JP2005243809A - Aligner and drive means suitably used in the aligner - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a suitable aligner considering high accuracy, high throughput, miniaturization and a low cost, by improving a member constituting the aligner. <P>SOLUTION: In the aligner exposing an original plate to a substrate, a retaining member retaining at least the original plate or the substrate and/or a movable table mounting the retaining member has a fiber reinforcing material in which strength is enhanced in a plane perpendicular to the optical axis of exposing light. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an exposure apparatus used in a lithography process for manufacturing a semiconductor element, a liquid crystal display element, and the like, and a driving unit suitably used for the exposure apparatus.

  FIG. 11 is a view showing the arrangement of an exposure apparatus used for semiconductor manufacturing or the like. A wafer stage 101 for positioning the wafer W, and a projection lens 102, a reticle stage 103, and a light source optical system 106 disposed above the wafer stage 101, such as i-line, excimer laser, electron beam, X-ray, EUV, etc. The exposure light generated from the light source 106 transmits or reflects the reticle R on the reticle stage 103 and is condensed on the wafer W by the projection lens 102, and the pattern of the reticle R is transferred to the wafer W.

  Wafer stage 101 is supported on the center portion of base 101a, and base 101a is supported on the floor surface via vibration isolator 10lb. A frame 105 is supported upright on the outer peripheral portion of the base 101a. A top 105a of the frame 105 supports the projection lens 102 at the center and a reticle stage support 104 for supporting the reticle stage 103 on the outer side, and further, light source optics. The system support member 106a is erected and supported.

  The position of the wafer stage 101 is measured optically in a non-contact manner by a laser interferometer 107 supported by the frame 105, and similarly, the position of the reticle stage 103 is measured by a laser interferometer 108.

  Frame 105, reticle stage support 104, base 101a, and light source optical system support member 106a are all structural support members, and support projection lens 102, reticle stage 103, light source optical system 106, and position measurement laser interferometer. Is.

As a material of a member used in an exposure apparatus, Patent Document 1 discloses an example in which a hollow rib structure is formed of a low thermal expansion ceramic material. Patent Document 2 discloses a configuration in which a casing that covers a coil of a linear motor is made of ceramic, and a ceramic reinforcing member is provided against damage and deformation due to the internal pressure of the refrigerant. Patent Document 3 discloses an example in which ceramics are used as a material constituting the support frame. Patent Document 4 discloses a lens barrel support mechanism that supports a lens barrel that does not apply excessive stress to the lens barrel.
JP 2003-163257 A JP 2002-325420 A JP-A-10-303112 Japanese Patent Laid-Open No. 11-084199

  As described in Patent Document 1, when the movable table is made of a low thermal expansion ceramic material, the movable table becomes large in order to ensure rigidity. Moreover, it becomes a problem in terms of workability as compared with alumina ceramic.

  Further, as described in Patent Document 2, when the casing that covers the coil that is the stage driving means is made of a ceramic material, eddy currents are not generated during driving. However, there is a problem that the processing cost increases as compared with a material made of a material such as stainless steel. In addition, since ceramic is a fragile material, there is a risk that the thin-walled portion may be damaged due to pressure fluctuations in the refrigerant, cracks during manufacturing, and the like, and it lacks reliability as a casing member.

  Moreover, ceramics as described in Patent Document 3 also have a problem in terms of processing cost. In addition, ceramics have less damping characteristics than cast iron, and the configuration in which a resin-based foam material having a high damping material is filled in the ceramic surface and internal space as described in Patent Document 3 is difficult in terms of manufacturing. Incurs further cost increase.

  In addition, as described in Patent Document 4, when a method of providing a mechanism for reducing the stress generated between the lens barrel support and the lens barrel is used, the stress generated between the lens barrel and the lens inside the lens barrel is reduced. There is a problem that it cannot be mitigated.

  The present invention has been made in view of at least one of the above-described problems, and the object thereof is to improve the members constituting the exposure apparatus, and to improve the precision, high throughput, downsizing, and low cost. Is to provide a simple exposure apparatus.

  In order to achieve the above object, according to a first aspect of the present invention, there is provided an exposure apparatus that exposes a pattern of an original onto a substrate, and at least a holding member that holds the original or the substrate and / or a movable member mounted with the holding member. The table is characterized by having a fiber reinforcing material with improved strength in a plane perpendicular to the optical axis of the exposure light.

According to a second aspect of the present invention, there is provided an exposure apparatus that exposes a pattern of an original on a substrate,
At least a guide member that guides a stage that moves with the original plate or substrate mounted thereon,
Consists of a fiber reinforcement that improves the in-plane strength parallel to the optical axis of the exposure light,
A mirror surface as a guide surface of the hydrostatic bearing is provided on at least one side surface of the guide member.

  According to a third aspect of the present invention, there is provided an exposure apparatus for exposing an original pattern onto a substrate, wherein at least the driving means for driving the original or the stage on which the substrate is mounted includes a coil and the coil inside. And a permanent magnet disposed to face the casing, and contributes to the driving force of the permanent magnet on the side of the casing facing the permanent magnet. It is characterized by using a fiber reinforcement whose strength in a plane perpendicular to the magnetic flux is improved.

