JP2003185521A - Test gas filler into electronic component - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To quickly fill a test gas into an electric component and to quickly transport the electric component to an inspection device, by automating a process of filing the gas and transporting the device. <P>SOLUTION: A first transportation means 9 supported by a uniaxial robot 1 is transported to a loading point P1. A table 17 of the first transportation means 9 is raised to receive an empty pallet 15 and then it is lowered and transported to a disposition point P2. At the disposition point P2, electronic components are arrayed on the empty pallet 15, which is transported to a delivery point P3. At the delivery point P3, the pallet 15 is housed in a filler 25 from the table 17 by a delivery means 23. An inactive gas is fed and packed in the electronic component by the filler 25. The pallet 15 on which the components have been filled is taken out of the filler 25 and put on a table 21 of a second transportation means 11, and then transported to a transfer point P4. The electronic components are transferred to an inspection device 29 from the pallet 15 at the transfer point P4. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a test gas filling device for an electronic component, and a test gas filling device for filling a test inert gas into the electronic component to test the airtight state of the electronic component. Regarding the device.

[0002]

2. Description of the Related Art Electronic parts, such as high-frequency vibrators, may be corroded by dust or moisture inside, which may corrode the electrodes or the vibrating body or make the whole operation unstable. Airtight construction is used to prevent ingress of moisture.

In the manufacturing process of the high frequency oscillator, a leak is measured using an inert gas, and a test for removing the leaking component is performed.

Conventionally, in order to inspect the airtight state of electronic parts such as a high-frequency oscillator, many high-frequency oscillators are randomly placed in a large container and hermetically sealed. After forcibly pressurizing active gas for about 1 hour, take out the high-frequency vibrator from the container,
For example, an operator moves the high-frequency vibrators one by one to an inspection device and inspects them, and selects those having no leakage as non-defective products and those in which leakage is detected as defective products.

A high-frequency oscillator in which an inert gas is forcibly pressurized varies depending on the type and size after being taken out of the container, but for a high-frequency oscillator of several mm square, for example, within 5 minutes or 10 minutes. If the inspection device is not used, the inactive gas that has penetrated into the inside of the high-frequency oscillator, which is inferior in airtightness, will escape and the inspection cannot be performed.

[0006]

However, in the conventional method, although a large number of high-frequency vibrators can be forcibly pressurized with an inert gas, one worker can remove high-frequency vibrators taken out from the container one by one. Since it is transferred to the inspection device by hand and the discrimination work is performed, the workability is poor, and it is easy for a situation in which a large number of high-frequency vibrators are not applied to the inspection device within 5 minutes or 10 minutes, which is important for ensuring the reliability of the inspection. There was a difficulty.

Moreover, many high-frequency oscillators that cannot be subjected to the inspection device within 5 or 10 minutes need to be put in the container again and filled with the inert gas, which also deteriorates the inspection efficiency. It was a factor that raised the cost.

The present invention has been made to solve such a problem, and automates the process of filling a test gas into an electronic component and transferring the test gas to an inspection device, thereby promptly filling and inspecting the test gas. An object of the present invention is to provide a test gas filling device capable of ensuring transfer to the device.

[0009]

In order to solve such a problem, an electronic component test gas filling apparatus according to the present invention is provided with a first and a second transfer means, a component supply means, an arrangement means, and a filling means. It is configured to have a device, a loading / unloading means, a transfer means, and a control means.

The first transfer means is arranged such that a plurality of electronic components filled with the test gas are arranged in a plate-shaped empty pallet, and the electronic components filled with the test gas are arranged. The transfer position is the position where the electronic components are transferred to the inspection device that inspects the test gas for leakage, and the stacking position of the empty pallet and the test gas are placed between the array position and the transfer position. When the loading / unloading position for loading / unloading the pallet to fill the pallet is linearly provided, the pallet is transferred to the arrayed arrangement, the stacking position, and the loading / unloading position while being displaceably controlled.

The second transfer means is on the transfer position side of the first transfer means, and is controlled to be displaced at the stacking position, the loading / unloading position, and the transfer position to transfer the pallet, The component supplying means supplies a plurality of electronic components in an aligned state, and the arranging means arranges the electronic components from the component supplying means on the empty pallet at the arrangement position by the first transfer means. .

The above-mentioned filling device has a plurality of accommodating portions in the vertical direction in which the respective pallets are accommodated from the take-in / out position side and which can be hermetically sealed by the lid, and is vertically displaced near the take-in / out position. Is arranged as possible,
When the pallet is stored and sealed, the test gas is filled in the storage portion for a predetermined period.

The loading and unloading means inserts the pallet located at the loading and unloading position into the storage part having the opened lid by the first transfer means, completes the filling with the test gas, and opens the lid. The pallet is taken out from the storage portion to the second transfer means located at the loading / unloading position.

The transfer means transfers the electronic components from the pallet located at the transfer position to the inspection device side by the second transfer means.

The control means repeats stopping and transferring the empty pallets from the stacking position to the unloading position through the arranging position to control the displacement of the first transfer means, and moves the pallet from the unloading position to the unloading position. The arranging means is arranged so as to arrange the electronic parts on the pallet when the empty pallet is at the arranging position by repeatedly stopping and transferring to the stacking position via the transfer position to control the displacement of the second pallet. When the pallet in which the electronic components are arranged is transferred to the loading / unloading position, the filling device is controlled to be displaced so that the lid is opened and the storage part is positioned at a position corresponding to the loading / unloading position. By inserting and removing the pallet into the storage unit by closing and closing the lid to seal the storage unit, and control the filling of the test gas in the storage unit, When the filling period of constant has elapsed,
In place of the first transfer means, the second transfer means is displacement-controlled to the take-out position, the lid is opened to control the displacement of the storage part to a position corresponding to the take-out position, and the storage means is used for the storage. The pallet in the unit is controlled to be pulled out onto the second transfer means, and the electronic component is transferred from the pallet transferred from the loading / unloading position to the transfer position by the second transfer means to the inspection device. It controls the transfer means.

