JP2003197295A - Electric connecting device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To make a contact unit inexpensive as much as possible. <P>SOLUTION: An electric connecting device comprises a connecting board having a through hole and a conductive plate-formed seat arranged at one side of the connection board so as to cover the through hole. The seat has the outside region corresponding to the outside region of the through hole and mounted to the connecting board, and has 3 or more contact pieces which are independently and elastic-deformably separated by plural windmill-shaped notched parts formed in the inside region of the inside of the outside region and communicated with each other, and which are extended in a belt shape toward the center part of the inside region, and which possesses 3 or more contact pieces in which there is an equiangular distance around the axis line of the through hole. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus used for electrical connection between a protruding electrode of a semiconductor device such as an integrated circuit and a tester, and between a protruding electrode of a substrate and another substrate. .

[0002]

2. Description of the Related Art An apparatus for electrically connecting a projecting electrode of a semiconductor device and a tester is used for an electric current test of a semiconductor device having a plurality of projecting electrodes such as hemispherical bump electrodes. This type of electrical connection device has been proposed and put into practical use, such as a needle type device using a contact such as a probe, a film type device using a cantilever contact, a pogo pin type device, etc. ing.

[0003]

However, in the needle-type electrical connection device, it is difficult to correctly attach a plurality of needle-shaped contacts to the wiring board, and the cost increases. The film-type electrical connection device has a high cost because a projection electrode must be formed on each contact. The pogo pin type electrical connection device is also expensive because the pogo pin itself is complicated and expensive.

The object of the present invention is to make the contacts as inexpensive as possible.

[0005]

A first electrical connection device according to the present invention is a conductive board having a through hole and a conductive board disposed on one surface of the connection board so as to cover the through hole. And a plate-shaped seat having. The seat is an outer region corresponding to an outer region of the through hole and is formed in an outer region mounted on the connection board and an inner region inside the outer region, and a plurality of windmill-shaped members communicating with each other. Three or more contact pieces that are independently elastically deformable separated by notches, extend in a strip shape toward the central portion of the inner region, and are equiangularly spaced around the axis of the through hole. It has three or more contact pieces.

The first electrical connecting device is a wiring board having a conductive land portion on one surface, and the other one of the connecting board is arranged so that the land portion faces the plurality of contact pieces. The contact piece may include a wiring board mounted on a surface thereof, and the contact piece may be bent toward the other surface side of the connection board so that a tip end of the contact piece contacts the land portion.

The first electrical connection device further comprises:
A second board-shaped seat having conductivity, which is arranged on the other surface of the connection board so as to cover the through hole; and a wiring board having a conductive land portion on one surface, Second
The seat is formed in the second outer region corresponding to the region outside the through hole, and the plurality of second notches formed in the second inner region inside the second outer region and communicating with each other. Are independently separated elastically deformable by means of three or more contact pieces, extend in a strip shape toward the central portion of the second inner region, and are equiangularly spaced around the axis of the through hole. 3 or more second contact pieces, and the wiring board is mounted on the other surface of the connection board in a state where the land portion is in contact with the second outer region, Second
The contact piece may be bent toward the one surface side of the connection board and the tip thereof is located in the through hole.

A second electrical connecting device according to the present invention is a connecting board having a through hole, and a conductive plate-like member arranged on one surface of the connecting board so as to cover the through hole. Including Zodiac. The seat is an outer region corresponding to an outer region of the through hole and is attached to the connection substrate, and a plurality of notches formed in the inner region of the outer region and communicating with each other. By means of three or more contact pieces independently elastically deformable by means of a triangular shape extending toward the center of the inner region and equiangularly spaced around the axis of the through hole. It has three or more contact pieces, and the tip end of each contact piece is bent so that the tip end side is separated from the connection board.

