JP2001074587A - Work-supplying device for supplying work to helium leak tester - Google Patents

Abstract

PROBLEM TO BE SOLVED: To automate pretreatment brought upto the setting of a work onto a leak tester in a helium leak lest. SOLUTION: Eight (plural) containers 10 are arranged on a rotating table 24 at 45 degree (prescribed angle) intervals. The table 24 is rotated clockwise by 45 degree with a prescrived time interval, and the containers 10 are thereby stopped in the order in a carrying-in position 101, where a work is carried in by a conveying mechanism 30, a suction position 102 sucked by a suction mechanism 40, a filling position 103 for filling pressurized helium by a dispensing mechanism 50, the first - fourth permeation positions 104-107 where the work is exposed to helium atmosphere, and a carry-out position 108 where the work is carried out to a helium tester A by a carry-out mechanism 60.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for automatically supplying a work to a helium leak tester.

[0002]

2. Description of the Related Art For example, there is a helium leak test as a means for judging the quality of a work (inspected object) such as a precision electronic component. In this test, a preliminary process is performed before setting the work on the helium leak tester. That is, the work is placed in a sealable container (loading step), and the inside of the container is vacuum-sucked (suction step). Next, pressurized helium is injected into the container (injection step). Thus, if there is a minute flaw in the package of the work, helium enters the internal space of the work from the flaw (penetration step). After several hours, the work is taken out of the container and sent to a helium leak tester (unloading process).

[0003] The helium leak tester is provided with a capsule. A work is put in this capsule, and the inside of the capsule is vacuum-suctioned. Then, the helium in the work jumps out of the work and is detected by the helium detector. As a result, a work having a fine scratch can be detected and eliminated as a defective product.

[0004]

The carrying-in, suction, injection, and carry-out steps in the above-mentioned preliminary treatment have conventionally been performed manually by an operator, and there has been a problem that the efficiency is low.
In addition, there is an allowable range of time for releasing the work from the closed container for pretreatment to the time when the helium is detected by the helice leak tester, and it is difficult to control the time.

[0005]

Means for Solving the Problems In order to solve the above-mentioned problems, a first aspect of the present invention comprises (a) a turntable, and (b) a plurality of hermetically sealable containers arranged at predetermined angles on the turntable.
(C) driving means for stopping the container in the order of the carry-in position, the suction position, the pouring position, and the carry-out position by repeating the operation of rotating the turntable in one direction by the predetermined angle at predetermined time intervals; ) A carry-in mechanism for putting the work into the container at the carry-in position, (e) a suction mechanism for vacuum-suctioning the inside of the container at the suction position, and (f) injecting pressurized helium into the container at the fill position. An injection mechanism,
(G) a carry-out mechanism for taking out the work from the container at the carry-out position and sending the work to the helium leak tester, wherein the work in the container is placed in a pressurized helium atmosphere while the container moves from the pouring position to the carry-out position. It is characterized by being called.

According to a second aspect of the present invention, in the first aspect, the suction position is arranged at a predetermined angle away from the carry-in position, and the injection position is arranged at a predetermined angle away from the suction position. Wherein the carry-out position is disposed at an integer multiple of the predetermined angle from the discharge position.

In a third aspect based on the first aspect, the suction position is disposed at a predetermined angle away from the carry-in position, and the injection position is disposed at the same position as the suction position. The carry-out position is arranged at an integer multiple of the predetermined angle.

In a fourth aspect based on the second aspect, the container is provided with a receiving connector, and the suction mechanism comprises: (a) a vacuum pump; and (b) a suction passage extending from the vacuum pump. (C) a suction connector provided at a tip of the suction passage and connected to a receiving connector of the container at the suction position to connect the suction passage to the internal space of the container; The mechanism is
(D) a pressurized helium source, (e) an injection passage extending from the pressurized helium source, and (f) provided at a tip of the injection passage and connected to a receiving connector of the container at the injection position. And an injection connector for connecting the injection passage to the internal space of the container.

