JP2003167082A - Stage device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a stage apparatus having a driving device for moving a first table on which a moved body is mounted in Z-direction (vertical direction), capable of performing high-speed and high-accuracy positioning processing. <P>SOLUTION: This stage apparatus includes a work table 33 for mounting a wafer W, a voice coil motor 45 for moving the work table 33 in the Z- direction, an X-table 40 loaded with the voice coil motor 45, an X-Y direction driving device 35 for moving the X-table in the X-Y directions, a shock absorber 50A disposed between the work table 33 and the X-table 40, and a shock absorber 50B disposed between the voice coil motor 45 and the X-table 40. The force generated by the voice coil motor 45 is inhibited from being applied to the X-table 40 by the shock absorbing operation of the shock absorbers 50A, 50B. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a stage device, and more particularly to a stage device having a drive device for moving a first table having a movable body mounted thereon in a Z direction (vertical direction).

[0002]

2. Description of the Related Art For example, semiconductor substrates, liquid crystal devices, magnetic
In a stage device for the purpose of inspecting an optical storage device, in addition to an XY direction drive device that moves a table on which an object to be inspected is mounted in the horizontal direction (XY directions), a Z device that moves the table in the vertical direction (Z direction). It has a directional drive.
This is because an image pickup device is generally used for inspecting a semiconductor device or the like, and the focus of this image pickup device needs to be focused on the inspection surface of the semiconductor substrate or the like.

Taking the case of inspecting a semiconductor substrate (wafer) as an example, a large number of thin film formations are laminated on the surface of the wafer as circuits are formed, and fine irregularities are thereby formed. In order to focus the image pickup device on the surface of the unevenness, it is necessary to drive the table with a frequency of, for example, 500 Hz to 2 KHz by the Z-direction driving device.

FIG. 9 shows a conventional stage device 1A of this type. The stage device 1A is roughly composed of an XY direction driving device 5 and a Z direction driving device 6. The XY direction drive device 5 is arranged on the surface plate 7 and has an X table 10 and a Y table 11.

The X table 10 is a Z direction air bearing 1.
2 is supported by the surface plate 7 in a floating state,
The X-direction linear motor 13 is configured to move in the directions of arrows X1 and X2 in the drawing. Further, the Y table 11 is supported by the X direction air bearing 14 in a state of being levitated with respect to the X table 10, and is configured to move in the Y1 and Y2 directions in the figure by a Y direction linear motor (not shown).

On the other hand, the Z-direction driving device 6 is arranged on the XY-direction driving device 5 (specifically, on the X table 10), and roughly, the work table 3, the voice coil motor 15, the cylinder mechanism 16 and the like. It is composed by. The work table 3 is a table on which an object to be inspected (for example, a wafer) is mounted. The work table 3 focuses the image pickup device on the inspection object at the time of inspection,
The voice coil motor 15 is configured to enable high-speed fine movement operation. Further, the work table 3 has a long stroke operation (coarse movement) when the inspection object is attached or detached.
Therefore, the Z-direction drive device 6 is provided with a cylinder mechanism 16 in addition to the voice coil motor 15 described above.

The cylinder mechanism 16 is composed of a cylinder portion 17 arranged on the X table 10 and a piston portion 18 arranged on the work table 3. The work table 3 is moved in the Z1 and Z2 directions by supplying or exhausting air from the air introduction pipe 19.

[0008]

However, the work table 3 is moved at high speed by the stage device 1A described above.
When driven in the 1 and Z2 directions, a reaction force is generated on the X table 10. Conventionally, since the voice coil motor 15 is directly arranged between the work table 3 and the X table 10, this reaction force is directly applied from the voice coil motor 15 to the X table 10.
Further, the X table 10 is supported on the surface plate 7 by the Z direction air bearing 12, but the support rigidity is limited.

Therefore, in the conventional stage apparatus 1A, the reaction force generated by driving the voice coil motor 15 is applied to the X table 1
0, and this reaction force is applied to the Z direction air bearing 1
The X table 10 vibrates because it cannot be completely absorbed at 2. Further, since the Z-direction driving device 6 is mounted on the X table 10 as described above, when the vibration of the X table 10 is applied to the work table 3, the work table 3 also vibrates due to this vibration, Work table 3 as a result
However, there is a problem that the positioning accuracy of is deteriorated.

