JP2003232596A - Heat transfer device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a heat transfer device capable of effectively transferring heat regardless of the relative positional relationship between an endothermic part and a heat radiating part by forcibly circulating working fluid put in the supercritical pressure state by an external driving force. <P>SOLUTION: This heat transfer device includes working fluid sealed in the interior, a tubular passage to which a material to be cooled and a cooling means are thermally connected and where the working fluid in an area to which at least the material to be cooled is thermally connected is in the supercritical pressure state, and a fluid driving device connected to the tubular passage to form a closed passage with the tubular passage, thereby moving the sealed working fluid in the closed passage. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heat transfer device for transporting heat from a high temperature part to a low temperature part with a small thermal resistance, and more particularly to a heat transfer device using a fluid in a supercritical state as a working fluid.

[0002]

2. Description of the Related Art As a heat transfer device using a fluid in a supercritical pressure state as a working fluid, a natural circulation type heat transfer tube using a buoyancy caused by a difference in density as a driving force, as disclosed in Japanese Patent Laid-Open No. 2001-091170. It has been known. The fluid in the supercritical pressure state is a fluid whose temperature is equal to or higher than the critical temperature and whose pressure is equal to or higher than the critical pressure. The advantages of using the fluid in the supercritical pressure state for the heat transfer device are as follows. Unlike a heat pipe, a wick structure that effectively circulates condensed liquid is unnecessary, and the heat transfer tube can be made thinner and thinner. Since the coefficient of kinematic viscosity is smaller than that of liquid or gas, more effective convection heat transfer can be obtained than that of circulating liquid or gas.
For these reasons, as a new type of heat transfer means, a natural circulation type heat transfer tube using a fluid in a critical field pressure state as a working fluid has been infused.

[0003]

[Patent Document 1] Japanese Patent Laid-Open No. 2001-091170

[Patent Document 2] Japanese Patent Application Laid-Open No. 9-040983

[0004]

When the working fluid in the supercritical pressure state is naturally circulated, the buoyancy acting as the driving force of the fluid acts in the opposite direction to gravity, so that the heat absorbing portion of the heat transfer tube is higher than the heat radiating portion. When it is in the position, the driving force becomes weak, and there is a problem that a sufficient driving force for circulating the working fluid cannot be obtained. Therefore, an object of the present invention is to effectively transfer heat regardless of the relative positional relationship between the heat absorbing portion and the heat radiating portion by forcibly circulating the working fluid in the supercritical pressure state by the external driving force. To provide a heat transfer device.

[0005]

The inventor has conducted extensive studies to solve the above-mentioned conventional problems. As a result, it was found that by forcibly moving the working fluid by the external driving force, it is possible to obtain a heat transfer device that can effectively transfer heat regardless of the relative positional relationship between the heat absorbing part and the heat radiating part. did.

The present invention has been made on the basis of the above-mentioned research results. The first aspect of the heat transfer device of the present invention is that the working fluid enclosed inside, the object to be cooled and the cooling means are A tubular flow path in which the working fluid is in a supercritical pressure state that is thermally connected and at least the object to be cooled is thermally connected, and is connected to the tubular flow path together with the tubular flow path A heat transfer device including a fluid drive device that forms a closed flow path and moves the enclosed working fluid in the closed flow path.

A second aspect of the heat transfer device of the present invention is a heat transfer device in which the fluid drive device is a piston type pump having two working fluid inlets and outlets.

A third aspect of the heat transfer device of the present invention is a heat transfer device in which a valve that can be opened and closed is provided at each of the two working fluid inlets and outlets.

A fourth aspect of the heat transfer device of the present invention is a heat transfer device in which one of the valves provided at the two working fluid inlets and outlets is closed and the other is opened as the piston moves up and down. .

According to a fifth aspect of the heat transfer device of the present invention, the working fluid sealed inside is thermally connected to the object to be cooled and the cooling means, and at least the object to be cooled is thermally connected. A tubular flow path in which the working fluid present in the region is in a supercritical pressure state and which forms a closed flow path by itself; and an external working fluid which acts on the enclosed working fluid to circulate the working fluid in the closed loop. A heat transfer device including a drive device.

In a sixth aspect of the heat transfer device of the present invention, the working fluid is a magnetic fluid or a dielectric fluid,
A heat transfer device in which the external drive device uses a magnetic field or a magnetic field.

A seventh aspect of the heat transfer device of the present invention is the heat transfer device in which the main component of the working fluid is carbon dioxide.

In an eighth aspect of the heat transfer device of the present invention, the fluid drive device is configured so that an expandable tube into which the working fluid is introduced and a working fluid introduced into the tube A heat transfer device including a tube type pump having a rotor with a protrusion that moves in a direction in a housing.