  According to a fourth aspect of the present invention, an exposure apparatus that exposes a wafer with a pattern of an original by irradiating the wafer with exposure light from an illumination optical system via a master and a lens barrel as a projection optical system. The illumination optical system, the projection optical system, the platen and / or the surface plate on which the stage and / or the substrate are moved are mounted, the support for fixing and supporting the interferometer for measuring the position of the stage, A main body structure that integrally supports any one of the main body structure, and the main body structure is made of a fiber reinforcing material that has improved strength in a plane parallel to the optical axis of exposure light. Yes.

  According to a fifth aspect of the present invention, there is provided an exposure apparatus having a support member for supporting an optical element inside a lens barrel, wherein the support member has improved in-plane strength perpendicular to the optical axis of exposure light. It is characterized in that it is made of a fiber reinforcing material and / or a member constituting the lens barrel is made of a fiber reinforcing material having improved in-plane strength parallel to the optical axis of the exposure light.

  According to the present invention, by improving the members constituting the exposure apparatus, it is possible to provide a suitable exposure apparatus considering high accuracy, high throughput, downsizing, and low cost.

  FIG. 12 is a structural perspective view showing a wafer stage as a moving stage device.

  In the figure, 201 is a surface plate having a reference surface for supporting the stage device, 202 is a fixed Y guide fixed to the surface plate, and the side surface is the reference surface. Reference numeral 203 denotes a Y stage as a moving body, which is guided by a fixed Y guide and moves in the Y direction by a Y beam 206 having a stator 204 and a movable element 205 on both sides thereof.

  A coarse movement stage 207 includes an X linear motor movable element (not shown), is guided in the X direction by an X guide (not shown) provided on the Y beam, and is fixed to the X linear motor similarly provided on the coarse movement stage 207. A thrust is applied in the X direction by the child 208.

  On the coarse movement stage 207, there are 6 electromagnetic couplings for transmitting the thrust of the coarse movement stage 207 to the movable table 209 in a non-contact manner, a self-weight compensation mechanism for supporting the self-weight of the movable table 209 in a non-contact manner, and a movable table. Equipped with X-direction fine movement linear motor, Y-direction fine movement linear motor, Z-direction and rotation direction fine movement linear motor for fine adjustment of axial position and orientation, and movable table in 6-axis direction without contact It has a configuration that allows positioning.

  On the movable table, a chuck for holding the wafer W, which is a photosensitive substrate, and a mirror for position measurement are mounted.

  With respect to the exposure apparatus according to the embodiment of the present invention, in Examples 1 and 2, a movable table for holding and positioning a wafer will be described in detail with reference to the drawings. The present invention can be similarly applied to a movable table for holding and positioning a reticle.

  In the second embodiment, a movable table of a planar stage composed of a movable stage composed of only one movable table and magnets and a stator unit composed of a plurality of layers of coil arrays will be described in detail with reference to FIGS. Explained.

  In the third embodiment, a guide member that is driven in a scanning direction and a non-scanning direction by a driving force generated by a driving unit such as a linear motor will be described in detail with reference to FIGS. 9 and 10.

  The fourth embodiment will be described in detail with reference to FIGS. 9 and 10 regarding a housing in which a coil constituting a stator unit of a planar motor is disposed.

  In Example 5, the structure support member constituting the exposure apparatus will be described in detail with reference to FIG.

  In Example 6, the lens barrel and the optical support member constituting the exposure apparatus will be described in detail with reference to FIGS. 13 and 14.

(Example 1)
FIG. 1 is a schematic perspective view showing a movable table and its periphery constituting a wafer stage according to Embodiment 1 of the present invention, and FIG. 2 is a plan view thereof.

  On the movable table 11, a wafer W that is a photosensitive substrate, a chuck 12 that holds the wafer W, and a mirror 13 for position measurement are mounted.

  Further, on the lower surface of the movable table 11, an X-direction fine movement linear motor 23a, a Y-direction fine movement linear motor 23b, and a Z-direction for finely adjusting the positions and orientations of the electromagnetic coupling 21, the self-weight compensation mechanism 22 and the movable table in the six-axis directions. And a rotational direction fine movement linear motor 23c around each axis, and these are arranged on a coarse movement stage top plate 207.

  In FIG. 1, the movable table 11 is a fiber reinforced plastic (FRP) sheet material having anisotropy in material strength depending on the fiber orientation direction on both surfaces of the lightweight core material 11 b, as shown in FIG. The sandwich structure 11 is formed by adhering 31c, 31d,... And a laminated plate 11a laminated over a plurality of layers.

  For example, as shown in FIG. 3, the laminated plate 11a is made of carbon fiber reinforced plastic (CFRP) sheet material in which carbon fibers 30 are knitted at 0 ° and 90 °, and carbon fibers are knitted at −45 ° and 45 °. It is desirable that the strength in the in-plane direction in which the carbon fibers are woven is quasi-isotropically strengthened by alternately laminating and configuring the carbon fiber reinforced plastic (CFRP) sheet material.