FIGS. 11 and 12 are diagrams showing conventional problems. In FIG. 11, the work table 3 is moved to the reference position (0
The simulation result of the operation of the stage device 1A when the positioning operation is performed at a position 1 μm away from the (μm position) is shown. FIG. 12 is an enlarged view showing an error from the positioning target. The solid line in the drawing indicates the position of the work table 3, and the broken line indicates the position of the X table 10. In each figure, the vertical axis represents the distance from the X table 10 (unit: μm), and the horizontal axis represents time (unit: msec).

When the work table 3 is positioned with respect to the X table 10 as described above, relative positioning is performed quickly (which is performed within about 2 msec in time), but thereafter the work table 3 is driven. The reaction force causes the X table 10 to vibrate as indicated by the broken line in the figure, and the vibration of the X table 10 causes the work table 3 to vibrate. This is also clear from the fact that the vibration of the work table 3 and the vibration of the X table 10 are synchronized, as shown in FIG. As described above, in the conventional stage apparatus 1A, when the work table 3 is positioned at a predetermined position, vibration occurs, so that the positioning accuracy deteriorates. Further, there is a problem in that it is necessary to wait until the vibration is stopped in order to perform positioning accuracy, and high-speed positioning processing cannot be performed.

In the stage apparatus 1A described above, the reaction force of the voice coil motor 15 is transmitted to the X table 10 to lower the positioning accuracy and the responsiveness, so that the stage apparatus 1B as shown in FIG. Invented. In order to prevent the reaction force of the voice coil motor 15 from being transmitted to the X table 10, the stage device 1B is provided with an extension leg portion 20 extending in the lateral direction on the work table 3 and is fixed to the extension leg portion 20. The voice coil motor 15 is arranged between the board 7 and the panel 7.
An air bearing 21 is provided between the surface plate 7 and the voice coil motor 15.

However, in the X table 10B, it is difficult to transmit the generated force because the work table 3 and the surface plate 7 are separated by the extension leg portion 20. Specifically, there is a trade-off between the weight and rigidity of the extension leg portion 20, which hinders high-speed operation. Furthermore,
Since it is necessary to provide the extended leg portion 20 that extends wider than the work table 3 and the air bearing 21 for guiding the voice coil motor 15 and the like, the stage device 1B becomes large.

The present invention has been made in view of the above points, and an object of the present invention is to provide a stage device capable of performing high-speed and highly accurate positioning processing while reducing the size of the device.

[0015]

In order to solve the above problems, the present invention is characterized by taking the following means.

According to a first aspect of the present invention, there is provided a stage device in which a movable table is mounted on a first table, a Z-direction driving device for moving the first table in the Z direction, and the Z table.
A second table on which a direction drive device is mounted; an XY direction drive device that moves the second table in an XY direction orthogonal to the Z direction; at least the Z direction drive device and the second Of the first table and the second table, and the force generated by the Z-direction drive device acts on the second table. The present invention is characterized in that a shock absorber is provided to prevent this.

According to the above invention, the Z-direction drive device and the second drive device are provided.
A shock absorber is provided between the first table and the second table, or both, and the force generated by the Z-direction drive device by the shock absorber acts on the second table. Since it is configured to suppress, it is possible to prevent the second table from vibrating and displacing by the Z-direction drive device. Therefore, the vibration and displacement of the second table causes the first
The table is not vibrated / displaced, so that the Z-direction drive device can drive the first table with high speed and high accuracy.

According to a second aspect of the present invention, in the stage device according to the first aspect, the shock absorber is composed of an elastic member and a damping mechanism.

According to the above invention, since the shock absorber is composed of an elastic member such as a spring and a damping mechanism such as a damper, the shock absorber can be made compact and low in cost.