Further, according to the present invention, in the above-mentioned structure,
The control means records the transferred position information of the electronic components transferred from the pallet to the inspection device by the transfer means and the elapsed time from the end of the filling for each pallet, and the accumulated time thereof. When the predetermined transfer period is exceeded, the transfer operation of the transfer means is stopped and controlled, and the second transfer means is controlled to transfer the remaining pallet of the electronic component from the transfer position to the stacking position. Then, when the remaining pallet of the electronic component is positioned at the array position by the first transfer means, the component supply means for the transfer trace position of the electronic component based on the transferred position information. Preferably, the arranging means is controllably configured to replenish the electronic components.

Further, according to the present invention, in the above-mentioned structure, an aligning unit for aligning and supplying a plurality of these electronic components in a single row and an aligning unit for aligning the electronic components from an auxiliary pallet in which the electronic components are arranged in advance. It is also possible to have a configuration in which the above-mentioned component supply means is formed by having a transfer means for transferring so as to be in a one-row state.

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. First, the outline of the test gas filling apparatus according to the present invention will be described.

FIG. 1 is a schematic front view for explaining a test gas filling apparatus according to the present invention. In FIG. 1, a horizontally long uniaxial robot 1 in which a columnar body is placed horizontally is provided with a motor M1 arranged inside the left end in the figure, a pulley 3a connected to this rotation shaft, and a inside right end in the figure. A pulley 5a,
It has a belt 7a stretched around the pulleys 3a and 5a.

The uniaxial robot 1 includes the pulleys 3a, 5
a, a motor M2 arranged on the upper side of the belt 7a inside the right end in FIG. 1, a pulley 3b connected to this rotating shaft, and a pulley 5b arranged inside the left end in FIG.
A belt 7b is provided on the pulleys 3b and 5b in parallel with the belt 7a.

The uniaxial robot 1 has a longitudinal direction (see FIG. 1).
Guide rails (not shown) provided on the side surface
The first transfer means 9 is slidably supported and connected to the lower belt 7a, and the second transfer means 11 is also slidably supported by the guide rail (not shown) and connected to the upper belt 7b. Has been done.

The first transfer means 9 moves at a predetermined speed between the array position P2, the stacking position P1 and the loading / unloading position P3, which will be described later, in the rightward direction from the left end side of the uniaxial robot 1 by the forward and reverse rotations of the motor M1. And reciprocating at a pitch,
And it is controlled to be able to stop at those positions. The details will be described later.

The second transfer means 11 is the first transfer means 9
On the further right side, the motor M2 is controlled so that it can reciprocate between the stacking position P1, the loading / unloading position P3, and the transfer position P4 at a predetermined speed and pitch and can be stopped at those positions. The details will be described later.

The first transfer means 9 has an elevating shaft 13 supported so as to be accommodated in the main body. The elevating shaft 13 is arranged in the first transfer means 9 and is not shown in the figure. As a result, a plate-like table 17 is mounted on the top of the lifting shaft 13 for positioning and holding a pallet 15 which will be described later. ing.

The second transfer means 11 is also the first transfer means 9
A plate-like table 21 on which the pallet 15 is placed is formed on the top of the elevating shaft 19.

In the first and second transfer means 9 and 11, the tables 17 and 21 are normally located at the lowest position except the stacking position P1, and the lowest positions thereof are located substantially on the same plane. There is.

The first transfer means 9 is, under a predetermined control,
With the pallet 15 from the left end in the figure of the uniaxial robot 1 stopped to the right by several pieces, the lifting shaft 13 is lifted and stopped, and the pallet 15 at the lowermost position among the pallets 15 stacked on the table is moved to the table. After being placed on 17, the elevating shaft 13 is lowered and stopped, and the uniaxial robot 1 is transferred and controlled in the left end direction in the drawing.

The position where the plurality of pallets 15 are stacked is
For convenience, the stacking position P1 is set. 1st transfer means 9
When the axis robot 1 is stopped near the left end in the drawing and electronic components are arranged on the pallet 15 by the arrangement means described later, the uniaxial robot 1 is controlled to be moved to the right end side in the drawing.

The position where the electronic components are arranged on the pallet 15 is referred to as an arrangement position P2 for convenience. This array position P2
In, the first transfer means 9 is displaced stepwise at the arrangement position P2, which will be described in detail later.

The first transfer means 9 is stopped at a position where the pallet 15 has been transferred to the right by several units from the array position P2 beyond the stacking position P1, and the pallet 15 is stored in the filling device 25 by the loading / unloading means 23. At this time, the uniaxial robot 1 is controlled to be moved in the stacking position P1 direction.

The filling device 25 is formed by vertically stacking a plurality of storage portions 27 for storing the individual pallets 15, which will be described later in detail.

When the pallet 15 is taken out from the filling device 25 and placed on the table 21, the second transfer means 11 forms the pallet 15 into several uniaxial robots 1 to the right end side in FIG. It is controlled to be transferred in the direction and stopped.

For the sake of convenience, the position where the pallet 15 is put in and taken out between the first and second transfer means 9 and 11 and the filling device 25 is referred to as the put-in / take-out position P3, while the second transfer means 11 is put in and taken out. The position that moves from P3 toward the right end side and stops is referred to as a transfer position P4 for convenience.

Pallet 1 located at this transfer position P4
5, the electronic components are transferred to the inspection device 29 (not shown in FIG. 1) side. At the transfer position P4, the second transfer means 11 is also displaced stepwise, which will be described in detail later.

Hereinafter, the test gas filling apparatus according to the present invention will be described in detail with reference to FIGS. 1 and 2. FIG. 2 is a schematic plan view of the test gas filling apparatus according to the present invention.

In FIG. 2, a holding means for holding and releasing the pallet 15 so that it can be stacked at a stacking position P1 which is closer to the right by several pallets 15 from the left end of the horizontally placed uniaxial robot 1 in the figure. Is disposed as a guide portion 31.

As shown in FIG. 3, the pallet 15 is made of a hard material having good corrosion resistance, for example, a rectangular plate made of stainless steel, and is an electronic component (simply abbreviated as component in the drawing) 33 filled with an inert gas. There are a plurality of elongated recessed grooves 35 that fit into each other in parallel to the longitudinal direction at a predetermined interval.