A third electrical connecting device according to the present invention is a connecting board having a through hole, and a conductive plate-like member arranged on one surface of the connecting board so as to cover the through hole. And a wiring board having a conductive land portion on one surface, the wiring board being mounted on the other surface of the connection substrate so that the land portion faces the through hole.
The seat is an outer region corresponding to an outer region of the through hole and is attached to the connection substrate, and a plurality of notches formed in the inner region of the outer region and communicating with each other. 3 independent contact pieces that are elastically deformable by means of a triangular shape 3 extending toward the center of the inner region and equiangularly spaced around the axis of the through hole. Having the above contact pieces, each contact piece is bent toward the wiring board at a location on the side of the outer region, and is bent away from the wiring board toward the tip side at the center. And is in contact with the land portion at a central bent portion.

A fourth electrical connecting device according to the present invention is a connecting board having a through hole, and a conductive plate-like member disposed on one surface of the connecting board so as to cover the through hole. And a wiring board having a conductive land portion on one surface thereof, the wiring board being mounted on one surface of the connection board so that the land portion faces the seat. The seat is formed in an outer region corresponding to an outer region of the through hole, the outer region being in contact with the connection substrate and the land portion, and the inner region being inside the outer region, and communicating with each other. Three or more contact pieces that are independently elastically deformable and separated by a plurality of cutouts that extend toward the central portion of the inner region and are equiangularly spaced around the axis of the through hole. It has three or more contact pieces in the shape of an open triangle, and each contact piece is bent at a location on the side of the outer region or a location in the center so as to be farther from the wiring board toward the tip side.

A fifth electrical connection device according to the present invention is a connection board having a through hole and a pair of conductive plate-like contact pieces extending from the central portion of the through hole to opposite sides. A wiring board having a pair of contact pieces and a pair of electrically conductive land portions individually corresponding to the contact pieces on one surface, wherein one of the connection board is in a state where the land portion is in contact with the seat. A wiring board mounted on the surface.

In the fifth electrical connection device, each contact piece may be bent such that the contact piece is more distant from the wiring board toward the tip side.

A sixth electrical connecting device according to the present invention is U
A connection board having a first through hole in a finger region formed by a slit extending in a letter shape or a U-shape, and a contact piece formed on one surface of the finger region in the first through hole. A contact piece that has a second through hole that follows and that has a protrusion that protrudes from the other surface by penetrating a portion of the finger region away from the first through hole;
A wiring board having a conductive land portion on one surface, the wiring board being mounted on the connection board so that the land portion abuts the protruding portion of the contact piece.

In any of the above electrical connection devices,
The protruding electrode of the semiconductor device or the like is pressed by the contact piece, and thus the contact piece acts as a contact. Each of such electrical connection devices has a plate-shaped seat formed on one surface of the connection substrate, and the seat is formed by a cutting technique using a laser beam, an etching technique, an electroforming technique, a photolithography technique, or the like. Processing can be performed to form contact pieces. Further, although the film-type contact piece is used, it is not necessary to form the protruding electrode, so that the contact piece, that is, the contactor can be easily manufactured, and the cost is reduced accordingly.

Further, in the fifth electrical connection device,
Use as a device to test semiconductor devices by Kelvin connection that cancels circuit resistance in electrical connection devices and testers, contact resistance between contact pieces (contacts) and conductive parts and lead electrodes, and improves measurement accuracy. You can

[0016]

BEST MODE FOR CARRYING OUT THE INVENTION In the following description, it is assumed that any electrical connection device is used to electrically connect a tester (not shown) to the protruding electrode 10 of a semiconductor device such as an integrated circuit. It can also be applied to a device for electrically connecting other machine tool yarns, such as a device for electrically connecting a protruding electrode of a wiring substrate or a film substrate to another substrate.

Although each of the drawings only shows one protruding electrode 10 and one electrical connection portion pressed against it,
The semiconductor device includes a plurality of protruding electrodes 10, and thus any electrical connecting device includes a plurality of electrical connecting portions individually corresponding to the protruding electrodes 10.

The bump electrode 10 is a hemispherical bump electrode formed of a conductive material such as solder or nickel, but may be a bump electrode formed of another conductive material or another shape. It may be an electrode having.

Referring to FIGS. 1 and 2, the electrical connection device 12 includes a film-shaped connection board 14 and a connection board 14.
A plurality of disc-shaped seats 16 disposed on the upper surface of the. Each seat 16 acts as an electrical connection that is pressed against the protruding electrode 10.

