JP2003139662A - Microfluid device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a microfluid device in which a very small diaphragm and a very small valve can be formed without a patching operation, which is of a simple structure, which is manufactured easily and which comprises a simply controllable pump mechanism. SOLUTION: One first flexible sheetlike member 14 comprises a part to be used as a diaphragm 16 and a part to be used as a discharge-side check valve 17. A pump chamber 22 which permits the displacement of the diaphragm 16 and which makes a fluid flow into is installed at a second member 13 bonded to the first member 14, and a second flow channel 12 which communicates with the pump chamber 11 and the other end of which is situated in the center of the valve 17 is installed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a microfluidic device used as a microchemical device having a structure such as a microchannel, a reaction tank, an electrophoresis column, a membrane separation mechanism, etc. formed in a member. More specifically, chemistry, biochemistry, and other microreaction devices (microreactors); integrated DNA analysis devices, microelectrophoresis devices, microchromatography devices, and other microanalysis devices; mass spectrometry, liquid chromatography, and other analysis samples. The present invention relates to a microfluidic device used as a physicochemical treatment device for preparative microdevices, extraction, membrane separation, dialysis and the like. The present invention also relates to microfluidic devices used as nozzles, spotters for manufacturing microarrays, and the like.

[0002]

2. Description of the Related Art In "SCIENCE" magazine (Vol. 288, p. 113, 2000), a liquid flow path formed of silicon rubber and a flow path and a partition wall of silicon rubber are formed. Microfluidic devices having cavities for pressurization are described. In this microfluidic device, the compressed air is introduced into the pressurizing cavities provided at the three opposite positions of one flow path, and the silicon rubber partition wall is bent and pushed out toward the flow path side to obtain the cross-sectional area of the flow path. Is changed and the liquid is transferred by sequentially performing this at three places in one flow path.

[0003]

However, since this microfluidic device requires complicated control of compressed gas for driving the pump, it is difficult to operate in parallel in a large number, and compressed air piping is connected. Because you need to
There are drawbacks such as difficulty in miniaturizing the device. On the other hand, in a diaphragm type pump of a normal size, a check valve is incorporated to prevent backflow, and the reciprocating motion of the diaphragm is converted into a motion that causes fluid to flow in one direction. That is, in the diaphragm type pump having the check valve, since the diaphragm only needs to reciprocate, the drive mechanism can be simplified. However, in a microfluidic device, it was very difficult to accurately incorporate a minute diaphragm or a check valve at an appropriate position of the device.

In view of the above problems, it is an object of the present invention to provide a microfluidic device having a diaphragm type pump mechanism having a diaphragm and a valve which is simple to control and has a simple structure and easy to manufacture. To do.

[0005]

In order to solve the above problems, the present invention is characterized in that a diaphragm and a valve are provided on one sheet-shaped first member. By providing the diaphragm and the valve on the one sheet-shaped first member, it is possible to cause the fluid to flow by the displacement of the diaphragm to be discharged or flowed in through the valve, eliminating the difficulty of handling a minute diaphragm or valve, It is possible to manufacture a microfluidic device having a pump mechanism whose control is simple with a minimum number of parts and a minimum manufacturing process. In the present invention, the diaphragm and the valve can be formed in the first member itself by cutting out or cutting off a part of the first member.

The first member is laminated by being joined to the second member, and the diaphragm and the valve are communicated with each other through a joint surface between the first member and the second member or a flow path provided in the second member. It may be done. A diaphragm can be used to cause fluid to flow through the flow path to the valve from which it can be delivered or supplied. The flow channel can be manufactured by forming a through hole or a concave groove in the second member or the like.

The microfluidic device according to the present invention comprises a capillary channel, a pump chamber connected to the channel, a diaphragm facing the pump chamber, and a check valve formed in the channel. A microfluidic device having a diaphragm pump mechanism, having a structure in which a sheet-shaped first member is laminated on and adhered to a second member, wherein a flow path is formed in the second member or a defective portion or a first member. The pump chamber is formed by the defect portion provided in the one member and the second member, and the pump chamber is formed by the defect portion of the second member or the defect portion of the second member and the first member, and the diaphragm faces the pump chamber. The check valve is formed in the portion of the first member, and the check valve is formed in a portion different from the diaphragm of the first member. The force applied from the outside to the pump chamber of the second member causes the diaphragm to move forward and backward to be displaced, thereby allowing the fluid to move in and out of the pump chamber, and the fluid flowing in the flow path is removed by the check valve. Transported only in the direction. The check valve can be provided on the suction side to the pump chamber, on the discharge side, or on both, and operates at fluid pressure via the flow path. Particularly, in the microfluidic device according to the present invention, since the diaphragm and the check valve are provided in one first member, the structure is simple and the manufacturing is easy, and thus the productivity is high and the cost is low. Further, in the microfluidic device, no piping or wiring for fluid transfer is required, and the driving method and driving mechanism are simple, and a large number of parallel operations are easy. The defective portion includes a through hole and a concave groove that penetrate the member.

[0008]

DETAILED DESCRIPTION OF THE INVENTION A microfluidic device according to an embodiment of the present invention will be described with reference to FIG. FIG. 1 is an exploded perspective view of a microfluidic device according to an embodiment. In the microfluidic device 1 shown in FIG. 1, a first resin layer 4 made of, for example, an energy ray-curable composition is formed on a support 3 made of, for example, polystyrene, and first fluid channels 5 are formed on the front and back surfaces of the resin layer 4. A second resin layer 6 formed by a slit-shaped (or a groove-shaped groove that does not penetrate to the other surface) formed to penetrate is laminated. The first flow path 5 is formed in a substantially L-shaped linear shape in the drawing. Further, the second resin layer 6
A third resin layer 7 is laminated on the upper part of the first resin layer 7. In the third resin layer 7, for example, a U-shaped cutout 8 is formed at a position overlapping with one end of the first flow path 5, and is surrounded by the cutout 8. The opened portion constitutes a suction side check valve 9 having a tongue shape. The third resin layer 7 is adhered to the second resin layer 6 except the region of the suction side check valve 9, and only the suction side check valve 9 is a non-adhesive part that can be opened and closed. One end of the first flow path 5 is positioned so as to come to the center of the suction side check valve 9.

On the third resin layer 7, for example, a space-like pump chamber 11 composed of a rectangular defect is formed, and one end communicates with the pump chamber 11 and a slit shape (or a concave groove shape) which penetrates the front and back surfaces. ) The second flow path 1 extending as a defective portion
The second member 13 is laminated as a fourth resin layer formed by forming 2). The pump chamber 11 penetrates through the front and back surfaces and constitutes an operating space that allows the third resin layer 7 to operate inside the suction side check valve 9 and also functions as the operating space of the pump chamber 11. When the defective portion forming the second flow path 12 is a concave groove-shaped defective portion formed on the surface on the third resin layer 7 side,
The other end 12a of the second flow path 12 penetrates the front and back surfaces of the second member 13 and opens to the first member 14 side. A first member 14 is laminated and bonded as a fifth resin layer on the second member 13. In the first member 14, the portion of the second member 13 facing the pump chamber 11 constitutes the diaphragm 16, and the discharge side check valve is arranged so that the other end of the second flow passage 12 of the fourth resin chamber 13 is located at the center. 17 are formed. Discharge side check valve 1
7 is formed by removing the periphery thereof as a substantially U-shaped defective portion 18. Further, the discharge-side check valve 17 and the diaphragm portion 16 are non-bonded portions, and the first member 14 is bonded to the second member 13 except for these. Further the first member 1
4, through-hole 14 penetrating the second member 13 and the third resin layer 7
a, 13a, 7a are formed to form through holes 14a, 1
3a and 7a are formed so as to communicate with the other end of the first flow path 5 formed in the second resin layer 6. The check valves 9 and 17
The U-shaped cutout portions 8 and 18 that form the U do not intersect the first and second flow paths 5 and 12.