According to a third aspect of the invention, in the stage apparatus according to the second aspect, a first elastic member and a first damping mechanism are provided between the first table and the second table. A first damping mechanism having a second damping mechanism having a second elastic member and a second damping mechanism is provided between the Z-direction drive device and the second table, and
The mass of the first table is m ₁ , the mass of the second damping mechanism is m ₂ , the elastic constant of the first elastic member is k ₁ ,
The elasticity of the second elastic member is k ₂ , the damping constant of the first damping mechanism is d ₁ , and the damping constant of the second damping mechanism is d ₁ .
_When it is set to ₂ , it is characterized in that the following formula is satisfied.

[0021]

[Equation 2] According to the above invention, the damping constant d ₂ of the second damping mechanism and the elasticity k ₂ of the second elastic member are set as in the above equation, thereby reliably suppressing the vibration and displacement of the first table. You can

According to a fourth aspect of the present invention, in the stage device according to any one of the first to third aspects, the Z-direction drive device includes a cylinder mechanism for coarse movement and a voice coil motor for fine movement. It is characterized by being constituted by and.

According to the above invention, when the first table is moved in the Z direction by using the Z-direction drive device, when it is desired to move the first table largely, a coarse movement cylinder mechanism suitable for this is provided. If a fine movement of the first table is desired, a voice coil motor for fine movement suitable for this can be used. Therefore, the movement of the first table can be performed with high responsiveness and high accuracy.

According to a fifth aspect of the present invention, in the stage apparatus according to the fourth aspect, a plurality of the shock absorbers are provided, and one of the shock absorbers is provided integrally with the cylinder mechanism, and another shock absorber is provided. A device is provided between the voice coil motor and the second table.

According to the above invention, since the shock absorber and the cylinder mechanism are integrated, the size of the stage device can be reduced.

According to a sixth aspect of the present invention, in the stage apparatus according to any one of the first to fourth aspects, the XY direction driving device is a linear motor. is there.

According to the above invention, since the XY driving device is a linear motor, the second stage can be moved at high speed and with high accuracy, and the non-contact driving improves the cleanliness and realizes maintenance-free operation. can do.

[0028]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, embodiments of the present invention will be described with reference to the drawings.

1 and 2 show a stage device 30A which is an embodiment of the present invention. This stage device 3
Reference numeral 0A is a stage device for inspecting an object to be inspected (semiconductor substrate, liquid crystal device, magnetic / optical storage device, etc.). Therefore, the inspection camera 3 is provided above the stage device 30A.
9 (indicated by an alternate long and short dash line) is provided.

The inspection camera 39 includes a fixed frame 3 arranged on the surface plate 37 so as to straddle the stage device 30A.
8 (indicated by a chain line). The stage device 30A moves the mounted inspected object with respect to the fixed inspection camera 39 in the vertical direction (arrows Z1 and Z2 directions in the drawing), so that the inspected object is focused on the inspection camera 39. To move. In the following explanation,
An example in which the wafer W is used as the inspection object will be described.

The stage device 30A is roughly composed of an XY direction drive device 35, a Z direction drive device 36A, and shock absorbers 50A and 50B. The XY direction drive device 35 is disposed on a surface plate 37. The XY direction drive device 35 is configured to combine an X table 40 and a Y table 41.

The X-table 40 is supported by the Z-direction air bearing 42 so as to float above the surface plate 37, and is guided to move with respect to the Y-table 41 by the air bearing 44. . This X-table 40 is moved by an X-direction linear motor 43 so that the arrow X
It is configured to move in the X1 and X2 directions.

Further, the Y table 41 is constructed so that its movement is guided by a guide rail (not shown). The Y table 41 is configured to move in the directions of arrows Y1 and Y2 in the drawing by a Y direction linear motor (not shown).

As described above, in the XY direction drive device 35, X
Since the table 40 and the Y table 41 are driven by a linear motor and the movement is guided by an air bearing, each table 40, 41 can be moved at high speed and with high accuracy, and the non-contact drive improves the cleanliness. And maintenance-free can be realized.

On the other hand, the Z-direction driving device 36 is arranged on the XY-direction driving device 35 (specifically, on the X table 40), and roughly, the work table 33, the voice coil motor 45, the cylinder mechanism 46, etc. It is composed by. The work table 33 is for mounting the wafer W, and therefore, the work table 33 is provided with a chuck (vacuum chuck, electrostatic chuck, etc.) for fixing the wafer W. The work table 33 is finely moved at a high speed by the voice coil motor 45 during inspection. And
Thereby, the inspection camera 39 is configured to focus on a predetermined image pickup position of the wafer W.

