JP2003199318A - Cooling tube and linear motor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To manufacture a lightweight cooling tube having high accuracy and restrain viscosity resistance. <P>SOLUTION: This cooling tube includes a coil body 1 installed on one of two members relatively traveling and a magnetism emitting body 5 installed on the other member 2. This cooling tube is also fitted with a tube body 6, which surrounds the periphery of the coil body 1 and forms a flow passage 7 for temperature control medium 11 in a space between the coil body 1. The tube body 6 is formed out of fiber reinforced plastic. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cooling pipe for cooling a heating element and a linear motor for moving two members relative to each other, and particularly to a device such as a semiconductor exposure device or a liquid crystal exposure device having severe temperature control. The present invention relates to a cooling pipe and a linear motor suitable for use in.

[0002]

2. Description of the Related Art Conventionally, a rotary motor has been often used as an actuator for various stage devices for moving a mounted object. However, when the rotary motor is used as a linear motion mechanism, the rotary motion of the motor is converted into a linear motion. Requires a ball screw, etc. However, since the ball screw has backlash, the use of the ball screw causes a problem in the stage position controllability. In addition, when the stroke for moving the stage becomes long, resonance generated in the ball screw becomes a new problem. Further, when the ball screw is used for a long period of time, in addition to the fact that the lubricant needs to be replenished, peeling and friction occur on the ball screw, and the ball screw itself must be replaced.

Therefore, in recent years, a linear motor has been put into practical use in place of the rotary motor. Since a linear motor is driven in a non-contact manner, friction does not occur, a driving force transmission mechanism such as a coupling is not required, and it has excellent position controllability. The transformation of is going on.

Conventionally, there are various forms of this type of linear motor, but as a two-phase linear motor, for example, FIG.
Those shown in (a) to (c) are known. The linear motor shown in this figure mainly includes an armature (coil assembly, coil body) 1 as a stator, and a magnet unit 2 as a mover that moves relative to the stator. The magnet unit 2 has a structure in which magnets (magnetizers) 5 and 5 are opposed to each other in a frame 2a having a square cross section, and a plurality of rows are arranged in the thrust direction (left and right direction in FIG. 8A). The coil assembly 1 is disposed between the magnets 5 and 5 facing each other. In addition, in the example shown in this figure, the coil assembly 91 is hardened with resin, but may have another configuration.

9 (a) to 9 (c) show another configuration of the linear motor. In this linear motor, the coil is formed in a U-shape in cross section (see FIG. 9B), and the coil assembly 3 is configured by combining these plural coils. In this form, although it is necessary to bend the coil in a U-shape, it is possible to spread the coil in a direction perpendicular to the thrust force, which is advantageous in that the efficiency is high.

10 (a) to 10 (c), the coil is bent in a U shape similarly to the coil assembly shown in FIG. 9, but is further bent one more step to form a substantially H shape. For example: Compared with the linear motor shown in FIG. 9, this coil assembly 4 has similar efficiency, and since the coil is formed in a substantially H shape, the distance between the magnets 5 and 5 can be shortened. Therefore, the thickness in the vicinity of the so-called ineffective coil portion can be reduced.

On the other hand, in the precision positioning stage,
In recent years, there has been a strong demand for improving the positioning accuracy, and therefore, the ambient heat source has been thoroughly removed. This is because the presence of the heat source may cause the structural member to be deformed due to heat and may reduce the accuracy of the length measuring device. Since the linear motor is one of the heat sources in such applications, cooling is performed by, for example, surrounding the coil assembly with a cooling pipe (tubular body) and flowing a refrigerant in a flow path between the cooling pipe and the coil assembly. For example, a configuration that does not induce deterioration of the stage performance due to heat, such as performing, is being studied.

An example of this type of linear motor is shown in FIG.
It shows in (a)-(c). The linear motor shown in this figure
It is composed of a magnet unit 2, a coil assembly 1, and a hollow rectangular parallelepiped cooling pipe (tubular body) 6 that surrounds the periphery of the coil assembly 1. Shafts 8 are provided at both ends in the length direction of the coil assembly 1 so as to form a flow path 7 between the coil assembly 1 and the cooling pipe 6.

A cooling liquid (refrigerant) such as Fluorinert is sent from one end surface of the stator to the flow path 7 and discharged from the other end surface to cool the coil assembly 1. As the material of the cooling pipe 6, stainless steel is adopted here. The inlet and outlet of the cooling liquid are not limited to those arranged on the end faces, and may be arranged on the side faces, for example.

