JP2003222710A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2003222710A5 JP2003222710A5 JP2002353510A JP2002353510A JP2003222710A5 JP 2003222710 A5 JP2003222710 A5 JP 2003222710A5 JP 2002353510 A JP2002353510 A JP 2002353510A JP 2002353510 A JP2002353510 A JP 2002353510A JP 2003222710 A5 JP2003222710 A5 JP 2003222710A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP01129780.1 | 2001-12-14 | ||
| EP01129780A EP1223456B1 (en) | 2001-12-14 | 2001-12-14 | Low polarisation dependent loss beam splitter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003222710A JP2003222710A (ja) | 2003-08-08 |
| JP2003222710A5 true JP2003222710A5 (enExample) | 2006-01-26 |
Family
ID=8179538
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002353510A Withdrawn JP2003222710A (ja) | 2001-12-14 | 2002-12-05 | 低ｐｄｌビームスプリッタ |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6847486B2 (enExample) |
| EP (1) | EP1223456B1 (enExample) |
| JP (1) | JP2003222710A (enExample) |
| DE (1) | DE60101364T2 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI447511B (zh) * | 2010-11-12 | 2014-08-01 | Asia Optical Co Inc | Projector light source module |
| JP2012156536A (ja) * | 2012-03-28 | 2012-08-16 | Nikon Corp | 照明光学装置、露光装置および露光方法 |
| JP5644921B2 (ja) * | 2013-09-09 | 2014-12-24 | 株式会社ニコン | 照明光学装置 |
| JP5761329B2 (ja) * | 2013-12-27 | 2015-08-12 | 株式会社ニコン | 照明光学装置、露光装置および露光方法 |
| JP5928632B2 (ja) * | 2015-04-03 | 2016-06-01 | 株式会社ニコン | 照明光学装置、露光装置および露光方法 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3741625A (en) * | 1971-06-21 | 1973-06-26 | Bell Telephone Labor Inc | Polarization-insensitive millimeter-wave directional coupler |
| US4492436A (en) * | 1983-01-03 | 1985-01-08 | At&T Bell Laboratories | Polarization independent beam splitter |
| US5699187A (en) * | 1992-06-19 | 1997-12-16 | Fujitsu Limited | Optical coupler |
| US5740288A (en) * | 1995-02-22 | 1998-04-14 | E-Tek Dynamics, Inc. | Variable polarization beam splitter, combiner and mixer |
| JP2774467B2 (ja) * | 1995-08-14 | 1998-07-09 | 彰二郎 川上 | 偏波無依存型光アイソレータ装置 |
| AUPN714295A0 (en) * | 1995-12-14 | 1996-01-11 | Photonic Technologies Pty Ltd | Fibre optic circulator |
| JP2897746B2 (ja) * | 1997-01-28 | 1999-05-31 | 日本電気株式会社 | 波長可変フィルタ |
| US6016216A (en) * | 1997-05-17 | 2000-01-18 | Aurora Photonics, Inc. | Polarization-independent acousto-optic tunable filter |
| US6441934B1 (en) * | 1998-02-13 | 2002-08-27 | Apa Optics, Inc. | Multiplexer and demultiplexer for single mode optical fiber communication links |
| US6647209B1 (en) * | 1998-02-13 | 2003-11-11 | Apa Optics, Inc. | Multiplexer and demultiplexer for single mode optical fiber communication links |
| EP1200861A2 (en) * | 1999-07-29 | 2002-05-02 | Apa Optics, Inc. | Polarization-independent, dense wavelength division multiplexer (dwdm) |
| US6430323B1 (en) * | 1999-10-20 | 2002-08-06 | Micro-Optics, Inc. | Polarization maintaining optical isolators |
| US6339661B1 (en) * | 1999-10-20 | 2002-01-15 | Micro-Optics, Inc. | Polarization maintaining fiber optic circulators |
| US20020118904A1 (en) * | 2001-02-27 | 2002-08-29 | Agere Systems | Optical fiber systems for transmitting laser light with reduced back reflection interference |
| US6631238B2 (en) * | 2001-03-16 | 2003-10-07 | Primanex Corporation | Variable optical attenuator |
-
2001
- 2001-12-14 DE DE60101364T patent/DE60101364T2/de not_active Expired - Fee Related
- 2001-12-14 EP EP01129780A patent/EP1223456B1/en not_active Expired - Lifetime
-
2002
- 2002-05-28 US US10/156,340 patent/US6847486B2/en not_active Expired - Fee Related
- 2002-12-05 JP JP2002353510A patent/JP2003222710A/ja not_active Withdrawn