The recessed grooves 35 are used for positioning the electronic parts 33 in a continuous arrangement in the longitudinal direction, as shown in FIG.
The width is slightly wider than the width shape of the electronic component 33 from the lower end in A, and the depth dimension is such that the upper surface of the electronic component 33 is exposed, and is formed up to the vicinity of the upper end in the figure. Reference numeral 35a in FIG. 3 is a thin extrusion groove used when the electronic component 33 is extruded, as will be described later.

When the recessed groove 35 has a depth dimension equal to or deeper than the thickness of the electronic component 33, as shown in FIG. 3D, the eaves 35b partially closes the recessed groove 35 and the electronic component 33 pops out. Can be prevented.

At both ends (upper and lower ends in FIG. 3) of the pallet 15 in the longitudinal direction, step portions are formed on the back surfaces (opposite sides of the concave grooves 35) of both short sides, and the locking portions 37 are formed. The engaging portion 39 is formed in the vicinity of the lower short side in the drawing so as to penetrate therethrough. The locking portion 37 can be formed near the long side of the pallet 15.

The guide portion 31 in FIG. 2 has a pair of U-shapes or a box shape, and as shown in FIG. 4, a plurality of pallets 15 are laminated inside, and the uniaxial robot 1 It is arranged on a base not shown above.

On the bottom side of the guide portion 31, the pallet 15
The thin claws 41 that engage with the locking portions 37 are arranged such that they can move back and forth from the facing position.

The claw 41 is supported by a pair of open / close cylinders 43 arranged so as to face the bottom surface side of the guide portion 31, and is engaged with the engaging portion 37 of the lowest pallet 15 by the forward movement of the cylinder 43. Then, they are supported and the locking with the locking portion 37 is released by the backward movement to secure the pallet 15 being taken out from below. In addition, in FIG. 4, the cylinder 43 is not shown except for FIG.

In the guide portion 31, as shown in FIG. 4A,
Normally, the pallet 1 at the bottom of the stacked pallets 15
The pawl 41 is locked to the locking portion 37 of the fifth transfer means 5, and the pallet 15 of the table 21 of the second transfer means 11 is placed on the second transfer means 11 as shown in FIG. When the table 21 is raised and the pallet 15 on the table 21 is brought into contact with the pallet 15 at the lowermost position, the pawl 41 is moved backward by the cylinder 43 as shown in FIG.
Is unlocked.

Then, as shown in FIG. 4D, table 2
1 moves up by one pallet and pushes up the pallet 15 at the lowermost position, the movement of the table 21 is stopped, and the pawl 41 is projected by the forward movement of the cylinder 43, as shown in FIG. The table 21 is lowered as shown in FIG. F, and the empty pallet 15 is supplied to the guide portion 31. 4G will be described later.

The pallet 15 in the guide portion 31 can be manually supplied to the guide portion 31 from above.

For the table 17 of the first transfer means 9,
To receive the pallet 15 from the guide part 31 and descend,
4A to 4F may be reversed, that is, steps F to A may be performed.

Such first and second transfer means 9 and 11
The above operations, the vertical movements of the tables 17 and 21 by the operations of the elevating shafts 13 and 19, and the operations of the cylinder 43 are performed by the control function of the control means 45 (see FIG. 2) described later.

In FIG. 2, an arrangement means 47 for arranging the parts 33 on the pallet 15 is arranged on a base (not shown) so that the parts 33 are arranged on the pallet 15 on the left side of the pallet 15 from the guide portion 31. Has been done.

The arranging means 47, as shown in FIG.
The operation arm 49 is arranged on the axis robot 1 at the arrangement position P1 along the concave groove 35 of the pallet 15, and the suction nozzle 51 protruding from the lower surface of the operation arm 49 is formed.

At the tip of the operation arm 49, as shown in FIG. 2, a known vibrating bowl feeder 53 for sending out the electronic components 33 one by one in the same direction is arranged and arranged. A known vibrating linear feeder 55, in which the top of the electronic component 33 is linearly arranged, is connected to the electronic component 33 and extends below the operation arm 49 to the vicinity of the pallet 15.

The electronic components 33 are not shown in the pallet 15, the bowl feeder 53, and the linear feeder 55.

The suction nozzle 51 of the arrangement means 47 is shown in FIG.
As shown in FIG. 3, the leading electronic component 33 arranged in the arrangement path 55a of the linear feeder 55 is contacted with and sucked by the electronic component 33.
After ascending, the pallet 15 moves onto the concave groove 35 and descends, accommodates the electronic component 33 in the concave groove 35, releases the suction, and ascends, and reciprocates back to the arrangement path 55a of the linear feeder 55. The displacement is controlled by the control means 45. Reference numeral 55b in FIG. 5C is a stopper for stopping the leading electronic component 33.

Therefore, by reciprocating the suction nozzle 51, the electronic components 33 are sequentially arranged in a line from the linear feeder 55 on the pallet 15.
The arrangement of the arrangement unit 47 is not limited to that.

The first transfer means 9 stops so that the concave groove 35 at the end of the pallet 15 and the arrangement path 55a of the linear feeder 55 are aligned, and each time a predetermined number of electronic parts 33 are arranged in the concave groove 35. The displacement is sequentially controlled in a stepwise manner at the formation pitch of the concave grooves 35, and the adjacent concave grooves 35 and the arrangement path 55a are aligned.

A filling device 25 is disposed in the vicinity of the uniaxial robot 1 at the loading / unloading position P3 along the uniaxial robot 1 beyond the stacking position P1 from the array position P2.

This filling device 25, as shown in FIG.
Each of the pallets 15 has a cavity 57 in which the cavities 57 are accommodated, and the accommodating portions 27 are vertically stacked and integrated to form a rectangular parallelepiped. The holding plate 59 is arranged vertically along this side surface. It is held so that it can move up and down.

