JP2003168728A - Precision substrate container - Google Patents
Precision substrate containerInfo
- Publication number
- JP2003168728A JP2003168728A JP2001366763A JP2001366763A JP2003168728A JP 2003168728 A JP2003168728 A JP 2003168728A JP 2001366763 A JP2001366763 A JP 2001366763A JP 2001366763 A JP2001366763 A JP 2001366763A JP 2003168728 A JP2003168728 A JP 2003168728A
- Authority
- JP
- Japan
- Prior art keywords
- container
- nozzle member
- precision substrate
- container body
- storage container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、半導体ウェーハや
マスクガラス等の精密基板（以下、単に基板と略記する
こともある）を収納して、保管、運搬等に使用される精
密基板収納容器に関し、特には基板収納容器内部の気体
を置換するためのノズル部材を有する精密基板収納容器
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a precision substrate container for accommodating a precision substrate such as a semiconductor wafer or a mask glass (hereinafter sometimes simply referred to as a substrate) and used for storage and transportation. More particularly, it relates to a precision substrate storage container having a nozzle member for replacing gas inside the substrate storage container.
【０００２】[0002]
【従来の技術】従来、精密基板収納容器は、開口部を有
する容器本体とこの開口部を密閉する蓋体とからなり、
容器本体内の対向する内側壁に形成された支持部に複数
枚の精密基板を収納し、蓋体に取り付けられたシールガ
スケットを用いて、基板収納容器内部を密閉状態とし
て、精密基板の保管や搬送に使用されている。このよう
な精密基板収納容器では、保管中に基板が汚染されるこ
とがないように、基板収納容器内の空気を窒素若しくは
不活性ガスまたは乾燥空気等に置換して保管することが
知られている（特開平８−１９１１００号公報、特開平
９−１３４９５２号公報参照）。2. Description of the Related Art Conventionally, precision substrate storage containers consist of a container body having an opening and a lid for sealing the opening.
A plurality of precision substrates are stored in the support parts formed on the inner walls facing each other inside the container body, and the seal gasket attached to the lid is used to keep the inside of the substrate storage container in a sealed state to store the precision substrates. It is used for transportation. In such a precision substrate storage container, it is known to replace the air in the substrate storage container with nitrogen or an inert gas or dry air so as to prevent the substrate from being contaminated during storage. (See JP-A-8-191100 and JP-A-9-134952).
【０００３】[0003]
【発明が解決しようとする課題】上記密閉した精密基板
収納容器には、一般にフィルタを備えた吹込孔と排気孔
が設けられ、これらの孔を用いて基板収納容器内の気体
交換を行っているが、基板収納容器の内部は、収納した
複数の基板によって仕切られているため、基板収納容器
内の完全な気体交換を行おうとすると、一回の気体交換
に５分〜１０分も時間がかかり効率が悪かった。また、
基板収納容器内は、収納した基板の数だけ内部が仕切ら
れて複雑な空間をなすため、気体の置換がうまく行われ
ない澱み部分が形成され、この澱み部分に、酸素や基板
収納容器の材料、あるいは加工及び／または処理された
基板表面から僅かに出る有機汚染ガスや金属イオン等が
貯まったままで吹き込まれたガスと置換されず、精密基
板が汚染されたり、酸化されてしまうという問題があっ
た。The sealed precision substrate storage container is generally provided with a blow-in hole and an exhaust hole provided with a filter, and these holes are used to exchange gas in the substrate storage container. However, since the inside of the substrate storage container is partitioned by the plurality of stored substrates, it takes 5 to 10 minutes for one gas exchange to perform a complete gas exchange in the substrate storage container. It was inefficient. Also,
The inside of the substrate storage container is partitioned by the number of stored substrates to form a complicated space, so a stagnation part where gas replacement is not performed well is formed, and oxygen and the material of the substrate storage container are formed in this stagnation part. Alternatively, there is a problem that the precision substrate is contaminated or oxidized because the organic pollutant gas or metal ions slightly emitted from the surface of the processed and / or treated substrate is not replaced with the gas blown while being stored. It was
【０００４】本発明は、このような問題点を解決するた
めになされたもので、クリーンエアーや不活性ガスを直
接精密基板の両面に吹き付けるようにすることにより、
基板収納容器内の澱み部分を無くして容器内部のガスの
置換を完全に行い、精密基板への塵挨等の付着を防ぎ、
基板の汚染を防止できる基板収納容器を提供するもので
ある。The present invention has been made in order to solve such problems, and by spraying clean air or an inert gas directly on both sides of a precision substrate,
By eliminating the stagnation inside the substrate storage container and completely replacing the gas inside the container, the adhesion of dust etc. to the precision substrate can be prevented,
The present invention provides a substrate storage container capable of preventing substrate contamination.