The microfluidic device 1 configured as described above supplies the fluid to the first flow path 5 through the through holes 14a, 13a and 7a, and the diaphragm portion 16 is attached to the first member 1.
It is pressed from the top of 4 periodically. Then, the suction side check valve 9
Is opened and closed, the fluid flows from the first flow passage 5 into the pump chamber 11 at the opening of the check valve 9 by the suction side check valve 9 and the fluid enters the second flow passage 12 through the pump chamber 11. When the discharge-side check valve 17 is opened and closed by being compressed by the fluid, the discharge-side check valve 17 is discharged to the outside. And diaphragm part 1
When the periodic compression of 6 is stopped, the check valves 9 and 17 are closed and the movement of the fluid is stopped.

2 to 6 show the discharge side check valve 17
It shows a modified example of. The solid line in the figure shows the slit-shaped defective portion 18A which the discharge side check valve 17 of the first member 14 penetrates. The second flow path 12 of the second member 13 is shown by the broken line, and the other end 12a constitutes the end at the center of the discharge side check valve 17. In the first modified example shown in FIG. 2, the defective portion 18A of the discharge side check valve 17A is formed in a substantially semicircular arc or a long arc shape, and the discharge side check valve 17A constitutes a substantially semicircular tongue piece. Then, the opening / closing operation is performed from a substantially diameter portion connecting both ends of the defective portion 18A. The second flow path 12 is formed in the second member 13 on the joint surface with the first member 14. The defective portion 18A may be a cut having a cross-sectional area of zero in the normal state, and the discharge-side check valve 17A may be a cut that produces a flow passage having a finite cross-sectional area when the discharge-side check valve 17A is displaced by the pressure of the fluid. The same applies to the following second to sixth modifications. In the second modified example shown in FIG. 3, two arc-shaped slit-shaped defective portions 18B, 18B are formed so as to surround the other end 12a of the second flow path 12 and are formed substantially in line symmetry. The discharge side check valve 17B opens and closes around the two fulcrums 20, 20 between the two defective portions 18B, 18B. The second flow path 12 is formed on the surface of the second member 13 opposite to the bonding surface of the first member 14, and the other end 12a penetrates the second member 13 and opens toward the first member 14 side. There is.
In the third modified example shown in FIG. 4, the other end 12a of the second flow path 12 is formed.
Two substantially linear cutouts 18C on both sides of the
18C are formed facing each other and separated from each other, and the discharge-side check valve 17C between the two defective portions 18C, 18C is vertically displaced to open and close. In the fourth modification shown in FIG. 5, the second flow path 1
Two arc-shaped cutout portions 18 so as to surround the other end 12a of 2
D, 18D, and 18D are separated from each other and are formed substantially in point symmetry, and three of the three defective portions 18D, 18D, and 18D are formed.
The discharge check valve 17D at the center opens and closes with the two fulcrums 21, 21, 21 as fulcrums. The second flow path 12 of the second member 13 is formed as a groove on the surface opposite to the first member 14 as in the modification shown in FIG.
There is an opening on the joint surface with. In FIG. 6, the second flow path 12 has the same structure as that shown in FIG. 5, and only the other end 12 a of the second flow path 12 is open to the joint surface with the first member 14. The defective portion 18E of the first member 14 is formed as a through hole at a position horizontally displaced from the other end 12a, and a substantially circular or oval portion surrounding both the other ends 12a and the defective portion 18E is formed. It is a discharge-side check valve 17E that forms a non-adhesive portion, which is vertically displaced to open and close.

Therefore, according to the microfluidic device 1 of the present embodiment, the control is simple, and the diaphragm 16 and the check valve 17 do not need to be provided as separate members, and a part of the sheet-like first member 14 can be used. A diaphragm pump mechanism having a diaphragm 16 and a discharge-side check valve 17, which has a simple structure and is easy to manufacture, can be obtained because it can be formed by being chipped. In the above description, the second member 13 is constituted by only a single sheet or the like made of the fourth resin layer, but the present invention is not limited to such a constitution, The third resin layers 4, 6, 7 and the support 3 may be partially or entirely included, or may be configured to include the first and second resin layers 4, 6, and the second member 13 is appropriately formed. Can be configured.

Here, the outer shape of the microfluidic device 1 according to the present invention does not need to be particularly limited, and may have a shape according to the purpose of use. For example, not only sheet-shaped (including film-shaped, ribbon-shaped, etc., the same applies below), but also plate-shaped, coating-film-shaped, rod-shaped, tube-shaped, and other complicated shaped moldings, etc. From the viewpoint of ease of use, it is preferably sheet-shaped, plate-shaped or rod-shaped. The microfluidic device 1 may be formed on the support 3. Multiple independent microfluidic devices 1
Can also be formed in one piece. The microfluidic device 1 according to the present embodiment is a device in which capillary-shaped flow paths 5 and 12 are formed inside, and a function is achieved by flowing a fluid through these flow paths 5 and 12. Channel 5, 12
Preferably has a cross-sectional area of 1 × 10 ⁻¹² m ² to 1 × 10 ^−6.
m ² , more preferably 1 × 10 ⁻¹⁰ m ^{2 to} 2.5 × 10
^-5 m ² . The width and height of the cross section of the flow path are both preferably 1 μm to 1000 μm, and more preferably 1 μm to 1000 μm.
It is 0 μm to 500 μm. If the channel cross section is smaller than these dimensions, manufacturing becomes difficult. Also, the flow paths 5, 12
Is larger than these dimensions, the effect of the microfluidic device 1 tends to be small, which is not preferable.