That is, the filling device 25 is similar to that shown in FIGS.
As shown in FIG. 7, the pair of rails 61 provided in the longitudinal direction of the holding plate 59 are gripped and supported slidably in the vertical direction, and are arranged below the holding plate 59 and between the rails 61. The side surface portion is screwed into the feed screw 63 extending between the rails 61 along the holding plate 59 from the stepping motor M3, and one or a plurality of the storage portions 27 are accommodated by the operation of the motor M3 via the control function of the control means 45. The displacement is controlled in the vertical direction by a distance of minutes.

Each storage section 27 of the filling device 25 has an opening on the front side (left side in FIG. 6) which can be opened and closed by a lid 65, and a pipe 67 is connected to the inside on the back side, and in the middle of this. The valve 69 is inserted.

The lid 65 of each storage section 27 is provided with a means 2 for taking in and out.
Cylinders 71 arranged on the upper side by one or several in the number of storage sections 27 from 3 and the opening / closing operation section 7 protruding therefrom.
It is opened and closed by the opening and closing means 75 formed with 3.

That is, the opening / closing operation portion 73 is brought into contact with the lid 65 by the forward movement of the cylinder 71, and the opening / closing operation portion 73 is moved.
While holding the lid 65 by an appropriate opening operation of the storage section 2
7, the opening / closing operation part 73 moves backward while holding the lid 65 by the backward movement of the cylinder 71, and the opening is opened.

By the forward movement of the cylinder 71, the lid 65 held by the opening / closing operation portion 73 is applied to the opening of the storage portion 27,
By appropriately closing the opening / closing operation unit 73, the lid 65 is brought into close contact with the opening of the storage unit 27 to seal the inside of the storage unit 27.

The above-mentioned loading / unloading means 23 is arranged on the side opposite to the filling device 25 with the tables 17 and 21 of the first and second transfer means 9 and 11 located at the loading / unloading position P3 interposed therebetween.

The take-in / take-out means 23 is formed of a cylinder 77 and a take-in / take-out shaft 79 having an L-shaped tip protruding from the cylinder 77 onto the tables 17 and 21.

The forward / backward movement of the cylinder 77 pushes the tip of the loading / unloading shaft 79 to the engaging portion 39 of the pallet 15 and controls the engagement with the engaging portion 39.
Further, the pallet 15 is controlled to be extruded to fill the pallet 15 with the filling device 25.
It is controlled to be pushed into the open space 57 of the storage portion 27, and the operation is controlled so that the distal end of the loading / unloading shaft 79 and the engaging portion 39 of the pallet 15 are disengaged and retracted to the original position. .

The take-in / take-out shaft 79 has the lid 65 previously opened by the opening / closing means 75, and the table 21 of the second transfer means 11 is provided.
With respect to the storage portion 27 displaced to the position, the forward / backward movement of the cylinder 77 causes the loading / unloading shaft 79 to project into the storage portion 27, and the tip end thereof is engaged with the engaging portion 39 of the pallet 15, and then the second transfer is performed. The table 21 of the means 11 is pulled out, and the engagement with the engagement portion 39 of the pallet 15 is released,
Further, the operation is controlled so as to retreat to the original position.

Cylinder 77 of these loading / unloading means 17,
Operations of the loading / unloading shaft 79, the cylinder 71 of the opening / closing means 75, and the opening / closing operation section 73, and the cylinder 7 of the loading / unloading means 23.
7 and the operation of the loading / unloading shaft 79 are performed under the control function of the control means 45.

The storage section 27 in which the pallet 15 is stored is
As described above, the cover 65 is at the position where the lid 65 is opened by the opening / closing means 75, and the storage section 2 in which the pallet 15 is stored is stored.
7, the lid 65 is closed by the opening / closing means 75, and then the inert gas is filled in the housing portion 27.

When the pallet 15 is stored in the storage section 27 of the filling device 25 and the lid 65 is closed and the inside is sealed, the valve 69 is opened to evacuate the space 57. Therefore, an inert gas such as helium gas is pressurized at a predetermined high pressure, for example, for about 1 hour.

The opening / closing control of the valve 69 and the filling time control of the inert gas are also performed under the control function of the control means 45.

After the press-in period of the inert gas has passed, the lid 65 is opened by the opening / closing means 75 and the pallet 15 is taken out by the take-in / out means 17.

In FIG. 2, transfer means 81 for transferring the electronic parts 33 from the pallet 15 to the right of the pallet 15 from the loading / unloading position P3 is provided on the uniaxial robot 1 and in the vicinity thereof with a base (not shown). It is placed on a stand.

As shown in FIG. 7, the transfer means 81 has an operation arm 83 arranged along the concave groove 35 on the pallet 15 located at the transfer position P4 so as to traverse the uniaxial robot 1.
And a thin operation piece 85 protruding from the lower surface of the operation arm 83.
And an alignment section 87 arranged below the tip of the operation arm 83,
The electronic device 33 aligned in the aligning section 87 is inspected by the inspection device 2
9 and a transfer arm 89 to be transferred.

The operation piece 85 of the operation arm 83 is the pallet 15
Of the aligning groove 87 of the aligning portion 87, which is inserted from the pushing groove 35a at the end of the aligning groove 35 and slides in the concave groove 35 in the longitudinal direction thereof.
The electronic component 33 is pushed out and slid to the position a and stopped, and the pallet 1 is pulled up from the alignment path 87a.
The displacement is controlled by the control means 45 so that it is inserted back into the extrusion groove 35a or the concave groove 35 of No. 5 in FIG.

Therefore, by reciprocating the operation piece 85, one or a plurality of electronic components 33 can be slid and aligned from the concave groove 35 of the pallet 15 to the alignment portion 87.

The second transfer means 11 is the pallet 1
5 is stopped so that the groove 35 at the right end of the groove 5 and the alignment path 87a of the alignment portion 87 are aligned, and all the electronic components 3 in the groove 35 are stopped.
Each time 3 is moved to the side of the alignment path 87a, the displacement is controlled stepwise at the formation pitch of the concave groove 35, and the concave groove 35 on the left side is controlled.
And the alignment path 87a are aligned.