At this time, since the image pickup area of the inspection camera 39 is smaller than the area of the wafer W, the wafer W is inspected with respect to the inspection camera 39 so that the inspection camera 39 can inspect (image) the entire surface of the wafer W. To be scanned. The scanning of the wafer W with respect to the inspection camera 39 is performed by the XY direction driving device 35 described above.

The voice coil motor 45 has a coil 45a.
And a magnet 45b. A plurality of voice coil motors 45 are arranged at the outer peripheral position of the cylinder mechanism 46.

The coil 45a constituting the voice coil motor 45 is arranged so as to hang down on the work table 33. The magnet 45b is composed of a pair of permanent magnets facing each other. The coil 45a is arranged between the pair of magnets 45b. Therefore, when a current is applied to the coil 45a to excite it, the work table 33 moves in the directions of arrows Z1 and Z2 according to the direction of the current. To do.

On the other hand, the work table 33 is required to have a long stroke operation (coarse movement) when the wafer W is loaded and unloaded. Therefore, in addition to the voice coil motor 45 described above, the Z-direction drive device 36 includes the cylinder mechanism 4 for coarse movement.
6 is provided.

The cylinder mechanism 46 is composed of a cylinder portion 47 arranged on the X table 40 and a piston portion 48 arranged on the work table 33. And
By supplying or exhausting air from the air introduction pipe 49, the work table 33 is moved in the directions of arrows Z1 and Z2 in the drawing.

In this way, the work table 33 is set to Z1,
When the work table 33 is moved in the Z2 direction, a coarse movement cylinder mechanism 46 suitable for the work table 33 is used, and a fine movement of the work table 33 is used for the fine movement. Voice coil motor 4
By using No. 5, the work table 33 (that is, the wafer W) can be moved with high responsiveness and high accuracy.

Next, the shock absorbers 50A and 50B will be described. The shock absorbers 50A and 50B have the function of attenuating the reaction force applied to the X table 40 by driving the voice coil motor 45, as will be described later. The shock absorbers 50A and 50 have a compact structure including spring members 51A and 51B and dampers 52A and 52B, respectively.

The shock absorber 50A is arranged between the work table 33 and the X table 10. In particular,
The shock absorber 50A is arranged between the piston portion 48 provided on the work table 33 and the X table 10. Further, the shock absorbers 50B are arranged in the same number as the voice coil motors 45, and are arranged between the voice coil motors 45 and the X table 10. As described above, by incorporating the shock absorber 50A into the cylinder mechanism 46, the shock absorber 50A and the cylinder mechanism 46 are integrated, and the stage device 30A can be downsized.

Subsequently, the stage device 3 having the above configuration
Setting of the spring constants k ₁ and k _{2 of} the spring members 51A and 51B and the damping constants d ₁ and d ₂ of the dampers 52A and 52B constituting the shock absorbers 50A and 50B in 0A will be described.

Now, as shown in FIG. 2, the mass of each constituent element of the stage device 30A, the spring constant,
And the damping constant are defined as follows. The mass of the work table 33 including the piston portion 48, the coil 45a, and the like that moves integrally is referred to as a work table mass m ₁ . Mass of all voice coil motors 45 (coil 45
The motor mass is m _{2 (} excluding a). X The mass of the object that moves integrally with the table 40 is X
The table mass is m ₃ . The spring constant of the spring member 51A of the shock absorber 50A is set to the first
The spring constant k ₁ and the damping constant of the damper 52A of the shock absorber 50A are defined as the first damping constant d ₁ . The total spring constant of the entire spring member 51B provided in each of the plurality of shock absorbers 50B is the second spring constant k ₂ , and the total spring constant of the damper 52B provided in each of the plurality of shock absorbers 50B as a whole. The damping constant is the second damping constant d ₂ . The amount of movement of the work table 33 in the direction of arrow Z1 in the figure is + z ₁ . The amount of movement of the voice coil motor 45 in the direction of the arrow Z1 in the figure is + z ₂ . The movement amount of the X table 40 in the arrow Z1 direction in the figure is + z
_Set to ₃ . The force generated by the voice coil motor 45 is f ₁ (generated in both the coil 45a and the magnet 45b).