In a fifth aspect based on the third aspect, the container is provided with a receiving connector, and the suction mechanism has a vacuum pump and a suction passage extending from the vacuum pump. A mechanism has a pressurized helium source, an injection passage extending from the pressurized helium source, and further includes a passage switching means provided at a tip of the suction passage and the injection passage, and a common passage extending from the passage switching means. And a common connector provided at the tip of the common passage and connected to the receiving connector of the container at the suction position and the injection position to communicate the common passage with the internal space of the container. In a state where the connector is connected to the receiving connector, the passage switching means communicates the common passage with the suction passage and then communicates with the injection passage. And wherein the Rukoto.

According to a sixth aspect of the present invention, in any one of the first to fifth aspects, the carrying-in mechanism comprises: a hopper for storing the work; a feeding means for feeding the work one by one from the hopper to the container; And a counting means for counting the number of works put into the container by the feeding means.

According to a seventh aspect of the present invention, in any one of the first to sixth aspects, the container comprises: (a) a container body having a cylindrical shape whose axis is oriented vertically; Opening the upper end of the container body, an upper lid that closes the upper end of the container body until it reaches the unloading position from the injection position,
(C) closing the lower end of the container body from the carry-in position to the carry-out position, and having a lower lid moving downward and away from the container body at the carry-out position; It has a receiving member for receiving the work placed on the lower lid.

[0012]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a first embodiment of the present invention will be described.
This will be described with reference to FIGS. FIGS. 1 and 2 show a device for supplying a work to a helium leak tester A using a small precision electronic component such as an oscillator and a layer filter as a work (test object). This apparatus includes a rotating mechanism 20 provided with eight containers 10, a loading mechanism 30 for inserting a work into the containers 10, a suction mechanism 40 for vacuum-suctioning the inside of the containers 10, and injecting pressurized helium into the containers 10. And a carry-out mechanism 60 that takes out the work from the container 10 and sends the work to the helium leak tester A. Each of the mechanisms 20 to 60 will be described sequentially.

The rotating mechanism 20 includes a motor (driving means) 21 installed on the floor plate F, a rotating shaft 22 vertically extending from the motor 21 toward the top plate T, and a rotating shaft 22.
, A pair of horizontal turntables 23, 2 provided vertically separated from each other
And 4. The eight containers 10 are arranged on the turntables 23 and 24 at intervals of 45 degrees. 2, the left side from the rotating shaft 22 is a front view of the range X shown in FIG. 1, and the right side from the rotating shaft 22 is the range Y shown in FIG.
FIG.

The motor 21 repeats the operation of stopping the rotation shaft 22 and, consequently, the turntables 23 and 24 each time they are rotated clockwise by 45 degrees when viewed from above. Therefore, the container 10 sequentially stops at the predetermined eight positions 101 to 108. The stop position denoted by reference numeral 101 is a carry-in position facing the carry-in mechanism 30. A suction position 102 facing the suction mechanism 40 is disposed 45 degrees clockwise from the carry-in position 101 (a predetermined angle in one direction). An injection position 103 facing the injection mechanism 50 is arranged 45 degrees away from the suction position 102. This injection position 103
From the first to fourth permeation positions 104
To 107 are arranged. 4th penetration position 107 to 45
At a distance apart, an unloading position 108 opposite to the unloading mechanism 60 is arranged. Therefore, the position is 135 degrees (an integral multiple of a predetermined angle) from the injection position 103 to the discharge position 108.
45 degrees away from the carry-out position 108, the carry-in position 1
01 is arranged.

The structure of the container 10 will be described. Container 10
It has a cylindrical container body 11 with its axis oriented vertically. The container body 11 is fitted into a container mounting hole 24 a formed in the lower turntable 24 and is fixed to the turntable 24. Further, the container 10 has an upper lid 12 and a lower lid 13 that sandwich the container body 11 from above and below. Upper lid 12
Can be moved up and down between a closed position abutting on the upper end of the container main body 11 and an open position separated above the container main body 11 by a cylinder 25 (upper lid opening / closing means) provided on the upper turntable 23. ing. The lower lid 13 is closed by a cylinder 26 (lower lid opening / closing means) provided on the lower turntable 24 and abuts against the lower end of the container body 11.
The container can be moved up and down between the container body 11 and an open position separated below. By positioning the upper lid 12 and the lower lid 13 at the closed position, the inside of the container body 11 is sealed.

