JP2003136386A5 - - Google Patents

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Publication number
JP2003136386A5
JP2003136386A5 JP2001338789A JP2001338789A JP2003136386A5 JP 2003136386 A5 JP2003136386 A5 JP 2003136386A5 JP 2001338789 A JP2001338789 A JP 2001338789A JP 2001338789 A JP2001338789 A JP 2001338789A JP 2003136386 A5 JP2003136386 A5 JP 2003136386A5
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JP
Japan
Prior art keywords
needle
recognizing
polisher
polishing tool
load
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001338789A
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English (en)
Japanese (ja)
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JP2003136386A (ja
JP3895584B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2001338789A priority Critical patent/JP3895584B2/ja
Priority claimed from JP2001338789A external-priority patent/JP3895584B2/ja
Publication of JP2003136386A publication Critical patent/JP2003136386A/ja
Publication of JP2003136386A5 publication Critical patent/JP2003136386A5/ja
Application granted granted Critical
Publication of JP3895584B2 publication Critical patent/JP3895584B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2001338789A 2001-11-02 2001-11-02 針研磨具の認識方法及び針研磨具の認識装置 Expired - Lifetime JP3895584B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001338789A JP3895584B2 (ja) 2001-11-02 2001-11-02 針研磨具の認識方法及び針研磨具の認識装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001338789A JP3895584B2 (ja) 2001-11-02 2001-11-02 針研磨具の認識方法及び針研磨具の認識装置

Publications (3)

Publication Number Publication Date
JP2003136386A JP2003136386A (ja) 2003-05-14
JP2003136386A5 true JP2003136386A5 (enExample) 2005-06-09
JP3895584B2 JP3895584B2 (ja) 2007-03-22

Family

ID=19153230

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001338789A Expired - Lifetime JP3895584B2 (ja) 2001-11-02 2001-11-02 針研磨具の認識方法及び針研磨具の認識装置

Country Status (1)

Country Link
JP (1) JP3895584B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5122151B2 (ja) * 2007-01-26 2013-01-16 東京エレクトロン株式会社 ステージ機構
JP5191312B2 (ja) * 2008-08-25 2013-05-08 東京エレクトロン株式会社 プローブの研磨方法、プローブ研磨用プログラム及びプローブ装置
JP6262547B2 (ja) 2014-01-22 2018-01-17 東京エレクトロン株式会社 プローバ及びプローブカードの針先研磨装置

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