrate. Deterioration of accuracy and the like can be suppressed.

【0027】また、封着部材の熱容量が基板の熱容量に
比べて非常に小さいため、基板全体を加熱する従来の方
法に比較して、加熱、冷却にかかる時間を大幅に短縮で
き、量産性を大幅に向上することができる。更に、封着
に必要な装置が単なる給電端子とこれを接触させる機構
のみであり、従来の全面加熱ヒータはもとより電磁誘導
加熱法などに対しても極めて簡略かつ超高真空に適した
クリーンな装置を実現することができる。
Further, since the heat capacity of the sealing member is much smaller than the heat capacity of the substrate, the time required for heating and cooling can be greatly reduced as compared with the conventional method of heating the entire substrate, and the mass productivity can be reduced. It can be greatly improved. Furthermore, the only device required for sealing is a mere power supply terminal and a mechanism for bringing it into contact.This is a very simple and clean device suitable for ultra-high vacuum, not only for the conventional full-surface heater but also for the electromagnetic induction heating method. Can be realized.

【0028】また、通電する電流の形態については、直
流電流のみならず、商用周波数で変動する交流電流を用
いても良い。この場合、交流で送信されてくる商用電流
をわざわざ直流に変換する手間が省け、装置を簡略化す
ることができる。更に、kHzレベルの高周波で変動す
る交流電流を用いても良い。この場合、表皮効果により
高周波に対する実効抵抗値が増大する分だけジュール熱
が増大するため、より小さい電流値で上記と同様の加熱
効果が得られる。
As the form of the current to be supplied, not only a DC current but also an AC current fluctuating at a commercial frequency may be used. In this case, the trouble of converting the commercial current transmitted by the alternating current into the direct current can be omitted, and the apparatus can be simplified. Further, an alternating current that fluctuates at a high frequency of the kHz level may be used. In this case, since the Joule heat increases by an amount corresponding to the increase in the effective resistance value to the high frequency due to the skin effect, the same heating effect as described above can be obtained with a smaller current value.

【0029】また、通電する電力と時間については、実
施例では5〜300秒程度としている。通電時間が長い
(電力が小さい)と、基板周辺の温度上昇による冷却速
度の低下や熱膨張による弊害を生じ、通電時間が短い
(電力が大きい)と、導電性封着材料の充填不均一に起
因する断線やガラス熱応力による割れを生じる。そのた
め、通電する電力および時間(時間的な電力変化も含
む)は、対象物毎に最適な条件設定を行なう必要があ
る。
The power to be supplied and the time are set to about 5 to 300 seconds in this embodiment. If the energization time is long (small power), the cooling rate decreases due to a rise in temperature around the substrate and adverse effects occur due to thermal expansion. If the energization time is short (high power), the filling of the conductive sealing material becomes uneven. Breakage due to disconnection or thermal stress of glass occurs. Therefore, it is necessary to set optimal conditions for the power to be energized and the time (including a temporal power change) for each object.

【0030】また、封着時の基板温度と封着部材の融点
との温度差については、実施例では20℃〜150℃程
度としている。温度差が大きい場合、冷却時間を短縮で
きるがガラス熱応力が大きくなるため、これも対象物毎
に最適な条件設定を行なう必要がある。
The temperature difference between the substrate temperature at the time of sealing and the melting point of the sealing member is about 20 ° C. to 150 ° C. in the embodiment. When the temperature difference is large, the cooling time can be shortened, but the thermal stress of the glass becomes large. Therefore, it is necessary to set optimum conditions for each object.

【0031】また、封着部材からの熱拡散伝導による基
板表裏面の温度差に起因する応力および歪については、
図9に示すように、加圧装置23a、23bの外径を基
板の外径よりも一回り小さくし、基板周辺を破線のよう
に自然にたわませることにより応力を軽減することがで
きる。あるいは、加圧装置23a、23bの外径を小さ
くしな場合でも、加圧装置の周辺部に、基板が反ったと
きの逃げとなる削り部を設けることにより同様の応力対
策の効果が得られる。
The stress and strain caused by the temperature difference between the front and back surfaces of the substrate due to thermal diffusion conduction from the sealing member are as follows.
As shown in FIG. 9, the stress can be reduced by making the outer diameters of the pressurizing devices 23a and 23b slightly smaller than the outer diameter of the substrate and naturally bending the periphery of the substrate as shown by a broken line. Alternatively, even when the outer diameters of the pressurizing devices 23a and 23b are not reduced, a similar effect of countermeasures against stress can be obtained by providing a shaved portion serving as a relief when the substrate is warped around the pressurizing device. .