【０００５】[0005]
【課題を解決するための手段】前記課題を解決するため
に、請求項１の精密基板収納容器は、本体と蓋体とから
なり、内外に連通する複数の貫通孔を利用して容器内部
の気体を置換できる精密基板収納容器において、前記複
数の貫通孔の少なくとも一箇所に、本体内に収納された
精密基板の両面に気流を吹き付ける吹出孔を備えたノズ
ル部材を取り付け、前記残りの貫通孔を排気孔としてい
る。請求項２の精密基板収納容器は、前記ノズル部材の
内部および前記排気孔に、それぞれフィルタを設けてい
る。In order to solve the above-mentioned problems, the precision substrate storage container according to claim 1 comprises a main body and a lid, and utilizes a plurality of through holes that communicate with the inside and outside of the container. In a precision substrate storage container capable of substituting gas, at least one of the plurality of through holes is attached with a nozzle member having a blowout hole for blowing an air flow on both sides of the precision substrate stored in the main body, and the remaining through holes. Is the exhaust hole. In the precision substrate storage container of the second aspect, filters are provided inside the nozzle member and in the exhaust hole, respectively.
【０００６】また、請求項３の精密基板収納容器は、前
記排気孔となる貫通孔を蓋側の容器本体に設け、前記ノ
ズル部材が取り付けられる貫通孔を前記容器本体に収納
した基板を挟んで蓋体と対向する奥側の容器本体に設
け、かつ前記各貫通孔を基板の容器本体底面への投影部
分以外の容器本体に設けている。さらに、請求項４の精
密基板収納容器は、前記ノズル部材を、前記容器本体の
蓋体内面に取り付け、かつ容器本体の開口部と対向する
奥側に排気孔を設けている。本発明の精密基板収納容器
は、収納した複数枚の各精密基板の両面に、それぞれノ
ズル部材からクリーンエアーや不活性ガス等を吹き付け
るようにして、容器内の気流の流れを円滑にし、容器内
の澱みをなくしている。Further, in the precision substrate storage container according to claim 3, a through hole serving as the exhaust hole is provided in the container body on the lid side, and a through hole for attaching the nozzle member is sandwiched between the substrates housed in the container body. The through hole is provided on the back side of the container body facing the lid, and the through holes are provided on the container body other than the portion where the substrate is projected onto the bottom surface of the container body. Further, in the precision substrate storage container according to the fourth aspect, the nozzle member is attached to the inner surface of the lid of the container body, and an exhaust hole is provided on the back side facing the opening of the container body. The precision substrate storage container of the present invention is such that the clean air, the inert gas, or the like is sprayed from the nozzle member to both sides of each of the stored precision substrates to smooth the flow of air inside the container. The stagnation has been eliminated.
【０００７】[0007]
【発明の実施の形態】以下、本発明の一実施の形態を添
付図面に基づいて説明する。図１は本発明の基板収納容
器を表す斜視図であり、図２は本発明のノズル部材を基
板収納容器に配置した状態を表す図１のII−II面による
切断平面図であり、図３は本発明のノズル部材を配置し
た図１に表す基板収納容器のIII−III面による切断平面
図である。また、図４は本発明の基板収納容器に取り付
けられるノズル部材を表す正面図であり、図５はノズル
部材の拡大底面図である。図６は本発明のノズル部材の
取付け状態を表す図２のVI−VI面による断面図、図７は
本発明のノズル部材の別の取付け状態を表す、図６に相
当する断面図であり、図８は本発明の別の実施形態を表
す基板収納容器の図２に相当する断面図である。DETAILED DESCRIPTION OF THE INVENTION An embodiment of the present invention will be described below with reference to the accompanying drawings. 1 is a perspective view showing a substrate storage container of the present invention, and FIG. 2 is a sectional plan view taken along the line II-II of FIG. 1 showing a state in which the nozzle member of the present invention is arranged in the substrate storage container. FIG. 3 is a plan view of the substrate storage container shown in FIG. 1, in which the nozzle member of the present invention is arranged, taken along the plane III-III. 4 is a front view showing a nozzle member attached to the substrate storage container of the present invention, and FIG. 5 is an enlarged bottom view of the nozzle member. 6 is a sectional view taken along the line VI-VI of FIG. 2 showing the mounting state of the nozzle member of the present invention, and FIG. 7 is a sectional view corresponding to FIG. 6 showing another mounting state of the nozzle member of the present invention, FIG. 8 is a cross-sectional view corresponding to FIG. 2 of a substrate storage container showing another embodiment of the present invention.
