JP2003171146A - Glass substrate positioning apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a glass substrate positioning apparatus with which a glass substrate now being improved to be large sized and to have a thinner film is stably and precisely positioned to a proper position on a table correspondingly to a coating head in a liquid chemical applicator for applying a liquid chemical by using a die head used in the manufacture of a color filter for a liquid crystal panel. <P>SOLUTION: This glass substrate positioning apparatus is provided with the table B on which the glass substrate A is horizontally placed and which slides in one direction inside a plane and ≥2 positioning members 3 freely slidable in the direction parallel and vertical to the upper surface of the table. The positioning members position the glass substrate on a prescribed position on the table by pressing the side edges or four corner edges of the glass substrate placed on the table in the center direction of the glass substrate while coming into contact with the upper surface of the table, and after the positioning is completed, the positioning members are retracted. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chemical liquid coating device used for manufacturing a color filter for a liquid crystal panel, and particularly to coating a chemical liquid by using a die head or the like without rotating a glass substrate. The present invention relates to a glass substrate positioning device for positioning a glass substrate before applying a chemical liquid at an appropriate position with respect to a coating head in a chemical liquid coating device.

[0002]

2. Description of the Related Art An example of a method of transferring a positioning device for a rectangular glass substrate and its pre-process will be described. Figure 3
(A) is a side view in the width direction of the glass substrate of the positioning device, and (b) is a side view in the longitudinal direction. In (a) and (b), (a) to (b) are the operation sequences.

First, as shown in FIGS. 3 (a) and 3 (b), a rectangular glass substrate A is supported on its bottom surface by two arms 1 by a transfer robot C from the previous step. Although it is loaded on the table B, the arm 1 cannot be retracted after being loaded on the table B as it is. Therefore, once the arm 1 is projected from the upper surface of the table B, it is installed at a position where it does not interfere with the arm 1. It is transferred onto the plurality of support pins 2 and then the arm 1 retracts. The support pin 2 is vertically movable with respect to the table B,
After being delivered, it slowly descends and a rectangular glass substrate A is loaded on the table B.

Next, FIG. 4 shows an example of a positioning device for determining the position of the transferred glass substrate. Figure 4 (a)
Similarly, a side view in the width direction of the glass substrate of the positioning device,
(B) is a side view in the longitudinal direction. In (a) and (b), (i) to (d) are operation sequences. As shown in FIGS. 4A and 4B, in this example, when the rectangular glass substrate A is stacked on the table B, two sets of side edge edges of the rectangular glass substrate A which are parallel to each other are previously prepared. By the positioning member 3 which is installed with a slight gap from the size between the two, the side edge of the rectangular glass substrate A is moved downwardly by the support pin 2 by the positioning member 3 which is inclined in the upward opening direction. It is a positioning device that can be positioned by itself while contacting the inclined surface of.

FIG. 5 shows another example of the positioning device. Similarly, FIG. 5A is a side view in the width direction of the glass substrate of the positioning device, and FIG. 5B is a side view in the longitudinal direction. In (a) and (b), (a) to
(D) is the operation sequence. As shown in FIGS. 5A and 5B, when the rectangular glass substrate A is loaded on the table B, the glass substrate A is held by the support pins 2,
A positioning device that positions two parallel side edges of a rectangular glass substrate A by pressing them with a block-shaped positioning member 3 while leaving a gap with the tape B.

However, due to the widespread use of large-sized liquid crystal televisions and the like in recent years, the glass substrates of color filters for liquid crystal panels have become larger year by year. Further, in order to improve the production efficiency, the number of impositions on one glass substrate is often increased to produce the glass substrate, which is accelerating the increase in size. On the other hand, the glass substrate of the color filter for liquid crystal panels has become thinner and thinner year by year due to the weight reduction and the securement of high transmittance, along with the trend toward lighter, thinner and smaller notebook personal computers and portable information terminals.
That is, the glass substrate of the color filter for a liquid crystal panel is becoming larger and thinner year by year.