【0032】更に、上述した実施の形態は、前面基板と
背面基板とで側壁を挟みこむ構成の真空外囲器を用いた
が、側壁が前面基板あるいは背面基板と一体化された構
成としてもよく、また、側壁が前面基板と背面基板を側
面から覆うように接合された構成としてもよい。更に、
封着部材の通電加熱により封着される封着面は、前面基
板と側壁との間、および背面基板と側壁との間の2面で
あってもよい。
Further, in the above-described embodiment, the vacuum envelope having the structure in which the side wall is sandwiched between the front substrate and the rear substrate is used, but the structure in which the side wall is integrated with the front substrate or the rear substrate may be employed. Alternatively, the side wall may be joined so as to cover the front substrate and the rear substrate from the side. Furthermore,
The sealing surfaces to be sealed by energization heating of the sealing member may be two surfaces between the front substrate and the side wall and between the rear substrate and the side wall.

【0033】また、上述した実施の形態では、前面基板
側の封着部材と背面基板側の封着部材とを接触させて通
電加熱したが、これらの封着部材が非接触状態で通電加
熱した後、固化するまでの間に接合させても良い。蛍光
体スクリーンの構成や、電子放出素子の構成は、本発明
の実施の形態に限定されるものではなく、他の構成とし
てもよい。また、封着部材の充填は、封着される2つの
面のいずれか一方のみでもよい。
In the above-described embodiment, the heating is performed by bringing the sealing member on the front substrate side into contact with the sealing member on the rear substrate side, but the heating is performed without contacting these sealing members. After that, they may be joined until they are solidified. The configuration of the phosphor screen and the configuration of the electron-emitting device are not limited to the embodiments of the present invention, and may be other configurations. The sealing member may be filled with only one of the two surfaces to be sealed.

【0034】基板に対する導電性封着材料の濡れ性など
を確保する目的で導電性封着材料の下地を形成する場合
があるが、このような下地自体が導電性を持ち主たる発
熱源となってもよい。
In some cases, a base of the conductive sealing material is formed for the purpose of ensuring the wettability of the conductive sealing material with respect to the substrate. However, such a base itself becomes a main heat source having conductivity. Is also good.

【0035】また、この発明は、FEDやSEDなどの
真空外囲器を必要とする表示装置に限らず、PDPのよ
うに一度真空にしてから放電ガスを注入するような他の
表示装置にも有効である。
The present invention is not limited to a display device requiring a vacuum envelope such as an FED or an SED, but is also applicable to other display devices such as a PDP in which a discharge gas is injected after a vacuum is applied once. It is valid.

【0036】以下、複数の実施例について説明する。 (実施例1)図5および図6に示した前面基板11およ
び背面基板12を、36インチサイズのTV用FED表
示装置に適用した実施例について説明する。主な構成
は、上述の実施の形態で説明したものと同じである。
Hereinafter, a plurality of embodiments will be described. (Embodiment 1) An embodiment in which the front substrate 11 and the rear substrate 12 shown in FIGS. 5 and 6 are applied to a 36-inch TV FED display device will be described. The main configuration is the same as that described in the above embodiment.

【0037】前面基板11と背面基板12は、共に厚さ
2.8mmのガラス材から構成され、側壁13は1.1mm
のガラス材から構成されている。前面基板11および背
面基板12の側壁13に充填された封着部材21a、2
1bは、約160℃で溶解するInを用い、幅3〜5m
m、片面の厚さ0.1〜0.3mmに充填した。電極部2
2a、22bは、対向する背面基板12のX配線および
Y配線との干渉が少ない対角部の対象な2箇所に設け、
通電時の断線のリスクを軽減するため、幅約16mm、厚
さ0.1〜0.3mmと断面積を大きくしている。電極
部22a、22b間の抵抗は、室温状態で0.1〜0.
5Ω程度である。
The front substrate 11 and the rear substrate 12 are both made of a glass material having a thickness of 2.8 mm, and the side walls 13 have a thickness of 1.1 mm.
Of glass material. Sealing members 21a, 2a filled in the side walls 13 of the front substrate 11 and the rear substrate 12;
1b uses In which melts at about 160 ° C. and has a width of 3 to 5 m.
m, and filled to a thickness of 0.1 to 0.3 mm on one side. Electrode part 2
2a and 22b are provided at two diagonal target locations where interference with the X wiring and Y wiring of the opposing rear substrate 12 is small,
To reduce the risk of disconnection during energization, the cross-sectional area is increased to about 16 mm in width and 0.1 to 0.3 mm in thickness. The resistance between the electrode portions 22a and 22b is 0.1 to 0.5 at room temperature.
It is about 5Ω.