Further, the coil assembly 4 shown in FIG.
FIG. 12 shows an example of a linear motor in which the cooling pipe 6 surrounds the circumference of
It shows in (a)-(c). As shown in this figure, the cooling pipe 6
The cross-sectional shape of is corresponding to the cross-sectional shape of the coil assembly 4 and is formed in a substantially H shape. Also in this case, the cooling pipe 6 is made of stainless steel.

In the above example, the magnet unit 2 has the frame 2a having a square cross section, but FIG.
As shown in FIG. 5, the linear motor can be configured to have a U-shaped cross section, but the attraction force between the magnets 5 and 5 reduces the distance between the magnets on the opening side, so that the magnets 5 are cooled. The square shape described above is preferable because it may come into contact with.

Here, a brief description will be given of a method of manufacturing the cooling pipe 6 shown in FIG. 11 among the cooling pipes 6 described above. Stainless steel arranged on one side of the coil assembly 1 shown in FIG. Spacers 6 are provided on both widthwise edges of the plate 6a.
b and 6b are fixed with mounting screws or the like (see FIG. 14B), and further, the stainless steel plate 6c arranged on the other surface side is fixed to the spacers 6b and 6b (see FIG. 14C). Thereby, the flow path 7 is formed between the cooling pipe 6 and the coil assembly 1, and the flow path 7 can be filled with the cooling liquid (see FIG. 14D).

However, in this manufacturing method, the spacer 6
Since the width of the cooling pipe 6 is increased by the width of b, the width of the magnet unit 2 is also increased as a result, the magnet unit 2 is easily deformed by the attraction force of the magnets 5 and 5, and the magnet unit 2 and the cooling pipe 6 are There is a problem that they come into contact with each other. Therefore, in such a case, the stainless steel plate 6a shown in FIG. 15 (a) is bent at both ends (see FIG. 15 (b)) to form a U-shape, and the pair of bent stainless steel plates 6 is formed.
The square-shaped cooling pipe 6 is formed by welding the end faces of a and 6a (see FIG. 15C). Then, if the coil assembly 1 is inserted into the cooling pipe 6 (see FIG. 15).
(See (d)), the width of the cooling pipe 6 becomes smaller, and the magnets 5, 5
It is possible to suppress the deformation of the magnet unit 2 due to the attraction force.

The cooling pipe 6 shown in FIGS. 12 and 13 is also provided.
As a method of manufacturing the same, the both ends of the stainless plate 6a having the recess shown in FIG. 16 (a) are bent (FIG. 16 (b)).
(See FIG. 16C) By welding a pair of stainless steel plates 6a, 6a, which are formed in a U shape and bent, at their end faces, the cooling pipe 6 having a U shape can be formed (see FIG. 16C).
In addition, as another manufacturing method, as shown in FIG. 17A, a pair of cut blocks is formed by cutting the both sides of a stainless block plate 6d to form recesses (see FIG. 17B). By welding the plates 6d, 6d to each other at their end faces, as shown in FIG. 17 (c), it is possible to form a square-shaped cooling pipe 6 having a recess.

[0015]

However, the conventional cooling pipe and linear motor as described above have the following problems. When the mover moves and the magnetic flux density with respect to the cooling pipe changes, an eddy current is generated in the cooling pipe with a value that is approximately inversely proportional to the electric resistance value of the cooling pipe. As described above, since the cooling pipe is made of a conductive material and has a low electric resistance value, a large eddy current is generated in the cooling pipe. As a result, the moving direction of the mover is changed according to the value of the eddy current. There was a problem that a large thrust, so-called viscous resistance, was generated in the opposite direction.

As the metal used for the cooling pipe, iron and aluminum materials can be considered in addition to the above-mentioned stainless steel from the viewpoint of cost and workability. However, since aluminum material has a small electric resistance value, it has viscous resistance like stainless steel. In addition, in the case of iron material, in addition to the magnitude of viscous resistance, it is attracted to the magnet of the mover, so there is a problem that workability during assembly is very poor. I couldn't say.