A receiving connector 14 is provided on the container body 11 so as to project radially outward of the turntable 24. Although a detailed illustration is omitted, the receiving connector 14 includes:
A communication passage extending along the axis from the inner peripheral surface of the container body 11 to the connection portion 14a at the tip is formed, and a normally closed on-off valve is provided in the communication passage. The on-off valve is opened by pushing the connecting portion 14a toward the container body 11, and is closed by releasing the connecting portion 14a.

A guide member 15 is provided on the upper surface of the lower cover 13. The guide member 15 is inserted into the container body 11 at the closed position of the lower lid 13, and is inserted into the container body 11 at the open position.
Pulled down from. As shown in FIG. 3, the guide member 15 has a cylindrical shape that can slide on the inner peripheral surface of the container body 11. The upper end surface of the guide member 15 is
4, a guide surface 15a is formed which has a curved surface which descends toward the outside in the radial direction and which rises toward the edge along the circumferential direction of the turntable 24. Therefore, when the lower lid 13 is lowered from the closed position to the open position in a state where the work is placed in the container 10, the work is guided by the guide surface 15 a, so that the lower end of the container main body 11 is moved from the lower end of the turntable 24. Released radially outward.

Next, the loading mechanism 30 will be described. As shown in FIGS. 1 and 2, the loading mechanism 30 has a hopper 31 (storage means) provided on the top plate T at a position away from the rotating mechanism 20 to the left. A work to be supplied to the container 10 is stored in the hopper 31. A support table 32 is provided on a floor plate F below the hopper 31, and a circular terminal table 33 is installed on the support table 32. The terminal table 33 is provided with a sensor 34 for detecting the presence or absence of a work. When there is no more work on the terminal table 33,
The work is supplied from the hopper 31 to the terminal table 33 in response to the sensor 34.

A parts feeder 35 extends horizontally from the terminal table 33. The terminal table 33 and the parts feeder 35 have a vibrator 33
a and 35a are respectively provided. The work is sent from the terminal table 33 toward the tip of the parts feeder 35 by the vibrators 33a and 35a.

A vertically extending handler 36 is located on the support table 32 near the tip of the parts feeder 35.
(Transfer means) is provided upright, and a shooter 37 is arranged on the opposite side of the parts feeder 35 across the handler 36 so as to extend in the left-right direction. At the upper end of the handler 36, a horizontally extending rotating arm 36a is provided so as to rotate about a central portion thereof. Suction rods 36b are provided at both ends of the rotating arm 36a.

As shown by the imaginary line in FIG. 1, the rotating arm 36a rotates by 180 degrees in one direction and stops at an angle orthogonal to the parts feeder 35 and the shooter 37. At this time, one of the suction rods 36b at both ends is located at the suction position just above the parts feeder 35, and the other is located at the release position just above the shooter 37. Then, the one suction rod 36b at the suction position sucks one work on the parts feeder 35 by vacuum suction. Next, by rotating the arm 36a by 180 degrees, the one suction rod 36b is positioned at the release position, and releases the work sucked here. At the same time, the other suction rod 36b is located at the suction position and sucks one work. By repeating this operation,
The works are transferred to the shooter 37 one by one.

The shooter 37 is inclined downward to the right, that is, toward the rotation mechanism 20. The shooter 37 is supported by a cylinder 38 (moving means) provided on the support base 32 via a column 32A. A retracted position (shown by a solid line in the figure) in which the shooter 37 is retracted leftward by the cylinder 38,
It moves forward to the right and is horizontally moved between a set position (indicated by an imaginary line in the figure) for receiving the work from the handler 36. In the retracted position, the right end (lower end) of the shooter 37 is located leftward away from the container 10 at the carry-in position 101. In the setting position, the left end (upper end) of the shooter 37 is close to the release position of the suction rod 36b, and the right end is located directly above the container body 11 at the carry-in position 101. As a result, the work transferred from the handler 36 to the shooter 37 is put into the container body 11.