Since the microfluidic device 1 according to the present embodiment has the flow channels 5 and 12 having the cross-sectional areas in the above-mentioned range, in use as a chemical device, the reaction / analysis time can be shortened and a small amount can be obtained. The sample can be synthesized and analyzed, and features such as a small amount of waste and improved temperature control accuracy can be demonstrated as a microfluidic device. In addition, as a microfluidic device such as a micronozzle, it is possible to eject a minute amount of liquid and draw minute dots. The width / height ratio of the cross section of the flow channel can be arbitrarily set according to the application and purpose, but is generally preferably 0.5 to 10, and more preferably 0.7 to 5. The cross-sectional shape of each of the flow paths 5 and 12 is arbitrary, such as a rectangle (including a rectangle with rounded corners; the same applies hereinafter), a trapezoid, a circle, a semicircle, and a slit. Further, the widths of the flow paths 5 and 12 do not have to be constant. The channels 5 and 12 are the microfluidic device 1
May be in contact with the outside of the device, or may be in contact with other structures in the device 1 such as a liquid storage tank, a waste liquid absorbing part, a pressure tank, a decompression tank, etc. without being connected to the outside. . The shapes of the flow paths 5 and 12 viewed from the outside of the microfluidic device may be linear, branched, comb-shaped, curved, spiral, zigzag, or any other shape depending on the purpose of use. The flow paths 5 and 12 extend to a member other than the first member 14, for example, inside the second member 13, the third member, another member adjacent to the other side of the second member 13 or between these members. It may be done. Further, the microfluidic device of the present invention is connected to the inside of the above-mentioned other members connected to the flow paths 5 and 12 or the flow path provided between these members via some structure, for example, a valve. May be. For example, the flow path 5 may be connected to the suction side check valve, or the flow path 12
May be connected via the discharge side check valve 17 to a flow path which can be connected and provided after the check valve 17. The flow channel referred to in the present invention refers to a capillary-shaped cavity through which a fluid can flow or a pressure can be transmitted through the fluid, and a portion having a different cross-sectional area, for example, a cavity-shaped portion other than the capillary is provided. You can do it. With respect to the other flow paths other than the flow paths 5 and 12, their dimensions, shapes, and the like are the same as those of the flow paths 5 and 12. Channel 5, 12
These flow paths including, other than the flow path for fluid transfer as described above, a reaction field, a mixing field, an extraction field, a separation field, a flow rate measurement unit,
It may be used as a detection unit or the like.

The outer shape of the second member (fourth resin layer) 13 does not need to be particularly limited, and may have a shape according to the purpose of use. The shape of the second member 13 is the same as the shape of the microfluidic device 1 itself described above. The second member 13 is preferably sheet-shaped or plate-shaped. In addition, for simplification of description, the term “sheet” is also included in the term “plate” unless otherwise specified.
The second member 13 may be a composite of a plurality of the same or different materials, for example, a laminated body. The thickness of the second member 13 is arbitrary, but is preferably 10 μm to 10 mm, more preferably 50 μm to 5 mm, and most preferably 1
It is 50 μm to 2.5 mm. If the thickness is too small, manufacturing becomes difficult, and if it is too large, the characteristics of the microfluidic device 1 are deteriorated.

The second member 13 has a defective portion (pump chamber 11, second flow path 12) reaching the surface. The defect portion reaching the surface is a hole-shaped defect portion penetrating the member 13, a hollow defect portion communicating with the outside of the member, or a groove-shaped or concave defect provided on the member surface without penetrating the member 13. It can be a part, and these can be a composite shape. The defective portion is, by itself or by being laminated with the first member 14, the capillary-like second flow passage 12 or the flow passage in the second member 13 or between the second member 13 and the first member 14. A cavity (pump chamber 11 or the like) connected to 12 is formed. Of course, the defective portion may be a plurality of independent defective portions, or may have a structural portion other than the flow path, for example, a portion that becomes a cavity for installing the sensor.

The shape and dimensions of the defective portion are the desired shape,
It can be designed to create sized cavities and channels. That is, the defective portions serving as the flow paths 5 and 12 can be formed to have such dimensions as described above, and the defective portions serving as the operating spaces such as the pump chamber 11 and the check valve 9 can be formed to have such dimensions as described below. The cavity of the second member 13 can also be the working space of the check valve 17 formed in the first member 14 (the space into which the check valve enters when the check valve is pushed by the fluid). By using a cavity provided between the second member 13 and the first member 14 as an operating space of the check valve 17, the flow path is opened when the check valve 17 moves to the second member 13 side. A check valve is obtained which can be used as a check valve on the suction side. However, in this case, as described later, it is necessary to provide another third member (not shown) on the side of the first member 14 opposite to the second member 13. The planar shape and dimensions of the cavity that serves as the operating space of the check valve 17 are arbitrary as long as the check valve 17 has a sufficient size to operate.

The first member 14 is a sheet-like member which constitutes the diaphragm 16 and the check valve 17. The planar shape and dimensions of the first member 14 are arbitrary, and for example, the shape laminated on a part of the second member 13, the shape corresponding to the defective portion forming surface of the second member 13, and covering the entire surface thereof, The shape may be larger than the two member 13. However, it is preferable that the first member 14 has a shape that matches the defective portion forming surface of the second member 13. The thickness of the first member 14 is preferably 1 to 1000 μm, and more preferably 10 to 3 at least in the portion that becomes the diaphragm 16 and the portion that becomes the check valve 17.
00 μm, most preferably 20 to 200 μm. The thickness does not have to be constant, but it is preferable that the entire first member 14 has the same thickness. The thickness is preferably thin as the tensile elastic modulus is high and the diaphragm area is small. The first member 14 is also preferably made of a material having a tensile elastic modulus of 0.1 MPa to 10 GPa, more preferably 30 MPa to 1 GPa. If it is less than this range, the pressure resistance and durability tend to be poor, and if it exceeds this range, it becomes difficult to provide the diaphragm 16 with flexibility.

The diaphragm 16 exhibits flexibility,
The higher the tensile modulus of the materials that make it up, the thinner the thickness
There is a need to. Microfluidic device according to the present embodiment
The diaphragm 16 of the chair 1 has a tensile modulus of elasticity × thickness.
Value is 1 x 10^-6~ 3 x 10 ^-2Within the range of MPa · m
Preferably 1 × 10^-Five~ 3 x 10^-3MPa · m
It is more preferable that it is in the range. Constituting the first member 14
The material has a fracture measured according to JIS K-7127.
The elongation is preferably 2% or more, more preferably 5% or more.
The one above. The upper limit of elongation at break may have its own limit.
However, because it is high and there is no inconvenience due to itself, an upper limit is set.
It does not need to be kicked, and may be 800%, for example. However
However, in the present invention, according to JIS K-7127.
Material showing low elongation at break of 2-5% in tensile test
However, it is hard to destroy it in the method of use of the present invention.
Even if a deformation exceeding the elongation at break in the above test is applied,
It can be used without breaking. Therefore,
As long as it is a cross-linked polymer such as energy ray-curable resin,
It should be 20% or less, which is currently possible and increases the degree of freedom in selecting materials.
Is preferable, and 15% or less is more preferable.

The first member 14 is laminated and adhered to the defective portion forming surface of the second member 13, and the second member 13 at the defective portion is adhered.
The pump chamber 11 with the opening to the surface and the first member 14
(Installed facing the diaphragm 16, the diaphragm 1
The deformation of 6 changes its volume to form a cavity that serves as a cavity for pumping and / or sucking fluid. In addition, the first member 14 is laminated and adhered to the defect forming surface of the second member 13, and the second member 13 and the first member 14 have a portion which is in contact but not adhered. The contact part can also form the pump chamber 11. The non-bonded portion is a cavity having a volume of zero in a stationary state, but the diaphragm 16
Is drawn from the side opposite to the second member 13 and deforms, thereby forming a cavity having a positive volume. This type of pump room 1
Since No. 1 has a small dead volume, the discharge pressure can be increased and a compressible fluid such as gas can be efficiently transferred. Also, the flow path is normally closed (such a valve is generally called a "normally closed" type valve).
It is possible to obtain a pump having a valve function such as Further, the pump chamber 11 has a structure including both of them, that is, a defective portion of the second member 13 that becomes a cavity within the range where the second member 13 and the first member 14 are in contact but not bonded. The structure may have an opening.