The transfer arm 89 is under the control of the control means 45.
One or a plurality of electronic components 33 aligned in the aligning section 87 are aligned by the head 91 and transferred to a predetermined position on the rotary table 93 of the inspection device 29, and the head 91 is again transported.
Is reciprocated so as to return to the alignment section 87.

The head 91 has a plurality of accommodating portions 91a for accommodating the electronic components 33 one by one at the same intervals as the component arrangement in the inspection device 29.
The electronic parts 33 are housed one by one in alignment with the arrangement path 87a of 7 and transferred to the rotary table 93.
3 is a means (not shown) from the head 91 to the turntable 9
Reprinted in 3. The configuration of the transfer arm 89 is not limited to this.

At the transfer position P4, the control means 45 holds the transfer progress information of the electronic parts 33 of the pallet 15.

The control means 45 counts the number of electronic parts 33 transferred by the transfer means 81 and transfers the transferred position information and the position information of the electronic parts 33 which are not transferred,
Each pallet 15 has a function of recording the elapsed time from the end of filling with the inert gas (transfer cumulative time), and when the pallet 15 with the electronic components 33 left is returned to the array position P2, It also has a control function of instructing the arrangement means 47 of the arrangement start position of the new electronic component 33.

That is, when the accumulated time exceeds a predetermined transfer period, for example, 5 minutes or 10 minutes, the control means 45 controls the operation of the transfer means 81 so that the remaining pallets 15 of the electronic parts 33 are removed. When the second transfer means 11 is controlled to transfer to the stacking position P1 and the first transfer means 9 receives it and is positioned at the array position P2, based on the transferred position information, the transfer position is determined based on the transferred position information. It has a function of controlling the arranging means 47 so that the electronic parts 33 are replenished and arranged.

Strictly speaking, the end of the filling is the time when the degassing is started after the pressurization of the inert gas into the storage portion 27 of the filling device 25 is finished, and the lid 65 of the storage portion 27 is opened. Although it is a time point, it can be a time point when each pallet 15 is released from the storage section 27 and opened.

The inspection device 29 is, for example, 90 ° clockwise.
A rotating table 93 that rotates one by one and a known inspection unit that detects a leak of an inert gas from the electronic component 33 one by one at a position rotated by 180 ° when three electronic components 33 are arranged at a predetermined position, for example. Have 95.

The control means 45 of FIG. 2 is formed by having an electronic circuit and a mechanism section for operating the above-mentioned constituent elements by the electronic circuit, and other functions of the above-mentioned control function will be clarified by the following operation explanation. To be done.

Next, the operation of the above-described test gas filling apparatus of the present invention will be described. Initially, in the guide portion 31 of FIG. 2, the claw 41 moves forward by the operation of the cylinder 43 of FIG. 4 and is engaged with the engaging portion 37 of the lowest pallet 15, and a plurality of pallets 15 are stacked. There is.

In this state, under the control of the control means 45, the first
When the uniaxial robot 1 is moved to below the guide portion 31, the table 17 of the first tranfer means 9 moves up and contacts the pallet 15 at the lowest position as shown in FIGS. 4F and 4E. As shown in FIG. 4C, the claw 41 is retracted by the operation of the cylinder 43, and the locking with the locking portion 37 of the pallet 15 is released.

Then, as shown in FIG. 4D, table 1
With the pallet 15 on 7, move down one sheet,
As shown in FIGS. 6A to 6C, the pawl 41 moves forward and is locked by the locking portion 37 to hold the pallet 15, while the table 17 on which one pallet 15 is placed descends and stops.

Next, the first transfer means 9 moves the uniaxial robot 1 to the left side in FIG. 2, and stops at the position where the groove 35 at the right end and the linear feeder 55 are aligned at the array position P2.

With respect to the pallet 15, suction and movement of the suction nozzle 51 protruding from the operation arm 49 of the arrangement means 47,
Repeated release operation causes linear feeder 55 to 1
The electronic component 33 is a groove 35 in the pallet 15
It is stored in a storage array and is repeated a predetermined number of times.

When the storage of the electronic component 33 in the rightmost groove 35 is completed, the pallet 15 is slide-controlled by 351 grooves to the right in the figure, and the adjacent groove 35 and the tip of the linear feeder 55 are controlled to coincide with each other. To be done.

Thereafter, a predetermined number of electronic components 33 are successively stored and controlled in the plurality of recessed grooves 35, and the number of arranged electronic components 33 is counted by the control means 45, and the predetermined number or the number of arranged electronic components 33 is determined. Repeated until full.

When the number of electronic components 33 stored and arranged on the pallet 15 reaches a predetermined value or becomes full, the pallet 15 is moved to the right by the uniaxial robot 1 and the stacking position P1 is reached.
It is stopped at the withdrawal / insertion position P3.

As shown in FIG. 6, the filling device 25 is vertically displaced by the operation of the motor M3 under the control of the control means 45, and is an empty storage portion 27, from which the pallet 15 is stored. Opening / closing means 75 for storing section 27
It is displaced to the same position as the opening / closing operation section 73.

When the pallets 15 are not stored in all the storage sections 27, the upper or lower storage section 27 is sequentially displaced to the same position as the opening / closing operation section 73 of the opening / closing means 75. To be done. After that, the control means 4
Any storage unit 27 is displaced under the control of 5.

In the filling device 25, the opening / closing operation unit 73 is covered with a lid 65.
After opening the opening of the storage portion 27 by holding the lid 65 by opening the storage portion 27 by bringing the storage portion 27 into contact with the opening portion, the displacement of the storage portion 27 is controlled downward by the operation of the motor M3, and the first transfer means 9 moves. It is displaced to the same position as the table 17.

When the pallet 15 and the opened storage part 27 are displaced to the same position, the cylinder 7 of the loading / unloading means 23 is moved.
7 moves to move the loading / unloading shaft 79 into the engaging portion 3 of the pallet 15.
9 and the push-in / take-out shaft 79 is further pushed out to store the pallet 15 in the storage portion 27.
When the tip end of the pallet is disengaged from the engaging portion 39 of the pallet 15, the loading / unloading shaft 79 retracts to the original position.