The connection board 14 is formed of an electrically insulating material such as polyimide or synthetic resin, has a plurality of through holes 18, and has a plurality of conductive land portions (such as strip-shaped wiring portions). (Not shown).

The through holes 18 are formed in the connection substrate 14 so as to have the same pattern as the arrangement pattern of the protruding electrodes 10 and individually correspond to the protruding electrodes 10. Each through hole 1
8 has a circular plane shape in the example shown, but may have a rectangular plane shape. Each land is seat 1
6 is electrically connected to the tester 6 by a connecting means (not shown).

Each seat 16 is made of a film-like plate material having a spring property and conductivity such as beryllium copper or phosphor bronze to have a circular (or rectangular) planar shape similar to the planar shape of the through hole 18. There is. Each seat 16 has a plurality (four in the illustrated example) formed in the outer region 20 corresponding to the region outside the through hole 18 and the inner region inside the outer region 20.
Of the contact piece 22 and is attached to the upper surface of the connection board 14 so as to cover the through hole 18 in the outer region 20 by an appropriate method such as bonding.

The contact pieces 22 are independently elastically deformable separated from each other by a plurality of windmill-shaped notches 24 formed in the inner region of the seat 16 and communicating with each other, and are directed toward the central portion of the inner region. And extends in the shape of a strip and is equiangularly spaced around the axis of the through hole 18.

In the electrical connection device 12, the protruding electrode 1
0 contacts the contact piece 22 as shown in FIG. 2 (A), and when the protruding electrode 10 and the contact piece 22 are relatively pressed in that state, each contact piece 22 becomes as shown in FIG. 2 (B). Through hole 1
8 elastically deforms. Thereby, the protruding electrode 10 and the seat 1
6 and 6 are in reliable electrical contact. When the protruding electrode 10 separates from the contact piece 22, each contact piece 22 returns to its original state.

Referring to FIG. 3, the electrical connection device 30.
Adds to the electrical connection device 12 a wiring board 32 made of an electrically insulating material such as glass-filled epoxy. The wiring board 32 has a plurality of land portions 34 formed in the same pattern as the through holes 18 and the seats 16 on the upper surface.

Each land portion 34 is formed of a conductive material such as a strip-shaped wiring portion or a connection land. The wiring board 32 is mounted on the lower surface of the connection board 14 so that the land portion 34 faces the contact piece 22. The contact piece 22 of the seat 16 is bent downward in the through hole 18 so that its tip is in contact with the land portion 34.

In the electrical connection device 30, the protruding electrode 1
When 0 touches the contact piece 22 as shown in FIG. 3 (A) and the protruding electrode 10 and the contact piece 22 are relatively pressed in that state, each contact piece 22 is moved as shown in FIG. 3 (B). Is elastically deformed by and the tip is strongly pressed against the land portion 34. As a result, the protruding electrode 10 and the seat 16 are surely brought into electrical contact with each other. When the protruding electrode 10 separates from the contact piece 22, each contact piece 22 returns to its original state.

Referring to FIG. 4, the electrical connection device 40.
Is a plurality of disk-shaped second seats 42 arranged on the lower surface of the connection board 14 so as to cover the through holes 18, and an electrically insulating material such as glass-filled epoxy. The manufactured wiring board 44 is added.

Similar to the seat 16, each of the second seats 42 is formed of a film-like plate material having a spring property and conductivity, such as beryllium copper or phosphor bronze, and has a circular shape (or a shape similar to the planar shape of the through hole 18). It is manufactured in the shape of a rectangle). Each second seat 42 includes a second outer region 46 corresponding to the outer region 20 and a plurality of (four in the illustrated example) second inner regions formed inside the second outer region 46. Contact piece 48 of.

The second contact piece 48 is independently elastically deformable and separated by a plurality of windmill-shaped notches 50 formed in the inner region and communicating with each other, and is strip-shaped toward the central portion of the inner region. And extend at equal angular intervals around the axis of the through hole 18.