Therefore, in the case of the above-mentioned two examples, various problems occur in the positioning process in which the glass substrate is large and thin. For example, as shown in FIG. 4, when the rectangular glass substrate A is positioned by itself while contacting the inclined surface of the positioning member 3 as the support pins descend, as shown in FIG.
When the support pin 2 descends, the side edge of the rectangular glass substrate A may float while being in contact with the inclined surface of the positioning member 3, and may not be horizontally loaded on the table B. Moreover, even if the rectangular glass substrate A is stacked on the table B in a completely intimate contact, the positioning member 3
Is installed with a slight gap from the dimension between the two parallel side edges of the rectangular glass substrate A, so highly accurate positioning cannot be expected.

Further, for example, as shown in FIG. 5, with the rectangular glass substrate A still supported by the support pins 2, two sets of side edges of the rectangular glass substrate A parallel to each other are formed. When the block-shaped positioning member 3 is pressed to perform positioning, the rectangular glass substrate A is supported by the support pins 2 as shown in FIG. Since A is curved, accurate positioning becomes difficult. Even if, as shown in FIG. 8, the curvature of the rectangular glass substrate A is minimized by devising the position and the number of the support pins 2, if the glass substrate is thin, the block-shaped positioning member 3 Deformation due to pressing increases, and accurate positioning becomes difficult.

Further, as the definition of the liquid crystal panel becomes higher, the distortion and scratches of the glass substrate greatly affect the final quality. Therefore, it is required to handle the distortion and scratches even in the positioning process. For example, as shown in FIG. 5, when positioning is performed while the rectangular glass substrate A is supported by the support pins 2, the contact area between the rectangular glass substrate A and the support pins 2 is small. It is not preferable because stress is concentrated on the portion, which leads to distortion of the glass substrate and may cause scratches on the contact portion.

[0010]

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and applies a chemical solution using a die head or the like used when manufacturing a color filter for a liquid crystal panel. It is an object of the present invention to provide a glass substrate positioning device capable of stably and accurately positioning a glass substrate, which is becoming larger and thinner, at a proper position on a table with respect to a coating head in a chemical liquid coating device or the like. To do.

[0011]

DISCLOSURE OF THE INVENTION The present invention is directed to a table in which glass substrates are horizontally loaded and slidable in one direction within the plane, and a direction parallel to and parallel to the upper surface of the table. Is provided with at least two or more positioning members slidable on the table, and the positioning members move the side edges or four corner edges of the glass substrate loaded on the table in the center direction of the glass substrate while contacting the upper surface of the table. The glass substrate positioning device is characterized by pressing to position the glass substrate at a predetermined position on the table and retracting from the table after the positioning is completed.

Further, the present invention is the glass substrate positioning apparatus according to the above invention, wherein the positioning member has a portion contacting the side edge or the four corner edges of the glass substrate with respect to the side edge or the four corner edges of the glass substrate. Parallel planes,
A portion that comes into contact with the upper surface of the table is a substantially L-shaped convex portion formed on the bottom surface of the positioning member, the bottom surface of the convex portion is parallel to the upper surface of the table, and the side edge of the glass substrate. Alternatively, the glass substrate positioning device has a width of approximately 10 mm or less from a plane parallel to the four corner edges.

Further, according to the present invention, in the glass substrate positioning apparatus according to the above-mentioned invention, when the positioning member slides downward and the portion contacting the upper surface of the table comes into contact with the upper surface of the table, the contact is detected. And a pressure adjusting device that automatically adjusts the pressing pressure of the positioning member against the table according to a signal from the position detecting device.

Further, the present invention is the glass substrate positioning apparatus according to the above invention, wherein the positioning member is made of a material whose parts which come into contact with the side edges or four corner edges of the glass substrate and which come into contact with the upper surface of the table are the table. The glass substrate positioning device is made of a nylon resin that is softer and has higher wear resistance than the upper surface of the glass substrate and the glass substrate.

Further, the present invention is the glass substrate positioning apparatus according to the above invention, wherein the table guides a fluid supplied from the fluid supplying device via a conduit into the table, and a plurality of the tables are opened on the upper surface thereof. A glass substrate positioning device having a hollow portion for ejecting a fluid from an opening and performing positioning by a positioning member in a state where the glass substrate is slightly floated by the pressure of the fluid ejected from the opening.