When the equations of motion of the work table 33 and the voice coil motor 45 are obtained using the above parameters, the following equation is obtained.

[0047]

[Equation 3] Here, assuming that the force applied to the X table 40 is the X table application force F, the X table application force F is obtained by the following equation.

[0048]

[Equation 4] Here, when the above equations (6) and (7) are Laplace-transformed and summarized, the following equation is obtained.

[0049]

[Equation 5] Then, substituting the equations (7) and (8) into the above equation (5) gives the following equation.

[0050]

[Equation 6] Further, when F / f is obtained, the following equation is obtained.

[0051]

[Equation 7] Here, the voice coil motor 1 with respect to the X table 40
In order to prevent the reaction force of No. 5 from being transmitted, the X table application force F may be configured to be zero (F = 0). Therefore, d ₂ and k ₂ are set as in the following equation.

[0052]

[Equation 8] Then, the above equation (10) becomes as follows.

[0053]

[Equation 9] Therefore, the work table mass m1, the motor mass m2, the first spring constant k1, the second spring constant k2, the first damping constant d1, and the second damping so that the expressions (11) and (12) are satisfied. The shock absorber 50 is set by setting the constant d2.
A and 50B can suppress the force generated by the voice coil motor 45 from acting on the X table 40.

Thus, the X table 40 can be prevented from vibrating and displacing by driving the voice coil motor 45. Therefore, the work table 33 can be prevented from vibrating and displacing due to the vibration and displacement of the X table 40. It is possible to drive 33 at high speed and with high accuracy.

3 to 6 are views showing the effect of the stage device 30A which is one embodiment. FIG. 3 shows the stage device 3 when the work table 33 is positioned at a position 1 μm away from the reference position (0 μm position).
FIG. 4 shows a simulation result of 0A operation, and FIG.
FIG. 7 is a diagram showing an enlarged error with respect to a positioning target.

Further, FIG. 5 shows a simulation result of the operation of the stage device 30A when the values of the equations (11) and (12) described above have an error of about 10% during the simulation. Also in this simulation, the work table 33 is set to the reference position (0 μ
The operation of the stage device 30A when the positioning operation is performed at a position 1 μm away from the m position) is shown. Further, FIG. 4 is an enlarged view showing an error from the positioning target.

The solid line (indicated by arrow A) in the figure indicates the position of the work table 33, and the broken line (indicated by arrow B).
Represents the position of the X table 40, and the alternate long and short dash line (indicated by arrow C) represents the position of the voice coil motor. In each figure, the vertical axis is the distance from the X table 40 (unit: μm), and the horizontal axis is time (unit: msec).
Is.

Attention is first directed to FIGS. When positioning the work table 33 with respect to the X table 40,
The voice coil motor 45 is driven. However, even if the voice coil motor 45 is driven, in the stage device 30A according to the present embodiment, the reaction force of the driving force generated by the voice coil motor 45 is attenuated / absorbed by the shock absorbers 50A and 50B and is transferred to the X table 40. Is suppressed.

Therefore, as shown by the arrow B, the X table 4
0 does not vibrate and maintains a stable state. Further, as a result, as shown by an arrow A in FIGS. 3 and 4, the work table 33 is also in a stable state without vibrating. Therefore, the simulation results shown in FIGS. 3 and 4 demonstrate that the stage device 30A according to the present embodiment can position the work table 33 with high accuracy and in a short time.

Further, as shown in FIGS. 5 and 6, even when the values of the equations (11) and (12) have an error of about 10%, the simulation result is as follows. The results are substantially the same as the results shown in FIGS. 3 and 4. That is, as indicated by an arrow C in the drawings, although some vibration is generated in the voice coil motor, the influence on the X table 40 is small, and the X table 40 does not vibrate as indicated by an arrow B in each drawing. Maintain a stable state without. Further, as a result, as shown by an arrow A in FIGS. 5 and 6, the work table 33 is also in a stable state without vibrating. Therefore, according to the simulation results shown in FIGS. 5 and 6, the parameters (d ₁ , d ₂ , k ₁ , k ₂ ) are set so as to satisfy the values of the expressions (11) and (12).
It can be seen that it is not necessary to set to with high precision. According to the simulation result of the present inventor, depending on the required accuracy, even if the value of each parameter (d ₁ , d ₂ , k ₁ , k ₂ ) fluctuates within a range of ± 20%, the work table It was possible to position 33 with high accuracy and in a short time.