In the middle of the shooter 37, there is provided a counter 39 (counting means) for detecting a work sliding down and counting the number of works. The count number, that is, the number of works put into the container 10 is displayed on a display panel (not shown). Terminal table 3
3, the parts feeder 35, the handler 36, and the shooter 37 constitute "feeding means" in the claims.

Next, the suction mechanism 40 will be described. The suction mechanism 40 has a vacuum pump 41. A suction passage 42 extends from the vacuum pump 41. Suction passage 4
2 is provided with a normally closed on-off valve 44. The distal end of the suction passage 42 is connected to a suction connector 43.

The support structure of the suction connector 43 will be described. A column 45 is erected on the floor plate F radially outward (left side) of the turntable 24 from the suction position 102, and a cylinder 46 (contacting / separating means) is horizontally installed on the upper end of the column 45. ing. The axis of the cylinder 46 is aligned with the receiving connector 14 of the container 10 at the suction position 102. At the tip (right end) of the cylinder 46, the suction connector 43 is moved between a disconnection position (shown by a solid line in the drawing) retreated leftward and a connection position (shown by a virtual line in the drawing) advanced rightward. It is supported movably.

The suction connector 43 faces away from the left side of the receiving connector 14 at the separated position. On the other hand, at the connection position, the connection portion 14a of the receiving connector 14 is connected and the connection portion 14a is pressed. Thereby, the opening / closing valve of the receiving connector 14 is opened, and the suction passage 42 and the internal space of the container body 11 are communicated.

Next, the injection mechanism 50 will be described. The injection mechanism 50 has a configuration similar to that of the suction mechanism 40. That is, the injection mechanism 50 includes a helium cylinder 51 (pressurized helium source) storing the pressurized helium gas, an injection passage 52 extending from the helium cylinder 51, and an injection connector 53 provided at a tip of the injection passage 52. have. The injection passage 52 is provided with a normally closed on-off valve 54. The injection connector 53 is rotated by a cylinder 56 (contacting / separating means) at the upper end of the support column 55 between a disconnection position separated from the receiving connector 14 at the injection position 103 and a connection position connected to the receiving connector 14. The table 24 can be moved along the radial direction. By positioning the injection connector 53 at the connection position, the injection passage 5
2 and the inside of the container 10 at the injection position 103 are communicated.

Next, the unloading mechanism 60 will be described. The unloading mechanism 60 has a hopper 61 (receiving member) facing the container 10 at the unloading position 108, and a shooter 62 extending from the hopper 61.

The support structure of the hopper 61 will be described. A slanted column 63 is erected on a floor plate F that is located radially outward of the turntable 24 from the carry-out position 108, and an axis is horizontally set at the upper end of the slant column 63 along the radial direction of the turntable 24. A horizontal cylinder 64 is provided. At the end of the horizontal cylinder 64 facing the carry-out position 108, a vertical cylinder 65 whose axis is oriented vertically is provided. The hopper 61 is supported at the tip (upper end) of the vertical cylinder 65. Thereby, the hopper 61
Can be moved horizontally by the horizontal cylinder 64 so as to approach and separate from the carry-out position 108 along the radial direction of the turntable 24, and can be moved up and down by the vertical cylinder 65.

As shown in FIG. 3, the hopper 61 has a swash plate 67 which is inclined upward toward the discharge position 108. A semicircular recess 67 a is formed at the upper edge of the swash plate 67 facing the carry-out position 108. A work guide plate 66 is provided in the recess 67a. The work guide plate 66 has a substantially circular shape, and half of the work guide plate 66 projects from the swash plate 16a toward the carry-out position 108.
In addition, the work guide plate 66 has the same shape as the guide surface 15a of the guide member 15 of the lower cover 13. That is, it is tilted upward in the direction of projection to the carry-out position 108 and bent so as to rise as it approaches the edge in the left-right direction. by this,
The work guide plate 66 can be overlaid on the guide surface 15a.