When manufacturing a cooling pipe using a metal, a bent stainless steel plate is welded as described above. However, the bending work is difficult when the plate thickness is large, and the cutting work is costly. Will rise significantly. In particular, in the case of a thin plate, there is a high possibility that the stainless plate will be deformed by the heat during cutting and it is difficult to put it into practical use. Furthermore, since heat is applied to the stainless steel plate during the welding process, the cooling pipe after the process is twisted, and it is difficult to maintain the dimensional tolerance. Further, stainless steel has a large specific gravity, which causes an inconvenience that the weight of the cooling pipe is increased.

Therefore, it is conceivable to use a resin having a low electric resistance value in order to suppress the viscous resistance, maintain the weight and maintain the dimensional accuracy. However, since the resin has a low rigidity, when it is used as a cooling pipe. However, the swelling due to the internal pressure of the cooling liquid is large, and there is a risk of contact with the magnet of the mover, which is not realistic. Further, although it is possible to use ceramics as a material having a low electric resistance value, there are drawbacks that the ceramics are easily chipped and heavy.

The present invention has been made in consideration of the above points, and provides a cooling pipe and a linear motor capable of manufacturing a lightweight cooling pipe with high accuracy and suppressing viscous resistance. With the goal.

[0020]

In order to achieve the above object, the present invention employs the following configurations associated with FIGS. 1 to 7 showing an embodiment. The cooling pipe of the present invention is a cooling pipe for cooling a heating element (1), which includes a tube body (6) surrounding the heating element (1) and forming a flow path (7) for a temperature adjusting medium. (6) is formed of fiber reinforced plastic. Also,
The linear motor of the present invention is a linear motor having a coil body (1) provided on one of two members that move relative to each other and a magnetizing body (5) provided on the other member (2). (1) is provided with a tubular body (6) forming a flow path (7) for a temperature adjusting medium, and the tubular body (6) is formed of fiber reinforced plastic.

Fiber reinforced plastic (FRP; Fibr)
e Reinforced Plastic) has electrical conductivity when carbon fiber or stainless fiber having electrical conductivity is used as the reinforcing fiber, but it has low electrical resistance in the fiber direction. Therefore, the electrical resistance is high in the direction orthogonal to the fiber, and it can be electrically regarded as an insulator in the eddy current path direction. Since the eddy current is generated around the axis of the magnetic flux line, by orienting the FRP in a direction other than around the axis of the magnetic flux line, for example, in a linear shape, the relative movement between the coil body (1) and the magnetic body (5) causes The eddy current generated can be reduced to suppress the viscous resistance. As the fiber used for this FRP, for example, carbon fiber, glass fiber, or aramid fiber can be adopted. Since these FRPs can be easily integrally formed with the tubular body (6) by using the mold and the core, the FRP can be manufactured with high precision to manufacture the highly precise tubular body (6). it can. Further, the density of stainless steel is about 8000 kg / m ³ , whereas the density of FRP (CFRP) having carbon fibers is about 1500 kg.
/ M ³ , and the weight of the tubular body can be suppressed to 1/5 or less.

It should be noted that FRP (CFR having carbon fibers
If the Young's modulus (longitudinal elastic modulus) of P) is 150 GPa or more, the performance is equal to or higher than that of stainless steel or the like, and it is not necessary to change the specifications designed using a metal material, and the manufacturing including the design is performed. It is possible to shorten the number of days required for. Further, 150 GPa or more is preferable in consideration of the deformation of the temperature adjusting medium due to the pressure, and considering that brittleness becomes large, the Young's modulus of FRP is 250 GPa.
The following is desirable.

[0023]

BEST MODE FOR CARRYING OUT THE INVENTION A first embodiment of a cooling pipe and a linear motor of the present invention will be described below with reference to FIGS. 1 and 2. In these figures, the same components as those of FIGS. 8 to 17 shown as a conventional example are designated by the same reference numerals,
The description is omitted.

In this embodiment, the cooling pipe (tube) 6 having a square cross section shown in FIG. 11B is made of carbon fiber reinforced plastic (hereinafter referred to as CFRP). More specifically, this cooling pipe 6 is, as shown in FIG.
A plurality of carbon fibers C ... C that are linearly oriented along one direction
A sheet material (so-called UD material) having a thickness of, for example, about 0.1 mm to 0.3 mm formed by impregnating a synthetic resin P such as an epoxy resin between them, or as shown in FIG.
A plurality of layers of sheet material (so-called cloth material) formed by weaving a plurality of linearly oriented carbon fibers C ... C so as to be orthogonal to each other and impregnating a synthetic resin P such as an epoxy resin between the carbon fibers C ... C. It is formed by laminating over.