In any case, the pump chamber 11 is connected to the first flow path 5 and the second flow path 12. Pump room 11
One of the configurations in which is connected to the first flow path 5 and the second flow path 12 is a mode in which the pump chamber 11 is formed on the way of the two flow paths. In other words, the pump chamber 11 is provided with an inflow port from the first flow path 5 and an outflow port to the second flow path 12. Another form is a form in which the pump chamber 11 is connected to one end of another flow path branched from the connecting portion of the first flow path 5 and the second flow path 12. In this case, the inflow port and the outflow port are one inflow port that serves both of them. The positions of the inlet and the outlet in the pump chamber 11 are arbitrary as long as they do not pass through the diaphragm 16, and may be provided between the second member 13 and the first member 14, respectively. It may be provided on the second member 13. In this specification, for simplification of description, the height, width, and the like are expressed in a posture in which the first member 14 is on the top and the second member 13 is on the bottom. In addition, the height and width of the second flow passage 12 and the pump chamber 11 at the cross section perpendicular to the streamline direction of the fluid flowing therein are respectively the first flow passage 5, the second flow passage 12, and the pump chamber 11. The height and the width will be referred to as the length, and the length in the streamline direction will be referred to as the length of the flow path and the pump chamber 11.

The planar shape of the pump chamber 11, that is, the shape viewed from the upper side is arbitrary, and may be, for example, a circle, an ellipse, a polygon, a rectangle, or the like. Among these, a circle, an ellipse, or a rectangle with rounded corners is preferable because the production is easy and the effect is large. The cross-sectional shape of the pump chamber 11 is also arbitrary, and may be, for example, a rectangle, a cone or a pyramid, a circle or an ellipse, a semicircle, or the like, but the rectangle is preferable because it is easy to manufacture. The plane area of the pump chamber 11 is 1 × 10 ^-10
m ² to 1 × 10 ⁻⁵ m ² , preferably 2.5 × 10
^-9 it is ^{m 2 ~1 × 10 -6 m 2} . The width of the pump chamber 11 is arbitrary, but is preferably 10 μm to 3 mm, more preferably 50 μm to 1 mm. The width of the pump chamber 11 is preferably smaller as the flow channel width is smaller, and is preferably 1 to 1000 times, more preferably 3 to 100 times the width of the capillary channel 12. If these dimensions are less than these ranges, the driving force for fluid transfer is reduced, and if these dimensions are exceeded, the flow rate controllability is reduced, both being undesirable. The height of the pump chamber 11 is an arbitrary value including zero in a stationary state. The height “zero” means a state where the second member 13 and the first member 14 are in contact with each other but not bonded. The upper limit of the height is not particularly limited, and for example, the pump chamber 1
There may be a structure in which the length of the second flow path 12 connected to 1 is substantially the height of the pump chamber 11. However, in order to fully exert the effect of the present invention, it is preferably 10 mm or less, more preferably 3 mm or less. Further, the length of the pump chamber 11 does not have to be particularly limited. Therefore, the pump chamber 11 may be a capillary flow path itself as long as it satisfies the above dimensions.

In the present invention, "diaphragm 16".
Means a movable part where the first member 14 faces the pump chamber 11.
To tell. Therefore, the size and shape of the diaphragm 16 are
The pump chamber 11 may have a planar shape and dimensions. Diaphragm
The area of the ram 16 is preferably 1 × 10^-Tenm² ~ 1x
10^-Fivem²And more preferably 2.5 × 10^-9m ²
 ~ 1 x 10^-6m²Is. Flow below these ranges
The driving force for body transfer decreases, and if it exceeds this, the flow rate adjustment capability
And both are unfavorable. Microfluidic device of the present invention
In the chair, the diaphragm 16 is the surface of the first member 14.
The ratio to the product is the diaphragm of a normal-sized pump.
Very small compared to ram, preferably 1 × 10^-8~ 3x
10^-2, And more preferably 1 × 10^-7~ 1 x 10^-2And
It Below this range, the microfluidic device will be too large.
Therefore, the merit as a micro device is reduced.
If it exceeds the range, it becomes difficult to manufacture a small diaphragm.
It A check valve 17 is formed in the first member 14. Reverse
The stop valve 17 has the second member 13 and the first member 14 bonded to each other.
The second part that connects the non-adhesive part and the non-adhesive part
The flow path 12 formed on the 13 side and the second member in the non-adhesive portion
13-side flow path 12 is formed at a position not overlapping with the first part
It is composed of a defective portion 18 penetrating the material 14. Non-bonded
Second flow path 12 formed on the side of the second member 13 that communicates with the section
Is due to the defect of the second member 13 and / or the second
It is formed by the defective portion of the member 13 and the first member 14.
It The check valve 17 may have any shape, for example, as shown in FIG.
Tongue-like valve 17A, as shown in FIGS.
The valves 17B, 17C, 1 fixed at two or more fulcrums
7D, the defect of the hole-shaped first member 14 as shown in FIG.
Check valve 1 comprising part 18E and non-adhesive part in the range including it
It can be 7E. In the figure, the area surrounded by the solid line is
Defects 18A, 18B, 18C, 18D of one member 14,
18E, the area surrounded by the alternate long and short dash line is the second member 13 and the first
The non-bonded part where the member 14 is not bonded, the area surrounded by the broken line
The enclosure is the defective portion (second flow path) 12 of the second member 13 or its
The other end (opening) 12a is shown.

Therefore, the fluid enters the non-adhesive portion from the flow path on the side of the second member 13 and bends the first member 14 to bend the second member 1.
3 and the first member 14 flow through the gap created in the non-bonded portion,
It flows to the side opposite to the second member 13 through the defective portion penetrating the first member 14. On the other hand, when the reverse pressure is applied, the non-adhesive portion between the second member 13 and the first member 14 adheres to block the second flow path 12, and therefore the reverse flow does not occur. The check valve 17 is formed in a part of the second flow passage 12, and is configured to be transferred only in one direction of the second flow passage 12 due to increase or decrease in the capacity of the pump chamber 11. The above-mentioned check valve 17 for flowing the fluid from the second member 13 side to the first member 14 side.
Can be provided on the suction side or the discharge side of the pump mechanism depending on the design of the flow path 12, but it is preferable to provide the on the discharge side because the structure of the pump can be simplified. The microfluidic device 1 of the present invention may have one check valve, but preferably has two check valves capable of flowing in opposite directions with the pump chamber 11 interposed therebetween. It is also preferable that the microfluidic device 1 of the present invention has a plurality of pump mechanisms. The plurality of pumps may be installed in independent flow paths, or may be installed in each of the merging flow paths.

