JP2003145307A - Physical vapor deposition hard film-coated tool having excellent crater abrasion resistance - Google Patents

Physical vapor deposition hard film-coated tool having excellent crater abrasion resistance

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Publication number
JP2003145307A
JP2003145307A JP2001342096A JP2001342096A JP2003145307A JP 2003145307 A JP2003145307 A JP 2003145307A JP 2001342096 A JP2001342096 A JP 2001342096A JP 2001342096 A JP2001342096 A JP 2001342096A JP 2003145307 A JP2003145307 A JP 2003145307A
Authority
JP
Japan
Prior art keywords
hard film
cutting
vapor deposition
physical vapor
coated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001342096A
Other languages
Japanese (ja)
Other versions
JP3679046B2 (en
Inventor
Kazuyuki Kubota
和幸 久保田
Nobuhiko Shima
順彦 島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Moldino Tool Engineering Ltd
Original Assignee
Hitachi Tool Engineering Ltd
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Filing date
Publication date
Application filed by Hitachi Tool Engineering Ltd filed Critical Hitachi Tool Engineering Ltd
Priority to JP2001342096A priority Critical patent/JP3679046B2/en
Publication of JP2003145307A publication Critical patent/JP2003145307A/en
Application granted granted Critical
Publication of JP3679046B2 publication Critical patent/JP3679046B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a multi-layer hard film-coated tool having excellent crater abrasion resistance comprising a composite of hard film having excellent adhesion performance, and a hard layer having lubricity, restricting chemical reaction with a material to be cut, and having excellent crater abrasion resistance to cope with a dry-type and high-speed cutting work. SOLUTION: In this multi-layer hard film-coated tool coated with multi-layers of hard film on the surface of a substrate, more than one layer of each of hard film having excellent adhesion performance and Ti hard film comprising fine boron nitride grains dispersed in the film, having high hardness and lubricity, restricting chemical reaction with a workpiece, and having excellent crater abrasion resistance are coated.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明が属する技術分野】本願発明は、金属材料等の切
削加工に使用される硬質皮膜被覆工具において、特に高
速切削、乾式切削に適用される耐クレーター摩耗性に優
れる物理蒸着硬質皮膜被覆工具に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hard film coated tool used for cutting metal materials and the like, and particularly to a physical vapor deposition hard film coated tool having excellent crater wear resistance applied to high speed cutting and dry cutting. It is a thing.

【0002】[0002]

【従来の技術】金属加工の高能率化を目的とした調質鋼
の切削においては、特開昭62−56565号公報、特
開平2−194159号公報に代表されるTiAlN皮
膜が開発され切削工具に適用されている。TiAlN皮
膜は、TiN、TiCNに比べ耐酸化性が優れるため、
刃先が高温に達する調質鋼の切削においては、切削工具
の性能を著しく向上させるものである。
2. Description of the Related Art In cutting heat-treated steel for the purpose of improving the efficiency of metal working, a TiAlN coating represented by JP-A-62-56565 and JP-A-2-194159 has been developed and a cutting tool has been developed. Has been applied to. The TiAlN film has better oxidation resistance than TiN and TiCN.
In the cutting of heat-treated steel whose cutting edge reaches a high temperature, the performance of the cutting tool is remarkably improved.

【0003】しかしながら、近年では更なる加工の高能
率、高精度化の要求を満たす為、切削速度の高速化に加
え、環境問題及び加工コスト低減の観点から乾式での切
削加工が重要視されている。こうような切削環境下にお
いては、切削工具表面に被覆される耐摩耗皮膜と切削さ
れる材料との間に化学反応が発生し、工具寿命が逃げ面
のこすり摩耗だけではなく、すくい面のクレーター摩耗
により強く支配される傾向が強くなってきた。従来まで
の前記TiN、TiCN及びTiAlN皮膜はこのよう
な苛酷な切削環境下においては、切削温度の上昇に伴い
被加工物との化学反応に起因したクレーター摩耗の増加
により、十分な切削寿命を得られないのが実状である。
特に比較的連続切削である旋盤加工や高速高送りのフラ
イス加工においてPVD被覆を適用する場合は、このク
レーター摩耗を抑制することが、極めて重要なことであ
る。
However, in recent years, in order to meet the demands for higher efficiency and higher accuracy of machining, dry machining is regarded as important in view of environmental problems and machining cost reduction in addition to high cutting speed. There is. Under such a cutting environment, a chemical reaction occurs between the wear-resistant coating on the surface of the cutting tool and the material to be cut, and the tool life is not limited to the scrape wear of the flank but also the crater of the rake face. The tendency to be strongly controlled by wear has become stronger. Under the severe cutting environment, the TiN, TiCN, and TiAlN coatings up to now have a sufficient cutting life due to the increase in crater wear caused by the chemical reaction with the work piece as the cutting temperature rises. The reality is that it cannot be done.
In particular, when applying a PVD coating in lathe processing which is relatively continuous cutting and milling processing at high speed and high feed, it is extremely important to suppress this crater wear.