In a ninth aspect of the heat transfer device of the present invention, the fluid drive device includes a working fluid inlet and outlet connected to the tubular flow passage, and a fan portion having a vane portion that rotates therein. A heat transfer device comprising a magnet drive type fan, comprising: a drive unit that drives the vanes of the fan unit by magnetic force.

Another aspect of the heat transfer device of the present invention is the heat transfer device, wherein the fluid drive device includes an internal fan, and the fan unit drives the working fluid by the internal fan.

Another aspect of the heat transfer device of the present invention is a heat transfer device in which a magnetic material is attached to the internal fan, and the internal fan is driven by a magnetic force from the outside.

Another aspect of the heat transfer device of the present invention is a heat transfer device in which a plurality of electromagnets are attached along an outer surface, and the electromagnets are energized to guide the internal fan.

In another aspect of the heat transfer device of the present invention, the object to be cooled and the cooling means are thermally connected to an outer surface of the tubular flow path, and the working fluid is forcedly circulated in the closed loop. It is a heat transfer device.

Another aspect of the heat transfer device of the present invention is a heat transfer device in which all of the working fluid is in a supercritical pressure state.

In another aspect of the heat transfer device of the present invention, a plurality of electromagnets are arranged on the outer surface of the tubular flow path, the electromagnets are energized in a predetermined order, the energization is stopped, and the working fluid is forced. It is a heat transfer device that circulates as desired.

In another aspect of the heat transfer device of the present invention, the tubular flow path is formed in a spreader, and at least one cooled portion having a different height is thermally connected to one surface of the spreader. It is a heat transfer device.

[0022]

DESCRIPTION OF THE PREFERRED EMBODIMENTS A heat transfer device of the present invention will be described with reference to the drawings. One aspect of the heat transfer device of the present invention is such that the working fluid sealed inside, the object to be cooled and the cooling means are thermally connected, and at least the region to be object to be cooled is thermally connected. A tubular flow path in which the working fluid is in a supercritical pressure state, and a closed loop is formed in communication with the tubular flow path together with the tubular flow path to drive the enclosed working fluid to circulate in the closed loop. And a fluid drive device.

Further, the fluid driving device comprises a piston type pump having a working fluid suction port and a working fluid discharge port. Valves that can be opened and closed are provided at the working fluid suction port and the working fluid discharge port, respectively. One of the valves provided in the working fluid suction port and the working fluid discharge port closes and the other opens as the piston moves up and down. Further, in one aspect, the fluid driving device includes an internal fan, and includes a fan unit that drives the working fluid by the internal fan. A magnetic material is attached to the internal fan, and the internal fan is driven by a magnetic force from the outside. A plurality of electromagnets are attached along the outer surface to energize the electromagnets to guide the internal fan. The object to be cooled and the cooling means are thermally connected to the outer surface of the tubular flow path, and the working fluid is forcedly circulated in the closed loop. A heat transfer device in which all of the working fluid is in a supercritical pressure state.

FIG. 1 is a diagram for explaining one embodiment of the heat transfer device of the present invention. That is, in the embodiment shown in FIG. 1, the working fluid flows inside the fluid drive device. The fluid driving device is composed of a pump, and the working fluid is circulated by using the pump. As shown in FIG. 1, the heat transfer device 1 includes a tubular flow path 2 in which an object to be cooled 4 and a cooling means 5 are thermally connected.
And a fluid drive device 3 that is connected to the tubular flow path 2 to form a closed loop together with the tubular flow path and that drives the enclosed working fluid to circulate in the closed loop. The fluid driving device 3 includes a working fluid suction port 6 and a working fluid discharge port 7.
It consists of a piston type pump with.

In the embodiment shown in FIG. 1, the tubular flow path is made of, for example, an aluminum pipe. As the working fluid, for example, carbon dioxide (CO ₂ ) is enclosed in a supercritical pressure state (temperature 31 ° C. or higher, pressure 7.4 MPa or higher). Pumps are attached to both ends of the tubular flow path as fluid drive devices.

2 to 4 are views for explaining a pump as the fluid drive unit 3. A piston 8 is provided in the pump and can be moved up and down by a driving means (not shown) such as hydraulic pressure, voltage change, electric motor. The working fluid is introduced into the working fluid introducing portion 9 in the pump. In addition, two working fluid inlets and outlets (suction port 6 connected to the tubular flow path)
And the discharge port 7) has a first valve 1 that can be opened and closed, respectively.
0, the second valve 11 is attached. As shown in FIG. 3, when the piston 8 is lowered with the first valve 10 opened and the second valve 11 closed, the working fluid in the tubular flow path is sucked from the suction port 6, and the working fluid 13 Is introduced into the working fluid introduction section. As shown in FIG. 4, if the piston 8 is pushed up with the first valve 10 closed and the second valve 11 opened, the working fluid is discharged from the discharge port 7 to the tubular flow path. By repeating the above work, the working fluid can be circulated in the direction of the arrow in FIG.