It is also preferable that another member (referred to as a third member) having a defective portion reaching the member surface is bonded to the side of the first member 14 opposite to the second member 13 (not shown).
Of course, at this time, the diaphragm 16 portion of the first member 14 needs to be provided with a defective portion in a portion facing the diaphragm 16 of the third member so that the diaphragm 16 portion can be deformed. Further, it is necessary to provide the third member with an operation space in which the valve 17 is pushed by the fluid from the second member 13 side, particularly when it is deformed and enters. A cavity (referred to as "second cavity") is formed at a position facing the cavity (pump chamber 11) with the diaphragm 16 separated from the defective portion of the third member, and the second cavity is pressurized or depressurized. It is also preferable to drive the diaphragm 16 by doing so. By the defective part of the third member itself,
Alternatively, it is also preferable that a flow path is formed by the defective portion of the third member and the first member 14, and the valve 17 guides the fluid flowing out to the third member side. Further, when the valve 17 is the intake side check valve, a flow passage similar to the flow passage 12 of the above-mentioned second member 13 is formed in the third member, and the second member of the lower portion of the valve 17 is formed. Thirteen
In addition, by forming a defective portion similar to the pump chamber 11 that becomes the operating space of the valve 17, a check valve that opens when being sucked by the second member 13 side and closes when being pushed from the second member 13 side is provided. Can be formed. In the first member 14, both the suction side check valve of this structure and the above-mentioned discharge side check valve 17 are formed, and the inflow side (suction side) and the outflow side (discharge side) are sandwiched by the pump chamber 11. It is also preferable to form two check valves on both sides, which can respectively flow in opposite directions. By forming such two check valves, a highly efficient pump with less pulsation can be obtained. Further, in the same manner as the above-mentioned second member 13, the third member is provided with a check valve that allows fluid to flow from the flow path on the third member side to the second member 13 side but not in the opposite direction. It is also preferable that the check valve is connected to both the suction side and the discharge side check valve 17 to form check valves on both the suction side and the discharge side with the pump chamber 11 interposed therebetween. The member forming the diaphragm of the third member may have an area smaller than that of the first member 14, but it is preferable that the third member has the same plane shape and size as the second member 13. It is preferable that the second member 13 and the third member are both plate-shaped members.

Although pressure resistance and strength can be increased by using a material having high hardness and strength for each member, when a material having low hardness is used or the thickness is made thin, the support 3 is It is also preferable to form. The material forming the second member 13 and the third member preferably has a tensile elastic modulus of 10
It is 0 MPa or more, more preferably 500 MPa or more, and most preferably 1 GPa. The upper limit of tensile modulus is
Although there is a limit naturally, there is no inconvenience by itself, so there is no need to set an upper limit. For example, 100G
It can be Pa or 500 GPa.

The polymer that can be used for the second member 13 and the third member can be selected and used from those exemplified below as the polymer that can be used for the diaphragm. The polymer that can be used for the second member 13 and the third member is also preferably a solidified product of the energy ray-curable composition. The energy ray-curable composition is preferably a crosslinked polymer in order to increase strength and hardness. The energy ray-curable composition is the same as that of the first member 14 described below, except that the preferred tensile elastic modulus is different. The energy ray-curable compound contained in the energy ray-curable composition can also be selected and used from those exemplified as the energy ray-curable compound usable for the diaphragm.

The polymer forming the first member 14 may be a homopolymer or a copolymer, and may be a thermoplastic polymer or a thermosetting polymer. It may be a crosslinkable polymer. From the viewpoint of productivity, the polymer is preferably a thermoplastic polymer or a solidified product of an energy ray-curable composition. In order to suppress the plastic deformation of the first member 14 and increase the durability of the pump mechanism, when the material forming the first member 14 is a solidified product of the energy ray-curable composition, the solidified product is crosslinked. It is preferably a polymer. Examples of the thermoplastic polymer that can be used for the first member 14 include polystyrene, poly-α-methylstyrene,
Styrene-based polymers such as polystyrene / maleic acid copolymers and polystyrene / acrylonitrile copolymers; polysulfone-based polymers such as polysulfone and polyethersulfone; (meth) acrylic polymers such as polymethylmethacrylate and polyacrylonitrile; Maleimide-based polymer; Cellulose-based polymer such as cellulose acetate and methyl cellulose; Polycarbonate-based polymer such as bisphenol A-based polycarbonate, bisphenol F-based polycarbonate, bisphenol Z-based polycarbonate; Polyethylene, polypropylene, poly-4-methylpentene-1 Polyolefin polymers such as; Chlorine-containing polymers such as vinyl chloride and vinylidene chloride; Polyurethane polymers; Polyamide polymers; Fluorine polymers;
Examples thereof include polyether-based or polythioether-based polymers such as poly-2,6-dimethylphenylene oxide; polyester-based polymers such as polyethylene terephthalate and polyarylate.

Of these, styrene-based polymers, (meth) acrylic-based polymers, polycarbonate-based polymers, polysulfone-based polymers and polyester-based polymers are preferable from the viewpoint of good adhesion. Examples of thermosetting polymers that can be used for the first member 14 include polyurethane-based polymers; polyamide-based polymers; polyimide-based polymers; epoxy resins; (meth) acrylic-based polymers; and polymaleimide-based polymers. To be Even if the polymer exemplified above is out of the range of the tensile elastic modulus which is preferable as the first member 14 (which may be the first member 14) by itself, it should be used by using a plasticizer or copolymerization. Can be done.

The polymer that can be used for the first member 14 is also preferably a solidified product of the energy ray-curable resin composition. The energy ray-curable resin composition contains an energy ray-curable compound as an essential component, and may be an energy ray-curable compound alone or a mixture of a plurality of kinds of energy ray-curable compounds. The energy ray-curable resin composition is preferably a crosslinked polymer in order to increase strength and hardness. As the energy ray-curable compound, in addition to those which can be solidified in the absence of an energy ray polymerization initiator, those which can be polymerized by energy rays only in the presence of an energy ray polymerization initiator can be used. As the energy ray-curable compound, those having a polymerizable carbon-carbon double bond are preferable, and among them, highly reactive (meth) acrylic compounds and vinyl ethers, and solidify even in the absence of a photopolymerization initiator. Maleimide compounds are preferred. Examples of the energy ray-curable compound that can be used for the second member 13 and the third member include the first member 1 described later.
4 (which may be the first member 14) can be selected and used from the compounds exemplified as being usable.

The first member 14 may be a composite body such as a laminated body made of different materials. In this case, the tensile elastic modulus and thickness of the composite are within the above ranges. As such a composite, for example, a laminate of a solidified product of an energy ray-curable composition and a thermoplastic polymer is also preferable, and a first member formed of a thermoplastic polymer or a thermosetting polymer is also preferable. On the side of the second member 13 of 14, the solidified layer of the low-adsorptive energy ray-curable composition adheres (coat)
It is even more preferable that the The material capable of forming the composite is preferably a polymer having a small tensile modulus, and silicone rubber; neoprene-based, chloroprene-based,
Rubbers such as nirolyl and butadiene; polyurethane,
An elastomer such as a polyester elastomer or a polyamide elastomer; a flexible thermoplastic resin such as an ethylene-vinyl acetate copolymer is preferable. The energy ray-curable composition used as the material of the first member 14 contains an energy ray-curable compound as an essential component, and may be the energy ray-curable compound alone, or may be a plurality of types of energy ray-curable compounds. It may be a mixture. Using a solidified product of such an energy ray-curable resin composition as the material of the first member 14 makes it easy to form the first member 14 having a small thickness. In addition to facilitating adhesion with other members, in a preferred embodiment of the present invention, the first member 14 can be easily bonded to the second member 13 and the third member without blocking the defect or groove formed in the third member. It has advantages that it can be easily bonded to a member, that the flexibility of the first member 14 can be easily controlled, and that they can be implemented with high productivity.