  Also, as shown in FIG. 4, the same effect can be obtained even in a structure in which carbon fiber reinforced plastic (CFRP) sheet materials in which carbon fibers 30 are knitted at 60 °, 0 °, and −60 ° are laminated.

  As shown in FIG. 1, a plane in which the strength is increased in a quasi-isotropic manner is configured so that the movable table is orthogonal to the optical axis of the exposure light, thereby improving the bending and torsional strength in the plane orthogonal to the optical axis. It is configured.

  By making the strengthening direction a bending or twisting direction that prevents the wafer chuck 12 and the mirror 13 from being held, the amount of deformation of the chuck mounted on the movable table and the wafer W held by the chuck and the position measurement mirror is reduced. The configuration enables positioning with higher accuracy.

  11b is a lightweight core material obtained by processing the above-mentioned carbon fiber reinforced plastic (CFRP) laminated plate into a rib structure as shown in FIG. 1. By adopting a hollow rib structure, rigidity of the movable table 11 against bending and twisting is shown. It has a lightweight structure while maintaining

  By reducing the weight of the movable table 11, the acceleration when moving the table can be improved, and at the same time, the natural frequency of the table can be improved and the control characteristics can be controlled to a higher frequency range. Can be improved.

  About a concrete rib shape structure, it is based on the method shown by Unexamined-Japanese-Patent No. 2003-163257.

Further, it is desirable that the core material 11b is provided with at least one communication hole 11c for conducting with the outside air with respect to each hollow interior constituted by a sandwich structure. The outside air is, for example, not only air but also N ₂ atmosphere, He atmosphere, and vacuum atmosphere. This communication hole is, for example, not to cause surface deformation of the upper and lower laminates constituting the movable table due to a pressure difference between the pressure inside the hollow and the outside air, or because residual gas inside the hollow leaks into the atmosphere. It is provided so as not to cause contamination of the stage environment or deterioration of the vacuum degree.

  In addition, the carbon fiber reinforced plastic (CFRP) material constituted by the lamination has a high thermal conductivity because heat moves along the carbon fiber in the in-plane direction in which the carbon fiber is oriented. In the direction parallel to the optical axis of the exposure light to be laminated, the carbon fiber and the carbon fiber are made of plastic, so that the thermal conductivity is low and the thermal conductivity is anisotropic.

  Thereby, the influence of the thermal deformation between the movable table 11, the chuck 12, and the mirror 13 due to the coil heat generation of the fine motion linear motor 23 or the electromagnetic coupling 21 provided on the lower surface of the movable table at the time of driving can be suppressed.

On the upper surface of the upper laminate of the movable table 11 having a sandwich structure, the material constituting the movable table, in this case, carbon fiber reinforced plastic (CFRP) and the linear expansion coefficient are about the same, −1 × 10 ⁻⁶ or more, In addition, a low thermal expansion glass 14 having a linear expansion coefficient of 3 × 10 ⁻⁶ (1 / ° C.) or less, for example, zero dura, or low thermal expansion ceramics is adhered, and the surface of the chuck 12 and the mirror 13 is movable. When clamping to the table 11, it is desirable that finishing processing such as grinding or lapping is performed in order to keep the flatness of the chuck 12 and the mirror 13 without breaking.

  The low thermal expansion glass 14 is provided to obtain high flatness on the surface without causing deformation due to a difference in linear expansion coefficient between the movable table 11 and the low thermal expansion glass. The same effect can be obtained as long as the material has a close linear expansion coefficient and can obtain the required flatness by finishing such as grinding or lapping.

  In addition, a metal layer is formed on the surface of the movable table by a method such as plating, vapor deposition, sputtering, CVD, or PVD, and the surface is subjected to a finishing process such as grinding or lapping. Even if necessary flatness is obtained, the same effect can be obtained.

  On the upper surface of the movable table 11, there is a wafer chuck 12 for mounting the wafer W. The chuck 12 is fixed to the movable table 11 by vacuum air or mechanical clamp (not shown). The wafer W is also clamped to the chuck 12 by vacuum air (not shown) or electrostatic force.

  Furthermore, there is also a mirror 13 for measuring the relative position of the wafer W. A plurality of mirrors 13 are mounted so that the movable table 11 can measure with six degrees of freedom. The mirror 13 and the movable table 11 are fixed by, for example, a method disclosed in Japanese Patent Laid-Open No. 5-19157.

The chuck 12 and the mirror 13 are of the same level as the material constituting the movable table 11, in this case, carbon fiber reinforced plastic (CFRP), so as not to be deformed due to the difference in linear expansion coefficient with the movable table 11 − Desirably, it is made of a low thermal expansion material having a linear expansion coefficient of 1 × 10 ⁻⁶ or more and 3 × 10 ⁻⁶ (1 / ° C.) or less, and has a linear expansion coefficient equal to that of the movable table, and It is desirable that the fiber is made of a fiber reinforced material in which carbon fiber reinforced plastic (CFRP) in which fibers are oriented is laminated so that bending and torsional strength in an in-plane direction perpendicular to the optical axis of exposure light is isotropically improved. .