In FIG. 1, the object to be cooled is installed at a position lower than the cooling means, but the object to be cooled and the cooling means are at the same height, or the object to be cooled is higher than the cooling means. May be installed in. 5 and 6 are views showing one mode of the cooling means (object to be cooled). Cooling means 4
Alternatively, when the tubular flow path is brought into thermal contact with the object to be cooled,
The contact area may be increased by making the tubular flow path 12 meander as shown in FIG. Further, as shown in FIG. 6, a joint 14 may be used to arrange the plurality of channels 12 in parallel to increase the contact area. In order to reduce the contact resistance, the heat transfer tube and cooling means via a heat conductive member such as metal, or
The heat transfer tube and the object to be cooled may be in contact with each other.

The tubular flow passage is not limited to a pipe, but any passage having a flow passage for a working fluid therein may be used. For example, it may be an extruded multi-hole pipe, or a member obtained by welding or brazing at least one member including a member whose flow path is formed by cutting or pressing. Figure 5,
The embodiment shown in FIG. 6 is a case where the contact surface with the cooling means or the object to be cooled is flat, but when the contact surface is curved, the tubular flow path is curved accordingly, You may make it contact.

In the embodiment shown in FIG. 1, the object to be cooled and the cooling means are each one, but a plurality of objects may be installed if necessary. FIG. 7 is a diagram showing a mode in which the fluid drive device is composed of a fan unit. That is, in this aspect, the working fluid flows inside the fluid drive device, and the working fluid is circulated using the internal fan. As shown in FIG. 7, the heat transfer device 21 forms a closed loop together with the tubular flow path 22 by being connected to the tubular flow path 22 to which the object to be cooled 24 and the cooling means 25 are thermally connected. , A fluid drive device 23 that drives the enclosed working fluid to circulate in a closed loop. The fluid drive device 23 includes an internal fan 26, and includes a fan unit 23 that drives the working fluid by the internal fan 26.

In the embodiment shown in FIG. 7, the tubular channel is
For example, it is made of an aluminum pipe, and carbon dioxide (CO ₂ ) is enclosed as a working fluid in a supercritical pressure state (temperature 31 ° C. or higher, pressure 7.4 MPa or higher). Both ends of the tubular flow path are connected to a fan unit having a fan mounted therein. The internal fan is rotated by electric power (that is, a type in which lead wires are drawn into the fan unit). When it is difficult to pull the lead wire into the fan unit, a magnetic material is attached to the internal fan and the fan is driven by magnetic force from the outside.

FIG. 8 and FIG. 9 are views for explaining the details of an internal fan of the type in which the fan is driven by a magnetic force from the outside. As shown in FIG. 8, the magnetic material 2 is attached to the internal fan.
8 is installed, and the magnet 27 is placed outside and rotated in the direction of the arrow to guide the internal fan 26. Further, as shown in FIG. 9, the magnetic body 28 is attached to the internal fan, and a plurality of electromagnets 29 are provided outside at a predetermined interval, and the electromagnets 29 are energized in the order shown by the dotted arrows. Guide the fan. In FIG. 7, the object to be cooled is installed at a position lower than the cooling means, but the object to be cooled and the cooling means are installed at the same height, or the object to be cooled is installed at a position higher than the cooling means. May be.

Also in this embodiment, when the tubular flow path is brought into thermal contact with the cooling means or the object to be cooled, the tubular flow path may be meandered to increase the contact area as shown in FIG. Further, as shown in FIG. 6, a plurality of flow paths may be arranged in parallel to increase the contact area. In order to reduce the contact resistance, the heat transfer tube and the cooling means or the heat transfer tube and the object to be cooled may be in contact with each other via a heat conductive member such as metal.

The tubular flow passage is not limited to a pipe, and any passage having a flow passage for a working fluid therein may be used. For example, it may be an extruded multi-hole pipe, or a member obtained by welding or brazing at least one member including a member whose flow path is formed by cutting or pressing.

The embodiment shown in FIGS. 5 and 6 is for the case where the contact surface with the cooling means or the object to be cooled is flat, but when the contact surface is curved, the tubular flow is adjusted accordingly. The paths may be curved and contacted. In the embodiment shown in FIG. 7, the object to be cooled and the cooling means are each one, but a plurality of objects may be installed if necessary.