Next, a modified example of the above stage device 30A will be described with reference to FIGS. still,
7 and 8, the same components as those shown in FIG. 1 are designated by the same reference numerals and the description thereof will be omitted. Figure 7
Shows a stage device 30B which is a first modification of the stage device 30A. In the stage device 30A, the shock absorber 50A is also provided inside the cylinder mechanism 46. On the other hand, in this embodiment, except for the shock absorber 50A, the shock absorber 50B alone is configured so that the reaction force generated by the voice coil motor 45 is not transmitted to the X table 40.

For example, when the nesting force required for the shock absorber is small due to a small work table mass m1 or the like, it is not always necessary to provide the shock absorber 50A in the cylinder mechanism 46, and thus the stage device 30B can be provided. It is possible to reduce the number of parts and the product cost.

FIG. 8 shows a stage device 30C which is a second modification of the stage device 30A. In the stage device 30A, the shock absorbers 50A and 50B are replaced by spring members 51A and 51B formed of coil springs and dampers 52A and 52B.
B. On the other hand, in the present modification, the shock absorber 50C includes a spring member 51C made of a leaf spring and a damper 52.
In addition to being configured by C, the shock absorber 50D is configured by a spring member 51D made of a leaf spring and a damper 52D.

By thus forming the spring members 51C and 51D by the leaf springs, the flexible directions (elastic deformation directions) of the spring members 51C and 51D, which are leaf springs, are mainly the Z direction, and the X direction and the Y direction. Almost no deformation occurs in the direction. Therefore, unnecessary displacement of the work table 33 in a direction other than the Z direction can be restricted, and the work table 33 can be stably operated.

The present invention described above can be widely applied not only to the manufacturing process of the semiconductor device but also to the fields such as micromachines, optical communication parts for IT, etc. which require fine processing in the future. That is, most of the current micromachine manufacturing technologies use semiconductor manufacturing technologies, and by using the present invention, more accurate inspection can be performed. Further, in the field of laser processing, a stage that moves at ultra-high speed with submicron accuracy is required. In addition, a stage having a high degree of freedom is required to process a complicated shape. Although no conventional stage device satisfies these requirements, the stage device of the present invention can be used as a laser processing stage because it can achieve high accuracy and high speed. Furthermore, the present invention can be applied not only to the above-mentioned fields but also to the field of assembling and inspecting electronic parts such as ultra-precision equipment, ultra-precision measuring equipment, and mounters, or office automation.

Further, in this embodiment, the stage device 30A is used.
The above equations are prepared under the condition that the characteristics of the spring member 51B and the damper 52B of the plurality of shock absorbers 50B (which become the second damping mechanism) are all the same.
It is also possible to make the characteristics of each of the plurality of shock absorbers 50B different. The above equations (11) and (12) in this case are expressed by the following equations.

[0067]

[Equation 10] Here, n is the number of shock absorber 50B that is different properties, d _n is the attenuation constant of the whole of the plurality of shock absorbers 50B, k _n is the elastic constant of the whole of the plurality of shock absorbers 50B .

[0068]

As described above, according to the present invention, various effects described below can be realized.

According to the first aspect of the present invention, the Z-direction drive device can prevent the second table from vibrating / displacement. Therefore, the vibration / displacement of the second table causes the first table to vibrate / displace. Therefore, it becomes possible to drive the first table at high speed and with high accuracy by the Z-direction drive device.

According to the second aspect of the invention, since the shock absorber is composed of an elastic member such as a spring and a damping mechanism such as a damper, the shock absorber can be made compact and low cost. You can

According to the invention of claim 3, the first
Vibration and displacement of the table can be reliably suppressed.