【0004】このような問題を解決する為に、特表平1
1−502775号公報に示される二硫化モリブデン
や、特開平7−164211号公報に示される炭化タン
グステン及びダイヤモンドライクカーボンからなる潤滑
性皮膜を耐摩耗性を有する硬質皮膜を最表面に積層し、
切削温度上昇抑制に基づく、皮膜と被加工物間の拡散現
象を抑制しようとする切削工具が開発されているが、い
ずれも下地硬質皮膜との密着性が悪い上に皮膜そのもの
が非常に脆い為、これら潤滑皮膜は切削時に容易に剥離
または破壊などを発生し、上記切削環境下においては何
ら効果を発揮するには至っていない。また、特開平11
−156992号公報に示される、Cr系潤滑皮膜を被
覆した工具が提案されているが、Cr系皮膜は硬度その
ものが低く耐摩耗性が極めて悪く、耐クレーター摩耗性
を改善するには至っていない。
In order to solve such a problem, special table 1
Molybdenum disulfide shown in 1-502775, and a lubricating coating made of tungsten carbide and diamond-like carbon shown in JP-A 7-164211, a hard coating having wear resistance is laminated on the outermost surface,
Cutting tools have been developed that try to suppress the diffusion phenomenon between the coating and the work piece based on the suppression of the cutting temperature rise, but in both cases the adhesion to the underlying hard coating is poor and the coating itself is very brittle. However, these lubricating coatings easily peel or break during cutting, and have no effect in the above cutting environment. In addition, JP-A-11
A tool coated with a Cr-based lubricating film, which is disclosed in Japanese Patent No. 156992, has been proposed, but the Cr-based film has low hardness itself and extremely poor wear resistance, and has not yet improved crater wear resistance.

【0005】[0005]

【発明が解決しようとする課題】本発明はこうした事情
に鑑み、切削加工の乾式化、高速化に対応可能な、被削
材との化学反応が少なく、しかも潤滑性に優れ、被削材
と皮膜との拡散を抑制する耐クレーター摩耗性が著しく
改善されたTiを主成分とする層[A]と、密着性、凝
着性に優れる層[B]とを複合化し、耐クレーター摩耗
性に優れる物理蒸着硬質皮膜被覆工具を提供することを
課題とする。
In view of these circumstances, the present invention is capable of coping with dry and high-speed cutting, has less chemical reaction with the work, and has excellent lubricity and A layer [A] containing Ti as a main component, which has significantly improved crater wear resistance that suppresses diffusion with the coating, and a layer [B] having excellent adhesion and adhesion are combined to improve crater wear resistance. An object is to provide an excellent physical vapor deposition hard coating tool.

【0006】[0006]

【課題を解決するための手段】本発明者らは、Tiを主
成分とする硬質層を鋭意検討した結果、層中にBN相を
介在させることにより、Tiを主成分とする硬質層の硬
度を上昇せしめるとともに、BN相が有する潤滑性によ
りTiを主成分とする硬質層の潤滑性を改善し、結果耐
クレーター摩耗性を著しく改善させる事に成功した。そ
の結果、乾式、高速切削加工において拡散現象が少な
く、耐クレーター摩耗性に優れ切削工具としての寿命が
極めて良好となることを確認し本発明に到達した。
Means for Solving the Problems As a result of intensive studies of the hard layer containing Ti as a main component, the inventors have found that the hardness of the hard layer containing Ti as a main component can be improved by interposing a BN phase in the layer. And the lubricity of the BN phase improves the lubricity of the hard layer containing Ti as a main component, and as a result, the crater wear resistance was significantly improved. As a result, it has been confirmed that the diffusion phenomenon is small in the dry type and high speed cutting process, the crater wear resistance is excellent, and the life as a cutting tool is extremely good, and the present invention has been achieved.