Further, the present invention is the glass substrate positioning apparatus according to the above invention, wherein the table guides a negative pressure supplied from a negative pressure generating device through a conduit into the table and opens the upper surface thereof. A glass substrate positioning device having a hollow portion for sucking fluid from a plurality of openings, wherein a glass substrate is brought into close contact with a table by a negative pressure of the fluid sucked from the openings.

Further, the present invention is the glass substrate positioning apparatus according to the above invention, wherein the hollow portion is provided with a partition for dividing the inside thereof into a plurality of spaces, and a conduit is connected to each of the plurality of divided spaces. The glass substrate positioning device is characterized in that a switching valve capable of arbitrarily switching the connection between each space and the fluid supply device or the negative pressure generation device is provided in the middle of each conduit.

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION The glass substrate positioning apparatus according to the present invention will be described below in detail based on its embodiments. FIG. 1 is a perspective view illustrating the configuration of an embodiment of a glass substrate positioning device according to the present invention. FIG. 1 shows an example of a chemical liquid coating device used when manufacturing a color filter for a liquid crystal panel using a rectangular glass substrate. A is a glass substrate, B is a table on which the glass substrate is loaded, and 2 is a support pin provided in the table so as to be vertically movable. The support pin B is shown by a broken line when a part of the plurality of support pins B is raised.

Further, 3 is a positioning member, 4 is a driving device for the positioning member in the vertical direction, 5 is a driving device for the positioning member in the longitudinal direction of the table, 6 is a linear slide guide, and 7 is a driving for the positioning member in the table width direction. A device, 8 is an opening for jetting / inhaling air, and shows a part of a plurality of openings provided at equal intervals. 9 is a guide rail for sliding the table, 10 is a position detecting device for the vertical position of the positioning member,
Reference numeral 11 is a pressure control device, 12 is a negative pressure generation device, 13 is a fluid supply device, 14 is a second switching valve of a fluid path, 15 is a negative pressure generation device and a second conduit connecting the fluid supply device and the inside of the table, 16 Is a bracket for supporting the drive unit, and 17 is a base of the positioning member drive unit.

The broken line arrow indicates the table width direction (the width direction of the glass substrate). First conduit 20 and first
Since the switching valve 22 is provided below the table B, it is not shown in FIG. Further, a frame portion which is a base of the entire apparatus is omitted. Figure 10
[Fig. 2] is an enlarged perspective view showing a portion P of the positioning member 3 in Fig. 1. As shown in FIG. 10, the positioning member 3
The portion that comes into contact with the upper surface of the table is a substantially L-shaped convex portion 30 formed on the bottom surface portion of the positioning member 3. The bottom surface of the convex portion 30 shown by the diagonal lines in the drawing has a width W that is approximately 10 mm or less from a surface Q that is parallel to the upper surface of the table and that is parallel to the side edges or the four corner edges of the glass substrate. . Further, the height H of the convex portion 30 is about 1 mm.

FIG. 2 is a sectional view showing the internal structure of the table B in FIG. The same reference numerals as those in FIG. 1 correspond to the same portions, 18 and 19 are hollow portions provided in the table, and 20.
Is a first conduit connected to each hollow portion, 21 is a partition member for partitioning the hollow portion, and 22 is a first switching valve of the fluid path. The arrow indicates the air flow. As shown in FIG. 1, the positioning member 3 is provided in the vicinity of the four corners on the horizontally installed table B. One side symmetrical about the table longitudinal direction
The pair of positioning members 3 are respectively arranged in a vertical direction and a table via a vertical driving device 4 such as an air cylinder and a table longitudinal driving device 5 such as a linear actuator using a servomotor. It is supported by the bracket 16 so as to freely slide back and forth in the longitudinal direction. The bracket 16 is reciprocally slidable in the table width direction via the two parallel linear slide guides 6 and the table width direction driving device 7 such as a linear actuator using a servomotor, and is mounted on the base 17 freely. It is installed. Thereby, the positioning member 3 becomes slidable in the three-dimensional direction with respect to the table B. Further, a pressure control device 11 that controls the pressing force when descending is connected to the vertical drive device 4 of the positioning member 3.

