JP4638249B2 - Microvalve flow rate adjustment method - Google Patents

Description

  The present invention relates to a microvalve flow rate adjustment method for transporting a fluid by controlling the stop, communication, etc. of a fluid flow in a micro flow channel in a micro total analysis system.

  Recently, there is a great need for technology to diagnose and analyze at low cost in the field, such as bedside diagnosis in the vicinity of patients, monitoring of environmental pollutants in the air, water and soil, and food safety inspection. It is getting higher.

  For example, if an analysis that previously required an expensive and large device could be replaced with a portable small analyzer, a practitioner could install and use an analyzer that could only be installed in a large hospital, The diagnosis result can be easily and quickly fed back to the patient.

  In addition, the elderly's health index is measured by the elderly's family, and the health index value is managed at home, or it is regularly transmitted to the hospital and managed at the hospital, thereby improving the home medical environment. Become.

  Moreover, if environmental pollutants such as environmental hormones and dioxins can be easily measured without using an expensive and large apparatus, environmental diagnosis can be performed easily and inexpensively. Furthermore, if environmental pollutants can be analyzed on-site using a small portable analyzer, a more detailed safety environment can be provided.

  In order to perform such measurement easily, a fine channel, an infusion device, a reaction vessel, an electrophoresis column, a membrane separation mechanism, a fluid chromatography column, capillary gas chromatography (CGC), induction type in or on the substrate Research on micro total analysis systems with built-in plasma (ICP), mass spectrometer (MS), electrochemical measurement equipment, etc. has been actively conducted, and research on microvalves for opening and closing microchannels and adjusting flow rate. It is also made actively.

For example, a member (B) having a thickness of 0.5 to 500 μm is bonded to the surface of the member (A) having a groove on the surface, and the groove of the member (A) and the member (B) A capillary channel having a width of 1 to 1000 μm and a height of 1 to 1000 μm is formed, and the width is 0.5 to 100 times the width of the capillary channel in the middle of the channel, and the maximum height of the gap portion A microfluidic device in which a void portion having a ratio of thickness / maximum width of 1 or less is formed, wherein (i) at least the void portion periphery of the member (A) has a tensile elastic modulus of 0.1 MPa or more and less than 700 MPa (Ii) at least the periphery of the gap of the member (B) is formed of a material having a tensile elastic modulus in the range of 0.7 to 10 GPa and has a thickness of 0.5 to 500 μm. Select the gap of the microfluidic device from the member (B) side Therefore, there is a microfluidic device flow rate adjustment method (see, for example, Patent Document 1) that reversibly reduces the cross-sectional area of the void portion in the microfluidic device and adjusts the flow rate of fluid passing through the void portion. Proposed.
JP 2002-219697 A

  In the microfluidic device flow rate adjustment method, mechanical pressure is applied to the gap in the microfluidic device from the outside of the microfluidic device with a jig such as a pliers to reversibly reduce the cross-sectional area of the gap. Therefore, the flow rate of the fluid passing through the gap is adjusted, and it is impossible to adjust the flow rate of a small amount of fluid, and it is impossible to put it to practical use. Further, when the gap portion does not deform as designed, for example, when the material strength varies during mass production or the gap portion is poorly formed, there is a problem that the valve does not close.

  In view of the above-described drawbacks, an object of the present invention is to provide a microvalve flow rate adjustment method capable of controlling the flow of fluid in a microchannel with a simple structure that can be easily incorporated into a micro total analysis system. There is.