Further, according to one aspect of the heat transfer device of the present invention, the working fluid sealed inside is thermally connected to the object to be cooled and the cooling means, and at least the object to be cooled is thermally connected. A tubular flow path that forms a closed loop by itself, wherein the working fluid present in a closed region is in a supercritical pressure state,
A heat transfer device comprising: an external driving device that acts on the enclosed working fluid to circulate the working fluid in the closed loop.

The working fluid is a magnetic fluid,
The external drive uses a magnetic field. Alternatively, the working fluid is a dielectric fluid and the external drive device uses an electric field. A plurality of electromagnets are arranged on the outer surface of the tubular flow path, the electromagnets are energized in a predetermined order, the energization is stopped, and the working fluid is forcedly circulated. A heat transfer device in which the main component of the working fluid is carbon dioxide. Further, the tubular channel is formed in the heat spreader,
In the heat transfer device, at least one cooled portion having a different height is thermally connected to one surface of the heat spreader.

FIG. 10 is a diagram for explaining one mode of the heat transfer device of the present invention. In this aspect, the working fluid does not flow inside the fluid drive. That is, when the working fluid reacts to a certain external force field and an external force can be obtained, the fluid can be circulated without the fluid directly flowing in the fluid drive device. As the external force field, for example, there is a method using a magnetic field. In the embodiment shown in FIG. 10, a magnetic fluid-ized working fluid is driven by a magnetic field applied from the outside. That is, the fluid drive system of this aspect comprises an external drive system. As shown in FIG. 10, in the heat transfer device 31, the object to be cooled 35 and the cooling means 34 are thermally connected to each other, and the tubular flow path 32 forming a closed loop by itself and the enclosed working fluid are operated, An external drive device 33 for circulating the working fluid in a closed loop. The working fluid is in a supercritical pressure state. The working fluid is a magnetic fluid, and the external drive device uses a magnetic field.

In the heat transfer device of this aspect, the tubular flow path is made of, for example, an aluminum pipe,
It itself forms a closed loop. As a working fluid,
For example, carbon dioxide (CO ₂ ) is in a supercritical pressure state (temperature 3
It is sealed at 1 ° C or higher and a pressure of 7.4 MPa or higher).
Further, the working fluid is a magnetic fluid. That is, in order to convert the working fluid into a magnetic fluid, for example, a substance exhibiting ferromagnetism such as iron may be molded into particles and mixed with the working fluid.

Further, for example, as shown in JP-A-9-040983, a particulate ferromagnetic material is previously dissolved in an organic solvent such as alcohol to be made into a magnetic fluid, which is dissolved in a working fluid. Is also good. That is, the ferromagnetic substance is dissolved in the working fluid by utilizing the property that the solubility is higher than that of a normal liquid in the supercritical pressure state, and the working fluid is made into a magnetic fluid. In another aspect, the magnetic fluid is driven by the magnetic field created by the fluid drive device (external drive device).

In the external drive device, for example, FIG.
As shown in, a plurality of electromagnets 33 are arranged along the flow path at predetermined intervals. For example, the electromagnets 33 are energized one by one in the direction indicated by the red dotted line, and the energization of the previously energized electromagnet 33 is stopped. As a result, the working fluid is sequentially attracted to the electromagnet, moves in the direction of the arrow, and circulates in the flow path.

Further, in another aspect of the external drive device, the magnet is moved to induce the working fluid. Also in the heat transfer device of this aspect, as shown in FIG.
Although 5 is installed at a position lower than the cooling means 34, the object to be cooled and the cooling means may be installed at the same height, or the object to be cooled may be installed at a position higher than the cooling means. Also in this aspect, when the tubular flow channel is brought into thermal contact with the cooling means or the object to be cooled, the tubular flow channel may be meandered as shown in FIG. 5 to increase the contact area. Further, as shown in FIG. 6, a plurality of flow paths may be arranged in parallel to increase the contact area. In order to reduce the contact resistance, the heat transfer tube and the cooling means or the heat transfer tube and the object to be cooled may be in contact with each other via a heat conductive member such as metal.

The tubular flow path is not limited to a pipe, and any flow path through which a working fluid passes may be used. For example, it may be an extruded multi-hole pipe, or a member obtained by welding or brazing at least one member including a member whose flow path is formed by cutting or pressing. Figure 5,
The embodiment shown in FIG. 6 is a case where the contact surface with the cooling means or the object to be cooled is flat, but when the contact surface is curved, the tubular flow path is curved accordingly, You may make it contact.

In the embodiment shown in FIG. 10, the object to be cooled and the cooling means are each one, but a plurality of objects may be installed if necessary. FIG. 11: is a figure explaining one aspect of the heat transfer apparatus of this invention. Also in this aspect, the working fluid does not flow inside the fluid drive device. That is, the working fluid that has been made into a dielectric fluid is driven by an electric field applied from the outside. In this aspect, the fluid drive is an external drive. As shown in FIG. 11, in the heat transfer device 41, the object 45 to be cooled and the cooling means 44 are thermally connected to each other, and the tubular flow path 42 itself forms a closed loop.
And an external drive device 43 that acts on the enclosed working fluid to circulate the working fluid in a closed loop.
The working fluid is in a supercritical pressure state. The working fluid is a magnetic fluid or a dielectric fluid, and the external drive device 43 uses a magnetic field.

