JP2003194718A - 材料内部の格子欠陥観察方法 - Google Patents

材料内部の格子欠陥観察方法

Info

Publication number
JP2003194718A
JP2003194718A JP2001396865A JP2001396865A JP2003194718A JP 2003194718 A JP2003194718 A JP 2003194718A JP 2001396865 A JP2001396865 A JP 2001396865A JP 2001396865 A JP2001396865 A JP 2001396865A JP 2003194718 A JP2003194718 A JP 2003194718A
Authority
JP
Japan
Prior art keywords
photoluminescence
light
sample
excitation
observation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001396865A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003194718A5 (enExample
Inventor
Yoshimasa Kawada
善正 川田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Science and Technology Agency
Original Assignee
Japan Science and Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Science and Technology Corp filed Critical Japan Science and Technology Corp
Priority to JP2001396865A priority Critical patent/JP2003194718A/ja
Publication of JP2003194718A publication Critical patent/JP2003194718A/ja
Publication of JP2003194718A5 publication Critical patent/JP2003194718A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Microscoopes, Condenser (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2001396865A 2001-12-27 2001-12-27 材料内部の格子欠陥観察方法 Pending JP2003194718A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001396865A JP2003194718A (ja) 2001-12-27 2001-12-27 材料内部の格子欠陥観察方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001396865A JP2003194718A (ja) 2001-12-27 2001-12-27 材料内部の格子欠陥観察方法

Publications (2)

Publication Number Publication Date
JP2003194718A true JP2003194718A (ja) 2003-07-09
JP2003194718A5 JP2003194718A5 (enExample) 2004-11-25

Family

ID=27602819

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001396865A Pending JP2003194718A (ja) 2001-12-27 2001-12-27 材料内部の格子欠陥観察方法

Country Status (1)

Country Link
JP (1) JP2003194718A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009054771A (ja) * 2007-08-27 2009-03-12 Japan Aerospace Exploration Agency 半導体結晶の欠陥評価方法及び評価装置
JP2025008952A (ja) * 2023-07-06 2025-01-20 レーザーテック株式会社 検査装置及び検査方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009054771A (ja) * 2007-08-27 2009-03-12 Japan Aerospace Exploration Agency 半導体結晶の欠陥評価方法及び評価装置
JP2025008952A (ja) * 2023-07-06 2025-01-20 レーザーテック株式会社 検査装置及び検査方法

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JP2003194718A (ja) 材料内部の格子欠陥観察方法

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