According to a first aspect of the present invention, there is provided a microvalve flow rate adjustment method in which a valve chamber having a first opening for fluid injection and discharge and a second opening for fluid injection and discharge formed in a lower wall is formed in a plate shape. The valve body is always stored through the gap so as to cover the second opening for fluid injection and discharge , and one end of the valve body is fixed to the side wall of the valve chamber, and the other end is the free end. A through-hole a for a first plate-like substrate and a valve chamber is punched out, and a plate-like valve body having at least one free end is fixed in the through-hole a. The first spacer, the second spacer from which the through hole b for the valve chamber is punched, and the second plate-like substrate from which the second opening for fluid injection and drainage is punched, The through holes b and the second opening for fluid injection and drainage are stacked in this order so that they are in a straight line. The micro-hole in which at least one spacer of the first spacer or the second spacer is punched with a through hole for fluid injection and discharge that communicates with the side wall from the through hole a and / or b for the valve chamber of the spacer. A piezo element is installed on the first plate substrate of the valve so as to be substantially in line with the valve body, the through hole b, and the second opening for injecting and discharging the fluid, and the first plate substrate is mounted with the piezo element. By pressing, the valve body is pressed in the direction of the second plate substrate, and the second opening for fluid injection / discharge is closed.

  A microvalve flow rate adjustment method according to claim 1 will be described with reference to the drawings. FIG. 1 is a sectional view showing an example of a microvalve used in the microvalve flow rate adjusting method according to the first aspect, and FIG. 2 is a plan view.

  In the figure, reference numeral 1 denotes a micro total analysis system, and a valve chamber 2 having a rectangular shape in plan view is formed in the micro total analysis system 1. A second opening 4 for fluid injection and drainage is formed in the vicinity of the approximate center of the lower wall 21 of the valve chamber 2, and communicates with the outside of the micro total analysis system 1 or other parts of the micro total analysis system.

  In the valve chamber 2, one end (right end in FIG. 1) is fixed to the side end of the valve chamber 2, and the other end (left end in FIG. 1) is a free end. A plate-like valve body 3 is accommodated so as to cover the fluid injection opening 4 via a gap.

The micro total analysis system 1 above the second opening 4 for fluid injection and drainage and the valve body 3 is provided with a piezo element 6, and the piezo element 6 uses the upper wall 22 of the valve chamber 2 as the lower wall 21. By pressing in the direction, the valve body 3 is pressed against the second opening 4 for fluid injection / drainage, and only the second opening 4 for fluid injection / drainage can be closed.

  In FIG. 1, a hole for piezo element installation is formed at a position where the piezo element 6 of the micro total analysis system 1 is to be installed, and the piezo element 6 is fitted and installed in the hole. .

  Reference numeral 5 denotes a first opening 5 for injecting and discharging the fluid provided at a position where the valve body 3 of the lower wall 21 of the valve chamber 2 does not exist. It communicates with other parts.

  Therefore, when the fluid is injected into the valve chamber 2 from the first opening 5 for injecting and discharging the fluid, it is discharged from the second opening 4 for injecting and discharging the fluid through the bottom of the valve body 3 and is used for injecting and discharging the fluid. When the fluid is injected from the second opening 4 under the valve body 3 into the valve chamber 2, the fluid is discharged from the first opening 5 for fluid injection / discharge.

  In order to stop the flow of the fluid, the piezo element 6 is operated and the upper wall 22 is pressed to press the valve body 3 against the second opening 4 for draining and draining the fluid, and the second for draining and draining the fluid. This is done by closing the opening 4. By operating the piezo element 6, the fluid injection is stopped by closing the second opening 4 for fluid injection and drainage, so that the fluid injection can be surely stopped when necessary.

  The shapes of the valve chamber 2 and the valve body 3 are not particularly limited, and examples thereof include a circle, an ellipse, a triangle, a square, a rectangle, a hexagon, and an oval. Further, the shapes of the fluid injection and discharge openings 4 and 5 are not particularly limited, and examples thereof include a circle, an ellipse, a triangle, a square, a rectangle, a hexagon, and an oval. However, since the diameter is fine, it is preferably formed by fine processing such as laser processing or machining or various precision molding techniques, and therefore the cross-sectional shape is preferably circular.

  The plate-like valve element only needs to be accommodated so as to always cover the second opening for injecting and discharging the fluid through the gap, and one end of the plate-like valve element is fixed to the side wall of the valve chamber. It is preferable that the other end is a free end, but if the valve body is deformed by pressing with a piezo element and the second opening 4 for fluid injection and drainage can be closed, the valve body Most or all of the side walls may be fixed to the side walls of the valve chamber.