【０００８】図１〜図３に示す本発明の基板収納容器１
は、前面に開口部を有し基板を横置きにして上下方向に
並べて収納する容器であって、容器本体２と蓋体３とか
らなり、容器本体２には、その対向する左右の内側壁
に、精密基板Ｗ（図３では１枚のみを示す）の周縁部を
断面コ字状の開放部内で係止して水平に支持する支持部
４，４が、上下方向にそれぞれ一定間隔で形成されてお
り、蓋体３の内面には、精密基板Ｗの端縁部を押圧保持
するリテーナ３０が取り付けられ、蓋体の側壁にはシー
ルガスケット３１が取り付けられて、容器本体の開口部
１２を蓋体３でシール可能に密閉できるようになってい
る。また、容器本体２には、内外に連通する４個の貫通
孔ａ1、ａ1，ａ2、ａ2が設けられ、これらの一部の貫通
孔ａ1には、容器本体２内に収納された精密基板Ｗの両
面に気流を吹き付けるノズル部材５が取り付けられ、残
りの貫通孔ａ2は、排気孔６として使用されている。The substrate storage container 1 of the present invention shown in FIGS.
Is a container that has an opening on the front surface and stores the substrates side by side in the vertical direction, and includes a container body 2 and a lid body 3, and the container body 2 has opposing left and right inner side walls. In addition, support portions 4 and 4 for horizontally supporting by locking the peripheral portion of the precision substrate W (only one is shown in FIG. 3) in an open portion having a U-shaped cross section are formed at regular intervals in the vertical direction. The retainer 30 that presses and holds the edge of the precision substrate W is attached to the inner surface of the lid 3, and the seal gasket 31 is attached to the side wall of the lid to close the opening 12 of the container body. The lid 3 can be hermetically sealed. Further, the container body 2 is provided with four through holes a 1 , a 1 , a 2 , a 2 communicating with the inside and outside, and some of these through holes a 1 are accommodated in the container body 2. Nozzle members 5 for blowing airflow are attached to both surfaces of the precision substrate W thus formed, and the remaining through holes a 2 are used as exhaust holes 6.
【０００９】このノズル部材５は、図４に示すように、
一端に開口部７を有する中空円筒状に形成され、その側
周壁には、円周方向に延びた複数の長円状の吹出孔８，
８が軸方向に一定間隔で形成されている。また、開口部
７の外周壁には、容器本体２に設けられた貫通孔ａ1に
取り付けるためのねじ部９が螺刻形成され、このねじ部
９の内周壁には、図５に示すように、フィルタを取り付
けるための係止凹部１０が形成され、かつ開口には、内
周壁から放射状に伸びるリブ１１が形成されている。フ
ィルタ１８は、このリブ１１と後述するフィルタ保持部
材１５に設けられる同様のリブ１６（図６）との間で、
挟持状に取り付けられる。This nozzle member 5, as shown in FIG.
It is formed in a hollow cylindrical shape having an opening 7 at one end, and a plurality of elliptical blow holes 8 extending in the circumferential direction are formed in the side peripheral wall thereof.
8 are formed at regular intervals in the axial direction. Further, on the outer peripheral wall of the opening 7, a screw portion 9 for attaching to the through hole a 1 provided in the container main body 2 is threaded, and the inner peripheral wall of the screw portion 9 is formed as shown in FIG. A locking recess 10 for mounting the filter is formed on the base plate, and a rib 11 extending radially from the inner peripheral wall is formed on the opening. The filter 18 is provided between the rib 11 and a similar rib 16 (FIG. 6) provided on the filter holding member 15 described later,
It is attached in a sandwiched manner.
【００１０】本発明のノズル部材５は、図２、図６に示
すように、容器本体２の開口部１２と対向する奥側の二
箇所に形成された貫通孔ａ1の内周面に形成されたねじ
部１３に、ノズル部材５のねじ部９が螺着されて容器本
体２の内部に取り付けられる。この取付け構造では、上
記螺着部以外のノズル部材５と容器本体２の接触部に気
密性を高めるためのＯリング１４を設けることが好まし
い。ノズル部材５は、容器本体２に取り付けられた際、
その各吹出孔８，８が、一対の支持部４，４に支持され
た基板Ｗに指向する向きに配置され、かつ各吹出孔８が
隣接する基板と基板の間隙部に近接した位置に配設され
るようになっている。なお、図３では、ノズル部材５の
吹出孔８は判り易くするため、容器本体２の対向する内
壁面に向けて描かれているが、上述したように基板Ｗに
指向する向きであれば、吹出孔の中心が精密基板Ｗの中
心に向くようにノズル部材が配置されることが好まし
い。As shown in FIGS. 2 and 6, the nozzle member 5 of the present invention is formed on the inner peripheral surface of the through hole a 1 formed at two positions on the inner side facing the opening 12 of the container body 2. The threaded portion 9 of the nozzle member 5 is screwed onto the formed threaded portion 13 to be mounted inside the container body 2. In this mounting structure, it is preferable to provide an O-ring 14 for enhancing airtightness at the contact portion between the nozzle member 5 and the container body 2 other than the screwed portion. When the nozzle member 5 is attached to the container body 2,
The blow-out holes 8 and 8 are arranged so as to face the substrate W supported by the pair of supporting portions 4 and 4, and the blow-out holes 8 are arranged at positions close to the gap between the adjacent substrates. It is supposed to be installed. Note that, in FIG. 3, the blow-out holes 8 of the nozzle member 5 are drawn toward the facing inner wall surfaces of the container body 2 for the sake of clarity, but as long as the direction is toward the substrate W as described above, The nozzle member is preferably arranged so that the center of the blowout hole faces the center of the precision substrate W.