The side surface 14 that reflects the reference light from the interferometer of the position measurement mirror 13 and is made of carbon fiber reinforced plastic (CFRP) is −1 × 10 ⁻⁶ or more and 3 × 10 ⁻⁶ (1 / ° C) Low thermal expansion glass having a coefficient of linear expansion of less than that, for example, zero dura, or low thermal expansion ceramic is adhered, and the reflective film deposited on the surface is lapped so that the flatness is 1 μm or less. It is desirable that the through-round hole 13a for weight reduction and the stress relief groove 13b when fixing the mirror have the same cross-sectional shape in the longitudinal direction.

  The groove 13b provided in the longitudinal direction has a role of stress relief for maintaining the surface accuracy of the reflecting surface, and the through-round hole 13a is provided to increase the natural frequency of the mirror 13 by reducing the weight. It is.

  In order to prevent the local deformation caused by the difference in linear expansion coefficient from that of carbon fiber reinforced plastic (CFRP), the movable table 11 is formed with a screw hole as a fastener, for example, an invar. For example, a method of bonding a buried metal such as a female screw to the buried metal is desirable.

  In Example 1, although the case where carbon fiber is used as the fiber constituting the fiber reinforcing material has been described, the present invention is not limited thereto, and may be glass fiber, aramid fiber, Kevlar fiber, or the like.

  In addition, it is desirable to use a cyanate resin excellent in shape stability as the matrix of the fiber reinforcement, but the matrix is not limited to this, and may be an epoxy resin or a ceramic material.

In Example 1, although the case where carbon fiber reinforced plastic (CFRP) was used as a lightweight core material was demonstrated, it is not restricted to this, It is more than -1 * 10 < ^-6 > and 3 * 10 It may be a lightweight core material such as a low thermal expansion ceramic having a linear expansion coefficient of ⁻⁶ (1 / ° C.) or less.

  Further, in the first embodiment, the rib structure is described with respect to the shape of the core material. However, the shape is not limited to this, and may be a honeycomb structure 50 as shown in FIG. 5 or a corrugated structure. Also good.

  In the present embodiment, the in-plane orthogonal to the optical axis has been described with respect to the direction in which the strength is improved by the fiber material, but the present invention is not limited to this configuration, and both the direction orthogonal to the optical axis and the parallel direction are both. It is good also as a structure which improved the intensity | strength.

  In the first embodiment, the movable table for holding and positioning the wafer has been described in detail with reference to the drawings. However, the same application can be applied to the movable table for holding and positioning the reticle. .

  By applying this embodiment, it is possible to configure a movable table, a chuck and a position measuring mirror that are excellent in light weight, high rigidity, and high natural frequency control performance.

(Example 2)
FIG. 6 is a schematic perspective view showing a movable table and its periphery constituting a wafer stage according to Embodiment 2 of the present invention, and FIG. 7 is a plan view thereof.

  This embodiment is a movable table 61 of a planar stage composed of a movable stage 61 composed of only one movable table and magnets, and a stator unit 63 composed of a plurality of layers of coil arrays 63a. Since the configuration is the same as that of the first embodiment, only the configuration of the lower surface of the movable table will be described.

  Since the configuration of the planar stage is the same as that of the conventional example, the description thereof is omitted.

  On the lower surface of the movable table in the planar stage, it is desirable that at least one set of divided permanent magnet pieces 62 of the N pole 62a and the S pole 62b are independently bonded to the lower surface of the movable table.

  The configuration of the movable table, the chuck mounted on the upper surface of the movable table, and the configuration of the position measuring mirror are the same as those in the first embodiment, and the effects obtained by the same are the same as those in the first embodiment.

As an effect of Example 2, a line between a movable table having a linear expansion coefficient of −1 × 10 ⁻⁶ or more and 3 × 10 ⁻⁶ (1 / ° C.) or less and a permanent magnet bonded and fixed to the lower surface Wafer holding accuracy is improved by reducing the deformation of the movable table due to the difference in expansion coefficient.

(Example 3)
FIG. 8 is a schematic perspective view showing a guide member constituting the moving stage according to the third embodiment and its periphery.

  In FIG. 8, the beam 81 serving as a guide member is a fiber reinforced plastic having anisotropy in material strength depending on the fiber orientation direction on both surfaces of the lightweight core material 81b, like the movable table 11 of the first embodiment. As shown in FIG. 3, the FRP) sheet material has a sandwich structure in which 31a, 31b, 31c, 31d,... Since the configuration of the laminated plate is the same as that described in the first embodiment, a description thereof will be omitted.

  As shown in FIG. 8, a plane in which the intensity is increased in a quasi-isotropic manner is configured so that the beam is parallel to the optical axis of the exposure light, thereby improving the bending and torsional strength in the plane parallel to the optical axis. It is configured.

  By setting the reinforcing direction to a direction orthogonal to the thrust direction of the coarse motion stage driving linear motor, there is an effect of reducing bending deformation acting on the beam 81 during acceleration / deceleration.