  The first opening 5 for fluid injection / discharge may be provided on the upper wall 22 or the side wall of the valve chamber 2. Needless to say, the second opening 4 for injecting and discharging the fluid and the first opening 5 for injecting and discharging the fluid may be connected to a fine flow path in the micro total analysis system 1.

The micro total analysis system is generally manufactured by laminating a plate-like substrate and a spacer and forming a fine channel, a microvalve, a reaction vessel, a measurement vessel, etc. between the plate-like substrates, and is used in the present invention. that microvalves also being produced by laminating a plate-like substrate and the spacer.

FIG. 3 is an exploded view showing an example of a microvalve used in the microvalve flow rate adjusting method according to claim 1 .

  In the figure, reference numeral 7 denotes a first plate-like substrate that covers the valve chamber through hole a23 and the fluid discharge through hole 51, and is provided with a hole 61 for piezo element installation.

  8 is thinner than the first plate-like substrate, leaving the plate-like valve body 3 having one end portion which is a free end, and the end of the substantially rectangular through hole a23 for the valve chamber and the through hole a23 for the valve chamber. This is a first spacer in which a through hole 51 for fluid injection and discharge that communicates with the outside from the portion is punched.

  9 is thinner than the first plate-like substrate 7, and a substantially rectangular through hole b24 for the valve chamber and a through hole 52 for fluid injection and discharge communicating with the outside from the end of the through hole b24 for the valve chamber are punched out. The second spacer.

  The through hole a23 for the valve chamber and the through hole b24 for the valve chamber have the same size, and when the first spacer 8 and the second spacer 9 are stacked, the through hole a23 for the valve chamber and the through hole for the valve chamber It is punched so that the through-hole b24 is overlapped.

  Further, the through hole 51 for fluid injection / discharge and the through hole 52 for fluid injection / discharge have the same size, and when the first spacer 8 and the second spacer 9 are stacked, the through hole 51 for fluid injection / discharge. And a through hole 52 for fluid injection / discharge are overlapped and punched so that a first opening 5 for fluid injection / discharge is formed.

  Further, when the first plate-like substrate 7 and the second spacer 9 are laminated, the hole 61 for installing the piezoelectric element and the valve body 3 are punched out so as to be substantially in a straight line.

  Reference numeral 10 denotes a second plate-like substrate in which a substantially circular opening 4 for fluid injection / drainage is punched. When the second plate-like substrate 10 and the second spacer 9 are laminated, an opening for fluid injection / drainage is provided. The part 4 is punched out so as to be located under the valve body 3.

  When the first plate-like substrate 7, the first spacer 8, the second spacer 9, and the second plate-like substrate 10 are laminated in this order, the valve chamber through hole a23 and the valve chamber through hole b24 overlap each other. Then, the valve chamber 2 is formed by being surrounded by the first plate-like substrate 7 and the second plate-like substrate 10, and a plate-like valve body 3 having one free end in the valve chamber 2 is formed. Fixed.

  In addition, the fluid inflow / discharge through-hole 51 and the fluid inflow / discharge through-hole 52 are overlapped and surrounded by the first plate-like substrate 7 and the second plate-like substrate 10, and the first fluid inflow / discharge-first. The opening 5 is formed.

  Further, the hole 61 for installing the piezo element, the valve body 3 and the second opening 4 for fluid injection / drainage are laminated so as to be substantially in a straight line. Accordingly, the fluid flows through the valve chamber 2 from the second opening 4 for fluid injection / drainage of the second plate-shaped substrate 10 toward the first opening 5 for fluid injection / discharge or fluid injection / discharge. A microvalve is formed through which the fluid flows from the first opening 5 to the second opening 4 for fluid injection and drainage of the second plate substrate 10 through the valve chamber 2.

  In order to stop the flow of the fluid, the piezo element 6 is installed in the hole 61 for piezo element installation, is operated, and the first plate-like substrate 7 is pressed, so that the valve body 3 is secondly inserted for fluid injection and drainage. And the second opening 4 for fluid injection and drainage may be closed. By operating the piezo element 4, the fluid flow can be stopped reliably when necessary because the fluid flow is stopped by closing the second opening 4 for fluid injection and drainage.