The solidified product of the energy ray-curable resin composition may be a chain polymer or a cross-linked polymer, but plastic deformation can be suppressed when repeated durability or long-term durability is required. Therefore, it is preferably a cross-linked polymer. In order to form a solidified product of the energy ray-curable resin composition into a crosslinked polymer, the energy ray-curable composition has two or more polymerizable functional groups in the case of an addition polymerizable compound, or In the case of a polycondensable compound, it can be carried out by incorporating a monomer and / or oligomer having 3 or more polymerizable functional groups (hereinafter, having such a functional group is referred to as “polyfunctional”). . The energy ray-curable composition is also preferably a mixture of monofunctional monomers and / or oligomers for the purpose of adjusting tensile modulus and improving adhesiveness. The energy ray-curable compound constituting the energy ray-curable resin composition used as the material of the first member 14 may be any one such as radical polymerizable, anionic polymerizable, and cationic polymerizable. The energy ray-curable compound is not limited to those that polymerize in the absence of a polymerization initiator, and those that polymerize by energy rays only in the presence of a polymerization initiator can also be used.

As such an energy ray-curable compound, a compound having a polymerizable carbon-carbon double bond is preferable, and among them, a highly reactive (meth) acrylic compound or vinyl ether, or a photopolymerization initiator. Maleimide compounds that solidify even in the absence thereof are preferred. Examples of the cross-linking polymerizable (meth) acrylic monomer that can be preferably used as the energy ray-curable compound include diethylene glycol di (meth) acrylate, neopentyl glycol di (meth) acrylate, 1,6-hexanediol di ( (Meth) acrylate, 1,8-octanediol di (meth) acrylate, 2,2'-bis (4- (meth) acryloyloxypolyethyleneoxyphenyl) propane, 2,2'-bis (4- (meth) acryloyloxy Polypropyleneoxyphenyl) propane, hydroxydipivalic acid neopentyl glycol di (meth) acrylate, dicyclopentanyl diacrylate, bis (acryloxyethyl) hydroxyethyl isocyanurate, N-methylenebisacrylamide, etc. Monomer; trimethylolpropane tri (meth) acrylate, trimethylolethane tri (meth)
Trifunctional monomers such as acrylates, tris (acryloxyethyl) isocyanurate, caprolactone modified tris (acryloxyethyl) isocyanurate; tetrafunctional monomers such as pentaerythritol tetra (meth) acrylate; dipentaerythritol hexa (meth) acrylate Examples include hexafunctional monomers.

As the energy ray-curable compound, a polymerizable oligomer (also called a prepolymer) can be used, for example, a weight average molecular weight of 500 to 5000.
0 can be mentioned. Examples of such a polymerizable oligomer include (meth) acrylic acid ester of epoxy resin, (meth) acrylic acid ester of polyether resin,
Examples thereof include (meth) acrylic acid ester of polybutadiene resin and polyurethane resin having a (meth) acryloyl group at the molecular end. Examples of the maleimide-based cross-linking polymerizable energy ray-curable compound include 4,4′-methylenebis (N-phenylmaleimide), 2,3-bis (2,4,5-trimethyl-3-thienyl) maleimide, and , 2-Bismaleimide ethane, 1,6-bismaleimide hexane, triethylene glycol bismaleimide, N, N′-m-phenylene dimaleimide, m-tolylene dimaleimide, N, N′-1,4-phenylene dimaleimide , N, N'-diphenylmethanedimaleimide,
N, N'-diphenyl ether dimaleimide, N, N '
-Diphenyl sulfone dimaleimide, 1,4-bis (maleimidoethyl) -1,4-diazoniabicyclo-
A difunctional maleimide such as [2,2,2] octane dichloride, 4,4'-isopropylidenediphenyl dicyanate.N, N '-(methylenedi-p-phenylene) dimaleimide; N- (9-acridinyl) maleimide. Examples thereof include maleimide having a maleimide group and a polymerizable functional group other than the maleimide group.

Examples of the maleimide cross-linking polymerizable oligomer include polytetramethylene glycol maleimide alkylate such as polytetramethylene glycol maleimide capryate and polytetramethylene glycol maleimide acetate. The maleimide-based monomers and oligomers may be copolymerized with each other and / or with a compound having a polymerizable carbon-carbon double bond such as a vinyl monomer, vinyl ethers and an acrylic monomer. These compounds may be used alone or in combination of two or more. Among the compounds exemplified above, the solidified product alone may be out of the specified tensile elastic modulus range, but other copolymerizable compounds, for example, monofunctional (meth) acrylic monomers and other monofunctional compounds. By mixing and using a non-reactive compound such as a monomer or a plasticizer, they can be used with a tensile elastic modulus in a specified range.

If desired, a photopolymerization initiator may be added to the energy ray-curable resin composition. The photopolymerization initiator is active with respect to the energy rays used,
There is no particular limitation as long as it is capable of polymerizing the energy ray-curable compound, and may be, for example, a radical polymerization initiator, an anionic polymerization initiator or a cationic polymerization initiator. The photopolymerization initiator may be a polyfunctional or monofunctional maleimide compound. As energy rays, ultraviolet rays,
Light rays such as visible rays and infrared rays; ionizing radiation such as X rays and gamma rays; particle rays such as electron rays, ion beams, beta rays, and heavy particle rays. Further, the energy ray curable resin composition may contain other components such as a solvent, a modifier and a colorant. Examples of the modifier that can be contained in the energy ray-curable resin composition include surfactants such as anionic, cationic and nonionic surfactants; hydrophilic agents such as hydrophilic polymers such as polyvinylpyrrolidone; tensile elasticity. Examples include plasticizers for adjusting the rate. Examples of the colorant that can be contained in the energy ray-curable resin composition include arbitrary dyes and pigments, fluorescent dyes and pigments, and ultraviolet absorbers.

The method of laminating and adhering the first member 14 and the second member 13 is arbitrary, and for example, the sheet-shaped first member 1 is used.
In addition to the method of adhering No. 4 with an adhesive, a material for forming the first member 14 (hereinafter referred to as a material for forming the first member 14) made of a liquid resin composition is spread on the liquid surface and solidified to form it. That is, the so-called liquid level expansion method, in which the material for forming the first member 14 is applied to the coating support and the fluidity is lost, but the adhesiveness is incompletely cured to the extent that the adhesiveness remains (hereinafter, “semi-cured”). It is possible to use a method in which the second member 13 is laminated on the second member 13 and then cured and adhered in that state. A method of providing a defect portion penetrating the first member 14 in the first member 14 is also arbitrary, and for example, cutting or cutting with a blade; punching; laser perforation; a photolithographic method, that is, an energy ray-curable first coating substrate. One member 14 forming material is applied and cured or semi-cured by patterning exposure,
It can be manufactured by a method of removing the uncured first member 14 forming material in the unirradiated portion by washing or the like. The second member 13 and the third member may be provided with any structure such as a defect, a groove, an inlet, an outlet, etc., for example, cutting or cutting with a blade; punching; laser perforation; photolithography; injection molding; heat pressing. Solvent casting; Drill; Etching; Laser drilling; Stereolithography; Sandblasting and other forming methods;
It is possible to adopt a method of laminating and bonding a thin film member having a defective portion penetrating the front and back and a coating layer to another member.