【0007】本発明者らはTiN系皮膜を例に、種々の
添加成分の効果を鋭意研究した結果、硼素の添加と被覆
条件の最適化により、TiNの耐クレーター摩耗性を著
しく改善できる知見を得るに至った。原因を調査した結
果、TiN皮膜内部に硼素の窒化物が極めて微細に分散
しており、TiN皮膜の硬度がビッカースで2200か
ら2800に著しく上昇していること及び本来潤滑性が
優れる硼素の窒化物の効果によりTiNの摩擦係数が
0.8から0.4に激減していることが確認された。す
なわち、セラミック系の硬質皮膜を分散強化せしめると
同時に分散相のもつ潤滑性をも硬質皮膜に付与すること
が可能であるという驚くべき事実とその方法を発見し
た。
As a result of intensive studies on the effects of various additive components using the TiN-based coating as an example, the present inventors have found that the crater wear resistance of TiN can be remarkably improved by adding boron and optimizing the coating conditions. I got it. As a result of investigating the cause, boron nitride is extremely finely dispersed inside the TiN film, the hardness of the TiN film is significantly increased from 2200 to 2800 by Vickers, and the boron nitride is originally excellent in lubricity. It was confirmed that the friction coefficient of TiN was drastically reduced from 0.8 to 0.4 by the effect of. That is, the surprising fact that it is possible to disperse and strengthen a ceramic hard coating and at the same time impart the lubricity of the dispersed phase to the hard coating, and the method thereof have been discovered.

【0008】図1、図2は、TiBターゲットを用い基
体バイアス300V、反応圧0.5PaでTiBN皮膜
を被覆した時の皮膜のESCA解析結果である。図1の
TiとNとの結合エネルギ回折ピークと、図2のBとN
との結合エネルギー回折ピークが確認され、皮膜はTi
N相とBN相から構成されることが確認された。この場
合、BN相はTEM観察結果によれば数ナノから数十ナ
ノの大きさを有するナノ結晶であり、格子歪の発生に起
因するTiN層の大幅な硬度上昇が確認された。耐クレ
ータ摩耗性はTiNに比べ著しく改善される結果であっ
た。これはBN相自体が優れた潤滑性を有していること
に起因すると考えられる。また硼素添加においては被覆
条件においてイオンエネルギーが小さい場合にはナノB
N相の出現は認められなかった。従って、ナノ結晶を介
在させ、高硬度化を達成するためには、被覆条件の最適
化も重要であるといえる。
FIGS. 1 and 2 show ESCA analysis results of a TiBN film coated with a TiB target at a substrate bias of 300 V and a reaction pressure of 0.5 Pa. The binding energy diffraction peaks of Ti and N of FIG. 1 and B and N of FIG.
The binding energy diffraction peak with is confirmed, and the film is Ti
It was confirmed that it consisted of N phase and BN phase. In this case, the BN phase was a nanocrystal having a size of several nanometers to several tens of nanometers according to the TEM observation result, and it was confirmed that the hardness of the TiN layer was significantly increased due to the occurrence of lattice strain. The result was that the crater wear resistance was significantly improved compared to TiN. It is considered that this is because the BN phase itself has excellent lubricity. When boron is added and the ion energy is small under the coating conditions, nano-B
The appearance of N phase was not observed. Therefore, it can be said that the optimization of coating conditions is also important in order to achieve high hardness by interposing nanocrystals.

【0009】しかしながら、上記微細結晶を介在させた
TiN層単層では所望の結果を得ることができない場合
がある。その理由は微細BN結晶の介在に伴い、皮膜の
残留圧縮応力が増大する傾向にあり、上記微細粒子を分
散したTiN層単層では皮膜の剥離が発生し、工具寿命
を不安定にしてしまう場合がある。従って、この現象を
抑制するために、密着性の優れる硬質皮膜との多層構造
等の併用が必要不可欠である。
However, there are cases where the desired results cannot be obtained with the TiN layer single layer in which the fine crystals are interposed. The reason is that the residual compressive stress of the coating tends to increase with the inclusion of fine BN crystals, and in the TiN layer single layer in which the fine particles are dispersed, peeling of the coating occurs and the tool life becomes unstable. There is. Therefore, in order to suppress this phenomenon, it is indispensable to use a hard coating having excellent adhesion in combination with a multilayer structure or the like.