In the heat transfer device of this aspect, the tubular flow path is made of, for example, an aluminum pipe,
It itself forms a closed loop. As a working fluid,
For example, carbon dioxide (CO ₂ ) is in a supercritical pressure state (temperature 3
It is sealed at 1 ° C or higher and a pressure of 7.4 MPa or higher).
Further, the working fluid comprises a dielectric fluid. As the dielectric fluid, for example, a fluid having ferroelectricity such as liquid crystal is mixed with the working fluid. That is, the ferroelectric substance is dissolved in the working fluid by utilizing the property that the solubility is higher than that of a normal liquid in the supercritical state, and the working fluid is made into a dielectric fluid. In this aspect, the dielectric fluid is driven by an electric field created by an external drive device.

In the external drive device, as shown in FIG. 11, a plurality of capacitors 43 are arranged along the flow path, and a voltage is sequentially applied in the direction indicated by the dotted arrow to charge the capacitors one by one. , Discharge the previously charged capacitor. As a result, the working fluid is sequentially guided and moved by the charged condenser to circulate. Further, the condenser may be moved to induce working fluid. Also in this mode, as shown in FIG.
Although the object to be cooled 45 is installed at a position lower than that of the cooling means 44, the object to be cooled and the cooling means may be installed at the same height, or the object to be cooled may be installed at a position higher than the cooling means. . Also in this aspect, when the tubular flow channel is brought into thermal contact with the cooling means or the object to be cooled, the tubular flow channel may be meandered as shown in FIG. 5 to increase the contact area. Furthermore, FIG.
As shown in, a plurality of channels may be arranged in parallel to increase the contact area. In order to reduce the contact resistance, the heat transfer tube and the cooling means or the heat transfer tube and the object to be cooled may be in contact with each other via a heat conductive member such as metal.

The tubular flow passage is not limited to a pipe, and any passage may be used as long as it has a flow passage through which a working fluid passes. For example, it may be an extruded multi-hole pipe, or a member obtained by welding or brazing at least one member including a member whose flow path is formed by cutting or pressing.

The embodiments shown in FIGS. 5 and 6 are for the case where the contact surface with the cooling means or the object to be cooled is flat, but when the contact surface is curved, the tubular flow is adjusted accordingly. The paths may be curved and contacted. In the embodiment shown in FIG. 11, the object to be cooled and the cooling means are each one, but a plurality of objects may be installed if necessary.

FIG. 12 is a diagram for explaining another embodiment of the heat transfer device of the present invention. This aspect shows an application example of the heat transfer device. That is, as shown in FIG. 12, it is a heat transfer device for cooling a plurality of semiconductor elements 47 having different heights. In this aspect, three semiconductor elements 47 having different heights, which are objects to be cooled, are installed on the substrate 46. A heat spreader 51 is attached on the semiconductor element 47. Although not shown, a flow path through which the working fluid in a supercritical pressure state flows is formed inside the heat spreader.
The fluid inlet / outlet port 52 is connected to a fluid driving device (not shown).

That is, the flow passage formed in the heat spreader is a part of the tubular flow passage of the heat transfer device. The working fluid is forcibly circulated in the above-mentioned closed channel by a fluid drive device (not shown). The principle of fluid drive is, for example, the same as that described in the above-described embodiment.

The shape of the flow path formed in the heat spreader is arbitrary, as in the above-described embodiment. For example, it may be one meandering channel, or a plurality of channels may be formed in parallel. The number of semiconductor elements attached to the heat spreader may be one or more. When there are a plurality of semiconductor elements and the heights of the semiconductor elements are different from each other, as shown in FIG. 12, if unevenness corresponding to the height difference of the semiconductor elements is formed on the surface of the heat spreader, individual semiconductors can be formed. Sufficient thermal contact is obtained with the device.

If necessary, the heat spreader may be fixed to the substrate by screwing or the like. As the cooling means, a Peltier element, a radiation fin or the like can be used.

FIG. 13 is a view for explaining one mode of a tube type pump as a fluid driving device of the heat transfer device of the present invention. As shown in FIG. 13, the fluid drive device includes an expandable tube into which a working fluid is introduced, and a rotor with a protrusion that moves the working fluid introduced into the tube in one direction in a housing. It is equipped with a tube pump. FIG. 13A is a side view of the tube pump. FIG. 13B is a top view of the tube pump. FIG. 13C is a sectional view taken along the line AA of FIG.