  The lightweight core material 81a may have a rib structure, a honeycomb structure, or a corrugated structure, as in the first embodiment. The material is the same as that in the first embodiment.

  Further, it is desirable that the core material is provided with at least one communication hole 81c for conducting with the outside air with respect to each hollow interior constituted by a sandwich structure. The effect is the same as in Example 1.

A side surface of the beam is provided with a guide surface 82 for guiding the coarse movement stage 207 by a hydrostatic bearing, and the guide surface is composed of a material constituting the beam, in this case, carbon fiber reinforced plastic (CFRP) and a linear expansion coefficient. Low thermal expansion glass having a linear expansion coefficient of −1 × 10 ⁻⁶ or more and 3 × 10 ⁻⁶ (1 / ° C.) or less, for example, zero dwell or low thermal expansion ceramics. The surface is preferably lapped so that the flatness is 1 μm or less.

  In forming a screw hole as a fastener in the beam 81, a low thermal expansion metal material such as Invar is used so as not to cause local deformation due to a difference in linear expansion coefficient from the carbon fiber reinforced plastic (CFRP). It is desirable to bond a metal pad and provide a female screw on the metal pad.

  In Example 3, a sandwich structure made of carbon fiber reinforced plastic (CFRP) was described in the same manner as in Example 1. However, the material constituting the sandwich structure is not limited to this, and has been described in Example 1. All configurations are applicable as well. The effect is basically the same.

  In Example 3, the in-plane parallel to the optical axis has been described with respect to the direction in which the strength is improved by the fiber material. However, the configuration is not limited to this configuration, and both the direction orthogonal to the optical axis and the parallel direction are both included. It is good also as a structure which improved the intensity | strength.

  By applying this embodiment, a light beam having a high natural frequency can be configured while the guide surface is highly rigid.

Example 4
FIG. 9 is a front view illustrating a schematic configuration of the planar stage according to the fourth embodiment, and FIG. 10 is a top view.

  In the figure, reference numerals 91a and 91b denote the movable tables of the planar stage described in the second embodiment. The stator unit 63 includes a coil unit 67 in which a plurality of coil arrays 66 are arranged in a plurality of layers in a scanning direction and a non-scanning direction, and a flow path 69 for flowing a coolant medium through the coil unit 67. It consists of the housing | casing 68 arrange | positioned inside.

  The movable table A91a and the movable table B91b are provided with a floating force and a translational force by a Lorentz force to the coil unit 67, and posture control with six degrees of freedom is performed without a guide member.

  In the casing 68 constituting the stator unit 63, the movable table 61, in particular, only one side 68a facing the movable magnet, is a sheet of carbon fiber reinforced plastic (CFRP) having anisotropy in material strength depending on the fiber orientation direction. As shown in FIG. 3, the material is composed of a laminated plate 11a laminated over a plurality of layers 31a, 31b, 31c, 31d,. Since the configuration of the laminated plate 11a is the same as that described in the first embodiment, a description thereof will be omitted.

  By constructing one side surface of the casing so as to be orthogonal to the magnetic flux of the permanent magnet 62 provided on the lower surface of the movable table 61, as shown in FIG. The bending and torsional strength in the plane perpendicular to the surface is improved.

  By performing the strengthening direction, there is an effect on bending deformation that acts due to the internal pressure of the cooling medium flowing inside the housing. In addition, since the strength of the bending deformation due to the internal pressure is improved, only the side surface 68a facing the magnet can be thinned, so that the facing distance between the coil and the magnet can be shortened. Thereby, a configuration for obtaining a larger driving force is possible.

  In addition, carbon fiber reinforced plastic (CFRP) constructed by laminating has high thermal conductivity because heat moves along the carbon fiber in the in-plane direction where the carbon fiber is oriented. In the direction parallel to the optical axis of the exposure light, since the carbon fiber and the carbon fiber are made of plastic, the thermal conductivity is lowered, and since it has thermal conductivity anisotropy characteristics, the coil generates heat. However, there is an effect of suppressing the influence transmitted to the movable table 61.

  In addition, carbon fiber reinforced plastic (CFRP) has a characteristic of electrical conductivity. This is because the electric resistance is low in the direction in which the carbon fibers are oriented, and in the direction perpendicular to the carbon fibers. In that direction, it can be regarded as an electrically insulating material.

  In Example 4, since the carbon fiber is oriented in a quasi-isotropic manner in a plane orthogonal to the magnetic flux of the movable magnet, the eddy current generated when the movable table moves relative to the stator unit is reduced. Thus, viscous resistance can be suppressed.

  In Example 4, the in-plane orthogonal to the magnetic flux has been described with respect to the direction in which the strength is improved by the fiber material. However, the present invention is not limited to this configuration, and the strength in both the direction orthogonal to the magnetic flux and the direction parallel to the magnetic flux. An improved configuration may be used.

  In the fourth embodiment, the example of the stator unit of the planar stage has been described. However, the coil and the flow path for cooling the coil, such as a linear motor that generates a driving force in a linear direction and a rotary motor that generates a driving force in a rotating direction, are described. The present invention can also be applied to various motors including a housing disposed inside.