The storage section 27 in which the pallet 15 is stored is
The displacement of the motor M3 is controlled in the upward direction, and the lid 65 is brought into contact with the opening of the storage portion 27 by the opening / closing operation portion 73 and the sealing operation is performed.

Then, the storage portion 27 in which the pallet 15 is stored is degassed through the opening operation of the valve 69, and then the inert gas is pressed into the storage portion 27. The injecting of the inert gas is continued at a predetermined pressure for about 1 hour.

After the pallet 15 is stored in the storage section 27, the first transfer means 9 moves the uniaxial robot 1 to the left and stops at the stacking position P1, and thereafter, the stacking position P1, the arrangement position P2, and the like. The operation at the loading / unloading position P3 is repeated.

When the pallet 15 is received after the press-in time of the inert gas has elapsed, the storage unit 27 in the filling device 25, whose press-in time has elapsed, is displaced to the same position as the opening / closing operation unit 73 by the operation of the motor M3. The opening / closing operation section 73 is used to cover 65.
After the door is opened, the opened storage portion 27 is displaced to the positions of the tables 17 and 21 of the first and second transfer means 9 and 11 at the loading / unloading position P3.

Under the control of the control means 45, the table 21 of the second transfer means 11 is placed at the same position as the storage portion 27, and the cylinder 77 of the loading / unloading means 23 is operated to move the loading / unloading shaft 79 into the storage portion. 27 is moved forward to engage the engaging portion 39 of the pallet 15, the retracting shaft 79 is retracted to move the pallet 15 onto the table 21, the engagement with the pallet 15 is released, and the retracting shaft is further moved. Move 79 back.

Next, the second transfer means 11 is moved to the right to the transfer position P4, and is stopped at the position where the groove 35 at the right end is located under the operation arm 83 of the transfer means 81.

Then, one or a plurality of electronic components 33 are slid to the alignment path 87a of the alignment section 87 to be aligned by the operation piece 85 projecting from the lower surface of the operation arm 83, and then the operation piece 85 is repeatedly operated. A predetermined number of electronic components 33 are aligned in the alignment section 87.

If the alignment path 87a has the same length as the concave groove 35 of the pallet 15, one row of the electronic components 33 can be pushed out to the alignment path 87a at a time by one sliding operation of the operation piece 85. It is possible.

The electronic components 33 aligned in the alignment section 87 are
For example, each three storage units 91a of the head 91 of the transfer arm 89
And is transported to the rotary table 93 of the inspection device 29 and transferred to a predetermined position on the rotary table 93.
The head 91 returns to the alignment section 87 again.

When the electronic parts 33 in the rightmost concave groove 35 have been moved to the aligning section 87, the pallet 15 is formed into the concave groove 35 and the pallet 15 is slide-controlled to the right side in the drawing, and is transferred to the adjacent concave groove 35. The displacement of the operation arm 83 of the means 81 is controlled stepwise so that they coincide with each other.

After that, when the electronic components 33 have been sequentially transferred to the aligning portion 87 in the plurality of concave grooves 35, the displacement control is performed stepwise and the number of the electronic components 33 arranged is counted by the control means 45. And is repeated until the predetermined number or array number is full.

On the other hand, the second transfer means 11 returns to the stacking position P1 when the predetermined transfer period ends, and stacks the pallet 15 on the lowermost stage of the guide portion 31 by the operation shown in FIG.

The first and second transfer means 9 and 11 are placed on the left side of the first transfer means 9, that is, on the transfer position P4 or the inspection device 29 side so that the first and second transfer means 9 and 11 do not hit each other. It is located and controlled by the control means 45.

When the inspection device 29 has, for example, three electronic components 33 arranged at predetermined positions, the inspection device 29 rotates 90 ° clockwise and newly arranges three electronic components 33 at predetermined positions.

In the inspection device 29, 180 ° from the transfer position.
The electronic part 33 is wrapped by the rotated inspection unit 95,
The presence or absence of the filling gas is measured by a known method. The presence or absence of the filling gas corresponds to whether or not the inspection unit 95 can measure.

It is assumed that the electronic component 33 in which the filling gas has been detected has a problem of airtightness, and the three electronic components 33 are moved from the rotary table 93 at a position (not shown) rotated by 90 ° from the inspection unit 95, for example. When transferred, it is classified as defective.

On the other hand, the electronic component 33 for which the filling gas is not detected is classified as a non-defective product when it is moved from the rotary table 93.

The time for arranging the electronic parts 33 on the pallet 15 at the arranging position P2, the time for filling the storage part 27 of the filling device 25 with the inert gas, and the electronic part 33 from the pallet 15 on the stacking position P4. The time for transferring 33 to the inspection device 29 is longer than the time for the first and second transfer means 9 and 11 to move between the stacking position P1, the arrangement position P2, the loading / unloading position P3, and the transfer position P4. In particular, the filling time of the inert gas is long.

Therefore, the electronic components 3 on the pallet 15 are
Pallet 1 during the arrangement time of 3, during the filling time of the inert gas
While the electronic component 33 is placed on the inspection device 29 from above 5, the first and second transfer means 9, 1 are provided between the stacking position P1, the arrangement position P2, the loading / unloading position P3, and the transfer position P4.
1 is moved or another movement of the pallet 15 is performed in parallel under the control of the control means 45.

Then, due to some unexpected cause, all the electronic components 33 on the pallet 15 at the transfer position P4 are
If the transfer remains within the specified transfer time (period),
As described above, the count recording function of the control means 45 terminates the operation of the transfer means 81, and the second transfer means 11
Is moved to the stacking position P1 and held by the guide portion 31, and then the first transfer means 9 replenishes and arranges the electronic components 33 at the arrangement position P2.

In this case, the count recording function of the control means 45 causes the arranging means 47 to replenish and arrange the electronic components 33 at the transfer trace position where the electronic components 33 have been transferred.

In the present invention, the first transfer means 9 and the second transfer means 11 require the lifting means for the table 17 in order to stack and take out the pallets 15.