As shown in FIGS. 13 (a) and 13 (b),
The tube type pump 61 is composed of a casing 62 having tubular flow paths 66 and 67, and a motor 68 is provided at the center. That is, as shown in FIG.
Inside, there is provided a rotor 63 with a protrusion in the center and a tube 64 that can expand and contract along the inner circumference of the housing. The working fluid introduced into the tube 64 from the tubular flow path inlet 66 is
It is sandwiched between the protruding portion 65 of the rotating rotor 63 and the inner peripheral portion of the casing, and moves along the inner periphery of the casing so that it is so-called squeezed and moves from the tubular channel outlet 67 to the outside of the tubular pump. Move to.

The above-mentioned tube type pump is, for example, a tubular channel 2 shown in FIG. 1 in which the object to be cooled 4 and the cooling means 5 are thermally connected, and the tubular channel 2 connected to the tubular channel 2. It can be used as a fluid driving device 3 that forms a closed loop together with and drives the enclosed working fluid to circulate in the closed loop. In this case, the working fluid that has moved to the outside of the tube pump described above moves inside the formed closed loop. For example, even if the tube itself has no pressure resistance, it is pressed by the inner peripheral portion of the housing and the rotor, so that the tube does not burst even if the working fluid in the supercritical pressure state is introduced into the tube. Further, as described above, since the protrusion of the rotor is composed of a roller,
Even if the tube is pressed against the inner peripheral portion of the housing by the protrusion, the tube is not worn.

FIG. 14 is a view for explaining one mode of a magnet drive type fan as a fluid drive device of the heat transfer device of the present invention. As shown in FIG. 14, the fluid drive device includes a working fluid inlet and an outlet connected to the tubular flow path, and a fan portion having a wing portion that rotates therein, and a wing portion of the fan portion driven by a magnetic force. And a magnetic drive fan. 14
(A) is a top view of a magnet drive type fan. FIG. 14B is a diagram illustrating the inside of the magnet drive type fan. FIG. 14C is a side view of the magnet drive type fan. FIG. 14D is a diagram illustrating a drive unit of the magnet drive type fan.

As shown in FIGS. 14 (a) and 14 (c),
The magnet drive type fan 71 includes a working fluid inlet 72 and an outlet 73 connected to a tubular flow path, a fan portion 74 having a wing portion that rotates therein, and a drive that magnetically drives the wing portion of the fan portion. And a section 75. Figure 1
As shown in FIG. 4B, a sirocco fan, for example, is attached to the inside of the fan portion 74, and the working fluid inlet 72 is provided.
The working fluid guided to the fan portion from the working fluid moves in the rotation direction by the rotation of the blade portion 76 and is discharged from the working fluid outlet 73 to the outside of the fan. As described above, the working fluid is introduced into the fan portion from the upper center of the fan portion by the rotation of the blade portion. At least a part of the wing portion is made of a magnet or a magnetic material.

A magnet 77, which is rotated by a motor or the like, is attached to the drive unit 75 which drives the vanes of the fan unit. That is, the drive unit has a structure for rotating the vanes of the fan unit by rotating the magnet along the lower surface of the fan unit. That is, the vanes of the fan unit rotate by being guided by the rotating magnet, functioning as a fan and moving the working fluid. The magnet drive type fan described above also includes, for example, the tubular flow path 2 to which the object to be cooled 4 and the cooling means 5 are thermally connected, and the tubular flow path 2 shown in FIG.
Can be used as a fluid driving device 3 that forms a closed loop together with the tubular flow path and drives the enclosed working fluid to circulate in the closed loop.

FIG. 15 is a diagram for explaining another embodiment of the heat transfer device of the present invention. That is, the embodiment shown in FIG. 15 includes a fluid drive device that is connected to the tubular flow passage to form a closed flow passage together with the tubular flow passage, and moves the enclosed working fluid in the closed flow passage. The fluid driving device is composed of an oscillating pump, and a pump is used to move the working fluid in the closed flow path. That is, as shown in FIG. 15 (a), the heat transfer device 80 includes a tubular flow passage 81 to which an object to be cooled (eg CPU) 86 and cooling means (eg fins) 85 are thermally connected, and a tubular flow passage. And a fluid drive device 82 that is connected to 81 to form a closed flow path together with the tubular flow path and drives the enclosed working fluid to move in the closed flow path. The fluid driving device 82 is a vibration type pump having two working fluid inlets / outlets 88. The tubular flow path is made of, for example, a pipe made of aluminum or copper. As the working fluid, for example, carbon dioxide (C
O ₂ ) is in a supercritical pressure state (temperature 31 ° C or higher, pressure 7.4M)
(Pa or more).