In each of the second seats 42, the contact piece 48 has a contact piece 2
It is mounted on the lower surface of the connection board 14 in the outer region 46 by an appropriate method such as bonding so as to face the through hole 18 so as to face the through hole 18. Each second contact piece 48 is bent upward and its tip is located in the through hole 18.

The wiring board 44, like the wiring board 32 in the electrical connection device 30, has a through hole 18 and seats 16 and 4.
2 has a plurality of land portions 52 formed in the same pattern as that of No. 2 on one surface. Each land portion 52 is formed of a conductive material such as a strip-shaped wiring portion or a connection land.

In the wiring board 44, the land portion 52 has the contact piece 22 as in the wiring board 32 in the electrical connection device 30.
, 48, and is mounted on the other surface of the connection substrate 14 so that the land portion 52 contacts the second outer region 46. The second contact piece 48 is bent above the connection board 16 and has its tip positioned inside the through hole 18.

In the electrical connection device 40, the protruding electrode 1
0 contacts the contact piece 22 as shown in FIG. 4 (A), and when the protruding electrode 10 and the contact piece 22 are relatively pressed in that state, each contact piece 22 becomes as shown in FIG. 4 (B). Through hole 1
8 is elastically deformed and the tip is strongly pressed by the second contact piece 48. As a result, the bump electrode 10, the seats 16 and 42, and the land portion 52 are electrically and surely brought into contact with each other. Protruding electrode 1
When 0 separates from the contact pieces 22, each contact piece 22 returns to its original state.

Referring to FIGS. 5 and 6, in the electrical connection device 60, each seat 62 has a film shape having a spring property and conductivity, such as beryllium copper or phosphor bronze, like the seats 16 and 42. The plate material is manufactured in a circular (or rectangular) planar shape similar to the planar shape of the through hole 18.

Each seat 62 has an outer region 64 corresponding to a region outside the through hole 18, and a plurality of (six in the illustrated example) contact pieces 66 formed in an inner region inside the outer region 64.
And is attached to the upper surface of the connection substrate 14 so as to cover the through hole 18 by an appropriate method such as bonding in the outer region 64.

Each contact piece 66 has a plurality of slit-shaped notches 68 formed in the inner region of the seat 62 and communicating with each other.
Are independently elastically deformable from each other, extend in a strip shape toward the center of the inner region, and are equiangularly spaced around the axis of the through hole 18. The tip end portion of each contact piece 66 is bent upward so that the tip end portion is separated from the connection board 16.

In the electrical connection device 60, the protruding electrode 1
0 contacts the contact pieces 66 as shown in FIG. 6A, and when the protruding electrode 10 and the contact pieces 66 are relatively pressed in this state, each contact piece 66 is changed as shown in FIG. 6B. Through hole 1
8 is elastically deformed and the tip is pierced into the protruding electrode 10. As a result, the protruding electrode 10 and the seat 62 are surely brought into electrical contact with each other. When the protruding electrodes 10 are separated from the contact pieces 66, each contact piece 66 returns to its original state, and the puncture marks 70 of the contact pieces 66 as shown in FIG. 6C remain on the protruding electrodes 10.

Referring to FIG. 7, the electrical connection device 72
In the same manner as the electrical connection device 30 shown in FIG. 3, a wiring board 32 is further added to the electrical connection device 60, and each contact piece 6
6 is further bent into the through hole 18 and brought into contact with the land portion 34.

In the electrical connection device 72, the protruding electrode 1
0 moves from the state of being separated from the contact piece 66 to the side of the contact piece 66 as shown in FIG. 7 (A) and comes into contact with the contactor 66, and in this state, the projection electrode 10 and the contact piece 66 are relatively 7B, each contact piece 66 is elastically deformed in the through hole 18 and the tip of the contact piece 66 is protruded.
Stick inside. As a result, the bump electrode 10, the seat 62, and the land portion 34 are surely brought into electrical contact with each other. Protruding electrode 10
When is separated from the contact pieces 66, each contact piece 66 returns to its original state. Also in this electrical connection device 72, the contact piece 66
The puncture marks of the left electrode remain on the protruding electrode 10.