【0038】この前面基板11および背面基板12を、
真空槽内で脱ガス、ゲッター膜形成後、加圧装置23
a、23bに装填する。そして、図8に示したように、
前面基板11および背面基板12を、約100℃の温度
で所定の位置に配置し、加圧装置23a、23bにより
約50kgの荷重で重ね合わせ、同時に、給電端子24
a、24bを電極部21a、21bに接続する。
The front substrate 11 and the rear substrate 12 are
After degassing in a vacuum chamber and forming a getter film, the pressure device 23
a, 23b. And, as shown in FIG.
The front substrate 11 and the rear substrate 12 are arranged at predetermined positions at a temperature of about 100 ° C., and are superposed with a load of about 50 kg by the pressurizing devices 23a and 23b.
a and 24b are connected to the electrode portions 21a and 21b.

【0039】この状態で直流120Aを100秒間印加
し、封着部材21a、21bを全周に渡って十分に溶解
する。通電を停止した後、前面基板1および背面基板1
2を60秒間保持して通電加熱により温度上昇した封着
部材21a、21bの熱を前面基板11や側壁13に放
熱し、封着部材21a、21bを固化させた。
In this state, a direct current of 120 A is applied for 100 seconds to sufficiently dissolve the sealing members 21a and 21b over the entire circumference. After stopping the energization, the front substrate 1 and the rear substrate 1
2 was held for 60 seconds to dissipate the heat of the sealing members 21a and 21b whose temperature was increased by energizing heating to the front substrate 11 and the side wall 13, thereby solidifying the sealing members 21a and 21b.

【0040】このようにして真空外囲器を製作した場
合、封着にかかる時間は従来30分程度であったものが
数分程度に大幅に短縮され、封着時の装置も簡単なもの
とすることができた。
When the vacuum envelope is manufactured in this manner, the time required for sealing is conventionally reduced from about 30 minutes to about several minutes, and the apparatus for sealing is simplified. We were able to.

【0041】(実施例2)実施例2の主な構成は、実施
例1と同じである。実施例2では上述の封着工程におい
て、商用周波数である60Hzで変動する実効電流値1
50Aの正弦波の交流電流を封着部材21a、21bに
40秒間印加し、その後、30秒保持して真空外囲器を
形成した。
(Embodiment 2) The main configuration of Embodiment 2 is the same as that of Embodiment 1. In the second embodiment, in the above-described sealing process, the effective current value 1 fluctuating at 60 Hz which is the commercial frequency is used.
A sine wave AC current of 50 A was applied to the sealing members 21a and 21b for 40 seconds, and then held for 30 seconds to form a vacuum envelope.

【0042】(実施例3)実施例3の主な構成は、実施
例1と同じである。実施例3では、封着工程において、
商用周波数よりも高い周波数、例えば、300kHzで
変動する実効電流値4Aの正弦波の交流電流を封着部材
21a、21bに30秒間印加し、その後、30秒保持
して真空外囲器を形成した。
(Embodiment 3) The main configuration of Embodiment 3 is the same as that of Embodiment 1. In Example 3, in the sealing step,
A sine wave alternating current having an effective current value of 4 A, which fluctuates at a frequency higher than the commercial frequency, for example, 300 kHz, was applied to the sealing members 21a and 21b for 30 seconds, and then held for 30 seconds to form a vacuum envelope. .