Next, the procedure for molding the CFRP as the cooling pipe 6 will be described. As shown in FIG. 2A, the core 9 having the cross-sectional shape on the inner peripheral side of the cooling pipe 6 to be molded is formed on the outer periphery of the core 9. A sheet material (UD material and / or cloth material) formed of CFRP is wound around a plurality of layers, laminated, and shaped into a tube. Here, the number of layers to be laminated is determined based on the strength required for the cooling pipe 6. When a UD material is used, the carbon fibers are laminated so that the orientation directions of the carbon fibers are orthogonal to the orientation directions of the adjacent sheet materials. At least, the strength of the cooling pipe 6 can be made isotropic (uniform) by stacking the sheet materials so that the orientation directions are not biased.

Then, C is placed in the cavity between the pair of molds 10 and 10 having the cross-sectional shape on the outer peripheral side of the cooling pipe 6 to be molded.
The core 9 wound with the FRP sheet material is set, and the sheet material is pressed and heated. As a result, the epoxy resin is solidified and the cooling pipe 6 having a square cross section is formed.

Here, the eddy current generated in the cooling pipe 6 formed of CFRP will be explained. CFRP has conductivity, but this is because the electric resistance is low in the fiber direction and it is orthogonal to the carbon fiber. The electrical resistance is high in the direction of the eddy current, and can be regarded as an electrical insulator in the direction of the eddy current path. Further, since the epoxy resin which is an insulator is interposed between the carbon fibers C and the carbon fibers have a small area even if they come into contact with each other, it becomes difficult for electricity to flow around the axis of the magnetic flux lines. There is. And the eddy current is
Since it occurs around the axis of the magnetic flux line, by orienting the carbon fiber C in a direction other than the axial line of the magnetic flux line, that is, in the present embodiment, linearly oriented, the electric resistance around the axial line of the magnetic flux line increases,
The eddy current generated by the relative movement of the coil assembly 1 and the magnet 5 can be reduced.

[0028] Actually, an experiment was conducted by the above method using the cooling pipe 6 of CFRP formed to the same size as the cooling pipe made of stainless steel, and it was confirmed that the viscous resistance was 1/10 or less. Since it is difficult to directly measure the value of the eddy current, in this experiment, cooling tubes of each material were manufactured, and after the coil assembly 1 was inserted into the cooling tubes as shown in FIG. The open end of the tube is sealed with a predetermined lid, and as shown in FIG. 2C, the cooling liquid 11 as a temperature adjusting medium is filled and combined with the magnet unit 2 to form a linear motor, The viscous resistance generated by this linear motor was measured.

The density of stainless steel is about 8000 kg.
/ M ³ , whereas the density of CFRP is about 1500k
g / m ³ and the weight of the molded cooling pipe is also 1 /
It could be suppressed to 5 or less.

Although the strength, for example, Young's modulus (longitudinal elastic modulus) of CRFP varies depending on the laminated structure, the Young's modulus in the circumferential direction is set to 150 GPa or more, so that a coil designed by using a cooling pipe made of stainless steel is used. Without changing specifications such as the size of the assembly 1 and the magnet unit 2,
As the cooling pipe 6, a CFRP molded product can be applied. Further, as the Young's modulus in the circumferential direction increases, the deformation of the cooling pipe 6 due to the pressure of the cooling liquid 11 filling the flow passage 7 between the cooling pipe 6 and the coil assembly 1 decreases, but the brittleness increases. In consideration of this and the allowable amount of deformation, the Young's modulus in the circumferential direction of CFRP is preferably 250 GPa or less.

As described above, in the cooling pipe and the linear motor of the present embodiment, since the cooling pipe 6 is formed of CFRP, the eddy current generated when the mover is driven can be reduced, and the movable member can be moved. Viscous resistance, which hinders high-precision driving of the child, can be significantly suppressed. Also, CFR
Since P has a lower density than metal materials such as stainless steel, it can be made lighter, and the core 9 and the mold 1 can be made.
If 0 is manufactured accurately, the cooling pipe 6 manufactured accurately
Can be easily obtained.