Referring to FIG. 8, the electrical connection device 74
The through hole 18 is also used as a guide hole for the protruding electrode 10 by increasing the thickness of the connection substrate 14. For this reason,
In the electrical connection device 74, each seat 62 is connected to the connection board 1
4 is attached to the lower surface of the contact piece 66, and the tip end side of each contact piece 66 is bent upward to position the tip end of the contactor 66 in the through hole 18.
The electrical connecting device 74 also has a wiring board 44 added, like the electrical connecting device 40 shown in FIG.

The electrical connection device 74 is an electrical connection device 7.
In addition to producing the same effect as the second embodiment, when the protruding electrode 10 is pressed against the contact 66, the protruding electrode 10 is guided by the through hole 18, so that the semiconductor device and the electrical connection device 74 are connected.
This has the effect of preventing relative movement with.

Referring to FIG. 9, the electrical connection device 90.
Has a through hole 18 in the electrical connection device 74 having a square planar shape, and uses a square seat 92. Each of the seats 92 is made of a film-like plate material having a spring property and conductivity, such as beryllium copper or phosphor bronze.
It is manufactured in a plane shape similar to the plane shape of No. 8.

The seat 92 has an outer region 94 corresponding to the region outside the through hole 18, and a plurality of (four in the illustrated example) contact pieces 96 formed in the inner region inside the outer region 94. It is attached to the lower surface of the connection substrate 14 so as to cover the through hole 18 in the outer region 94 by an appropriate method such as bonding.

Each contact piece 96 is formed in the inner region of the seat 92 and has a plurality of slit-shaped notches 9 which communicate with each other.
8, they are independently elastically deformable and separated from each other, extend in a strip shape toward the center of the inner region, and are equiangularly spaced around the axis of the through hole 18. The tip of each contact piece 96 is bent upward so as to move away from the wiring board 44 toward the tip.

According to the electrical connecting device 90, the same effect as that of the electrical connecting device 74 can be obtained.

Referring to FIG. 10, the electrical connection device 10
0 forms each seat by the through hole 18 having a square planar shape and a pair of plate-shaped contact pieces 102 which are completely separated from each other. The contact pieces 102 are mounted on the lower surface of the connection board 14 in such a manner that they extend from the central portion of the through hole 18 to the opposite sides and the tip side desires the through hole 18, and the contact piece 102 is bent so as to be farther from the wiring board 104 toward the tip side. ing.

The wiring board 104 includes a plurality of land portions 106 that are individually associated with the contact pieces 102 and are connected to the corresponding contact pieces 102. The land portion 106 is a part of the strip-shaped wiring portion 108 in the illustrated example.

In the electrical connection device 100, when the protruding electrode 10 contacts the contact piece 102 as shown in FIG. 10A and the protruding electrode 10 and the contact piece 102 are relatively pressed in that state, The contact piece 102 is elastically deformed in the through hole 18 and pierces the tip into the protruding electrode 10. As a result, the bump electrode 10, the contact piece 102, and the land portion 106 are surely brought into electrical contact with each other. The protruding electrode 10 is the contact piece 102.
When separated from, each contact piece 102 returns to the original state.

The electrical connection device 100 includes the circuit resistance in the electrical connection device and the tester, the contact piece 102 and the land portion 1.
It can be used as an apparatus for testing a semiconductor device by Kelvin connection that cancels contact resistance with 06 and improves measurement accuracy.

Referring to FIGS. 11 and 12, the electrical connection device 110 includes a connection substrate 112 formed in a sheet shape by an electrically insulating material such as polyimide, and a flat plate made of an electrically insulating material such as glass-filled epoxy. And a wiring substrate 114 formed in a shape.

The connecting substrate 112 has a plurality of finger regions 118 formed by slit-shaped notches 116 extending in a U-shape (or U-shape) and extending in a cantilever shape. 118 through the first through hole 12
Has 0.

Each contact piece 122 has a finger region 118.
A protrusion that is formed on the upper surface of the finger region 118, has a second through hole 124 that follows the first through hole 120, and penetrates a portion of the finger region 118 away from the first through hole 120 and projects from the lower surface. It has a section 126.