【0043】(実施例4)実施例4の主な構成は、実施
例1と同じである。実施例4では、図10および図11
に示すように、上述した前面基板11と側壁13との接
合と合わせて、背面基板12と側壁13との接合も導電
性を有した封着部材を用いて真空槽内で行なった。ここ
では、前面基板11の側壁13と対向する部分に矩形枠
状の封着部材26および封着部材の対角方向の角部から
外側に突出した電極部27a、27bを設け、また、背
面基板12の側壁13と対向する部分に矩形枠状の封着
部材28および封着部材の対角方向の角部から外側に突
出した電極部29a、29bを設けた。
(Embodiment 4) The main configuration of Embodiment 4 is the same as that of Embodiment 1. In Example 4, FIGS. 10 and 11
As shown in FIG. 7, in addition to the above-described bonding between the front substrate 11 and the side wall 13, the bonding between the rear substrate 12 and the side wall 13 was performed in a vacuum chamber using a sealing member having conductivity. Here, a rectangular frame-shaped sealing member 26 and electrode portions 27a and 27b protruding outward from diagonal corners of the sealing member are provided on a portion of the front substrate 11 facing the side wall 13, and a back substrate is provided. A sealing member 28 in the form of a rectangular frame and electrode portions 29a and 29b protruding outward from diagonal corners of the sealing member are provided on a portion of the sealing member 12 facing the side wall 13.

【0044】この前面基板11、背面基板12、および
側壁13を上述したような所定の位置に重ね合わせ、電
極部27a、27bに給電端子30a、30bを介して
電源31から100Aを150秒間通電し、同時に電極
部29a、29bに給電端子32a、32bを介して電
源33から100Aを150秒間通電した。その後、約
2分間保持して封着部材26、28を固化させることに
より、前面基板11、背面基板12、および側壁13を
封着した。
The front substrate 11, the rear substrate 12, and the side wall 13 are superimposed on the predetermined positions as described above, and 100 A is supplied from the power source 31 to the electrode portions 27a, 27b via the power supply terminals 30a, 30b for 150 seconds. At the same time, 100 A was supplied from the power source 33 to the electrode portions 29a and 29b via the power supply terminals 32a and 32b for 150 seconds. Thereafter, the front substrate 11, the rear substrate 12, and the side walls 13 were sealed by solidifying the sealing members 26 and 28 while holding them for about 2 minutes.

【0045】なお、この発明は上述した実施の形態に限
定されることなく、この発明の範囲内で種々変形可能で
ある。例えば、封着部材に設けた一対の電極部は、対称
な位置に設けられていればよく、封着部部材一対の対角
部に限らず、各長辺部あるいは短辺部に設けても良い。
また、導電性を有した封着部材としては、Inに限らず
Inを含む合金を用いてもよい。
The present invention is not limited to the above-described embodiment, but can be variously modified within the scope of the present invention. For example, the pair of electrode portions provided on the sealing member may be provided at symmetrical positions, and is not limited to the pair of diagonal portions of the sealing portion member, and may be provided on each long side or short side. good.
Further, the sealing member having conductivity is not limited to In, but may be an alloy containing In.

【0046】[0046]

【発明の効果】以上詳述したように、この発明によれ
ば、より簡単な装置で封着部分のみを瞬時に加熱できる
ととともに、熱伝導および熱容量の関係から封材部材を
瞬時に冷却、固化することができ、同時に、封着時の基
板全体の温度変化が小さく封着精度が向上し、特性面お
よびと生産性に優れた平面型の表示装置およびその製造
方法を提供することができる。
As described above in detail, according to the present invention, only the sealing portion can be instantaneously heated with a simpler device, and the sealing member can be instantaneously cooled due to heat conduction and heat capacity. It is possible to provide a flat display device which can be solidified, and at the same time, has a small temperature change of the whole substrate at the time of sealing, improves sealing accuracy, and has excellent characteristics and productivity, and a method for manufacturing the same. .

【図面の簡単な説明】[Brief description of the drawings]

【図1】この発明の実施の形態に係るFEDの全体構成
を示す斜視図。
FIG. 1 is a perspective view showing the overall configuration of an FED according to an embodiment of the present invention.

【図2】上記FEDの内部構成を示す斜視図。FIG. 2 is a perspective view showing the internal configuration of the FED.

【図3】図1の線A−Aに沿った断面図。FIG. 3 is a sectional view taken along line AA of FIG. 1;

【図4】上記FEDの蛍光体スクリーンの一部を拡大し
て示す平面図。
FIG. 4 is an enlarged plan view showing a part of a phosphor screen of the FED.

【図5】上記FEDの製造に用いられる前面基板を示す
平面図。
FIG. 5 is a plan view showing a front substrate used for manufacturing the FED.