The vibrating pump is, for example, a pipe-shaped object having two working fluid inlets and outlets, in which a cylinder made of a magnetic material such as iron is arranged, and a magnet is arranged outside the cylinder. There is. By guiding the cylinder with a magnet and moving it left and right, carbon dioxide (CO ₂ ) enclosed in the tubular flow path as a working fluid in a supercritical pressure state
Moves back and forth between the CPU and fins. The vibration pump also serves as a joint for forming a loop.

As shown in FIG. 15B, the magnet 84 is set to A
By moving in the direction A, the cylinder 83 is guided in the direction A, and the cold carbon dioxide (CO ₂ ) cooled by the cooling means 85 is cooled by the object 86 to be cooled as indicated by A1.
And the object 86 to be cooled is cooled. At the same time, carbon dioxide (C
O ₂ ) moves toward the cooling means 85 and is cooled by the cooling means 85, as indicated by A2.

Further, as shown in FIG. 15 (c), the magnet 8
By moving 4 in the direction of B, the cylinder 83 is guided in the direction of B, and the cold carbon dioxide (CO ₂ ) cooled by the cooling means 85 moves toward the object to be cooled 86 as shown in B2. Then, the object 86 to be cooled is cooled.
At the same time, carbon dioxide (C
O ₂ ) moves toward the cooling means 85 and is cooled by the cooling means 85, as indicated by B1. The mode shown in FIG. 15 can be applied to, for example, cooling a CPU in a personal computer (PC).

FIG. 16 is a diagram for explaining another embodiment of the heat transfer device of the present invention. That is, the embodiment shown in FIG. 16 includes a fluid drive device that is connected to the tubular flow path to form a closed flow path together with the tubular flow path and moves the enclosed working fluid in the closed flow path. In this aspect,
The tubular flow passage does not form a closed loop, and one fluid drive device is provided at one end of the tubular flow passage and another fluid drive device is provided at the other end of the tubular flow passage. In this aspect, the fluid drive device is composed of two vibration type pumps, and the pump is used to move the working fluid in the closed flow path. That is, as shown in FIG. 16A, the heat transfer device 90
Is a tubular flow path 91 to which an object to be cooled (for example, CPU) 96 and cooling means (for example, fins) 95 are thermally connected,
Fluid drive devices 92a and 9a that are connected to both ends of the tubular flow passage 91 to form a closed flow passage together with the tubular flow passage and drive the enclosed working fluid to move in the closed flow passage.
2b and. The fluid drive devices 92a and 92b are
Each of them is a vibration type pump having one working fluid inlet / outlet port 98. The tubular flow path is made of, for example, a pipe made of aluminum or copper. As the working fluid, for example, carbon dioxide (CO ₂ ) is enclosed in a supercritical pressure state (temperature 31 ° C. or higher, pressure 7.4 MPa or higher).

The vibrating pump is, for example, a pipe-shaped object having one working fluid inlet / outlet port, in which a cylinder made of a magnetic material such as iron is arranged, and a magnet is arranged outside the cylinder. ing. By guiding the cylinder with a magnet and moving it left and right, in the tubular flow path,
Carbon dioxide (CO ₂ ) enclosed in a supercritical pressure state as a working fluid reciprocates between the CPU section and the fin section.

As shown in FIG. 19B, the magnets 94a,
By moving 94b in the direction of C, the cylinder 9
3a and 93b are guided in the C direction, and the cold carbon dioxide (CO ₂ ) cooled by the cooling means 95 moves toward the object to be cooled 96, as indicated by C1, and the object to be cooled 9 is cooled.
Cool 6 At the same time, the carbon dioxide (CO ₂ ) heated by the object to be cooled 96 is cooled by the cooling means 9 as indicated by C2.
5 and is cooled by the cooling means 95.

Further, as shown in FIG. 16 (c), the magnet 9
Cylinders 93a and 93b are guided in the D direction by moving 4a and 94b in the D direction, and the cooling means 95
Cold carbon dioxide (CO ₂ ) cooled by D2
As shown in, the object to be cooled 96 is moved to cool the object to be cooled 96. At the same time, carbon dioxide (CO ₂ ) heated by the object to be cooled 96 moves toward the cooling means 95 and is cooled by the cooling means 95, as indicated by D1. As described above, the two magnets 94a and 94b move in the same direction. The embodiment shown in FIG. 16 can be applied to, for example, cooling a CPU in a personal computer (PC).

[0066]

According to the present invention, the working fluid in a supercritical pressure state is forcibly circulated by the external driving force, so that heat is effectively transmitted regardless of the relative positional relationship between the heat absorbing portion and the heat radiating portion. It is possible to provide a heat transfer device capable of

[Brief description of drawings]

FIG. 1 is a diagram illustrating one embodiment of a heat transfer device of the present invention.