【0010】以上のごとく、耐クレーター摩耗性を大幅
に改善した結果、本発明による多層硬質皮膜被覆工具
は、高速、高送りミーリング切削加工に使用される工具
に対しても効果的であるが、更に従来アルミナ皮膜を有
するCVD被覆工具が使用されていた旋盤加工分野へも
適用が可能となった。旋削加工は比較的連続切削である
ため特にクレーター摩耗に工具寿命が支配される場合が
多い。本発明においても皮膜の膜厚が薄いとCVD皮膜
に耐クレーター摩耗性が劣る結果になるが、クレーター
摩耗が発生するスクイ面において、3ミクロン以上被覆
することにより、CVD皮膜に匹敵する耐クレーター摩
耗性を持たせることが可能であることを確認した。更
に、工具の耐欠損性においては、本発明はPVD法によ
るものであり、皮膜には圧縮の応力が残留し、クラック
の発生が少なく、皮膜に引っ張りの残留応力が存在する
CVD被覆工具に比べ10倍以上の圧倒的に優れる耐欠
損性を有する結果となった。皮膜の膜厚は15μを越え
ると剥離が発生する場合もあり、皮膜の厚さは3μから
15μであることがより好ましいといえる。
As described above, as a result of greatly improving the crater wear resistance, the multilayer hard coating tool according to the present invention is effective for tools used for high speed, high feed milling cutting, Furthermore, it can be applied to the lathe processing field where the CVD coated tool having the alumina coating has been used conventionally. Since turning is relatively continuous cutting, tool life is often dominated by crater wear. Also in the present invention, if the film thickness is thin, the crater wear resistance will be inferior to the CVD film, but by coating the squeeze surface where crater wear occurs at 3 μm or more, crater wear resistance comparable to that of the CVD film It was confirmed that it is possible to have sex. Further, in terms of the fracture resistance of the tool, the present invention is based on the PVD method. Compared with a CVD-coated tool in which compressive stress remains in the coating, cracks are less likely to occur, and residual tensile stress is present in the coating. As a result, the chipping resistance was over 10 times overwhelmingly excellent. When the film thickness exceeds 15 μ, peeling may occur, and it can be said that the film thickness is more preferably 3 μ to 15 μ.

【0011】本発明の硬質皮膜被覆工具は、その被覆方
法については、特に限定されるものではないが、被覆母
材への熱影響、工具の疲労強度、皮膜の密着性等を考慮
した場合、アーク放電方式イオンプレーティング物理蒸
着法であることが望ましい。
The hard coating tool of the present invention is not particularly limited in its coating method, but in consideration of the heat effect on the coating base material, the fatigue strength of the tool, the adhesion of the coating, etc., The arc discharge type ion plating physical vapor deposition method is desirable.

【0012】(実施例1)以下本発明を実施例に基づい
て説明する。アークイオンプレーティング装置を用い、
金属成分の蒸発源である各種合金製ターゲット、ならび
に反応ガスである窒素ガス、酸素ガス、メタンガスから
目的の皮膜が得られるものを選択し、密着性付与皮膜に
おいては、各種組成の金属ターゲットを用い、被覆基体
温度400℃、反応ガス圧力1.0Pa、基体印可バイ
アス電圧150Vの条件下にて、被覆基体であるミーリ
ング用超硬インサートに表1に示す各皮膜を被覆した工
具を作成した。比較例においては各皮膜も同一条件で被
覆した。本発明例におけるTi系硬質層の被覆条件は同
一温度において、バイアス電位300V反応ガス圧力
0.5Paとし、BN結合を有する相を介在させた。硼
素はTiターゲットに必要量添加することにより皮膜に
含有させた。インサートに使用した超硬合金はJIS−
P40グレード超硬合金である
(Embodiment 1) The present invention will be described based on an embodiment. Using an arc ion plating device,
Targets made of various alloys that are evaporation sources of metal components, and those that obtain the target film from the reaction gases nitrogen gas, oxygen gas, and methane gas are selected. Under the conditions of a coated substrate temperature of 400 ° C., a reaction gas pressure of 1.0 Pa, and a substrate applying bias voltage of 150 V, a tool was prepared by coating the respective coatings shown in Table 1 on a carbide insert for milling as a coated substrate. In the comparative example, each film was also coated under the same conditions. In the present invention, the Ti-based hard layer was coated under the same temperature at a bias potential of 300 V and a reaction gas pressure of 0.5 Pa with a phase having a BN bond interposed. Boron was contained in the film by adding a required amount of Ti to the target. The cemented carbide used for the insert is JIS-
P40 grade cemented carbide