The wiring board 114 has a plurality of land portions 128 on the upper surface, which are individually associated with the contact pieces 122.
Further, the land portion 128 is attached to the lower surface of the connection board 112 so that the land portion 128 contacts the protruding portion 126 of the contact piece 122.

In the electrical connection device 110, the protruding electrode 10 contacts the contact piece 122 as shown in FIG. 11B, and when the protruding electrode 10 and the contact piece 122 are relatively pressed in this state, the fingers Region 118 and contact piece 12
2 is elastically deformed as shown in FIG. As a result, the protruding electrode 10 and the contact piece 122 are electrically and surely contacted with each other, and the protruding portion 126 of the contact piece 122 has the land portion 12.
The contact piece 122 and the land portion 128 are pressed by 8 and electrically contact each other reliably. When the protruding electrode 10 separates from the contact piece 122, the finger region 118 and the contact piece 122 return to their original state.

When the finger region 118 and the contact piece 122 are not deformed as shown in FIG. 11A, the contact point of the protruding electrode 10 with the contact piece 122 is point A in FIG. 11A. However, when the finger region 118 and the contact piece 122 are deformed as shown in FIG. 12A, slippage occurs between the protruding electrode 10 and the contact piece 122, so that the contact of the protruding electrode 10 with the contact piece 122 occurs. Figure 1
Change to point B in 2 (A).

That is, as shown in FIG. 12B, the contact portion of the protruding electrode 10 with the contact piece 122 is the contact area between the protruding electrode 10 and the contact piece 122 due to the elastic deformation of the finger region 118 and the contact piece 122. Due to the relative slip L between them, the point A changes to the point B. Due to this sliding, a part of the oxide film on the surface of the bump electrode 10 is removed, and a good electrical connection state is formed between the bump electrode 10 and the contact piece 122.

In each of the above electrical connection devices, a plate-shaped seat is formed on one surface of the connection board, and the seat is formed by a cutting technique using a laser beam, an etching technique,
The contact piece can be formed by performing processing by electroforming technology, photolithography technology, or the like. Further, although the film-type contact piece is used, it is not necessary to form the protruding electrode on the contact piece, so that the contact piece can be easily manufactured and the cost is reduced accordingly.

Next, referring to FIGS. 13 and 14, FIG.
An example of a method of manufacturing the electrical connecting device 12 shown in FIG. 2 will be described.

First, as shown in FIG. 13A, a sheet-shaped beryllium copper 132 is mounted on one surface of the polyimide film 130 as a material for a seat.

Then, as shown in FIG. 13B, the photoresist layer 13 is formed on the other surface of the polyimide film 130.
4 is formed.

Then, as shown in FIG. 13C, the photoresist layer 134 is exposed to the same pattern as the through holes 18 and developed. As a result, a recess 136 having the same size as the through hole 18 is formed in the photoresist layer 134.

Next, as shown in FIG. 13D, the polyimide film 130 is etched. Thereby, the through hole 18 is formed.

Then, as shown in FIG. 13E, the remaining photoresist layer is removed.

Next, as shown in FIG. 14A, a photoresist layer 138 is formed on the beryllium copper 132.

Then, as shown in FIG. 14B, the photoresist layer 138 is exposed in the same pattern as the seat 16,
It is developed. This causes the photoresist layer 138 to
It remains the same size and shape as 6.

Next, as shown in FIG. 14C, the beryllium copper 132 is etched. This leaves the beryllium copper 132 in the same size and shape as the seat 16.

Then, the remaining photoresist layer is removed as shown in FIG. Thereafter, if necessary, the remaining beryllium copper 132 is bent by the bending jig 140 at a position corresponding to the contact piece, as shown in FIG. 14 (E).

The present invention is not limited to the above-mentioned embodiments, and can be variously modified without departing from the spirit thereof.

[Brief description of drawings]

1A and 1B are diagrams showing a first embodiment of an electrical connection device according to the present invention, in which FIG. 1A is a perspective view and FIG. 1B is a plan view.