Of these, a method is preferred in which a layer in which a defective portion is formed is prepared by photolithography and is laminated with another layer to form a concave defective portion formed on the surface. That is, the energy ray-curable composition is applied on a substrate to form a coating film-shaped object, and the portion other than the portion forming the defect portion is irradiated with energy rays to be solidified, and the non-irradiated portion is not solidified. By removing the energy ray-curable composition of (1) by an arbitrary method such as washing, a coating film having a defective portion of the material (that is, a layered member formed on the substrate) is formed. The second member 13 and the first member 14 may be adhered after they are completely formed and then laminated. Alternatively, at least one of these may be incompletely formed in a precursor state, laminated with the other and bonded, and then both may be completed. For example, when the second member 13 is a laminated body of a plurality of layers, after adhering one of the layers constituting the second member 13 to the first member 14, another layer of the second member 13 is adhered. Is also good. Also, for example, the second member 13 and the first member 14
After laminating and adhering, the second member 13 may be perforated. When the microfluidic device of the present invention has the third member, the same applies to the method of bonding the first member 14 and the third member. At this time, the order of laminating and adhering the second member 13 / first member 14 / third member is arbitrary. The second member 1 may be adhered sequentially in any order.
3, the first member 14 and the third member may all be laminated and bonded at one time.

[0039]

EXAMPLES The present invention will be specifically described below with reference to examples, but the present invention is not limited to the scope of these examples. Measurement, preparation of each material, examples, etc.
The irradiation means and method are as follows. In the following examples, "part" indicating the unit of quantity represents "part by weight" unless otherwise specified. <Measurement of Viscosity> The viscosity was measured at room temperature (24 ± 1 ° C.) using a VM-100A type vibration viscometer manufactured by Yamaichi Electronics Co., Ltd.

<Measurement of Tensile Elastic Modulus and Elongation at Break> [Preparation of Sample] A polypropylene sheet was coated with the energy ray-curable composition and irradiated with ultraviolet rays for 60 seconds. A 100 μm-cured sheet was prepared and cut into strips with a width of 10 mm and a length of 100 mm to prepare a sample for a tensile test. The sample was left standing in a room at a temperature of 24 ± 1 ° C. and a humidity of 55 ± 5% for 16 hours or more before measurement. I served. [Measurement] As a tensile tester, "Strograph V1-C" manufactured by Toyo Seiki Seisaku-sho, Ltd. is used, and the temperature is 24 ± 1 ° C. and the humidity is 55 ± 5%.
Distance between grips 80mm, pulling speed 20mm in atmosphere
It was measured in minutes.

<Preparation of energy ray-curable composition> The method for preparing the energy ray-curable composition used in the examples is shown below. [Preparation of energy ray curable composition [e1]] 10 parts of "Unidick V4263" (trifunctional urethane acrylate oligomer manufactured by Dainippon Ink and Chemicals, Inc.),
70 parts of "R-684" (dicyclopentanyl diacrylate manufactured by Nippon Kayaku Co., Ltd.) and "N-177E" [nonylphenoxy polyethylene glycol (n = 17) acrylate manufactured by Dai-ichi Kogyo Seiyaku Co., Ltd.] 20 parts, 5 parts of "Irgacure 184" (1-hydroxycyclohexyl phenyl ketone manufactured by Ciba Geigy) as an ultraviolet polymerization initiator, and 2,4-diphenyl-4-methyl-1-pentene (Kanto Chemical Co., Inc.) as a polymerization retarder. Energy ray curable composition [e1]
Was prepared. The cured product of the energy ray-curable composition (e1) has a tensile modulus of elasticity of 1160 (MPa) and elongation at break of 7.6.
(%)Met.

[Energy ray curable resin composition [e2]
Preparation] [Unidick V4263] 40 parts and "Sartomer C2000" 40 parts as a cross-linking polymerizable energy ray-curable compound, "N-177E" 20 parts as an amphiphilic polymerizable compound, a photopolymerization initiator 5 parts of "IRGACURE 184" and 0.5 parts of 2,4-diphenyl-4-methyl-1-pentene (manufactured by Kanto Kagaku Co., Ltd.) as a polymerization retarder are uniformly mixed to cure with energy rays. Sex composition [e2] was prepared. The energy ray-curable composition [e2] had a viscosity of 4900 mPa · s. Further, the cured product of the energy ray-curable composition (e2) has a tensile elastic modulus of 265 (MPa) and an elongation at break of 8.0.
(%)Met.

<Irradiation with active energy rays> Ultraviolet rays were used as the active energy rays. Using a multi-light 200 type light source unit manufactured by Ushio Electric Co., Ltd., ultraviolet rays having an intensity at 365 nm of 50 mW / cm ² were irradiated in a nitrogen atmosphere.

<Example 1> [Preparation of second member 13] Polystyrene ("Dick Styrene XC-52" manufactured by Dainippon Ink and Chemicals, Inc.
0 ") is applied to the support 3 using a flat plate of 5 cm × 2.5 cm × 3 mm and the energy ray-curable composition [e1] is applied using a bar coater of 127 μm, and ultraviolet rays are applied to the entire surface of the support 10 It was irradiated for a second to form a first resin layer 4 having a thickness of about 100 μm. Then, 12 on the first resin layer 4
The energy ray-curable composition [e1] is applied using a 7 μm bar coater to form a coating film to be the second resin layer 6. Then, using a photomask, the portion other than the portion constituting the linear defect portion having a width of 150 μm to be the first channel 5 shown in FIG. The second resin layer 6 is cured. In addition, the unirradiated portion of the uncured energy ray-curable composition [e1] is 5
It was washed and removed with a 0% ethanol aqueous solution to penetrate the front and back surfaces of the second resin layer 6 to form the first flow path 5 having a linear defect in a plan view.

Next, as a temporary support (not shown), a 30 μm-thick polypropylene sheet (“biaxially oriented polypropylene film“ Taiko ”FOR No. 30” manufactured by Nimura Chemical Co., Ltd.) was applied with energy rays. Curable composition [e
2] is applied using a 50 μm bar coater. Then, using a photomask, a width 10 that encloses a portion to be the tongue-shaped suction side check valve 9 of 600 μm × 600 μm on three sides.
The portion other than the portion to be the 0 μm U-shaped defect portion 8 is irradiated with ultraviolet rays for 3 seconds to be semi-cured, and the uncured energy ray curable composition of the unirradiated portion is formed in the same manner as in the case of the second resin layer 6. The substance was removed to obtain a semi-cured third resin layer 7 having a thickness of about 34 μm, in which the suction side check valve 9 was formed. further,
Only the suction side check valve 9 portion was irradiated with ultraviolet rays for 10 seconds using a photomask to make only the suction side check valve 9 portion non-adhesive. Position the third resin layer 7 together with the temporary support on the second resin layer 6 so that one end of the linear defective portion (first flow path 5) comes to the center of the suction side check valve 9. Laminate together. In that state, the third resin layer 7 is irradiated with ultraviolet rays for 10 seconds.
Was further cured to adhere to the second resin layer 6, and the temporary support was peeled off from the third resin layer 7 with a stream of water. Furthermore, in the same manner, the energy ray-curable composition [e1],
1 mm x 1 to be the working space for pump chamber 11 and check valve 9
mm rectangular defect and the width of 150μ connected to it
A second member 13 made of a fourth resin layer (13) having a thickness of about 100 μm and having a linear defect portion (12) of m is formed, and the suction side check valve 9 is a rectangle of the fourth resin layer (13). Missing part (1
The laminate was laminated and adhered on the third resin layer 7 by aligning the positions so as to come to the center of 1), and a laminate having the second member 13 composed of the fourth resin layer (13) as the uppermost layer was formed.