Moreover, in the present embodiment, the Young's modulus of CFRP is set to 150 GPa or more and 250 GPa or less, so that even a linear motor designed using a metal material does not significantly change the design specifications of CFRP. Since it is possible to switch to a cooling tube made of steel, it is possible to significantly reduce the number of days required for manufacturing, including design.

Further, in this embodiment, since the coil assembly 1 is provided on the stator, the coolant supply pipe and the discharge pipe do not move. Therefore, vibrations due to the movement of these pipes do not occur, and the adverse effect on the drive characteristics of the mover can be eliminated.

FIGS. 3 to 5 are views showing a second embodiment of the cooling pipe and the linear motor of the present invention. In these figures, the same components as those of the first embodiment shown in FIGS. 1 and 2 are designated by the same reference numerals, and the description thereof will be omitted. The difference between the second embodiment and the first embodiment is the shape of the cooling pipe 6 and the laminated structure of the CFRP sheet material.

As shown in FIG. 3A, in the present embodiment, the sheet material formed of CFRP is formed on the outer periphery of the core 9 having the inner peripheral side cross-sectional shape of the cooling pipe 6 shown in FIG. 12B. Is wound over a plurality of layers and laminated to form a tube. Then, as shown in FIG. 3B, after inserting the coil assembly 1 into the cooling pipe 6, the opening end of the cooling pipe 6 is sealed with a predetermined lid, and as shown in FIG. In addition, a linear motor can be configured by filling the cooling liquid 11 and combining it with the magnet unit 2.

Here, the orientation direction of the carbon fibers in the sheet material is set based on the pressure applied from the cooling liquid to the cooling pipe 6. To explain this in detail, FIG. 4A is a deformation distribution diagram of the cooling pipe 6 when the pressure (internal pressure) from the cooling liquid is not applied to the cooling pipe 6, and FIG. FIG. 6 is a deformation distribution diagram of the cooling pipe 6 when the pressure of 1 is applied to the cooling pipe 6. As shown in FIG. 4B, when internal pressure is applied,
The cooling pipe 6 is largely deformed (bent) around the longitudinal axis, and is also deformed in a direction orthogonal to the axial direction although it is smaller than the longitudinal axis.

At this time, if the sheet material of the cooling pipe 6 shown in FIG. 5A is largely deformed around the longitudinal axis,
As shown in (b), the sheet material near the outer peripheral surface is pulled most in the circumferential direction, and the sheet material near the inner peripheral surface is most compressed in the circumferential direction. Therefore, in order to have great rigidity against the large tensile force and compressive force, the sheet material (UD) in which carbon fibers are oriented along the circumferential direction is provided in the layer near the outer peripheral surface and the layer near the inner peripheral surface. Material).

Further, since the deformation also occurs around the axis line in the direction orthogonal to the longitudinal direction, there is a problem in orienting the carbon fibers of all the sheet materials along the circumferential direction. Therefore, in the present embodiment, the UD material or the cloth material in which the carbon fibers are oriented in the direction orthogonal to the circumferential direction is arranged in the intermediate portion between the vicinity of the outer peripheral surface and the vicinity of the inner peripheral surface. As a result, the cooling pipe 6 can have strength in any direction. In other words, in the present embodiment, by arranging the sheet material in an appropriate orientation direction according to the pressure applied to the cooling pipe 6, it is possible to provide the required strength in each direction.

In the above-described embodiment, the cooling pipe 6 has a constant thickness, but the present invention is not limited to this.
6 (a) to 6 (a) to the flat coil assembly 1 shown in FIG. 3 and the substantially H-shaped coil assembly 1 shown in FIG.
As shown in FIG. 7C and FIGS. 7A to 7C, a portion (area) where the coil assembly 1 does not face the magnet 5, that is, a so-called invalid coil portion may be thickened. The cooling pipe 6 having this configuration can be easily molded by changing the shapes of the molds 10 and 10. Thus, by thickening the vicinity of the ineffective coil portion, the stress distribution due to the pressure of the cooling liquid 11 is reduced to 1
It can be reduced to about / 3. Usually, a space is often left in the vicinity of the ineffective coil portion in the magnet unit 2, so that in this configuration, the stress distribution of the cooling pipe 6 can be reduced without securing another space.