  A third spacer identical to the second spacer 9 is provided between the first plate substrate 7 and the first spacer 8 so that the valve body 3 can be freely deformed toward the first plate substrate 7 side. May be interposed.

According to a second aspect of the present invention, there is provided a microvalve flow rate adjustment method in which a valve chamber having a first opening for injecting and discharging fluid and a second opening for injecting and discharging fluid formed in a lower wall has a plate shape. The valve body is always stored through the gap so as to cover the second opening for fluid injection and discharge, and one end of the valve body is fixed to the side wall of the valve chamber, and the other end is the free end. a have been made microvalve, the first plate-shaped substrate, it punched through hole a of valve chamber, a plate-shaped valve body first end is free end to the through hole a is more fixed The first spacer, the second spacer from which the through hole b for the valve chamber is punched, the second opening portion for fluid injection / discharge and the first opening for fluid injection / discharge as many as the valve body The second plate-like substrate from which the part is punched is a second opening for each valve body, through-hole b and each fluid injection / discharge. Are arranged in this order on the first plate-like substrate of the microvalve so that each valve body and each second opening for fluid injection / discharge are in a substantially straight line. The piezo elements are installed and each valve element is pressed toward the second plate substrate by pressing the first plate substrate with each piezo element, and the second opening for injecting and discharging each fluid is closed. it shall be the feature of the that.

A microvalve flow rate adjustment method according to claim 2 will be described with reference to the drawings. FIG. 4 is an exploded view showing an example of a microvalve used in the microvalve flow rate adjusting method according to claim 2 .

  In the figure, reference numeral 7 denotes a first plate-like substrate that covers the valve chamber through hole a23, and has two piezo element mounting holes 61 and 62 formed therein.

  Reference numeral 8 is thinner than the first plate-like substrate 7, and a substantially rectangular valve chamber through-hole a <b> 23 is punched out, leaving plate-like valve bodies 31 and 32, one end of which is a free end. It is a spacer.

  When the first plate-like substrate 7 and the first spacer 8 are laminated, the piezo element installation hole 61 and the valve body 31 are substantially in a straight line, and the piezo element installation hole 62 and the valve body 32 are in a substantially straight line. So that it is punched out.

  Reference numeral 9 denotes a second spacer which is thinner than the first plate-like substrate 7 and has a substantially rectangular valve chamber through hole b24 punched out. The valve chamber through hole a23 and the valve chamber through hole b24 are provided. Are the same size, and when the first spacer 8 and the second spacer 9 are laminated, the through hole a23 for the valve chamber and the through hole b24 for the valve chamber are punched so as to overlap each other.

  Reference numeral 10 denotes a second plate-like substrate in which the substantially circular second openings 41 and 42 for fluid injection / drainage and the first opening 5 for fluid injection / discharge are punched. When the substrate 10, the first spacer 8, and the second spacer 9 are stacked, the second opening 41 for fluid injection / drainage is positioned below the valve body 31, and the second opening 42 for fluid injection / drainage. Is located below the valve body 32, and the first opening 5 for fluid injection / discharge is punched out so as to communicate with the through hole b24 for the valve chamber at a position where the valve body does not exist.

  When the first plate-like substrate 7, the first spacer 8, the second spacer 9, and the second plate-like substrate 10 are laminated in this order, the through hole a23 for the valve chamber and the through hole b24 for the valve chamber become the first. A valve chamber 2 is formed by being surrounded by one plate-like substrate 7 and a second plate-like substrate 10, and plate-like valve bodies 31 and 32 having one end as a free end are fixed in the valve chamber 2. Is done.

  Also, the hole 61 for installing the piezo element, the valve body 31 and the second opening 41 for fluid injection / drainage are substantially in a straight line, and the hole 62 for installing the piezo element, the valve body 32 and the second opening for fluid injection / drainage. Of the second plate-like substrate 10 through the valve chamber 2 from the second opening 41 for fluid injection and drainage of the second plate-like substrate 10. The fluid flows toward the first opening 5 for injecting and discharging, and the second plate substrate passes through the valve chamber 2 from the second opening 42 for injecting and discharging fluid of the second plate substrate 10. The fluid flows toward the first opening 5 for injecting and discharging the fluid 10 or the second opening 5 passing through the valve chamber 2 from the first opening 5 for injecting and discharging the fluid of the second plate substrate 10. Toward the second opening 41 for fluid injection / drainage of the plate-like substrate 10 and the second opening 42 for fluid injection / discharge. Body microvalve flow is formed.