【図6】上記FEDの製造に用いられる背面基板、側
壁、スペーサを示す平面図。
FIG. 6 is a plan view showing a back substrate, side walls, and spacers used for manufacturing the FED.

【図7】上記FEDの製造工程において、真空槽内での
組立ての流れを示すフローチャート。
FIG. 7 is a flowchart showing a flow of assembly in a vacuum chamber in the manufacturing process of the FED.

【図8】上記製造工程において、全面基板と側壁との封
着工程を示す断面図。
FIG. 8 is a cross-sectional view showing a step of sealing the entire substrate and the side wall in the above manufacturing process.

【図9】本発明の実施例であるFEDの封着時に発生す
るガラス応力を緩和する方法を説明する図。
FIG. 9 is a view for explaining a method for alleviating a glass stress generated at the time of sealing an FED according to an embodiment of the present invention.

【図10】本発明の第2の実施の形態に係るFEDの構
成部材を示す平面図。
FIG. 10 is a plan view showing components of an FED according to a second embodiment of the present invention.

【図11】上記第2の実施の形態における封着工程を示
す平面図。
FIG. 11 is a plan view showing a sealing step in the second embodiment.

【符号の説明】[Explanation of symbols]

11…前面基板 12…背面基板 13…側壁 14…スペーサ 15…蛍光体スクリーン 18…電子放出素子 21a、21b、26、28…封着部材 22a、22b、27a、27b、29a、29b…電
極部 24a、24b、30a、30b、32a、32b…給
電端子
DESCRIPTION OF SYMBOLS 11 ... Front board 12 ... Back board 13 ... Side wall 14 ... Spacer 15 ... Phosphor screen 18 ... Electron emission element 21a, 21b, 26, 28 ... Sealing member 22a, 22b, 27a, 27b, 29a, 29b ... Electrode part 24a , 24b, 30a, 30b, 32a, 32b ... power supply terminals

───────────────────────────────────────────────────── フロントページの続き (72)発明者 西村 孝司 埼玉県深谷市幡羅町一丁目9番地2号 株 式会社東芝深谷工場内 Fターム(参考) 5C012 AA05 BC03 BD02 PP08 5C032 AA01 BB16 BB18 5C036 EE14 EE19 EF01 EF06 EF09 EG02 EG06 EG31 EH04  ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Takashi Nishimura 1-9-2, Hara-cho, Fukaya-shi, Saitama F-term in the Toshiba Fukaya Plant (reference) 5C012 AA05 BC03 BD02 PP08 5C032 AA01 BB16 BB18 5C036 EE14 EE19 EF01 EF06 EF09 EG02 EG06 EG31 EH04

Claims (22)