  In the fourth embodiment, an example using carbon fiber reinforced plastic (CFRP) has been described as in the first embodiment. However, the present invention is not limited to this, and all the configurations described in the first embodiment can be similarly applied.

  According to the present embodiment, it is possible to configure a motor that is highly rigid against bending deformation due to the internal pressure of the refrigerant and that suppresses the influence of eddy currents and heat generation from the coils.

(Example 5)
FIG. 11 is a front view showing the structure of an exposure apparatus according to the fifth embodiment.

  The exposure apparatus of FIG. 11 positions a wafer stage 101 for positioning a wafer W as a substrate, a projection lens 102 as a projection optical system disposed above the wafer stage 101, and a reticle R as an original in synchronization with the wafer stage. The reticle stage 103 and the light source optical system 106 for performing exposure, and exposure light generated from the light source optical system is transmitted through or reflected by the reticle R on the reticle stage 103 and is projected by the projection lens 102 to the wafer stage 101. Transferred to the upper wafer W.

  The wafer stage 101 is supported on the center portion of the base 101a, and the base 101a is supported on a floor surface (not shown) via a vibration isolator 101b. A support frame 105 is supported on the outer peripheral portion of the base 101a. A projection lens 102 is supported on the upper central portion of the frame 105. A support member 109 for supporting the reticle stage and light source optics are provided outside the support lens 105. An L-shaped support member 106a that supports the system 106 is supported.

  In the present invention, the hatched frame 105, the reticle stage support member 109, the base 101a, the light source optical system support member 106a, and the position measurement laser interferometer support columns 107 and 108 are arranged in a fiber orientation direction. 3. Laminated plate in which sheets of fiber reinforced plastic (FRP) having anisotropy in material strength are laminated over a plurality of layers with 31a, 31b, 31c, 31d,... As shown in FIG. Is used as a surface material, and a sandwich structure is formed by adhering a lightweight core material to the inside. Since the configuration of the laminated plate is the same as that described in the first embodiment, a description thereof will be omitted.

  As a structure that improves the bending and torsional strength in the plane parallel to the optical axis by configuring the structure support member of the exposure apparatus so that the plane where the intensity becomes quasi-isotropic is parallel to the optical axis of the exposure light Yes.

  By strengthening the in-plane strength in the direction orthogonal to the wafer W surface and the reticle R surface, deformation due to external force that hinders maintaining the relative positional relationship between the reticle R, the projection lens system 102, and the wafer W with high accuracy is achieved. Can be suppressed.

  In addition, the direction in which the strength is improved by the fiber material is not limited to this configuration, and a configuration in which the strength in both the direction orthogonal to the optical axis and the parallel direction is improved may be employed.

  In forming a screw hole as a fastener in the structural support member, a metal material having a low thermal expansion, for example, Invar, is used so as not to cause local deformation due to a difference in linear expansion coefficient from carbon fiber reinforced plastic (CFRP). For example, a method of bonding a buried metal such as a female screw to the buried metal is desirable.

  In Example 5, the structure made of carbon fiber reinforced plastic (CFRP) was described in the same manner as in Example 1. However, the material constituting the support structure is not limited to this, and all the materials described in Example 1 are used. The configuration of can be similarly applied. The effect is basically the same.

  According to the present embodiment, in order to maintain the relative positional relationship between the reticle R, the projection lens system, and the wafer W with high accuracy, which is lighter than that in which the structural support member is made of conventional castings or ceramics. The required rigidity can be increased, and it becomes easy to cope with an increase in the substrate size. Further, the influence of the fluctuating load accompanying the movement of the moving stage can be suppressed, and the exposure apparatus can be further increased in speed and accuracy.

(Example 6)
FIG. 13 is a partial cross-sectional view showing the structure of the lens barrel 102 according to the sixth embodiment and the optical element holding member held therein.

  The lens barrel of the projection lens system in FIG. 13 has a shape in which a lens member 152 as an optical element is held by a lens holding member 151 and several tens of lens holding members 151 are stacked via a spacer 153. The held state is shown.

  In the present invention, a sheet of carbon fiber reinforced plastic (CFRP) having anisotropy in material strength is shown in FIG. 3 or FIG. 14 for the lens holding member 151 and the lens barrel 102 depending on the fiber orientation direction. Laminate plate laminated in multiple layers with 31a, 31b, 31c, 31d, or the like, or a sandwich structure constituted by using the laminate plate as a surface material and adhering a lightweight core material therein Consists of the body. Since the configuration of the laminated plate is the same as that described in the first embodiment, a description thereof will be omitted.

  By configuring the lens holding member using the laminated plate in which the fiber is oriented so that the plane in which the strength becomes quasi-isotropic is orthogonal to the optical axis of the exposure light, an in-plane direction orthogonal to the optical axis, That is, the structure is such that the elongation, bending, and torsional strength in the in-lens direction is improved. By adopting such a configuration, a stress that acts on the lens holding member 151 and that distorts the lens is minimized.