  Therefore, by connecting the second opening 41 for fluid injection / drainage and the second opening 42 for fluid injection / drainage to different fluid sources, different fluids can be mixed and supplied at different mixing ratios. it can. Further, the fluid supplied from the first opening 5 for fluid injection / discharge is appropriately divided and supplied to the second opening 41 for fluid injection / drainage and the second opening 42 for fluid injection / drainage. You can also.

  Further, in order to stop the flow of the fluid, the piezo element is installed in the hole 61 or / and 62 for piezo element installation, is actuated, and the first plate-like substrate 7 is pressed, so that the valve element 31 or / and 32 is pressed into the second opening 41 or / and 42 for fluid injection and drainage, and the opening 41 or / and 42 for fluid injection is closed.

  By operating the piezo element installed in the hole 61 or / and 62 for piezo element installation, the second opening 41 or / and 42 for fluid injection and drainage is closed to stop the flow of fluid. The fluid flow can be reliably stopped when necessary. That is, the fluid flow direction can be freely controlled as described above by the operation of the piezo element. As a result, a function equivalent to a three-way valve was realized on a very small fluid element.

  In addition, the same 3rd as the 2nd spacer 9 is provided between the 1st plate-shaped board | substrate 7 and the 1st spacer 8 so that the valve bodies 31 and 32 can be freely deformed to the 1st plate-shaped board | substrate 7 side. A spacer may be interposed.

According to a third aspect of the present invention, there is provided a microvalve flow rate adjustment method comprising a plate-like shape in a valve chamber having a first opening for injecting and discharging fluid and a second opening for injecting and discharging fluid formed in a lower wall. The valve body is always stored through the gap so as to cover the second opening for fluid injection and discharge, and one end of the valve body is fixed to the side wall of the valve chamber, and the other end is the free end. a have been made microvalve, the first plate-shaped substrate, it punched through hole a of valve chamber, a plate-shaped valve body first end is free end to the through hole a is more fixed The first spacer, the second spacer in which the through hole b for the valve chamber is punched, and the second plate shape in which the same number of second openings for fluid injection and drainage as the valve body are punched The substrate is arranged in this order so that each valve body, the through hole b, and the second opening for each fluid injection and drainage are substantially in a straight line. The at least one spacer of the first spacer or the second spacer has a through hole for fluid injection and discharge that communicates with the side wall from the through hole a and / or b for the valve chamber of the spacer. A piezo element is placed on the first plate-like substrate of the microvalve that has been pulled out so as to be substantially in line with the valve body, the through hole b, and the second opening for fluid injection / discharge. presses the valve body to a second plate-shaped substrate direction by pressing the plate-like substrate, you characterized by closing the second opening of the fluid injection and expelling.

A method for adjusting the flow rate of the micro valve according to claim 3 will be described with reference to the drawings. FIG. 5 is an exploded view showing an example of a microvalve used in the microvalve flow rate adjusting method according to the third aspect .

  In the figure, reference numeral 7 denotes a first plate substrate that covers the through hole a23 for the valve chamber and the through hole 51 for discharging the fluid, and has three holes 61, 62, 63 for installing the piezoelectric elements. Has been.

  8 is thinner than the first plate-like substrate 7, leaving plate-like valve bodies 31, 32, 33 with one end being a free end, and a substantially rectangular through hole a 23 for a valve chamber and a valve chamber This is a first spacer in which a through hole 51 for fluid injection and discharge that communicates with the outside from the end of the through hole a23 is punched.

  When the first plate-like substrate 7 and the first spacer 8 are laminated, the piezoelectric element mounting hole 61 and the valve body 31, the piezoelectric element mounting hole 62 and the valve body 32, and the piezoelectric element mounting hole 63 and the valve. Each of the bodies 33 is punched out so as to be in a straight line.