The table B is slidably mounted on a body frame (not shown) along a highly accurate guide rail 9. In the coating process after the positioning is completed, the chemical solution is coated on the glass substrates stacked on the table B while moving the table B in the horizontal direction with high accuracy. Further, as shown in FIG. 2, inside the table B, a hollow portion 1 divided into several regions by a partition member 21.
8 and 19 are provided, and the hollow portion 1 is provided on the upper surface of the table B.
A plurality of openings 8 that connect the outside air to the outside air are provided at equal intervals. Further, inside the table B, there are stored support pins 2 that move up and down when the glass substrate A is delivered from the previous step. The support pin 2 penetrates the upper and lower sides of the table B and slides vertically by a driving device (not shown), but since it penetrates the hollow portions 18 and 19, that portion has a seal structure for preventing air leakage. ing.

The hollow portions 18, 19 and the first switching valve 22 are
The first switching valve 22 and the second switching valve 14 are connected to each other by the first conduit 20, and the second switching valve 14 and the negative pressure generating device 12 are further connected.
And the fluid supply device 13 is connected by a third conduit 25. That is, the first switching valve 22 is for switching the hollow portion, and the second switching valve 14 is for switching between the negative pressure generating device 12 and the fluid supply device 13. First switching valve 22
With the second switching valve 14, it is possible to supply or suction the fluid to the arbitrarily selected hollow region.

Thus, for example, when the glass substrate A has a plurality of sizes, if the partition member 21 is arranged according to the size and a hollow portion corresponding to the size of the glass substrate A is provided, the table B is placed on the table B. It is possible to eject the fluid or inhale the fluid only in the opening 8 in contact with the loaded glass substrates A. Further, as shown in FIG. 1, the hollow portions 18 and 19 inside the table and the negative pressure generating device 1
2 and the connection with the fluid supply device 13 can be arbitrarily switched, so that the ejection from the opening 8 of the table B
Inhalation can be freely switched in each step with good timing, as described later.

FIG. 9 is a sectional view in the table width direction for explaining the operation of positioning the glass substrate A using the glass substrate positioning device of the present invention. In FIG. 9, [a], [b], [c], [d], [e],
Although the symbols [f] and [g] are added, the sectional views in the longitudinal direction of the table are almost the same as those in the width direction, and therefore are omitted here. Note that in FIG. 9, for convenience of description, the hollow portion inside the table B is not divided into one chamber, and the first conduit 20 connected thereto is also one. In addition, the upstream device connected to the first conduit 20 and the positioning member 3
The drive devices of are omitted.

First, as shown in FIG. 9A, the glass substrate A is conveyed from the previous step in a state where the bottom surface is supported by the two arms 1 by a transfer robot (not shown), and the glass substrate A is placed on the table B in a predetermined manner. Although it is loaded at a position, a plurality of support pins 2 are installed on the upper surface of the table B in a state of protruding so as not to interfere with the arm 1, and the glass substrate A is once transferred onto the support pins 2. . During this time, the table width direction driving device 7 (see FIG. 1) is operated to move the table B
The positioning member 3 retracted to the position away from is moved toward the side edge of the glass substrate A.

Next, as shown in FIG. 9B, the support pins 2 slowly descend, and the glass substrate A supported by the support pins 2 slowly descends. Further, the positioning member 3 approaching to the vicinity of the side edge of the glass substrate A is temporarily stopped, and the vertical driving device 4 (see FIG. 1) is operated to descend to the upper surface of the table B at that position.

Subsequently, as shown in FIG. 9C, when the glass substrate A comes into close contact with the upper surface of the table B, the second switching valve 14 (see FIG. 1) is operated to cause the fluid supply device 13 to operate.
By connecting the hollow portion 16 inside the table B (see FIG. 1) to each other, the air flow is ejected from the opening 8 formed in the upper surface of the table. As a result, the airflow acts to push up the glass substrate A, a minute space is formed between the glass substrate A and the table B, and the mechanical friction between them is extremely reduced. Therefore, it is possible to suppress frictional scratches and the like on the bottom surface of the glass substrate A, and further, it is possible to perform a small pressing, so that the glass substrate A can be positioned with high precision without applying unreasonable force.