【特許請求の範囲】[Claims] 【請求項1】対向配置されているとともに周縁部が封着
された前面基板および背面基板を有する外囲器を備え、 上記前面基板と背面基板との間に位置した封着部は、導
電性を有しているとともに通電することにより融解する
封着部材によって封着されていることを特徴とする表示
装置。
An enclosure having a front substrate and a rear substrate which are opposed to each other and whose peripheral edges are sealed is provided, wherein the sealing portion located between the front substrate and the rear substrate is electrically conductive. And a sealing device that is sealed by a sealing member that melts when energized.
【請求項2】上記外囲器は、前面基板および背面基板の
周縁部間に位置した枠状の側壁を有し、上記封着部材
は、上記前面基板および上記背面基板の少なくとも一方
と上記側壁と間の接合面に設けられていることを特徴と
する請求項1記載の表示装置。
2. The package according to claim 1, wherein the envelope has a frame-shaped side wall located between peripheral edges of the front substrate and the rear substrate, and the sealing member includes at least one of the front substrate and the rear substrate and the side wall. The display device according to claim 1, wherein the display device is provided on a joint surface between the display device and the display device.
【請求項3】上記封着部材は、上記外囲器の周縁の封着
部分に沿って枠状に設けられているとともに、上記封着
部分から外側に突出した2つの電極部を有していること
を特徴とする請求項1又は2に記載の表示装置。
3. The sealing member is provided in a frame shape along a sealing portion on a peripheral edge of the envelope, and has two electrode portions protruding outward from the sealing portion. The display device according to claim 1, wherein:
【請求項4】上記各電極部の断面積は、上記封着部材の
他の部分の断面積よりも大きいことを特徴とする請求項
3に記載の表示装置。
4. The display device according to claim 3, wherein a cross-sectional area of each of said electrode portions is larger than a cross-sectional area of another portion of said sealing member.
【請求項5】上記2つの電極部は、上記外囲器の周縁部
に対して対称的な位置に設けられていることを特徴とす
る請求項3又は4に記載の表示装置。
5. The display device according to claim 3, wherein the two electrode portions are provided at symmetrical positions with respect to a peripheral portion of the envelope.
【請求項6】上記封着部材は、InまたはInを含む合
金を含んでいることを特徴とする請求項1ないし5のい
ずれか1項に記載の表示装置。
6. The display device according to claim 1, wherein the sealing member contains In or an alloy containing In.
【請求項7】上記外囲器の内部には電子源と蛍光体が設
けられ、上記外囲器の内部は真空に維持されていること
を特徴とする請求項1ないし6のいずれか1項に記載の
表示装置。
7. The device according to claim 1, wherein an electron source and a phosphor are provided inside the envelope, and the interior of the envelope is maintained at a vacuum. The display device according to claim 1.
【請求項8】対向配置されているとともに周縁部が封着
された前面基板および背面基板を有する外囲器を備えた
表示装置の製造方法において、 上記前面基板および背面基板の周縁部間の封着部分に沿
って、導電性を有した封着部材を設け、この封着部材に
通電して融解することで上記封着部分を封着することを
特徴とする表示装置の製造方法。
8. A method of manufacturing a display device comprising an envelope having a front substrate and a rear substrate which are opposed to each other and whose peripheral portions are sealed, wherein a sealing between the peripheral portions of the front substrate and the rear substrate is performed. A method for manufacturing a display device, comprising: providing a sealing member having conductivity along a sealing portion, and energizing and melting the sealing member to seal the sealing portion.
【請求項9】上記前面基板および背面基板の周縁部間に
枠状の側壁を配置し、上記前面基板および背面基板の少
なくとも一方と上記側壁との間の接合面に上記封着部材
を設け、この封着部材に通電して封着部材を融解するこ
とを特徴とする請求項8に記載の表示装置の製造方法。
9. A frame-like side wall is arranged between peripheral portions of the front substrate and the rear substrate, and the sealing member is provided on a joint surface between at least one of the front substrate and the rear substrate and the side wall, 9. The method for manufacturing a display device according to claim 8, wherein a current is applied to the sealing member to melt the sealing member.
【請求項10】上記封着部材に直流電流を通電すること
を特徴とする請求項8又は9に記載の表示装置の製造方
法。
10. The method according to claim 8, wherein a direct current is applied to the sealing member.
【請求項11】上記封着部材に商用周波数の交流電流を
通電することを特徴とする請求項8又は9に記載の表示
装置の製造方法。
11. The method for manufacturing a display device according to claim 8, wherein an alternating current having a commercial frequency is supplied to said sealing member.
【請求項12】上記封着部材に交流電流供給源から商用
周波数よりも高い周波数の交流電流を通電することを特
徴とする請求項8又は9に記載の表示装置の製造方法。
12. The method according to claim 8, wherein an AC current having a frequency higher than a commercial frequency is supplied to the sealing member from an AC current supply source.
【請求項13】上記封着部材として、InまたはInを
含む合金が用いることを特徴とする請求項8ないし12
のいずれか1項に記載の表示装置の製造方法。
13. The sealing member according to claim 8, wherein In or an alloy containing In is used.
13. The method for manufacturing a display device according to claim 1.
【請求項14】上記導電部材を上記外囲器の周縁の封着
部分に沿って枠状に設けるとともに、導電部材に上記封
着部分から外側に突出する2つの電極部を形成し、上記
電極部を介して導電部材に通電することを特徴とする請
求項8ないし13のいずれか1項に記載の表示装置の製
造方法。