  9 is thinner than the first plate-like substrate 7, and a substantially rectangular through hole b24 for the valve chamber and a through hole 52 for fluid injection and discharge communicating with the outside from the end of the through hole b24 for the valve chamber are punched out. The second spacer.

  The through hole a23 for the valve chamber and the through hole b24 for the valve chamber have the same size, and when the first spacer 8 and the second spacer 9 are stacked, the through hole a23 for the valve chamber and the through hole for the valve chamber It is punched so that the through-hole b24 is overlapped.

  Further, the through hole 51 for fluid injection / discharge and the through hole 52 for fluid injection / discharge have the same size, and when the first spacer 8 and the second spacer 9 are stacked, the through hole 51 for fluid injection / discharge. And through holes 52 for fluid injection / discharge are punched out so as to overlap each other.

  Reference numeral 10 denotes a second plate-like substrate in which second openings 41, 42, and 43 for substantially circular fluid injection and discharge are punched out. The second plate-like substrate 10, the first spacer 8, and the second When the two spacers 9 are stacked, the second opening 41 and the valve body 31 for fluid injection / discharge, the second opening 42 and the valve body 32 for fluid injection / discharge, and the second opening for fluid injection / discharge 43 and the valve body 33 are each punched out so as to be in a straight line.

  When the first plate-like substrate 7, the first spacer 8, the second spacer 9, and the second plate-like substrate 10 are stacked in this order, the through hole a23 for the valve chamber, the through hole a23 for the valve chamber, and the valve A through hole b24 for the chamber is overlapped, and the valve chamber 2 is formed by being surrounded by the first plate-like substrate 7 and the second plate-like substrate 10, and one end portion in the valve chamber 2 is a free end. A certain plate-like valve element 31, 32, 33 is fixed.

  Further, a through hole 51 for fluid injection / discharge, a through hole 52 for fluid injection / discharge, and a through hole 53 for fluid injection / discharge are overlapped and surrounded by the first plate substrate 7 and the second plate substrate 10. Thus, the first opening 5 for injecting and discharging the fluid is formed.

  Also, a piezo element mounting hole 61, a valve body 31, a second opening 41 for fluid injection / discharge, a piezo element mounting hole 62, a valve body 32, a second opening 43 for fluid injection / discharge, and The piezo element mounting hole 63, the valve body 33, and the second opening 43 for injecting and discharging the fluid are stacked so as to be substantially in a straight line.

  As a result, fluid flows from the second opening 41, 42, 43 for fluid injection / discharge of the second plate-like substrate 10 to the first opening 5 for fluid injection / discharge through the valve chamber 2. A microvalve is formed through which the fluid flows from the first opening 5 for flowing or discharging fluid to the second opening 41, 42, 43 for passing through the valve chamber 2 toward the second opening 41, 42, 43 for discharging and discharging fluid.

  Therefore, by connecting the second opening 41 for fluid injection and drainage, the second opening 42 for fluid injection and drainage, and the second opening 43 for fluid injection and drainage to different fluid sources, different fluids can be obtained. Mixing can be performed while changing the mixing ratio. Further, the fluid supplied from the first opening 5 for injecting and discharging the fluid is supplied with the second opening 41 for injecting and draining the fluid, the second opening 42 for injecting and draining the fluid, and the second opening for draining and injecting the fluid. It is also possible to divide and supply to the opening 43 appropriately.

  In order to stop the flow of the fluid, the piezo element is installed in the hole 61, 62 or / and 63 for piezo element installation, is actuated, and the first plate-like substrate 7 is pressed. The second opening 41, 42 or / and 43 for fluid injection / discharge is pressed to close the second opening 41, 42 or / and 43 for fluid injection / discharge.

  By actuating the piezo element, the second opening 41, 42 or / and 43 for injecting and discharging the fluid is closed to stop the flow of the fluid, so that the flow of the fluid is surely stopped when necessary. it can. That is, the flow direction of the fluid can be freely controlled as described above by the operation of the piezo element. This realized a function equivalent to that of a four-way valve on a very small fluid element.