When it is detected that the positioning member 3 is in contact with the upper surface of the table B by a detection device 10 (see FIG. 1) such as a proximity sensor, the pressure control device 11 controls the pressing pressure. In that state, the positioning member 3 presses the side edge of the glass substrate A while sliding on the upper surface of the table B to start positioning.

After that, the positioning members 3 facing each other
As shown in FIG. 9 [d], stop at a position that is symmetrical with respect to the center of the table B and has an interval therebetween in the width direction of the glass substrate A. Therefore, the glass substrate A is not pinched and deformed by the positioning member 3, and the positioning operation is performed with high accuracy at the center of the table B. The size of the glass substrate A in the width direction is stored in advance, and the size can be efficiently switched by selecting the size in accordance with the size of the glass substrate to be produced.

Next, as shown in FIG. 9E, when the glass substrate A is accurately positioned by the positioning member 3, the proper pressing operation to the table B is still performed, but in this state. The second switching valve 14 (see FIG. 1) is operated to operate the negative pressure generator 12 (see FIG. 1) and the table B.
By making the inner hollow portion 16 electrically conductive, the air flow is sucked through the opening 8 formed in the upper surface of the table B.
As a result, the air flow acts so as to push down the glass substrate A, and the glass substrate A is brought into close contact with the table B due to the negative pressure, and is fixed while maintaining high positional accuracy.

Subsequently, as shown in FIG. 9F, with the glass substrate A fixed to the table B, the drive device 7 in the table width direction (see FIG. 1) and the drive device 4 in the vertical direction.
(See FIG. 1) are simultaneously operated to start moving the positioning member 3 to a distant position without interfering with the table B. FIG. 9G shows a state where the positioning is completed.
The positioning member 3 is retracted to a place completely away from the table B so as not to interfere with the next process, and the glass substrate A
Is fixed to the central portion of the table B while being accurately positioned.

In the glass substrate positioning apparatus according to the second aspect, the portion of the positioning member 3 that contacts the side edges or the four corner edges of the glass substrate A is parallel to the side edges or the four corner edges of the glass substrate A. Further, a portion which is a surface and is in contact with the upper surface of the table B is a substantially L-shaped convex portion 30 formed on the bottom surface portion of the positioning member 3, and the bottom surface of the convex portion 30 is parallel to the upper surface of the table, Further, it has a width W of about 10 mm or less from a plane Q parallel to the side edges or the four corner edges of the glass substrate A. Thus, for example, even if the positioning member 3 is distorted due to a change over time, the other portion of the positioning member 3 does not come into contact with the upper surface of the table B, and the convex portion always comes into contact with the upper surface of the table B. Therefore, as in the above-mentioned [Prior Art], the surface that comes into contact with the side edge or the four corner edges of the rectangular glass substrate does not float above the surface of the table, and it reliably presses against a thin glass substrate. You will be able to.

Further, in the glass substrate positioning device according to the third aspect, when the portion of the positioning member 3 that contacts the upper surface of the table B contacts the upper surface of the table B, the position detecting device 10 detects the contact. A pressure adjusting device 11 for automatically adjusting the pressing pressure of the positioning member against the table according to a signal from the position detecting device is provided.
As a result, the positioning member 3 is prevented from floating due to the reaction force when the glass substrate is positioned, and the positioning member 3 is prevented.
Since it can be controlled to an appropriate pressure that prevents over-pressing against the table surface, it is possible to minimize the abrasion of the positioning member and the upper surface of the table while preventing the glass substrate from being damaged. As a result, highly accurate positioning becomes easy.

Further, in the glass substrate positioning device according to the fourth aspect, the material of the portion of the positioning member 3 that contacts the side edges or the four corner edges of the glass substrate A and the portion that contacts the upper surface of the table B is the table. It is characterized by being a nylon resin that is softer and has higher wear resistance than the upper surface and the glass substrate. This makes it possible to suppress dust generation due to friction between the positioning member and the upper surfaces of the glass substrate and the table during positioning.
Further, it is possible to prevent abrasion of the upper surface of the table, maintain a high level of plane accuracy, and facilitate highly accurate positioning.