【００１１】フィルタをノズル部材５の開口部７に取り
付けるために使用されるフィルタ保持部材１５は、図６
及び図１０に示すように、リング（筒）状に形成され、
一端のノズル部材５側の開口部に形成された放射状のリ
ブ１６を有し、ノズル部材５の開口部７の内周壁に設け
られた係止凹部１０に、フィルタ保持部材１５の外周壁
に設けた係止突起１７を嵌め込むことにより、ノズル部
材５の開口部７の内周に取り付けられる。The filter holding member 15 used to attach the filter to the opening 7 of the nozzle member 5 is shown in FIG.
And as shown in FIG. 10, it is formed in a ring (cylindrical) shape,
It has radial ribs 16 formed in the opening of one end of the nozzle member 5 side, and is provided in the locking recess 10 provided in the inner peripheral wall of the opening 7 of the nozzle member 5 and in the outer peripheral wall of the filter holding member 15. By fitting the locking projection 17 in the above, the nozzle member 5 is attached to the inner periphery of the opening 7.
【００１２】この取り付けに際し、放射状のリブ１６に
フィルタ１８を載せて、フィルタ保持部材１５をノズル
部材５の開口部７に挿入することにより、フィルタ１８
は、ノズル部材５の放射状のリブ１１とフィルタ保持部
材１５の放射状のリブ１６との間に挟持状に取り付けら
れる。なお、フィルタ保持部材１５とノズル部材５の接
触部には、気密性を高めるためにＯリング１９を取り付
けることが望ましい。At the time of this attachment, the filter 18 is placed on the radial ribs 16 and the filter holding member 15 is inserted into the opening 7 of the nozzle member 5, so that the filter 18
Are attached in a sandwiched manner between the radial ribs 11 of the nozzle member 5 and the radial ribs 16 of the filter holding member 15. An O-ring 19 is preferably attached to the contact portion between the filter holding member 15 and the nozzle member 5 in order to improve airtightness.
【００１３】フィルタ１８は、ＨＥＰＡ、ＵＬＰＡなど
の塵挨除去用フィルタや、各種ケミカルフィルタ（活性
炭、アニオン、カチオン）などが使用でき、これらを一
種または複数種併用して使用することができる。なおフ
ィルタの厚さや外形寸法等は限定されない。As the filter 18, a dust removing filter such as HEPA or ULPA, various chemical filters (activated carbon, anion, cation), etc. can be used, and these can be used alone or in combination. The thickness and external dimensions of the filter are not limited.
【００１４】図２に示すように、ノズル部材５が取り付
けられる貫通孔ａ1に対向する容器本体２の開口部１２
側に設けられた貫通孔ａ2は、ガスパージする際の排気
孔６として使用される。この排気孔６は、図に示したよ
うにノズル部材５と同数設ける必要はなく、ノズル部材
より少く若しくは多く設けるようにしてもよく、また、
容器本体２のみならず蓋体３に設けるようにしてもよ
い。排気孔６には、ノズル部材５に取り付けたのと同様
に、フィルタ保持部材１５を取り付けてフィルタ１８を
介して、基板収納容器内部の気体を外部へ排気すること
が好ましい。この場合、排気孔となる容器本体の貫通孔
の内周にフィルタ部材を取り付ける係止凹部と放射状や
格子状のフィルタ保持リブを設けておくとよい。As shown in FIG. 2, the opening 12 of the container body 2 facing the through hole a 1 in which the nozzle member 5 is attached.
The through hole a 2 provided on the side is used as the exhaust hole 6 at the time of gas purging. It is not necessary to provide the same number of the exhaust holes 6 as the nozzle members 5 as shown in the figure, and the exhaust holes 6 may be provided in a smaller number or in a larger number than the nozzle members.
It may be provided not only on the container body 2 but also on the lid 3. It is preferable to attach the filter holding member 15 to the exhaust hole 6 and exhaust the gas inside the substrate storage container to the outside through the filter 18 as in the case of attaching the nozzle member 5. In this case, it is advisable to provide locking recesses for mounting the filter member and radial or lattice-shaped filter holding ribs on the inner circumference of the through hole of the container body that serves as an exhaust hole.