The elevating means is not limited to the above-mentioned structure, and as shown in FIG. 4G, for example, the elevating rods 99 are vertically pierced through a plurality of corners of the table 17 that does not move up and down, and the above-mentioned control means 45 is provided. A configuration in which the pallet 15 is controlled to be lifted up and down is also possible.

Further, the opening / closing means 75 described above is not limited to the structure arranged above the take-in / out means 23. For example, when the lid 65 is formed in the storage portion 27 with a hinge structure, the loading / unloading means 23 may be provided with the opening / closing means 75,
It is possible to arrange the opening / closing means 75 on substantially the same plane as the taking-in / out means 23.

In carrying out the present invention, the uniaxial robot 1,
The first and second transfer means 9 and 11, the take-in / out means 23, the filling device 25, the storage part 27, the inspection device 29, and the guide part 3.
The configurations of 1, the arranging unit 47, the opening / closing unit 75, the transfer unit 81, and the inspection unit 95 are arbitrary and are not limited to the above-described configurations.

For example, in the above configuration, the electronic component 33
This is an example of adsorbing and storing in a single row in the concave groove 35 of the pallet 15, and is suitable for a block-shaped electronic component 33 having no or small protrusions such as terminal pins.

Electronic component 3 having protrusions such as terminal pins
As for No. 3, it may be difficult to store it in the pallet 15 while sliding it.

In such a case, as shown in FIG. 8, it is possible to use a pallet 15 in which a large number of small recesses 97 into which the electronic components 33 are fitted are formed in a matrix form on a rectangular plate made of, for example, stainless steel. is there.

In such a structure, although not shown, the pallet 15 having the recesses 97 is made to suck the individual electronic components 33 from the linear feeder 55 by the uniaxial robot at the arrangement position P2 and sequentially store them. X at transfer position P4
The inspection device 2 by sucking each electronic component 33 with the Y robot
9 may be transferred to the table 93.

However, the electronic parts 3 are stored in the groove type pallet 15 described above in a single row.
3, the pallet 15 can be miniaturized and the pallet 15 can be miniaturized, and the storage unit 27 can be miniaturized to miniaturize the filling device 25. Accordingly, degassing can be accelerated and consumption of inert gas can be reduced. There are advantages.

By the way, in the above-mentioned embodiment, the electronic component 33 is supplied from the bowl feeder 53 or the linear feeder 55 as the component supply means, but the component supply means of the present invention is not limited to this.

For example, as shown in FIG. 9, array position P2
Pallet 15 held by the first transfer means 9 located at
On the other hand, similar to the linear feeder 55 and the alignment unit 87, the alignment unit 101 that aligns and supplies the plurality of electronic components 33 in one row, and the electronic components 33 that are arranged in the vicinity of the alignment unit 101 are arranged in advance. Auxiliary pallet 103 similar to that shown in FIG.
It is also possible to use a component supply means provided with a transfer means 105 for transferring the wafers to the aligning section 101 so as to be in a single row.

The auxiliary pallet 103 and the aligning unit 101 are
It is held by a holding means (not shown) so as to be aligned with the same position as the pallet 15.

The transfer means 105 supports a cylinder 109 movably between the aligning section 101 and the auxiliary pallet 103 by a long uniaxial robot 107 arranged along the aligning section 101 and the auxiliary pallet 103, This cylinder 1
The suction head 111 is arranged at the tip of the lifting shaft 09, and is controlled by the control means 45 described above.

Then, the transfer means 105 comprises the control means 4
Under the control of 5, the cylinder 109 is moved to the auxiliary pallet 10
3, the suction head 111 is lowered, the suction head 111 sucks the electronic component 33 and lifts it, and then the cylinder 109 is moved onto the alignment portion 101.
11 is lowered to release the suction of the electronic component 33 and raised, and by repeating this, the electronic component 33 is transferred from the auxiliary pallet 103 to the aligning unit 101.

In the present invention, the stacking position P1 and the loading / unloading position P3 may be exchanged in order, and the control by the control means 45 may be changed accordingly.

[0133]

As described above, in the test gas filling apparatus according to the present invention, the uniaxial robot is provided with the first and second transfer means, and the first transfer means receives the empty pallet from the stacking position. To the array position, and at this array position, electronic parts are arrayed on the empty pallet from the component supply means,
The pallet in which the electronic parts are arranged is transferred to the loading / unloading position by the first transfer means, and the pallet is inserted into the filling device by the loading / unloading means to fill the electronic parts with the test gas, and the first transfer means is stacked. While returning to the position, the pallet in which the electronic components filled with the test gas are arranged is pulled out to the second transfer means by the loading / unloading means and transferred to the transfer position, and the electronic parts are transferred by the transfer means at the transfer position. It is configured to be transferred to the inspection device and to return the empty pallets to the stacking position by the second transfer means. Therefore, the process of transferring the electronic components to be inspected to the inspection device is automated, time management and labor saving after filling with the test gas are enabled, the reliability of inspection is improved, and the manufacturing cost of electronic components is reduced. It becomes possible. Then, when the cumulative time required to transfer the electronic parts to the inspection device exceeds a predetermined transfer period, the transfer operation of the transfer means is stopped and controlled, and the pallets with the remaining electronic parts are returned to the stacking position. , In the configuration in which the electronic components are controlled to be replenished and arrayed at the array position based on the transferred position information on the pallet, the electronic components remaining without being transferred are It is possible to reliably and automatically return to the test gas filling process and refill it. In particular, the time management efficiency and labor saving after the test gas filling is significantly improved, and the reliability of the inspection is further improved. Furthermore, an aligning unit that aligns and supplies a plurality of these electronic components in a single row, and a transfer unit that transfers the electronic components from the auxiliary pallet in which the electronic components are arranged in advance to the aligning unit so that the electronic components are in a single row. In the configuration of forming the above-mentioned component supply means with, it is possible to supply in a state where electronic components are arranged in advance on an auxiliary pallet,
It is possible to support various parts supply forms and expand the range of use.

[Brief description of drawings]

FIG. 1 is a schematic front view illustrating an embodiment of a test gas filling device for an electronic component according to the present invention.

2 is a schematic plan view illustrating a test gas filling device for the electronic component of FIG. 1. FIG.