In the above embodiment, the linear motor has been described as a two-phase motor, but the present invention is not limited to this and may be a three-phase motor. Furthermore, in the above-described embodiment, the moving magnet type has been described as an example, but the same action and effect can be obtained even with the moving coil type. Regarding the fibers contained in the FRP, glass fibers or aramid fibers may be used instead of carbon fibers.

In the CFRP, an epoxy resin impregnated between carbon fibers may contain a foaming agent.
In this case, since bubbles are formed in the cooling pipe, the heat insulating property can be improved.

The linear motor described above exposes the pattern of the mask while the mask and the substrate are stationary, and the substrate stage in a step-and-repeat type exposure apparatus for sequentially moving the substrate and the mask and the substrate are synchronized with each other. It can be applied not only to a mask stage or a substrate stage in a scanning type exposure apparatus that moves and exposes a mask pattern onto a substrate, but also to various types such as a moving system of a three-dimensional measuring device that three-dimensionally measures the shape of an object. It can be applied to the drive system of the device.

[0043]

As described above, in the cooling pipe according to the first aspect of the present invention, the tubular body forming the flow path of the temperature adjusting medium is made of fiber reinforced plastic. As a result, with this cooling pipe, there is an effect that the pipe body can be manufactured with light weight and high accuracy.

In the cooling pipe according to the second aspect, the fiber-reinforced plastic has carbon fibers. As a result, this cooling pipe has an effect of obtaining a high-strength pipe body.

A cooling pipe according to a third aspect of the present invention has a structure in which a fiber-reinforced plastic has fibers oriented linearly. As a result, this cooling pipe has an effect of obtaining a high-strength pipe body.

A cooling pipe according to a fourth aspect of the present invention has a structure in which a tubular body is formed by laminating a plurality of sheet materials formed of fiber reinforced plastic. As a result, with this cooling pipe, there is an effect that the pipe body can be manufactured with light weight and high accuracy.

In the cooling pipe according to the fifth aspect, the fibers of the sheet material are oriented on the basis of the information on the pressure applied to the pipe body from the temperature adjusting medium. This allows
This cooling pipe has an effect that it is possible to give necessary strength according to the direction of pressure applied to the pipe body.

According to the sixth aspect of the present invention, in the cooling pipe, the sheet material in which the fibers are oriented along the circumferential direction of the tubular body is arranged in the layers near the inner peripheral surface and the outer peripheral surface of the tubular body. There is. As a result, in this cooling pipe, it is possible to provide the pipe body with necessary strength and rigidity even when pressure is applied to the layers near the inner peripheral surface and the outer peripheral surface.

According to a seventh aspect of the present invention, there is provided a linear motor in which a sheet material in which fibers are oriented in a direction substantially orthogonal to a circumferential direction is arranged between a layer near an inner peripheral surface and a layer near an outer peripheral surface. Has become. As a result, in this linear motor, it is possible to provide the tubular body with the required strength even when pressure is applied in a direction substantially orthogonal to the circumferential direction.

In the linear motor according to the eighth aspect, the tubular body forming the flow path of the temperature adjusting medium is made of fiber reinforced plastic. As a result, in this linear motor, viscous resistance, which is an obstacle to high-accuracy driving of the mover, can be significantly suppressed, and a lightweight and accurate pipe body can be manufactured.

In the linear motor according to the ninth aspect, the thickness of the tubular body in the region where the coil body and the magnetic body do not face each other is larger than the thickness in the region where the coil body and the magnetic body face each other. . As a result, in this linear motor, the effect that the stress distribution of the tubular body can be reduced without securing a separate space is obtained.

In the linear motor according to the tenth aspect of the present invention, the coil body is provided on the fixed side member of the relative moving members. As a result, this linear motor has an effect that it is possible to prevent the driving characteristics from being adversely affected by the vibration accompanying the movement of the pipe.

[Brief description of drawings]

FIG. 1A is a diagram illustrating the orientation direction of carbon fibers in a UD material and FIG. 1B is a diagram illustrating a direction in which an eddy current flows in a cloth material.

FIGS. 2A to 2C are cross-sectional views for explaining the first embodiment of the present invention.

FIGS. 3A to 3C are cross-sectional views for explaining a second embodiment of the present invention.

4A is a deformation distribution map when pressure is not applied to the cooling pipe, and FIG. 4B is a deformation distribution map when pressure is applied.

FIG. 5 (a) is a side view of the cooling pipe in FIG.
(B) is a partially enlarged view.