A base end (upper end) of the shooter 62 is disposed below a lower edge of the swash plate 67 facing the opposite side of the carry-out position 108. As shown in FIGS. 1 and 2, the tip (lower end) of the shooter 62 is connected to the helium leak tester A.

The operation of the work supply device configured as described above will be described. The rotation mechanism 20 moves each container 10 to the next stop position, for example, every 20 minutes (predetermined time). Now, it is assumed that one container 10 is moved from the carry-out position 108 to the carry-in position 101. This one container 10
The upper lid 12 is previously separated from the container body 11 at the carry-out position 108 (open position), and is moved to the carry-in position 101 while maintaining this state. The lower lid 12 is separated downward from the container body 11 at the unloading position 108 (open position), and closes the lower end of the container body 11 simultaneously with or after the movement to the loading position 101 (closed position). .

The shooter 37 of the loading mechanism 30 is disposed at the set position, and the right end (lower end) faces the upper end of the container body 11 that has been moved to the loading position 101. Since the upper lid 12 is raised in advance, there is no interference between the shooter 37 and the upper lid 12. After the shooter 37 is retracted to the left from the loading position 101, the container 10 is moved to the loading position 10 with the upper lid 12 closed.
1 and, after the movement, release the upper lid 12 upward.
The shooter 37 may be returned to the set position.

After the one container 10 is moved to the carry-in position 101, the carry-in process is carried out by the carry-in mechanism 30 during the stopped 20 minutes. That is, the handler 36 transfers the workpieces sent in the order of the hopper 31, the terminal table 33, and the parts feeder 35 to the shooter 37 one by one. This work is put into the one container 10 along the shooter 37. The number of works put in the container 10 is counted by the counter 39, for example, 600
Work loading is stopped when the number of pieces (unit lot number) is reached. The operation of the handler 36 transferring the work to the shooter 37 may be performed at intervals of, for example, 2 seconds (predetermined time / unit lot number). Thereby, during 20 minutes when the container 10 is at the loading position 101, 6
00 pieces of work will be put in.

After a lapse of 20 minutes at the loading position 101, the one container 10 is moved to the suction position 102. At this suction position 102, a suction step by the suction mechanism 40 is performed. That is, when the upper lid 12 is abutted against the upper end of the container body 11 (closed position), the container body 11 is closed.
Is sealed. Next, when the suction connector 43 is connected to the receiving connector 14 (connection position), the internal space of the container body 11 is communicated with the suction passage 42. Next, the on-off valve 44 is opened. Thereby, the inside of the container 10 is vacuum-suctioned by the vacuum pump 41. The time required to reach the desired degree of vacuum in the container 10 is on the order of tens of seconds. Thereafter, the on-off valve 44 is closed, and the suction connector 43 is disconnected from the receiving connector 14 (disconnection position).

After a lapse of 20 minutes at the suction position 102, the one container 10 is moved to the injection position 103. At the injection position 103, an injection step of pressurized helium by the injection mechanism 50 is performed. That is, when the injection connector 53 is connected to the receiving connector 14 (connection position), the internal space of the container body 11 communicates with the injection passage 52. Next, the on-off valve 54 is opened. Thereby, pressurized helium is injected from the helium cylinder 51 into the container 10 in a vacuum state. The time required for the injection is on the order of a few seconds. Thereafter, the on-off valve 54 is closed, and the injection connector 53 is disconnected from the receiving connector 14 (disconnection position).

The one container 10 has two
After a lapse of 0 minutes, it is moved to the first permeation position 104. Then, every 20 minutes, the second, third and fourth permeation positions 105-1
07, and after 20 minutes at the fourth permeation position 107, it is moved to the unloading position 108. One container 10 maintains the sealed state at this unloading position 108 until just before 20 minutes elapse. Therefore, the work in the container 10
Place in a pressurized helium atmosphere for about 2 hours (penetration step). In this process, helium enters the inside of a work having a minute flaw.