FIG. 3 is a diagram showing a pallet used in the test gas filling apparatus of the present invention.

FIG. 4 is a view showing a guide portion used in the test gas filling apparatus of the present invention.

FIG. 5 is a view showing an arrangement means used in the test gas filling apparatus of the present invention.

FIG. 6 is a diagram showing a loading / unloading device, a charging device, and an opening / closing device used in the test gas filling device of the present invention.

FIG. 7 is a view showing transfer means used in the test gas filling apparatus of the present invention.

FIG. 8 is a diagram showing another pallet used in the test gas filling apparatus of the present invention.

FIG. 9 is a partial schematic view showing another example of the test gas filling apparatus of the present invention.

[Explanation of symbols]

1,107 1-axis robot 3a, 3b, 5a, 5b pulleys 7a, 7b belt 9 First transfer means 11 Second transfer means 13, 19 Lifting axis 15 pallets 17,21 table 23 means of taking in and out 25 Filling device 27 Storage 29 Inspection device 31 Guide part (holding means) 33 Electronic components 35 groove 35a Extrusion groove 35b eaves 37 Locking part 39 Engagement part 41 nails 43, 71, 77 cylinders 45 Control means 47 Arrangement means 49,83 Operation arm 51 suction nozzle 53 Bowl feeder (Parts supply means) 55 Linear feeder (parts supply means) 55a array road 55b stopper 57 vacant place 59 holding plate 61 rail 63 lead screw 65 lid 67 pipe 69 valve 73 Open / close operation unit 75 Opening / closing means 79 In / out axis 81 Transferring means 85 Operation piece 87 Alignment section 87a Alignment road 89 Transfer Arm 91 head 91a storage section 93 turntable 95 Inspection Department 97 recess 99 rod 101 Alignment unit (parts supply means) 103 Auxiliary pallet 105 Transfer means (parts supply means) 109 cylinders 111 suction head M1, M2, M3 motors P1 stacking position P2 array position P3 withdrawal position P4 transfer position

   ─────────────────────────────────────────────────── ─── Continued front page    F-term (reference) 2G067 AA48 BB02 BB30 CC12 DD17                       DD18                 3E054 AA20 BA06 CA06 CA08 DB05                       DB06 DB08 DC16 DD01 DE10                       EA03 FA07 FB01 FB07 FB08                       FE10 GA01 GA07 GB02 GC02                       GC03 HA10 JA10

Claims (3)

[Claims] 1. A plurality of electronic components filled with a test gas are arranged on a plate-shaped vacant pallet so that the test gas is leaked from the electronic component filled with the test gas. A position where the electronic component is transferred to an inspection device to be inspected is a transfer position, and a stacking position of the empty pallet between the array position and the transfer position,
When the loading / unloading position for loading / unloading the pallet to fill the test gas is linearly provided, the pallet is transferred to the arrayed arrangement, the stacking position, and the loading / unloading position such that the pallet is displacement-controlled so as to be stopped A plurality of transfer means, and a second transfer means which is on the transfer position side of the first transfer means and transfers the pallet under displacement control so that the pallet can be stopped at the stacking position, the loading / unloading position and the transfer position; Component supplying means for supplying the electronic components in an aligned state, arranging means for arranging the electronic components from the component supplying means on the empty pallet at the arranging position by the first transfer means, A filling device that stores a pallet from the side of the loading / unloading position and has a plurality of storage sections that are formed in a sealable manner by a lid in the vertical direction. A filling device that is arranged near the insertion position and is displaceable in the vertical direction and that fills the test gas in the storage portion for a predetermined period when the pallet is stored and sealed; and the first transfer means. The pallet located at the loading / unloading position is inserted into the storage part with the lid opened, the filling of the test gas is completed, and the storage part with the lid open is located at the loading / unloading position. And a transfer means for transferring the electronic component to the inspection device side from the pallet positioned at the transfer position from the transfer position by the second transfer means. And stopping and transferring the empty pallets from the stacking position to the loading / unloading position via the arrangement position to control the displacement of the first transfer means. The pallet is repeatedly stopped and transferred from the loading / unloading position to the stacking position via the transfer position to control the displacement of the second transfer means, and when the empty pallet is in the array position, the electronic component is transferred to the pallet. Controlling the arranging means to arrange the pallets so that when the pallet in which the electronic components are arranged is transferred to the loading / unloading position, the lid is opened to position the storage portion at a position corresponding to the loading / unloading position. The filling device is displacement-controlled, the pallet is inserted into the storage portion by the loading / unloading means, the lid is closed and sealed, and the test gas is filled in the storage portion, and the predetermined filling period has elapsed. At this time, instead of the first transfer means, the second transfer means is displacement-controlled to the withdrawal position, the lid is opened, and the storage part is withdrawn and inserted. The displacement is controlled to a position corresponding to the position, and the pallet in the storage portion is controlled to be pulled out onto the second transfer means by the loading / unloading means, and is transferred from the loading / unloading position to the transfer position by the second transfer means. And a control unit that controls the transfer unit to transfer the electronic component from the pallet to the inspection apparatus. 2. The control means records, for each pallet, the transferred position information of the electronic component transferred from the pallet to the inspection device by the transfer means and the elapsed time from the end of the filling. When the accumulated time exceeds a predetermined transfer period, the transfer operation of the transfer unit is stopped and controlled, and the pallet with the remaining electronic components is transferred from the transfer position to the stacking position. Control the transportation means of
When the remaining pallet of the electronic component is positioned at the arrangement position by the first transfer means, the pallet is moved from the component supply means to the transfer trace position of the electronic component based on the transferred position information. The gas filling device for a test according to claim 1, wherein the arranging means is controllably formed so as to replenish and arrange the electronic components. 3. The component supply means arranges and supplies the electronic components to the alignment unit from an alignment unit that aligns and supplies the plurality of electronic components in a single row and an auxiliary pallet in which the electronic components are arranged in advance. 3. A test gas filling device for an electronic component according to claim 1 or 2, further comprising a transfer means for transferring so as to be in a row state.