2A and 2B are cross-sectional views for explaining the operation of the electrical connection device shown in FIG. 1, in which FIG. 2A is a view showing a state where a protruding electrode is brought into contact with a contact piece, and FIG. It is a figure which shows the state which pressed the electrode and the contact piece relatively.

FIG. 3 is a cross-sectional view showing a second embodiment of the electrical connecting device according to the present invention, (A) showing a state immediately before the protruding electrode is brought into contact with the contact piece, and (B). FIG. 6 is a diagram showing a state in which a protruding electrode and a contact piece are relatively pressed.

FIG. 4 is a cross-sectional view showing a third embodiment of the electrical connecting device according to the present invention, (A) showing a state in which the protruding electrode is brought into contact with the contact piece, and (B) showing the same. It is a figure which shows the state which pressed the protrusion electrode and the contact piece relatively.

5A and 5B are views showing a fourth embodiment of the electrical connecting device according to the present invention, in which FIG. 5A is a perspective view and FIG. 5B is a plan view.

6A and 6B are cross-sectional views for explaining the operation of the electrical connection device shown in FIG. 5, in which FIG. 6A is a diagram showing a state where a protruding electrode is brought into contact with a contact piece, and FIG. It is a figure which shows the state which pressed the electrode and the contact piece relatively, (C) is a bottom view of the protrusion electrode after pressing.

FIG. 7 is a cross-sectional view showing a fifth embodiment of the electrical connecting device according to the present invention, (A) showing a state immediately before the protruding electrode is brought into contact with the contact piece, and (B). FIG. 6 is a diagram showing a state in which a protruding electrode and a contact piece are relatively pressed.

FIG. 8 is a sectional view showing a sixth embodiment of the electrical connecting device according to the present invention.

9A and 9B are diagrams showing a seventh embodiment of the electrical connecting device according to the present invention, wherein FIG. 9A is a bottom view and FIG. 9B is a sectional view.

FIG. 10 is a view showing an eighth embodiment of the electrical connecting device according to the present invention, where (A) is a sectional view and (B) is a bottom view.

FIG. 11 is a view showing a ninth embodiment of the electrical connection device of the present invention, (A) is a perspective view and (B) is a sectional view.

12A and 12B are views for explaining the operation of the electrical connecting device shown in FIG. 11, in which FIG. 12A is a cross-sectional view of a state where a protruding electrode is pressed against a contact, and FIG. It is a figure which shows a displacement state.

FIG. 13 is a process drawing for explaining one embodiment of the method for manufacturing the electrical connection device according to the present invention.

FIG. 14 is a process diagram that follows FIG.

[Explanation of symbols]

10 Projection electrodes 12, 30, 40, 60, 72, 74, 90, 100 of semiconductor devices,
110 Electrical connection device 14,112 Connection board 16,42,92 Seat 18 Through hole 20,42,64,94 Outer area 22,48,66,96,102,122 Contact piece 24,50,68,98,116 Notch 32, 44, 104, 114 Wiring board 34, 52, 106, 128 Land 118 Finger area 120 First through hole 124 Second through hole 126 Projection

Front page continuation (51) Int.Cl. ⁷ Identification code FI theme code (reference) H01R 33/76 505 H01R 9/09 AF terms (reference) 2G003 AA07 AG01 AG03 AG12 AH05 2G011 AA14 AB01 AB06 AB07 AB08 AC14 AE03 AF02 AF07 5E023 AA16 BB11 BB17 BB22 CC23 DD26 EE01 EE09 GG15 HH17 HH26 HH30 5E024 CA18 CA30 5E077 BB12 BB23 BB31 CC16 CC23 DD14 DD20 FF13 FF21 FF30 JJ27 JJ30

Claims (9)