【0013】[0013]

【表1】 [Table 1]

【0014】得られた硬質皮膜被覆インサートを用い切
削試験を行った。工具寿命は本切削条件下では皮膜に剥
離が発生しない場合は、クレーター摩耗が寿命を支配す
るため、クレーター摩耗により工具が切削不能となった
時の切削時間を寿命とした。切削諸元を次に示す。一刃
あたりの送りが1mmを越えるようなフライス加工では
切削温度が局部的に上昇し、クレーター摩耗が発生する
傾向にある。
A cutting test was carried out using the obtained hard coating-coated insert. The tool life is defined as the cutting time when the tool becomes uncutable due to crater wear, because if the coating does not peel under this cutting condition, crater wear dominates the life. The cutting specifications are shown below. In milling where the feed per blade exceeds 1 mm, the cutting temperature locally rises and crater wear tends to occur.

【0015】インサート切削条件は、工具形状RDMW
1604MOTNである丸駒インサート、巾100mm
×長さ250mmの面取り加工、被削材はφ10mmの
ドリル穴を20mm間隔に設けたSKD61(硬さHR
C45)、切り込み1.0mm、切削速度200m/m
in、送り1.5mm/刃、乾式切削とした。このよう
な被削材の切削は特に強断続切削であり、皮膜は剥離し
易い傾向を有する。欠損に至る切削長を表1に併記す
る。尚、表1に記載の膜厚はスクイ面の膜厚を示す。
The insert cutting conditions are the tool shape RDMW.
Round piece insert 1604 MOTN, width 100mm
Chamfering with a length of 250 mm, the work material is SKD61 (hardness HR) in which φ10 mm drill holes are provided at 20 mm intervals.
C45), notch 1.0 mm, cutting speed 200 m / m
in, feed 1.5 mm / blade, dry cutting. The cutting of such a work material is a particularly strong interrupted cutting, and the coating tends to peel off. Table 1 also shows the cutting length leading to the chipping. The film thickness shown in Table 1 shows the film thickness on the squeeze surface.

【0016】表1より明らかなように、本発明例は著し
い寿命改善が認められる。これらは比較例が全て、クレ
ーター摩耗、皮膜剥離により短寿命であったことより、
密着性及び耐クレーター摩耗性の改善によるところが大
きいといえる。
As is clear from Table 1, the examples of the present invention show remarkable improvement in life. Since all of these comparative examples had a short life due to crater wear and film peeling,
It can be said that it is largely due to improvement in adhesion and crater abrasion resistance.

【0017】(実施例2)実施例1の方法に基づき表1
記載の本発明例及び比較例の皮膜を旋削用サーメットイ
ンサートに被覆し、旋削加工を実施した。用いたサーメ
ット合金の組成は重量%で60TiCN−10WC−1
0TaC−5MoC―5Ni−10Coである。
Example 2 Table 1 is based on the method of Example 1.
The coatings of the examples of the present invention and comparative examples described were coated on a cermet insert for turning, and turning was performed. The composition of the cermet alloy used is 60TiCN-10WC-1 in weight percent.
0TaC-5Mo a 2 C-5Ni-10Co.

【0018】切削条件は被削材として4つ溝付きS53
Cを用い、切削速度200m/分、切り込み1mm、送
り0.12mm/rev、水溶性である。断続切削であ
り、皮膜は剥離し易い傾向を有し、剥離しない場合はい
ずれもクレーター摩耗の進行から発熱が大きくなり、逃
げ面摩耗が増大する傾向にある。逃げ面摩耗値が0.1
mmになった時点を寿命と判定した。寿命までの切削時
間を表2に記載する。チップ形状はTNGG11030
2Rである。
The cutting conditions are S53 with four grooves as the work material.
Using C, the cutting speed is 200 m / min, the incision is 1 mm, the feed is 0.12 mm / rev, and it is water-soluble. Since the cutting is intermittent cutting, the coating tends to peel off, and when it does not peel off, heat generation increases due to the progress of crater wear, and flank wear tends to increase. Flank wear value is 0.1
The time when it reached mm was determined to be the life. The cutting time to the end of life is shown in Table 2. Chip shape is TNGG11030
2R.