  In addition, the same as the second spacer 9 is provided between the first plate substrate 7 and the first spacer 8 so that the valve bodies 31, 32, 33 can be freely deformed to the first plate substrate 7 side. A third spacer may be interposed.

  The valve bodies 31, 32 and 33 are formed by punching the second spacer 9, but a separate valve body may be prepared and one end thereof may be fixed in the valve chamber 2.

  In the above embodiment, a hole for piezo element installation is made in the first plate-like substrate, the installation position of the piezo element is specified, and the valve body is securely inserted into the second opening for liquid injection / discharge. Although being pressed, a pressure transmission member may be used so that the pressure of the piezoelectric element can be reliably transmitted to the valve body.

  The material for the plate substrate, spacer, and valve body is not particularly limited. For example, conventionally used inorganic materials such as glass, quartz, and silicon, thermoplastic resins, thermosetting resins, etc. Can be mentioned.

  The above-mentioned inorganic material has excellent accuracy, workability, etc. For example, if optical lithography technology widely used in semiconductor microfabrication technology is used, micron-order grooves and through holes can be freely formed on glass or silicon substrates. Can be formed.

  Examples of the thermoplastic resin include polyolefin resins, polystyrene resins, polylactic acid resins, polyacrylic resins, polycarbonate resins, and the like, and polyolefin resins that are thermoplastic resins having acid resistance and alkali resistance. And polyacrylic resins are preferred.

  In addition, since the precursor is in a liquid state, the thermosetting resin has the advantage of transferring the shape of the transfer mold more faithfully, and can be advantageously used because it exhibits a low linear expansion coefficient and a low molding shrinkage ratio. As such a thermosetting resin, an epoxy resin can be advantageously used from the viewpoint of cost and easy handling.

The size of the plate-like substrate is not particularly limited, but if it becomes larger, the handling property as a micro total analysis system is lowered, so that it is preferably 400 cm ² or less, and the thickness is preferably 0.01 to 10 mm. Further, the first substrate and the second substrate may be thickened to give strength, and the spacer may be formed of a thin film, and the thickness of the spacer is preferably 1 to 100 μm.

The cross-sectional areas of the second opening 4 for injecting and discharging fluid, the first opening 5 for injecting and discharging fluid, and the like are not particularly limited. Then, since a lot of measurement samples are required, 0.01 μm ^{2 to 3} mm ² is preferable.

Also, the size of the valve chamber is not particularly limited, but if it becomes small, the valve performance deteriorates. If it becomes large, a large amount of measurement sample is required, so 1 μm ^{3 to 3} mm ³ is preferable.

  The flow control method configuration of the microvalve of the present invention is as described above, and the flow of the fluid in the microchannel can be controlled with a simple structure that can be easily incorporated into the micro total analysis system.

  Further, since the valve element is pressed against the liquid injection / discharge opening by the piezo element, a little energy can be pressed firmly and water can be surely stopped.

  Furthermore, by installing a plurality of piezo elements and valve bodies, different fluids can be mixed and supplied at different mixing ratios with simple control, and the supplied fluids can be supplied in an appropriately divided manner. .

It is an exploded view which shows an example of the microvalve used with the flow control method of the microvalve of Claim 1. It is a top view which shows an example of the microvalve used with the flow volume adjustment method of the microvalve of Claim 1. It is an exploded view which shows an example of the microvalve used with the flow control method of the microvalve of Claim 1 . It is an exploded view which shows an example of the microvalve used with the flow control method of the microvalve of Claim 2 . It is an exploded view which shows an example of the microvalve used with the flow control method of the microvalve of Claim 3 .

