JP2003137839A5 - - Google Patents
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- Publication number
- JP2003137839A5 JP2003137839A5 JP2001332995A JP2001332995A JP2003137839A5 JP 2003137839 A5 JP2003137839 A5 JP 2003137839A5 JP 2001332995 A JP2001332995 A JP 2001332995A JP 2001332995 A JP2001332995 A JP 2001332995A JP 2003137839 A5 JP2003137839 A5 JP 2003137839A5
- Authority
- JP
- Japan
- Prior art keywords
- formula
- group
- resist
- resist monomer
- lower alcohol
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000178 monomer Substances 0.000 claims 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims 4
- 125000000217 alkyl group Chemical group 0.000 claims 2
- 125000004432 carbon atom Chemical group C* 0.000 claims 2
- 238000005886 esterification reaction Methods 0.000 claims 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims 2
- -1 hydroxyethyl group Chemical group 0.000 claims 2
- 125000004029 hydroxymethyl group Chemical group [H]OC([H])([H])* 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims 2
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 claims 1
- HFBMWMNUJJDEQZ-UHFFFAOYSA-N acryloyl chloride Chemical compound ClC(=O)C=C HFBMWMNUJJDEQZ-UHFFFAOYSA-N 0.000 claims 1
- 239000012295 chemical reaction liquid Substances 0.000 claims 1
- 239000012141 concentrate Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000002798 polar solvent Substances 0.000 claims 1
- 239000002904 solvent Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001332995A JP4080723B2 (ja) | 2001-10-30 | 2001-10-30 | レジスト用モノマーの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001332995A JP4080723B2 (ja) | 2001-10-30 | 2001-10-30 | レジスト用モノマーの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003137839A JP2003137839A (ja) | 2003-05-14 |
| JP2003137839A5 true JP2003137839A5 (enExample) | 2005-06-30 |
| JP4080723B2 JP4080723B2 (ja) | 2008-04-23 |
Family
ID=19148335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001332995A Expired - Lifetime JP4080723B2 (ja) | 2001-10-30 | 2001-10-30 | レジスト用モノマーの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4080723B2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008106084A (ja) | 2006-10-23 | 2008-05-08 | Maruzen Petrochem Co Ltd | 半導体リソグラフィー用共重合体、組成物並びに該共重合体の製造方法 |
| JP5430857B2 (ja) * | 2008-02-01 | 2014-03-05 | 株式会社ダイセル | 有機化合物の精製方法 |
| JP5939009B2 (ja) * | 2012-04-17 | 2016-06-22 | 三菱レイヨン株式会社 | （メタ）アクリル酸エステルの評価方法及びリソグラフィー用共重合体の製造方法 |
| WO2017147040A1 (en) | 2016-02-25 | 2017-08-31 | 3M Innovative Properties Company | Methods of making (alk)acrylic esters in flow reactors |
-
2001
- 2001-10-30 JP JP2001332995A patent/JP4080723B2/ja not_active Expired - Lifetime
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