JP2003159650A - ワイヤソー用スラリータンク - Google Patents
ワイヤソー用スラリータンクInfo
- Publication number
- JP2003159650A JP2003159650A JP2001357441A JP2001357441A JP2003159650A JP 2003159650 A JP2003159650 A JP 2003159650A JP 2001357441 A JP2001357441 A JP 2001357441A JP 2001357441 A JP2001357441 A JP 2001357441A JP 2003159650 A JP2003159650 A JP 2003159650A
- Authority
- JP
- Japan
- Prior art keywords
- slurry
- tank
- pump
- main body
- wire saw
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002002 slurry Substances 0.000 title claims abstract description 206
- 238000002347 injection Methods 0.000 claims description 42
- 239000007924 injection Substances 0.000 claims description 42
- 238000003756 stirring Methods 0.000 claims description 37
- 238000005520 cutting process Methods 0.000 claims description 25
- 238000000034 method Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 239000006061 abrasive grain Substances 0.000 description 14
- 238000011084 recovery Methods 0.000 description 13
- 238000001816 cooling Methods 0.000 description 5
- 239000002826 coolant Substances 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 239000010431 corundum Substances 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001357441A JP2003159650A (ja) | 2001-11-22 | 2001-11-22 | ワイヤソー用スラリータンク |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001357441A JP2003159650A (ja) | 2001-11-22 | 2001-11-22 | ワイヤソー用スラリータンク |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003159650A true JP2003159650A (ja) | 2003-06-03 |
| JP2003159650A5 JP2003159650A5 (enExample) | 2005-04-07 |
Family
ID=19168787
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001357441A Pending JP2003159650A (ja) | 2001-11-22 | 2001-11-22 | ワイヤソー用スラリータンク |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2003159650A (enExample) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005262402A (ja) * | 2004-03-19 | 2005-09-29 | Technomate Co Ltd | スラリー冷却装置、スラリー加熱装置、及びスラリー供給装置 |
| JP2006237508A (ja) * | 2005-02-28 | 2006-09-07 | Mitsubishi Chemical Engineering Corp | 研磨液の供給方法 |
| JP2009142986A (ja) * | 2003-10-27 | 2009-07-02 | Mitsubishi Electric Corp | マルチワイヤソー |
| JP2010036330A (ja) * | 2008-08-08 | 2010-02-18 | Nippon Spindle Mfg Co Ltd | 処理液清浄装置 |
| JP2011212781A (ja) * | 2010-03-31 | 2011-10-27 | Toyo Advanced Technologies Co Ltd | ワイヤソー |
| JP2013539923A (ja) * | 2010-10-12 | 2013-10-28 | エルジー シルトロン インコーポレイテッド | 単結晶インゴット切断装置及び単結晶インゴットの切断方法 |
| JP2023008342A (ja) * | 2021-07-05 | 2023-01-19 | 株式会社タカトリ | 加工液タンク、加工装置、ワイヤソー及び研磨装置 |
-
2001
- 2001-11-22 JP JP2001357441A patent/JP2003159650A/ja active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009142986A (ja) * | 2003-10-27 | 2009-07-02 | Mitsubishi Electric Corp | マルチワイヤソー |
| JP2005262402A (ja) * | 2004-03-19 | 2005-09-29 | Technomate Co Ltd | スラリー冷却装置、スラリー加熱装置、及びスラリー供給装置 |
| JP2006237508A (ja) * | 2005-02-28 | 2006-09-07 | Mitsubishi Chemical Engineering Corp | 研磨液の供給方法 |
| JP2010036330A (ja) * | 2008-08-08 | 2010-02-18 | Nippon Spindle Mfg Co Ltd | 処理液清浄装置 |
| JP2011212781A (ja) * | 2010-03-31 | 2011-10-27 | Toyo Advanced Technologies Co Ltd | ワイヤソー |
| JP2013539923A (ja) * | 2010-10-12 | 2013-10-28 | エルジー シルトロン インコーポレイテッド | 単結晶インゴット切断装置及び単結晶インゴットの切断方法 |
| JP2023008342A (ja) * | 2021-07-05 | 2023-01-19 | 株式会社タカトリ | 加工液タンク、加工装置、ワイヤソー及び研磨装置 |
| JP7724522B2 (ja) | 2021-07-05 | 2025-08-18 | 株式会社タカトリ | 加工液タンク、加工装置、ワイヤソー及び研磨装置 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20040506 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20040506 |
|
| A977 | Report on retrieval |
Effective date: 20060526 Free format text: JAPANESE INTERMEDIATE CODE: A971007 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20060715 |
|
| RD02 | Notification of acceptance of power of attorney |
Effective date: 20060715 Free format text: JAPANESE INTERMEDIATE CODE: A7422 |
|
| A131 | Notification of reasons for refusal |
Effective date: 20061114 Free format text: JAPANESE INTERMEDIATE CODE: A131 |
|
| A521 | Written amendment |
Effective date: 20070110 Free format text: JAPANESE INTERMEDIATE CODE: A523 Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20070110 |
|
| A131 | Notification of reasons for refusal |
Effective date: 20070717 Free format text: JAPANESE INTERMEDIATE CODE: A131 |
|
| A02 | Decision of refusal |
Effective date: 20071204 Free format text: JAPANESE INTERMEDIATE CODE: A02 |