1 Micro total analysis system 2 Valve chamber 21 Lower wall 22 Upper wall 23 Through hole a for valve chamber
24 Through hole b for valve chamber
3, 31, 32, 33 Valve body 4, 41, 42, 43 Second opening for fluid injection / discharge 5 First opening for fluid injection / discharge 51, 52, 53 Through hole for fluid injection / discharge 6 Piezo elements 61, 62, 63 Holes for installing piezo elements 7 First plate substrate 8 First spacer 9 Second spacer 10 Second plate substrate 11 Third plate substrate 12 Pressure transmission member 13 Pressure transmission One end of the member 14 The other end of the pressure transmitting member

Claims (4)

A plate-like valve body always injects and discharges fluid via a gap in a valve chamber having a first opening for injecting and discharging fluid and a second opening for injecting and discharging fluid formed in the lower wall. A microvalve that is stored so as to cover the second opening, and that one end of the valve body is fixed to the side wall of the valve chamber, and the other end is a free end,
A first spacer in which a through hole a for a first plate-like substrate and a valve chamber is punched and a plate-like valve body having at least one free end is fixed in the through-hole a, a first spacer, a valve chamber The second spacer from which the through hole b for punching is punched and the second plate-like substrate from which the second opening for fluid injection drainage is punched are the valve body, the through hole b and the fluid injection drainage The second openings are stacked in this order so as to be substantially in a straight line, and at least one spacer of the first spacer or the second spacer is provided with a through hole a for the valve chamber of the spacer and / or The first plate-like substrate of the microvalve in which the through hole for fluid injection / discharge communicating with the side wall from b is punched is substantially aligned with the valve body, the through hole b, and the second opening for fluid injection / discharge. A piezo element is installed so that the first plate-like substrate is attached with the piezo element. Valve element is pressed against the second plate-like substrate direction, the flow rate adjusting method of a microvalve, characterized in that for closing the second opening of the fluid injection and expelling by pressure. A plate-like valve body always injects and discharges fluid via a gap in a valve chamber having a first opening for injecting and discharging fluid and a second opening for injecting and discharging fluid formed in the lower wall. A microvalve that is stored so as to cover the second opening, and that one end of the valve body is fixed to the side wall of the valve chamber, and the other end is a free end,
A first spacer, a valve chamber, in which a through hole a for a valve chamber is punched, and a plurality of plate-like valve bodies each having a free end are fixed in the through hole a The second spacer in which the through-hole b for punching is punched, the second opening for injecting and discharging the same number of the valve bodies, and the second opening for injecting and discharging the fluid Each of the plate-like substrates is stacked on the first plate-like substrate of the microvalves stacked in this order so that each valve body, the through hole b, and each second opening for fluid injection / discharge are in a substantially straight line. A plurality of piezo elements are installed so that the valve body and the second opening for injecting and discharging each fluid are substantially in line with each other, and each piezo element is pressed by pressing the first plate-like substrate. Pressing in the direction of the second plate substrate closes the second opening for injecting and discharging each fluid. Flow rate adjustment method of Robarubu. A plate-like valve body always injects and discharges fluid via a gap in a valve chamber having a first opening for injecting and discharging fluid and a second opening for injecting and discharging fluid formed in the lower wall. A microvalve that is stored so as to cover the second opening, and that one end of the valve body is fixed to the side wall of the valve chamber, and the other end is a free end,
A first spacer, a valve chamber, in which a through hole a for a valve chamber is punched, and a plurality of plate-like valve bodies each having a free end are fixed in the through hole a The second spacer from which the through-hole b for punching is punched and the second plate-like substrate from which the same number of second openings for fluid injection and drainage as the valve body are punched are formed in each valve body and through-hole. b and the second openings for fluid injection and drainage are stacked in this order so that they are in a substantially straight line, and at least one spacer of the first spacer or the second spacer is connected to the valve chamber of the spacer. The first plate-like substrate of the microvalve in which the through hole for fluid injection and discharge communicating with the side wall from the through hole a and / or b for punching is formed on the first plate-like substrate of the microvalve. The piezo element is installed so as to be substantially in line with the opening of 2 and the first piezo element is used. Flow rate control method of a microvalve, characterized in that presses the valve element in the second plate-shaped substrate direction by pressing the plate-like substrate, to close the second opening for fluid injection discharge. 4. The microvalve flow rate adjustment method according to claim 1, wherein the first spacer has a through hole a for the valve chamber punched out, leaving a plate-like valve body.

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