According to the invention described in claim 4, the first
When a large table is to be moved, a cylinder mechanism for coarse movement suitable for this is used, and when a fine table is to be moved, a voice coil motor for fine movement suitable for this is used. It is possible to move the table No. 1 with high responsiveness and high accuracy.

According to the fifth aspect of the invention, since the shock absorber and the cylinder mechanism are integrated, the stage device can be downsized.

According to the invention of claim 6, the second aspect
The stage can be moved at high speed and with high precision, and the cleanliness can be improved and maintenance-free can be realized by the non-contact drive.

[Brief description of drawings]

FIG. 1 is a main part configuration diagram of a stage device according to an embodiment of the present invention.

FIG. 2 is a diagram showing each parameter used in the equation of motion of the stage device shown in FIG.

FIG. 3 is a diagram showing a result of simulation of an operation of a stage device which is an embodiment of the present invention.

FIG. 4 is an enlarged view showing an error from a target value in FIG.

5 shows an error of 1 for the simulation shown in FIG.
It is a figure which shows the simulation result of operation | movement of a stage apparatus when it has 0%.

FIG. 6 is an enlarged view showing an error from a target value in FIG.

7 is a main part configuration diagram of a stage device which is a first modified example of the stage device shown in FIG. 1. FIG.

8 is a main part configuration diagram of a stage device which is a second modified example of the stage device shown in FIG. 1. FIG.

FIG. 9 is a main part configuration diagram of a stage device which is an example of the related art (No. 1).

FIG. 10 is a main part configuration diagram of a stage device which is an example of the related art (No. 2).

FIG. 11 is a diagram showing a result of simulating the operation of the stage device shown in FIG. 9.

FIG. 12 is an enlarged view showing an error from the target value in FIG.

[Explanation of symbols]

30A to 30C stage device 33 Work table 35 XY direction drive device 36A-36C Z direction drive device 40 X table 41 Y table 43 X-direction linear motor 45 voice coil motor 46 cylinder mechanism 47 Cylinder part 48 Piston part 49 Air introduction pipe 50A-50D shock absorber 51A to 51D Spring member 52A-52D damper

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Yoshiyuki Tomita             Sumitomo Heavy Industries, 19 Natsushima-cho, Yokosuka City, Kanagawa Prefecture             Machine Industry Co., Ltd. Yokosuka Factory F term (reference) 2F078 CA08 CB09 CB10 CB12 CC04                       CC07 CC11 CC15                 5F031 CA02 HA13 HA16 HA55 KA06                       KA07 LA02 LA07 LA15 PA30

Claims (6)

[Claims] 1. A first table on which a movable body is mounted, a Z-direction drive device for moving the first table in the Z-direction, a second table on which the Z-direction drive device is mounted, An XY direction driving device for moving a second table in an XY direction orthogonal to the Z direction; and at least between the Z direction driving device and the second table, or the first table. A shock absorber is provided which is disposed on either side of the second table and which suppresses a force generated by the Z-direction drive device from acting on the second table. And stage equipment. 2. The stage device according to claim 1, wherein the shock absorber is composed of an elastic member and a damping mechanism. 3. The stage device according to claim 2, wherein a first damping mechanism having a first elastic member and a first damping mechanism is provided between the first table and the second table. A second damping mechanism having a second elastic member and a second damping mechanism is provided between the Z-direction driving device and the second table, and the mass of the first table is m. ₁ , the mass of the second damping mechanism is m ₂ , the elastic constant of the first elastic member is k ₁ , the elasticity of the second elastic member is k ₂ , and the damping constant of the first damping mechanism is d 2. _{1. When} the damping constant of the second damping mechanism is d ₂ , the stage device is configured to satisfy the following formula. [Equation 1] 4. The stage device according to claim 1, wherein the Z-direction drive device includes a coarse movement cylinder mechanism and a fine movement voice coil motor. And stage equipment. 5. The stage device according to claim 4, wherein a plurality of the shock absorbers are provided, one shock absorber of the shock absorbers is integrally provided with the cylinder mechanism, and another shock absorber is provided with the voice coil motor and the voice coil motor. A stage device provided between the second table and the second table. 6. The stage device according to claim 1, wherein the X-Y direction drive device is a linear motor.