Further, in the glass substrate positioning device according to a fifth aspect of the present invention, the table of the glass substrate positioning device guides the fluid supplied from the fluid supplying device through the conduit into the table and opens the upper surface thereof. Since there is a hollow portion for ejecting fluid from a plurality of openings, and the positioning is performed by the positioning member while the glass substrate is slightly floated by the pressure of the fluid ejected from the openings, the positioning between the glass substrate and the upper surface of the table is performed. The frictional resistance is reduced, the positioning by the positioning member can be performed with a small pressing force, and the curling of the glass substrate during positioning is less likely to occur, so that highly accurate positioning is facilitated.

Further, in the glass substrate positioning device according to the sixth aspect, the table of the glass substrate positioning device guides the negative pressure supplied from the negative pressure generating device through the conduit into the table, and the table is provided on the upper surface thereof. It is characterized in that it has a hollow portion for sucking fluid from a plurality of open openings, and the glass substrate is brought into close contact with the table by the negative pressure of the fluid sucked from the openings. This facilitates highly accurate position holding of the glass substrate after the positioning is completed by the positioning member.

[0038]

The present invention has a table in which glass substrates are horizontally loaded and slidable in one direction within the plane thereof,
At least two positioning members that are slidable in a direction parallel to the upper surface of the table and a direction perpendicular to the upper surface of the table are provided, and the positioning members include side edges or four corner edges of the glass substrates stacked on the table. Since it is a glass substrate positioning device that presses in the direction of the center of the glass substrate while contacting the upper surface of the table to position the glass substrate at a predetermined position on the table, and retracts from the table after completion of positioning, In chemical liquid coating devices used for manufacturing, such as a die head for coating liquid chemicals, the glass substrate, which is becoming larger and thinner, can be stably and accurately positioned at an appropriate table position with respect to the coating head. It becomes a glass substrate positioning device capable of positioning.

Further, according to the present invention, in the above-described glass substrate positioning device, since the portion of the positioning member that comes into contact with the upper surface of the table is a substantially L-shaped convex portion, the convex portion always comes into contact with the upper surface of the table, Therefore, it is possible to reliably press the thin glass substrate. Also, since it is equipped with a position detection device and a pressure adjustment device, it is controlled to an appropriate pressure that prevents the positioning member from being excessively pressed against the table surface while preventing it from rising due to the reaction force when positioning the glass substrate. This makes it possible to perform highly accurate positioning easily.

Further, according to the present invention, in the above glass substrate positioning device, the table of the glass substrate positioning device is
Since the positioning is performed by the positioning member in a state where the glass substrate is slightly floated by the pressure of the fluid ejected from the opening of the hollow portion, the positioning can be performed with a small pressing force and the highly accurate positioning becomes easy.

[Brief description of drawings]

FIG. 1 is a schematic perspective view illustrating the configuration of an embodiment of a glass substrate positioning device of the present invention.

FIG. 2 is a cross-sectional view showing the internal structure of the table in FIG.

FIG. 3A is a side view of the glass substrate in the width direction for explaining a method of delivering the glass substrate positioning device and its pre-process. (B) is a side view in the longitudinal direction of the glass substrate for explaining a method of delivering the glass substrate positioning device and its pre-process.

FIG. 4A is a side view in the width direction of the glass substrate, which illustrates the positioning operation of the glass substrate positioning device.
(B) is a side view in the longitudinal direction of the glass substrate, which illustrates the positioning operation of the glass substrate positioning device.

FIG. 5A is a side view of the glass substrate in the width direction for explaining the positioning operation of the glass substrate positioning device.
(B) is a side view in the longitudinal direction of the glass substrate, which illustrates the positioning operation of the glass substrate positioning device.

FIG. 6 is a schematic view of a main part for explaining a problem of the glass substrate positioning device in the related art.

FIG. 7 is a schematic view of a main part for explaining a problem of the glass substrate positioning device in the related art.

FIG. 8 is a schematic view of a main part for explaining a problem of the glass substrate positioning device in the related art.

