JP2003222132A5 - - Google Patents
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- Publication number
- JP2003222132A5 JP2003222132A5 JP2002023747A JP2002023747A JP2003222132A5 JP 2003222132 A5 JP2003222132 A5 JP 2003222132A5 JP 2002023747 A JP2002023747 A JP 2002023747A JP 2002023747 A JP2002023747 A JP 2002023747A JP 2003222132 A5 JP2003222132 A5 JP 2003222132A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002023747A JP4031252B2 (ja) | 2002-01-31 | 2002-01-31 | 排気装置及びその制御方法並びに真空内静圧軸受 |
US10/351,992 US7284906B2 (en) | 2002-01-31 | 2003-01-28 | Exhaust apparatus and control method for same, and vacuum-use hydrostatic bearing |
EP03250578.6A EP1333187B1 (en) | 2002-01-31 | 2003-01-30 | Exhaust apparatus with control means for a multistage labyrinth seal of a hydrostatic bearing used in vacuum |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002023747A JP4031252B2 (ja) | 2002-01-31 | 2002-01-31 | 排気装置及びその制御方法並びに真空内静圧軸受 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2003222132A JP2003222132A (ja) | 2003-08-08 |
JP2003222132A5 true JP2003222132A5 (ja) | 2007-02-15 |
JP4031252B2 JP4031252B2 (ja) | 2008-01-09 |
Family
ID=19192252
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002023747A Expired - Lifetime JP4031252B2 (ja) | 2002-01-31 | 2002-01-31 | 排気装置及びその制御方法並びに真空内静圧軸受 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7284906B2 (ja) |
EP (1) | EP1333187B1 (ja) |
JP (1) | JP4031252B2 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005155658A (ja) * | 2003-11-20 | 2005-06-16 | Canon Inc | 静圧気体軸受装置およびそれを用いたステージ装置 |
US7650915B2 (en) * | 2004-02-19 | 2010-01-26 | Hul-Chun Hsu | Method for removing vapor within heat pipe |
JP4445528B2 (ja) * | 2007-07-11 | 2010-04-07 | 住友重機械工業株式会社 | 静圧軸受 |
JP2011023427A (ja) * | 2009-07-13 | 2011-02-03 | Canon Inc | 減圧装置、加圧装置、露光装置、デバイス製造方法 |
US9360118B2 (en) * | 2011-02-03 | 2016-06-07 | Eagle Industry Co., Ltd. | Magnetic fluid seal |
CN114607701A (zh) * | 2015-03-31 | 2022-06-10 | 住友重机械工业株式会社 | 致动器 |
CN110513394A (zh) * | 2019-08-26 | 2019-11-29 | 清华大学 | 一种真空气浮轴承及其性能检测装置和检测方法 |
CN113790270B (zh) * | 2021-09-29 | 2022-04-26 | 北京交通大学 | 一种嵌入型套筒式磁性液体密封装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2514051C3 (de) * | 1975-03-29 | 1982-03-18 | Kollmorgen Technologies Corp., 75201 Dallas, Tex. | Luftlager |
US4118042A (en) * | 1977-09-27 | 1978-10-03 | The United States Of America As Represented By The United States Department Of Energy | Air bearing vacuum seal assembly |
US4726689A (en) * | 1986-10-22 | 1988-02-23 | Eclipse Ion Technology, Inc. | Linear gas bearing with integral vacuum seal for use in serial process ion implantation equipment |
JP2826756B2 (ja) * | 1990-01-17 | 1998-11-18 | キヤノン株式会社 | ステージエア供給・回収装置 |
ATE302356T1 (de) * | 1998-06-17 | 2005-09-15 | Nikon Corp | Statischdrucklager,dieses verwendende einrichtung und optisches gerät versehen mit solch einer einrichtung |
EP1052552A3 (en) * | 1999-04-19 | 2003-03-12 | ASML Netherlands B.V. | Gas bearings for use with vacuum chambers and their application in lithographic projection apparatus |
NL1015738C2 (nl) * | 1999-07-28 | 2002-10-15 | Kyocera Corp | Schuifapparaat en bijbehorend platformmechanisme voor gebruik in vacu³m. |
JP2001074051A (ja) * | 1999-09-08 | 2001-03-23 | Nikon Corp | 真空用エアベアリングインターロック |
US7134668B2 (en) * | 2001-10-24 | 2006-11-14 | Ebara Corporation | Differential pumping seal apparatus |
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2002
- 2002-01-31 JP JP2002023747A patent/JP4031252B2/ja not_active Expired - Lifetime
-
2003
- 2003-01-28 US US10/351,992 patent/US7284906B2/en active Active
- 2003-01-30 EP EP03250578.6A patent/EP1333187B1/en not_active Expired - Lifetime