【００１５】なお、排気は容器内に供給されるガスにも
よるが、自然排気の他にも、排気孔に開閉弁を取り付け
ておき、排気管路に連通された部品を開閉弁に挿入して
連通させて外部に排気したり、真空ポンプ等を使って強
制排気させるようにしてもよい。ノズル部材５が取り付
けられる貫通孔ａ1及び排気孔６として使用される貫通
孔ａ2は、いずれも収納した精密基板の貫通孔設置面
（図示の場合、基板収納容器の底面）への投影部分の外
側に設けることが好ましく、これにより収納した基板に
邪魔されず容器内の気流がスムーズになって効率のよい
吹込み及び排気が可能となる。Exhaust gas depends on the gas supplied into the container, but in addition to natural exhaust gas, an opening / closing valve is attached to the exhaust hole, and a part connected to the exhaust pipe is inserted into the opening / closing valve. May be communicated with each other and exhausted to the outside, or may be forcedly exhausted using a vacuum pump or the like. The through-hole a 1 to which the nozzle member 5 is attached and the through-hole a 2 used as the exhaust hole 6 are both projected portions onto the through-hole installation surface (the bottom surface of the substrate storage container in the figure) of the precision substrate that has been stored. Is preferably provided on the outside of the container, whereby the air flow in the container is smooth without being obstructed by the accommodated substrate, and efficient blowing and exhausting can be performed.
【００１６】ノズル部材５の容器本体２への取り付け
は、前記したように、容器本体２の貫通孔ａ1に形成し
たねじ部１３に、ノズル部材５に設けられたねじ部９を
直接螺合させて行うこともできるが、図７に示すように
取付けパーツ２２を用いて行うこともできる。この取付
けパーツ２２は、リング（筒）状に形成され内周に、ノ
ズル部材５のねじ部９と噛み合うねじ部２２が螺刻さ
れ、外周部にはつば部２４が形成されている。To attach the nozzle member 5 to the container body 2, as described above, the screw portion 9 provided on the nozzle member 5 is directly screwed into the screw portion 13 formed in the through hole a 1 of the container body 2. Alternatively, it can be performed by using the mounting parts 22 as shown in FIG. 7. The mounting part 22 is formed in a ring (cylindrical) shape, and a threaded portion 22 that meshes with the threaded portion 9 of the nozzle member 5 is threaded on the inner periphery, and a collar portion 24 is formed on the outer peripheral portion.
【００１７】取付けパーツ２２を使用してノズル部材５
を容器本体２に取り付けるには、まず、ノズル部材５の
開口部７を容器本体２の貫通孔ａ1に内側から挿通させ
て、貫通孔ａ1の内周面とノズル部材５のねじ部９との
間隙に、取付けパーツ２２を差し込む。次いで、取付け
パーツ２２のねじ部２３をノズル部材５のねじ部９に螺
合させて締付けていくと、ノズル部材５の外周に設けら
れたつば部２０が、容器本体２の貫通孔ａ1の上端部周
縁に形成された外周リブ２１に、取付けパーツ２２の外
周面から突出したつば部２４が貫通孔ａ1の端縁下部
に、それぞれ圧接されて、ノズル部材５が容器本体２に
強固に取り付けられる。このような取付けパーツ２２を
使用すれば、図６に示した取付構造と異なり、容器本体
２の貫通孔ａ1にねじ加工をする必要がないので、容器
本体の生産性が向上する。Nozzle member 5 using mounting parts 22
To attach the to the container body 2, first, the opening 7 of the nozzle member 5 is inserted from the inside into the through hole a 1 of the container body 2, and the inner peripheral surface of the through hole a 1 and the threaded portion 9 of the nozzle member 5 are inserted. Insert the mounting part 22 into the gap. Next, when the threaded portion 23 of the mounting part 22 is screwed onto the threaded portion 9 of the nozzle member 5 and tightened, the collar portion 20 provided on the outer periphery of the nozzle member 5 is inserted into the through hole a 1 of the container body 2. The outer peripheral rib 21 formed on the peripheral edge of the upper end portion is pressed against the lower edge portion of the through hole a 1 with the flange portion 24 protruding from the outer peripheral surface of the mounting part 22, so that the nozzle member 5 is firmly attached to the container body 2. It is attached. When such a mounting part 22 is used, unlike the mounting structure shown in FIG. 6, it is not necessary to screw the through hole a 1 of the container body 2, so that the productivity of the container body is improved.
【００１８】また、ノズル部材は、図８に示すように、
容器本体２の蓋体３に取り付けるようにしてもよい。こ
の場合、排気孔６はノズル部材５から離れた容器本体２
の奥側に設けた貫通孔ａ2に、一ないし複数箇所に設け
ることが望ましく、また、ノズル部材５は、図９に示す
ように、開口部７のねじ部９を、蓋体３の内部に形成し
た貫通孔ａ1から蓋体３の内側に突出した取付部２５を
使って蓋体３に取り付けることができる。この取付部２
５は、蓋体３の貫通孔ａ1を、蓋体３に沿って上方に折
曲した中空構造になっていて、内周壁にはノズル部材５
のねじ部９に螺合できるねじ部２６が螺刻されており、
蓋体３の外に連通する開口部２７に配管等を連結させ
て、ここからガスパージをすることができるようになっ
ている。The nozzle member, as shown in FIG.