6 (a) to 6 (c) are cross-sectional views for explaining another embodiment of the present invention.

7A to 7C are cross-sectional views for explaining another embodiment of the present invention.

FIG. 8A is a plan view, FIG. 8B is a right side view, and FIG. 8C is a front view showing an example of a conventional linear motor.

9A is a plan view, FIG. 9B is a right side view, and FIG. 9C is a front view showing an example of a conventional linear motor.

10A is a plan view, FIG. 10B is a right side view, and FIG. 10C is a front view showing an example of a conventional linear motor.

11A is a plan view, FIG. 11B is a right side view, and FIG. 11C is a front view showing an example of a conventional linear motor.

12A is a plan view, FIG. 12B is a right side view, and FIG. 12C is a front view showing an example of a conventional linear motor.

13A is a plan view, FIG. 13B is a right side view, and FIG. 13C is a front view showing an example of a conventional linear motor.

14A to 14D are diagrams showing an example of a procedure for manufacturing a cooling pipe according to a conventional technique.

15A to 15D are diagrams showing an example of a procedure for manufacturing a cooling pipe according to a conventional technique.

16 (a) to 16 (c) are diagrams showing an example of a procedure for manufacturing a cooling pipe according to a conventional technique.

17A to 17C are diagrams showing an example of a procedure for manufacturing a cooling pipe according to a conventional technique.

[Explanation of symbols]

1 Coil assembly (armature, coil body) 2 magnet unit 5 Magnet (magnetizer) 6 Cooling pipe (tube) 7 channels 11 Coolant (medium for temperature adjustment)

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁷ Identification code FI theme code (reference) // F28F 21/06 H01L 21/30 503A (72) Inventor Shigeru Kawashima 1-1-1, Sonoyama, Otsu City, Shiga Prefecture No. 1 Toray Co., Ltd. Shiga Business Site (72) Inventor Yasuhiro Nishi 1-11-1 Sonoyama, Otsu City, Shiga Prefecture Toray Co., Ltd. Shiga Business Site (72) Inventor Daihiko Yoshimura Nihonbashi Muromachi, Chuo-ku, Tokyo No. 2 No. 1 Toray Co., Ltd. Tokyo Business Office F-term (reference) 2H097 GB00 LA10 5F046 CC01 CC02 CC17 5H609 BB08 PP02 PP06 PP09 QQ05 QQ10 RR37 RR74 RR75 5H641 BB06 BB19 GG02 GG07 GG11 HH03 HH05 HH06 JB05 JB09 JB05 JB09

Claims (10)

[Claims] 1. A cooling pipe for cooling a heating element, comprising a tubular body that surrounds the heating element and forms a flow path for a temperature adjusting medium, and the tubular body is formed of fiber reinforced plastic. And cooling tube. 2. The cooling pipe according to claim 1, wherein the fiber-reinforced plastic has carbon fibers as reinforcing fibers. 3. The cooling pipe according to claim 1, wherein the fiber-reinforced plastic has linearly oriented fibers as reinforcing fibers. 4. The cooling pipe according to claim 3, wherein the tubular body is formed by laminating a plurality of layers of sheet material formed of the fiber reinforced plastic. 5. The cooling pipe according to claim 4, wherein the fibers of the sheet material are oriented on the basis of information about the pressure applied to the pipe body from the temperature adjusting medium. 6. The cooling pipe according to claim 5, wherein a sheet material in which the fibers are oriented along a circumferential direction of the tubular body is arranged in a layer near the inner peripheral surface and the outer peripheral surface of the tubular body. Cooling pipe characterized by being. 7. The cooling pipe according to claim 6, wherein between the layer near the inner peripheral surface and the layer near the outer peripheral surface,
A cooling pipe comprising a sheet material in which the fibers are oriented in a direction substantially orthogonal to the circumferential direction. 8. A linear motor having a coil body, which is a heating element provided on one of two members that move relative to each other, and a magnetizing body provided on the other member, as a cooling pipe for cooling the coil body. A linear motor using the cooling pipe according to any one of claims 1 to 7. 9. The linear motor according to claim 8, wherein the tubular body has a thickness in a region where the coil body and the magnet body do not face each other, in a region where the coil body and the magnet body face each other. A linear motor characterized by being larger than 10. The linear motor according to claim 8, wherein the coil body is provided on a fixed-side member of the relative moving members.