When the one container 10 is moved out of the
Shortly after the elapse of a minute, an unloading process is performed. That is, the lower lid 13 is separated from the container body 11 and is lowered. By moving the hopper 61 of the unloading mechanism 60 toward the unloading position 108 in synchronization with the movement of the lower cover 13, the work guide plate 66 of the hopper 61
5 so as to overlap while sliding on the guide surface 15a. Thus, the work in the container 10 placed on the guide member 15 is scooped up by the work guide plate 66 and flows toward the swash plate 67 of the hopper 61 by being guided by the work guide plate 66. Thereafter, the work falls from the swash plate 67 to the shooter 62, and is sent to the helium leak tester A along the shooter 62.

After carrying out the work, the hopper 61 is moved outward in the radial direction of the turntable 24. Then, after elapse of 20 minutes at the unloading position 108, the one container 10 is moved to the loading position 101 again, and a series of steps is repeated.

Up to this point, one container 10 has been described with time, but two stop positions 101 to 108
Another container 10 is sequentially sent at 0 minute intervals. Each of the carry-in, suction, injection, and carry-out mechanisms 30 to 60 is configured such that each time the container 10 is sent to the corresponding position,
The process of loading, suction, injection, and unloading is performed for 0. Therefore, the preliminary processing is simultaneously performed for the eight containers 10 while the steps are shifted from each other. by this,
The work that has undergone the preliminary treatment is transferred to the helium leak tester A for 2 hours.
It can be supplied sequentially every 0 minutes.

The helium leak tester A detects helium that has entered the inside of the damaged work in the above-described permeation step, and is determined to be defective. Helium leak tester A is 600 pieces for 20 minutes (container 10
The number of pieces that can be inspected is equal to or more than the number of unit lots that can be put into the apparatus. Thus, it is possible to prevent the work from the next container 10 from being sent before all the works from the previous container 10 have been inspected. Note that, based on the inspection processing capability of the helium leak tester A, the carry-in mechanism 30 may adjust the number of unit lots of work to be put into the container 10.

As described above, the steps of carrying in, sucking, pouring, permeating, and carrying out are sequentially performed by the work supply device. That is, the preliminary processing until the work is set on the helium leak tester A is automatically performed. Thereby, the labor of the worker can be reduced. In addition, a fixed number of workpieces (600 pieces per 20 minutes) can be automatically supplied to the helium leak tester A periodically in accordance with the inspection processing capacity of the helium leak tester A, so that it is easy to manage the time of release to the atmosphere after the infiltration step. It is. That is, after the work is unloaded from the container 10 by the unloading mechanism 60, the time until the inspection is started does not exceed 20 minutes even for the last work in one lot (600 pieces). This 20
Within minutes (within the allowable time of release to the atmosphere after the infiltration step), helium in the work does not leak to the atmosphere and the inspection cannot be disabled. Therefore, the presence or absence of a flaw can be accurately determined for all the works.

Next, a second embodiment of the present invention will be described with reference to FIG. The workpiece supply device according to this embodiment is provided with a suction / injection mechanism 70 having the functions of these mechanisms 40 and 50 instead of the suction mechanism 40 and the injection mechanism 50. The suction / injection mechanism 70 has an electromagnetic switching valve 71 (path switching means). This electromagnetic switching valve 7
1, a suction passage 42 extending from the vacuum pump 41 and an injection passage 52 extending from the helium cylinder 51 are connected to each other. In addition, a common passage 72 is provided from the electromagnetic switching valve 71.
Is extending. The electromagnetic switching valve 71 includes a neutral position 71 n that blocks both the suction passage 42 and the injection passage 52 from the common passage 72, a suction position 71 a that communicates the suction passage 42 with the common passage 72, and the injection passage 52 with the common passage 72. It has three positions, i.e., an injection position 71b for communication. The distal end of the common passage 72 is connected to a common connector 73 having the same configuration as the suction connector 43 and arranged at the same position.