It may be attached to the lid body 3 of the container body 2. In this case, the exhaust hole 6 is formed in the container body 2 separated from the nozzle member 5.
It is desirable to provide the through hole a 2 provided at the inner side of the cover 3 at one or a plurality of positions. Further, as shown in FIG. 9, in the nozzle member 5, the screw part 9 of the opening 7 is provided inside the lid 3. It can be attached to the lid body 3 by using the attachment portion 25 protruding from the through hole a 1 formed in the inside of the lid body 3. This mounting part 2
5 has a hollow structure in which the through hole a 1 of the lid body 3 is bent upward along the lid body 3, and the nozzle member 5 is provided on the inner peripheral wall.
The threaded portion 26 that can be screwed into the threaded portion 9 is threaded,
A pipe or the like is connected to the opening portion 27 communicating with the outside of the lid body 3 so that gas purging can be performed from here.
【００１９】本発明によるノズル部材は、ポリエチレ
ン、ポリプロピレン、ＡＢＳ樹脂、ポリスチレン、ポリ
カーボネート、ポリブチレンテレフタレートなどの熱可
塑性樹脂およびポリエステル系、ポリオレフィン系、ポ
リスチレン系などの熱可塑性エラストマーを用いること
ができる。For the nozzle member according to the present invention, a thermoplastic resin such as polyethylene, polypropylene, ABS resin, polystyrene, polycarbonate, polybutylene terephthalate or a thermoplastic elastomer such as polyester, polyolefin or polystyrene can be used.
【００２０】次に、本発明の精密基板収納容器のガスパ
ージについて説明する。本発明の精密基板収納容器のガ
スパージは、容器本体２に取り付けられたノズル部材５
の開口部７に、外部に設けられたドライクリーンエアー
や窒素等の不活性ガス等の供給源に連通したガス注入口
（図示せず）を連結し、前記気体を基板収納容器の内部
に供給して行われる。ノズル部材５に注入されたガス
は、フィルタ１８を介してクリーンな状態でノズル部材
５の中空部に充満され、吹出孔８，８から基板収納容器
１の内部へ充満していく。Next, the gas purging of the precision substrate storage container of the present invention will be described. The gas purging of the precision substrate storage container of the present invention is performed by the nozzle member 5 attached to the container body 2.
A gas injection port (not shown) communicating with a supply source of dry clean air or an inert gas such as nitrogen provided outside is connected to the opening 7 of the substrate to supply the gas into the substrate storage container. Done. The gas injected into the nozzle member 5 fills the hollow portion of the nozzle member 5 in a clean state through the filter 18 and fills the inside of the substrate storage container 1 through the blowout holes 8 and 8.
【００２１】このとき新たに供給されるガスは、容器本
体２の支持部４，４に支持された精密基板Ｗの上面と下
面に沿うように流れて、ガスパージ前に精密基板収納容
器に充満していた空気は、排気孔６，６からフィルター
を介して外部へ排気されていく。このように、ノズル部
材を使用して精密基板収納容器内に供給ガスの流れを作
ることで、精密基板を汚染するおそれのある精密基板収
納容器の材料や金属配線等の加工処理された基板表面か
らの微量の揮発性ガスを、精密基板表面から取り除きな
がらガスパージすることができ、精密基板の汚染防止効
果がきわめて有効に得られる。特に多数の精密基板を収
納した基板収納容器では、多数の基板によって細かく区
切られた容器内部の隅々まで、澱み無く流れ効率よくガ
スパージができる。At this time, the newly supplied gas flows along the upper surface and the lower surface of the precision substrate W supported by the supporting portions 4 and 4 of the container body 2 to fill the precision substrate storage container before gas purging. The existing air is exhausted to the outside from the exhaust holes 6 and 6 through the filter. In this way, by using the nozzle member to create a flow of the supply gas in the precision substrate storage container, the precision substrate storage container material or metal wiring etc. that may contaminate the precision substrate may be processed. It is possible to perform gas purging while removing a trace amount of volatile gas from the surface of the precision substrate, and the effect of preventing contamination of the precision substrate can be obtained very effectively. In particular, in a substrate storage container that stores a large number of precision substrates, gas can be efficiently purged to every corner inside the container that is finely divided by a large number of substrates without stagnation.