9A to 9G are schematic cross-sectional views illustrating a positioning operation when positioning is performed using the glass substrate positioning device of the present invention.

10 is an enlarged perspective view showing a portion P in FIG. 1. FIG.

[Explanation of symbols]

A ... Glass substrate B ... table C ... Transfer robot 1 ... Arm 2 ... Support pin 3 ... Positioning member 4 ... Vertical drive 5 ... Driving device in the longitudinal direction of the table 6 ... Linear motion slide guide 7 ... Table width direction drive device 8 ... Opening 9 ... Guide rail 10 ... Position detection device 11 ... Pressure control device 12 ... Negative pressure generator 13 ... Fluid supply device 14 ... Second switching valve 15 ... Second conduit 16 ... Bracket 17 ... Base 18, 19 ... Hollow part 20 ... First conduit 21 ... Partition member 22 ... First switching valve 25 ... Third conduit 30 ... Projection

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Hideo Awakawa             1-5-1 Taito, Taito-ku, Tokyo Toppan stamp             Imprint Co., Ltd. (72) Inventor Takeshi Yamaguchi             1-5-1 Taito, Taito-ku, Tokyo Toppan stamp             Imprint Co., Ltd. F-term (reference) 2H088 FA16 FA17 FA30 HA01                 2H090 JB02 JC02                 4G059 AA08 AB09 AB19 AC08 AC30                       FB03

Claims (7)

[Claims] 1. A table in which glass substrates are horizontally loaded and slidable in one direction within the plane, and at least two tables which are slidable in a direction parallel to the upper surface of the table and a direction perpendicular thereto. The positioning member described above is provided, and the positioning member presses the side edges or the four corner edges of the glass substrate stacked on the table toward the center of the glass substrate while contacting the upper surface of the table, and the predetermined position of the table. A glass substrate positioning device, characterized in that a glass substrate is positioned on the table and retracted from the table after the positioning is completed. 2. The positioning member has a portion in contact with a side edge or four corner edges of the glass substrate that is parallel to the side edge or four corner edges of the glass substrate, and a portion in contact with the upper surface of the table. Is a substantially L-shaped convex portion formed on the bottom surface of the positioning member, the bottom surface of the convex portion being parallel to the upper surface of the table and parallel to the side edges or four corner edges of the glass substrate. The glass substrate positioning device according to claim 1, wherein the glass substrate positioning device has a width of about 10 mm or less from the other surface. 3. A position detecting device for detecting the contact of the positioning member when the position member slides downward and a part contacting the upper surface of the table contacts the upper surface of the table, and a signal from the position detecting device. The glass substrate positioning device according to claim 1 or 2, further comprising a pressure adjusting device that automatically adjusts the pressing pressure of the positioning member against the table. 4. The positioning member is made of a material having a softer and higher abrasion resistance than the upper surface of the table and the glass substrate in that the material of the portion contacting the side edges or four corner edges of the glass substrate and the portion contacting the upper surface of the table is softer than those of the upper surface of the table and the glass substrate. The glass substrate positioning device according to claim 1, 2 or 3, wherein the glass substrate positioning device is a nylon resin. 5. The table has a hollow portion inside which guides a fluid supplied from a fluid supplying device via a conduit and ejects the fluid from a plurality of openings opened on the upper surface thereof. The glass substrate positioning according to claim 1, claim 2, claim 3, or claim 4, wherein the positioning is performed while the glass substrate is slightly floated by the pressure of the fluid ejected from the opening. apparatus. 6. The table has a hollow portion for guiding a negative pressure supplied from a negative pressure generating device through a conduit into the table and sucking a fluid through a plurality of openings opened on the upper surface thereof. The glass substrate positioning device according to claim 1, 2, 3, 4, or 5, wherein the glass substrate is brought into close contact with the table by a negative pressure of a fluid sucked from the opening. 7. The hollow portion is provided with a partition that divides the inside into a plurality of spaces, a conduit is connected to each of the plurality of divided spaces, and each space and a fluid are provided in the middle of each conduit. 7. The glass substrate positioning device according to claim 5, further comprising a switching valve capable of arbitrarily switching connection with the supply device or the negative pressure generation device.