[Claims] 1. A connection board having a through hole, and a conductive plate-like seat disposed on one surface of the connection board so as to cover the through hole, wherein the seat is the through hole. Independently by an outer region corresponding to the outer region of the hole, the outer region being mounted on the connection board, and a plurality of windmill-shaped notches formed in the inner region of the outer region and communicating with each other. Three or more contact pieces which are elastically deformable and separated from each other, which extend in a band shape toward the central portion of the inner region and are equiangularly spaced around the axis of the through hole. Having an electrical connection device. 2. A wiring board having a conductive land portion on one surface thereof, which is mounted on the other surface of the connection board so that the land portion faces the plurality of contact pieces. The electrical connection device according to claim 1, wherein the contact piece is bent toward the other surface side of the connection board, and a tip of the contact piece is in contact with the land portion. 3. A plate-shaped second seat having conductivity, which is disposed on the other surface of the connection substrate so as to cover the through hole, and a conductive land portion, are provided on one surface. A wiring board, wherein the second seat is formed in a second outer region corresponding to a region outside the through hole and a second inner region inside the second outer region and communicates with each other. Three or more contact pieces that are independently elastically deformable and separated by a plurality of second cutouts that extend in a strip shape toward the central portion of the second inner region, and The wiring board has three or more second contact pieces that are equiangularly spaced around the axis, and the wiring board is the other side of the connection board when the land portion is in contact with the second outer region. The second contact piece is bent to one side of the connection board. The electrical connection device according to claim 1, wherein the tip is located in the through hole. 4. A connection board having a through hole, and a conductive plate-like seat disposed on one surface of the connection board so as to cover the through hole, wherein the seat is the through hole. Elastic deformation independently by an outer region corresponding to the outer region of the hole, which is attached to the connection board, and a plurality of notches formed in the inner region inside the outer region and communicating with each other. Three or more contact pieces which are separated as much as possible and which extend inwardly toward the center of the inner region and have three or more triangular contact pieces which are equiangularly spaced around the axis of the through hole. Have,
The electrical connection device, wherein the tip end of each contact piece is bent so that the tip end side is farther from the connection board. 5. A connection board having a through hole, a plate-shaped seat having conductivity, which is disposed on one surface of the connection board so as to cover the through hole, and a conductive land portion. A wiring board mounted on the other surface of the connection board such that the land portion faces the through hole, and the seat corresponds to an area outside the through hole. 3 or more independently separated elastically deformable by an outer region attached to the connection board and a plurality of notches formed in the inner region inside the outer region and communicating with each other. Contact pieces that extend toward the center of the inner region and have three or more triangular contact pieces that are equiangularly spaced around the axis of the through hole. Is the wiring board at a location on the side of the outer region. Together are bent to the side of the center are bent away from the circuit board as the front end side in, is in contact with the land portion at the center of the bent portion, the electrical connection device. 6. A connection board having a through hole, a conductive plate-like seat disposed on one surface of the connection board so as to cover the through hole, and a conductive land portion on one side. A wiring board mounted on one surface of the connection board so that the land portion faces the seat, and the seat corresponds to an area outside the through hole. An outer region that is in contact with the connection substrate and the land portion and a plurality of notches formed in the inner region inside the outer region and communicating with each other enables independent elastic deformation. 3 or more contact pieces that are separated and that extend toward the central portion of the inner region and that have 3 or more triangular contact pieces that are equiangularly spaced around the axis of the through hole. The contact pieces are separated from the wiring board as they approach the tip side. As the are bent on the side of the point or central portion of the outer region, the electrical connecting apparatus. 7. A connection board having a through hole, a pair of electrically conductive plate-like contact pieces extending from the central portion of the through hole to opposite sides, and the contact pieces respectively. A wiring board having a pair of electrically conductive land portions corresponding to the one surface, wherein the land portion is mounted on one surface of the connection substrate in a state where the land portion is in contact with the seat, Electrical connection device. 8. The electrical connection device according to claim 7, wherein each contact piece is bent such that the contact piece is separated from the wiring board toward the tip end side. 9. A connection board having a first through hole in a finger area formed by a slit extending in a U-shape or a U-shape, and a contact piece formed on one surface of the finger area. A contact piece having a second through hole following the first through hole and having a protruding portion penetrating a portion of the finger region away from the first through hole and protruding from the other surface; An electrical connection device comprising: a wiring board having a land portion on one surface, the wiring board being mounted on the connection board such that the land portion abuts on the protruding portion of the contact piece.