【００２２】また、本発明のノズル部材を使って、ドラ
イクリーンエアーや不活性ガスを注入して精密基板に沿
う供給ガスの流れを作り外部に排気することにより、基
板収納容器内に僅かに存在するパーティクルを供給ガス
で容器内に巻き上げて精密基板に付着させてしまうこと
もなく、基板の汚染を防止でき、かつ基板によって遮ら
れる空間部を短時間で効率よくパージすることができる
ので生産性が向上する。さらに、本発明の基板収納容器
を使って、精密基板を保管している間中、常に不活性ガ
スを基板表面に吹き付けておくことができるので、揮発
性ガスによる保管中の基板汚染を防止できると共に、基
板表面の自然酸化膜形成を防止できるので、基板表面の
厚さが変動せず精度の良い加工や処理ができる。Further, by using the nozzle member of the present invention to inject dry clean air or an inert gas to create a flow of the supply gas along the precision substrate and exhaust it to the outside, a slight presence in the substrate container is achieved. The particles that do not wind up in the container with the supply gas and adhere to the precision substrate can prevent substrate contamination, and can efficiently purge the space that is blocked by the substrate in a short time. Is improved. Furthermore, since the substrate storage container of the present invention can be used to constantly blow an inert gas onto the surface of a substrate during storage of precision substrates, substrate contamination during storage due to volatile gas can be prevented. At the same time, it is possible to prevent the formation of a natural oxide film on the surface of the substrate, so that the thickness and thickness of the surface of the substrate do not fluctuate, and accurate processing and treatment can be performed.
【００２３】ノズル部材５の開口部７や容器本体２の排
気孔６に、外部に設けられるガスパージ用の供給口及び
排気口に挿入して係合可能な開閉弁を設けておくと、基
板収納容器内に外界のエアーが自然吸気されることがな
くなるので、基板収納容器を不活性ガスで満たした状態
で長期間保管しておくことができる。以上、本発明を前
記実施の形態に基づき説明したが、本発明は前記実施の
形態例に限定されるものではなく、その要旨を逸脱しな
い範囲で種々変更が可能である。When an opening / closing valve which can be inserted into and engaged with an externally provided gas purging supply port and exhaust port is provided in the opening 7 of the nozzle member 5 and the exhaust hole 6 of the container body 2, the substrate can be stored. Since the outside air is not naturally sucked into the container, the substrate storage container can be stored for a long period of time while being filled with the inert gas. Although the present invention has been described based on the above embodiment, the present invention is not limited to the above embodiment, and various modifications can be made without departing from the scope of the invention.
【００２４】[0024]
【発明の効果】本発明の精密基板収納容器によれば、収
納した複数の精密基板の表裏両面に沿って、クリーンエ
アーや不活性ガスを直接吹き付けることができるので、
保管中でも精密基板を汚染することなく、ガスパージの
際の滞留部分もないため短時間で効率よくガスパージす
ることができる。According to the precision substrate storage container of the present invention, since clean air or an inert gas can be directly blown along both front and back surfaces of a plurality of precision substrates stored.
Even during storage, the precision substrate is not contaminated, and since there is no stagnant portion during gas purging, gas purging can be performed efficiently in a short time.
【図１】 本発明の精密基板収納容器を表す斜視図であ
る。FIG. 1 is a perspective view showing a precision substrate storage container of the present invention.
【図２】 本発明のノズル部材を精密基板収納容器に配
置した状態を表す図１のII-II面による切断平面図であ
る。FIG. 2 is a sectional plan view taken along the line II-II of FIG. 1 showing a state in which the nozzle member of the present invention is arranged in a precision substrate storage container.
【図３】 本発明のノズル部材を配置した図１に表す精
密基板収納容器のIII-III面による切断平面図である。FIG. 3 is a sectional plan view taken along the line III-III of the precision substrate storage container shown in FIG. 1 in which the nozzle member of the present invention is arranged.
【図４】 本発明の精密基板収納容器に取り付けられる
ノズル部材を表す正面図である。FIG. 4 is a front view showing a nozzle member attached to the precision substrate storage container of the present invention.
【図５】 図４のノズル部材の拡大底面図である。5 is an enlarged bottom view of the nozzle member of FIG.
【図６】 本発明のノズル部材の取付け状態を表す図２
のVI−VI面による断面図である。FIG. 6 is a view showing a mounting state of the nozzle member of the present invention.
6 is a sectional view taken along line VI-VI of FIG.
【図７】 本発明のノズル部材の別の取付け状態を表す
図６に相当する断面図である。FIG. 7 is a cross-sectional view corresponding to FIG. 6 showing another mounting state of the nozzle member of the present invention.
【図８】 本発明の別の実施形態を表す精密基板収納容
器の図２に相当する断面図である。8 is a sectional view of a precision substrate storage container representing another embodiment of the present invention, which corresponds to FIG.
【図９】 本発明のノズル部材用取付具の取付け状態を
示す模式的断面図である。FIG. 9 is a schematic cross-sectional view showing an attached state of the nozzle member attachment of the present invention.
【図１０】 本発明に使用するフィルタ部分の組立斜視
図である。FIG. 10 is an assembled perspective view of a filter portion used in the present invention.
