JP2003178870A - 機能性素子基板の製造装置及び機能性素子基板 - Google Patents

機能性素子基板の製造装置及び機能性素子基板

Info

Publication number
JP2003178870A
JP2003178870A JP2001375394A JP2001375394A JP2003178870A JP 2003178870 A JP2003178870 A JP 2003178870A JP 2001375394 A JP2001375394 A JP 2001375394A JP 2001375394 A JP2001375394 A JP 2001375394A JP 2003178870 A JP2003178870 A JP 2003178870A
Authority
JP
Japan
Prior art keywords
substrate
functional element
ejection head
solution
functional
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001375394A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003178870A5 (https=
Inventor
Takuro Sekiya
卓朗 関谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP2001375394A priority Critical patent/JP2003178870A/ja
Publication of JP2003178870A publication Critical patent/JP2003178870A/ja
Publication of JP2003178870A5 publication Critical patent/JP2003178870A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electroluminescent Light Sources (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2001375394A 2001-12-10 2001-12-10 機能性素子基板の製造装置及び機能性素子基板 Pending JP2003178870A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001375394A JP2003178870A (ja) 2001-12-10 2001-12-10 機能性素子基板の製造装置及び機能性素子基板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001375394A JP2003178870A (ja) 2001-12-10 2001-12-10 機能性素子基板の製造装置及び機能性素子基板

Publications (2)

Publication Number Publication Date
JP2003178870A true JP2003178870A (ja) 2003-06-27
JP2003178870A5 JP2003178870A5 (https=) 2005-06-23

Family

ID=19183778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001375394A Pending JP2003178870A (ja) 2001-12-10 2001-12-10 機能性素子基板の製造装置及び機能性素子基板

Country Status (1)

Country Link
JP (1) JP2003178870A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009266422A (ja) * 2008-04-22 2009-11-12 Ricoh Co Ltd 機能性素子基板製造システム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009266422A (ja) * 2008-04-22 2009-11-12 Ricoh Co Ltd 機能性素子基板製造システム

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