FIG. 2 is a diagram illustrating a pump as a fluid drive device.

FIG. 3 is a diagram illustrating a pump as a fluid drive device.

FIG. 4 is a diagram illustrating a pump as a fluid drive device.

FIG. 5 is a diagram showing one mode of a cooling unit (object to be cooled).

FIG. 6 is a diagram showing one mode of a cooling unit (object to be cooled).

FIG. 7 is a diagram showing a mode in which the fluid drive device is composed of a fan unit.

FIG. 8 is a diagram illustrating details of an internal fan.

FIG. 9 is a diagram illustrating details of an internal fan.

FIG. 10 is a diagram illustrating one aspect of the heat transfer device of the present invention.

FIG. 11 is a diagram for explaining one aspect of the heat transfer device of the present invention.

FIG. 12 is a diagram illustrating another aspect of the heat transfer device of the present invention.

FIG. 13 is a diagram for explaining one mode of a tube type pump as a fluid drive device of the heat transfer device of the present invention.

FIG. 14 is a diagram illustrating one mode of a magnet drive type fan as a fluid drive device of the heat transfer device of the present invention.

FIG. 15 is a diagram illustrating another aspect of the heat transfer device of the present invention.

FIG. 16 is a diagram illustrating another aspect of the heat transfer device of the present invention.

[Explanation of symbols]

1. Heat transfer device 2. Tubular flow path 3. Fluid drive 4. Cooling means 5. Object to be cooled 6. Working fluid suction port 7. Working fluid outlet 8. piston 10. First valve 11. Second valve 12. Tubular flow path 13. Working fluid 14. Joint 21. Heat transfer device 22. Tubular flow path 23. Fan unit 24. Cooling means 25. Object to be cooled 26. Internal fins 27. magnet 28. Magnetic material 29. electromagnet 31. Heat transfer device 32. Tubular flow path 33. External drive 34. Cooling means 35. Object to be cooled 41. Heat transfer device 42. Tubular flow path 43. External drive 44. Cooling means 45. Object to be cooled 46. substrate 47. Semiconductor element 51. Heat spreader 52. Tubular flow path (fluid inlet / outlet) 61. Tube pump 62. Case 63. Tubular flow path 64. tube 65. protrusion 66. Tubular channel inlet 67. Tubular flow path outlet 68. motor 71 ・ Magnet drive type fan 72. Working fluid inlet 73. Working fluid outlet 74. Fan section 75. Drive part 76. Habe 77. magnet 80. Heat transfer device 81. Tubular flow path 82. Fluid drive 83. Cylinder 84. magnet 85. Cooling means 86. Object to be cooled 88. Working fluid inlet / outlet 90. Heat transfer device 91. Tubular flow path 92a, 92b. Fluid drive 93a, 93b. Cylinder 94a, 94b. magnet 95. Cooling means 96. Object to be cooled 98. Working fluid inlet / outlet

Continued front page    (72) Inventor Naohito             2-6-1, Marunouchi, Chiyoda-ku, Tokyo             Kawa Electric Industry Co., Ltd. F term (reference) 3L044 AA04 BA05 BA06 CA01 DD03                       EA01 FA02 FA04 GA02 KA04                       KA05

Claims (7)

[Claims] 1. A working fluid enclosed inside is thermally connected to an object to be cooled and a cooling means, and at least the working fluid existing in a region where the object to be cooled is thermally connected is at a supercritical pressure. A tubular flow path in a state, and a fluid drive device that is connected to the tubular flow path to form a closed flow path together with the tubular flow path and moves the enclosed working fluid in the closed flow path. Heat transfer device. 2. The heat transfer device according to claim 1, wherein the fluid driving device comprises a piston type pump having two working fluid inlets and outlets. 3. The heat transfer device according to claim 2, wherein valves that can be opened and closed are provided at the two inlets and outlets of the working fluid. 4. The heat transfer device according to claim 3, wherein one of the valves provided at the two working fluid inlet / outlet ports is closed and the other is opened as the piston moves up and down. 5. The working fluid enclosed inside, the object to be cooled and the cooling means are thermally connected, and all of the working fluid,
Alternatively, at least the working fluid present in the region to which the object to be cooled is thermally connected is in a supercritical pressure state, a tubular flow path that forms a closed flow path by itself, and the working fluid enclosed An external drive device that works to move the working fluid in the closed flow path. 6. The heat transfer device according to claim 5, wherein the working fluid is a magnetic fluid or a dielectric fluid, and the external driving device uses a magnetic field or an electric field. 7. The heat transfer device according to claim 1, wherein the main component of the working fluid is carbon dioxide.