The position corresponding to the suction position 102 45 degrees away from the carry-in position 101 is the suction injection position 10.
2A (the suction position and the injection position are arranged at the same position). This suction injection position 102A to 45
A position corresponding to the injection position 103 which is separated by a distance is a permeation position 103A. Therefore, the number of permeation positions is five in total.

When one container 10 is moved to the suction / injection position 102A, the common connector 73 is connected to the receiving connector 14 of this container 10. Next, the electromagnetic switching valve 71
Is switched from the neutral position 71n to the suction position 71a. Thereby, the vacuum pump 4
Vacuum suction by 1 After several tens of seconds, the electromagnetic switching valve 7
1 is switched to the injection passage 71b. Thus, pressurized helium is injected from the helium cylinder 51 into the container 10. Therefore, the injection operation can be performed about 20 minutes earlier than in the case of the first embodiment, and the work can be placed in the pressurized helium atmosphere for a longer time. Alternatively, the container 10 is moved from the permeation position 107 to the unloading position 1
When the work is moved to 08, the work has been placed in the pressurized helium atmosphere for about 2 hours, so that when the work reaches the unloading position 108, the unloading operation can be performed immediately.

The present invention is not limited to the above embodiment, but can adopt various forms. For example, the number of stop positions (the number of containers), the interval between each stop position (predetermined angle), and the stop time (predetermined time) at each stop position are appropriately determined according to the time required for the infiltration step. (It is merely an example that the work is placed on the pressurized helium for about 2 hours.) A cleaning position or the like for air cleaning the container may be provided between the carry-out position and the carry-in position. The carry-out position and the carry-in position may be arranged at the same position. The work inside may be discharged by opening only the upper lid of the container at the carry-out position and tilting the container body.

[0047]

As described above, the first aspect of the present invention automates the pretreatment in the helium leak test, that is, a series of steps of loading a workpiece into a container, suctioning, injecting helium, and transporting the workpiece to a helium leak tester. And the labor of the worker can be reduced. In addition, since a fixed number of works can be automatically supplied to the helium leak tester periodically according to the inspection processing capacity of the helium leak tester, it is easy to manage the time of release to the atmosphere after the infiltration step. According to the second aspect, the steps of carrying in, suctioning, helium injecting, and carrying out can be simultaneously performed in different containers, respectively, thereby improving work efficiency. Further, by interposing one or a plurality of stop positions (penetration positions) between the pouring position and the carry-out position, it is possible to sufficiently secure the time of the permeation step of placing the work in a pressurized helium atmosphere. In the third invention, by performing suction and helium injection at one stop position, it is possible to lengthen the infiltration step time or to reduce the number of stop positions from injection to unloading, and thus the number of containers. it can. In the fourth aspect, one receiving connector of the container can be used for both suction and injection, and the configuration can be simplified. In the fifth invention, the common passage and the common connector can be used for both suction and injection,
The configuration can be simplified. In the sixth invention, the number of works to be put in the container can be managed. According to the seventh aspect, the container can be opened and closed accurately in accordance with the contents of each step from the loading of the work to the unloading of the work.

[Brief description of the drawings]

FIG. 1 is a plan view of an apparatus according to a first embodiment of the present invention.

FIG. 2 is a diagram of the device as viewed from the front in a range X and a side in a range Y shown in FIG. 1;

FIG. 3 is a perspective view showing a lower lid and a receiving member of the device.

FIG. 4 is a plan view of a main part of a work supply device according to a second embodiment of the present invention.