14. The conductive member is provided in the form of a frame along a sealed portion at the periphery of the envelope, and the conductive member is formed with two electrode portions projecting outward from the sealed portion. The method for manufacturing a display device according to claim 8, wherein the conductive member is energized through the portion.
【請求項15】上記各電極部の電面積を上記封着部材の
他の部分の断面積よりも大きい形成することを特徴とす
る請求項14に記載の表示装置の製造方法。
15. The method of manufacturing a display device according to claim 14, wherein an electric area of each of said electrode portions is formed larger than a cross-sectional area of another portion of said sealing member.
【請求項16】上記2つの電極部を上記外囲器の周縁部
に対して対称的な位置に設けることを特徴とする請求項
14又は15に記載の表示装置の製造方法。
16. The method according to claim 14, wherein the two electrode portions are provided symmetrically with respect to a peripheral edge of the envelope.
【請求項17】上記封着部材に通電する直前の上記前面
基板および背面基板の温度を、上記封着部材の融点より
も低く設定することを特徴とする請求項8ないし16の
いずれか1項に記載の表示装置の製造方法。
17. The method according to claim 8, wherein the temperature of the front substrate and the rear substrate immediately before energizing the sealing member is set lower than the melting point of the sealing member. 6. The method for manufacturing a display device according to claim 1.
【請求項18】上記封着部材に通電する直前の上記前面
基板および背面基板の温度と上記封着部材の融点との差
は20℃〜150℃の範囲内であることを特徴とする請
求項17に記載の表示装置の製造方法。
18. The method according to claim 1, wherein the difference between the temperature of the front substrate and the rear substrate immediately before energizing the sealing member and the melting point of the sealing member is in the range of 20 ° C. to 150 ° C. 18. The method for manufacturing a display device according to item 17.
【請求項19】上記外囲器を真空雰囲気中に維持した状
態で上記封着部材に通電することを特徴とする請求項8
ないし18のいずれか1項に記載の表示装置の製造方
法。
19. An electric current is supplied to said sealing member while said envelope is maintained in a vacuum atmosphere.
19. The method for manufacturing a display device according to any one of items 18 to 18.
【請求項20】真空雰囲気中で上記前面基板および背面
基板を加熱して脱ガスさせた後、真空雰囲気を維持した
状態で上記封着部材の融点よりも低い温度まで冷却し、 上記封着部材に通電することにより上記封着部材のみを
加熱溶融し、 上記封着部材への通電を停止し、上記封着部材の熱を上
記前面基板および背面基板に伝導することにより封着部
材を冷却固化させ、上記外囲器を真空に封着することを
特徴とする請求項19記載の表示装置の製造方法。
20. The method according to claim 20, wherein the front substrate and the rear substrate are heated and degassed in a vacuum atmosphere, and then cooled to a temperature lower than the melting point of the sealing member while maintaining the vacuum atmosphere. To heat and melt only the sealing member, to stop energizing the sealing member, and to conduct heat of the sealing member to the front substrate and the rear substrate to cool and solidify the sealing member. 20. The method according to claim 19, wherein the envelope is sealed in a vacuum.
【請求項21】上記封着部材に通電する際、上記前面基
板あるいは背面基板の周縁部の機械的な拘束をなくし、
熱による上記周縁部のたわみを許容しながら封着するこ
とを特徴とする請求項20に記載の表示装置の製造方
法。
21. When energizing the sealing member, mechanical constraint on the peripheral portion of the front substrate or the rear substrate is eliminated.
21. The method for manufacturing a display device according to claim 20, wherein the sealing is performed while allowing the peripheral portion to be bent by heat.
【請求項22】上記外囲器の内部に電子源および蛍光体
を設けた状態で上記周縁部を封着し、上記外囲器の内部
を真空に維持することを特徴とする請求項19ないし2
1のいずれか1項に記載の表示装置の製造方法。
22. The method according to claim 19, wherein the peripheral portion is sealed with the electron source and the phosphor provided inside the envelope, and the inside of the envelope is maintained at a vacuum. 2
2. The method for manufacturing a display device according to claim 1.
JP2001124685A 2001-04-23 2001-04-23 Display device and its manufacturing method Pending JP2002319346A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2001124685A JP2002319346A (en) 2001-04-23 2001-04-23 Display device and its manufacturing method
EP02720557A EP1389792A1 (en) 2001-04-23 2002-04-22 IMAGE DISPLAY DEVICE, AND METHOD AND DEVICE FOR PRODUCING IMAGE DISPLAY DEVICE
CNB028103106A CN1306538C (en) 2001-04-23 2002-04-22 Image display device, and method and device for producing image display device
KR10-2003-7013784A KR20040015114A (en) 2001-04-23 2002-04-22 Image display device, and method and device for producing image display device
PCT/JP2002/003994 WO2002089169A1 (en) 2001-04-23 2002-04-22 Image display device, and method and device for producing image display device
US10/690,744 US7247072B2 (en) 2001-04-23 2003-10-23 Method of manufacturing an image display apparatus by supplying current to seal the image display apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001124685A JP2002319346A (en) 2001-04-23 2001-04-23 Display device and its manufacturing method