  Further, with respect to the members constituting the lens barrel 102, by using the laminated plate in which fibers are oriented so that a plane whose strength is increased in a quasi-isotropic manner is parallel to the optical axis of the exposure light, between the lens holding members 151 The structure and position can be maintained with high accuracy.

  Further, the lens holding member 151 and the lens barrel 102 holding the lens holding member 151 are made of a structural material having the same linear expansion coefficient, thereby suppressing deformation due to the difference in linear expansion coefficient.

  In addition, when the lens member 152 and the lens holding member 151 are bonded and fixed, a surface in which a metal film is formed on the laminated material and the surface thereof is polished is the same as that described in Example 1 and Example 3. The lens may be bonded, or a glass or ceramic material having a low linear expansion coefficient may be bonded to the surface of the laminated plate, and the surface polished and the lens member 152 may be bonded to each other. The same.

  In addition, the direction in which the strength is improved by the fiber material is not limited to this configuration, and a configuration in which the strength in both the direction orthogonal to the optical axis and the parallel direction is improved may be employed.

  In forming a screw hole as a fastener in the structural support member, a metal material having a low thermal expansion, for example, Invar, is used so as not to cause local deformation due to a difference in linear expansion coefficient from carbon fiber reinforced plastic (CFRP). For example, a method of bonding a buried metal such as a female screw to the buried metal is desirable.

  In Example 5, the structure made of carbon fiber reinforced plastic (CFRP) was described in the same manner as in Example 1. However, the material constituting the support structure is not limited to this, and all the materials described in Example 1 are used. The configuration of can be similarly applied. The effect is basically the same.

  According to the present embodiment, the weight is lighter than that of the conventional optical element holding support member and the lens barrel, the holding rigidity for maintaining the optical characteristics of the lens, and between the optical element holding members of the lens barrel. An exposure apparatus having a lens barrel incorporating an optical element holding mechanism capable of increasing the holding rigidity for maintaining the position and orientation with high accuracy and maintaining high-precision optical performance over a long period of time. Can be provided.

(Example 7)
In Example 7, a semiconductor device manufacturing process using the above-described exposure apparatus will be described. FIG. 15 is a diagram showing a flow of an entire manufacturing process of a semiconductor device. In step 1 (circuit design), a semiconductor device circuit is designed. In step 2 (mask fabrication), a mask is fabricated based on the designed circuit pattern.

  On the other hand, in step 3 (wafer manufacture), a wafer is manufactured using a material such as silicon. Step 4 (wafer process) is called a pre-process, and an actual circuit is formed on the wafer by using the above-described exposure apparatus and lithography technology using the above-described mask and wafer. The next step 5 (assembly) is called a post-process, and is a process for forming a semiconductor chip using the wafer produced in step 5, and is an assembly process (dicing, bonding), packaging process (chip encapsulation), etc. Process. In step 6 (inspection), the semiconductor device manufactured in step 5 undergoes inspections such as an operation confirmation test and a durability test. A semiconductor device is completed through these processes, and is shipped in Step 7.

  The wafer process in step 4 includes the following steps. An oxidation step for oxidizing the surface of the wafer, a CVD step for forming an insulating film on the wafer surface, an electrode formation step for forming electrodes on the wafer by vapor deposition, an ion implantation step for implanting ions on the wafer, and applying a photosensitive agent to the wafer A resist processing step, an exposure step for transferring the circuit pattern to the wafer after the resist processing step by the above exposure apparatus, a development step for developing the wafer exposed in the exposure step, and an etching step for scraping off portions other than the resist image developed in the development step A resist stripping step that removes the resist that has become unnecessary after etching. By repeating these steps, multiple circuit patterns are formed on the wafer.

The perspective view which shows the movable table which concerns on Example 1. FIG. The top view which shows the movable table which concerns on Example 1. FIG. Sectional drawing of the laminated sheet material in the first configuration Sectional drawing of laminated sheet material in second configuration The perspective view which shows the movable table which concerns on Example 1. FIG. The perspective view which shows the movable table which concerns on Example 2. FIG. The top view which shows the movable table which concerns on Example 2. FIG. The perspective view which shows the beam which concerns on Example 3. FIG. The top view which shows the stator unit which concerns on Example 4. FIG. The top view which shows the stator unit which concerns on Example 4. FIG. The top view which shows the structure support member which concerns on Example 5. FIG. A perspective view showing a wafer stage as a positioning stage device Partial cross section showing the structure of the lens barrel according to Example 6 and the optical element holding member held therein 6 shows a structure of a lens holding member according to Example 6. The figure which shows the device manufacturing method which concerns on Example 7.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 Movable table 11b Core material of rib structure 12 Chuck 13 Position measuring mirror 21 Electromagnetic coupling 22 Self-weight compensation mechanism 23 Fine movement linear motor 30 Fiber 50 Honeycomb structure core material 62 Permanent magnet piece 63 Stator unit 66 Coil array 67 Coil unit 68 Case 101 Wafer stage 101a Base 102 Projection lens 103 Reticle stage 104 Base 105 Frame 106 Light source 107 Laser interferometer 201 Surface plate 202 Y guide 203 Y stage 206 Y beam 207 Coarse movement stage 151 Lens holding member 152 Lens member 153 Spacer