[Preparation and Adhesion of First Member 14] Second Member 1
50 μm of the energy ray-curable composition [e2] on the same temporary support (not shown) used for the preparation of 3 above.
Coating using a bar coater of 600μm x 600μ
m tongue-shaped outflow-side check valve 17 is irradiated with ultraviolet rays for 3 seconds to a portion other than a portion to be a U-shaped defect portion 18 having a width of 100 μm around the portion where the third resin layer is formed. 7
In the same manner as in the case of 1., the uncured energy ray-curable composition in the unirradiated portion is removed, and the discharge side check valve 17 is formed. The member 14 was formed on the support 3. This first member 1
4, the discharge-side check valve 17 is irradiated with ultraviolet rays for 10 seconds using a photomask to make the discharge-side check valve 17 non-adhesive, and then the first member 14 is temporarily used as a support. The layers are laminated on the second member 13 so that the ends of the linear defective portions (12) come to the center of the outflow-side check valve 17, and then ultraviolet rays are irradiated for 30 seconds in that state. The curing of all the resin layers was promoted to bond the second member 13 and the first member 14, and then the temporary support was peeled off with a water stream. By this step, the rectangular defective portion was used as the pump chamber 11, and the portion of the first member 14 facing the pump chamber 11 was used as the diaphragm 16. After that, the first member 14, the second member 13, and the third resin layer 7 are drilled with a through hole 14a having a diameter of 2 mm,
3a, 7a are opened to open these through holes 14a, 13a, 7
Example 1 having a configuration in which a communicates with the other end of the first flow path 5
Microfluidic device 1 (No. 1) was obtained.

[Liquid Transfer Test] The microfluidic device No. 1 according to Example 1 was used. 1 with the first member 14 on top,
Distilled water was injected into the flow path using a microsyringe into the through holes 14a, 13a, and 7a, and the diaphragm 16 was periodically pressed from above the first member 14.
a, 13a, 7a, the first flow path 5, the suction side check valve 9 having a U-shaped missing portion, the rectangular pump chamber 11, the second flow path 12
After that, it flowed out from the discharge-side check valve 17 composed of a U-shaped defective portion. When you stop the periodic compression of the diaphragm,
Water movement stopped in that state.

Example 2 [Production of Micro Liquid Device] The second resin layer 7 was not formed, but the second member 13 was formed directly on the second resin layer 6.
Otherwise, the microfluidic device 1 (N
o. 2) was obtained. Since the third resin layer 7 is omitted in the second embodiment, the suction side check valve 9 is not provided, and one end of the first flow path 5 of the second resin layer 6 is directly connected to the pump chamber 11. It faces the center. [Liquid Transfer Test] Microfluidic device No. 3 according to the second embodiment. When a liquid feeding test similar to that of Example 1 was performed using No. 2, the same results as in Example 1 were obtained except that the pulsation on the suction side was large and the outflow rate was small.

[0049]

EFFECTS OF THE INVENTION The microfluidic device of the present invention has a simple structure and is easy to manufacture, so that the productivity is high and the microfluidic device can be inexpensively supplied. Therefore, it is suitable for a disposable type microfluidic device. Moreover, piping and wiring for fluid transfer are not required, and the driving method and driving mechanism are simple, and a large number of parallel operations are easy.

[Brief description of drawings]

FIG. 1 is an exploded perspective view showing a configuration of a microfluidic device according to an embodiment of the present invention.

FIG. 2 is a plan view of essential parts showing a first modification of the configuration of the other end of the second flow path and the discharge-side check valve of the microfluidic device shown in FIG.

FIG. 3 is a plan view of a principal part showing a second modification of the configuration of the other end of the second flow path of the microfluidic device and the discharge-side check valve as in FIG. 2.

FIG. 4 is a plan view of essential parts showing a third modification of the configuration of the other end of the second flow path and the discharge-side check valve of the microfluidic device.

FIG. 5 is a plan view of essential parts showing a fourth modification of the configuration of the other end of the second flow path and the discharge-side check valve of the microfluidic device.

FIG. 6 is a plan view of essential parts showing a fifth modification of the configuration of the other end of the second flow path and the discharge-side check valve of the microfluidic device.

[Explanation of symbols]

1 Microfluidic device 3 support 4 First resin layer (second member) 5 First flow path (flow path) 6 Second resin layer (second member) 7 Third resin layer (second member) 9 Suction side check valve 11 pump room 12 Second channel (channel) 13 Second member 14 First member 16 diaphragm 17 Discharge side check valve

Claims (8)

[Claims] 1. A microfluidic device comprising a sheet-shaped first member provided with a diaphragm and a valve. 2. The first member is laminated by being bonded to a second member, and the diaphragm and the valve have a flow path provided in a bonding surface between the first member and the second member or in the second member. The microfluidic device according to claim 1, which is in communication with each other. 3. A diaphragm type pump mechanism comprising a capillary flow path, a pump chamber connected to the flow path, a diaphragm facing the pump chamber, and a check valve provided in the flow path. A microfluidic device having a structure in which a sheet-shaped first member is laminated and adhered to a second member, wherein the flow path is a defect portion provided in the second member or the first member and The pump chamber is formed by a defective portion provided between the second members, the pump chamber is formed by the defective portion of the second member or the defective portion of the second member and the first member, and the diaphragm faces the pump chamber. A microfluidic device, wherein the check valve is formed in a portion of the first member, and the check valve is formed in a portion different from the diaphragm of the first member. 4. The cross-sectional area of the capillary flow path is 1 × 10.
^-12 microfluidic device of claim 3 wherein ^{m 2 ~1 × 10 -6 m 2} . 5. The area of the diaphragm is 1 × 10 ⁻¹⁰
The microfluidic device according to claim 3, wherein the microfluidic device has a size of m ² to 1 × 10 ⁻⁵ m ² . 6. The area of the check valve is from 1 × 10 ⁻¹⁰ m ² to
The microfluidic device according to claim 3, which has a size of 1 × 10 ⁻⁵ m ² . 7. The tensile elastic modulus of the first member is 0.1M.
It is made of a material that is Pa to 10 GPa, has a thickness of 1 to 1000 μm, and has a “tensile elastic modulus × thickness”.
7. The microfluidic device according to claim 3, wherein the value of is in the range of 1 × 10 ^{−6 to} 3 × 10 ⁻² MPa · m. 8. The microfluidic device according to claim 3, wherein the second member is a plate-shaped or sheet-shaped member.