Publications (1)

Publication Number Publication Date
JP2002319346A true JP2002319346A (en) 2002-10-31

Family

ID=18974031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001124685A Pending JP2002319346A (en) 2001-04-23 2001-04-23 Display device and its manufacturing method

Country Status (1)

Country Link
JP (1) JP2002319346A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004042768A1 (en) * 2002-11-07 2004-05-21 Sony Corporation Flat display device and method for making the same
WO2005083739A1 (en) * 2004-03-02 2005-09-09 Kabushiki Kaisha Toshiba Image forming device
WO2005083737A1 (en) * 2004-03-02 2005-09-09 Kabushiki Kaisha Toshiba Production method and production device for image display unit
WO2005083736A1 (en) * 2004-03-02 2005-09-09 Kabushiki Kaisha Toshiba Method for manufacturing image display device and sealant applying device
WO2005122207A1 (en) * 2004-06-08 2005-12-22 Kabushiki Kaisha Toshiba Image display device
US7264529B2 (en) 2004-05-11 2007-09-04 Kabushiki Kaisha Toshiba Method of manufacturing an image display device having a sealing portion which seals peripheral edges of front and back substrates

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004042768A1 (en) * 2002-11-07 2004-05-21 Sony Corporation Flat display device and method for making the same
US7812510B2 (en) 2002-11-07 2010-10-12 Sony Corporation Flat display and manufacturing method thereof
WO2005083739A1 (en) * 2004-03-02 2005-09-09 Kabushiki Kaisha Toshiba Image forming device
WO2005083737A1 (en) * 2004-03-02 2005-09-09 Kabushiki Kaisha Toshiba Production method and production device for image display unit
WO2005083736A1 (en) * 2004-03-02 2005-09-09 Kabushiki Kaisha Toshiba Method for manufacturing image display device and sealant applying device
US7303457B2 (en) 2004-03-02 2007-12-04 Kabushiki Kaisha Toshiba Method of bonding display substrates by application of an electric current to heat and melt a bonding material
US7264529B2 (en) 2004-05-11 2007-09-04 Kabushiki Kaisha Toshiba Method of manufacturing an image display device having a sealing portion which seals peripheral edges of front and back substrates
WO2005122207A1 (en) * 2004-06-08 2005-12-22 Kabushiki Kaisha Toshiba Image display device

Similar Documents

Publication Publication Date Title
JP4323573B2 (en) Manufacturing method of flat panel display device
JP2001210258A (en) Picture display device and its manufacturing method
WO2002089169A1 (en) Image display device, and method and device for producing image display device
JP2000323072A (en) Air-tight container and image forming apparatus
US20050179360A1 (en) Image display device, method of manufacturing image display device, and manufacturing apparatus
JP2002319346A (en) Display device and its manufacturing method
TW200411695A (en) Image display device, manufacturing method and manufacturing apparatus thereof
JP2000149791A (en) Sealed container, sealing method, sealing device, and image forming device
KR20060120266A (en) Image forming device
JP3940577B2 (en) Flat display device and manufacturing method thereof
JP3940583B2 (en) Flat display device and manufacturing method thereof
TW200301503A (en) Image display device and the manufacturing method thereof
JP2000149790A (en) Sealed container, sealing method, sealing device, and image forming device
JP2003068238A (en) Display device and manufacture thereof
JP3782347B2 (en) Flat display device and manufacturing method thereof
KR100701112B1 (en) Image display device and method of producing the same
JP2005197050A (en) Image display device and its manufacturing method
JP2002184330A (en) Image display device and its manufacturing method
JP2003132822A (en) Panel display device and manufacturing method therefor
JP2003242913A (en) Flat display device and manufacturing method of the same
JP2000090829A (en) Manufacture for image display device
TWI238430B (en) Image display device and method of producing the device
JP2007188784A (en) Image display device and manufacturing method thereof
JP2004265639A (en) Image display device and its manufacturing method
JP2004265628A (en) Image display device and its manufacturing method