Claims (17)

An exposure apparatus that exposes an original pattern onto a substrate,
An exposure apparatus characterized in that at least a holding member for holding an original plate or a substrate and / or a movable table on which the holding member is mounted has a fiber reinforcing material having improved strength in a plane perpendicular to the optical axis of exposure light. .   The movable table has a sandwich structure in which the fiber reinforcing material is provided on both surfaces of the core material and the core material, and the core material includes a sealed space formed by the core material and the fiber reinforcing material, and an outside. The exposure apparatus according to claim 1, wherein at least one communication hole is provided for communicating with each other. The movable table is characterized in that a glass or ceramic material having a linear expansion coefficient of −1 × 10 ^{−6 to} 3 × 10 ⁻⁶ (1 / ° C.) is provided on at least one surface of the fiber reinforcing material. The exposure apparatus according to claim 1 or 2.   4. The exposure apparatus according to claim 2, wherein at least one surface of the movable table is processed on the surface of the fiber reinforcing material. 5.   The exposure apparatus according to claim 2, wherein the movable table has a plurality of magnet pieces fixed to at least one surface of the surface of the movable table. The movable table has a mirror portion for measuring the position of the movable stage, and the mirror member and the holding member have a linear expansion coefficient of −1 × 10 ^{−6 to} 3 × 10 ⁻⁶ (1 / ° C.). The exposure apparatus according to claim 2, wherein the exposure apparatus is an exposure apparatus.   The mirror part is composed of a fiber reinforcing material having an improved strength in a plane orthogonal to the optical axis of the exposure light, and the fiber reinforcing member releases an stress through an opening that penetrates in the longitudinal direction of the mirror part. 7. An exposure apparatus according to claim 6, wherein a groove is provided.   8. The exposure apparatus according to claim 7, wherein the mirror portion is subjected to surface processing so that at least one surface of the surface of the fiber reinforcing material has a flatness of 1 [mu] m or less. The fiber reinforcement has a plurality of laminated sheet materials,
The sheet material has improved strength in an in-plane direction, and is laminated such that the thermal conductivity in the in-plane direction is higher than the thermal conductivity in the lamination direction. The exposure apparatus according to any one of 8. An exposure apparatus that exposes an original pattern onto a substrate,
At least a guide member that guides a stage that moves with the original plate or substrate mounted thereon,
Consists of a fiber reinforcement that improves the in-plane strength parallel to the optical axis of the exposure light,
An exposure apparatus comprising a mirror surface as a guide surface of a hydrostatic bearing on at least one side surface of the guide member.   The guide member has a sandwich structure in which the fiber reinforcing material is provided on both surfaces of a lightweight core material, and the core material communicates the sealed space formed by the core material and the fiber reinforcing material with the outside. The exposure apparatus according to claim 10, wherein at least one communication hole is provided. The guide surface is made of glass or a ceramic material having a linear expansion coefficient of −1 × 10 ^{−6 to} 3 × 10 ⁻⁶ (1 / ° C.), and the surface of the glass or ceramic material has a flatness of 1 μm or less. The exposure apparatus according to claim 10 or 11, wherein the surface is processed so as to be An exposure apparatus that exposes an original pattern onto a substrate,
The driving means for driving at least the stage on which the original plate or the substrate is mounted includes a coil, a casing in which the coil is disposed, and a permanent magnet disposed to face the casing, An exposure apparatus, wherein a fiber reinforcing material having an improved strength in a plane orthogonal to a magnetic flux contributing to a driving force of the permanent magnet is used for a surface facing the permanent magnet among side surfaces of the housing. An exposure apparatus that exposes a wafer with a pattern of an original by irradiating the wafer with exposure light from an illumination optical system via the original and a lens barrel as a projection optical system,
One of the illumination optical system, the projection optical system, the platen on which the original plate and / or the substrate is mounted, and a stage on which a stage is mounted, and a column that fixedly supports an interferometer for measuring the position of the stage An exposure apparatus comprising: a main body structure that integrally supports the main body structure, and the main body structure is made of a fiber reinforcing material having an improved strength in a plane parallel to the optical axis of the exposure light. An exposure apparatus having a support member that supports an optical element inside a lens barrel and a lens barrel that holds the support member,
The support member is made of a fiber reinforcing material whose strength in a plane orthogonal to the optical axis of exposure light is improved, and / or the lens barrel member is in a plane parallel to the optical axis of exposure light. An exposure apparatus comprising a fiber reinforcing material having improved strength. A device manufacturing method comprising:
Applying a photosensitive agent to the substrate;
A step of transferring a pattern to the photosensitive agent on the substrate coated with the photosensitive agent by the exposure apparatus according to claim 1;
And a step of developing the substrate onto which the pattern has been transferred.   A semiconductor device manufactured by the device manufacturing method according to claim 16.

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