[Explanation of symbols]

 A Healy leak tester 10 Container 11 Container main body 12 Upper lid 13 Lower lid 14 Receiving connector 21 Motor (drive means) 23, 24 Turntable 30 Loading mechanism 31 Hopper 39 Counter (counting means) 40 Suction mechanism 41 Vacuum pump 42 Suction passage 43 Suction Connector 50 Injection mechanism 51 Helium cylinder (pressurized helium source) 52 Injection passage 53 Injection connector 60 Unloading mechanism 61 Hopper (receiving member) 71 Electromagnetic switching valve (passage switching means) 72 Shared passage 73 Shared connector 101 Loading position 102 Suction position 103 Injection position 108 Unloading position

Claims (7)

[Claims] (A) a turntable; (b) a plurality of sealable containers arranged at predetermined angles on the turntable; and (c) an operation of rotating the turntable in one direction by the predetermined angle. Is repeated at predetermined time intervals, thereby driving means for stopping the container in the order of the carry-in position, the suction position, the pouring position, and the carry-out position; (d) a carry-in mechanism for putting a work into the container at the carry-in position; ) A suction mechanism for vacuum-suctioning the inside of the container at the suction position, (f) an injection mechanism for injecting pressurized helium into the container at the injection position, and (g) taking out the work from the container at the unloading position. A carry-out mechanism for sending to the helium leak tester, while the container moves from the injection position to the carry-out position,
A work supply apparatus for a helium leak tester, wherein the work in the container is placed in a pressurized helium atmosphere. 2. The suction position is disposed at a predetermined angle away from the carry-in position, the injection position is disposed at a predetermined angle away from the suction position, and the injection position is disposed at an integer multiple of the predetermined angle from the injection position. The apparatus for supplying a work to a helium leak tester according to claim 1, wherein a carry-out position is provided. 3. The suction position is disposed at a predetermined angle away from the carry-in position, the injection position is disposed at the same position as the suction position, and the discharge is performed at an integer multiple of the predetermined angle from the injection position. The apparatus for supplying a work to a helium leak tester according to claim 1, wherein a position is arranged. 4. The container is provided with a receiving connector, wherein the suction mechanism includes (a) a vacuum pump, (b) a suction passage extending from the vacuum pump, and (c) a tip of the suction passage. And a suction connector for connecting the suction passage to the internal space of the container by being connected to a receiving connector of the container at the suction position, wherein the injection mechanism comprises: (d) a pressurized helium source. (E) an injection passage extending from the source of pressurized helium; and (f) the injection passage provided at the tip of the injection passage and connected to a receiving connector of the container at the injection position, thereby connecting the injection passage to the container. 3. The apparatus for supplying a work to a helium leak tester according to claim 2, further comprising an injection connector communicating with the internal space of the helium leak tester. 5. The container is provided with a receiving connector, wherein the suction mechanism has a vacuum pump and a suction passage extending from the vacuum pump, and the injection mechanism has a pressurized helium source, An injection passage extending from the pressurized helium source, further comprising: a passage switching means provided at the tip of the suction passage and the injection passage; a shared passage extending from the passage switching means; and a tip provided at the tip of the shared passage. A common connector for connecting the common passage to the internal space of the container by being connected to the receiving connector of the container at the suction position and the injection position, and the common connector is connected to the receiving connector. In the state, the passage switching means switches the shared passage,
4. The apparatus for supplying a work to a helium leak tester according to claim 3, wherein the workpiece is communicated with the injection path after being communicated with the suction path. 5. 6. The loading mechanism, wherein the loading mechanism stores the work, feed means for feeding the work one by one from the hopper to the container, and counting means for counting the number of works put into the container by the feed means. The apparatus for supplying a work to a helium leak tester according to any one of claims 1 to 5, comprising: 7. The container according to claim 1, wherein: (a) a container body having a cylindrical shape whose axis is oriented vertically; and (b) an upper end of the container body is opened at the carry-in position, and the container body is moved from the pouring position to the carry-out position. An upper lid that closes the upper end of the container body until it reaches,
(C) closing the lower end of the container body from the carry-in position to the carry-out position, and having a lower lid moving downward and away from the container body at the carry-out position; The apparatus for supplying a work to a helium leak tester according to any one of claims 1 to 6, further comprising a receiving member for receiving a work placed on the lower lid.