JP2003222132A5 - - Google Patents

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Publication number
JP2003222132A5
JP2003222132A5 JP2002023747A JP2002023747A JP2003222132A5 JP 2003222132 A5 JP2003222132 A5 JP 2003222132A5 JP 2002023747 A JP2002023747 A JP 2002023747A JP 2002023747 A JP2002023747 A JP 2002023747A JP 2003222132 A5 JP2003222132 A5 JP 2003222132A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002023747A
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JP2003222132A (ja
JP4031252B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2002023747A priority Critical patent/JP4031252B2/ja
Priority claimed from JP2002023747A external-priority patent/JP4031252B2/ja
Priority to US10/351,992 priority patent/US7284906B2/en
Priority to EP03250578.6A priority patent/EP1333187B1/en
Publication of JP2003222132A publication Critical patent/JP2003222132A/ja
Publication of JP2003222132A5 publication Critical patent/JP2003222132A5/ja
Application granted granted Critical
Publication of JP4031252B2 publication Critical patent/JP4031252B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2002023747A 2002-01-31 2002-01-31 排気装置及びその制御方法並びに真空内静圧軸受 Expired - Lifetime JP4031252B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2002023747A JP4031252B2 (ja) 2002-01-31 2002-01-31 排気装置及びその制御方法並びに真空内静圧軸受
US10/351,992 US7284906B2 (en) 2002-01-31 2003-01-28 Exhaust apparatus and control method for same, and vacuum-use hydrostatic bearing
EP03250578.6A EP1333187B1 (en) 2002-01-31 2003-01-30 Exhaust apparatus with control means for a multistage labyrinth seal of a hydrostatic bearing used in vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002023747A JP4031252B2 (ja) 2002-01-31 2002-01-31 排気装置及びその制御方法並びに真空内静圧軸受

Publications (3)

Publication Number Publication Date
JP2003222132A JP2003222132A (ja) 2003-08-08
JP2003222132A5 true JP2003222132A5 (ja) 2007-02-15
JP4031252B2 JP4031252B2 (ja) 2008-01-09

Family

ID=19192252

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002023747A Expired - Lifetime JP4031252B2 (ja) 2002-01-31 2002-01-31 排気装置及びその制御方法並びに真空内静圧軸受

Country Status (3)

Country Link
US (1) US7284906B2 (ja)
EP (1) EP1333187B1 (ja)
JP (1) JP4031252B2 (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005155658A (ja) * 2003-11-20 2005-06-16 Canon Inc 静圧気体軸受装置およびそれを用いたステージ装置
US7650915B2 (en) * 2004-02-19 2010-01-26 Hul-Chun Hsu Method for removing vapor within heat pipe
JP4445528B2 (ja) * 2007-07-11 2010-04-07 住友重機械工業株式会社 静圧軸受
JP2011023427A (ja) * 2009-07-13 2011-02-03 Canon Inc 減圧装置、加圧装置、露光装置、デバイス製造方法
US9360118B2 (en) * 2011-02-03 2016-06-07 Eagle Industry Co., Ltd. Magnetic fluid seal
CN114607701A (zh) * 2015-03-31 2022-06-10 住友重机械工业株式会社 致动器
CN110513394A (zh) * 2019-08-26 2019-11-29 清华大学 一种真空气浮轴承及其性能检测装置和检测方法
CN113790270B (zh) * 2021-09-29 2022-04-26 北京交通大学 一种嵌入型套筒式磁性液体密封装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2514051C3 (de) * 1975-03-29 1982-03-18 Kollmorgen Technologies Corp., 75201 Dallas, Tex. Luftlager
US4118042A (en) * 1977-09-27 1978-10-03 The United States Of America As Represented By The United States Department Of Energy Air bearing vacuum seal assembly
US4726689A (en) * 1986-10-22 1988-02-23 Eclipse Ion Technology, Inc. Linear gas bearing with integral vacuum seal for use in serial process ion implantation equipment
JP2826756B2 (ja) * 1990-01-17 1998-11-18 キヤノン株式会社 ステージエア供給・回収装置
ATE302356T1 (de) * 1998-06-17 2005-09-15 Nikon Corp Statischdrucklager,dieses verwendende einrichtung und optisches gerät versehen mit solch einer einrichtung
EP1052552A3 (en) * 1999-04-19 2003-03-12 ASML Netherlands B.V. Gas bearings for use with vacuum chambers and their application in lithographic projection apparatus
NL1015738C2 (nl) * 1999-07-28 2002-10-15 Kyocera Corp Schuifapparaat en bijbehorend platformmechanisme voor gebruik in vacu³m.
JP2001074051A (ja) * 1999-09-08 2001-03-23 Nikon Corp 真空用エアベアリングインターロック
US7134668B2 (en) * 2001-10-24 2006-11-14 Ebara Corporation Differential pumping seal apparatus

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