１ 精密基板収納容器 ２ 容器本体 ３ 蓋体 ４ 支持部 ５ ノズル部材 ６ 排気孔 ７ ノズル部材の開口部 ８ 吹出孔 ９ ねじ部 １０ 係止凹部 １１ リブ １２ 容器本体の開口部 １３ ねじ部 １４ Ｏリング １５ フィルタ保持部材 １６ 放射状のリブ １７ 係止突起 １８ フィルタ １９ Ｏリング ２０ つば部 ２１ 外周リブ ２２ 取付けパーツ ２３ ねじ部 ２４ 取付けパーツのつば部 ２５ 取付部 ２６ 取付部のねじ部 ２７ 取付部の開口部 ３０ リテーナ ３１ シールガスケット ａ1，ａ2 貫通孔 Ｗ 基板DESCRIPTION OF SYMBOLS 1 Precision substrate storage container 2 Container body 3 Lid body 4 Support part 5 Nozzle member 6 Exhaust hole 7 Nozzle member opening 8 Blow-out hole 9 Screw part 10 Locking recess 11 Rib 12 Container body opening 13 Screw part 14 O-ring 15 Filter Holding Member 16 Radial Rib 17 Locking Protrusion 18 Filter 19 O-Ring 20 Collar 21 Peripheral Rib 22 Mounting Part 23 Screw Part 24 Mounting Part Collar 25 Mounting Part 26 Mounting Part Screw Part 27 Mounting Part Opening Part 30 retainer 31 seal gasket a 1 , a 2 through hole W substrate
フロントページの続き Ｆターム(参考） 3E067 AA12 AB41 AC03 BA01A BC07A EA18 FA01 FC01 GA19 GB05 GD01 3E096 AA06 BA15 BB03 CA02 CB03 DA26 DA30 DB01 DC02 EA02Y FA01 GA03 5F031 CA02 CA05 CA07 DA08 EA02 EA11 EA14 EA19 FA01 FA02 FA03 FA04 FA07 NA02 NA04 NA15 NA16 PA26 Continued front page F-term (reference) 3E067 AA12 AB41 AC03 BA01A BC07A EA18 FA01 FC01 GA19 GB05 GD01 3E096 AA06 BA15 BB03 CA02 CB03 DA26 DA30 DB01 DC02 EA02Y FA01 GA03 5F031 CA02 CA05 CA07 DA08 EA02 EA11 EA14 EA19 FA01 FA02 FA03 FA04 FA07 NA02 NA04 NA15 NA16 PA26
Claims (4)
する複数の貫通孔を利用して容器内部の気体を置換でき
る精密基板収納容器において、前記貫通孔の少なくとも
一箇所に、容器本体内に収納された精密基板の両面に気
流を吹き付ける吹出孔を備えたノズル部材を取り付け、
前記残りの貫通孔を排気孔としてなることを特徴とする
精密基板収納容器。1. A precision substrate storage container comprising a container body and a lid, which is capable of substituting a gas inside the container by utilizing a plurality of through holes communicating with the inside and outside of the container body, wherein the container body is provided in at least one of the through holes. Attach the nozzle member with the blowout holes to blow the air flow on both sides of the precision substrate stored inside,
A precision substrate storage container, wherein the remaining through-holes are exhaust holes.
に、それぞれフィルタを設けてなる請求項１に記載の精
密基板収納容器。2. The precision substrate storage container according to claim 1, wherein a filter is provided in each of the inside of the nozzle member and the exhaust hole.
体に設けられ、前記ノズル部材が取り付けられる貫通孔
が、前記容器本体に収納した精密基板を挟んで蓋体と対
向する奥側の容器本体に設けられ、かつ前記各貫通孔が
精密基板の容器本体底面への投影部分以外の容器本体に
設けられてなる請求項１または２に記載の精密基板収納
容器。3. A through hole serving as the exhaust hole is provided in a lid-side container body, and a through hole to which the nozzle member is attached faces the lid body with a precision substrate housed in the container body interposed therebetween. 3. The precision substrate storage container according to claim 1, wherein the precision substrate storage container is provided in the container body, and the through holes are provided in a container body other than a portion where the precision substrate is projected onto the bottom surface of the container body.
られ、かつ容器本体の開口部と対向する奥側に排気孔が
設けられてなる請求項１または請求項２に記載の精密基
板収納容器。4. The precision substrate storage container according to claim 1 or 2, wherein the nozzle member is attached to the lid, and an exhaust hole is provided on the back side facing the opening of the container body. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001366763A JP3960787B2 (en) | 2001-11-30 | 2001-11-30 | Precision substrate storage container |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001366763A JP3960787B2 (en) | 2001-11-30 | 2001-11-30 | Precision substrate storage container |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003168728A true JP2003168728A (en) | 2003-06-13 |
| JP3960787B2 JP3960787B2 (en) | 2007-08-15 |
Family
ID=19176615
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001366763A Expired - Lifetime JP3960787B2 (en) | 2001-11-30 | 2001-11-30 | Precision substrate storage container |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3960787B2 (en) |
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