【0019】[0019]

【表2】 [Table 2]

【0020】表2の結果から明らかなように、本発明例
は断続の高速旋削加工においても長寿命であるととも
に、皮膜剥離も発生せず、極めて安定した切削加工が実
現できる。
As is clear from the results shown in Table 2, the present invention example has a long life even in intermittent high-speed turning, does not cause film peeling, and can realize extremely stable cutting.

【0021】[0021]

【発明の効果】以上の如く、本発明の多層硬質皮膜被覆
工具は、従来の被覆工具に比べ耐クレータ摩耗性に優
れ、乾式高速切削加工において格段に長い工具寿命が得
られ、切削加工における生産性の向上、コスト低減、環
境改善に極めて有効である。
INDUSTRIAL APPLICABILITY As described above, the multilayer hard coating tool of the present invention is superior in crater wear resistance as compared with the conventional coated tool, and has a remarkably long tool life in dry high speed cutting, and is produced in cutting. It is extremely effective in improving the productivity, reducing the cost, and improving the environment.

【図面の簡単な説明】[Brief description of drawings]

【図1】図1は、本発明例のTiBN皮膜のESCA解
析結果で、TiとNとの結合エネルギ回折ピークを示
す。
FIG. 1 is a result of ESCA analysis of a TiBN film of an example of the present invention, showing a binding energy diffraction peak of Ti and N.

【図2】図2は、本発明例の皮膜のESCA解析結果
で、BとNとの結合エネルギー回折ピークを示す。
FIG. 2 is a result of ESCA analysis of the film of the present invention, showing the binding energy diffraction peaks of B and N.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】基体表面にTiを主成分とし、C、N、O
から選択される1種以上の元素とから構成される硬質層
[A]と、4a、5a、6a族、及びSiから選ばれる
一種以上の金属成分と、C、N、Oから選択される1種
以上の元素とから構成される硬質層[B]を2種以上多
層に被覆した物理蒸着被覆工具において、該[A]層内
に硼素の窒化物相を介在させたことを特徴とする耐クレ
ーター摩耗性に優れる物理蒸着硬質皮膜被覆工具。
1. C, N, O containing Ti as a main component on the surface of a substrate.
A hard layer [A] composed of one or more elements selected from the following, one or more metal components selected from the groups 4a, 5a, 6a and Si, and 1 selected from C, N and O In a physical vapor deposition coated tool in which two or more hard layers [B] composed of one or more elements are coated in multiple layers, a boron nitride phase is interposed in the [A] layers. Physical vapor deposition hard film coated tool with excellent crater wear.
【請求項2】請求項1記載の物理蒸着硬質皮膜被覆工具
において、該[B]層が基体直上に被覆されていること
を特徴とする耐クレーター摩耗性に優れる物理蒸着硬質
皮膜被覆工具。
2. The physical vapor deposition hard film coated tool according to claim 1, wherein the [B] layer is coated directly on the substrate, which has excellent crater wear resistance.
【請求項3】請求項1乃至2記載の物理蒸着硬質皮膜被
覆工具において、該基体が超硬合金もしくはサーメット
合金インサートであり、皮膜の総厚さがスクイ面におい
て3μから15μであることを特徴とする耐クレーター
摩耗性に優れる物理蒸着硬質皮膜被覆工具。
3. The physical vapor deposition hard coating tool according to claim 1, wherein the substrate is a cemented carbide or cermet alloy insert, and the total coating thickness is 3 μ to 15 μ on the squeeze surface. A physical vapor deposition hard film coated tool with excellent crater wear resistance.
JP2001342096A 2001-11-07 2001-11-07 Physical vapor deposition hard coating tool with excellent crater wear resistance Expired - Fee Related JP3679046B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001342096A JP3679046B2 (en) 2001-11-07 2001-11-07 Physical vapor deposition hard coating tool with excellent crater wear resistance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001342096A JP3679046B2 (en) 2001-11-07 2001-11-07 Physical vapor deposition hard coating tool with excellent crater wear resistance

Publications (2)

Publication Number Publication Date
JP2003145307A true JP2003145307A (en) 2003-05-20
JP3679046B2 JP3679046B2 (en) 2005-08-03

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Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Link
JP (1) JP3679046B2 (en)

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